JPH02210455A - Electrophotographic sensitive body - Google Patents
Electrophotographic sensitive bodyInfo
- Publication number
- JPH02210455A JPH02210455A JP3221589A JP3221589A JPH02210455A JP H02210455 A JPH02210455 A JP H02210455A JP 3221589 A JP3221589 A JP 3221589A JP 3221589 A JP3221589 A JP 3221589A JP H02210455 A JPH02210455 A JP H02210455A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- carbon
- protective surface
- resin
- photosensitive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 229910052799 carbon Inorganic materials 0.000 abstract description 38
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- 229920005989 resin Polymers 0.000 abstract description 34
- 239000011347 resin Substances 0.000 abstract description 34
- 239000010409 thin film Substances 0.000 abstract description 8
- 230000001070 adhesive effect Effects 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000002344 surface layer Substances 0.000 abstract 4
- 108091008695 photoreceptors Proteins 0.000 description 30
- 239000011241 protective layer Substances 0.000 description 29
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- 238000006243 chemical reaction Methods 0.000 description 11
- 238000000576 coating method Methods 0.000 description 10
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- 238000005268 plasma chemical vapour deposition Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
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- -1 arsenic selenide Chemical class 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
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- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
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- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
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- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
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- 150000002367 halogens Chemical class 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
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- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical group C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 2
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- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 239000005033 polyvinylidene chloride Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- NGQSLSMAEVWNPU-UHFFFAOYSA-N 1,2-bis(2-phenylethenyl)benzene Chemical group C=1C=CC=CC=1C=CC1=CC=CC=C1C=CC1=CC=CC=C1 NGQSLSMAEVWNPU-UHFFFAOYSA-N 0.000 description 1
- OFHQVNFSKOBBGG-UHFFFAOYSA-N 1,2-difluoropropane Chemical compound CC(F)CF OFHQVNFSKOBBGG-UHFFFAOYSA-N 0.000 description 1
- VERMWGQSKPXSPZ-BUHFOSPRSA-N 1-[(e)-2-phenylethenyl]anthracene Chemical compound C=1C=CC2=CC3=CC=CC=C3C=C2C=1\C=C\C1=CC=CC=C1 VERMWGQSKPXSPZ-BUHFOSPRSA-N 0.000 description 1
- JOERSAVCLPYNIZ-UHFFFAOYSA-N 2,4,5,7-tetranitrofluoren-9-one Chemical compound O=C1C2=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C2C2=C1C=C([N+](=O)[O-])C=C2[N+]([O-])=O JOERSAVCLPYNIZ-UHFFFAOYSA-N 0.000 description 1
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- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000270281 Coluber constrictor Species 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
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- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910000349 titanium oxysulfate Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 150000001651 triphenylamine derivatives Chemical class 0.000 description 1
- 125000006617 triphenylamine group Chemical group 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は有機系感光層」―に表面保護層を有して成る電
子写真用感光体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electrophotographic photoreceptor comprising a surface protective layer on an organic photosensitive layer.
従来、電子写真方式に於いて使用される感光体としては
、導電性支持体上にセレンないしセレン合金を主体とす
る光導電層を設けたもの、酸化亜鉛、硫酸カドミウムな
どの無機系光導電材料をバインダー中に分散させたもの
、ポリ−N−ビニルカルバゾールとトリニI−ロフルオ
レノンあるいはアゾ顔料などの有機光導電材料を用いた
もの、及び非晶質シリコン系材料を用いたもの等が一般
に知られている。Conventionally, photoreceptors used in electrophotography include those with a photoconductive layer mainly made of selenium or selenium alloys on a conductive support, and inorganic photoconductive materials such as zinc oxide and cadmium sulfate. Generally known methods include those using organic photoconductive materials such as poly-N-vinylcarbazole and trini-I-rofluorenone or azo pigments, and those using amorphous silicon-based materials. It is being
ところで、一般に「電子写真方式Jとは、光導電性の感
光体をまず暗所で、例えばコロナ放電によって帯電させ
、次いで像露光し、露光部のみの電荷を選択的に散逸せ
しめて静電潜像を得、この潜像部を染料、顔料などの着
色材と高分子物質などの結合剤とから構成される検電微
粒子(トナー)で現像し可視化して画像を形成する様に
した画像形成法の一つである。By the way, in general, ``electrophotographic method J'' refers to a photoconductive photoreceptor that is first charged in a dark place by, for example, corona discharge, and then imagewise exposed to selectively dissipate the charge only in the exposed area to create an electrostatic latent material. Image formation in which an image is obtained by obtaining an image, and developing and visualizing this latent image area with electrostatic fine particles (toner) made of coloring materials such as dyes and pigments and binders such as polymeric substances to form an image. It is one of the laws.
この様な電子写真法に於いて感光体に要求される基本的
な特性としては
(1)暗所で適当な電位に帯電できること。The basic characteristics required of the photoreceptor in such electrophotography are (1) the ability to be charged to an appropriate potential in a dark place;
(2)暗所において電荷の散逸が少ないこと。(2) Less charge dissipation in the dark.
(3)光照射によって速やかに電荷を散逸できること。(3) Charge can be quickly dissipated by light irradiation.
などが挙げられる。Examples include.
上記の各感光体はこれらの基本的な特性以外に実使用」
二それぞれ優れた特徴及び欠点を有しているが、なかで
も近年は製造コストが安い、環境汚染が少ない、比較的
自由な感光体設計ができる等の理由により、有機系感光
体の発展が著しい。In addition to these basic characteristics, each of the above photoreceptors has practical usage.
Each of the two has excellent features and drawbacks, but in recent years, organic photoreceptors have made remarkable progress due to their low manufacturing costs, low environmental pollution, and relatively flexible photoreceptor design. .
一般に、有機系感光体とは電荷発生材料及び電荷輸送材
料を結着樹脂の中へ分散あるいは溶解して導電性支持体
」二に塗布したものであり、ひとつの層で電荷保持、電
荷発生、電荷輸送の機能を有する単層型と電荷発生の機
能を有する電荷発生J−(CGL)、帯電電荷の保持と
CGLから注入された電荷の輸送機能を有する電荷輸送
層(CTL)、更には必要に応じて支持体からの電荷の
注入を阻止する、あるいは支持体での光の反射を防止す
る等の機能を有したJ噌などを積層した構成の機能分離
型とが知られている。In general, an organic photoreceptor is one in which a charge-generating material and a charge-transporting material are dispersed or dissolved in a binder resin and coated on a conductive support. A single-layer type with a charge transport function, a charge generation J-(CGL) with a charge generation function, a charge transport layer (CTL) with a function of holding charged charges and transporting charges injected from the CGL, and further necessary A functionally separated type is known, which has a structure in which layers such as J-shaped layers are laminated, which have functions such as blocking the injection of charge from the support or preventing the reflection of light on the support.
これらの有機系感光体は前述のように優れた特徴を有し
ているが、有機材料であるがゆえに表面硬度が低く、複
写プロセスでの実使用時に現像剤転写紙、クリーニング
部材等から受ける機械的な負荷によって、摩耗や傷が発
生しやすいという本質的な欠点も有している。These organic photoreceptors have excellent characteristics as mentioned above, but because they are made of organic materials, their surface hardness is low, and they are susceptible to mechanical damage from developer transfer paper, cleaning materials, etc. during actual use in the copying process. It also has the essential drawback of being susceptible to wear and scratches due to heavy loads.
この感光層の摩耗は、帯電電位の減少をひきおこし、ま
た局部的な傷はコピー上でスジ状の異常画像を発生させ
る原因になり、いずれも感光体寿命を左右する重要な問
題である。This abrasion of the photosensitive layer causes a decrease in the charging potential, and local scratches cause streak-like abnormal images to appear on copies, both of which are important problems that affect the life of the photoreceptor.
