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JPH0217713B2 - - Google Patents

Info

Publication number
JPH0217713B2
JPH0217713B2 JP57233899A JP23389982A JPH0217713B2 JP H0217713 B2 JPH0217713 B2 JP H0217713B2 JP 57233899 A JP57233899 A JP 57233899A JP 23389982 A JP23389982 A JP 23389982A JP H0217713 B2 JPH0217713 B2 JP H0217713B2
Authority
JP
Japan
Prior art keywords
cylinder
hole
pair
partition plate
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57233899A
Other languages
Japanese (ja)
Other versions
JPS59119075A (en
Inventor
Minoru Murakami
Yasuharu Kamioka
Tooru Shinagawa
Yoichi Urakawa
Masayoshi Wake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Sanso Ltd
Original Assignee
Toyo Sanso Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Sanso Ltd filed Critical Toyo Sanso Ltd
Priority to JP23389982A priority Critical patent/JPS59119075A/en
Publication of JPS59119075A publication Critical patent/JPS59119075A/en
Publication of JPH0217713B2 publication Critical patent/JPH0217713B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、超電導電磁石等の低温装置へ低温流
体を圧送する低温流体ポンプに関するものであつ
て、ピストンロツドを油圧シリンダーにより駆動
させるベローズ型の低温流体ポンプに関しピスト
ンロツドをゆつくりと上下動させることによりベ
ローズの耐久時間を著しく長くし、オイルシリン
ダーに一定圧力を加えることによりポンプからの
流体の吐出を一定にし、しかもピストンロツドの
上死点、下死点での上下動切替えを瞬間的に行
い、ポンプからの流体の吐出の脈動を極めて小さ
くし、かつ又、シリンダー内へのオイルの送り込
み量を加減してピストンロツドの上下動速度並び
に上下範囲を制御できるようにして低温流体の吐
出流量を容易に調節することができ、さらに吸入
吐出弁をポンプ内部に組み込むことによりその形
状を軽量小型化した液体ヘリウム等低温流体ポン
プ及びその作動方法に関する発明である。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a low-temperature fluid pump that pumps low-temperature fluid to a low-temperature device such as a superconducting electromagnet. For fluid pumps, by slowly moving the piston rod up and down, the durability of the bellows is significantly extended, and by applying a constant pressure to the oil cylinder, the fluid discharge from the pump is constant, and the piston rod's top dead center and bottom dead center are fixed. Instantly switches the vertical movement at a point, making the pulsation of fluid discharge from the pump extremely small, and also controls the vertical movement speed and vertical range of the piston rod by adjusting the amount of oil sent into the cylinder. This invention relates to a low-temperature fluid pump such as liquid helium, in which the discharge flow rate of low-temperature fluid can be easily adjusted by incorporating a suction and discharge valve inside the pump, and the pump is lightweight and compact, and a method of operating the same. .

(従来の技術) 従来低温流体ポンプとしては、低温シールを用
いたピストンポンプが有るが、これはその摺動部
に摩擦による大きな発熱が生じ、蒸発潜熱の小さ
い低温流体はこの発熱により非常にロスの多いポ
ンプとなり、低温流体に対するポンプとしては適
していない。
(Prior art) Conventional low-temperature fluid pumps include piston pumps that use low-temperature seals, but this generates a large amount of heat due to friction in its sliding parts, and low-temperature fluids with low latent heat of vaporization suffer significant losses due to this heat generation. This results in a pump with a large amount of heat, making it unsuitable as a pump for low-temperature fluids.

又これを解決するためにベローズを用いた往復
動ポンプが有るが、吸入吐出弁がポンプ外部に有
り形状が一体化しておらず軽量小型化に不向きで
ある。
In order to solve this problem, there is a reciprocating pump using bellows, but the suction and discharge valves are located outside the pump and the shape is not integrated, making it unsuitable for miniaturization.

さらに往復動ポンプをクランク等を用いた電動
機による駆動により作動させるとその上下動速度
が時間に対し正弦波状となり、流体の吐出流量が
一定にならず大きな脈動を生じる。
Further, when a reciprocating pump is operated by driving an electric motor using a crank or the like, its vertical movement speed becomes sinusoidal with respect to time, and the discharge flow rate of the fluid is not constant and large pulsations occur.

このように従来の技術によるポンプを低温流体
ポンプに用いようとすると発熱が生じたり、非軽
量小型化ができず、しかも吐出流量に脈動を生じ
ると言う問題が有つた。
As described above, when a conventional pump is used as a low-temperature fluid pump, there are problems in that it generates heat, cannot be made lightweight and compact, and also causes pulsations in the discharge flow rate.

(発明が解決しようとする問題点) 本願は従来の流体ポンプでは蒸発潜熱の小さい
低温流体が発熱により蒸発してロスの多いポンプ
となると言う問題点、軽量小型化が出来ないとい
う問題点、吐出流量の脈動と言う問題点を解決し
ようとする発明である。
(Problems to be Solved by the Invention) The present application addresses the problems that in conventional fluid pumps, low-temperature fluids with low latent heat of vaporization evaporate due to heat generation, resulting in pumps with large losses; This invention attempts to solve the problem of flow pulsation.

