JPH02165075A - Stand with tester head - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] Regarding a tester head mounting stand that connects, separates, and holds the tester head of an LSI tester to an electron beam tester, the tester head weighing approximately 1 (10 to 2) (10 kg) can be mounted on an electron beam tester. The LSI tester head mounted on the top of the electron beam tester was connected to the electron beam tester with the aim of connecting the wiring and moving and holding the disconnector using a wheel-like mechanism, and with the aim of easily performing it with light manual force. , Separate and hold the tester head on the stand with which the tester head is mounted, between the stand and the tester head.
A vertical guide table that moves in the ) direction and a vertical holding mechanism that maintains the vertical movement of the tester head are provided, and a rotation mechanism that rotates the tester head and a rotational holding mechanism that maintains the rotation of the tester bed are provided between the vertical guide table and the tester head. establish. A spring is attached between the stand and the spring support plate provided on the upper and lower guide tables and the tester head, and the configuration is such that the spring applies a load to the tester head. Further, a guide roller and a guide plate are provided to prevent rotation of the tester head within a certain range in which the tester head moves in the vertical (Z) direction.

[Industrial application field]

The present invention relates to a tester head mounting stand for connecting, separating, and holding a tester head of an LSI tester to an electron beam tester.

In recent years, for example, in the testing of SI devices, LSI
As devices become more highly integrated, the number of possible failure locations increases, making it extremely difficult to identify them. Therefore, direct observation of the operating state inside the LSI is required to identify the failure location. As LSIs become more highly integrated, the line width of patterns within chips has become minute, and the conventional measurement method of bringing a metal needle into contact with internal wiring has
There is a risk of destroying the SI, making it difficult to use. The electron beam tester does not have the above drawbacks and is suitable for internal diagnosis of highly integrated LSIs.

An electron beam tester irradiates a sample (LSI chip, etc.) placed in a high vacuum with a narrowly focused electron beam at the measurement location while receiving test signals from the LSI tester.
The circuit operation is measured by utilizing the fact that the energy of the secondary electrons detected at this time changes depending on the potential of the wiring. L
The SI tester is composed of a tester head (measuring section) that electrically connects to the sample and a control section that controls test signals and the like to the sample, and the tester head and the control section are connected by a signal cable. The tester head uses pin electronics to measure high-speed signals, and is smaller than the control unit and can be installed in a variety of devices. (For example, an IC handler) For this reason, it is desirable for measurement that the wiring distance between the sample installed in the electron beam tester and the tester head of the LSI tester be short.

The types of LSI testers used differ depending on the user, and therefore the tester heads also come in various sizes and shapes.

The current tester head weighs about 1 (10 to 2) (10K).
There is also a need for a tester head mounting stand with a simple structure that allows for reliable and easy separation of the tester head and wiring connection of the tester head to an electron beam tester.

[Conventional technology]

An electron beam tester usually performs measurements by connecting the tester head of an electron beam tester and an LSI tester.

FIG. 12 shows a sectional view of essential parts of a conventional electron beam tester. In the figure, reference numeral 20 indicates an electron beam column, and 21 indicates a sample mounting table disposed opposite to the electron beam column 20. Reference numeral 2 denotes a tester head, which is connected to the sample mounted on the sample mounting stage 21 so as to be able to supply test signals while maintaining an airtight structure.

A vacuum chamber 22 is connected to a vacuum evacuation device (not shown). It is provided on a plate surface of a table 25 via a vibration isolating unit 24 on a fixed frame 23 . A subchamber 26 is also provided on the plate surface of the table 25. Reference numeral 27 denotes an XY stage which is provided via the lower surface of the table 25 and an O-ring 28 and whose movement in the XY force directions can be controlled. A groove (not shown) in which the O-ring 28 for vacuum sealing is installed is provided on the table 25 side.

The XY stage 27 is composed of an X stage and a Y stage (not shown).

29 is a guide frame fixed to the lower surface of the XY stage 27, and the tester head 2 is driven in the Z direction via linear guides 30 arranged vertically on the side surface of the guide frame by a Z motor (not shown).

During this drive, the sample mounting table 21 moves integrally with the tester head 2, and an O-ring 31 is attached to the contact surface between the cylindrical portion of the sample mounting table 21 and the χY stage 27.
It is provided on the side surface of the through hole 7 to maintain the vacuum inside the vacuum chamber.

The sub-chamber 26 is a place where samples are installed and exchanged, and the purpose of the sub-chamber 26 is to shorten the evacuation time by allowing the samples to be installed and exchanged while maintaining the vacuum in the vacuum chamber '22. That is, a Z motor (not shown) is driven to lower the sample mounting table 21 to a position where the top thereof is hidden below the top surface of the XY stage 27. Next, the XY stage 27 is driven in a horizontal plane to move the sample mounting table 21 directly below the subchamber 26.

