JPH02287355A - Glass mask structure with protective member - Google Patents

Abstract

PURPOSE:To allow the passage of air and to prevent the deformation of a protective member by providing holes or notches in a frame securing the protec tive member. CONSTITUTION:The frame 2 is provided with the holes 3a, 3b or notches 5a and 5b to allow the passage of the air in the space between glass 1 and the protective member to the outside so as to obviate the generation of a difference in the atm. pressure between the space and the outside even if the frame moves to the points of different atm. pressures or when a temp. change arises. The deformation of the protective member is prevented in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a glass mask structure with a protective member used for manufacturing integrated circuits (hereinafter referred to as ICs).

[Summary of the invention 1] The present invention provides a glass mask structure with a protective member (by providing a hole or a cutout in a frame having a supporting member, air is circulated to prevent deformation of the protective member due to a pressure difference). It is something.

[Prior Art] A conventional glass mask structure with a protective member does not have a hole or other space in the frame, so the air between the protective member and the glass is sealed.

[Problem to be Solved by the Invention J] However, the above-mentioned prior art has a problem in that the protective member deforms due to changes in atmospheric pressure and the like. Therefore, the present invention is intended to solve these problems.

The purpose is to provide a glass mask structure with a protective member that prevents deformation of the protective member.

[Means for Solving the Problems J] The glass mask structure with a protective member of the present invention is characterized in that a hole or a notch is provided in the frame to which the protective member is fixed.

[For production]

According to the above configuration of the present invention, the holes or notches are provided in the frame to allow air to circulate and prevent deformation of the protective member.

[Example 1] Figure 1 is a plan view of the first example of the present invention, where ■ is glass, 2 is a frame, and 3a and 3b are frame 2.
This is a hole made in the hole. FIG. 2 is a sectional view of the first embodiment of the present invention, and 4 is a protection member. As shown in Figures 1 and 2 (.

By providing the holes 3a and 3b in the frame 2, the space between the glass 1 and the protective member allows air to circulate with the outside, so that the space between the glass 1 and the protective member can be moved to a point with a different atmospheric pressure or where a temperature change occurs. Even if.

FIG. 3 is a cross-sectional view of a second embodiment of the present invention, in which no pressure difference occurs between the space and the outside, and the protective member is not deformed. It is something. In this case, when creating the frame, it is possible to simultaneously form the notches extremely easily by injection molding. FIG. 4 is a partial sectional view of a third embodiment of the invention, and FIG. 5 is a partial plan view of the third embodiment of the invention.

In this case, a notch 5 that does not penetrate through the bottom of the frame is provided, and a hole 6 is provided from the top of the frame so as to penetrate through the notch 5. Therefore, it has the characteristic that it is difficult for foreign matter to enter the inside. Also, notches and holes can be created at the same time when injection molding the frame.

[Effects of the Invention] As described above, according to the invention, by providing the holes or notches in the frame, there is an effect that the protective member does not deform even due to environmental changes such as differences in air pressure and temperature.

Furthermore, by forming the hole or cutout shape as in the embodiment, it is possible to manufacture the device at low cost.

[Brief explanation of drawings]

FIG. 1 is a plan view showing a first embodiment of a glass mask structure with a protective member according to the present invention. FIG. 2 is a sectional view showing a first embodiment of the glass mask structure with a protective member of the present invention. FIG. 3 is a sectional view showing a second embodiment of the glass mask structure with a protective member of the present invention. FIG. 4 is a partial sectional view showing a third embodiment of the glass mask structure with a protective member of the present invention. FIG. 5 is a partial plan view showing a third embodiment of the glass mask structure with a protective member of the present invention. l ・ ・ 2 ・ ・ 3 a, 4 ・ ・ 5 a. 6 ・ ・ 7 ・ ・Glass, frame, hole, protective member, notch, hole, notch Diagram and above Applicant: Seiko Epson Co., Ltd. Agent Patent attorney Kizobe Suzuki (1 other person) Diagram and diagram

Claims (1)

[Claims] A glass mask structure with a protective member, characterized in that a frame supporting a protective member is fixed to a patterned surface of glass, and a part of the frame has a hole or a notch.