(問題点を解決する手段) この発明は上記した問題点を解決するための手
段として、固定筒内に上下摺動筒を局所的に介装
したスライダーを介して上下動可能に内装し、上
下摺動筒を上下に二分する中仕切板を上下摺動筒
の胴部上下方向に形成した長孔を通して固定筒に
固定し、上下摺動筒の上部と下部に、孔を有する
弁押え筒と、この孔に連通する流通孔を具備した
一対の通気筒を相対して固定するとともに、上下
摺動筒の上部及び下部と中仕切板の間を一対の蛇
腹筒で気密に接続して中仕切板の上下に該中仕切
板と前記上下摺動筒の通気筒及び蛇腹筒に囲まれ
た容積可変の一対のポンプ室を設け、前記一対の
通気筒の各々には対応するポンプ室の相対的な減
圧によつて開く常閉の吸入弁を設け、前記中仕切
板の内部には低温流体を外部に排出する送り出し
孔を設けるとともに、その左右両側に相対するポ
ンプ室から前記送り出し孔に連通する一対の吐出
孔を設け、これら一対の吐出孔には対応するポン
プ室の相対的な昇圧によつて開く常閉の吐出弁を
設け、さらに、上下摺動筒の上部に油圧シリンダ
のピストンに連なるロツドに接続して成る流体ヘ
リウム等低温流体ポンプである。
(Means for Solving the Problems) The present invention, as a means for solving the above-mentioned problems, includes a vertically movable vertically movable internal cylinder via a slider in which a vertically sliding cylinder is locally interposed within a fixed cylinder. A partition plate that divides the sliding tube into upper and lower halves is fixed to the fixed tube through a long hole formed in the vertical direction of the body of the upper and lower sliding tubes, and a valve holding tube with holes is installed at the upper and lower portions of the upper and lower sliding tubes. A pair of ventilation cylinders equipped with a communication hole communicating with this hole are fixed facing each other, and a pair of bellows cylinders are used to airtightly connect the upper and lower parts of the vertical sliding cylinders and the middle partition plate. A pair of pump chambers with variable volume are provided above and below, surrounded by the partition plate, a ventilation tube of the vertical sliding tube, and a bellows tube, and each of the pair of ventilation tubes has a relative depressurization of the corresponding pump chamber. A normally-closed suction valve is provided which opens with Discharge holes are provided, and each pair of discharge holes is provided with a normally closed discharge valve that opens when the relative pressure of the corresponding pump chamber is increased.Furthermore, a rod connected to the piston of the hydraulic cylinder is provided at the top of the vertical sliding tube. A cryogenic fluid pump such as helium is connected to the fluid helium.

また、固定筒内に上下摺動筒を局所的に介装し
たスライダーを介して上下動可能に内装し、上下
摺動筒を上下に二分する中仕切板を上下摺動筒の
胴部上下方向に形成した長孔を通して固定筒に固
定し、上下摺動筒の上部と下部に、孔を有する弁
押え筒と、この孔に連通する流通孔を具備した一
対の通気筒を相対して固定するとともに、上下摺
動筒の上部及び下部と中仕切板との間を一対の蛇
腹筒で気密に接続して中仕切板の上下に該中仕切
板と前記上下摺動筒の通気筒及び蛇腹筒に囲まれ
た容積可変の一対のポンプ室を設け、前記一対の
通気筒の各々には対応するポンプ室の相対的な減
圧によつて開く常閉の吸入弁を設け、前記中仕切
板の内部には低温流体を外部に排出する送り出し
孔を設けるとともに、その左右両側に相対するポ
ンプ室から前記送り出し孔に連通する一対の吐出
孔を設け、これら一対の吐出孔には対応するポン
プ室の相対的な昇圧によつて開く常閉の吐出弁を
設けた低温流体ポンプを用い、この低温流体ポン
プの上下摺動筒を油圧シリンダのピストンロツド
で上下動させ、低温流体ポンプ制御装置の信号に
基づいて作動する切替弁を介してエアーを一対の
エアーオイルコンバーターに選択的に送り、エア
ーオイルコンバーターの作動オイルで前記油圧シ
リンダを作動させるとともに、油圧シリンダの作
動距離を検出する差動トランスの信号により低温
流体ポンプ制御装置を介して切替弁を切替制御す
ることができるようにしたものである。
In addition, the vertical sliding tube is internally movable up and down via a slider that is locally interposed in the fixed tube, and a partition plate that divides the vertical sliding tube into upper and lower halves is installed in the vertical direction of the body of the upper and lower sliding tube. A valve holding cylinder with a hole and a pair of ventilation cylinders each having a communication hole communicating with the hole are fixed to the upper and lower parts of the vertical sliding cylinder facing each other. At the same time, the upper and lower parts of the vertical sliding tube and the middle partition plate are airtightly connected by a pair of bellows tubes, and the ventilation tube and bellows tube between the middle partition plate and the vertical sliding tube are connected above and below the middle partition plate. A pair of pump chambers with a variable volume surrounded by is provided with a delivery hole for discharging the low-temperature fluid to the outside, and is provided with a pair of discharge holes that communicate with the delivery hole from opposing pump chambers on both left and right sides of the A cryogenic fluid pump equipped with a normally closed discharge valve that opens when the pressure is increased is used, and the vertical sliding cylinder of this cryogenic fluid pump is moved up and down by a piston rod of a hydraulic cylinder, based on a signal from a cryogenic fluid pump control device. Air is selectively sent to a pair of air-oil converters through actuated switching valves, and the hydraulic cylinders are actuated by the working oil of the air-oil converters, and the temperature is lowered by a signal from a differential transformer that detects the working distance of the hydraulic cylinders. The switching valve can be switched and controlled via a fluid pump control device.

