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JPH0221507A - Electric conductive sheet - Google Patents

Electric conductive sheet

Info

Publication number
JPH0221507A
JPH0221507A JP3667088A JP3667088A JPH0221507A JP H0221507 A JPH0221507 A JP H0221507A JP 3667088 A JP3667088 A JP 3667088A JP 3667088 A JP3667088 A JP 3667088A JP H0221507 A JPH0221507 A JP H0221507A
Authority
JP
Japan
Prior art keywords
thickness
resin
conductive sheet
metal
metal vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3667088A
Other languages
Japanese (ja)
Other versions
JP2668234B2 (en
Inventor
Hitoshi Oike
尾池 均
Yasumasa Hirono
広野 安正
Katsuhiro Kuwaki
克寛 桑木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oike and Co Ltd
Original Assignee
Oike and Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oike and Co Ltd filed Critical Oike and Co Ltd
Priority to JP63036670A priority Critical patent/JP2668234B2/en
Publication of JPH0221507A publication Critical patent/JPH0221507A/en
Application granted granted Critical
Publication of JP2668234B2 publication Critical patent/JP2668234B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Non-Insulated Conductors (AREA)

Abstract

PURPOSE:To make it possible to obtain an electric conductive sheet with permeability between the front side and the rear side by forming metallic evaporation layers on both sides of a base material and also forming the metallic evaporation layers at the inner walls of penetrating holes of the basic material. CONSTITUTION:On both sides of a basic material 1 which furnishes penetrating holes 2, metallic evaporation layers 3 are formed, and at least at some of the penetrating holes, metallic evaporation layer 3 are formed at their inner walls. And the metallic evaporation layers 3 on the front side and the rear side are connected electrically through the penetrating holes 2. Since the metallic evaporation layers 3 are formed at the inner walls 4 of the penetrating holes 2 when the metallic evaporation layers 3 are formed on the both surfaces of the basic material 1, the electric conductibility can be obtained between the front side and the rear side of the basic material 1 through the metallic evaporation layers 3. Furthermore, the electric conductibility can be controlled by the number of the holes 2, the size of the holes 2, the thickness of the metallic evaporation layers 3, and the thickness of the basic material 1, and the air permeability and the slipping property can be also controlled.

Description

【発明の詳細な説明】 [技術分野] 本発明は導電性シートに関する。さらに詳しくは、面方
向ならびに厚さ方向に導電性を有する導電性シートに関
する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a conductive sheet. More specifically, the present invention relates to a conductive sheet having conductivity in both the surface direction and the thickness direction.

[従来の技#FI] 従来から樹脂に導電性材料(例えばカーボン)を練り込
み製膜した導電性プラスチックフィルム(たとえば、米
国特許第4103066号)が知られている。
[Conventional Technique #FI] A conductive plastic film (for example, US Pat. No. 4,103,066), which is formed by kneading a conductive material (for example, carbon) into a resin, has been known.

[発明が解決しようとする問題点] しかしながら、前記従来例における導電性シートには次
のごとき問題点がある。
[Problems to be Solved by the Invention] However, the conductive sheet in the conventional example has the following problems.

(ロ)電気抵抗値が高い。(b) High electrical resistance.

(イ)通気性がない。(a) No breathability.

(つ)導電性材料を練り込むことによりフィルム樹脂の
特性が損なわれる。
(1) The properties of the film resin are impaired by incorporating the conductive material.

に)装飾性か良くない。) Decorative or not good.

((ホ)コストが高い。((e) Cost is high.

本発明は、前記の点に鑑み、樹脂特性を損なうことなく
、電気伝導性1通気性、装飾性に優れ、その上にコスト
が低く、積層プリント回路の縦方向導通用、液晶、ビオ
ロゲ・ン等の塗布基材に用いて看板やマーキングシート
や乾電池チエッカ−等に用いる他、シールド材などに使
用するのに適した導電性シートを提供することを目的と
する。
In view of the above points, the present invention has excellent electrical conductivity, air permeability, and decorative properties without impairing the resin properties, and is low in cost. The object of the present invention is to provide a conductive sheet suitable for use as a coating base material for signboards, marking sheets, dry battery checkers, etc., as well as for shielding materials.

