JPH0219783Y2 - - Google Patents
Info
- Publication number
- JPH0219783Y2 JPH0219783Y2 JP1982174020U JP17402082U JPH0219783Y2 JP H0219783 Y2 JPH0219783 Y2 JP H0219783Y2 JP 1982174020 U JP1982174020 U JP 1982174020U JP 17402082 U JP17402082 U JP 17402082U JP H0219783 Y2 JPH0219783 Y2 JP H0219783Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable part
- coil pattern
- reflecting mirror
- mechanical vibrator
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Optical Transform (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
【考案の詳細な説明】
本考案は、特定な周波数で共振する共振子や、
周波数選択性を有するメカニカル・フイルタ、入
力信号の大きさに対向して光ビームを偏向させる
光偏向子、力や圧力、密度、粘度等の各種物理量
の検出素子として利用可能な機械振動子に関する
ものである。[Detailed explanation of the invention] This invention uses a resonator that resonates at a specific frequency,
Mechanical filters with frequency selectivity, optical deflectors that deflect light beams in opposition to the magnitude of input signals, and mechanical oscillators that can be used as detection elements for various physical quantities such as force, pressure, density, and viscosity. It is.
第１図は、本願考案者らが先に特願昭55−
44383号で提案したこの種の機械振動子の一例を
示す構成斜視図で、ここでは光偏向子を示す。 Figure 1 shows the patent application filed in 1983 by the inventors
This is a perspective view showing an example of the mechanical oscillator of this kind proposed in No. 44383, in which an optical deflector is shown.
この光偏向子は、フレーム１に可動部２を細く
なつたバネ部３１，３２を介して支持するととも
に、可動部２に、反射鏡４とコイルパターン５と
を形成したものである。フレーム１，可動部２お
よびバネ部３１，３２は、例えば厚さが５×10-5
ｍ程度のひとつの水晶基板で構成され、これらの
形状、反射鏡やコイルパターンの作成はホトリソ
グラフイ（写真食刻）の技術とエツチングの技術
とを利用して行なわれる。 This optical deflector has a frame 1 supporting a movable part 2 via narrow spring parts 31 and 32, and a reflecting mirror 4 and a coil pattern 5 formed on the movable part 2. The frame 1, the movable part 2, and the spring parts 31, 32 have a thickness of, for example, 5×10 -5
It is composed of a single quartz substrate with a diameter of about 1.5 m, and the shapes, reflecting mirrors, and coil patterns are created using photolithography and etching techniques.
このように構成した光偏向子は、コイルパター
ン５を図示する矢印方向の磁界（基板の平面方向
と同一方向の磁界）中に配置させ、コイルパター
ンに電流を流すことによつて、可動部２をバネ部
３１，３２を軸として偏位させ、反射鏡４に入射
する光ビームを偏向することができる。 The optical deflector configured in this manner is constructed by placing the coil pattern 5 in a magnetic field in the direction of the arrow shown in the figure (a magnetic field in the same direction as the planar direction of the substrate), and by passing a current through the coil pattern, the movable part 2 The light beam incident on the reflecting mirror 4 can be deflected by deflecting the spring parts 31 and 32 about the axes.
ところで、このような構成の光偏向子は、高性
能で品質の揃つた素子を一度に多数生産すること
ができるという特長がある反面、コイルパターン
に大きな電流を流すと、コイルパターンの抵抗に
よるジユール熱によつて発熱し、コイルパターン
付近が膨張し、第２図に示すように可動部２が反
るという問題点があつた。可動部２が第２図に示
すように反ると、反射鏡が傾斜し、偏向ビーム光
が正しい方向に反射しなくなつてしまう。 Incidentally, an optical deflector with such a configuration has the advantage of being able to produce a large number of high-performance, uniform-quality elements at once, but on the other hand, when a large current is passed through the coil pattern, the resistance of the coil pattern causes a There was a problem in that the area around the coil pattern expanded due to the heat generated, and the movable part 2 warped as shown in FIG. If the movable part 2 is warped as shown in FIG. 2, the reflecting mirror will be tilted and the deflected beam will no longer be reflected in the correct direction.
