JPH02249904A - Automatic visual inspection equipment - Google Patents

Abstract

PURPOSE:To process an object to be inspected with high speed by performing an appearance inspecting process and attaching/detaching in cooperation for the object to be inspected in accordance with the turn/stoppage of a turntable and mini-turntable. CONSTITUTION:An inspection passage 1 for the object to be inspected, which is a circular carrying passage for inspecting the object W to be inspected, consists of the turntable 5 and mini-turntables 6. This table 5 is intermittently turned and driven for stopping by step of 1/8 turning by an index table. The tables 6 are arranged at the positions dividing the table 5 to eight divisions in the peripheral direction. Further, for an inspection part 2, the inspecting parts 2a-2f are provided in six positions among the places where the table 5 is stopped. Tables 5,6 are turned in synchronism and the object W is mounted on the table 6 from an object supplying passage 3 through a mounting part 14 of the inspecting passage 1 at the time when the table 5 is stopped, and it is also fixed with a holder for the inspection at the inspecting parts 2a-2f for every turning and stopping of the table 5 then ejected to an object ejecting passage 4 at a detaching part 15.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic appearance inspection device, and more specifically, for example, when automatically inspecting the appearance of laminated pancakes etc. by image processing, The present invention relates to an automatic visual inspection device that can efficiently transport objects and maintain a posture that is easy to inspect.

[Conventional technology]

Conventionally, the appearance inspection of IC boards such as PGA boards has been carried out by human visual inspection.
Only limited specific inspection areas such as pins) and cavities are automated using optical sensors and image processing technology.

An example of automation is to take an enlarged image of the object to be inspected using a camera, process the image at the optimal brightness level, and then
By obtaining an inspection pattern consisting of a digitized image and comparing it with a standard pattern for appearance inspection consisting of a binary image created in advance through computer processing, defects etc. of the inspection object can be inspected. Examples include those that have been made.

By the way, when inspecting objects to be inspected by dividing them into multiple parts during boat fishing, in order to perform the inspection efficiently, it is necessary to use an inspection camera to photograph the inspection objects at each inspection location using a conveyor etc. that does not require attachment or detachment. A transportation system is used that allows the object to be inspected to be transported to a location and photographed with the inspection camera at the inspection location.

In such a method, the objects to be inspected are conveyed in a preferred posture relative to the inspection camera, and the appearance of a large number of objects to be inspected is automatically inspected continuously and in a short period of time.

[Problem to be solved by the invention]

However, in the case of such a conveyance device, a conveyor consisting of a linear conveyance path is used, and an inspection camera and an image processing device corresponding to the camera are arranged along the conveyor. There is a problem. That is, (1) the inspection transport path becomes longer, the inspection space becomes larger, and the time required to transport the object to be inspected to the inspection location becomes longer.

(2) It is difficult to maintain the required posture for photographing the object to be inspected with respect to the inspection camera, and the field of view for inspecting the object is limited. Therefore, a large number of inspection machines are also required.

■ There is a problem with the accuracy of stopping the object to be inspected.

(2) Since it is necessary to form the inspection conveyance path in the shape of an endless belt, in order to obtain good inspection position accuracy, an unused holding mechanism is created, which makes the configuration of the inspection conveyance path complicated and large.

There are other problems.

Therefore, in view of the above points, the inventors of the present invention have conducted various studies and examinations, and have found that: (1) the visual inspection area of the inspection target such as an IC board is limited to a specific area around the cavity in which the chip is mounted; This is divided into areas such as a mount part and a wire bonding part, and each area is enlarged to a necessary magnification rate to divide the field of view.

■ Using multiple inspection machines such as inspection cameras and image processing devices, multiple inspection areas are inspected at multiple locations in an assembly line manner.

■ A rotary table (rotary conveyance path) that rotates and stops at fixed angles is used as the inspection conveyance path for the inspection object.

(2) Focusing on the external shape of the object to be inspected, the object to be inspected is rotated so that it can take a favorable posture for photographing with an inspection camera.

By creating a configuration that satisfies each of the points from ■ to ■, the above-mentioned conventional problems are solved, and the inspection target can be inspected and transported efficiently and at high speed in accordance with the inspection processing by the inspection machine. We found out what we can do.

The present invention has been devised in response to the above-mentioned problems, and its purpose is to speed up the transportation of inspection objects, reduce the inspection space, and enable inspection of multiple inspection areas. An object of the present invention is to provide an automatic appearance inspection device that can perform high-speed processing.