[問題点を解決するための手段] 本発明の導電性シートは1貫通孔を有する基材の表裏両
面に金属蒸着層が形成され、該貫通孔の少なくとも一部
は該貫通孔の内壁にも金属蒸着層か形成されていて、該
表裏両面の金属蒸着層が貫通孔を通して電気的に接続さ
れてなることを特徴としている。
[Means for Solving the Problems] In the conductive sheet of the present invention, metal vapor deposited layers are formed on both the front and back sides of a base material having one through hole, and at least a part of the through hole is also formed on the inner wall of the through hole. It is characterized in that a metal vapor deposited layer is formed, and the metal vapor deposited layers on both the front and back surfaces are electrically connected through a through hole.

[作 用] 基材は貫通孔を有し、基材の表裏両面に金属蒸着層を形
成する場合に該貫通孔の内壁にも金属蒸着層が形成され
るので該金属蒸着層を介して基材の表裏間に電気伝導性
を得ることかできる作用だけでなく、孔の数、孔の大き
さ、金属蒸着層の厚さ、基材の厚さにより電気伝導性を
制御できるという作用もある。また通気性、滑り性を制
御できるという作用もある。更にまた金属蒸着層の金属
の種類を換えることにより金属の特性を生かすことかで
き、金属蒸着層によりその表面は金属特有の金属光沢を
有していて装飾性に優れるという作用もある。
[Function] The base material has a through hole, and when a metal vapor deposited layer is formed on both the front and back surfaces of the base material, the metal vapor deposited layer is also formed on the inner wall of the through hole, so the base material is formed through the metal vapor deposited layer. Not only does it have the ability to obtain electrical conductivity between the front and back surfaces of the material, but it also has the ability to control electrical conductivity by controlling the number of holes, the size of the holes, the thickness of the metal deposited layer, and the thickness of the base material. . It also has the effect of controlling air permeability and slipperiness. Furthermore, by changing the type of metal in the metal vapor deposited layer, the characteristics of the metal can be utilized, and the metal vapor deposited layer has the effect that the surface thereof has a metallic luster peculiar to metals and is excellent in decorative properties.

[実施例] つぎに図面に基き本発明の導電性シートを説明する。[Example] Next, the conductive sheet of the present invention will be explained based on the drawings.

第1図および第2図はいずれも本発明の導電性シートの
実施例を示す概略部分断面図であり、第1図に示したも
のは、貫通孔(2)を有する基材(1)の表裏両面に金
属蒸着層(3)が形成され、該貫通孔(2)の少なくと
も一部は該貫通孔(2)の内壁■にも金属蒸着層(3)
か形成されていて、該表裏両面の金属蒸着層(3)が貫
通孔(2)を通して電気的に接続された導電性シートて
あって本発明の導電性シートの基本構成を示し、第2図
に示したものは本発明の導電性シートの他の実施悪様例
の構成を示す9図において、(1)は基材であり、(2
)は基材(1)に設けられた貫通孔であり、(四は基材
(1)に設けられた金属蒸着層てあり、(4)は貫通孔
(2)の内壁てあり、(5)は金属蒸着層(3)の面上
に設けられた導電性接着剤層である。
Both FIG. 1 and FIG. 2 are schematic partial cross-sectional views showing examples of the conductive sheet of the present invention, and the one shown in FIG. A metal vapor deposited layer (3) is formed on both the front and back surfaces, and at least a part of the through hole (2) also has a metal vapor deposited layer (3) on the inner wall (2) of the through hole (2).
The basic structure of the conductive sheet of the present invention is shown in FIG. 9 shows the structure of another example of the conductive sheet of the present invention, in which (1) is the base material and (2) is the base material.
) is the through hole provided in the base material (1), (4 is the metal vapor deposited layer provided in the base material (1), (4) is the inner wall of the through hole (2), and (5) is the metal vapor deposited layer provided in the base material (1). ) is a conductive adhesive layer provided on the surface of the metal vapor deposited layer (3).

基材(1)としては、ある程度の自己保持性を有するも
のであればいずれも用いられるか、例えばポリエステル
系樹脂、ポリアミド系樹脂、ポリアミドイミド系樹脂、
ポリエチレン系樹脂、ポリプロピレン系樹脂、セルロー
スアセチイト系樹脂、ポリカーボネート系樹脂、ポリ塩
化ビニル系樹脂、ポリエーテルイミド系樹脂、ポリイミ
ド系樹脂、アクリル系樹脂、フッ素系樹脂などの樹脂類
またはセロハン紙、洋紙、和紙、不織布などのフィルム
状物またはシート状物などがあげられ、これらは単層で
もよく2枚以上貼り合せたものであってもよい。
As the base material (1), any material can be used as long as it has a certain degree of self-retention, such as polyester resin, polyamide resin, polyamideimide resin,
Resins such as polyethylene resin, polypropylene resin, cellulose acetite resin, polycarbonate resin, polyvinyl chloride resin, polyetherimide resin, polyimide resin, acrylic resin, fluorine resin, cellophane paper, Western paper Film-like materials or sheet-like materials such as , Japanese paper, and nonwoven fabrics may be mentioned, and these materials may be a single layer or two or more layers bonded together.