(作用) 油圧シリンダーのピストンの上下動により作動
する差動トランスを設け、差動トランスからの信
号により低温流体ポンプ制御装置が切り替え弁を
制御して切り替えエアーをオイルコンバーターに
送りロツドが下がると上部の蛇腹筒が縮むため蛇
腹筒の低温流体の圧力で上部の吸入弁が閉じ中仕
切板の右側の吐出弁が上部蛇腹筒内の低温流体の
圧力で開くことにより吐出工程になり、上部蛇腹
筒内の低温流体は右側の吐出孔から連通孔、送り
出し孔を通り必要箇所に送り出される。
(Function) A differential transformer is provided that is activated by the vertical movement of the piston of the hydraulic cylinder, and a signal from the differential transformer causes the cryogenic fluid pump control device to control the switching valve and send switching air to the oil converter. When the rod is lowered, the upper As the bellows tube contracts, the upper suction valve closes due to the pressure of the low temperature fluid in the bellows tube, and the discharge valve on the right side of the partition plate opens due to the pressure of the low temperature fluid in the upper bellows tube, resulting in the discharge process. The low-temperature fluid inside is sent out from the discharge hole on the right side to the required location through the communication hole and the delivery hole.

一方、下部の吸入弁は下部の吸入室の低温流体
により上方に圧力が掛かるので開き、中仕切り板
の左側の吐出弁は蛇腹筒が伸び蛇腹筒内が減圧に
なり、スプリングにより閉じ、吸入工程になり低
温流体は下部の吸入室から孔、還状凹所及び流通
孔を通り下部蛇腹筒内に吸入される。
On the other hand, the lower suction valve opens because pressure is applied upward by the low-temperature fluid in the lower suction chamber, and the discharge valve on the left side of the partition plate is closed by the spring as the bellows tube extends and the inside of the bellows tube becomes depressurized. The low-temperature fluid is sucked into the lower bellows cylinder from the lower suction chamber through the hole, the circular recess and the circulation hole.

ロツドが上がると上部の吸入室の低温流体によ
り下方に圧力が掛かるので上部の吸入弁は開き、
中仕切り板の右側の吐出弁は蛇腹筒が伸び蛇腹筒
内が減圧になるのでスプリングにより閉じること
により吸入工程になり低温流体は上部の吸入室か
ら上部蛇腹筒内に吸入される。
When the rod is raised, pressure is applied downward by the low temperature fluid in the upper suction chamber, so the upper suction valve opens.
The discharge valve on the right side of the partition plate is closed by a spring as the bellows tube extends and the pressure inside the bellows tube is reduced, resulting in the suction process, and the low-temperature fluid is sucked into the upper bellows tube from the upper suction chamber.

一方下部の蛇腹筒が縮むので蛇腹筒内の低温流
体の圧力で下部の吸入弁は閉じ左側の吐出弁が下
部蛇腹筒内の低温流体の圧力で開くことにより吐
出工程になり下部の蛇腹筒内の低温流体は左側の
吐出孔から、連通孔、送り出し孔を通り必要箇所
に送り出される。
On the other hand, as the lower bellows tube contracts, the lower bellows suction valve closes due to the pressure of the low temperature fluid inside the bellows tube, and the discharge valve on the left side opens due to the pressure of the low temperature fluid inside the lower bellows tube, resulting in a discharge process. The low-temperature fluid is sent out from the discharge hole on the left side to the required location through the communication hole and the delivery hole.

(実施例) 低温流体ポンプ1に油圧シリンダー2のロツド
3を連結し、油圧シリンダー2内の中間にロツド
3の上端に取りつけたピストン4を内挿すると共
に、油圧シリンダー2の上下端にオイル調整弁
5,5′を介してオイルパイプ6,6′を連結開口
し、各々のオイルパイプ6,6′の他端をエアー
オイルコンバーター7,7′の下端に連結し、エ
アーオイルコンバーター7,7′の上端にエアー
パイプ8,8′を連結開口すると共に、エアーパ
イプ8,8′の他端を切替弁9に連結する。
(Example) A rod 3 of a hydraulic cylinder 2 is connected to a low temperature fluid pump 1, a piston 4 attached to the upper end of the rod 3 is inserted in the middle of the hydraulic cylinder 2, and oil adjustment is carried out at the upper and lower ends of the hydraulic cylinder 2. The oil pipes 6, 6' are connected and opened through the valves 5, 5', and the other end of each oil pipe 6, 6' is connected to the lower end of the air oil converter 7, 7'. Air pipes 8, 8' are connected and opened at the upper ends of the air pipes 8, 8', and the other ends of the air pipes 8, 8' are connected to a switching valve 9.