[Means to solve the problem]

The automatic visual inspection device of the present invention as a means for achieving the above object includes a rotary table that rotates and stops at fixed angle intervals, and mini rotary tables arranged at equal intervals around the circumference of the rotary table. The mini-rotary table has a holding part for holding the object to be inspected, and is configured to rotate and stop at fixed angle intervals in synchronization with the rotation and stop of the rotary table. At least one of the locations where the mini-rotary table is positioned when the rotary table is stopped is provided with an inspection object attaching/detaching section for attaching and detaching the inspection object to the mini-rotary table, and at a plurality of other locations,
An appearance inspection machine such as an inspection camera is appropriately arranged, and as the rotary table and the mini-rotary table rotate and stop, the appearance inspection machine performs the visual inspection process of the object to be inspected on the mini-rotary table and the inspection. It consists of a structure that allows objects to be attached and detached in conjunction with each other.

[Effect]

The operation of the automatic visual inspection device of the present invention based on the above configuration will be explained first.
Rotation of rotary tables and mini rotary tables that stop
The stopping angle and stopping time are set according to the inspection target area of the inspection target, and inspection equipment such as inspection cameras and image processing devices are placed at each location except for the inspection target attachment/detachment section where the rotary table stops. Then, the inspection machine is placed opposite to a mini-rotary table located close to it, so that inspection by photographing or the like can be performed.

Then, the rotary table and the mini-rotary table are driven, and when both tables are stopped, the inspection target object is placed and held on the mini-rotary table by the inspection target object attaching/detaching section. On the other hand, the mini-rotary table on which the object to be inspected is mounted and held rotates in synchronization with the rotation of the rotary table, and stops in response to the stop of the rotary table. Therefore, a specific area of the object to be inspected is inspected for defects by the inspection machine at the stop location by photographing, image processing, etc., and then, by rotating the rotary table, another area to be inspected is inspected at the next stop position. It acts to enable inspection. At this time,
The image capture is performed while the rotary table is stopped, but inspection efficiency can be increased if the pass/fail judgment calculation is performed in parallel while the rotary table is being driven.

This assembly process is performed continuously at each stop location of the rotary table and during rotation, and a predetermined inspection area is inspected before reaching the inspection target attachment/detaching section, and the inspection target is inspected at the inspection target attachment/detachment section. is removed from the mini-rotary table, defective products are sorted out, and transported to an inspection department box, etc., so that the inspection object can be transported efficiently at high speed and the inspection process can be carried out smoothly.

〔Example〕

Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.

Here, Figs. 1 to 3 show embodiments of the present invention, Fig. 1 is a schematic elevational view of the device, Fig. 2 is a plan view, and Fig. 3 explains the state of field division of the inspection object. FIG.

The automatic visual inspection device of this embodiment is a PGA board inspection device, and roughly speaking, it includes an inspection target inspection path 1 and an inspection section 2.
The inspection object inspection path 1 consists of four parts: an inspection object supply path 3, and an inspection object discharge path 4. The inspection object inspection path 1 inspects the presence or absence of defects, etc. The zero-turn table 5, which is a circular conveyance path for the Fixed. The index table 8 is connected to an index table drive motor 10 installed on the side of the upper surface of the installation base 7, and is configured to transmit the driving force of the index table drive motor 10 to the rotary table 5.

Here, the rotary table 5, which rotates via the index table 8, is driven to rotate and stop intermittently in 1/8 rotation increments, and usually has a stopping accuracy of 1 to 2 seconds per 1/8 rotation.
It is said to be 20 to 30 seconds. Note that the rotation angle, stopping accuracy, etc. are set according to the number of inspection areas of the inspection object W, and other rotation angles and stopping accuracy may be set as necessary. The lower end of the cylindrical shaft 9 is pivotally supported by a rotary joint 12 via a slip ring 11. An air supply path 12a is connected to the rotary joint 12 for supplying air for applying driving force to the mini rotary table 6. It is configured so that it can be supplied from the top via a solenoid valve 6a. Eight mini rotary tables 6 are installed at equal intervals on the upper circumference of the rotary table 5. That is, the rotary table 5 is divided into eight parts in the circumferential direction, and the parts are arranged at eight positions. This is done by setting according to the number of stop positions of the rotary table 5. Here, the mini-rotary table 6 is usually formed of an index mini-table that rotates in 90' increments (the rotation angle may vary depending on the need).
A holder 13 for holding the object W to be inspected is fixed to the upper surface of the holder 13, and a rotational force is applied by air supplied onto the rotary table 5. It is configured. Note that electrical signals such as a limit switch for detecting the rotational state of the mini rotary table 6 and a limit switch for detecting the holding state of the object to be inspected in the holder 13 (not shown) are connected to an external controller (not shown) using a slip connection. This is done through the ring 11. In the circumferential direction of the part where the rotary table 5 stops, an inspection section 2 for the inspection object W, a mounting section 14 for the inspection object W, and a detachment section 15 are installed.

