JPH02277527A - Filter of liquid chemical - Google Patents
Filter of liquid chemicalInfo
- Publication number
- JPH02277527A JPH02277527A JP1098024A JP9802489A JPH02277527A JP H02277527 A JPH02277527 A JP H02277527A JP 1098024 A JP1098024 A JP 1098024A JP 9802489 A JP9802489 A JP 9802489A JP H02277527 A JPH02277527 A JP H02277527A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- carbon dioxide
- pure water
- valve
- valves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title claims abstract description 31
- 239000007788 liquid Substances 0.000 title claims abstract description 19
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 21
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 21
- 238000001914 filtration Methods 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 5
- 239000012466 permeate Substances 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000008155 medical solution Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Filtration Of Liquid (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は薬液濾過装置に関し、特に半導体基板処理に使
用する無機薬液の微粒子除去を行なう薬液濾過装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a chemical liquid filtration apparatus, and more particularly to a chemical liquid filtration apparatus for removing particulates from an inorganic chemical liquid used in semiconductor substrate processing.
従来、この種の濾過器は、濾材を内蔵し、薬液の流入口
及び流出口を有し、この流入口、流出口に接続する配管
により構成されていた。Conventionally, this type of filter has a built-in filter medium, has an inlet and an outlet for the chemical liquid, and is configured by piping connected to the inlet and the outlet.
上述した従来の濾過器は、交換に際し、濾材が弗素樹脂
膜でできているため疎水性となっており、無機薬液の濾
過を行なう場合は、あらかじめ濾材をアルコールで浸漬
し、純水でアルコールを洗浄する作業を行なった後、薬
液配管を接続する様になっているので、薬液配管を接続
する作業の過程で濾材が乾燥し、薬液の濾材透過が円滑
に行なわれないという欠点がある。When replacing the conventional filter described above, the filter medium is made of a fluororesin membrane and is therefore hydrophobic, so when filtering an inorganic chemical solution, soak the filter medium in alcohol in advance and remove the alcohol with pure water. Since the chemical liquid piping is connected after the cleaning operation is performed, there is a drawback that the filter medium dries during the process of connecting the chemical liquid piping, and the chemical liquid cannot pass through the filter medium smoothly.
本発明の目的は、弗素樹脂膜の濾材を有する濾過器の交
換に際し、直ちに薬液配管を行ない、薬液の透過を行な
うことができる薬液濾過装置を提供することにある。An object of the present invention is to provide a chemical liquid filtration device that allows the chemical liquid to be permeated by immediately connecting chemical liquid piping when replacing a filter having a fluororesin membrane filter medium.
本発明の薬液濾過装置は、弗素樹脂膜を濾材とする濾過
器と、炭酸ガスが濾過器を通って排出する様配管接続し
た炭酸ガス供給口及び排出口と、濾過器の薬液流入口に
接続した純水供給口及び薬液流出口に接続した純水排出
口とを有している。The chemical liquid filtration device of the present invention includes a filter using a fluororesin membrane as a filter medium, a carbon dioxide gas supply port and a discharge port connected to pipes so that carbon dioxide gas passes through the filter, and a chemical liquid inlet of the filter. and a pure water outlet connected to the chemical solution outlet.
次に、本発明について図面を参照して説明する。第１図
は本発明の一実施例の配管系統図である。濾過器１の薬
液流入口１ａに接続するバルブＡ及びＣと、薬液流出口
１ｂに接続するバルブＢ及びＤと、濾過器２次側へ通ず
る接続口ＩＣに接続するバルブＥ及び１次側へ通ずる接
続口１ｄに接続するバルブＦを閉じ、濾過器１を交換し
た後、バルブＥ及びＦを開は炭酸ガスを内部の空気か完
全に炭酸ガスと置換するまで通じ、バルブＥひ閉める。Next, the present invention will be explained with reference to the drawings. FIG. 1 is a piping system diagram of one embodiment of the present invention. Valves A and C connected to the chemical inlet 1a of the filter 1, valves B and D connected to the chemical outlet 1b, and valve E connected to the connection port IC leading to the secondary side of the filter and to the primary side. After closing the valve F connected to the connecting port 1d and replacing the filter 1, the valves E and F are opened until the carbon dioxide gas is completely replaced with the air inside, and the valve E is closed.
次にバルブＣを開け、純水を導入し、濾過器１の１次側
内が完全に純水で満たされた後、バルブＦを閉じバルブ
Ｄを開ける。この時濾材内の炭酸ガスが純水に溶解する
事により純水が濾過器２次側に達する。２次側内炭酸ガ
スをバルブＤより純水とともに排出した後、バルブＣ及
びＤを閉じ、バルブＡ及びＢを開は薬液を流す。Next, valve C is opened, pure water is introduced, and after the primary side of filter 1 is completely filled with pure water, valve F is closed and valve D is opened. At this time, the carbon dioxide gas in the filter medium is dissolved in the pure water, and the pure water reaches the secondary side of the filter. After the carbon dioxide gas in the secondary side is discharged from valve D along with pure water, valves C and D are closed, and valves A and B are opened to allow the chemical solution to flow.
