JPH02282689A - Infrared ray heating furnace - Google Patents

Abstract

PURPOSE:To enable an infrared ray type heating furnace to be optionally varied between an open type and a closed type to obtain a high temperature and at the same time to facilitate a control over heating atmosphere by a method wherein a pair of reflector members having semi-ellipsoidal sphere surface are separably connected optionally through an intermediate ring provided with cooling air introducing holes and a quartz plate installing part. CONSTITUTION:An infrared ray lamp 3 is installed within one reflector la of a pair of reflector members 1a and 1b having a semi-ellipsoidal sphere reflecting surface 2. Reflecting surfaces 2 of each of the reflector members 1a and 1b are oppositely faced to each other and fixed at both sides of an intermediate ring 4 so as to constitute a heating furnace of closed type. One reflector member 1b is removed and a quarts plate 18 is fixed to the intermediate ring 4 in place of the reflector member lb, resulting in that an open-type heating furnace is attained. During its use as the heating furnace, an air cooled fan 20 is operated, resulting in that surrounding air passes from a cooling air introducing hole 3 of the intermediate ring 4 through a heating spacing 21 and the air is discharged from the air cooling fan 20. So, it is possible to prevent the reflecting surface 2 or electrodes or a quartz tube or the like from being damaged by hot heat. In addition, it is possible to fix an electrode 10b to a pipe 11 arranged in the intermediate ring 4 and use the infrared ray lamp 3 for a high electrical power of a single pole structure and thus a high power can be attained.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an infrared heating furnace having an elliptical spherical concave reflective surface and used as a heating unit for manufacturing, testing, analysis, etc.

(Prior Art) Infrared heating furnaces having an elliptical spherical concave reflective surface are known, and two types are used: an oven type and a closed type.

As shown in Fig. 1, the oven type has a configuration in which an infrared lamp C is installed inside a reflector having a recessed reflecting surface a in the shape of a half-elliptic sphere, and the infrared rays reflected by the reflecting surface a Heating is performed by irradiating the hot rays of the lamp C onto the heated workpiece d prepared outside the furnace.

In addition, as shown in Fig. 2, the closed type has a pair of oven-type reflectors with reflective surfaces a,
The furnace has a configuration in which the furnace space e is formed in the shape of an elliptical sphere by facing the furnace walls a, the furnace temperature is relatively high, and the heated workpiece d is prepared in the furnace space e.

(Problems to be Solved by the Invention) Recently, the use of the oven-type infrared heating furnace for thermal processing of electronic components and dentures has been considered, but there are few versatile and low-cost devices.

Further, although the closed type furnace is used for producing oxide single crystals, it is expensive and has not been used as a general-purpose high-temperature furnace.

Furthermore, these types have disadvantages in that the geometrical conditions of the reflective surface change depending on the heating purpose, the manufacturing cost is higher than that of other heating furnaces, and the versatility is limited, limiting the scope of use.

Furthermore, in order to obtain high power, it is desirable to use a high-power infrared lamp, but this kind of high-power lamp has a high filament current density, so the structure of the electrode terminal sealing part is a monopolar structure. That is, at each end of the tubular lamp -
Since it has a structure in which each pole is q, it cannot be installed on the above-mentioned types that do not have electrodes in front of the reflective surface, which has the disadvantage that high-power lamps cannot be used.

The present invention can be arbitrarily changed between the oven type and the closed type according to the purpose of heating, allowing for versatile use, and a high power infrared lamp with a monopolar structure can be used to heat high temperatures. The object of the present invention is to provide an infrared heating furnace equipped with an ellipsoidal reflecting surface.

(Means for Solving the Problems) In the present invention, a pair of reflectors each having a semi-elliptic spherical concave reflective surface is prepared, an infrared lamp is provided inside one of the reflectors, and both reflectors are connected to each other. The heating furnace is equipped with a cooling air inlet hole and is separably connected with the reflective surfaces facing each other via an intermediate ring equipped with a quartz plate attachment part, and can be arbitrarily changed to an oven type or a closed type heating furnace. I tried to achieve my goal. According to this configuration, the other reflector without an infrared lamp is removed, the intermediate ring is attached to the edge of the one reflector in which the infrared lamp is provided, and the intermediate ring is attached to the inner part of the reflector. A quartz plate is provided to separate the reflector from the outside, making it possible to freely change the furnace to an oven-type heating furnace that radiates reflected light to the outside.Furthermore, a pipe is provided in the radial direction of the intermediate ring, and the pipe is connected to the inside of the reflector. By providing an electrode that holds and energizes one end of the infrared lamp, it is possible to obtain high temperatures using a high power infrared lamp.