この様な欠点を解消する為に有機系感光層の表面に保護
層を設けて、複写機内外で受ける機械的負荷に対する耐
久性を改善する方法が提案されている。In order to overcome these drawbacks, a method has been proposed in which a protective layer is provided on the surface of the organic photosensitive layer to improve its durability against mechanical loads received inside and outside the copying machine.
たとえば、感光層の表面に有機フィルムを設ける方法(
特公昭38−015446)、無機酸化物を設ける方法
(特公昭43−01.4.517 )、接着層を設けた
後、絶縁層を積層する方法(特公昭43−027591
)、或いはプラズマCVD法・光CVD法等によってa
−3i層、5−3j、:N:8層、a−5i:O:8層
等を積層する方法(特開昭57−179859、特開昭
59−058437)などが開示されている。For example, a method of providing an organic film on the surface of a photosensitive layer (
Japanese Patent Publication No. 38-015446), method of providing an inorganic oxide (Japanese Patent Publication No. 43-01.4.517), method of laminating an insulating layer after providing an adhesive layer (Japanese Patent Publication No. 43-027591)
), or a by plasma CVD method, photo CVD method, etc.
A method of stacking -3i layer, 5-3j, :N:8 layer, a-5i:O:8 layer, etc. (Japanese Patent Laid-Open No. 57-179859, Japanese Patent Laid-Open No. 59-058437) has been disclosed.
また、近年、高硬度ダイアモンド状カーボン膜の保護層
への応用が活発化している。Furthermore, in recent years, the application of high-hardness diamond-like carbon films to protective layers has become active.
たとえば、感光層上に無定形炭素又は硬質炭素から成る
保護層を設けたもの(特開昭6O−249155)、最
表面にダイヤモンド状カーボン保護層を設けたもの(特
開昭61.−255352 )、感光層上に炭素後主成
分とする高硬度絶縁ノーを形成したもの(特開昭612
64355)あるいは有機感光層上に窒素原子、酸素原
子、ハロゲン原子、アルカリ金m1FA子等の原子を少
なくとも含むプラズマ有機重合膜から成る保護層を設け
たもの(特開昭63−97961〜4)、有機感光層上
にカルコゲン原子、■属原子、■属原子、■属原子等の
原子を少なくとも含むグロー放電により生成された非晶
質炭化水素膜から成る保護層を設けたもの(特開昭63
−220166〜9)などを挙げることができる。For example, one in which a protective layer made of amorphous carbon or hard carbon is provided on the photosensitive layer (Japanese Patent Laid-Open No. 60-249155), and one in which a diamond-like carbon protective layer is provided on the outermost surface (Japanese Patent Application Laid-Open No. 61-255352). , in which a high-hardness insulating layer containing carbon as a main component is formed on a photosensitive layer (Japanese Patent Application Laid-open No. 612
64355) or a protective layer made of a plasma organic polymer film containing at least atoms such as nitrogen atoms, oxygen atoms, halogen atoms, alkali gold m1FA molecules, etc., is provided on the organic photosensitive layer (JP-A-63-97961-4); A protective layer made of an amorphous hydrocarbon film generated by glow discharge containing at least chalcogen atoms, group II atoms, group II atoms, group II atoms, etc. is provided on the organic photosensitive layer (Japanese Patent Laid-Open No. 63
-220166 to 9).
これらの提案はいずれも有機系感光層の表向にイオンプ
ロセス(スパッタリング、プラズマCVD、グロー放電
分解法、光CVI)法等)により作製した炭素又は炭素
を主成分とする高硬度の薄膜(l−カーボン膜あるいは
ダイヤモンド状炭素膜という総称で呼ばれるものに属す
る。)を形成したものである。In all of these proposals, carbon or a highly hard thin film mainly composed of carbon (l - It belongs to what is collectively called a carbon film or a diamond-like carbon film).
このような方法で得られる感光体は有機系感光層の表面
硬度が向上し、耐久性に優れたものであるが、保護層と
有機系感光層との接着性が充分でなく、複写機内で保護
層と有機系感光層がその界面で剥離してしまい、実使用
上の耐久性がそれほど向上していないことがその後の研
究により明らかとなった。The photoreceptor obtained by this method has an improved surface hardness of the organic photosensitive layer and is excellent in durability, but the adhesiveness between the protective layer and the organic photosensitive layer is not sufficient, and the photoreceptor may fail in the copying machine. Subsequent research revealed that the protective layer and organic photosensitive layer peeled off at the interface, and that the durability in actual use was not significantly improved.
本発明は、まさにこれらの問題点を解決するためになさ
れたものであって、その目的は有機系感光JGと炭素又
は炭素を主成分とした高硬度の薄膜から成る保護71と
の接着性を向上させて、長期に直り優れた耐久性を示す
電子写真用感光体製提供することにある。The present invention was made precisely to solve these problems, and its purpose is to improve the adhesion between the organic photosensitive JG and the protection 71 made of carbon or a highly hard thin film mainly composed of carbon. The object of the present invention is to provide a photoreceptor for electrophotography that exhibits improved durability over a long period of time.
本発明によれば、上記目的は導電性支持体上に有機系感
光層、中間層、表面保護層をこの順に積層した構成の電
子写真用感光体において、表面保護層は炭素又は炭素を
主成分とし、かつ中間層は酸素非含有型樹脂を主成分と
したことを特徴とする電子写真用感光体によって達成さ
れる。According to the present invention, the above-mentioned object is to provide an electrophotographic photoreceptor having a structure in which an organic photosensitive layer, an intermediate layer, and a surface protective layer are laminated in this order on a conductive support, the surface protective layer containing carbon or containing carbon as a main component. This is achieved by an electrophotographic photoreceptor characterized in that the intermediate layer is mainly composed of an oxygen-free resin.
一般に、有機系感光層の電荷発生材料又は電荷輸送材料
を分散あるいは溶解させる結着樹脂としては、ポリアミ
ド、ポリニス、チル、ポリウレタン、ポリカーボネート
等のような通常その構造中に酸素原子を有する樹脂が用
いられている。Generally, as a binder resin for dispersing or dissolving the charge generating material or charge transporting material of the organic photosensitive layer, a resin having oxygen atoms in its structure such as polyamide, polyvarnish, chill, polyurethane, polycarbonate, etc. is used. It is being
本発明者らは炭素又は炭素を主成分とした高硬度薄膜か
ら成る保護層と上記のような結着樹脂を含有する有機系
感光Jj9との接着性について、鋭帰:検討した結果、
この結着樹脂構造中の酸素原子が保護層と有機系感光層
との接着力を低下させていることを知見した。The present inventors conducted thorough studies on the adhesion between a protective layer made of carbon or a highly hard thin film containing carbon as a main component and organic photosensitive Jj9 containing the binder resin as described above.
It has been found that oxygen atoms in this binder resin structure reduce the adhesive force between the protective layer and the organic photosensitive layer.
そして、更に研究を進めたところ、導電性支持体、有機
系光導電層、中間層、炭素又は炭素を主成分としだ薄膜
から成る表面保護層をこの順に積層した感光体において
は、中間Iτグの成分として酸素非含有型樹脂、すなわ
ちその分子構造中に酸素原子をもたない樹脂を用いるこ
とによって表面保護層と感光層との接着性を大きく向−
」〕できることを見出し、本発明を完成するに至った。Further research revealed that in a photoreceptor in which a conductive support, an organic photoconductive layer, an intermediate layer, and a surface protective layer consisting of carbon or a thin film mainly composed of carbon were laminated in this order, an intermediate Iτ group was found. By using an oxygen-free resin, that is, a resin that does not have oxygen atoms in its molecular structure, as a component, the adhesion between the surface protective layer and the photosensitive layer can be greatly improved.
]] and completed the present invention.
以下、図面に沿って本発明を説明する。Hereinafter, the present invention will be explained along with the drawings.
第1図は本発明の電子写真用感光体の模式断面図であり
、導電性支持体l上に下引層2、電荷発生713、電荷
輸送M4、中間M5及び表面保護層6を順次設けた構成
のものである。FIG. 1 is a schematic cross-sectional view of the electrophotographic photoreceptor of the present invention, in which a subbing layer 2, a charge generation layer 713, a charge transport layer M4, an intermediate layer M5, and a surface protection layer 6 are sequentially provided on a conductive support l. It is of composition.
第2図(a)及び第2図(b)は各々本発明の他の電子
写真用感光体の構成例を示すものであり、第2図(a)
は導電性支持体1上に下引層2を介して単層型の有機系
感光層7髪設け、その上に中間層5及び表面保護M6を
順次設けたものであり、また第2図(b)は導電性支持
体1に直接電荷輸送M4を設け、更にその上に電荷発生
層3、中間層5及び表面保護層を順次設けたものである
。FIG. 2(a) and FIG. 2(b) respectively show structural examples of other electrophotographic photoreceptors of the present invention, and FIG. 2(a)
2, a single-layer type organic photosensitive layer 7 is provided on a conductive support 1 via a subbing layer 2, and an intermediate layer 5 and a surface protection layer M6 are sequentially provided thereon. In b), a charge transport M4 is provided directly on the conductive support 1, and a charge generation layer 3, an intermediate layer 5 and a surface protection layer are further provided in this order.
本発明に使用される導電性支持体としては、導電体ある
いは導電処理をした絶縁体、たとえばAfl、N1、F
’e、 Cu、 Auなどの金属あるいはそれらの合金
の他、ポリエステル、ポリカーボネート、ポリイミド、
ガラス等の絶縁性基体」二にAQ、 Ag、Au等の金
属あるいはIn2O3、Sue、等の導電材料の薄膜を
形成したもの、導電処理をした紙等が使用できる。The conductive support used in the present invention may be a conductor or an insulator treated for conductivity, such as Afl, N1, F
In addition to metals such as 'e, Cu, and Au, or their alloys, polyester, polycarbonate, polyimide,
An insulating substrate such as glass on which a thin film of a metal such as AQ, Ag, or Au or a conductive material such as In2O3 or Sue is formed, paper treated with conductivity, or the like can be used.
導電性支持体の形状は特に制約はなく板状、ドラム状あ
るいはベル1〜状のいずれのものも使用できる。There are no particular restrictions on the shape of the conductive support, and any of plate-like, drum-like, and bell-like shapes can be used.
導電性支持体と感光層との間に必要に応じ設けられる下
引層は本発明の効果をいっそう向上すると共に、接着性
を向」ニする目的で設けられ、その材料としてはSin
、 AQ、、03、シランカップリンク剤、チタンカッ
プリング剤、クロムカップリング剤等の無機材料やポリ
アミド樹脂、アルコール可溶性ポリアミ1〜樹脂、水溶
性ポリビニルブチラール、ポリビニルブチラール、PV
A等の接着性の良いバインダー樹脂などが使用される。An undercoat layer is provided between the conductive support and the photosensitive layer as necessary for the purpose of further improving the effects of the present invention and improving adhesion.
, AQ,, 03, Inorganic materials such as silane coupling agents, titanium coupling agents, chromium coupling agents, polyamide resins, alcohol-soluble polyamide resins, water-soluble polyvinyl butyral, polyvinyl butyral, PV
A binder resin with good adhesive properties such as A is used.
その他、前記接着性の良い樹脂にZnO1Tie、、Z
nS等を分散したものも使用できる。下引層の形成法と
しては無機材料単独の場合はスパッタリング、蒸着等の
方法が、また有機材料を用いた場合は通常の塗布7ムが
採用される。なお下引層の厚さは5μm以下が適当であ
る。In addition, ZnO1Tie, Z
A material in which nS or the like is dispersed can also be used. As a method for forming the undercoat layer, when an inorganic material alone is used, sputtering, vapor deposition, etc. are used, and when an organic material is used, a normal coating method is used. Note that the thickness of the undercoat layer is suitably 5 μm or less.
この導電性支持体」二に直接あるいは下引き層を介して
設けられる有機系感光Jllとしては単JM型あるいは
機能分離型のいずれもが適用できる。As the organic photosensitive material provided directly or via an undercoat layer on this conductive support, either a single material type or a functionally separated type can be used.
単層型感光層の例としては、色素増感された酸化亜鉛、
酸化チタン、硫酸亜鉛等の光導電性粉体、セレン粉体、
無定形シリコン粉体、スクアリック塩顔料、フタロシア
ニン顔料、アズレニウム塩顔料、アゾ顔料等を必要に応
じて結着剤樹脂及び/又は後述する電子供与性化合物と
共に塗布形成されたもの、またピリリウム系染料とビス
フェノールA系のポリカーボネートとから形成される共
晶錯体に電子供与性化合物を添加した組成物を用いたも
の等が挙げられる。結着樹脂としては後述する機能分離
型感光層と同様のものを使用することができる。この単
層型感光層の厚さは5〜30牌が適当である。Examples of single-layer photosensitive layers include dye-sensitized zinc oxide,
Photoconductive powder such as titanium oxide and zinc sulfate, selenium powder,
Amorphous silicon powder, Squaric salt pigment, phthalocyanine pigment, azulenium salt pigment, azo pigment, etc. are coated together with a binder resin and/or an electron-donating compound as described below, as required, and pyrylium dye and Examples include those using a composition in which an electron-donating compound is added to a eutectic complex formed from bisphenol A-based polycarbonate. As the binder resin, the same resin as that used in the functionally separated photosensitive layer described later can be used. The thickness of this single-layer type photosensitive layer is suitably 5 to 30 tiles.
一方、機能分離型感光層の例としては電荷発生層(CG
L)と電荷輸送層(CTI、)を核層したものが例示さ
れる。On the other hand, an example of a functionally separated photosensitive layer is a charge generation layer (CG
An example is one in which a core layer is a charge transport layer (CTI) and a charge transport layer (CTI).
画像露光により潜像電荷を発生分離させるための電荷発
生7m(CGL)としては、結晶セレン、セレン化ヒ素
等の無機光導電性粉体あるいは有機系染顔料を結着剤樹
脂に分散もしくは溶解させたものが用い;)れる。Charge generation 7m (CGL) for generating and separating latent image charges by image exposure involves dispersing or dissolving inorganic photoconductive powders such as crystalline selenium, arsenic selenide, or organic dyes and pigments in a binder resin. used ;).
電荷発生物質としての有機系染^”↓料としては、例え
ば、シーアイピクメントブルー25〔カラーインデック
ス(CI)21180)、シーアイピグメントレッド4
1(CI 21200)、シーアイアシッドレッド52
(CT45100)、シーアイベーシックレッI’:3
(CT 452]0)、さらに、ポリフィリン骨格を有
するフタロシアニン系顔料、アズレニウム塩顔料、スク
アリック塩顔料、カルバゾール骨格を有するアゾ顔料(
特開昭53−95033号公報に記載)、スチリルスチ
ルベン骨格を有するアゾ顔料(特開昭5:3−1382
29号公報に記載)、トリフェニルアミン骨格を有する
アゾ顔料(特開昭53−132547号公報に記載)、
ジベンゾチオフェン骨格を有するアゾ顔料(特開昭54
−21728号公報に記載)、オキサジアゾール骨格を
有するアゾ顔料(特開昭54−12742号公報に記載
)、フルオレノン骨格を有するアゾ顔料(特開昭54−
22834号公報に記載)、ビススチルベン骨格を有す
るアゾ顔料(特開昭54−17733号公報に記載)、
ジスチリルオキサジアゾール骨格を有するアゾ顔料(特
開昭54−2129号公報に記載)、ジスチリルカルバ
ゾール骨格を有するアゾ顔料(特開昭54−177+3
4号公報に記載)、カルバゾール骨格を有するトリアゾ
顔料(特開昭57−195767号公報、同57−19
5768号公報に記載)等、さらに、シーアイピクメン
トブルー16(CI 71.00)等のフタロシアニン
系顔料、シーアイバッドブラウン5(CI73410)
、シーアイバッドダイ(Cal 73030)等のイン
ジゴ系顔料、アルゴスカーレソhB(バイオレット社製
)、インダスレンスカーレッ1−R(バイエル社製)等
のペリレン系顔料等を使用することができる。Examples of organic dyes as charge-generating substances include C.I. Pigment Blue 25 [Color Index (CI) 21180], C.I. Pigment Red 4
1 (CI 21200), Sea Eye Acid Red 52
(CT45100), CI Basic Rec I':3
(CT 452]0), furthermore, phthalocyanine pigments having a porphyrin skeleton, azulenium salt pigments, squalic salt pigments, and azo pigments having a carbazole skeleton (
(described in JP-A-53-95033), an azo pigment having a styrylstilbene skeleton (JP-A-5:3-1382)
29), an azo pigment having a triphenylamine skeleton (described in JP-A-53-132547),
Azo pigments having a dibenzothiophene skeleton
-21728), azo pigments having an oxadiazole skeleton (described in JP-A-54-12742), azo pigments having a fluorenone skeleton (described in JP-A-54-12742),
22834), an azo pigment having a bisstilbene skeleton (described in JP-A-54-17733),
Azo pigments having a distyryloxadiazole skeleton (described in JP-A No. 54-2129), azo pigments having a distyrylcarbazole skeleton (described in JP-A-54-177+3)
4), triazo pigments having a carbazole skeleton (JP-A-57-195767, JP-A-57-19)
In addition, phthalocyanine pigments such as CI Picment Blue 16 (CI 71.00), CI Bud Brown 5 (CI 73410), etc.
, C.I. Bud Dye (Cal 73030), and perylene pigments such as Argo Scareso hB (manufactured by Violet) and Indus Thread Scarlet 1-R (manufactured by Bayer) can be used.
これらの電荷発生物質は単独であるいは2種以」二併用
して用いられる。These charge generating substances may be used alone or in combination of two or more.
結着剤樹脂は、電荷発生物質100重量部に対して0〜
100重量部用いるのが適当であり、好ましくは0〜5
0重量部である。The amount of the binder resin is 0 to 100 parts by weight of the charge generating substance.
It is appropriate to use 100 parts by weight, preferably 0 to 5 parts by weight.
It is 0 parts by weight.
これら有機染顔料と併用される結着剤樹脂としてはポリ
アミド、ポリウレタン、ポリエステル、エポキシ樹脂、
ポリエーテル−1〜、ポリエーテルなどの縮合系樹脂並
びにポリスチレン、ポリアクリレート、ポリメタクリレ
−1〜、ポリ−N−ビニルカルバゾール、ポリビニルブ
チラール、スチレンブタジェン共重合体、スチレンーア
クリロニ1−リル共重合体等の重合体および共重合体等
の接着性、絶縁性樹脂が挙げられる。Binding resins used in combination with these organic dyes and pigments include polyamide, polyurethane, polyester, epoxy resin,
Polyether-1~, condensation resins such as polyether, polystyrene, polyacrylate, polymethacrylate-1~, poly-N-vinylcarbazole, polyvinyl butyral, styrene-butadiene copolymer, styrene-acryloni-1-lyl copolymer Adhesive and insulating resins such as polymers such as polymers and copolymers may be mentioned.
電荷発生層は、′電荷発生物質を必要ならばバインダー
樹脂とともに、テトラヒドロフラン、シクロヘキサノン
、ジオキサン、ジクロルエタン等の溶媒を用いてボール
ミル、71〜ライター、サンドミルなどにより分散し、
分散液を過度に希釈して塗布することにより形成できる
。塗布は、浸漬塗工法やスプレーコー1〜、ビードコー
ト法などを用いて行なうことができる。The charge generation layer is prepared by dispersing a charge generation substance together with a binder resin if necessary using a ball mill, lighter, sand mill, etc. using a solvent such as tetrahydrofuran, cyclohexanone, dioxane, or dichloroethane;
It can be formed by applying an excessively diluted dispersion. Coating can be carried out using a dip coating method, a spray coating method, a bead coating method, or the like.
電荷発生層の膜厚は、0.01〜5pm程度が適当であ
り、好ましくは0.1〜2μmである。The thickness of the charge generation layer is suitably about 0.01 to 5 pm, preferably 0.1 to 2 pm.
また、本発明において、電荷発生物質として結晶セレン
又はセレン化ヒ素合金等の料、子を用いる場合には、電
子供与性結着剤及び/又は電子供与性有機化合物とが併
用される。このような電子供与性物質としてはポリビニ
ルカルバゾールおよびその誘導体(例えばカルバゾール
骨格に塩素、臭素などのハロゲン、メチル基、アミノ基
などの置換基を有するもの)、ポリビニルピレン、オキ
サジアゾール、ピラゾリン、ヒドラゾン、ジアリールメ
タン、α−フェニルスチルヘン、[−リフェニルアミン
系化合物などの窒素含有化合物およびジアリールメタン
系化合物等があるが、特にポリビールカルバゾールおよ
びその誘導体が好ましい。Further, in the present invention, when a material such as crystalline selenium or an arsenic selenide alloy is used as a charge generating substance, an electron-donating binder and/or an electron-donating organic compound are used in combination. Examples of such electron-donating substances include polyvinylcarbazole and its derivatives (for example, those having a halogen such as chlorine or bromine, or a substituent such as a methyl group or an amino group in the carbazole skeleton), polyvinylpyrene, oxadiazole, pyrazoline, and hydrazone. , diarylmethane, α-phenylstilhene, [-riphenylamine compounds and other nitrogen-containing compounds and diarylmethane compounds, among which polyvinylcarbazole and its derivatives are particularly preferred.
またこれらの物質は混合しても用いられるが、この場合
にはポリビニルカルバゾールおよびその誘導体に他の電
子供与性有機化合物を添加しておくことが好ましい。こ
の種の無機系電荷発生物質の含有景は層全体の30〜9
0重M%が適当である。また無機系電荷発生物質を用い
た場合の電荷発生層の厚さは0.2〜5μmが適当であ
る。These substances can also be used as a mixture, but in this case it is preferable to add another electron-donating organic compound to polyvinylcarbazole and its derivatives. The content of this type of inorganic charge generating substance is 30 to 9 in the entire layer.
0 weight M% is appropriate. Further, when an inorganic charge generating material is used, the thickness of the charge generating layer is suitably 0.2 to 5 .mu.m.
電荷輸送層(CT1.、)は帯電電荷を保持させ、かつ
露光により電荷発生層で発生分離した電荷を移動させて
保持していた帯電電荷と結合させることを目的とする層
である。帯電電荷を保持させる目的達成のために電気抵
抗が高いことが要求され、また保持した帯電電荷で高い
表面電位を得る目的を達成するためには、誘電率か7J
zさくかつ′CL荷移動性が良いことが要求される。The charge transport layer (CT1.) is a layer whose purpose is to hold electric charges and to move the electric charges generated and separated in the charge generation layer by exposure and combine them with the held electric charges. In order to achieve the purpose of retaining the charged charges, a high electrical resistance is required, and in order to achieve the purpose of obtaining a high surface potential with the retained charges, a dielectric constant of 7J is required.
It is required to be compact and have good cargo movement.
これらの要件を満足させるための電荷輸送/Mは、電荷
輸送物質および必要に応じて用いられるバインダー樹脂
より構成される。すなわち、以」―の物質を適当な溶剤
に溶解ないし分散してこれを塗布乾燥することにより電
荷輸送層を形成することができる。Charge transport/M for satisfying these requirements is composed of a charge transport material and a binder resin used as necessary. That is, the charge transport layer can be formed by dissolving or dispersing the following substances in a suitable solvent and applying and drying the solution.
電荷輸送物質には、正孔輸送物質と′電子輸送物質とが
ある。Charge transport materials include hole transport materials and electron transport materials.
正孔輸送物質としては、ポリ−N−ビニルカルバゾール
およびその誘導体、ポリーγ−カルバゾリルエチルグル
タメートおよびその誘導体、ピレンホルムアルデヒド縮
合物およびその誘導体、ポリビニルピレン、ポリビニル
フェナントレン、オキサゾール誘導体、オキサジアゾー
ル誘導体、イミダゾール誘導体、トリフェニルアミン誘
導体、9(p−ジエチルアミノスチリル)アントラセン
、1,1ビス−(4−ジベンジルアミノフェニル)プロ
パン、スチリルアントラセン、スチリルピラゾリン、フ
ェニル上1−ラゾン類、α−フェニルスチルベン誘導体
等の電子供与性物質が挙げられる。As hole transport substances, poly-N-vinylcarbazole and its derivatives, poly-γ-carbazolylethyl glutamate and its derivatives, pyrene formaldehyde condensate and its derivatives, polyvinylpyrene, polyvinylphenanthrene, oxazole derivatives, oxadiazole derivatives , imidazole derivatives, triphenylamine derivatives, 9(p-diethylaminostyryl)anthracene, 1,1bis-(4-dibenzylaminophenyl)propane, styrylanthracene, styrylpyrazoline, 1-razones on phenyl, α-phenyl Examples include electron-donating substances such as stilbene derivatives.
電子輸送物質としては、たとえば、クロルアニル、ブロ
ムアニル、テトラシアノエチレン、テトラシアノキノン
ジメタン、2,4.7−1−リニトロー9フルオレノン
、2,4,5.7−テトラニトロ−9−フルオレノン、
2,4,5.7−チトラニ1〜ロキサントン、2,4゜
8−トリニ[〜ロチオキサントン、2,6.8−トリニ
トロ411−インデノ(1,,2−b、]]チオフェノ
ンー4−オン■、3゜7−トリニトロジベンゾチオフエ
ノンー5,5−ジオキサイ1〜などの電子受容物質が挙
げられる。Examples of the electron transport substance include chloranil, bromoanil, tetracyanoethylene, tetracyanoquinone dimethane, 2,4,7-1-linitro-9-fluorenone, 2,4,5,7-tetranitro-9-fluorenone,
2,4,5.7-titrani-1~loxanthone, 2,4゜8-trini[~lothioxanthone, 2,6.8-trinitro411-indeno(1,,2-b,]]thiophenone-4-one■ , 3゜7-trinitrodibenzothiophenone-5,5-dioxai 1~.
これらの電荷輸送物質は、単独又は2種以上混合して用
いられる。These charge transport substances may be used alone or in a mixture of two or more.
また、必要に応じて用いられるバインダー樹脂としては
、ポリスチレン、スチレンーアクリロニ1−リル共重合
体、スチレン−ブタジェン共重合体、スチレン−無水マ
レイン酸共重合体、ポリエステル、ポリ塩化ビニル、塩
化ビニル−酢酸ビニル共重合体、ポリ#酸ビニル、ポリ
塩化ビニリデン、ポリアクリレ−I−樹脂、フェノキシ
樹脂、ポリ力一ホネート、酢酸セルロース樹脂、エチル
セルロース樹脂、ポリビニルブチラール、ポリビニルホ
ルマール、ポリビニル1−ルエン、ポリ−N−ビニルカ
ルバゾール、アクリル樹脂、シリコーン樹脂、エポキシ
樹脂、メラミン樹脂、ウレタン樹脂、フェノール樹脂、
アルキッド樹脂等の熱可塑性樹脂又は熱硬化性樹脂が挙
げられる。Binder resins that may be used as necessary include polystyrene, styrene-acrylonyl-1-lyl copolymer, styrene-butadiene copolymer, styrene-maleic anhydride copolymer, polyester, polyvinyl chloride, and vinyl chloride. -Vinyl acetate copolymer, polyvinyl acid, polyvinylidene chloride, polyacryle-I-resin, phenoxy resin, polyvalent monophonate, cellulose acetate resin, ethylcellulose resin, polyvinyl butyral, polyvinyl formal, polyvinyl 1-luene, poly- N-vinylcarbazole, acrylic resin, silicone resin, epoxy resin, melamine resin, urethane resin, phenol resin,
Examples include thermoplastic resins or thermosetting resins such as alkyd resins.
溶剤としては、テ1−ラヒドロフラン、ジオキサン、ト
ルエン、モノクロルベンゼン、ジクロルエタン、塩化メ
チレンなどが用いられる。As the solvent, tetrahydrofuran, dioxane, toluene, monochlorobenzene, dichloroethane, methylene chloride, etc. are used.
電荷輸送層の厚さは5〜100μm程度が適当である。The appropriate thickness of the charge transport layer is about 5 to 100 μm.
また電荷輸送層中に可塑剤やレベリング剤を添加しても
よい。可塑剤としては、ジブチルフタレ1〜.ジオクチ
ルフタレートなど一般の樹脂の可塑剤として使用されて
いるものがそのまま使用でき、その使用量は、バインダ
ー樹脂に対して0〜30重量%重量動程当である。レベ
リング剤としては、ジメチルシリコーンオイル、メチル
フェニルシリコンオイルなどのシリコーンオイル類が使
用され、その使用量はバインダー樹脂に対して、O〜1
重量%程度が適当である。Furthermore, a plasticizer or a leveling agent may be added to the charge transport layer. As a plasticizer, dibutyl phthalate 1 to . Those used as plasticizers for general resins, such as dioctyl phthalate, can be used as they are, and the amount used is 0 to 30% by weight relative to the binder resin. As a leveling agent, silicone oils such as dimethyl silicone oil and methylphenyl silicone oil are used, and the amount used is O~1 based on the binder resin.
Approximately % by weight is appropriate.
これらのCGLとCTLは支持体上に支持体側からCG
L、CTLの順に積層しても、CTL、CGLの順に積
層してもかまわない。These CGL and CTL are placed on the support from the support side.
L and CTL may be stacked in this order, or CTL and CGL may be stacked in this order.
本発明において、最表面に設けられる保護層は、炭素ま
たは炭素を主成分としたもので、好ましくはSt〕3軌
道を有するダイヤモンドと類似のC−C結合を有してお
り、ビッカース硬度100〜3000kg/a#、比抵
抗(固有抵抗)IXIO’〜]、X1013Ω・■の値
を有し、光学的エネルギーバンドiJ(ggという)が
1.0eV以上である、赤外または可視領域で透光性を
有する薄膜で形成される。In the present invention, the protective layer provided on the outermost surface is carbon or carbon-based, preferably has a C-C bond similar to that of diamond having St]3 orbitals, and has a Vickers hardness of 100 to 100. 3000kg/a#, specific resistance (specific resistance) IXIO'~], X1013Ω・■, optical energy band iJ (referred to as gg) is 1.0eV or more, transparent in the infrared or visible region. It is formed from a thin film that has properties.
この様な膜は一般的にスパッタリング、プラズマCVD
、グロー放電分解法、光CVO法などにより形成され
、特にその製膜法は限定されるものではないが、プラズ
マCVD法でありながらスパッタ効果を伴わせつつ成膜
させる方法によって良好な特性を有する保護層を得るこ
とができる。この代表例としては、本発明人の出願にな
る特許願「炭素被膜を有する複合体及びその製造方法」
(特願昭56〜146929昭和56年9月17日出願
、特開昭58−49609)が挙げられる。Such films are generally produced by sputtering or plasma CVD.
The film is formed by a glow discharge decomposition method, a photo CVO method, etc., and the film forming method is not particularly limited, but it has good characteristics because it is a plasma CVD method that produces a film with a sputtering effect. A protective layer can be obtained. A representative example of this is a patent application filed by the present inventor entitled "Composite with Carbon Coating and Method for Manufacturing the Same"
(Japanese Patent Application No. 56-146929, filed September 17, 1982, Japanese Patent Application Laid-open No. 58-49609).
この方法は、平行平板型プラズマCVD装置の−・方の
電極(カソード側)に基板を配設し、セルフバイアスを
用いて平坦面の」二面に堆積させる製111J 7ムで
あり、マイクロ波励起方法により活性種を強く励起する
ことによって高硬度の炭素)漠を得ることができる。In this method, a substrate is placed on the electrode (cathode side) of a parallel plate plasma CVD device, and the substrate is deposited on two flat surfaces using self-bias. By strongly exciting active species using an excitation method, a highly hard carbonaceous substance can be obtained.
上記方法の場合は基体がシー1−形状のものの場合に好
ましく適用されるが、たとえば第3図に示すようなプラ
ズマCVD装置しこよれば、同様の保護層を支持体形状
にとられれることなく製膜することが可能である。The above method is preferably applied when the substrate is in the shape of a sheet, but if a plasma CVD apparatus such as the one shown in FIG. It is possible to form a film without any
図中(7)はプラズマCVD装置の真空槽であり、ゲー
ト弁(9)によりロード/アンロード用予備室(7′)
と仕切られている。真空槽(7)内は排気系(2(1)
[圧力調整バルブ(21)、ターボ分子ポンプ(22)
、ロータリーポンプ(23)より成るコにより真空排気
され、また一定圧力に保たれる様になっている。In the figure, (7) is the vacuum chamber of the plasma CVD equipment, and the loading/unloading preliminary chamber (7') is controlled by the gate valve (9).
It is divided into Inside the vacuum chamber (7) is an exhaust system (2 (1)
[Pressure adjustment valve (21), turbo molecular pump (22)
, and a rotary pump (23) to evacuate and maintain a constant pressure.
真空槽(7)内には反応槽(50ンがWQけられている
。A reaction tank (50 tons) is installed in the vacuum tank (7).
反応槽は第4図(A)(B)に示す様な枠構造体(2)
(電極側より見て四角または六角形状を有している)と
、この両端の開口部を覆う様にしたフード(8)(8′
)、さらにこのフード(8) (8’ )に配設された
一対の同一形状を有する第−及び第二の電極(3) (
3’ )(アルミニウム等の金属メツシュを用いている
)より構成されている。(30)は反応槽(50)内へ
導入するガスラインを示しており、下記に示す様な各種
ガス容器が接続されておりそれぞれ流量計(29)を経
てノズル(25)より反応槽(50)の中へ導入される
。The reaction tank has a frame structure (2) as shown in Figure 4 (A) and (B).
(has a square or hexagonal shape when viewed from the electrode side) and a hood (8) (8') that covers the openings at both ends.
), and furthermore, a pair of first and second electrodes (3) (
3') (using metal mesh such as aluminum). (30) indicates a gas line introduced into the reaction tank (50), to which various gas containers as shown below are connected, each passing through a flow meter (29) and passing through a nozzle (25) into the reaction tank (50). ).
キャリアガス:)12.Ar等
材料ガス:炭化水素気体(メタン、エチレン、etc)
添加物ガス: NF3.N)+3.PH,、、B2)1
.等エツチンク用ガス=02等
枠構造体(2)中には、有機光導電層を形成した支持体
(1) C(1−1)、(1,−2)、−(1−n))
が第3図(A)(B)の様に配置される。なおこのそれ
ぞれの支持体は、後述するように第三の電極として配置
される。Carrier gas:)12. Material gas such as Ar: Hydrocarbon gas (methane, ethylene, etc.)
Additive gas: NF3. N)+3. PH,,,B2)1
.. Etching gas=02 Etching gas=02 Etching frame structure (2) contains supports (1) C(1-1), (1,-2), -(1-n)) on which organic photoconductive layers are formed.
are arranged as shown in FIGS. 3(A) and 3(B). Note that each of these supports is arranged as a third electrode as described later.
電極(3) (3’ )にはそれぞれ第一の交番電圧を
印加するための一対の電源(15)[(15−]、)、
(]−5−2))が用意されている。第一の交番電圧
の周波数は1〜100MHzである。A pair of power supplies (15) [(15-], ) for applying a first alternating voltage to the electrodes (3) (3'), respectively;
(]-5-2)) is prepared. The frequency of the first alternating voltage is 1 to 100 MHz.
これらの電源はそれぞれマツチング1〜ランス(16−
1)(]、、]6−2とつながる。このマツチングトラ
ンスでの位相は位相調整器により調整し、互いに180
゜または0°ずれて供給できる。すなわち対称型又は同
相型の出力を有している。These power supplies are mating 1 to lance (16-
1) Connected to (], , ]6-2. The phase in this matching transformer is adjusted by a phase adjuster, so that they are 180 degrees each other.
Can be supplied with a deviation of 0° or 0°. That is, it has a symmetrical or in-phase output.
マツチングトランスの一端(4)及び他端(4′)それ
ぞれ第−及び第二の電極(3) (3’ )に連結され
ている。またトランスの出力側中点(5)は接地レベル
に保持されている。更にこの中点(5)と第三の電極す
なわち支持体(1) l:(1−1)、(1,−2)、
・(1−n))またはそれらに電気的に連結するホルダ
(2)の間に第二の交番電圧を印加するための電源(1
7)が配設されている。この第二の交番電圧の周波数は
1〜500KHzである。One end (4) and the other end (4') of the matching transformer are connected to the first and second electrodes (3) (3'), respectively. Further, the midpoint (5) on the output side of the transformer is held at the ground level. Furthermore, this midpoint (5) and the third electrode, that is, the support (1) l: (1-1), (1,-2),
・A power supply (1-n)) for applying a second alternating voltage between the holder (2) electrically connected to the
7) is provided. The frequency of this second alternating voltage is 1 to 500 KHz.
このようにして第一の交番電圧により、第一第二の電極
(3) (3’ )間にプラズマが発生する。このプラ
ズマは上下のフード(8) (8’ ) 、枠構造体(
2)により取り囲まれているため、外側の外部空間(6
)には放出せず、また反応空間内でのプラズマ電位が均
質になっている。ノズル(25)を通してこの反応空間
に導入された反応用ガスはプラズマのエネルギーにより
分解され、第二の交番電圧により支持体に印加されてい
る負自己バイアス(−10〜600V)によって加速さ
れ、支持体上にスパッタしつつ成膜するので緻密な構造
を有する被膜が得られる。In this way, plasma is generated between the first and second electrodes (3) (3') by the first alternating voltage. This plasma is transmitted through the upper and lower hoods (8) (8') and the frame structure (
2), so the outer external space (6
), and the plasma potential within the reaction space is homogeneous. The reaction gas introduced into this reaction space through the nozzle (25) is decomposed by the energy of the plasma, accelerated by the negative self-bias (-10 to 600V) applied to the support by the second alternating voltage, and Since the film is formed on the body by sputtering, a film with a dense structure can be obtained.
この第一、第二の電極に印加する第一の交番電圧の出力
は13.56MHzの周波数の場合0.1〜I−Ktl
lであり、第三の電極すなわち支持体に印加する第二の
交番電圧の出力は150Kl(zの周波数の場合約10
0vである。The output of the first alternating voltage applied to the first and second electrodes is 0.1 to I-Ktl at a frequency of 13.56 MHz.
l, and the output of the second alternating voltage applied to the third electrode or support is 150 Kl (approximately 10 Kl for a frequency of z).
It is 0v.
また代表的に用いる反応用ガスはエチレンとNF3であ
りその割合はNF3/C2H4=1/20〜4/1であ
り、反応時の真空槽内圧力は0.001〜1..0to
rrである。The reaction gases typically used are ethylene and NF3, the ratio of which is NF3/C2H4 = 1/20 to 4/1, and the pressure inside the vacuum chamber during the reaction is 0.001 to 1. .. 0to
It is rr.
このような方法によりエチレンやNF3がプラズマ中で
分解されて支持体上にNとFが添加されたダイヤモンド
状薄膜(DLCともいうが、添加物が添加されたDLC
を含めて本発明では炭素または炭素を主成分とする被膜
という。)が得られる。By such a method, ethylene and NF3 are decomposed in plasma, and a diamond-like thin film (also called DLC) with added N and F is formed on the support.
In the present invention, carbon or a coating mainly composed of carbon is referred to as carbon or a coating mainly composed of carbon. ) is obtained.
また、この製膜法は反応圧力、反応ガスの混合比等の製
膜条件を変えることによって得られる被膜の物性(硬度
、光透過率、比抵抗等)を比較的自由に変化させること
ができる。特に硬度は支持体に印加される負自己バイア
ス及び反応圧力によって大きく変化させることができる
。加えてこの方法では支持体を特に加熱する必要はなく
、150°C以下の低温で炭素または炭素を主成分とす
る被膜を形成できるため、耐熱性の低い有機系感光層上
にも何ら支障なく保護層を製膜することが可能である。Additionally, this film-forming method allows the physical properties (hardness, light transmittance, specific resistance, etc.) of the resulting film to be relatively freely changed by changing film-forming conditions such as reaction pressure and reaction gas mixture ratio. . In particular, the hardness can be greatly varied by the negative self-bias and reaction pressure applied to the support. In addition, this method does not require any particular heating of the support and can form carbon or a film containing carbon as a main component at a low temperature of 150°C or less, so there is no problem even on organic photosensitive layers with low heat resistance. It is possible to deposit a protective layer.
この炭素または炭素を主成分とした保護Jljの膜厚は
100人〜10μmであり、好ましくは1000人〜2
μmである。The film thickness of this carbon or protective Jlj mainly composed of carbon is 100 μm to 10 μm, preferably 1000 μm to 2 μm.
It is μm.
炭素または炭素を主成分とした保mJILIにはフッ素
のごときハロゲン元素、窒素、リン、ホウ素などの添加
物を必要に応じて添加することもでき。If necessary, additives such as halogen elements such as fluorine, nitrogen, phosphorus, and boron may be added to carbon or JILI which is mainly composed of carbon.
その濃度は膜の深さ方向に対し、均一であっても勾配を
設けてもかまわない。The concentration may be uniform or may have a gradient in the depth direction of the film.
本発明においては、前述の保護層と有機系感光層との間
に酸素非含有型樹脂髪主成分とする中間層を設ける。こ
の酸素非含有型樹脂の例としては、ポリ塩化ビニル、ポ
リ塩化ビニリデン、ポリスチレン、スチレン−アクリコ
ニ1〜リル共重合体、スチレン−ブタジェン共重合体、
アクリロニトリル−ブタジェン−スチレン共重合体、ポ
リエチレン、ポリプロピレン、フッ素樹脂(3フツ化塩
化エチレン、4フツ化エチレン、4フツ化エチレン/6
フツ化プロピレン、フン化ビニリデン等)、ポリビニル
カルバゾール等が挙げられる。In the present invention, an intermediate layer containing oxygen-free resin as a main component is provided between the above-mentioned protective layer and the organic photosensitive layer. Examples of this oxygen-free resin include polyvinyl chloride, polyvinylidene chloride, polystyrene, styrene-acrylic mono-lyl copolymer, styrene-butadiene copolymer,
Acrylonitrile-butadiene-styrene copolymer, polyethylene, polypropylene, fluororesin (trifluorochloroethylene, tetrafluoroethylene, tetrafluoroethylene/6
(propylene fluoride, vinylidene fluoride, etc.), polyvinylcarbazole, and the like.
これらの樹脂は溶媒に溶解して塗工するかあるいは真空
蒸着、スパッタ等の既存の方法によって有機系感光層」
−に中間層として形成すれば良い。These resins can be applied by dissolving them in a solvent or by existing methods such as vacuum evaporation or sputtering to form an organic photosensitive layer.
- may be formed as an intermediate layer.
また、これらの中間層形成成分は単独でも2種以上組合
せて用いてもかまわない。更に、分子構造中に酸素を含
まず、フィルム形成能を有する樹脂であれば上記例示材
料に限定されることなく本目的を達成するために使用す
ることができる。この中間層の膜厚は50人〜5μmの
範囲にあることが望ましい。膜厚が50人より薄い時は
本発明の中間層としての機能が充分でなく、逆に5μm
以上になると残留電位が高くなるという問題を生しる。Further, these intermediate layer forming components may be used alone or in combination of two or more. Furthermore, any resin that does not contain oxygen in its molecular structure and has a film-forming ability can be used to achieve this purpose without being limited to the above-mentioned exemplified materials. The thickness of this intermediate layer is preferably in the range of 50 μm to 5 μm. When the film thickness is less than 5 μm, the function as an intermediate layer of the present invention is insufficient;
If it is more than that, a problem arises in that the residual potential becomes high.
以下、実施例及び比較例によって本発明を更に詳細に説
明する。Hereinafter, the present invention will be explained in more detail with reference to Examples and Comparative Examples.
実施例1
アルミニウム製シリンダー状支持体(外径40uwnφ
、長さ250mn+)に下記組成比の混合物をボールミ
ルで12時間分散し調製した下引層形成?Pite乾燥
後の膜厚が約2μmになる様に浸漬法で塗工し下引層を
形成した。Example 1 Aluminum cylindrical support (outer diameter 40uwnφ
, a length of 250 mm+) was prepared by dispersing a mixture with the following composition ratio in a ball mill for 12 hours to form an undercoat layer. Pite was coated by a dipping method to form an undercoat layer so that the film thickness after drying was about 2 μm.
Tj02(石原産業社製タイベーク) 1重基部ポ
リアミド樹脂(東し社製C阿−8000) 1メタノ
ール 25この下引層上に下記
処方の電荷発生層塗工液を浸漬塗工し、120°Cで1
0分間乾燥させ、膜厚約0.15陣の電荷発生層を形成
した。Tj02 (Tie Bake manufactured by Ishihara Sangyo Co., Ltd.) Single base polyamide resin (C-A-8000 manufactured by Toshisha Co., Ltd.) 1 Methanol 25 A charge generation layer coating solution with the following formulation was dip coated on this subbing layer, and heated at 120°C. de1
It was dried for 0 minutes to form a charge generation layer with a thickness of about 0.15 layers.
下記構造のトリスアゾ顔料 30重量部シクロ
へキサノン 360上記混合物をボー
ルミルで72時間分散した後、さらにシクロヘキサノン
:メチルエチルケトン=1:1(重量比)の混合溶媒5
00重量部で希釈調製する。Trisazo pigment with the following structure: 30 parts by weight cyclohexanone 360 After dispersing the above mixture in a ball mill for 72 hours, a mixed solvent of cyclohexanone:methyl ethyl ketone = 1:1 (weight ratio) 5
00 parts by weight.
ついで、この電荷発生層」二に下記処方の電荷輸送層塗
工液を乾燥後の膜厚が約20μmになる様に浸漬塗工し
て電荷輸送層を設けた。Next, a charge transport layer was formed by dip coating a charge transport layer coating solution having the following formulation on this charge generation layer 2 so that the film thickness after drying was approximately 20 μm.
=25
〔電荷輸送層塗工液〕
テトラヒドロフラン 80更にこの電荷
輸送層上に下記処方の中間層形成液をスプレー法により
塗工し、膜厚約2000人の中間層を形成した。=25 [Charge transport layer coating liquid] Tetrahydrofuran 80 Furthermore, an intermediate layer forming liquid having the following formulation was applied onto the charge transport layer by a spray method to form an intermediate layer having a thickness of about 2,000 layers.