The inspection unit 2 is a part for visually inspecting the inspection object W held in the holder 13 of the mini rotary table 6, and includes an inspection camera 16 and an image processing device 17 corresponding to the inspection camera 16. It is composed of The inspection section 2 has a first inspection section 2a, a second inspection section 2b, . . . a sixth inspection section 2f at six of the locations where the rotary table 5 stops.
is installed. Inspection camera 16 and image processing device 1
7 is disposed in each of the inspection sections 2as, . . . , and is arranged so that camera photography and image processing can be performed using a plurality of inspection areas. In addition,
The position of the inspection camera 16 needs to be changed depending on the size and shape of the inspection object W (for example, if the inspection object W is not square but on the circumference of the same radius). In order to cope with such cases (such as cases where the inspection cannot be carried out with A mounting part 14 for the test object W is located in the front part of the test part 2a, and a detachment part 15 for the test object W is located in the rear part of the test part 2f.
The inspection object W mounted and held on the holder 13 of the mini rotary table 6 is sequentially inspected in the inspection sections 2a, . 15 by rotating and stopping the rotary table 5. Here, the mounting section 14 and the detachment section 15 are configured so that the inspection object W can be mounted on and detached from the mini rotary table 6 using an air chuck (not shown) or the like.

The test object supply path 3 is a conveyance path that transports and supplies the test object W to the test object inspection path 1 via the mounting section 14, and is constituted by a conveyor. The terminal end of the test object supply path 3 is connected to the attachment part 14 of the test object inspection path 1.
It is said that the structure is adjacent to the .

The inspection object discharge path 4 is a conveyance path for transporting the inspection object W inspected by the inspection section 2 away from the inspection object inspection path 1 via the detachment section 15, and is a conveyance path for transporting the inspection object W inspected by the inspection section 2, and Like route 3, it is composed of a conveyor. The starting end of the inspection object discharge path 4 is configured to be adjacent to the detachment section 15 of the inspection object inspection path 1.

Next, to explain the operation of the above-mentioned embodiment, first, the inspection camera 16 is centered in a predetermined position and direction, and the third
The visual field division of the inspection object W shown in the figure (here, ■, ■,
..., [phase], 17 field of view divisions), and
In the divided field of view, a similar (identical) inspection object W without defects
, each of the inspection units 2a, .

Then, while driving the inspection object supply path 3, the inspection object discharge path 4, and the index table drive motor 10,
After making it possible to supply air onto the rotary table 5 through the rotary joint 12 and the cylindrical shaft 9 so that the rotary table 5 and the mini rotary table 6 rotate synchronously, the object W to be inspected is inspected. An air chuck or the like constituting the mounting part 14 corrects the posture of the object from the object supply path 3 through the mounting part 14 of the inspection path 1 to the mini-rotary table 6 when the rotary table 5 is stopped. At the same time, it is placed in a fixed state with the holder 13. Then, the controller is activated by a signal from a limit switch (not shown) for detecting the holding state of the test object, and the rotary table 5 rotates 1/8 rotation, and air is supplied into the cylindrical shaft 9 through the solenoid valve 6a. , the mini rotary table 6 is rotated by 90'', and the mini rotary table 6 is also stopped in synchronization with the stop of the rotary table 5, and the inspection object W reaches the inspection section 2a.The mini rotary table 6 is rotated by 90''.
Once rotated, a stop signal is issued from a rotation state detection limit switch (not shown), and the rotation is stopped.

In the inspection unit (first inspection unit) 2a, the inspection camera 16 photographs the inspection object W in four visual fields of ■, ■, ■, and 0 out of the inspection areas ■ to 0 that have been divided into visual fields. At the same time, the image processing device 17 performs image processing to inspect the presence or absence of defects. Next, the inspection object W that has been inspected in the first inspection section 2a is placed on 1/8 of the rotary table 5.
It rotates (the mini-rotary table 6 also rotates 909 synchronously), stops, and is transported to the second inspection section 2b, where the inspection camera 16 is used to inspect the inspection object W in a preset inspection area in the same manner. At the same time as taking a picture, the image processing device 17 performs image processing to inspect the presence of defects, etc. (Usually, the camera takes a picture at the same time as the vehicle stops, and the image processing is performed while the vehicle is in the next stopped state.) Then, this work is carried out in an assembly line from the third inspection section 2C to the sixth inspection section 2f, and all the predetermined inspection areas of the inspection object W are carried out at multiple locations, and finally the finished inspection is carried out. The object W is transferred to the inspection path 1 by rotating the rotary table 5 by 1/8.
It is transported to the detachment section 15.