切替弁9は低温流体ポンプ制御装置10に電気
的に結線し、油圧シリンダー2のピストン4の上
下動により作動する差動トランス11を設け、差
動トランス11からの信号により低温流体ポンプ
制御装置10が切替弁9を制御して切り換えエア
ーをエアーオイルコンバーター7或は7′に送り、
オイルを油圧シリンダー2のピストン4の上下い
ずれかに送ることによりロツド3を上下動するこ
とができ、ロツド3の上下動により低温流体ポン
プ1を作動させ液体ヘリウム等の低温流体を熱交
換器12を通し目的とする装置に供給できるよう
にしたものである。
The switching valve 9 is electrically connected to the low temperature fluid pump control device 10 and is provided with a differential transformer 11 that is activated by the vertical movement of the piston 4 of the hydraulic cylinder 2. controls the switching valve 9 to send switching air to the air-oil converter 7 or 7',
By sending oil to either the top or bottom of the piston 4 of the hydraulic cylinder 2, the rod 3 can be moved up and down, and the vertical movement of the rod 3 activates the low temperature fluid pump 1 to pump low temperature fluid such as liquid helium to the heat exchanger 12. It is designed so that it can be supplied to the target equipment through.

次に低温流体ポンプ1を説明すれば、固定筒2
1内に上下摺動筒22を上下摺動自在に内挿し、
上下摺動筒22の中間に水平にして中仕切板23
を設け、中仕切板23を固定筒21にボルト2
1′で固定する。
Next, to explain the cryogenic fluid pump 1, the fixed cylinder 2
1, a vertically sliding cylinder 22 is vertically slidably inserted therein,
A middle partition plate 23 is installed horizontally between the upper and lower sliding tubes 22.
, and attach the inner partition plate 23 to the fixed cylinder 21 with bolts 2.
Fix it at 1'.

但し、固定筒21と中仕切板23と固定するボ
ルト21′の箇所において上下摺動筒22に長孔
22′を穿つて上下摺動筒22が上下動する際に
ボルト21′が邪魔にならないようにする。
However, a long hole 22' is bored in the vertical sliding cylinder 22 at the location of the bolt 21' that fixes the fixed cylinder 21 and the partition plate 23, so that the bolt 21' does not get in the way when the vertical sliding cylinder 22 moves up and down. Do it like this.

中仕切板23の一箇所に横方向に送り出し孔2
4を穿ち、送り出し孔24の左右に互いに反対方
向より中央に向けて吐出弁25の作動用凹所26
を形成し、作動用凹所26と送り出し孔24と連
通孔26′で連通しておく。
A feed hole 2 is provided in the horizontal direction at one location of the partition plate 23.
4, and a recess 26 for operating the discharge valve 25 is formed on the left and right sides of the delivery hole 24 from opposite directions toward the center.
The operating recess 26, the delivery hole 24, and the communication hole 26' communicate with each other.

作動用凹所26内には吐出弁25をスプリング
27を介して内装し、作動用凹所26の開口部側
より中央に吐出孔28′を穿つた弁押え板28を
取付ける。
A discharge valve 25 is placed inside the operating recess 26 via a spring 27, and a valve holding plate 28 having a discharge hole 28' bored in the center from the opening side of the operating recess 26 is attached.

上下摺動筒22の上下端に取付用支持板29を
固定し、取付用支持板29の内側に金属製の網3
0を重合し、更に、その内側に中央に孔31を穿
つた弁押え筒32を重合し、弁押え筒32の孔3
1の内側に孔31を密閉できる大きさの吸入弁3
3を重合すると共に弁押え筒32の外側に隔壁3
5aを有する通気筒35を嵌合し、隔壁35aの
中央には吸入弁33が上下動できる凹所34を設
け、吸入弁33と凹所34間にスプリング36を
内装して吸入弁33を孔31に常は閉じているよ
うに重合し、通気筒35、弁押え筒32、網30
及び取付用支持板29を端部でボルト37で一体
に固定し、通気筒35の外周内面に蛇腹筒38の
一端を気密に取り付け、蛇腹筒38の他端を中仕
切板23に気密に取り付け通気筒35と蛇腹筒3
8及び中仕切板23とで蛇腹筒38によつて容積
を変化することができるポンプ室48形成するも
のである。
A mounting support plate 29 is fixed to the upper and lower ends of the vertical sliding tube 22, and a metal mesh 3 is placed inside the mounting support plate 29.
0, and then polymerize the valve holder cylinder 32 with a hole 31 in the center inside thereof, and then form the hole 3 of the valve holder cylinder 32.
A suction valve 3 large enough to seal the hole 31 inside the suction valve 1.
3 is polymerized and a partition wall 3 is formed on the outside of the valve retainer cylinder 32.
5a, a recess 34 is provided in the center of the partition wall 35a in which the suction valve 33 can move up and down, and a spring 36 is installed between the suction valve 33 and the recess 34, so that the suction valve 33 is inserted into the hole. 31 are polymerized so as to be always closed, and a ventilation cylinder 35, a valve holding cylinder 32, and a mesh 30 are formed.
And the mounting support plate 29 is fixed together with bolts 37 at the ends, one end of the bellows tube 38 is airtightly attached to the outer peripheral inner surface of the ventilation tube 35, and the other end of the bellows tube 38 is airtightly attached to the partition plate 23. Ventilation cylinder 35 and bellows cylinder 3
8 and the partition plate 23 form a pump chamber 48 whose volume can be changed by the bellows tube 38.

39は取付用支持板29に設けた流通孔、40
は弁押え筒32の中央に大きく形成した吸入室、
41は弁押え筒32の内面でかつ孔31の外周に
形成した環状凹所、42は環状凹所41と通気筒
35の内側とを連通する流通孔である。
39 is a communication hole provided in the mounting support plate 29; 40
is a suction chamber formed largely in the center of the valve retainer cylinder 32;
Reference numeral 41 designates an annular recess formed on the inner surface of the valve holding cylinder 32 and the outer periphery of the hole 31, and reference numeral 42 represents a communication hole that communicates the annular recess 41 with the inside of the communication cylinder 35.

43は支持板29と上下摺動筒22を取り付け
るボルト、44は摺動筒22が上下動するのに邪
魔にならないように固定筒21に穿つた長孔、4
5は摺動筒22がすき間を介して内挿した固定筒
21に対しガタつくことなく一定の間隔を保つて
支持するためのスライダーで固定筒21に設けた
孔46に嵌合し外側より押え部材47で着脱自在
に押さえているものである。
43 is a bolt for attaching the support plate 29 and the vertical sliding tube 22; 44 is a long hole drilled in the fixed tube 21 so as not to interfere with the vertical movement of the sliding tube 22;
Reference numeral 5 denotes a slider for supporting the fixed tube 21 inserted through the gap between the sliding tube 22 and the fixed tube 21 without wobbling, and is fitted into a hole 46 formed in the fixed tube 21 and is pressed from the outside. It is held down by a member 47 in a detachable manner.

このように形成した低温流体ポンプの固定筒2
1を低温流体タンク(図示せず)内に内挿し気密
に固定し、上下摺動筒22の上部の取付用支持板
29を油圧シリンダー2のロツド3の下端に適宜
に連結し、かつ低温流体が低温流体タンク外に漏
れないようにしておくものである。
Fixed cylinder 2 of the cryogenic fluid pump formed in this way
1 is inserted into a low-temperature fluid tank (not shown) and fixed airtightly, the mounting support plate 29 on the upper part of the vertical sliding tube 22 is appropriately connected to the lower end of the rod 3 of the hydraulic cylinder 2, and the low-temperature fluid This prevents water from leaking out of the cryogenic fluid tank.

前記構成よりしてロツド3の上下動により上下
摺動筒22を上下動すると次の作用を行う。
With the above structure, when the vertical sliding cylinder 22 is moved up and down by the vertical movement of the rod 3, the following action is performed.

油圧シリンダー2のピストン4の上下動により
作動する差動トランス11からの信号により低温
流体ポンプ制御装置10が切替弁9を制御して切
り替え、エアーをエアーオイルコンバーター7,
7′のいずれかに送る。
The cryogenic fluid pump control device 10 controls and switches the switching valve 9 based on a signal from the differential transformer 11 activated by the vertical movement of the piston 4 of the hydraulic cylinder 2, and transfers the air to the air-oil converter 7,
7'.

仮にロツド3が下がると上部の蛇腹筒38が縮
むため上部の蛇腹筒38の低温流体の圧力で上部
の吸入弁33が閉じ中仕切板23の右側の吐出弁
25が上部の蛇腹筒38内の低温流体の圧力で開
くことにより吐出工程になり上部の蛇腹筒38内
の低温流体は右側の吐出孔28′から連通孔2
6′、送り出し孔24を通り必要箇所に送り出さ
れる。一方、下部の吸入弁33は下部の吸入室4
0の低温流体により上方に圧力が掛かるので開
き、中仕切板23の左側の吐出弁25は下部の蛇
腹筒38が伸び下部の蛇腹筒38等で形成する室
48内が減圧になるのでスプリング27により閉
じ吸入工程になり低温流体は下部の吸入室40か
ら孔31、環状凹所41及び流通孔42を通り下
部の蛇腹筒38内に吸入させる。ロツド3が上が
ると上部の吸入室40の低温流体により下方に圧
力が掛かるので上部の吸入弁33は開き、中仕切
板23の右側の吐出弁25は上部の蛇腹筒38が
伸び上部の蛇腹筒38等で形成する室48内が減
圧になるのでスプリング27により閉じることに
より吸入工程になり低温流体は上部の吸入室40
から孔31、環状凹所41及び流通孔42を通り
上部の蛇腹筒38内に吸入される。
If the rod 3 is lowered, the upper bellows tube 38 will contract, so the pressure of the low temperature fluid in the upper bellows tube 38 will close the upper suction valve 33 and the discharge valve 25 on the right side of the middle partition plate 23 will close. The pressure of the low-temperature fluid causes the discharge process, and the low-temperature fluid in the bellows tube 38 at the top flows from the discharge hole 28' on the right side to the communication hole 2.
6', and is sent out to the required location through the delivery hole 24. On the other hand, the lower suction valve 33 is connected to the lower suction chamber 4.
The discharge valve 25 on the left side of the partition plate 23 opens because pressure is applied upward by the low-temperature fluid at 0.0, and the lower bellows tube 38 extends and the chamber 48 formed by the lower bellows tube 38 etc. becomes depressurized, so the discharge valve 25 opens with the spring 27. As a result, the suction process is closed and the low temperature fluid is sucked from the lower suction chamber 40 through the hole 31, the annular recess 41 and the communication hole 42 into the bellows tube 38 at the lower part. When the rod 3 is raised, pressure is applied downward by the low temperature fluid in the upper suction chamber 40, so the upper suction valve 33 opens, and the discharge valve 25 on the right side of the partition plate 23 has an upper bellows tube 38 extended. Since the pressure inside the chamber 48 formed by 38 and the like is reduced, the spring 27 closes the chamber 48 to initiate the suction process, and the low-temperature fluid flows into the upper suction chamber 40.
It passes through the hole 31, the annular recess 41, and the communication hole 42, and is sucked into the bellows tube 38 at the top.

一方下部の蛇腹筒38は縮むので下部の蛇腹筒
38内の低温流体の圧力で下部の吸入弁33は閉
じ、左側の吐出弁25が下部の蛇腹筒38内の低
温流体の圧力で開くことにより吐出工程になり下
部の蛇腹筒38内の低温流体は左側の吐出孔2
8′から連通孔26′、送り出し孔24を通り必要
箇所に送り出される。
On the other hand, since the lower bellows tube 38 contracts, the lower suction valve 33 closes due to the pressure of the low temperature fluid in the lower bellows tube 38, and the left discharge valve 25 opens due to the pressure of the low temperature fluid in the lower bellows tube 38. During the discharge process, the low-temperature fluid in the bellows tube 38 at the bottom flows through the discharge hole 2 on the left side.
8', passes through the communication hole 26' and the delivery hole 24, and is delivered to the required location.

(効果) 本発明は a 吐出弁と吸入弁を内蔵したことにより小型化
でき非常にシンプルにすることができた。
(Effects) The present invention can be miniaturized and extremely simple by incorporating a discharge valve and a suction valve.

b エアーをオイルに変換してロツドを作動する
ので、ポンプの往復運動の速度を比較的遅くし
て使用することが出来るので蛇腹筒の耐久性を
非常に向上することができ経済的である。
(b) Since the rod is operated by converting air into oil, the pump can be used at a relatively low reciprocating speed, which greatly improves the durability of the bellows cylinder and is economical.

c 取り替えに当たつては、ボルトをはずすこと
により簡単に外部より上下摺動筒を固定筒より
はずして下部に抜き取ることができるので補修
点検が簡単に行える。
c When replacing, by removing the bolts, the vertical sliding tube can be easily removed from the fixed tube from the outside and pulled out to the bottom, making repairs and inspections easy.

d ベローズ式ポンプをスライダーの箇所のみ摺
動するようにし摺動部が極めて少ない構造とし
たことにより極めて発熱の少ない低温流体ポン
プを構成し蒸発潜熱の小さい低温流体の蒸発を
無くし効率の良い低温流体ポンプとすることが
できた。
d The bellows-type pump has a structure in which only the slider part slides, and there are very few sliding parts, resulting in a low-temperature fluid pump that generates extremely little heat, eliminating the evaporation of low-temperature fluids with low latent heat of vaporization, resulting in high-efficiency low-temperature fluids. It could be a pump.

e ポンプの往復運動を油圧シリンダーで行うこ
とにより往復運動速度が一定となり流体の吐出
時の脈動が往復運動の上死点下死点のみとな
り、しかも上死点下死点も瞬時に通過するため
その脈動も極めて小さくなつた。
e By performing the reciprocating motion of the pump with a hydraulic cylinder, the speed of the reciprocating motion is constant, and the pulsation when discharging the fluid is only at the top dead center and bottom dead center of the reciprocating motion, and the top dead center and bottom dead center are also passed instantly. Its pulsation also became extremely small.

f ポンプの駆動力は油圧によつて決まるため油
圧の圧力値を決めると吐出圧も決まることとな
り運転が楽である。
f The driving force of the pump is determined by the hydraulic pressure, so determining the hydraulic pressure value also determines the discharge pressure, making operation easier.

g 吐出量は油圧シリンダーの往復動ストローク
と往復動速度によつて決めることができ、スト
ロークは差動トランスからの信号を低温流体ポ
ンプ制御装置へフイードバツクすれば直ちに変
えることができ、速度は油圧シリンダーへの圧
力を変えることにより直ちに変えることができ
る。
g The discharge amount can be determined by the reciprocating stroke and reciprocating speed of the hydraulic cylinder, and the stroke can be changed immediately by feeding back the signal from the differential transformer to the cryogenic fluid pump controller, and the speed can be determined by the reciprocating stroke and reciprocating speed of the hydraulic cylinder. can be changed immediately by changing the pressure on the

【図面の簡単な説明】[Brief explanation of drawings]

第1図は低温流体ポンプコントロール図、第2
図は低温流体ポンプの断面図、第3図は低温流体
ポンプの特性図である。 1……低温流体ポンプ、2……油圧シリンダ、
3……ロツド、4……ピストン、7,7′……エ
アーオイルコンバーター、9……切替弁、10…
…低温流体ポンプ制御装置、11……差動トラン
ス、21……固定筒、22……上下摺動筒、2
2′……長孔、23……中仕切板、24……送り
出し孔、25……吐出弁、28′……吐出孔、3
1……孔、32……弁押え筒、33……吸入弁、
35……通気筒、38……蛇腹筒、42……流通
孔、45……スライダー、48……ポンプ室。
Figure 1 is the cryogenic fluid pump control diagram, Figure 2
The figure is a sectional view of the cryogenic fluid pump, and FIG. 3 is a characteristic diagram of the cryogenic fluid pump. 1...Cryogenic fluid pump, 2...Hydraulic cylinder,
3...Rod, 4...Piston, 7,7'...Air-oil converter, 9...Switching valve, 10...
...Cryogenic fluid pump control device, 11...Differential transformer, 21...Fixed tube, 22...Vertical sliding tube, 2
2'...long hole, 23...inner partition plate, 24...discharge hole, 25...discharge valve, 28'...discharge hole, 3
1...hole, 32...valve holder, 33...suction valve,
35... Ventilation tube, 38... Bellows tube, 42... Distribution hole, 45... Slider, 48... Pump chamber.

Claims (1)