Next, the Z motor is driven to raise the sample mounting table 21 into the subchamber 26 and stop it at a predetermined position. At this time, the sample mounting stage 21 is sealed by the O-ring 32 in the subchamber 26, and the vacuum in the vacuum chamber 22 is maintained. Next, the upper lid of the subchamber 26 is opened and the sample placed at the top of the sample mounting table 21 is replaced.

After replacing the sample, by moving it to the measurement position corresponding to the electron beam column 20 by following a completely opposite movement course, the evacuation time before testing can be shortened.

However, according to the conventional device configuration, it is necessary to move the heavy tester head 2 in the XYZ directions, which requires a large amount of power. Also, the tester head 2 is connected to the fixed frame 2.
3, the space necessary for movement of the tester head 2 must be provided within the fixed frame 23, which increases the size of the apparatus. Furthermore, the types of LSI testers used differ depending on the user, and the tester heads also come in various sizes and shapes.

If such various tester heads are built into an electron beam tester as in the past, the electron beam tester itself becomes even larger.

Moreover, even when replacing the LSI tester, there is a drawback that the tester head cannot be easily replaced.

For this reason, the applicant of the present application has proposed a structure of an electron beam tester in which the electron beam column is installed upside down in the electron beam tester and the tester head is installed on the top, as shown in FIG. (Patent Application No. 63-57740).

An electron beam tester in which the electron beam column is installed upside down inside the electron beam tester allows the tester head to be installed and connected in the upper space of the electron beam tester, so it is not limited by the size of the tester head. It is a small and lightweight electron beam tester, and it also allows you to install the tester head.
It is also advantageous to be able to replace it relatively easily.

Furthermore, since LSI testers are very expensive, there is a demand for improvement in their operating rates. Therefore, when the electron beam tester is not in use, there is a desire to separate the tester head from the electron beam tester and use the tester head as an original LSI tester for testing and measurement. Even in response to such a demand, it is advantageous to use a method in which the tester head is installed and connected in the upper space of the electron beam tester because the tester head can be separated relatively easily compared to the electron beam tester.

[Problem that the invention seeks to solve]

However, in this method, when setting or removing a sample from the electron beam tester, and when using the tester as an LSI tester, the tester head is placed on the sample mounting stand of the electron beam tester.
It is necessary to perform the work separately from 1.

The present invention utilizes a method in which the tester head is installed on the top of the electron beam tester and connected and separated from the sample mounting stage. The tester head is moved up and down, rotated, and held in order to reliably and easily connect and disconnect wires to the mounting base, and is a simple device that can easily perform these tasks by hand with light force. The purpose is to provide a stand with a structured tester head.

[Means to solve the problem] 1 to 3 are detailed explanatory diagrams of the present invention.

Figure 1 shows the left side view of the tester head mounting stand.
The tester head 2 is shown in an attitude separated from the electron beam tester 19. FIG. 2 shows a right side view of the tester head mounting stand, showing the attitude in which it is joined to the electron beam tester 19. FIG. 3 shows a front view.

In the figure, reference numeral 1 denotes a stand that holds the tester head 2 by straddling the upper part of the electron beam tester 19. A vertical guide table 3 is provided between a stand 1 and a tester head 2, and a rotation mechanism 5 is provided between the movable side of the vertical guide table 3 and the tester head 2, and the tester head 2 is attached to the stand 1. Spring support plates 1 and 12 provided on the movable table side of the vertical guide table 3
and the spring support plate 13 provided on the tester head 2 and the stand 1.
A spring 7 is installed between the side frames 10 of the.

The side frame 10 is provided with a vertical holding mechanism 4 for holding vertical movement, and the rotation mechanism section 5 is provided with a rotation holding mechanism 6 for holding rotational movement. It consists of a guide roller 8 and a guide plate 9 between a side frame 10 and a tester head 2.

[Effect]

1 to 3 are detailed explanatory diagrams of the present invention.

In the figure, reference numeral 1 denotes a stand that holds the tester head 2 by straddling the upper part of the electron beam tester 19.

When exchanging samples or when used as an LSI tester, the tester head 2 is separated from the electron beam tester 19,
It is better to position the tester head 2 as far away as possible in order to perform the above operation, and for this purpose, it is better to rotate the tester head 2. However, an electrical connection is established between the tester head 2 and the electron beam tester 19 by bringing the performance port 17 installed and wired into the tester head 2 into contact with the probe pin 18 installed on the sample mounting stage 21. In order to ensure and easily connect, positioning is performed using guide pins. This guide pin (not shown) is provided on the sample mounting stage 21, and it fits into the guide hole provided on the performance pod 17.In order to insert and remove the guide pin, the tester head 2 is moved in the vertical (Z) direction. It is necessary to move the guide pin by more than the length h. For this purpose, a vertical guide table 3 is installed on both side frames 10, which are parts of a stand 1 on which the tester head 2 is installed, to allow the tester head 2 to move in the vertical (Z) direction.

In order to rotate the tester head 2, a rotation mechanism 5 is provided between the movable table side of the vertical guide table 3 and the tester head 2. Between the spring support plates 1 and 12 attached to the moving side of the vertical guide table 3 and the stand 1, and between the tester head 2
Attach a spring 7 with a small spring constant between the stand 1 and the
By applying a load to the tester head 2, the tester head 2
The device can be moved up and down and rotated by hand with light force and can be held.

The vertical holding mechanism 4 fixes the tester head 2 so that it cannot move in the vertical (Z) direction, and the rotation holding mechanism 6 fixes the tester head 2 so that it cannot rotate.

Even when the rotation holding mechanism 6 is not used, the guide roller 8 and the guide plate 9 forcibly prevent the tester head 2 from rotating over the range of inserting and removing the guide pin (length h or more), and prevent the rotation of the guide bin. This is to ensure insertion and removal.

〔Example〕

Figure 1 shows the left side view of the tester head mounting stand.
The tester head 2 is shown in an attitude separated from the electron beam tester 19. As shown in the figure, the tester head 2 can move up and down by a height H and can rotate by α degrees. FIG. 2 shows a right side view of the tester head mounting stand, showing a posture in which the tester head 2 is joined to the electron beam tester 19. FIG. 3 also shows a front view.

In the figure, reference numeral 1 denotes a stand that holds the tester head 2 by straddling the upper part of the electron beam tester 19. In order to reliably and easily connect and separate the tester head 2 and the electron beam tester 19 with the sample mounting stand 21, a vertical guide table 3 and a rotation mechanism 5 are provided between the side frame 10 of the stand 1 and the tester head 2. A fixed table of the vertical guide table 3 is fixed to the side frame 10 side, and a bearing 15 of the rotation mechanism 5 is fixed to the movable table side. A rotating shaft 14.14 fixed to this bearing 15 on both sides of the tester head 2
By inserting the tester head 2, the tester head 2 is held on the side frame 10 of the stand 1 in a vertically movable and rotatable state.

However, as it is, it is difficult to easily move the heavy tester head 2 manually. In order to easily move the tester head 2 manually, a means to offset the weight of the tester head 2 is required. One method is to counterbalance using weights. However, this method results in an increase in stand size and weight.

In the present invention, the spring support plates 1 and 12 are fixed to the movable table side of each upper and lower guide table 3, thereby preventing an increase in the size and weight of the tester stand and making the stand smaller.

Spring support plates 1, 12 and side frame 10 of stand 1
The spring 7 provided between them receives the load in the vertical direction of the tester head 2, and the spring 7a provided between the spring support plate 13 and the side frame 10 of the stand 1 receives the load in the vertical direction and rotational direction of the tester head 2. have Spring used here7.
7a is for holding the tester head 2 at an arbitrary position.
Ideally, a constant output spring should be used so that the reaction force of the spring remains constant even when the spring expands and contracts. In this embodiment, the tester head 2 can be held at any position by using a gas spring which has similar characteristics, has a small spring constant, and can obtain a large initial load.

The rotation holding mechanism 6 is provided on one of the rotation mechanisms 5, and when the rotation holding lever 33a of the brake 33, which is fixed to a bearing 15 concentrically with the rotation shaft 14a, is rotated, the rotation shaft 14a is tightened, and the tester head 2 is rotated. to be fixed. Lever 33
When a is rotated in the opposite direction, the brake 33 releases the tightening of the rotating shaft 14a, and the tester head 2 becomes ready to rotate.

The vertical holding mechanism 4 is attached to the stand 1 on the same side as the rotation holding mechanism 6.
When a brake plate 12a, which is a part of the spring support plate 12, is rotated by a lever 34, a clamp 35 clamps the brake plate 12a and fixes the vertical movement of the tester head 2. When the lever 35 is rotated in the opposite direction, the clamp 35 is opened and the tester head 2 can be moved in the vertical direction.

A tester bed inclination adjustment screw 38, a rotation stopper 39, and a guide plate 9 are provided on the tester head 2 on the opposite side to the vertical holding mechanism 4 and the rotation mechanism 6, and a guide roller 8 is provided on the side frame 10 facing these. The adjustment screw 38 connects the tester head 2 and the sample mounting stage 21 of the electron beam tester 19.
It is used to adjust the inclination of the tester head 2 so that the contact probe pins 18 of the sample mounting stage 21 and the performance ports 17 attached to the tester head 2 are in reliable contact with each other when wiring is connected between them. This is a stopper in the forward rotation direction of the tester head 2. The rotation stopper 39 is a rotation stopper after which the tester head 2 is separated from the electron beam tester 19 and rotated α.

In order to ensure and easily electrically connect the performance port 17 of the tester head 2 and the contact probe pin 18 of the sample mounting stage 21 of the electron beam tester 19, it is preferable to perform positioning using guide pins. Although not shown, this guide pin is provided on the sample mounting table 2I, and is positioned by fitting into a guide hole provided on the performance port F. To insert and remove this guide pin,
The length h of the guide pin in the vertical (Z) direction of the tester head 2
It is necessary to move more than that. For this reason, both side frames 10, which are part of the stand 1 on which the tester head 2 is installed,
A vertical guide table 3 is installed on the holder to allow the tester head 2 to move in the vertical (Z) direction. Further, the guide roller 8 and the guide plate 9 forcibly prevent the tester head 2 from rotating over the range of inserting and removing the guide pin (length h or more), thereby ensuring the fit of the guide pin. .

The tester head 2 is connected to and separated from the electron beam tester by holding the handle 44.

In the above embodiment, the tester head 2 is attached to the side frame 10 of the stand 1 which is provided separately from the electron beam tester 19, and the tester head 2 is attached to the side frame 10 of the stand 1 which is provided separately from the electron beam tester 19. Although we have described an example that can be separated and moved and is suitable for mounting a relatively large tester head, when using a relatively small tester head, the stand 1 is not used and the side is mounted on the top of the electron beam tester 19 itself. Attach the frame 10 to the electron beam tester 19 and tester head 2.
The tester head 2 and the electron beam tester 19 may be connected to the sample mounting stage 21 by wiring, separated, and held using the same structure as described above.

〔Effect of the invention〕

As explained above, according to the present invention, when replacing a sample or using it as an LSI tester, the weight is approximately 1 2 (The tester head weighing 10 kg can be easily and reliably moved up and down, rotated, and held manually using a simple mechanism with light force to connect and separate the 10 kg tester head, and has the effect of quickly changing the sample. At the same time, it has the advantage that it can be quickly used alternately as an electron beam tester or as an LSI tester.

[Brief explanation of the drawing]

FIG. 1 is a left side view showing the configuration of an embodiment of the present invention, FIG. 2 is a right side view showing the configuration of an embodiment of the present invention, and FIG. 3 is a front view showing the configuration of an embodiment of the present invention. Figure 4 shows a view in the direction of the A arrow shown in Figure 3 (right side main part view), Figure 5 shows a view in the direction of the B-B arrow shown in Figure 3, and Figure 6 shows the view in the direction of the arrow A in Figure 3. Fig. 7 shows a view taken along the line C-C shown in Fig. 3. Fig. 8 shows a plan view of the left main part. Fig. 9 shows a plan view of the main part on the right side. 10 is a diagram showing the electrical connection between the tester head and the sample mounting stage. FIGS. 11 and 12 are sectional views of the main parts of a conventional electron beam tester. In the figure, 1... Stand, 2... Tester head, 3... Vertical guide table, 4... Vertical holding mechanism, 5... Rotation mechanism, 6... Rotation holding mechanism, 7...・Spring, 8... Guide roller, 9... ・Guide plate, 1, 12.13... Spring support plate, 17... Performance pod, 19... Electron beam tester, 20... Electron beam Lens barrel, 21...Sample loading stage, 26...Subchamber order Invention's r belly 4 column translation diagram (Right A Noriichi Ro) 1st concave? 8 holes large tane 1 eye waterfall tomorrow (Right push 1st side entrance) Kaya?
Difficult diagram (B B dog breed I2I) Jj Upper stroke 7 par brown concave (C-C arrow view Kaya concave (E large species diagram) (Tester head and! 11 hese/+13 death diagram) 1st theta diagram Conventional/I electron beam tester inspector cross section brown 11 Figure

Claims (1)

[Claims] 1. In a tester head mounting stand that connects, separates, and holds an LSI tester head placed on the top of an electron beam tester, a vertical guide table (3) that moves the tester head (2) up and down; A vertical holding mechanism (4) that holds the tester head vertically moving, a rotation mechanism (5) that rotates the tester head (2), and a rotation holding mechanism (6) that holds the tester head rotation. Side frame of stand (1) (
10) and the tester head (2), and the tester head (2) is loaded by a spring (7) provided between the side frame (10) and the tester head (2). 2. The tester head mounting according to claim 1, wherein the side frame (10) of the stand (1) and the tester head (2) are provided with a guide roller (8) and a guide plate (9) for preventing rotation of the tester head. stand.