In the detachment section 15, when the rotary table 5 is stopped, the retainer 1 is removed.
3, the object W to be inspected is released and guided to the object discharge path 4. It should be noted that, during the detachment work of the inspection object W in the detachment section 15, other inspection objects W held on other mini-rotary tables 6 are in the inspection state. and,
In the inspection object discharge path 4, the inspection objects W are sorted and transported to an inspection department box or the like.

Therefore, according to the present embodiment, the object W to be inspected can be inspected in a plurality of inspection areas using a plurality of inspection sections in an assembly line manner, that is, defect inspection and attachment/detachment of the object W to be inspected can be carried out in parallel. It functions so that the object to be inspected can be transported efficiently and at high speed.

By the way, the present invention is not limited to the above-described embodiments (including those that can be modified without changing the gist of the present invention; however, the drive of the mini rotary table is as follows:
The inspection may be carried out by other means instead of using air, and the inspection machine constituting the inspection section is not limited to one consisting of an inspection camera and an image processing device.
For example, it goes without saying that it may be an optical inspection device. Note that in this specification, the rotary table is not limited to a disk-shaped table, but includes a table that rotates at regular angles to form a circular conveyance path. Furthermore, it is natural that the mini-rotary table also includes a structure that can hold an object to be inspected and operate synchronously with the rotary table.

Further, in the above-described embodiments, the external appearance inspection of an IC board has been described, but it is clear that the inspection can also be carried out on other objects to be inspected (preferably small objects to be inspected).

〔Effect of the invention〕

As is clear from the above description, according to the automatic visual inspection apparatus of the present invention, a circular conveyance path (rotary table) is used as the inspection conveyance path, and the rotary table rotates and stops at fixed angle intervals, and It has a mini-rotary table arranged at equal intervals on the circumference of the rotary table, and the mini-rotary table includes:
It is equipped with a holding part for holding the object to be inspected, and is configured to rotate and stop at fixed angle intervals in synchronization with the rotation and stopping of the rotary table, and has a plurality of inspection parts, and a plurality of inspection parts. Since the inspection area can be inspected in an assembly-line manner, defect inspection and attachment/detachment of the inspection target can be carried out in coordination, speeding up the transportation of the inspection target, reducing the inspection space, and making it possible to perform multiple inspections. This has the effect that area inspection can be processed at high speed.

[Brief explanation of drawings]

1 to 3 show embodiments of the present invention, FIG. 1 is a schematic elevational view of the device, FIG. 2 is a plan view, and FIG. It is an explanatory diagram. 1... Inspection object inspection path, 2... Inspection section, 3...
Inspection object supply path, 4... Inspection object discharge path, 5...
・Rotary table, 6...Mini rotary table, 6a...
- Solenoid valve, 7... Installation stand, 8... Index table, 9... Cylindrical shaft, 10... Index table drive motor, 11... Slip ring, 12...
Rotary joint, 12a...Air supply path, 13
... Retainer, 14... Mounting part, 15... Detachment part,
16...Inspection camera, 17...Inspection image processing device, W...Inspection object patent Applicant Narumi Seito Co., Ltd. Sumitomo Kinkei Industries Co., Ltd. Agent Patent attorney Hirofumi Yoshimura

Claims (1)

[Claims] (1) It has a rotary table that rotates and stops at fixed angles, and mini-rotary tables arranged at equal intervals around the circumference of the rotary table. a holding part, and configured to rotate and stop at fixed angle intervals in synchronization with the rotation and stop of the rotary table, and at least one of the locations where the mini rotary table is located when the rotary table stops. An inspection target attachment/detachment section for attaching and detaching the inspection object to and from the mini-rotary table is arranged, and appearance inspection machines such as inspection cameras are appropriately arranged at multiple other locations. The automatic appearance is characterized in that the appearance inspection process of the object to be inspected on the mini-rotary table and the attachment/detachment of the object to be inspected by the appearance inspection machine can be carried out in coordination with the rotation and stop of the rotary table. Inspection equipment.