[go: up one dir, main page]

JPH0220106U - - Google Patents

Info

Publication number
JPH0220106U
JPH0220106U JP9806788U JP9806788U JPH0220106U JP H0220106 U JPH0220106 U JP H0220106U JP 9806788 U JP9806788 U JP 9806788U JP 9806788 U JP9806788 U JP 9806788U JP H0220106 U JPH0220106 U JP H0220106U
Authority
JP
Japan
Prior art keywords
imaging
correction circuit
shading correction
image processing
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9806788U
Other languages
Japanese (ja)
Other versions
JPH0740165Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988098067U priority Critical patent/JPH0740165Y2/en
Publication of JPH0220106U publication Critical patent/JPH0220106U/ja
Application granted granted Critical
Publication of JPH0740165Y2 publication Critical patent/JPH0740165Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Picture Signal Circuits (AREA)
  • Closed-Circuit Television Systems (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の一実施例を示す主要構成図
、第２図は検出結果を示す画像処理の画面図、第
３図は他の実施例を説明するための補正法の画面
図である。 １……被検査体、２……照明、３……ＴＶカメ
ラ、４……重畳シエーデイング補正回路、５……
変調シエーデイング補正回路、６……画像処理装
置。 Figure 1 is a main configuration diagram showing one embodiment of this invention, Figure 2 is a screen diagram of image processing showing detection results, and Figure 3 is a screen diagram of a correction method to explain another embodiment. . 1...Object to be inspected, 2...Lighting, 3...TV camera, 4...Superimposition shading correction circuit, 5...
Modulation shading correction circuit, 6... image processing device.

Claims (1)

【実用新案登録請求の範囲】 １ 照明された被検査体を撮像するための撮像装
置と、この撮像装置から得られる撮像信号を補正
処理する変調シエーデイング補正回路と、補正さ
れた前記撮像信号を画像処理する画像処理装置と
を具え、前記照明及び撮像装置に起因する検出感
度の不均一な分布を前記変調シエーデイング補正
回路によつて補正し、均一な検出条件として検査
できるようにしたことを特徴とする補正式検査装
置。 ２ 補正処理として重畳シエーデイング補正回路
を付加した請求項１に記載の補正式検査装置。 ３ 前記画像処理装置に予め所定の撮像条件で検
出処理された結果に対する閾値分布を記憶したフ
レームメモリを設け、前記検出処理結果を前記閾
値分布と照合するようにした請求項１又は２に記
載の補正式検査装置。[Claims for Utility Model Registration] 1. An imaging device for imaging an illuminated object to be inspected, a modulation shading correction circuit for correcting an imaging signal obtained from the imaging device, and a modulation shading correction circuit for correcting an imaging signal obtained from the imaging device; and an image processing device for processing, and the modulation shading correction circuit corrects uneven distribution of detection sensitivity caused by the illumination and imaging device, so that inspection can be performed under uniform detection conditions. Correction type inspection device. 2. The correction type inspection device according to claim 1, further comprising a superimposition shading correction circuit for the correction process. 3. The image processing device according to claim 1 or 2, wherein the image processing device is provided with a frame memory that stores a threshold distribution for a result of detection processing under predetermined imaging conditions, and the detection processing result is compared with the threshold distribution. Correction type inspection device.
JP1988098067U 1988-07-25 1988-07-25 Defect inspection equipment Expired - Lifetime JPH0740165Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988098067U JPH0740165Y2 (en) 1988-07-25 1988-07-25 Defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988098067U JPH0740165Y2 (en) 1988-07-25 1988-07-25 Defect inspection equipment

Publications (2)

Publication Number Publication Date
JPH0220106U true JPH0220106U (en) 1990-02-09
JPH0740165Y2 JPH0740165Y2 (en) 1995-09-13

Family

ID=31324002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988098067U Expired - Lifetime JPH0740165Y2 (en) 1988-07-25 1988-07-25 Defect inspection equipment

Country Status (1)

Country Link
JP (1) JPH0740165Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281588A (en) * 1993-03-29 1994-10-07 Toyo Glass Co Ltd Inspection of minute defect of transparent substance having curved surface
JP2006113020A (en) * 2004-10-18 2006-04-27 Hitachi High-Technologies Corp Inspection apparatus and inspection method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144959U (en) * 1982-03-26 1983-09-29 日立電子株式会社 Shading correction circuit
JPS60187189A (en) * 1984-03-06 1985-09-24 Matsushita Electric Ind Co Ltd Shading correcting circuit
JPS61132845A (en) * 1984-12-02 1986-06-20 Dainippon Screen Mfg Co Ltd Surface detect inspecting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144959U (en) * 1982-03-26 1983-09-29 日立電子株式会社 Shading correction circuit
JPS60187189A (en) * 1984-03-06 1985-09-24 Matsushita Electric Ind Co Ltd Shading correcting circuit
JPS61132845A (en) * 1984-12-02 1986-06-20 Dainippon Screen Mfg Co Ltd Surface detect inspecting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281588A (en) * 1993-03-29 1994-10-07 Toyo Glass Co Ltd Inspection of minute defect of transparent substance having curved surface
JP2006113020A (en) * 2004-10-18 2006-04-27 Hitachi High-Technologies Corp Inspection apparatus and inspection method
JP4485904B2 (en) * 2004-10-18 2010-06-23 株式会社日立ハイテクノロジーズ Inspection apparatus and inspection method

Also Published As

Publication number Publication date
JPH0740165Y2 (en) 1995-09-13

Similar Documents

Publication Publication Date Title
SE8700314D0 (en) METHOD FOR THE GENERATION OF REAL-TIME CONTROL PARAMETERS FOR SMOKE-GENERATING COMBUSTION PROCESSES BY MEANS OF A VIDEO CAMERA
JPH0220106U (en)
JPH0629707B2 (en) Optical cutting line measuring device
JPS55119782A (en) Pattern automatic inspection method
JPS61163916U (en)
JPH0618958U (en) Foreign substance inspection device for PTP
JPH0324513A (en) Electronic endoscope device
JPS6241505Y2 (en)
JPS6478073A (en) Image correcting device
JPS6312348Y2 (en)
JPS60196734A (en) lighting control device
JPS63185353U (en)
JPS6017005Y2 (en) Pattern determination device
JPH0656616B2 (en) Binarization method of captured image information
JPH0552741U (en) Light irradiation position display device
JPH0260245U (en)
JPS62163752U (en)
JPS6446860U (en)
JPS61104679U (en)
JPH06103274B2 (en) Object surface inspection device
JPH0248857U (en)
JPH01134207U (en)
JPS61118009U (en)
JPS63128457U (en)
JPH0335459U (en)