【特許請求の範囲】 1 固定筒内に上下摺動筒を局所的に介装したス
ライダーを介して上下動可能に内装し、上下摺動
筒を上下に二分する中仕切板を上下摺動筒の胴部
上下方向に形成した長孔を通して固定筒に固定
し、上下摺動筒の上部と下部に、孔を有する弁押
え筒と、この孔に連通する流通孔を具備した一対
の通気筒を相対して固定するとともに上下摺動筒
の上部及び下部と中仕切板の間を一対の蛇腹筒で
気密に接続して中仕切板の上下に該中仕切板と前
記上下摺動筒の通気筒及び蛇腹筒に囲まれた容積
可変の一対のポンプ室を設け、前記一対の通気筒
の各々には対応するポンプ室の相対的な減圧によ
つて開く常閉の吸入弁を設け、 前記中仕切板の内部には低温流体を外部に排出
する送り出し孔を設けるとともにその左右両側に
相対するポンプ室から前記送り出し孔に連通する
一対の吐出孔を設け、これら一対の吐出孔には対
応するポンプ室の相対的な昇圧によつて開く常閉
の吐出弁を設け、さらに、上下摺動筒の上部に油
圧シリンダのピストンに連なるロツドに接続した
ことを特徴とする流体ヘリウム等低温流体ポン
プ。 2 固定筒内に上下摺動筒を局所的に介装したス
ライダーを介して上下動可能に内装し、上下摺動
筒を上下に二分する中仕切板を上下摺動筒の胴部
上下方向に形成した長孔を通して固定筒に固定
し、上下摺動筒の上部と下部に、孔を有する弁押
え筒とこの孔に連通する流通孔を具備した一対の
通気筒を相対して固定するとともに上下摺動筒の
上部及び下部と中仕切板との間を一対の蛇腹筒で
気密に接続して中仕切板の上下に該中仕切板と前
記上下摺動筒の通気筒及び蛇腹筒に囲まれた容積
可変の一対のポンプ室を設け、前記一対の通気筒
の各々には対応するポンプ室の相対的な減圧によ
つて開く常閉の吸入弁を設け、 前記中仕切板の内部には低温流体を外部に排出
する送り出し孔を設けるとともにその左右両側に
相対するポンプ室から前記送り出し孔に連通する
一対の吐出孔を設け、これら一対の吐出孔には対
応するポンプ室の相対的な昇圧によつて開く常閉
の吐出弁を設けた低温流体ポンプを用い、この低
温流体ポンプの上下摺動筒を油圧シリンダのピス
トンロツドで上下動させ、低温流体ポンプ制御装
置の信号に基づいて作動する切替弁を介してエア
ーを一対のエアーオイルコンバーターに選択的に
送り、エアーオイルコンバータの作動オイルで前
記油圧シリンダを作動させるとともに、 油圧シリンダの作動距離を検出する差動トラン
スの信号により低温流体ポンプ制御装置を介して
切替弁を切替制御する、 ことを特徴とする液体ヘリウム等低温流体ポンプ
の作動方法。
[Scope of Claims] 1. A vertical sliding cylinder is installed inside a fixed cylinder so that it can move up and down via a slider that is locally interposed, and a partition plate that divides the vertical sliding cylinder into upper and lower halves is attached to the upper and lower sliding cylinder. It is fixed to a fixed cylinder through a long hole formed in the vertical direction of the body of the cylinder, and a pair of ventilation cylinders each having a valve holding cylinder with a hole and a communication hole communicating with this hole are installed at the upper and lower parts of the vertical sliding cylinder. The upper and lower parts of the upper and lower sliding tubes and the middle partition plate are fixed facing each other, and the upper and lower parts of the upper and lower sliding tubes are airtightly connected by a pair of bellows tubes. A pair of pump chambers with variable volume surrounded by cylinders are provided, each of the pair of ventilation tubes is provided with a normally closed suction valve that opens by relative depressurization of the corresponding pump chamber, and the inner partition plate is A delivery hole for discharging the low-temperature fluid to the outside is provided inside, and a pair of delivery holes are provided on both the left and right sides of which the pump chambers facing each other communicate with the delivery hole. 1. A low-temperature fluid pump such as helium, which is equipped with a normally closed discharge valve that opens when pressure is increased, and is further connected to a rod connected to a piston of a hydraulic cylinder at the top of a vertical sliding cylinder. 2 A vertical sliding tube is internally movable up and down via a slider that is locally interposed in a fixed tube, and a partition plate that divides the vertical sliding tube into upper and lower halves is installed in the vertical direction of the body of the upper and lower sliding tube. It is fixed to the fixed cylinder through the formed elongated hole, and a pair of ventilation cylinders each having a valve holding cylinder with a hole and a communication hole communicating with this hole are fixed oppositely to the upper and lower parts of the vertical sliding cylinder. The upper and lower parts of the sliding tube and the middle partition plate are airtightly connected by a pair of bellows tubes, and are surrounded by the middle partition plate and the ventilation tube and bellows tube of the upper and lower sliding tubes above and below the middle partition plate. A pair of pump chambers with a variable volume are provided, each of the pair of ventilation pipes is provided with a normally closed suction valve that opens by relative depressurization of the corresponding pump chamber, and a low temperature is provided inside the partition plate. A delivery hole for discharging the fluid to the outside is provided, and a pair of delivery holes are provided on both left and right sides of the delivery hole that communicate with the delivery hole from opposing pump chambers. A switching valve operates based on a signal from a cryogenic fluid pump control device by using a cryogenic fluid pump equipped with a normally closed discharge valve that opens when the cryogenic fluid pump is opened, and by moving the vertical sliding cylinder of the cryogenic fluid pump up and down with a piston rod of a hydraulic cylinder. The air is selectively sent to a pair of air-oil converters through the air-oil converter, and the hydraulic cylinder is actuated by the working oil of the air-oil converter, and the cryogenic fluid pump control device is controlled by a signal from a differential transformer that detects the working distance of the hydraulic cylinder. A method of operating a low temperature fluid pump such as liquid helium, characterized in that a switching valve is switched and controlled via.
JP23389982A 1982-12-23 1982-12-23 Method for operating low-temperature fluid pump handling liquid helium or the like and low-temperature fluid pump Granted JPS59119075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23389982A JPS59119075A (en) 1982-12-23 1982-12-23 Method for operating low-temperature fluid pump handling liquid helium or the like and low-temperature fluid pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23389982A JPS59119075A (en) 1982-12-23 1982-12-23 Method for operating low-temperature fluid pump handling liquid helium or the like and low-temperature fluid pump

Publications (2)

Publication Number Publication Date
JPS59119075A JPS59119075A (en) 1984-07-10
JPH0217713B2 true JPH0217713B2 (en) 1990-04-23

Family

ID=16962316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23389982A Granted JPS59119075A (en) 1982-12-23 1982-12-23 Method for operating low-temperature fluid pump handling liquid helium or the like and low-temperature fluid pump

Country Status (1)

Country Link
JP (1) JPS59119075A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0440216U (en) * 1990-08-03 1992-04-06

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008095820A (en) * 2006-10-11 2008-04-24 Taiyo Nippon Sanso Corp Check valve and cryogenic fluid pump
US20200003195A1 (en) * 2017-02-03 2020-01-02 Eagle Industry Co., Ltd. Liquid supply system
FR3084991B1 (en) * 2018-08-14 2020-11-06 Cryocapcell HYDRAULICALLY CONTROLLED CRYOGENIZATION DEVICE

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50112803A (en) * 1973-10-19 1975-09-04

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852904U (en) * 1971-10-15 1973-07-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50112803A (en) * 1973-10-19 1975-09-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0440216U (en) * 1990-08-03 1992-04-06

Also Published As

Publication number Publication date
JPS59119075A (en) 1984-07-10

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