JPH02297011A - Alignment method - Google Patents

Abstract

PURPOSE:To prevent a work to be fed from being detached from a detection range and to reduce a processing time by deriving in advance an average value of data in the past of the misalignment quantity of the work, and correcting a material feeding position of the work by its average value portion. CONSTITUTION:First of all, a counter for counting the number of times is reset. When as a result of detection as to whether a work exists or not, it exists, rough positioning is executed. Whether the counter is larger than 2 or not is compared, and in the case of <=2, the work is moved to a material feeding position 22. In the case it is larger than 2, an average rule (for instance, an average value of the misalignment quantity of alignment marks 1-31, 2-32) is derived from misalignment data in the past which are stored, and the material feeding position 22 is corrected by this average value portion. After the material feeding position is corrected, the work is moved to a material feeding position 41. Subsequently, the alignment mark in the material feeding position is detected and the misalignment quantity is calculated. The calculated misalignment quantity is stored and the misalignment is corrected. Next, '1' is added to the counter, and the processing is returned to the detection as to whether the work exists or not and repeated. In such a way, the center of a variance distribution of the misalignment can be brought close to the center 21 of a detection range 23.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an alignment method for a machine that requires position correction of a workpiece.

[Summary of the Invention] The present invention provides an alignment method for correcting the position of a workpiece by averaging past positional deviation amount data [conventional technique v #
] The workpiece is mainly roughly positioned mechanically using external shape standards, and then moved by a predetermined amount to the material supply position where the amount of positional deviation is detected, and then the position is corrected by detecting the amount of positional deviation. Ta.

[Problems to be solved by the invention] However, with the above-mentioned conventional technology, there are variations in the accuracy of the workpiece shape and shape, assembly errors of the device, and variations due to the coarse positioning mechanism of the workpiece, etc., and it is difficult to accurately perform machine tooling. It is difficult to set and may fall outside the detection range. In such a case, the operator must make corrections, which poses a problem in that the time involved in the alignment process K increases. SUMMARY OF THE INVENTION The present invention is intended to solve this problem, and aims to perform alignment stably by preventing deviation from the detection range, and further reduce processing time.

[Means for Solving the Problems] The alignment method of the present invention detects the amount of positional deviation of a fed workpiece and corrects the position thereof, by calculating the average value of past data of the amount of positional deviation. The method is characterized in that the feeding position of the workpiece is corrected by the average value.

[Function] According to the above configuration of the present invention, the position of the workpiece fed to the positional deviation detection position is such that the center of its dispersion distribution approaches the center of the positional deviation detection range.

[Example] FIG. 1 is a workpiece diagram in an example of the present invention. ,
Assume that an alignment mark is placed at the bottom left of the liquid crystal panel.

FIG. 2 is a diagram showing the positional relationship between the detection area and the liquid crystal panel, and the center of the alignment mark and the center of the detection area overlap.

As shown in this figure, it is desirable to set the material supply position so that the center of the detection range and the 7 alignment marks are equal. 2
1 is the center of the detection range, 22 is the center of the material supply position, and 23 is the detection range. However, due to errors in the workpiece, errors in the positioning mechanism, etc., the alignment mark deviates from the center of the detection range and deviates from the ffl range. This is because if the detection range is 100 μm in both X and Y, and the positioning variation is ±80 μm, if the center of the detection range and the center of the positioning variation distribution are equal, the alignment mark will fall within the detection range and detection will be possible. Otherwise, it may fall outside the detection range and become undetectable. Therefore, it is necessary to make the center of the detection range and the center of the positioning variation distribution equal.

The operation of the alignment device will be explained with reference to chart 70 in FIG. First, reset the counter that counts the number of times. (Step 51) If the presence or absence of a workpiece is detected, rough positioning is performed. (Steps 52, 55) It is compared whether the counter is greater than 2. (Step 54) If it is less than 2, the workpiece is moved to the material supply position [K]. (Step 57) If it is larger than 2, the average value is calculated from the past positional deviation data stored in Step 59 (Step 55) and the material feeding position is corrected. (Step 56), step 55゜56 with tg3
This will be explained in detail using figures. 31 is the position of alignment mark 1, and 32 is the position of alignment mark 2.

For example, the position of alignment mark 1 is 50 μm% in the -X direction from the center of the detection range + 50 μm in the YX direction, the position of alignment mark 2 is 60 μms + in the -X direction
Assuming that the positional deviation is 20 μm in the Y and X directions, the average value is calculated from these two positional deviation data. The average value is 5 in the -X direction.
5μ"% + 25μm in the Y direction. Using this average value, the material feeding position is corrected by the average value. Figure 4 is a diagram in which the material feeding position has been corrected. 41 is the corrected material feeding position. This is the material position. After correction, even if the workpiece is fed to the position of the alignment mark 1, it will deviate by 5 μm in the -X direction and 5 μm in the +YX direction from the center of the detection range, and the amount of deviation will decrease. After the position correction, move the workpiece to the material supply position. (Step 57) Detect the alignment mark at the material supply position and calculate the amount of deviation. (Step 58) Store the calculated amount of deviation and correct the position deviation. (Step 59) Add 1 to the counter indicating the number of times (Step 60)
Go to step 52 and repeat.

If the average value of the past positional deviation data is calculated in steps 55 and 56 and the material feeding position is corrected by the average value, the center of the positional deviation variation distribution approaches the center of the detection range.

[Effects of the Invention] As described above, according to the present invention, by correcting the material feeding position using past positional deviation data, the amount of positional correction is reduced, and there is an effect of preventing deviation from the detection range. .

[Brief explanation of the drawing]

FIG. 1 is a plan view showing a workpiece for explaining the present invention in detail. FIG. 2 is a diagram showing the positional relationship between a detection area and a workpiece for explaining the present invention in detail. FIG. 3 is a diagram showing the positional relationship between the detection area and the workpiece for explaining the present invention in detail. FIG. 4 is a diagram showing the positional relationship between the detection area and the workpiece after correcting the positional deviation for explaining the present invention in detail. FIG. 5 is a flowchart showing an embodiment of the alignment method of the present invention. Applicant Seiko Even Co., Ltd. Agent Patent Attorney Kizobe Suzuki (1 other person) I Shu 3rd Eye 1 Old Cave 1 Area 1] $ Raw Map

Claims (1)

[Claims] In an alignment method that detects the amount of positional deviation of a fed workpiece and corrects the position, the average value of past data of the amount of positional deviation is calculated, and the feeding position of the workpiece is corrected by the average value. This alignment method is characterized by the following: