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JPH0221253B2 - - Google Patents

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Publication number
JPH0221253B2
JPH0221253B2 JP58102026A JP10202683A JPH0221253B2 JP H0221253 B2 JPH0221253 B2 JP H0221253B2 JP 58102026 A JP58102026 A JP 58102026A JP 10202683 A JP10202683 A JP 10202683A JP H0221253 B2 JPH0221253 B2 JP H0221253B2
Authority
JP
Japan
Prior art keywords
back load
probe
acoustic impedance
sec
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58102026A
Other languages
Japanese (ja)
Other versions
JPS59225045A (en
Inventor
Takayoshi Saito
Masami Kawabuchi
Keisaku Yamaguchi
Keiji Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10202683A priority Critical patent/JPS59225045A/en
Priority to DE8484303872T priority patent/DE3483174D1/en
Priority to EP84303872A priority patent/EP0128049B1/en
Priority to US06/618,369 priority patent/US4571520A/en
Publication of JPS59225045A publication Critical patent/JPS59225045A/en
Publication of JPH0221253B2 publication Critical patent/JPH0221253B2/ja
Granted legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、医用超音波診断装置に用いられる超
音波探触子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultrasound probe used in a medical ultrasound diagnostic apparatus.

従来例の構成とその問題点 従来の超音波探触子、特に医用超音波診断装置
に用いられる探触子は、一般に第1図に示すよう
な構造を有している。第1図は短冊状の圧電振動
子を直線上に配列した直線電子走査型超音波探触
子に用いられる一般的構造を示す。
Structure of conventional example and its problems A conventional ultrasonic probe, particularly a probe used in a medical ultrasonic diagnostic apparatus, generally has a structure as shown in FIG. FIG. 1 shows a general structure used in a linear electronic scanning ultrasonic probe in which strip-shaped piezoelectric vibrators are arranged in a straight line.

第1図のものは圧電振動子1の上に一層以上の
音響整合層2を設けた構成をしており、圧電振動
子1の振動方向に設けた電極4に外部から制御さ
れた電気信号を印加することによつて、超音波6
を音響整合層2側から放射するもので、かつ圧電
振動子1の音響整合層2と反対側に背面負荷材5
を設けた構成を有している。この背面負荷材5に
は一般に、タングステン粉末を充填したプラスチ
ツク材やフエライトゴムなどのような比較的硬く
(硬度(JIS−A)で85以上)、音響インピーダン
スが6×105g/cm2・sec以上でしかも、音波の吸
収が大きい材料が用いられる場合と、シリコンゴ
ムに酸化アルミナ等を充填したゲル状でかつ、音
響インピーダンスが1.5×105g/cm2・sec以下の
材料を用いている。なお、これらの材料のもつ音
波吸収係数は約1.5dB/mm(3MHz)以上である。
The one in Fig. 1 has a structure in which one or more acoustic matching layers 2 are provided on a piezoelectric vibrator 1, and an electrical signal controlled from the outside is sent to an electrode 4 provided in the vibration direction of the piezoelectric vibrator 1. By applying ultrasound 6
is radiated from the acoustic matching layer 2 side, and a back loading material 5 is provided on the opposite side of the acoustic matching layer 2 of the piezoelectric vibrator 1.
It has a configuration with. This back load material 5 is generally made of a relatively hard material (hardness (JIS-A) of 85 or more) such as plastic material filled with tungsten powder or ferrite rubber, and has an acoustic impedance of 6×10 5 g/cm 2 . sec or more and has a large absorption of sound waves, or a gel-like material made of silicone rubber filled with alumina oxide etc. and whose acoustic impedance is 1.5×10 5 g/cm 2・sec or less. There is. Note that the sound wave absorption coefficient of these materials is approximately 1.5 dB/mm (3 MHz) or higher.

前者のような材料を背面負荷材5とした場合
は、硬度が高いため機械的強度が大きく探触子振
動子面の破損が少ないという長所はあるが、音響
インピーダンスが6×105g/cm2・sec以上であ
り、圧電振動子1の音響インピーダンス(圧電セ
ラミツクの場合、音響インピーダンスは30×105
g/cm2・sec前後である。)に近くなるため、音響
的整合が後者に比較的良く、したがつて、背面負
荷材5側にも音波が伝搬してしまうために感度が
低下するという欠点を有している。一方、後者の
ような材料を背面負荷材5とした場合は、前者と
は逆に音響インピーダンスが1〜1.5×105g/
cm2・secであり、圧電振動子1との音響的な不整
合により、背面負荷材5側への音波の伝搬が小さ
くなる。したがつて、前者と比較して感度の低下
が少ないという長所はある。しかし背面負荷材5
が軟いため探触子振動子面に加えられた機械的衝
撃、圧力により、探触子が破損しやすいという欠
点を有している。
If the former material is used as the back loading material 5, it has the advantage of high mechanical strength due to its high hardness and less damage to the probe vibrator surface, but the acoustic impedance is 6 x 10 5 g/cm. 2 sec or more, and the acoustic impedance of piezoelectric vibrator 1 (in the case of piezoelectric ceramic, the acoustic impedance is 30×10 5
It is around g/cm 2 ·sec. ), the acoustic matching is relatively better in the latter case, but the latter has the disadvantage that the sound waves propagate also to the back load material 5 side, resulting in a decrease in sensitivity. On the other hand, when the latter material is used as the back load material 5, the acoustic impedance is 1 to 1.5×10 5 g/contrary to the former.
cm 2 ·sec, and due to the acoustic mismatch with the piezoelectric vibrator 1, the propagation of the sound wave toward the back load material 5 side becomes smaller. Therefore, compared to the former, it has the advantage of less deterioration in sensitivity. However, the back load material 5
Since it is soft, it has the disadvantage that the probe is easily damaged by mechanical shock or pressure applied to the probe vibrator surface.

発明の目的 本発明は以上のような従来の問題点を解決する
ためになされたもので、感度低下を少なくし、し
かも機械的強度を大きくして破損の欠点を除去し
た新しい背面負荷材料を備えた超音波探触子を提
供することを目的とするものである。
Purpose of the Invention The present invention has been made in order to solve the above-mentioned conventional problems, and is equipped with a new back-loading material that reduces sensitivity loss, increases mechanical strength, and eliminates the disadvantage of breakage. The purpose of the present invention is to provide an ultrasonic probe with improved characteristics.

発明の構成 この目的を達成するために、本発明に係る超音
波探触子は、圧電振動子、単層あるいは多層の音
響合層、背面負荷より少なくとも構成され、かつ
当該背面負荷が所定の硬度、音波吸収係数、音響
インピーダンスを有している事を特徴とした構成
となつている。
Structure of the Invention In order to achieve this object, an ultrasonic probe according to the present invention comprises at least a piezoelectric vibrator, a single layer or multilayer acoustic composite layer, and a back load, and the back load has a predetermined hardness. , a sound wave absorption coefficient, and an acoustic impedance.

実施例の説明 以下に本発明の実施例について図面を用いて説
明する。第2図は本発明の実施例を示す斜視図で
あり、圧電振動子11の被検体に接する側には単
層もしくは多層の音響整合層12,13を設けて
あり、必要に応じて更に音響レンズ17を設け
る。圧電振動子11の反対側には背面負荷材15
を流し込みによつて形成、あるいは成形した背面
負荷材15を接着する。なお、背面負荷材15の
一方の端面は超音波を散乱させるため、凹凸の構
造にしても良いこの背面負荷材15はウレタンゴ
ムあるいは、ウレタンゴムにガラス中空体やプラ
スチツク中空体などの粉末を充填したものを用い
る。例えば、アダプトE−No.1(国際ケミカル製)
のウレタンゴムの場合は、音響インピーダンスは
2.1×105g/cm2・secで、硬度(JIS−A)は98
で、音波吸数係数は3MHzで2dB/mmである。ま
た上記のウレタンゴムを使用し、100μm前後の
粒径のガラス中空体を重量比で15%充填した場
合、音響インピーダンスは1.7×105g/cm2・sec
で、硬度(JIS−A)は98〜99で、音波吸収係数
は3MHzで2.5dB/mmとなる。
DESCRIPTION OF EMBODIMENTS Examples of the present invention will be described below with reference to the drawings. FIG. 2 is a perspective view showing an embodiment of the present invention, in which single-layer or multi-layer acoustic matching layers 12 and 13 are provided on the side of the piezoelectric vibrator 11 in contact with the subject, and if necessary, acoustic matching layers 12 and 13 are provided. A lens 17 is provided. A back load material 15 is provided on the opposite side of the piezoelectric vibrator 11.
A back load material 15 formed by pouring or molding is bonded. Note that one end surface of the back load material 15 may have an uneven structure in order to scatter ultrasonic waves. Use the one you made. For example, Adapt E-No.1 (manufactured by Kokusai Chemical)
In the case of urethane rubber, the acoustic impedance is
2.1×10 5 g/cm 2・sec, hardness (JIS-A) is 98
The acoustic absorption coefficient is 2 dB/mm at 3 MHz. Furthermore, when using the above urethane rubber and filling 15% by weight of glass hollow bodies with a particle size of around 100 μm, the acoustic impedance is 1.7 × 10 5 g/cm 2 sec.
The hardness (JIS-A) is 98 to 99, and the sound absorption coefficient is 2.5 dB/mm at 3 MHz.

圧電振動子11の付着している面と対向してい
る背面負荷材15の端面からの不要な音波の反射
をなくし、更に、広い信号のダイナミツクレンジ
を得るためには、音波吸収係数の大きい背面負荷
材が望ましい。例えば、ダイナミツクレンジを
100dB必要とした場合、上記の音波吸収係数
2.5dB/mmの本実施例の材料では、背面負荷材端
面から音波の反射をなくすためには、厚みを20mm
以上にすれば良く、従来の煙音波探触子のそれと
遜色はない。
In order to eliminate unnecessary reflection of sound waves from the end surface of the back load material 15 facing the surface to which the piezoelectric vibrator 11 is attached, and furthermore to obtain a wide signal dynamic range, it is necessary to use a material with a large sound wave absorption coefficient. Back loading material is preferred. For example, dynamite cleanse
If 100dB is required, the above sound wave absorption coefficient
For the material of this example with a rating of 2.5 dB/mm, the thickness must be 20 mm in order to eliminate the reflection of sound waves from the end face of the back load material.
The above is sufficient, and there is no inferiority to that of a conventional smoke sonic probe.

なおウレタンゴムには硬度が約85で、音響イン
ピーダンスが約3×105g/cm2・secで、音波吸収
係数が3MHzで1.5〜2dB/mm程度のものもあり、
これはそのまま本実施例の背面負荷材15として
使用できる。もちろん感度に関しては、背面負荷
の音響インピーダンスが低いほど望ましいが、前
述したウレタンゴムをベースにガラス中空体の充
填量を可変することにより、硬度および音波吸収
係数をほぼ上記程度に維持したまま音響インピー
ダンスを1×105g/cm2・sec程度まで下げること
ができた。この場合粘性等を考慮すると工業的に
は1×105g/cm2・secが音響インピーダンスの下
限値であり、背面負荷材15の音響インピーダン
スとしては1〜3×105g/cm2・secであることが
望ましい。これは背面負荷の無い場合に比べて、
最大約2dBの感度低下となるが、装置設計上ある
いは臨床応用上、約2dBの感度低下は許容し得る
し、また従来のフユライトゴム等を用いたものに
比べ4〜9dB高く、シリコン等のゲル状の背面負
荷材を用いた場合とほぼ同等な感度を実現でき
た。
In addition, some urethane rubbers have a hardness of approximately 85, an acoustic impedance of approximately 3 x 10 5 g/cm 2 sec, and a sound wave absorption coefficient of approximately 1.5 to 2 dB/mm at 3 MHz.
This can be used as it is as the back load material 15 of this embodiment. Of course, in terms of sensitivity, the lower the acoustic impedance of the back load, the better, but by varying the filling amount of the glass hollow body based on the urethane rubber mentioned above, the acoustic impedance can be reduced while maintaining the hardness and sound wave absorption coefficient at approximately the above levels. It was possible to lower the value to about 1×10 5 g/cm 2 ·sec. In this case, considering viscosity etc., the lower limit of the acoustic impedance is industrially 1×10 5 g/cm 2 ·sec, and the acoustic impedance of the back load material 15 is 1 to 3×10 5 g/cm 2 · Preferably sec. This is compared to the case without back load.
The maximum sensitivity decrease is about 2 dB, but the sensitivity decrease of about 2 dB is acceptable in terms of device design or clinical application. We were able to achieve almost the same sensitivity as when using a back-loaded material.

また背面負荷材15の硬度は、探触子の機械的
強度に直接関係し、硬い程望ましいが、振動子面
の機械的破損が実用上問題とならない値は85(JIS
−A)以上である。ちなみに、本実施例の場合、
硬度的には、機械的破損に強いとされるフエライ
トゴム等とほぼ等しいか、それ以上であり、また
シリコンゴムのようなゲル状の背面負荷材を用い
た場合に比べ約10倍の機械的強度向上が実現でき
た。
The hardness of the back loading material 15 is directly related to the mechanical strength of the probe, and the harder it is, the better, but the value at which mechanical damage to the transducer surface does not pose a practical problem is 85 (JIS
-A) That's all. By the way, in the case of this example,
In terms of hardness, it is approximately equal to or higher than ferrite rubber, which is said to be resistant to mechanical damage, and is approximately 10 times more durable than gel-like back loading materials such as silicone rubber. We were able to improve the strength.