第３図は、このような問題点を解決するため
に、本願考案者らが先に実願昭56−71798号で提
案した機械振動子を示す構成斜視図で、可動部の
コイルパターン５に流れる電流のジユール熱によ
る膨張を、伸び縮み吸収バネ部３８，３９の柔軟
な構造によつて吸収するようにしたものである。
しかしながら、この構造では可動部が回転した場
合にバネ部と反射鏡部分とのねじれ剛性比に対応
して、反射鏡部分もバネ部３１，３２を軸として
ねじれるため、反射鏡からの反射鏡からの反射光
ビームが拡がつてしまう。 FIG. 3 is a structural perspective view showing a mechanical vibrator that the present inventors proposed in Utility Application No. 56-71798 in order to solve such problems. Expansion due to the Joule heat of the flowing current is absorbed by the flexible structure of the expansion/contraction absorbing spring parts 38, 39.
However, in this structure, when the movable part rotates, the reflector part also twists around the spring parts 31 and 32 in accordance with the torsional rigidity ratio between the spring part and the reflector part, so that The reflected light beam spreads out.
本考案はこのような熱膨張による可動部の反り
による問題点および可動部回転時の反射鏡のねじ
れによる問題点を解決することを目的としてなさ
れたものである。 The present invention has been made to solve the problems caused by the warping of the movable part due to thermal expansion and the problems caused by the twisting of the reflecting mirror when the movable part rotates.
本考案は一つの絶縁基板にホトリソグラフイ技
術とエツチング技術を用いて可動部とこれを支持
する静止部とを形成するとともに前記可動部に反
射鏡とコイルパターンとを形成し、前記絶縁基板
と同一方向の磁界を与えるとともに前記コイルパ
ターンに電流を流して可動部を振動させるように
した機械振動子に係るもので、その特徴とすると
ころは前記可動部はその一端のみが直接またはバ
ネ部を介して静止部に接続することによつて片持
ちばりを構成するとともに前記一端側にコイルパ
ターンを形成し他端側に反射鏡を形成した点にあ
る。 The present invention uses photolithography technology and etching technology to form a movable part and a stationary part that supports it on a single insulating substrate, and also forms a reflecting mirror and a coil pattern on the movable part. This relates to a mechanical vibrator that vibrates a movable part by applying a magnetic field in the same direction and passing current through the coil pattern.The feature is that only one end of the movable part is connected directly or by a spring part. A cantilever beam is formed by connecting to a stationary part through a coil pattern, and a coil pattern is formed on one end, and a reflecting mirror is formed on the other end.
以下図面にもとづいて本考案を説明する。 The present invention will be explained below based on the drawings.
第４図および第５図は、本考案に係る機械振動
子の構成斜視図で、いずれも光偏向子を構成した
場合を例示する。 4 and 5 are perspective views of a mechanical vibrator according to the present invention, each illustrating a case where an optical deflector is constructed.
第４図の実施例は、可動部２をその一端で支持
するバネ部３２を介して片持ちばりとしてフレー
ム１の１側辺に固定させるようにしたものであ
る。このように構成した光偏向子は、図示する矢
印方向の磁界（基板の平面方向と同一方向の磁
界）中に配置させたコイルパターン５に電流を流
すことにより発生するトルクにより、バネ部３２
とコイル部の両方がねじれて可動部を偏位させ、
反射鏡４に入射する光ビームを偏向することがで
きる。 In the embodiment shown in FIG. 4, the movable part 2 is fixed to one side of the frame 1 as a cantilever via a spring part 32 that supports the movable part 2 at one end thereof. In the optical deflector configured in this way, the spring portion 32 is caused by the torque generated by passing a current through the coil pattern 5 arranged in a magnetic field in the direction of the arrow shown in the figure (a magnetic field in the same direction as the planar direction of the substrate).
Both the coil and the coil part twist to deflect the movable part,
A light beam incident on the reflecting mirror 4 can be deflected.
第５図の実施例は、第４図の実施例においてバ
ネ部３２を取り去り可動部２の一端を直接フレー
ム１に固定して、コイル部のねじれだけを利用す
るようにした構造で、固有振動数の高い光偏向子
を実現できる。 The embodiment shown in FIG. 5 has a structure in which the spring part 32 is removed from the embodiment shown in FIG. A large number of optical deflectors can be realized.
このように構成される機械振動子によれば、反
射鏡上端が開放となつているため、コイル発熱に
よる膨張の影響を受けない。したがつてコイルに
大電流を流すことができるので、大きな偏向角を
得ることができる。また可動部２が回転した場合
に反射鏡にトルクが作用しないので反射鏡のねじ
れも発生せず、反射光ビームが拡がつてしまうこ
ともない。 According to the mechanical vibrator configured in this manner, since the upper end of the reflector is open, it is not affected by expansion due to coil heat generation. Therefore, since a large current can be passed through the coil, a large deflection angle can be obtained. Furthermore, since no torque is applied to the reflecting mirror when the movable part 2 rotates, the reflecting mirror does not twist, and the reflected light beam does not spread.
なお第４図，第５図の実施例において用いてい
るフレーム１は保護ケースなどに収納するための
ものであり、収納方法によつては、フレーム１を
省略することができる。 The frame 1 used in the embodiments shown in FIGS. 4 and 5 is for storing in a protective case or the like, and depending on the storage method, the frame 1 can be omitted.
また第４図および第５図に示す機械振動子はひ
とつの絶縁基板から、ホトリソグラフイの技術と
エツチングの技術を利用して、同一工程で形成で
きるものであり、第３図に示す機械振動子よりも
単純な構造なので製作も容易である。 Furthermore, the mechanical vibrators shown in Figures 4 and 5 can be formed from a single insulating substrate in the same process using photolithography and etching techniques. Since it has a simpler structure than the child, it is easier to manufacture.
以上述べたように本考案によれば、ジユール熱
などによる可動部の反りや、可動部回転時の反射
鏡のねじれなどの生じない機械振動子を簡単な構
造で実現できる。 As described above, according to the present invention, it is possible to realize a mechanical vibrator with a simple structure that does not cause warping of the movable part due to Joule heat, etc., or twisting of the reflecting mirror when the movable part rotates.
第１図および第３図は本願考案者らが先に提案
した機械振動子の実施例を示す構成斜視図、第２
図は第１図の機械振動子の問題点を説明するため
の側面図、第４図および第５図は本考案に係る機
械振動子の構成斜視図である。
２……可動部、４……反射鏡、５……コイルパ
ターン、３２……バネ部。
1 and 3 are structural perspective views showing an embodiment of the mechanical vibrator previously proposed by the inventors of the present application;
This figure is a side view for explaining the problem of the mechanical vibrator shown in FIG. 1, and FIGS. 4 and 5 are perspective views of the structure of the mechanical vibrator according to the present invention. 2...Movable part, 4...Reflector, 5...Coil pattern, 32...Spring part.
Claims (1)
チング技術を用いて可動部とこれを支持する静止
部とを形成するとともに前記可動部に反射鏡とコ
イルパターンとを形成し、前記絶縁基板と同一方
向の磁界を与えるとともに前記コイルパターンに
電流を流して可動部を振動させるようにした機械
振動子において、前記可動部はその一端のみが直
接またはバネ部を介して静止部に接続することに
よつて片持ちばりを構成するとともに前記一端側
にコイルパターンを形成し他端側に反射鏡を形成
したことを特徴とする機械振動子。 A movable part and a stationary part that supports it are formed on one insulating substrate using photolithography technology and etching technology, and a reflecting mirror and a coil pattern are formed on the movable part, and a mirror pattern and a coil pattern are formed on the same insulating substrate. In a mechanical vibrator that vibrates a movable part by applying a magnetic field and passing a current through the coil pattern, the movable part can be separated by connecting only one end of the movable part to a stationary part directly or through a spring part. A mechanical vibrator comprising a beam, a coil pattern formed on one end side, and a reflecting mirror formed on the other end side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17402082U JPS5979823U (en) | 1982-11-17 | 1982-11-17 | mechanical vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17402082U JPS5979823U (en) | 1982-11-17 | 1982-11-17 | mechanical vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5979823U JPS5979823U (en) | 1984-05-30 |
| JPH0219783Y2 true JPH0219783Y2 (en) | 1990-05-31 |
Family
ID=30378950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17402082U Granted JPS5979823U (en) | 1982-11-17 | 1982-11-17 | mechanical vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5979823U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2584799B2 (en) * | 1987-11-16 | 1997-02-26 | コニカ株式会社 | Image forming device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5486146U (en) * | 1977-11-29 | 1979-06-18 | ||
| JPS55113509U (en) * | 1979-02-05 | 1980-08-09 | ||
| JPS6057053B2 (en) * | 1980-08-11 | 1985-12-13 | 横河電機株式会社 | light deflection element |
-
1982
- 1982-11-17 JP JP17402082U patent/JPS5979823U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5979823U (en) | 1984-05-30 |
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