(Function) When the reflective surfaces of a reflector with an infrared lamp installed inside the reflector and a reflector without an infrared lamp are made to face each other, and the two reflectors are connected with an intermediate link in between, the internal A closed type heating furnace with an elliptical spherical heating space is constructed. When a heated workpiece is placed in the heating space and an infrared lamp is turned on, the heated workpiece is irradiated with heat rays over almost its entire circumference and heated to a high temperature, and cooling air is introduced from a cooling air introduction hole provided in an intermediate ring. This cools the infrared lamp and reflective surfaces and prevents them from being damaged by high temperatures.

When used as an oven type heating furnace, a middle m1 ring is attached to the edge of the reflector provided with the infrared lamp, and a quartz plate is provided so as to close the hole in the middle ring. In this case, the heating work is provided outside the reflector,
It is heated by the hot rays of an infrared lamp passing through a quartz plate. The quartz plate prevents the interior of the reflector from being contaminated by evaporated matter or thermal decomposition products from the heated workpiece, and also prevents the cooling air blown from the cooling air introduction hole of the intermediate ring from reaching the heated workpiece and reducing the heating temperature. Acts as a preventive agent.

By providing a pipe in the radial direction of the intermediate ring and attaching electrodes to it, a monopolar high-power infrared lamp can be placed on the optical axis of the ellipse of the reflective surface, allowing efficient heating at high temperatures. can be done.

(Example) An example of the present invention will be explained based on FIG. (3) is an infrared lamp installed in one of the reflectors (Ia), (4) is a circular intermediate ring equipped with a cooling air introduction hole (5) and a quartz plate mounting part (6). show.

The outer circumference of the reflective surface (2) of each reflector (Ia,) (lb) is
The reflective surface (2) is covered with a sealed cover (7), and cooling water is circulated in the space (7a) between the reflective surface (2) and the cover (7) to prevent the reflective surface (2) from becoming too hot. (2) form an aperture (8) along the optical axis of one reflector (+, a)
An infrared lamp (3) is inserted through the opening (8), and one end is held by a socket (9) provided on the outside.

The intermediate ring (4) is composed of a substantially circular annular body that matches the edge of the reflective surface (2), and has a plurality of cooling air introduction holes (5) passing through it in the radial direction to introduce cooling air from the outside. Furthermore, an annular stepped portion is formed on one side of the ring (4) to provide a mounting portion (6) for the quartz plate. The illustrated infrared lamp (3) is for high power use and has a monopolar structure with electrodes (3a, Hb) at both ends of the rod-shaped lamp, and one electrode (3a) is connected to the socket (9). An electrode (10a) pushed out by a spring from
), and the other electrode (3b) is fitted with the intermediate ring (
4) The inside of the annular hole was designed to fit with the electrode (10b) provided in the pipe (11) extending in the radial direction.(+21
passes through the pipe ('11) from the outside to the electrode (10b).
), and (2) is an air-cooling fan that removes high-temperature air in the heating space 121) to the outside.

The reflective surfaces (2) of the reflectors (la> (lb) are opposed to each other, an intermediate ring (4) is interposed between them, and both reflectors (la) (lb) are connected by bolts (13) at four locations, for example.
) and the intermediate ring (4) to form a closed type infrared heating furnace. As shown in Fig. 5, this closed type heating furnace has an elliptic spherical heating space extending from the opening (8) of the lower reflector (1, b) to the sample plate (+51) covered with the quartz tube side. Insert into α, sample a
The hole (8) of the reflector (1b) used for analysis and testing of
Insert a quartz tube (covered with 1Φ) into the sample (
Used for dissolving and evaporating IG.

Figure 4 shows the reflector (1b) removed from the one shown in Figure 1.
This shows the configuration in an open type heating furnace.
In this case, fit the quartz plate ○ε into the quartz plate attachment part (6) of the intermediate ring (4), and attach the holding plate (I9) from the outside with the bolts ('l) to the intermediate ring (4) and the reflector (1a). ).This open type is installed in the first
Similar to the one shown, heat the external workpiece using the lamp (3).
The inside of the reflector (1a) is quartz IN.
(Because it is divided by 1&, the inside of the reflector (1a) is not contaminated by evaporated matter from the heated workpiece.

To explain its operation, an infrared lamp (3) is provided in one reflector (1a) of a pair of anti-nJ bodies (Ia) (lb) that angle a semi-ellipsoidal reflecting surface (2), A closed type heating furnace is constructed by attaching the anti-q= to both sides of the intermediate ring (4) with the reflective surfaces (2) of the body (la) (1b) facing each other, and from this one of the reflectors (1
b) and replace it with a quartz plate ae on the intermediate ring (4).
When installed, it becomes an open type heating furnace.

