JPH02149880U - - Google Patents
Info
- Publication number
- JPH02149880U JPH02149880U JP5948989U JP5948989U JPH02149880U JP H02149880 U JPH02149880 U JP H02149880U JP 5948989 U JP5948989 U JP 5948989U JP 5948989 U JP5948989 U JP 5948989U JP H02149880 U JPH02149880 U JP H02149880U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm body
- elastic member
- piezoelectric element
- piezoelectric
- contact surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Reciprocating Pumps (AREA)
Description
第１図……本考案の実施例の図。第２図……本
考案の固定構造による、振動を示す図。第３図、
第４図……マイクロポンプの動作原理を示す図。
第５図……従来のポンプ構造の図。第６図……従
来の固定構造による、振動を示す図。
FIG. 1: A diagram of an embodiment of the present invention. FIG. 2: A diagram showing vibration caused by the fixing structure of the present invention. Figure 3,
FIG. 4: A diagram showing the operating principle of the micropump.
Fig. 5: A diagram of a conventional pump structure. FIG. 6: A diagram showing vibration caused by the conventional fixing structure.
Claims (1)
、注入口、吐出口、加圧室を備えた圧電マイクロ
ポンプの前記圧電素子を有する振動板体の取付け
構造において、振動板体の流体接液面側で、振動
板体外周から中心方向に少し入つた位置で振動板
体の同心円板に配設された弾性部材と、前記流体
接液以外の面の前記弾性部材と平面的に重なる位
置に配設され、尖頭形状を有する部材とにより、
前記圧電素子を有する振動板体を、挟み込んで固
定したことを特徴とする圧電マイクロポンプ。 In the mounting structure of a diaphragm body having a piezoelectric element of a piezoelectric micropump comprising at least a diaphragm body having a piezoelectric element, a check valve, an inlet, a discharge port, and a pressurizing chamber, a fluid contact surface of the diaphragm body. an elastic member disposed on a concentric disk of the diaphragm body at a position slightly toward the center from the outer periphery of the diaphragm body, and an elastic member disposed at a position planarly overlapping with the elastic member on the surface other than the fluid contact surface. and a member having a pointed shape,
A piezoelectric micropump characterized in that a diaphragm body having the piezoelectric element is sandwiched and fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5948989U JPH02149880U (en) | 1989-05-23 | 1989-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5948989U JPH02149880U (en) | 1989-05-23 | 1989-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149880U true JPH02149880U (en) | 1990-12-21 |
Family
ID=31586028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5948989U Pending JPH02149880U (en) | 1989-05-23 | 1989-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149880U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137284U (en) * | 1991-06-18 | 1992-12-21 | 株式会社三鈴エリー | Piezoelectric pump for high discharge pressure |
| WO2007055136A1 (en) * | 2005-11-09 | 2007-05-18 | Nitto Kohki Co., Ltd. | Pump using unimorph vibration diaphragm |
| JP2008303774A (en) * | 2007-06-07 | 2008-12-18 | Alps Electric Co Ltd | Diaphragm pump |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| JP5494801B2 (en) * | 2010-05-21 | 2014-05-21 | 株式会社村田製作所 | Fluid pump |
| JP2015064059A (en) * | 2013-09-25 | 2015-04-09 | 株式会社ジェイテクト | Variable restriction type hydrostatic bearing |
-
1989
- 1989-05-23 JP JP5948989U patent/JPH02149880U/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137284U (en) * | 1991-06-18 | 1992-12-21 | 株式会社三鈴エリー | Piezoelectric pump for high discharge pressure |
| WO2007055136A1 (en) * | 2005-11-09 | 2007-05-18 | Nitto Kohki Co., Ltd. | Pump using unimorph vibration diaphragm |
| JP2007132252A (en) * | 2005-11-09 | 2007-05-31 | Nitto Kohki Co Ltd | Pump using unimorph diaphragm |
| JP2008303774A (en) * | 2007-06-07 | 2008-12-18 | Alps Electric Co Ltd | Diaphragm pump |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| JP5494801B2 (en) * | 2010-05-21 | 2014-05-21 | 株式会社村田製作所 | Fluid pump |
| JP2014098396A (en) * | 2010-05-21 | 2014-05-29 | Murata Mfg Co Ltd | Fluid pump |
| US8747080B2 (en) | 2010-05-21 | 2014-06-10 | Murata Manufacturing Co., Ltd. | Fluid pump |
| JP2015064059A (en) * | 2013-09-25 | 2015-04-09 | 株式会社ジェイテクト | Variable restriction type hydrostatic bearing |
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