さらに背面負荷材15の音波吸収係数は大であ
ればあるほど背面負荷材15の厚さを薄くするこ
とができる事は言うまでもないが、前述した音響
インピーダンス、硬度等の他の主要なパラメータ
を同時に満足させることが難しくなる。これらの
点を考慮して音波吸収係数が1.5dB/mm以上
(3MHz)であることが実用上望ましく、たとえば
前記実施例で述べた、音波吸収係数が1.5〜
2.5dB/mm(3MHz)の背面負荷材15を用いた
探触子を100dBの表示ダイナミツクレンジをもつ
超音波診断装置に接続して使用する場合、背面負
荷の端面からの反射を無くするための厚さは20〜
34mmとなり、超音波探触子の外形寸法を著しく大
きくすることなく構成できる。
Furthermore, it goes without saying that the larger the acoustic wave absorption coefficient of the back loading material 15, the thinner the thickness of the back loading material 15 can be. It becomes difficult to satisfy. Considering these points, it is practically desirable that the sound wave absorption coefficient is 1.5 dB/mm or more (3 MHz). For example, as described in the above embodiment, the sound wave absorption coefficient is 1.5 to
When using a probe using a 2.5 dB/mm (3 MHz) back load material 15 connected to an ultrasonic diagnostic device with a display dynamic range of 100 dB, in order to eliminate reflections from the end face of the back load. The thickness is 20~
34mm, which allows the ultrasonic probe to be configured without significantly increasing its external dimensions.

更に、本実施例に係る背面負荷材料は、圧電振
動子、音響整合層、音響レンジ等を全て構成した
後、当該材料を流し込んで製作することもでき、
またあらかじめ、当該背面負荷材料を所定の形状
の型で成形しておき、その成形された背面負荷材
(ブロツク)を圧電振動子に接着して製作するこ
とも可能である。
Furthermore, the back load material according to this example can also be manufactured by pouring the material after all the piezoelectric vibrators, acoustic matching layers, acoustic ranges, etc. have been constructed.
It is also possible to manufacture the piezoelectric vibrator by molding the backside load material in advance with a mold of a predetermined shape, and then bonding the formed backside load material (block) to the piezoelectric vibrator.

なお上記実施例はウレタンゴムにガラス中空体
を充填して音響インピーダンスを制御する場合に
ついて述べたが、プラスチツク中空体を充填した
場合においても同様の効果が得られた。
In the above embodiment, the acoustic impedance was controlled by filling the urethane rubber with a glass hollow body, but the same effect was obtained when the urethane rubber was filled with a plastic hollow body.

また、実施例においては、圧電振動子を直線状
に配列した、いわゆるアレイ型超音波探触子に適
用した場合について述べたが、本発明は圧電振動
子が1枚の単一型超音波探触子や、弧状配列型超
音波探触子などの種々の超音波探触子に適用でき
ることは明らかである。
Furthermore, in the embodiment, a case has been described in which the piezoelectric vibrators are applied to a so-called array type ultrasonic probe in which the piezoelectric vibrators are arranged in a linear manner. It is clear that the present invention can be applied to various ultrasonic probes such as a probe and an arcuate array type ultrasonic probe.