特に基材(1)としては前記樹脂類のフィルム状物の場
合、その厚さには特に制限はないか通常6〜250Mの
範囲が好ましい、厚さが6μs未満では孔あけ加工及び
蒸着作業性が悪く実用的でない、厚さか250μsを超
えるとこれまた孔あけ加工および蒸着作業性が悪く実用
的でない。
In particular, when the base material (1) is a film of the above-mentioned resins, there is no particular restriction on the thickness, and a range of 6 to 250 M is usually preferred. If the thickness is less than 6 μs, drilling and vapor deposition workability will be reduced. If the thickness exceeds 250 μs, the workability of drilling and vapor deposition is also poor and impractical.

また前記セロハン紙、洋紙、和紙、不織布なとのシート
状物の場合、その坪量には特に制限はないか通常10〜
1000g/■2の範囲が好ましい6坪量が10g/m
”未満では製品の強度か弱く実用性かない。
In addition, in the case of sheet-like materials such as cellophane paper, Western paper, Japanese paper, and non-woven fabric, there is no particular limit to the basis weight, or it is usually 10 to 10.
The range of 1000g/■2 is preferable.6 The tsubo weight is 10g/m.
If it is less than 1, the strength of the product will be weak and it will not be practical.

坪量が1000g/■2を超えると蒸着装置中での放出
ガス陽が多く蒸着効率が悪く実用的でない。
If the basis weight exceeds 1000 g/2, a large amount of gas is released in the vapor deposition apparatus, resulting in poor vapor deposition efficiency and impractical use.

貫通孔(2)としては、その孔の大きさには特に制限は
なく基材(11の厚さにもよるか通常50〜1000μ
s(直径換算)の範囲か好ましく、基材(1)の厚みが
厚くなるほど孔の大きさも大きくした方か電気伝導性か
向上し好ましい、また貫通孔(2)の数には特に制限は
なく所望する電気抵抗値にあわせて基材(1)の厚み、
孔の大きさ、金属蒸着層(3)の厚さおよび金属の種類
などを考慮して決定され、通常1万〜200万個7.2
の範囲から適宜選択される。
The size of the through hole (2) is not particularly limited, and is usually 50 to 1000 μm depending on the thickness of the base material (11).
s (diameter equivalent) is preferable, and the thicker the base material (1) is, the larger the hole size is, which is preferable because it improves electrical conductivity, and there is no particular restriction on the number of through holes (2). The thickness of the base material (1) according to the desired electrical resistance value,
It is determined by taking into consideration the size of the hole, the thickness of the metal vapor deposited layer (3), the type of metal, etc., and usually 10,000 to 2 million pieces 7.2
be selected as appropriate from the range.

金属蒸着層(3)に用いる金属蒸着層としては1例えば
金、銀、アルミニウム、銅、ニッケル、亜鉛、ガリウム
、インジウム、錫、珪素、クロム、チタン、白金、パラ
ジウム、ニッケルークロム、ステンレススチール、ハス
テロイなどの単体または混合物あるいは合金などからな
る金属を蒸着したものがあげられ、特に金、銀、銅、ア
ルミニウム、白金、ニッケル、パラジウムが電気伝導性
と蒸着か容易な点から好ましく用いられる。特に金属蒸
着層(6)としては前記金属を蒸着したものでその厚さ
には特に制限されるものではないか10〜1100nの
範囲か好ましい。厚さがIOr+■未満では電気伝導性
ならびに金属光沢か不充分て実用性がなく、一方厚さが
1100nを超えても金属薄膜と基材とのV、着強度の
点、作業性の点、金属光沢の点に変りかないので経済性
に劣り実用的てない。
Examples of the metal vapor deposited layer (3) include gold, silver, aluminum, copper, nickel, zinc, gallium, indium, tin, silicon, chromium, titanium, platinum, palladium, nickel-chromium, stainless steel, Examples include vapor-deposited metals such as Hastelloy, which are made of a single substance, a mixture, or an alloy. Gold, silver, copper, aluminum, platinum, nickel, and palladium are particularly preferably used because of their electrical conductivity and ease of vapor deposition. In particular, the metal vapor-deposited layer (6) is one in which the metal is vapor-deposited, and its thickness is not particularly limited, and is preferably in the range of 10 to 1100 nm. If the thickness is less than IOr+■, the electrical conductivity and metallic luster will be insufficient, making it impractical; on the other hand, even if the thickness exceeds 1100 nm, the V between the metal thin film and the base material, adhesion strength, workability, etc. Since the metallic luster remains the same, it is less economical and not practical.

本願明細書において蒸着とは、真空蒸着法、スパッタリ
ング法、イオンブレーティング法などの通常の金属など
(合金および金属化合物も含む、以下同様)の薄膜形成
方法によって金属などの薄膜を形成することを意味する
。尚、金属蒸着層は腐食防止、コストダウン、任意の色
調を得るなどのために1層に限らず、2層以上で構成す
るようにしてもよい。
In this specification, vapor deposition refers to the formation of thin films of metals, etc., by ordinary thin film forming methods of metals (including alloys and metal compounds, the same shall apply hereinafter) such as vacuum evaporation, sputtering, and ion blating. means. Note that the metal vapor deposition layer is not limited to one layer, but may be composed of two or more layers in order to prevent corrosion, reduce costs, and obtain a desired color tone.

金属落着層(3)とはこれら金属の薄膜形成方法によっ
て形成された金属の薄膜の全てを含むものとする。
The metal adhesion layer (3) includes all of the metal thin films formed by these metal thin film forming methods.

本発明の導電性シートにおいて要すれば導電性接着剤層
(5)が用いられる。導電性接着剤層(5)は。
If necessary, a conductive adhesive layer (5) is used in the conductive sheet of the present invention. The conductive adhesive layer (5).

金属蒸着層(3および被接着体に対して接着性に優れて
いることか要求される。かかる要求を満たす接着剤とし
ては1例えばポリエチレン樹脂系、ポリアミド樹脂系、
ポリエステル樹脂系、ポリブチラール樹脂系、ポリ酢酸
ビニル樹脂系、セルロース樹脂系、ポリメチルメタクリ
レート樹脂系、ポリビニルエーテル樹脂系、ポリカーボ
ネート樹脂系、エチレン−酢酸ビニル共重合体、塩素化
ポリプロピレン樹脂系、塩化ビニル−酢酸ビニル共重合
体、アクリル樹脂系、アクリル−塩化ビニル−酢酸ビニ
ル共重合体、天然ゴム、人造ゴムなど単独またはブレン
ド物の溶剤型接着剤やエマルジョン型接着剤に金属の粉
末(銀、銅、アルミニウム、ニッケル等)、非金属粉末
(無定形カーボン、グラファイト)、一部てはあるが酸
化錫、酸化インジウム等の金属酸化物などの導電性材料
が添加混合されたものが用いられる。導電性材料の添加
量はその接着剤に期待する電気導電性の程度によって適
宜決定される。
It is required to have excellent adhesion to the metal vapor deposited layer (3) and the object to be adhered. Examples of adhesives that meet this requirement are 1, for example, polyethylene resin, polyamide resin,
Polyester resin system, polybutyral resin system, polyvinyl acetate resin system, cellulose resin system, polymethyl methacrylate resin system, polyvinyl ether resin system, polycarbonate resin system, ethylene-vinyl acetate copolymer, chlorinated polypropylene resin system, vinyl chloride - Metal powders (silver, copper, , aluminum, nickel, etc.), non-metal powders (amorphous carbon, graphite), and some metal oxides such as tin oxide and indium oxide. The amount of conductive material added is appropriately determined depending on the degree of electrical conductivity expected of the adhesive.

導電性接着剤層(へ)の厚さには特に制限されるものて
はないか5〜20μsの範囲が好ましい、厚さが5−未
満ては充分な接着強度が得られずまた表面抵抗値が高く
なり実用性でない、一方厚さか20μsを超えると溶剤
が残留したり、後の各種加工工程中て導電性接着剤層(
へ)の流動化か生じるなどして工程の流れを妨げるので
実用性がない。
Is there any particular restriction on the thickness of the conductive adhesive layer? A range of 5 to 20 μs is preferable. If the thickness is less than 5 μs, sufficient adhesive strength will not be obtained and the surface resistance value will decrease. On the other hand, if the thickness exceeds 20 μs, solvent may remain or the conductive adhesive layer (
It is not practical because it may cause fluidization of the liquid (f) and impede the flow of the process.

また金属蒸着層(器自体は機械的強度が弱く摩擦による
損傷などを受けやすく特に銀、アルミニウム、銅は腐食
されやすいので金属蒸着層(3)の面上に導電性腐食防
止層を設けるようにしてもよい。
In addition, a conductive anti-corrosion layer should be provided on the surface of the metal vapor deposited layer (3), as silver, aluminum, and copper are particularly susceptible to corrosion due to their weak mechanical strength and are susceptible to damage due to friction. You can.

その厚さには特に制限はないが5〜20趨の範囲か好ま
しい、厚さか5μs未満では腐食防止効果か小さく表面
抵抗値も高く導電性腐食防止層としての実用性がない、
一方厚さが20趨を超えても効果に変りがなく経済的で
なく実用性かない。
There is no particular limit to the thickness, but it is preferably in the range of 5 to 20. If the thickness is less than 5 μs, the corrosion prevention effect will be small, the surface resistance will be high, and it will not be practical as a conductive corrosion prevention layer.
On the other hand, even if the thickness exceeds 20 mm, the effect remains the same, making it uneconomical and impractical.

かかる導電性腐食防止層を形成するための樹脂塗料とし
ては1例えば熱可塑性樹脂、熱硬化性樹脂、電子線硬化
性樹脂、紫外線硬化性樹脂のいずれかからなる塗料か用
いられ、例えばアクリル樹脂系、スチレン樹脂系、アク
リル−スチレン共重合体、塩化ビニル樹脂系、酢酸ビニ
ル樹脂系、塩化ビニル−酢酸ビニル共重合体、ポリアミ
ド樹脂系、ポリビニル−ブチラール共重合体、ポリカー
ボネート樹脂系、ニトロセルロース樹脂系、セルロース
アセテート樹脂系、ウレタン樹脂系、尿素樹脂系、メラ
ミン樹脂系、尿素−メラミン樹脂系、エポキシ樹脂系、
アルキッド樹脂系、アミノアルキッド樹脂系、ロジン変
性マレイン酸樹脂などの単独または混合物からなる樹脂
塗料に、全屈粉末(銀、銅、アルミニウム、ニッケル等
)、非金属粉末(無定形カーボン、グラファイト)、一
部であるか酸化錫、酸化インジウム等の金属酸化物など
の導電性材料が添加混合されたものか用いられる。導電
性材料の添加量はその接着剤に期待する電気導電性の程
度によって適宜決定される。
As the resin coating for forming such a conductive corrosion prevention layer, a coating made of, for example, a thermoplastic resin, a thermosetting resin, an electron beam curable resin, or an ultraviolet curable resin is used, such as an acrylic resin-based coating. , styrene resin system, acrylic-styrene copolymer, vinyl chloride resin system, vinyl acetate resin system, vinyl chloride-vinyl acetate copolymer, polyamide resin system, polyvinyl-butyral copolymer, polycarbonate resin system, nitrocellulose resin system , cellulose acetate resin system, urethane resin system, urea resin system, melamine resin system, urea-melamine resin system, epoxy resin system,
Resin paints made of alkyd resins, aminoalkyd resins, rosin-modified maleic acid resins, etc. alone or in combination, include total bending powders (silver, copper, aluminum, nickel, etc.), nonmetallic powders (amorphous carbon, graphite), A conductive material such as a metal oxide such as tin oxide or indium oxide may be added or mixed therein. The amount of conductive material added is appropriately determined depending on the degree of electrical conductivity expected of the adhesive.

導電性接着剤層(へ)の厚さには特に制限はないが5〜
20趨の範囲が好ましい、厚さが51未満では充分な接
着強度か得られず抵抗値が高く実用性がなく、一方厚さ
が20μsを超えると溶剤か残留したり、後の各種加工
工程中で導電性接着剤層(5)の流動化か生しるなどし
て工程の流れを妨げるので実用件がない。
There is no particular limit to the thickness of the conductive adhesive layer, but
A range of 20 μs is preferable. If the thickness is less than 51 μs, sufficient adhesive strength cannot be obtained and the resistance value is high, making it impractical. On the other hand, if the thickness exceeds 20 μs, solvent may remain or be used during various subsequent processing steps. This is of no practical use because it may cause the conductive adhesive layer (5) to become fluidized, thereby interfering with the flow of the process.