Therefore, it is possible to use the device by changing it between a closed type and an open type depending on the purpose of heating, which increases the usability. During use as a heating furnace, when the air cooling fan ■ is operated, external air passes through the heating space σ from the cooling air introduction hole (5) of the intermediate ring (4) and is discharged from the air cooling fan ■. This prevents the reflective surface (2), electrodes, quartz tube, etc. from being damaged by the high heat of the infrared lamp (3).
) can be attached to the electrode (10b), and a monopole (1M high power infrared lamp (3) can be used, so high power can be obtained.When used as an open type heating furnace, the intermediate ring (4) The quartz plate ('lε) provided in the above prevents evaporated matter from the heated workpiece from contaminating the heating space 121', and also allows cooling air to flow around the heated workpiece and prevent its temperature from rising. Nor.

The electrode (10b) holding one end of the infrared lamp (3) is connected to the pipe (I[F] and the lamp (3) at the center of the ellipse.
Since the lamp (3) is placed in the shade of the lamp (3) and has the lowest infrared density, it is less susceptible to heat damage.
Since both ends are supported, optical precision is also improved.

The embodiment shown in Figure 7 shows a modification of the intermediate ring (4), in which two intermediate rings (4) (4> are connected by a body part (■) provided with a cooling water circulation hole (■), An elliptical spherical reflecting surface (2@12@) is formed in the body part (2), which is substantially continuous with each reflecting surface (2) of the left and right reflectors (Ia) (lb).In this case, Each reflector (la) (lb) is provided with a high-power infrared lamp (3) (3),
Each intermediate ring (4) (4) has quartz If (IIID
An independent heating space (2) is formed in the body part (2) by attaching a li&, and by introducing the sample (IO) from the side of the body part, it is possible to heat the sample (IG) in a partitioned atmosphere.

In addition, in the closed type embodiment shown in the third figure, if an infrared lamp (3) of 1,800 lkv is used.
℃, and can be easily used for tests and experiments as an ultra-high temperature furnace. Further, in the oven type shown in Figure 4, stainless steel could be easily partially melted using an lkw infrared lamp. Cooling air may be circulated in the space (7a) between the reflective surface (2) and the cover (7).

(Effects of the Invention) As described above, in the present invention, a pair of reflectors each having a semi-elliptic spherical reflecting surface can be separated via an intermediate ring provided with a cooling air introduction hole and a quartz plate attachment part. Since it was connected to
The oven type and closed type can be changed arbitrarily, increasing the usability of the heating furnace. High temperatures can be obtained by using a high-power infrared lamp and a semi-ellipsoidal reflective surface, and cooling air intake holes provided in the middle ring can be used. This cooling air prevents damage to the furnace due to high temperatures, and since a quartz plate is attached to the intermediate ring, the heating atmosphere can be easily controlled.

[Brief explanation of drawings]

1 and 2 are sectional views of the conventional example, FIG. 3 is a cut side view of an embodiment of the present invention, FIG. 4 is a cut side view of another embodiment of the present invention, and FIGS. 5 and 6. The figure is a cut side view showing the state in which the apparatus of the present invention is used, and FIG. 7 is a cut side view of still another embodiment of the present invention. (Ia) (lb)...Reflector (2)...Reflecting surface (3)...Infrared lamp (4)...Middle ring (5)...Cooling air introduction hole (6)...・Quartz plate mounting part (10a)...Electrode 0v...Pipro Q...Volt qε...Quartz plate permission Application: 3 people from Hitoshi Vacuum Riko Co., Ltd. and others

Claims (1)

[Claims] 1. A pair of reflectors each having a concave reflective surface in the shape of a semi-ellipsoid is prepared, an infrared lamp is provided inside one of the reflectors, and both reflectors are provided with cooling air introduction holes. An infrared heating furnace characterized in that the reflecting surfaces are facing each other and are separably connected via an intermediate ring having a quartz plate attachment part. 2. Attach the intermediate ring to the edge of one of the reflectors in which the infrared lamp is provided, and radiate the reflected light to the outside by providing a quartz plate on the intermediate ring to separate the inside of the one reflector from the outside. The infrared heating furnace according to claim 1, characterized in that: 3. The infrared heating furnace according to claim 1, wherein a pipe is provided in the radial direction of the intermediate ring, and an electrode that holds one end of the infrared lamp in the reflector and conducts electricity is provided in the pipe.