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JPH02177360A - Semiconductor memory - Google Patents

Semiconductor memory

Info

Publication number
JPH02177360A
JPH02177360A JP63331708A JP33170888A JPH02177360A JP H02177360 A JPH02177360 A JP H02177360A JP 63331708 A JP63331708 A JP 63331708A JP 33170888 A JP33170888 A JP 33170888A JP H02177360 A JPH02177360 A JP H02177360A
Authority
JP
Japan
Prior art keywords
wirings
sense amplifiers
sense amplifier
drivers
amplifiers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63331708A
Other languages
Japanese (ja)
Other versions
JPH0756885B2 (en
Inventor
Kenji Noda
研二 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63331708A priority Critical patent/JPH0756885B2/en
Publication of JPH02177360A publication Critical patent/JPH02177360A/en
Publication of JPH0756885B2 publication Critical patent/JPH0756885B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Static Random-Access Memory (AREA)
  • Semiconductor Memories (AREA)
  • Dram (AREA)

Abstract

PURPOSE:To decrease the difference in the sensing rate between sense amplifiers without enlarging the chip size by a method wherein sense amplifiers are driven by power supplying and GND wiring through the intermediary of multiple drivers while driving wirings are arranged on cell arrays. CONSTITUTION:The P channel transistor side terminals of sense amplifiers S1-Sn connected to one another are further connected to multiple P channel drivers P1-Px through the intermediary of wirings L1-Lk passing through memory cells (b). Likewise, the N channel transistor side terminals are connected to multiple N channel drivers N1-Nk. When a signal in a cell is given to a bit wire, sense signals phiSE and phiSE are displayed respectively at high and low levels so as to actuate respective drivers. At this time, the amplifiers S1-Sn are supplied with current through the wirings L1-Lk and M1-Mk so that the terminal potentials of the same amplifiers S1-Sn may be equalized by shortening the intervals between wirings. Through these procedures, the sensing rate can be equalized to make the optimum setting up of the sense amplifiers feasible.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は半導体メモリに関し、特にダイナミックRAM
の配線レイアウトに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor memory, and in particular to a dynamic RAM.
Regarding the wiring layout.

[従来の技術] 従来のダイナミックRA ?’v’Iの一例として1へ
IDRAMのセンスアンプ及びその周辺の回路図を第3
図に示し、これを用いて説明する。IMDRAMでは一
度に2048ビツトのセルをリフレッシュしなければな
らないため、1本のワード線に沿って2048台のセン
スアンプかならぶことになる。メモリセルアレイの一辺
に沿って配置されたセンスアンプアレイの端子A1〜A
2048、端子日1〜B2048はドライバー配線によ
ってセルアレイの一端でそれぞれPチャネルドライバー
及びNチャネルドライバーに接続されている。
[Conventional technology] Conventional dynamic RA? As an example of 'v'I, the circuit diagram of the IDRAM sense amplifier and its surroundings is shown in 1.
It is shown in the figure and will be explained using this figure. In IMDRAM, 2048 bits of cells must be refreshed at a time, so 2048 sense amplifiers are lined up along one word line. Terminals A1 to A of the sense amplifier array arranged along one side of the memory cell array
2048 and terminals 1 to B2048 are connected to a P-channel driver and an N-channel driver, respectively, at one end of the cell array by driver wiring.

センスアンプに信号が現れた後、センス信号φSEが高
レベル、φに丁が低レベルとなり、センスアンプが動作
を始める。このとき2048台のセンスアンプが同時に
動作するため、ドライバー配線に大量の電流が流れ、ド
ライブトランジスタから遠いAl−B1開の電位差はド
ライブトランジスタに近いA2048−B2048間の
電位差に比へ小さくなってしまう。ドライバー配線の幅
を20μ、長さを16mm、A’2の層抵抗を0. 0
25Ω/口とすると、配線抵抗20Ωとなり、50nI
Aのピーク電流で1Vずつ、計2Vの差が遠端と近端て
つき、センスアンプS1のセンス速度はセンスアンプ3
2048に比べかなり遅れることになる。
After the signal appears in the sense amplifier, the sense signal φSE becomes high level and φ becomes low level, and the sense amplifier starts operating. At this time, since 2048 sense amplifiers operate simultaneously, a large amount of current flows through the driver wiring, and the potential difference between Al-B1 open, which is far from the drive transistor, becomes smaller than the potential difference between A2048 and B2048, which is close to the drive transistor. . The width of the driver wiring is 20μ, the length is 16mm, and the layer resistance of A'2 is 0. 0
If it is 25Ω/mouth, the wiring resistance will be 20Ω and 50nI.
The peak current of A is 1V at a time, a total of 2V difference between the far end and the near end, and the sensing speed of sense amplifier S1 is the same as sense amplifier 3.
This will be considerably delayed compared to 2048.

[発明が解決しようとする問題点コ 上述した従来のダイナミックRAMは、大容量化にとも
ない、1本のワード線に接続されるセルの数が増加し、
ドライバーからセンスアンプアレイの遠端までの抵抗が
無視できなくなる。この状態でセンスアンプを駆動する
と、ドライバー配線に大電流が流れるため、センスアン
プの駆動端子の電イΩがセンスアンプアレイの両端で大
きく異なるため、ドライバー近端のセンスアンプでは、
センス速度の増加によって、センス感度が劣化し、トラ
イバ遠端のセンスアンプでは、センス速度が低下して、
全体のアクセスを遅らせてしまう。このため、すべての
センスアンプに対ずろ最適な設計が困難であった。
[Problems to be Solved by the Invention] In the conventional dynamic RAM described above, as the capacity increases, the number of cells connected to one word line increases.
The resistance from the driver to the far end of the sense amplifier array cannot be ignored. When the sense amplifier is driven in this state, a large current flows through the driver wiring, and the electric current at the drive terminal of the sense amplifier differs greatly at both ends of the sense amplifier array.
As the sensing speed increases, the sensing sensitivity deteriorates, and the sensing speed decreases in the sense amplifier at the far end of the driver.
This will delay overall access. For this reason, it has been difficult to create an optimal design for all sense amplifiers.

センスアンプ内のドライバー配線幅を大きくし抵抗を下
げようとすると、センスアンプ自身が配線類域を確保す
るため必要以上に大きくなり、ドライバー配線に直交す
るセンスアンプ内部の配線の寄生抵抗か増加するという
欠点や、センスアンプの拡散層を大きくすれば、ビット
線Z、l:接続される拡散層容量が増加してCB/C9
が悪化するという欠点を生しる。配線長を短くして、セ
ルアレイの分割を増やし、センスアンプとドライバーの
間の抵抗を小さくしようとすると、チップサイズが大き
くなる。
If you try to lower the resistance by increasing the width of the driver wiring inside the sense amplifier, the sense amplifier itself will become larger than necessary to secure the wiring area, and the parasitic resistance of the wiring inside the sense amplifier that is perpendicular to the driver wiring will increase. However, if the diffusion layer of the sense amplifier is made larger, the capacitance of the diffusion layer connected to the bit lines Z and l will increase and the CB/C9
This has the disadvantage that it worsens. If you try to shorten the wiring length, increase the division of the cell array, and reduce the resistance between the sense amplifier and the driver, the chip size will increase.

[発明の従来技術に対する相違点コ 上述した従来のダイナミックRAMに対して、本発明は
、電源段UGNDから複数のドライバーを介してセンス
アンプを駆動し、その駆動配線をセルアレイの上に配置
している。
[Differences between the invention and the prior art] In contrast to the above-mentioned conventional dynamic RAM, the present invention drives a sense amplifier from the power supply stage UGND via a plurality of drivers, and arranges the drive wiring above the cell array. There is.

[問題点を解決するだめの手段] 本発明の半導体メモリは複数グループに分けろれたメモ
リセルと、該メモリセルの複数グループのそれぞれに接
続可能な複数のセンスアンプと、該複数のセンスアンプ
に電流を供給する共通ドライブ信号線と、を含む半導体
メモリにおいて、上記共通ドライブ信号線に複数の駆動
トランジスタを並列に接続し、該駆動トランジスタを電
源配線に接続し・たものである。
[Means for solving the problem] The semiconductor memory of the present invention includes memory cells divided into a plurality of groups, a plurality of sense amplifiers connectable to each of the plurality of groups of memory cells, and a plurality of sense amplifiers connected to the plurality of sense amplifiers. In a semiconductor memory including a common drive signal line for supplying current, a plurality of drive transistors are connected in parallel to the common drive signal line, and the drive transistors are connected to a power supply wiring.

従って、本発明の半導体メモリは、電源及びGNDから
ドライバーを介してセンスアンプを結ぶ配線がチップ周
辺の十分に太い配線と、チップ周辺からセルアレイ上を
通ってセンスアンプに至る複数の配線によって接続され
ており、電源及びGNDとセンスアンプの間の抵抗がセ
ンスアンプアレイ内でほぼ一定となり、各センスアンプ
間のセンス速度の差はきわめて小さくなっている。
Therefore, in the semiconductor memory of the present invention, the wiring connecting the sense amplifier from the power supply and GND via the driver is connected by a sufficiently thick wiring around the chip and a plurality of wirings from the chip periphery passing over the cell array to the sense amplifier. Therefore, the resistance between the power supply and GND and the sense amplifiers is almost constant within the sense amplifier array, and the difference in sensing speed between the sense amplifiers is extremely small.

〔実施例] 第1図(a)は本発明の第1実施例の回路図である。ま
た第1図(b)は本発明で用いたセンスアンプの回路図
である。各センスアンプ51〜SnのPチャネルトラン
ジスタ側の端子は互いに接続され、メモリセル上を通る
配線L1〜L 1<を介してメモリセルアレイの反対側
にある複数のPチャネルドライバーP1〜P kに接続
されている。
[Embodiment] FIG. 1(a) is a circuit diagram of a first embodiment of the present invention. Further, FIG. 1(b) is a circuit diagram of a sense amplifier used in the present invention. The P-channel transistor side terminals of each sense amplifier 51-Sn are connected to each other and connected to a plurality of P-channel drivers P1-Pk on the opposite side of the memory cell array via wiring lines L1-L1< passing over the memory cells. has been done.

各センスアンプS1〜SnのNチャネルトランジスタ側
の端子も同様に配線N1〜N l<を介してメモリセル
アレイの反対側にある複数のNチャネルドライバーN1
〜N Rに接続されている。
Similarly, the terminals on the N-channel transistor side of each sense amplifier S1 to Sn are connected to the plurality of N-channel drivers N1 on the opposite side of the memory cell array via wiring N1 to N1.
~N Connected to R.

ビット線にセル内の信号が現れた後センス信号φSEが
高レベル、φSEが低レベルになり、各ドライバーが動
作状態にはいる。このときセンスアンプ81〜S rl
への電流は配線L]〜L J(及びM1〜M 1.(を
通して供給されるため、各配線間隔を十分小さくすれば
、センスアンプS1〜Snの両端子の電位はS1〜Sn
のセンスアンプで殆ど等電位となり、センス速度の差は
ほとんどなくなる。
After the signal in the cell appears on the bit line, the sense signal φSE goes high and φSE goes low, and each driver enters the operating state. At this time, sense amplifier 81~S rl
Since the current is supplied through the wirings L] to LJ(and M1 to M1.
The sense amplifier has almost the same potential, and there is almost no difference in sensing speed.

第2図は本発明の第2実施例の回路図である。FIG. 2 is a circuit diagram of a second embodiment of the present invention.

81〜Snは第1図(b)に示したセンスアンプである
。ビット線が多分割されているダイナミツクRAMで2
つのメモリセルアレイにはさまれたセンスアンプアレイ
において、互いに接続されたPチャネルトランジスタ側
の端子と互いに接続されたNチャネルトランジスタ側の
端子にはそれぞれ複数のPチャネルドライバーP1〜P
kとNチャネルドライバーN1〜N lkcが接続され
ている。
81 to Sn are sense amplifiers shown in FIG. 1(b). 2 in dynamic RAM where the bit line is multi-divided.
In a sense amplifier array sandwiched between two memory cell arrays, a plurality of P-channel drivers P1 to P are connected to mutually connected terminals on the P-channel transistor side and terminals on the mutually connected N-channel transistor side, respectively.
k and N channel drivers N1 to Nlkc are connected.

複数の電源配線及びGND配線は複数のセルアレイ上を
ビット線に沿った方向に通過しており、これらの配線が
それぞれPチャネルドライバーP1〜P k、Nチャネ
ルドライバーN1〜N kと接続されている。
A plurality of power supply wirings and GND wirings pass over a plurality of cell arrays in a direction along the bit lines, and these wirings are connected to P channel drivers P1 to Pk and N channel drivers N1 to Nk, respectively. .

[発明の効果] 以上説明したように本発明は、電源及びG N Dとセ
ンスアンプの間の配線の全部または一部をアレイ上にt
2にすることによってチップサイズを大きくすることな
く各センスアンプ間のセンス速度の差か減少し、全ての
センスアンプについてセンス動作の最適設計が可能にな
る。
[Effects of the Invention] As explained above, the present invention allows all or part of the wiring between the power supply, GND and sense amplifier to be placed on the array.
2 reduces the difference in sensing speed between the sense amplifiers without increasing the chip size, making it possible to optimally design the sense operation for all sense amplifiers.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)は本発明の第1実施例の回路図、第1図(
b)は本発明の実施例で用いたセンスアンプの回路図、
第2図は本発明の第2実施例の回路図、第3図は従来の
IM  DRAMのセンスアンプ及びその周辺の回路図
である。 S1〜Sn・・・・・・・・・・センスアンプ、P1〜
P 1(・・・・・・・PチャネルドライバーN1〜N
 R・・・・・・・NチャネルドライバーL]〜L1(
。 M1〜Mk・・・・・ドライバー配線。
FIG. 1(a) is a circuit diagram of the first embodiment of the present invention, FIG.
b) is a circuit diagram of a sense amplifier used in an embodiment of the present invention;
FIG. 2 is a circuit diagram of a second embodiment of the present invention, and FIG. 3 is a circuit diagram of a sense amplifier and its surroundings of a conventional IM DRAM. S1~Sn......Sense amplifier, P1~
P 1 (...P channel driver N1~N
R...N channel driver L]~L1(
. M1~Mk...Driver wiring.

Claims (1)

【特許請求の範囲】[Claims] 複数グループに分けられたメモリセルと、該メモリセル
の複数グループのそれぞれに接続可能な複数のセンスア
ンプと、該複数のセンスアンプに電流を供給する共通ド
ライブ信号線と、を含む半導体メモリにおいて、上記共
通ドライブ信号線に複数の駆動トランジスタを並列に接
続し、該駆動トランジスタを電源配線に接続したことを
特徴とする半導体メモリ。
A semiconductor memory including memory cells divided into a plurality of groups, a plurality of sense amplifiers connectable to each of the plurality of groups of memory cells, and a common drive signal line that supplies current to the plurality of sense amplifiers, A semiconductor memory characterized in that a plurality of drive transistors are connected in parallel to the common drive signal line, and the drive transistors are connected to a power supply wiring.
JP63331708A 1988-12-27 1988-12-27 Semiconductor memory Expired - Fee Related JPH0756885B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63331708A JPH0756885B2 (en) 1988-12-27 1988-12-27 Semiconductor memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63331708A JPH0756885B2 (en) 1988-12-27 1988-12-27 Semiconductor memory

Publications (2)

Publication Number Publication Date
JPH02177360A true JPH02177360A (en) 1990-07-10
JPH0756885B2 JPH0756885B2 (en) 1995-06-14

Family

ID=18246700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63331708A Expired - Fee Related JPH0756885B2 (en) 1988-12-27 1988-12-27 Semiconductor memory

Country Status (1)

Country Link
JP (1) JPH0756885B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04195896A (en) * 1990-11-27 1992-07-15 Mitsubishi Electric Corp semiconductor storage device
US5321646A (en) * 1991-04-09 1994-06-14 Mitsubishi Denki Kabushiki Kaisha Layout of a semiconductor memory device
JP2012175012A (en) * 2011-02-24 2012-09-10 Hitachi Ltd Semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595490A (en) * 1982-07-01 1984-01-12 Mitsubishi Electric Corp semiconductor memory
JPS62107497A (en) * 1985-11-05 1987-05-18 Hitachi Ltd semiconductor memory

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595490A (en) * 1982-07-01 1984-01-12 Mitsubishi Electric Corp semiconductor memory
JPS62107497A (en) * 1985-11-05 1987-05-18 Hitachi Ltd semiconductor memory

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04195896A (en) * 1990-11-27 1992-07-15 Mitsubishi Electric Corp semiconductor storage device
US5321646A (en) * 1991-04-09 1994-06-14 Mitsubishi Denki Kabushiki Kaisha Layout of a semiconductor memory device
JP2012175012A (en) * 2011-02-24 2012-09-10 Hitachi Ltd Semiconductor device

Also Published As

Publication number Publication date
JPH0756885B2 (en) 1995-06-14

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