導電性腐食防止層の形成は、前記導電性腐食防止層を形
成する為の樹脂塗料をロールコーティング法、グラビア
コーティング法、リバースコーティング法、スプレィコ
ーティング法、デイツプコーティング法などのよくしら
れた一般的なコーティング法により塗布し、乾燥(熱硬
化性樹脂。
The conductive corrosion prevention layer can be formed by applying the resin paint to form the conductive corrosion prevention layer using well-known general methods such as roll coating, gravure coating, reverse coating, spray coating, dip coating, etc. Apply by standard coating method and dry (thermosetting resin).

電子線硬化性樹脂、紫外線硬化性樹脂などの場合は硬化
)することによつて行なうことができるほか、あらかじ
め製膜されたフィルムを貼合することによっても行なう
ことができる。
In the case of electron beam curable resins, ultraviolet ray curable resins, etc., this can be done by curing), or it can also be done by laminating a pre-formed film.

実施例1 厚さ38趨のポリエチレンテレフタレートフィルムに熱
針を用いて孔(孔の直径100μs、孔の分布密度10
万個/m”)を穿孔した有孔フィルムの両面上に高周波
加熱真空蒸着法でアルミニウムを蒸着して夫々厚さ70
n−の金属蒸着層を形成して、本発明の導電性シートを
得た。
Example 1 Holes (hole diameter 100 μs, hole distribution density 10
Aluminum was deposited on both sides of a perforated film with 70,000 holes/m" perforated by high frequency heating vacuum deposition method to a thickness of 70 mm on each side.
A conductive sheet of the present invention was obtained by forming an n- metal vapor deposition layer.

得られた導電性シートは、例えばシールド材として用い
るのに適し両面に導通が有るのでアースが容易に施工で
きる。またそのシールド効果はSOOMIIzで55d
B(TtL界波について、以下同じ)であった。
The obtained conductive sheet is suitable for use as a shielding material, for example, and has conductivity on both sides, allowing easy grounding. Also, its shield effect is 55d in SOOMIIz.
B (the same applies hereinafter for TtL field waves).

実施例2 厚さ 125μsのポリエチレンテレフタレートフィル
ムに熱針な用いて孔(孔の直径250−1孔の分布密度
30万個/■2)を穿孔した有孔フィルム表面上に、水
溶性塗料で金属蒸着層を必要としない部分に塗布し厚さ
3μsの図形を描いた0次いで該図形を描いた面上に高
周波加熱真空蒸着法でアルミニウムを蒸着して厚さ70
n■の金属蒸着層を形成し、次いで水洗を行ない水溶性
塗料の図形およびその面上の金属蒸着層を溶解除去して
所望図形の金属蒸着層を形成した0次いで該有孔フィル
ム裏面上に高周波加熱真空蒸着法でアルミニウムを蒸着
して厚さ70n■の金属蒸着層を形成して本発明の導電
性シートを得た。
Example 2 A polyethylene terephthalate film with a thickness of 125 μs was perforated with holes (diameter of 250-1 holes, distribution density: 300,000/2) using a hot needle.The surface of the perforated film was coated with metal using a water-soluble paint. A vapor-deposited layer was applied to areas that did not require it, and a figure with a thickness of 3 μs was drawn. Next, aluminum was vapor-deposited using a high-frequency heating vacuum evaporation method on the surface on which the figure was drawn, to a thickness of 70 μs.
A metal vapor deposited layer of n■ was formed, and then washed with water to dissolve and remove the pattern of the water-soluble paint and the metal vapor deposited layer on its surface to form a metal vapor deposited layer with a desired pattern. A conductive sheet of the present invention was obtained by depositing aluminum using a high frequency heating vacuum deposition method to form a metal deposited layer with a thickness of 70 nm.

得られた導電性シートは、例えば液晶、ビオロゲン等の
塗布基材として用いるのに適し両面に導通か有るのでこ
れに液晶、ビオロゲン等の塗布面と反対面から電流を通
すことによって液晶分子が配向し、ビオロゲンは電極か
らの電子注入によって還元され無色→青色→紫色と変色
していくので看板やカッティングシートや電池チエッカ
−などに使用できる。
The obtained conductive sheet is suitable for use as a substrate for coating liquid crystals, viologen, etc., and has conductivity on both sides, so by passing a current through it from the opposite side to the side coated with liquid crystal, viologen, etc., the liquid crystal molecules are aligned. However, viologen is reduced by electron injection from the electrode and changes color from colorless to blue to purple, so it can be used for signboards, cutting sheets, battery checkers, etc.