トルエン 95最後にこの中
間層上に第3図に示す前述のプラズマCVD装置を用い
て下記条件により炭素または炭素を主成分とする保護層
を製膜した。Toluene 95 Finally, carbon or a protective layer containing carbon as a main component was formed on this intermediate layer using the plasma CVD apparatus shown in FIG. 3 and under the following conditions.
NF3流量 : 50 SCCMC2H4
流量 : 150 SCG阿反応圧力
: 0.02torr第一の交番電圧出力 :
400W 13.56阿Hzバイアス電圧(直流分)
: −400Vこのようにして得た炭素または炭素を主
成分とした保WJmは比抵抗I X 10”Ω・cm、
ビッカース硬度2300kg/mm 、光学的エネルギ
ーパン1〜巾]、、8eVで、膜厚は0.8μmであっ
た。NF3 flow rate: 50 SCCMC2H4
Flow rate: 150 SCG reaction pressure
: 0.02torr first alternating voltage output :
400W 13.56AHz bias voltage (DC)
: -400V The carbon or carbon-based bond WJm obtained in this way has a specific resistance of I x 10"Ω・cm,
The film had a Vickers hardness of 2300 kg/mm, an optical energy pan width of 1 to 8 eV, and a film thickness of 0.8 μm.
以上の操作により実施例1の電子写真用感光体製作製し
た。The electrophotographic photoreceptor of Example 1 was manufactured by the above operations.
実施例2
中間層形成液を下記処方に変更した以外は実施例1と全
く同様にして実施例2の電子写真感光体を作製した。Example 2 An electrophotographic photoreceptor of Example 2 was produced in exactly the same manner as in Example 1 except that the intermediate layer forming liquid was changed to the following formulation.
1ヘルエン
実施例3
中間層形成液を下記処方に変更した以外は実施例1と全
く同様にして、実施例3の電子写真感光体を作製した。1 Hellen Example 3 An electrophotographic photoreceptor of Example 3 was prepared in exactly the same manner as in Example 1 except that the intermediate layer forming liquid was changed to the following formulation.
トルエン 95比較例1
実施例1において、電荷輸送層」二に中間層を形成しな
い以外は実施例1と全く同様にして、比較例1の電子写
真用感光体を作製した。Toluene 95 Comparative Example 1 An electrophotographic photoreceptor of Comparative Example 1 was produced in exactly the same manner as in Example 1 except that no intermediate layer was formed on the charge transport layer.
このようにして作製した感光体の表面保護層の接着強度
を広の方法で評価した。The adhesive strength of the surface protective layer of the photoreceptor thus produced was evaluated by Hiro's method.
すなわち、粘着テープ(住友スリーエム製、スコッチメ
ンディングテープ810)を感光体表面に貼りつけた後
、ひきはがし、表面保護層が剥離するかどうかを評価し
た。その結果、実施例1,2.3の感光体は何ら表面保
護層の剥離は認められなかったが、比較例1の場合には
、粘着テープとともに表面保護層も剥離してしまった。That is, an adhesive tape (Scotch Mending Tape 810, manufactured by Sumitomo 3M) was attached to the surface of the photoreceptor and then peeled off to evaluate whether or not the surface protective layer would peel off. As a result, no peeling of the surface protective layer was observed in the photoreceptors of Examples 1, 2.3, but in the case of Comparative Example 1, the surface protective layer was peeled off along with the adhesive tape.
また、これらの感光体を実際の複写プロセス(レーサー
プリンター)に塔載し、繰り返し画像を採取した結果、
比較例1の感光体の場合は2000枚程度から保護WJ
が剥離し始め、画像上に黒スジ状の異常画像が発4ニす
る様になり、実用に耐えなくなった。In addition, as a result of mounting these photoreceptors in an actual copying process (racer printer) and repeatedly collecting images,
In the case of the photoreceptor of Comparative Example 1, the protection WJ starts from about 2000 sheets.
began to peel off, and an abnormal image with black stripes appeared on the image, making it unusable for practical use.
一方、実施例1,2.3の感光体は10万枚を越えても
保護層の剥離は認められず、良好な画像品質を維持した
。On the other hand, in the photoreceptors of Examples 1, 2, and 3, no peeling of the protective layer was observed even after 100,000 sheets were printed, and good image quality was maintained.
本発明の電子写真用感光体は、有機系感光層と炭素また
は炭素を主成分とする保護層との間に機素非含有樹脂よ
り成る中間層を設けたことから、従来品のように保護y
vの剥離を生じることがないため繰り返し使用しても良
好な複写画像を形成でき、その耐久性が著しく優れたも
のである。The electrophotographic photoreceptor of the present invention has an intermediate layer made of an oxygen-free resin between the organic photosensitive layer and the carbon or carbon-based protective layer, so it can be protected like conventional products. y
Since no peeling occurs, a good copy image can be formed even after repeated use, and its durability is extremely excellent.
第1図は本発明の電子写真用感光体の構成を示す模式断
面図であり、第2図(a)及び(b)は他の実施態様の
構成を示す模式断面図である。第3図は−:30
表面保護層の形成の際に用いるプラズマCVD装置の1
例の説明図であり、第4図はプラズマCVD装置の枠構
造体(2)の平面図である。
1・支持体、2・−下引層、3・電荷発生層、4 電荷
輸送層、5・・・中間In、6 表面保護層、7・感光
層(単層型)FIG. 1 is a schematic sectional view showing the structure of the electrophotographic photoreceptor of the present invention, and FIGS. 2(a) and 2(b) are schematic sectional views showing the structure of another embodiment. Figure 3 shows -:30 1 of the plasma CVD apparatus used for forming the surface protective layer.
This is an explanatory diagram of an example, and FIG. 4 is a plan view of a frame structure (2) of a plasma CVD apparatus. 1. Support, 2. - Subbing layer, 3. Charge generation layer, 4. Charge transport layer, 5.. Intermediate In, 6. Surface protective layer, 7. Photosensitive layer (single layer type).
Claims (1)
護層をこの順に積層した構成の電子写真用感光体におい
て、表面保護層は炭素又は炭素を主成分とし、かつ中間
層は酸素非含有型樹脂主成分としたことを特徴とする電
子写真用感光体。(1) In an electrophotographic photoreceptor having a structure in which an organic photosensitive layer, an intermediate layer, and a surface protective layer are laminated in this order on a conductive support, the surface protective layer contains carbon or carbon as a main component, and the intermediate layer A photoreceptor for electrophotography, characterized in that the main component is an oxygen-free resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3221589A JPH02210455A (en) | 1989-02-10 | 1989-02-10 | Electrophotographic sensitive body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3221589A JPH02210455A (en) | 1989-02-10 | 1989-02-10 | Electrophotographic sensitive body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02210455A true JPH02210455A (en) | 1990-08-21 |
Family
ID=12352703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3221589A Pending JPH02210455A (en) | 1989-02-10 | 1989-02-10 | Electrophotographic sensitive body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02210455A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008076876A (en) * | 2006-09-22 | 2008-04-03 | Fuji Xerox Co Ltd | Electrophotographic photoreceptor, and process cartridge and image forming apparatus using the same |
JP2008076877A (en) * | 2006-09-22 | 2008-04-03 | Fuji Xerox Co Ltd | Electrophotographic photoreceptor, image forming apparatus and process cartridge |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01133063A (en) * | 1987-11-18 | 1989-05-25 | Minolta Camera Co Ltd | Photosensitive body |
-
1989
- 1989-02-10 JP JP3221589A patent/JPH02210455A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01133063A (en) * | 1987-11-18 | 1989-05-25 | Minolta Camera Co Ltd | Photosensitive body |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008076876A (en) * | 2006-09-22 | 2008-04-03 | Fuji Xerox Co Ltd | Electrophotographic photoreceptor, and process cartridge and image forming apparatus using the same |
JP2008076877A (en) * | 2006-09-22 | 2008-04-03 | Fuji Xerox Co Ltd | Electrophotographic photoreceptor, image forming apparatus and process cartridge |
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