第２図は本発明の他の実施例の配管系統図である。濾過
器１の、ハウジング部を下側に取付は濾過器１の１次側
へ通ずる接続口１ｄにバルブＥを接続し、２次側へ通ず
る接続口１ｃにバルブＦを接続し、第１の実施例と同手
順により炭酸カスをバルブＥを開は導入し、バルブＦよ
り排出し、純水及び薬液と順次置換する。この実施例で
は、炭酸ガスを濾過器１の１次側より導入する構造であ
るため、炭酸ガス中の微粒子が２次側にはいらないとい
う利点がある。FIG. 2 is a piping system diagram of another embodiment of the present invention. To install the filter 1 with the housing part on the lower side, connect the valve E to the connection port 1d leading to the primary side of the filter 1, connect the valve F to the connection port 1c leading to the secondary side, and connect the valve F to the connection port 1c leading to the secondary side. Following the same procedure as in the example, carbon dioxide sludge is introduced by opening valve E, is discharged from valve F, and is sequentially replaced with pure water and a chemical solution. In this embodiment, since the structure is such that carbon dioxide gas is introduced from the primary side of the filter 1, there is an advantage that fine particles in the carbon dioxide gas do not enter the secondary side.
以上説明したように本発明は、薬液配管を接続した状態
で、空気から炭酸ガスに完全に置換し、炭酸ガスが純水
に溶解しやすい事を利用し、濾材の細孔内に純水を浸透
させて、炭酸ガスと純水を完全に置換し、無機薬液が純
水に溶解する事により、無機薬液と純水が完全に置換し
、弗素崩脂膜の濾材を効率良く使用できる効果がある。As explained above, the present invention completely replaces air with carbon dioxide gas while the chemical pipe is connected, and takes advantage of the fact that carbon dioxide gas easily dissolves in pure water to fill the pores of the filter medium with pure water. By permeating the water, the carbon dioxide gas and pure water are completely replaced, and the inorganic chemical solution is dissolved in the pure water.The inorganic chemical solution and pure water are completely replaced, and the filter medium of the fluoride fat-breaking membrane can be used efficiently. be.
第１図は本発明の一実施例の薬液濾過装置の配管系統図
、第２図は本発明の他の実施例の配管系統図である。
１・・・濾過器、１ａ・・・薬液流入口、１ｂ・・・薬
液流出口、ＩＣ・・・２次側接続口、１ｄ・・・１次側
接続口、Ａ・・・薬液流入バルブ、Ｂ・・・薬液流出バ
ルブ、Ｃ・・・純水供給バルブ、Ｄ・・・純水排出バル
ブ、Ｅ・・・炭酸ガス供給バルブ、Ｆ・・・炭酸ガス排
出バルブ。FIG. 1 is a piping system diagram of a chemical liquid filtration apparatus according to one embodiment of the present invention, and FIG. 2 is a piping system diagram of another embodiment of the present invention. 1...Filter, 1a...Medical solution inlet, 1b...Medical solution outlet, IC...Secondary side connection port, 1d...Primary side connection port, A...Medical solution inflow valve , B... Chemical solution outflow valve, C... Pure water supply valve, D... Pure water discharge valve, E... Carbon dioxide gas supply valve, F... Carbon dioxide gas discharge valve.
Claims (1)
に於いて使用する弗素樹脂膜を用いた濾過器と、炭酸ガ
スが濾過器を通って排出する様配管接続した炭酸ガス供
給口及び排出口と、濾過器の薬液流入口に接続した純水
供給口及び薬液流出口に接続した純水排出口とを有する
事を特徴とする薬液濾過装置。A filter using a fluororesin membrane used in the chemical supply piping or the circulation filtration mechanism of the chemical storage tank, and a carbon dioxide gas supply port and discharge port connected to the pipe so that carbon dioxide gas passes through the filter and is discharged. A chemical liquid filtration device comprising: a pure water supply port connected to a chemical liquid inlet of the filter; and a pure water outlet connected to a chemical liquid outlet of the filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1098024A JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1098024A JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02277527A true JPH02277527A (en) | 1990-11-14 |
| JPH088978B2 JPH088978B2 (en) | 1996-01-31 |
Family
ID=14208350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1098024A Expired - Lifetime JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH088978B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04246828A (en) * | 1991-02-01 | 1992-09-02 | Nec Kyushu Ltd | Cleaning device of semiconductor wafer |
-
1989
- 1989-04-17 JP JP1098024A patent/JPH088978B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04246828A (en) * | 1991-02-01 | 1992-09-02 | Nec Kyushu Ltd | Cleaning device of semiconductor wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH088978B2 (en) | 1996-01-31 |
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