実施N3 厚さ 188μsのポリエチレンテレフタレートフィル
ムにレーザーを用いて孔(孔の直径600−1孔の分布
密度50万個/■2)を穿孔した有孔フィルムの両面上
にスパッタリング蒸着法でニッケルを蒸着して夫々厚さ
60n■の金属蒸着層を形成して、本発明の導電性シー
トを得た。
Implementation N3: A polyethylene terephthalate film with a thickness of 188 μs was made with holes (diameter of 600-1 holes, distribution density: 500,000/2) using a laser, and nickel was deposited on both sides of the perforated film using a sputtering deposition method. Then, metal vapor deposited layers each having a thickness of 60 nm were formed to obtain a conductive sheet of the present invention.

得られた導電性シートは両面間に導通が有るので例えば
積層プリント回路用基板に用いるのに適している。
Since the obtained conductive sheet has conduction between both surfaces, it is suitable for use in, for example, a laminated printed circuit board.

比較例1 厚さ38μsのポリエチレンテレフタレートフィルムを
穿孔しなかったほかは実施例1と同様にしてフィルムの
両面上に高周波加熱真空蒸着法でアルミニウムを蒸着し
て夫々厚さ?On諺の金属蒸着層を形成して両面金属蒸
着シートを得た。
Comparative Example 1 A polyethylene terephthalate film with a thickness of 38 μs was used in the same manner as in Example 1, except that no holes were formed, and aluminum was vapor-deposited on both sides of the film by high-frequency heating vacuum evaporation method. A double-sided metal-deposited sheet was obtained by forming a metal-deposited layer.

得られた両面金属蒸着シートは、例えばシールド材とし
て用いられるがその効果は500MHzで40dBであ
った。また両面間に導通性がないのでアースの施工が煩
雑であった。
The obtained double-sided metal vapor-deposited sheet was used, for example, as a shielding material, and its effectiveness was 40 dB at 500 MHz. Furthermore, since there is no conductivity between both surfaces, grounding is complicated.

得られた本発明の導電性シートにおける両面間の導通性
と孔の直径、孔の分布密度、フィルムの厚さ、金属蒸着
層の厚さとの関係は第1表〜第4表に示す通りであった
。第1表はフィルムの厚さ、金属蒸着層の厚さ、孔の直
径がそれぞれ25μs、80n讃、 100μs一定の
時の孔の分布密度(万個/12)と両面間の導通性(Ω
/cm”)との関係を、第2表はフィルムの厚さ、金居
蒸M層の厚さ、孔の分布密度がそれぞれ25μs、80
n■。
The relationship between the conductivity between both surfaces of the obtained conductive sheet of the present invention, the diameter of the pores, the distribution density of the pores, the thickness of the film, and the thickness of the metal vapor deposited layer is as shown in Tables 1 to 4. there were. Table 1 shows the distribution density of pores (10,000/12) and the conductivity between both surfaces (Ω) when the film thickness, metal vapor deposition layer thickness, and pore diameter are constant for 25 μs, 80 μs, and 100 μs, respectively.
Table 2 shows the relationship between film thickness, Kanai vapor M layer thickness, and pore distribution density of 25 μs and 80 μs, respectively.
n■.

90万個/諺2一定の時の孔の孔の直径(趨)と両面間
の導通性(Ω/cm’)との関係を、第3表はフィルム
の厚さ、孔の直径、孔の分布密度かそれぞれ25μs、
 ioog、90万個/會2一定の時の金属蒸着層の厚
さ(n■)と両面間の導通性(Ω/C■2)との関係を
、第4表は金属蒸着層の厚さ、孔の直径、孔の分布密度
がそれぞれ80n■、100μs、90万個/■!一定
の時のフィルムの厚さ(μs)と両面間の導通性(Ω/
C間2)との関係を測った [発明の効果] 実施例1.実施例2、実施例3および比較例1で説明し
たように本発明によれば、表裏両面間に導通性を有する
全く新規な優れた導電性シートを得ることができる。
900,000/proverb 2 Table 3 shows the relationship between the diameter (trend) of the pores and the conductivity between both surfaces (Ω/cm') at a constant value. distribution density or 25 μs each,
Table 4 shows the relationship between the thickness of the metal vapor deposited layer (n■) and the conductivity between both sides (Ω/C■2) at a constant value of 900,000 pieces/party 2. , pore diameter, and pore distribution density are 80n■, 100μs, and 900,000 pieces/■, respectively! Film thickness (μs) and conductivity between both sides (Ω/
Measurement of the relationship between C and 2) [Effects of the invention] Example 1. As explained in Example 2, Example 3, and Comparative Example 1, according to the present invention, a completely novel and excellent conductive sheet having conductivity between the front and back surfaces can be obtained.

