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JPH02184458A - Production of thermal head - Google Patents

Production of thermal head

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Publication number
JPH02184458A
JPH02184458A JP410689A JP410689A JPH02184458A JP H02184458 A JPH02184458 A JP H02184458A JP 410689 A JP410689 A JP 410689A JP 410689 A JP410689 A JP 410689A JP H02184458 A JPH02184458 A JP H02184458A
Authority
JP
Japan
Prior art keywords
heat
conductor pattern
protective film
insulating substrate
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP410689A
Other languages
Japanese (ja)
Inventor
Noriyuki Hasebe
長谷部 紀之
Takashi Yamanaka
隆司 山中
Yukio Murata
村田 幸男
Shinichiro Nagano
眞一郎 永野
Katsuto Kamisaki
上崎 勝人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP410689A priority Critical patent/JPH02184458A/en
Publication of JPH02184458A publication Critical patent/JPH02184458A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enhance efficiency of heat transfer and contact of a head with a thermal recording paper by a method wherein a conductor pattern formed on an insulating substrate by use of a metal-organic paste is buried into the substrate through diffusion by a high-temperature heat treatment, and a heat generating resistor is formed on the conductor pattern by a thin film method. CONSTITUTION:Conductor patterns 31 are provided on an insulating substrate 11 by applying a metal-organic paste by printing and baking the applied paste. Then, a high-temperature heat treatment is conducted for interdiffusion of the materials of the substrate 11 and the conductor patterns 31, thereby burying the patterns 31 into the substrate 11. Thus, the upper surfaces of the substrate 11 and the conductor patterns 31 become substantially flush with each other, so that a heat generating resistor 2 formed thereon by a thin film method has a smooth upper surface, and a protective film 4 provided thereon has no recessed parts. Since the area of thermal contact of the resistor 2 with the conductor patterns 31 is small and the patterns 31 are small in thickness and heat capacity, the heat generated by the resistor 2 is mostly transferred to the protective film 4. The protective film 4, having no recessed parts, can transfer the heat effectively to a thermal recording paper 6. In addition, favorable contact between the protective film 4 and the paper 6 is ensured.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、ファクシミリやプリンターなどの印字用デ
バイスであるサーマルヘッドの製造法に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a thermal head, which is a printing device such as a facsimile or a printer.

〔従来の技術〕[Conventional technology]

一般に、サーマルヘッドは感熱記録紙上に数字、文字、
記号などを記録するために用いられるものであり、通常
は、セラミックなどの絶縁性基板上に1対の電極を形成
するとともに、両電極間に発熱体としての抵抗体を電気
的に接続して構成されている。そして、サーマルヘッド
を用いて記録を行なう場合には、両電極間の抵抗体に電
圧を印加して抵抗体を発熱させ、その熱を感熱記録紙に
与えることによって、感熱記録紙には抵抗体の発熱に応
じて感熱記録が行なわれる。ここで、感熱記録紙として
は、周知のように、熱を与えることによって物理的ある
いは化学的に変色するように処理されたものが用いられ
る。
In general, a thermal head prints numbers, letters, etc. on thermal recording paper.
It is used to record symbols, etc., and usually consists of a pair of electrodes formed on an insulating substrate such as ceramic, and a resistor as a heating element electrically connected between the two electrodes. It is configured. When recording using a thermal head, a voltage is applied to the resistor between both electrodes to cause the resistor to generate heat, and the heat is applied to the thermal recording paper. Thermal recording is performed in response to the heat generated. As is well known, the heat-sensitive recording paper used here is one that has been treated to change color physically or chemically by applying heat.

以上のように、サーマルヘッドの基幹要素は電極と発熱
抵抗体であり、これらは一般に厚膜法と呼ばれるペース
トを印刷、焼成して形成する方法と、薄膜法と呼ばれる
スパッタリングやCVDによって形成する方法によって
絶縁基板上に作成されている。これらの方法を組み合わ
せると次の4組となる。
As mentioned above, the basic elements of a thermal head are electrodes and heating resistors, and these are generally formed by printing and baking a paste, which is called the thick film method, or by sputtering or CVD, which is called the thin film method. is fabricated on an insulating substrate by Combining these methods results in the following four sets.

(イ)電極;厚膜法   抵抗体;厚膜法(ロ)電極;
厚膜法   抵抗体;薄膜法(ハ)電極;薄膜法   
抵抗体;厚膜法に)電極;薄膜法   抵抗体;薄膜法
このような組み合せのうちどれを採用して製造するかは
、要求されるサーマルヘッドの性能、品質、設備、生産
量、コスト等種々の要因によって決定されているが、−
膜内には、薄膜法が高品質、高性能のものが得られる反
面、コスト高となっている。
(a) Electrode; thick film method Resistor; thick film method (b) Electrode;
Thick film method Resistor; Thin film method (c) Electrode; Thin film method
Resistor: thick film method) Electrode: thin film method Resistor: thin film method Which of these combinations to use for manufacturing depends on the required thermal head performance, quality, equipment, production volume, cost, etc. Although it is determined by various factors, -
Although the thin film method can produce high quality and high performance inside the film, it is expensive.

さて第5図は例えば特開昭58−220769号公報に
示された上記((2)に概当する電極が厚膜法で抵抗体
が薄膜法の従来のサーマルヘッドを示す断面図であり、
図において([)は絶縁基板、(1)は薄膜法により形
成された発熱抵抗体、(3)は厚膜法により形成された
導体パターン、(3a)は導体パターン段差である。(
4)は発熱抵抗体の周囲を保護する保護膜、(4a)は
凹みである。(5)は番数の発熱抵抗体(2)を駆動す
るための駆動用ICで(6)は発熱抵抗体(2)からの
熱により発色する感熱紙である。
Now, FIG. 5 is a sectional view showing a conventional thermal head in which the electrodes are made by the thick film method and the resistor is made by the thin film method, which generally corresponds to the above (2) shown in, for example, Japanese Unexamined Patent Publication No. 58-220769.
In the figure, ([) is an insulating substrate, (1) is a heating resistor formed by a thin film method, (3) is a conductor pattern formed by a thick film method, and (3a) is a conductor pattern step. (
4) is a protective film that protects the periphery of the heating resistor, and (4a) is a recess. (5) is a driving IC for driving the number heating resistor (2), and (6) is thermal paper that develops color due to the heat from the heating resistor (2).

上記第5図に示した電極−厚膜法、抵抗体−薄膜法のも
のは、電極−厚膜法、抵抗体−厚膜法のものに比較して
抵抗のバラツキが少く、印加電力も少く、かつ熱応答性
が良いという面を有していて、最近のサーマルヘッドの
ように感熱記録紙とに高精度で高速の熱記録を行うとい
う要求に対して有利な構造のものである。
The electrode-thick film method and resistor-thin film method shown in Figure 5 above have less variation in resistance and less power applied than the electrode-thick film method and resistor-thick film method. It also has a good thermal response, and has an advantageous structure in response to the demand for high-precision, high-speed thermal recording on thermal recording paper, as in recent thermal heads.

ン(3)に電流が流れる。この電流は厚膜の導体パター
ン(3)より発熱抵抗体(2)に供給されて発熱抵抗体
(2)が発熱する。発熱の際の発熱抵抗体(2)の酸化
劣化を防止するため、かつ印字の際の感熱紙(6)との
摩擦から発熱抵抗体(2)や導体パターン(3)を保護
するために保護膜(4)を形成する。また保護膜(4)
に押しあてられた感熱紙(6)は発熱抵抗体(2)より
保護膜(4)を介して伝えられた熱と反応して発色し、
文字や図形が表示される。
Current flows through the ring (3). This current is supplied to the heating resistor (2) through the thick film conductor pattern (3), and the heating resistor (2) generates heat. Protection to prevent oxidative deterioration of the heating resistor (2) when generating heat, and to protect the heating resistor (2) and conductor pattern (3) from friction with the thermal paper (6) during printing. A film (4) is formed. Also protective film (4)
The thermal paper (6) pressed against it reacts with the heat transferred from the heating resistor (2) through the protective film (4) and develops color.
Text and figures are displayed.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のサーマルヘッドは以上のような構成で製造されて
いるので次のような問題点があった。
Conventional thermal heads are manufactured with the above-mentioned configuration and have the following problems.

印導体パターン(3)がAlや金などの金属材料を含有
する導電ペーストを用いた厚膜導体であるので、この厚
膜導体パターン(3)上の保護膜(4)は、導体パター
ン段差(3i)を埋めることができず、第5図に示すよ
うに凹み(4a)を有するものとなる。
Since the printed conductor pattern (3) is a thick-film conductor using a conductive paste containing a metal material such as Al or gold, the protective film (4) on the thick-film conductor pattern (3) covers the conductor pattern step ( 3i) cannot be filled, resulting in a depression (4a) as shown in FIG.

(切また第7図に示ごとく導体パターン段差(3a)部
には、ステップカバレッジの悪い保護膜(4b)や、そ
のため露出した導体(3a)が発生する。
(Also, as shown in FIG. 7, a protective film (4b) with poor step coverage and an exposed conductor (3a) are generated at the step (3a) of the conductor pattern.

(ハ)さらに第6図に示すように発熱抵抗体(2)の発
熱部(2a)で発生した熱は、絶縁基板(1)と導体パ
ターン(3)と保護膜(4)に伝わる。ここで導体パタ
ーン(3)は厚膜構造なので熱容量が大きく従って大部
分の熱流(8)が導体パターン(3)に伝わる。残りの
熱流(9)αQのうち(9)が保護膜(4)に伝わるこ
とになるが、保護膜(4)と感熱紙(6)の間に伝わる
熱は凹み(4a)を介して伝達されているので極く小さ
な熱流DI>となり、熱効率が非常に悪い。
(c) Furthermore, as shown in FIG. 6, the heat generated in the heat generating portion (2a) of the heat generating resistor (2) is transmitted to the insulating substrate (1), the conductor pattern (3) and the protective film (4). Here, since the conductor pattern (3) has a thick film structure, it has a large heat capacity and therefore most of the heat flow (8) is transmitted to the conductor pattern (3). Of the remaining heat flow (9) αQ, (9) will be transmitted to the protective film (4), but the heat transmitted between the protective film (4) and the thermal paper (6) will be transmitted via the recess (4a). Therefore, the heat flow DI is extremely small, resulting in very poor thermal efficiency.

に)凹み(4a)を有するために保護膜(4)と感熱紙
(6)との密着性分が悪い。などの問題点があった。
B) The adhesiveness between the protective film (4) and the thermal paper (6) is poor due to the presence of the recess (4a). There were problems such as.

これらを解消する一方法として特公昭62−30114
号に、導体材料としてメタル・オルガニックペーストを
用いて厚膜法により極めて薄い導体パターンを形成し、
この導体パターンとに厚膜発熱抵抗体を形成することが
示されているが、この方法においても発熱抵抗体が7g
膜なる故に上記(6)および(ハ)の問題点を完全に解
消し得たものではなかった。
As one way to solve these problems,
In this issue, an extremely thin conductor pattern was formed using a thick film method using metal organic paste as the conductor material.
It has been shown that a thick film heating resistor is formed on this conductor pattern, but even in this method, the heating resistor weighs 7 g.
Since it is a film, problems (6) and (c) above cannot be completely solved.

また、導体パターンを薄膜化しかつ発熱抵抗体も薄膜化
することで、上記(6)〜に)の問題点を解消すること
が可能となるが、コスト面設備面等の観点から必ずしも
全面的に採用されていない。
In addition, by making the conductor pattern thinner and the heating resistor thinner, it is possible to solve the problems (6) to (6) above, but it is not always possible to solve them completely from the viewpoint of cost and equipment. Not adopted.

この発明は上記のような(イ)〜に)の問題点全解消す
るためになされたもので、厚膜法による極めて薄い導体
パターンを形成しこれを高温の熱処理することで拡散し
て絶縁基板に埋めこみその土に薄膜法の発熱抵抗体を形
成することで、コストが安価で熱効率が良く、ステップ
カバレッジのない、感熱紙との密着性のよい信頼性の高
いサーマルヘッドの製造方法を提供することを目的とす
る。
This invention was made in order to solve all of the problems (a) to (b) above, and it forms an extremely thin conductor pattern using a thick film method and then heat-treats it at high temperature to diffuse it and spread it onto an insulating substrate. To provide a method for manufacturing a highly reliable thermal head with low cost, high thermal efficiency, no step coverage, and good adhesion to thermal paper by embedding it in the soil and forming a heating resistor using a thin film method in the soil. The purpose is to

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係るサーマルヘッドの製造方法は絶縁基板上
にメタル・オルガニックペーストを用いて形成した導体
パターンを高温熱処理にて拡散して上記絶縁基板に埋め
こみこの導体パターンの上に薄膜法による発熱抵抗体を
形成したものである。
A method for manufacturing a thermal head according to the present invention is to form a conductor pattern on an insulating substrate using metal organic paste, diffuse it by high-temperature heat treatment, embed it in the insulating substrate, and apply a heating resistor using a thin film method on top of the conductor pattern. It is what formed the body.

〔作用〕[Effect]

この発明により製造されたサーマルヘッドは、導体パタ
ーンが薄くかつ、熱処理によって絶縁基板と拡散して絶
縁基板表面に埋め込まれ、その上面に薄膜発熱抵抗体を
形成するので保護膜表面に凹みがなくて表面が滑らかと
なり、熱伝達効率が向上し、保護膜と感熱紙との密着性
を高める。
The thermal head manufactured according to the present invention has a thin conductor pattern, is diffused into the insulating substrate through heat treatment, and is embedded in the surface of the insulating substrate, and a thin film heating resistor is formed on the top surface, so there is no dent on the surface of the protective film. The surface becomes smoother, improving heat transfer efficiency and increasing the adhesion between the protective film and the thermal paper.

〔発明の実施例〕[Embodiments of the invention]

以下この発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図において、αηは絶縁基板に導体パターンCl力
をメタル・オルガニックペーストを用いて印刷、焼成し
て形成したのち、絶縁基板Opと上記導体パターン0υ
との相互拡散を目的として高温の熱処理を施し、絶縁基
板αつの中に導体パターン0復を埋めこんだものである
。(2)は上記導体パターン61および絶縁基板(ロ)
上に薄膜法によって形成された発熱抵抗体、(4)は保
護膜である。こ\で、第5図に示した従来の厚膜の導体
パターン(3)と比較して、メタル・オルガニック導体
パターン(ロ)は、特公昭62−30114  号に示
された如く焼成により0.3μm程度と従来のものの約
1/10程度の極薄パターンであり、従って導体パター
ン段差(31m)は極めて小さい。
In Fig. 1, αη is formed by printing and firing a conductor pattern Cl force on an insulating substrate using metal organic paste, and then forming the conductor pattern Cl force on an insulating substrate Op and the above conductor pattern 0υ.
A high-temperature heat treatment is performed for the purpose of interdiffusion with the insulating substrate, and a conductive pattern is embedded into the insulating substrate. (2) is the conductor pattern 61 and the insulating substrate (b).
A heating resistor is formed on top by a thin film method, and (4) is a protective film. Compared to the conventional thick-film conductor pattern (3) shown in Fig. 5, the metal organic conductor pattern (b) has zero resistance by firing as shown in Japanese Patent Publication No. 62-30114. The pattern is extremely thin, about .3 μm, about 1/10 of the conventional pattern, and therefore the conductor pattern step (31 m) is extremely small.

従って、第1図からも判るように絶縁基板0ηと導体パ
ターン6つ上面とはほぼ面一となり、この上に薄膜法に
より形成された発熱抵抗体(2)の上面は滑らかとなり
、保護膜(4)の表面には従来例のような凹み(4a)
は生じない。
Therefore, as can be seen from FIG. 1, the insulating substrate 0η and the upper surfaces of the six conductor patterns are almost flush with each other, and the upper surface of the heating resistor (2) formed thereon by the thin film method is smooth, and the protective film ( 4) has a dent (4a) on the surface like the conventional example.
does not occur.

こ\で第3図に熱処理温度による導体パターンと絶縁基
板との段差のデータを示す。この例では850℃におい
て段差が0となっているが、絶縁基板材質や処理温度に
よって段差の程度が異ってくることは言うまでもない。
Figure 3 shows data on the level difference between the conductor pattern and the insulating substrate depending on the heat treatment temperature. In this example, the level difference is 0 at 850° C., but it goes without saying that the degree of the level difference varies depending on the material of the insulating substrate and the processing temperature.

次に動作について説明する。駆動用I C(5)に外部
より信号が入り、導体パターン6優に電流が流れる。こ
の電流は導体パターン6pより発熱抵抗体(2)に供給
されて、発熱抵抗体(2)が発熱する。保護膜(4)は
発熱の際に発熱抵抗体(2)が酸化し劣化することを防
止するためや、印字の際の感熱紙(6)等との摩擦から
、発熱抵抗体(2)カ導体パターン(ロ)を保護する。
Next, the operation will be explained. A signal enters the driving IC (5) from the outside, and a current flows through the conductor pattern 6. This current is supplied to the heating resistor (2) through the conductor pattern 6p, and the heating resistor (2) generates heat. The protective film (4) protects the heating resistor (2) from oxidizing and deteriorating when it generates heat, and protects the heating resistor (2) from friction with thermal paper (6) during printing. Protect the conductor pattern (b).

保護膜(4)に押しあてられた感熱紙(6)は、発熱抵
抗体(2)より保護膜(4)を介して伝達された熱に反
応して発色し、文字や図形を表示する。
Thermal paper (6) pressed against the protective film (4) develops color in response to heat transferred from the heating resistor (2) through the protective film (4) to display characters and figures.

ここで発熱抵抗体(2)で発生した熱は、第1図に示し
た如く導体パターン61)との熱接触面が少なくかつ、
導体パターンC(l)が極めて薄くて熱容量が小さいた
め、そのほとんどが保護膜(4)に伝達される。
Here, the heat generated by the heating resistor (2) has a small thermal contact surface with the conductor pattern 61) as shown in FIG.
Since the conductor pattern C(l) is extremely thin and has a small heat capacity, most of it is transferred to the protective film (4).

そして保護膜(4)には従来例の如く凹み(4a)を有
していないために、感熱紙(6)に効率よく熱全伝達す
る。さらに保護膜(4)と感熱紙(6)との密着が良好
となる。
Since the protective film (4) does not have a recess (4a) unlike the conventional example, the entire heat is efficiently transferred to the thermal paper (6). Furthermore, the adhesion between the protective film (4) and the thermal paper (6) is improved.

第2図はこの発明のサーマルヘッドの熱伝搬を示した図
である。発熱抵抗体(2)の発熱部(2a)で発生した
熱は、導体パターンcl])への熱流(8)と、保護膜
(4)への熱流(9)と、絶縁基板αpへの熱流α0と
なるが、上記したように発熱抵抗体(2)と導体パター
ン6pとの熱接触面積が小さいため、および導体パター
ン6つが薄膜で熱容量が小さいために発生熱のほとんど
が保護膜(4)への熱流(9)となる。保護膜(4)に
伝達された熱は、良く密着した感熱紙(6)に効率よく
伝達される。このように熱効率が一層向土した省エネの
サーマルヘッドが得られる。また第4図の如く、導体パ
ターン6ηと発熱抵抗体(2)および絶縁基板(ロ)と
の間に段差がないため保護膜(4)もステップカバレッ
ジの問題が無くなり、高信頼度で寿命の長いサーマルヘ
ッドとなる。
FIG. 2 is a diagram showing heat propagation in the thermal head of the present invention. The heat generated in the heat generating part (2a) of the heat generating resistor (2) flows into a heat flow (8) to the conductor pattern cl), a heat flow (9) to the protective film (4), and a heat flow to the insulating substrate αp. α0, but as mentioned above, most of the generated heat is transferred to the protective film (4) because the thermal contact area between the heating resistor (2) and the conductor pattern 6p is small, and because the six conductor patterns are thin films and have a small heat capacity. (9). The heat transferred to the protective film (4) is efficiently transferred to the well-adhered thermal paper (6). In this way, an energy-saving thermal head with improved thermal efficiency can be obtained. Furthermore, as shown in Fig. 4, since there is no step between the conductor pattern 6η, the heating resistor (2), and the insulating substrate (b), there is no step coverage problem for the protective film (4), resulting in high reliability and long service life. It becomes a long thermal head.

なお、この発明による一実施例では、絶縁基板(ロ)の
中に導体パターン6])の厚み全部を埋めこんだ例を示
したが、導体パターン(切の厚みの一部分を埋め込んだ
ものでる・りてもよい。
In one embodiment of the present invention, an example was shown in which the entire thickness of the conductor pattern 6]) was embedded in the insulating substrate (b), but it is also possible to embed a part of the thickness of the conductor pattern (6) into the insulating substrate (b). You may

なおまた上記実施例では、導体パターンcliメタル・
オルガニックペーストを印刷・焼成して形成している例
を示したが、印刷・焼成の後に、写真製版・エツチング
により導体パターンを形成してもよい。
Furthermore, in the above embodiment, the conductor pattern cli metal
Although an example has been shown in which the organic paste is formed by printing and firing, the conductor pattern may be formed by photolithography or etching after printing and firing.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、絶縁基板上にメタル・
オルガニックペーストを用いて形成した導体パターンを
高温熱処理にて拡散して絶縁基板に埋めこみ、この導体
パターンとに薄膜法による発熱抵抗体を形成したので、
熱伝達効率の良い、省エネで、感熱紙との密着性のよい
、ステップカバレッジの無い、印字バラツキの少い高信
頼性で寿命の長い安価なサーマルヘッドが得られる。
As described above, according to the present invention, a metal layer is formed on an insulating substrate.
A conductor pattern formed using organic paste was diffused through high-temperature heat treatment and embedded in an insulating substrate, and a heating resistor was formed on this conductor pattern using a thin film method.
An inexpensive thermal head with good heat transfer efficiency, energy saving, good adhesion to thermal paper, no step coverage, low printing variation, high reliability, and long life can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例によるサーマルヘッドを示
す断面図、第2図は第1図で示したサーマルヘッドの熱
伝搬を示した図、第3図は熱処理温度による導体パター
ンと絶縁基板との段差のデータを示す図、第4図は保護
膜部分の拡大断面図、第5図は従来のサーマルヘッドの
断面図、第6図ハ従来のサーマルヘッドの熱伝搬を示し
た図、第7図は従来の保護膜部分の拡大断面図である。 図中、(1)、(ロ)は絶縁基板、(2)は発熱抵抗体
、(3)(ロ)は導体パターン、(4)は保護膜、(6
)は感熱紙である。 なお、図中、同一符号は同一、 示す。
Figure 1 is a sectional view showing a thermal head according to an embodiment of the present invention, Figure 2 is a diagram showing heat propagation in the thermal head shown in Figure 1, and Figure 3 is a diagram showing a conductor pattern and an insulating substrate depending on the heat treatment temperature. Figure 4 is an enlarged sectional view of the protective film portion, Figure 5 is a sectional view of a conventional thermal head, Figure 6 is a diagram showing heat propagation in a conventional thermal head, and Figure 4 is an enlarged sectional view of the protective film. FIG. 7 is an enlarged sectional view of a conventional protective film portion. In the figure, (1) and (b) are insulating substrates, (2) are heating resistors, (3) and (b) are conductive patterns, (4) are protective films, and (6) are
) is thermal paper. In addition, in the figures, the same reference numerals are the same.

Claims (1)

【特許請求の範囲】[Claims] 絶縁基板上にメタルオルガニックペーストを用いて形成
した導体パターンを高温熱処理にて拡散して上記絶縁基
板に埋め込み、この導体パターンの上に薄膜法による発
熱抵抗体を形成したことを特徴とするサーマルヘッドの
製造方法。
A thermal device characterized in that a conductor pattern formed using metal organic paste on an insulating substrate is diffused by high-temperature heat treatment and embedded in the insulating substrate, and a heating resistor is formed on the conductor pattern by a thin film method. Head manufacturing method.
JP410689A 1989-01-11 1989-01-11 Production of thermal head Pending JPH02184458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP410689A JPH02184458A (en) 1989-01-11 1989-01-11 Production of thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP410689A JPH02184458A (en) 1989-01-11 1989-01-11 Production of thermal head

Publications (1)

Publication Number Publication Date
JPH02184458A true JPH02184458A (en) 1990-07-18

Family

ID=11575540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP410689A Pending JPH02184458A (en) 1989-01-11 1989-01-11 Production of thermal head

Country Status (1)

Country Link
JP (1) JPH02184458A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018192694A (en) * 2017-05-17 2018-12-06 ローム株式会社 Thermal print head and method for manufacturing thermal print head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018192694A (en) * 2017-05-17 2018-12-06 ローム株式会社 Thermal print head and method for manufacturing thermal print head

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