発明の効果 以上のように本発明によれば、音波を送受信す
る圧電振動子の一方の音波送受信側に、音響イン
ピーダンスが、1.0×105〜3×105g/cm2・sec、
硬度(JIS−A)が85以上、及び超音波吸収係数
が3MHzの周波数で1.5dB/mm以上の材料を背面
負荷として設けたことを特徴とする超音波探触子
を提供するもので、送受信信号が背面負荷材に伝
搬することが少なく、感度の低下を防止でき、ダ
イナミツクレンジが広くとれる。また硬度が高い
ため、機械的強度が大きく探触子の振動子面の破
損も防止できる。したがつて信頼性の高い探触子
が得られる等の利点を有する。
Effects of the Invention As described above, according to the present invention, one of the sound wave transmitting and receiving sides of the piezoelectric vibrator that transmits and receives sound waves has an acoustic impedance of 1.0×10 5 to 3×10 5 g/cm 2 ·sec,
The present invention provides an ultrasonic probe equipped with a material with hardness (JIS-A) of 85 or higher and an ultrasonic absorption coefficient of 1.5 dB/mm or higher at a frequency of 3 MHz as a back load. Signals are less likely to propagate to the backside load material, preventing a decrease in sensitivity and providing a wide dynamic range. Furthermore, since it has high hardness, it has high mechanical strength and can prevent damage to the transducer surface of the probe. Therefore, it has the advantage that a highly reliable probe can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の超音波探触子の斜視図、第2図
は本発明の実施例における超音波探触子の斜視図
である。 11……圧電振動子、12,13……音響整合
層、15……背面負荷材、17……音響レンズ。
FIG. 1 is a perspective view of a conventional ultrasound probe, and FIG. 2 is a perspective view of an ultrasound probe according to an embodiment of the present invention. 11... Piezoelectric vibrator, 12, 13... Acoustic matching layer, 15... Back load material, 17... Acoustic lens.

Claims (1)

【特許請求の範囲】 1 音波を送受信する圧電振動子の一方の音波送
受信側に音響インピーダンスが1.0×105〜3×
105g/cm2・sec、硬度(JIS−A)が85以上、超
音波吸収係数が3MHzの周波数で1.5dB/mm以上
の材料を背面負荷として設けたことを特徴とする
超音波探触子。 2 ウレタンゴムを背面負荷に用いたことを特徴
とする特許請求の範囲第1項記載の超音波探触
子。 3 ウレタンゴムにガラス中空体またはプラスチ
ツク中空体を充填した材料を背面負荷に用いたこ
とを特徴とする特許請求の範囲第1項記載の超音
波探触子。
[Claims] 1. Acoustic impedance is 1.0×10 5 to 3× on one sound wave transmitting/receiving side of the piezoelectric vibrator that transmits and receives sound waves.
10 5 g/cm 2 sec, hardness (JIS-A) of 85 or more, and an ultrasonic absorption coefficient of 1.5 dB/mm or more at a frequency of 3 MHz provided as a back load. Child. 2. The ultrasonic probe according to claim 1, characterized in that urethane rubber is used for the back load. 3. The ultrasonic probe according to claim 1, characterized in that a material made of urethane rubber filled with glass hollow bodies or plastic hollow bodies is used for back loading.
JP10202683A 1983-06-07 1983-06-07 Ultrasonic probe Granted JPS59225045A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10202683A JPS59225045A (en) 1983-06-07 1983-06-07 Ultrasonic probe
DE8484303872T DE3483174D1 (en) 1983-06-07 1984-06-07 ULTRASONIC TRANSMITTER WITH AN ABSORBING CARRIER.
EP84303872A EP0128049B1 (en) 1983-06-07 1984-06-07 Ultrasonic probe having a backing member
US06/618,369 US4571520A (en) 1983-06-07 1984-06-07 Ultrasonic probe having a backing member of microballoons in urethane rubber or thermosetting resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10202683A JPS59225045A (en) 1983-06-07 1983-06-07 Ultrasonic probe

Publications (2)

Publication Number Publication Date
JPS59225045A JPS59225045A (en) 1984-12-18
JPH0221253B2 true JPH0221253B2 (en) 1990-05-14

Family

ID=14316239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10202683A Granted JPS59225045A (en) 1983-06-07 1983-06-07 Ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS59225045A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04352950A (en) * 1991-05-30 1992-12-08 Matsushita Electric Ind Co Ltd Ultrasonic probe
CN1890707B (en) * 2003-12-04 2011-04-13 皇家飞利浦电子股份有限公司 Implementing IC mounted sensor with high attenuation backing
EP2348503B1 (en) * 2010-01-19 2015-03-11 Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. Ultrasound sensor for recording and/or scanning objects and corresponding manufacturing method
JP6188335B2 (en) * 2013-01-31 2017-08-30 積水化学工業株式会社 Leak detector, leak position specifying method and piping device
JP7067218B2 (en) 2018-04-09 2022-05-16 コニカミノルタ株式会社 Ultrasonic probe and ultrasonic diagnostic equipment

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Publication number Priority date Publication date Assignee Title
JPS555678A (en) * 1978-04-19 1980-01-16 Commw Of Australia Ultrasoniccwave inspection device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555678A (en) * 1978-04-19 1980-01-16 Commw Of Australia Ultrasoniccwave inspection device

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JPS59225045A (en) 1984-12-18

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