第 第 表 表 第1表 第 表No. No. table table Table 1 No. table

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の導電性シートの基本構成を示す断面図
、第2図は本発明の導電性シートの他の実施態様例の構
成を示す断面図である。 (図面の符号) (1)二基材 (2):貫通孔 (3):金属蒸着層 G4):内壁 (5):導電性接着剤層 第  1  図
FIG. 1 is a cross-sectional view showing the basic structure of the conductive sheet of the present invention, and FIG. 2 is a cross-sectional view showing the structure of another embodiment of the conductive sheet of the present invention. (Numbers in drawings) (1) Two base materials (2): Through hole (3): Metal vapor deposited layer G4): Inner wall (5): Conductive adhesive layer Fig. 1

Claims (1)

【特許請求の範囲】[Claims] 1 貫通孔を有する基材の表裏両面に金属蒸着層が形成
され、該貫通孔の少なくとも一部は該貫通孔の内壁にも
金属蒸着層が形成されていて、該表裏両面の金属蒸着層
が貫通孔を通して電気的に接続されてなる導電性シート
1 A metal vapor deposited layer is formed on both the front and back surfaces of a base material having a through hole, a metal vapor deposited layer is also formed on the inner wall of at least a part of the through hole, and the metal vapor deposited layer on both the front and back surfaces is formed. A conductive sheet that is electrically connected through through holes.
JP63036670A 1988-02-19 1988-02-19 Conductive sheet Expired - Lifetime JP2668234B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63036670A JP2668234B2 (en) 1988-02-19 1988-02-19 Conductive sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63036670A JP2668234B2 (en) 1988-02-19 1988-02-19 Conductive sheet

Publications (2)

Publication Number Publication Date
JPH0221507A true JPH0221507A (en) 1990-01-24
JP2668234B2 JP2668234B2 (en) 1997-10-27

Family

ID=12476291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63036670A Expired - Lifetime JP2668234B2 (en) 1988-02-19 1988-02-19 Conductive sheet

Country Status (1)

Country Link
JP (1) JP2668234B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183204B2 (en) 2002-11-20 2007-02-27 Renesas Technology Corp. Semiconductor device including gate electrode for applying tensile stress to silicon substrate, and method of manufacturing the same
US7199049B2 (en) 2004-07-27 2007-04-03 Seiko Epson Corporation Methods for forming contact hole, for manufacturing circuit board and for manufacturing electro-optical device
US11266225B2 (en) 2018-12-13 2022-03-08 Milwaukee Electric Tool Corporation Lanyard clip
CN115534433A (en) * 2022-10-27 2022-12-30 李露 Preparation method of graphite modified rock wool board

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160997A (en) * 1974-11-25 1976-05-27 Mitsubishi Plastics Ind DODENFUIRUMU

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160997A (en) * 1974-11-25 1976-05-27 Mitsubishi Plastics Ind DODENFUIRUMU

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183204B2 (en) 2002-11-20 2007-02-27 Renesas Technology Corp. Semiconductor device including gate electrode for applying tensile stress to silicon substrate, and method of manufacturing the same
US7199049B2 (en) 2004-07-27 2007-04-03 Seiko Epson Corporation Methods for forming contact hole, for manufacturing circuit board and for manufacturing electro-optical device
CN100394558C (en) * 2004-07-27 2008-06-11 精工爱普生株式会社 Contact hole forming method, circuit board and electro-optical device manufacturing method
US7459793B2 (en) 2004-07-27 2008-12-02 Seiko Epson Corporation Methods for forming contact hole, for manufacturing circuit board and for manufacturing electro-optical device
US11266225B2 (en) 2018-12-13 2022-03-08 Milwaukee Electric Tool Corporation Lanyard clip
CN115534433A (en) * 2022-10-27 2022-12-30 李露 Preparation method of graphite modified rock wool board

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