JPH02135907A - Vertical crystal resonator - Google Patents

Abstract

PURPOSE:To suppress oscillation leakage by enclosing an oscillation part with a flection part connected to the oscillation part, connecting the flection part to a frame via both ends of a hole, and extending it to a mount part. CONSTITUTION:A resonator 1 is formed integrally from the oscillation part 2 to the flection part 5 via a bridge part 4 by an etching method, and the hole 7 to obtain sufficient oscillation in the flection part 5 is provided. Furthermore, both end parts of the hole 7 are connected to the frame 6, and are extended to the mount part 8. Simultaneously, the flection part 5 is constituted so as to enclose the oscillation part 2. Thereby, the oscillation of the oscillation part 2 in the direction of the bridge part 4 is converted to an inflection mode, and a vertical crystal resonator preventing the oscillation leakage from occurring completely can be obtained even when it is fixed on the mount part 8.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a vertical crystal resonator whose resonance frequency covers a medium frequency band around IMHz. In particular, it concerns the shape of the vibrator.

[Summary of the Invention] An object of the present invention is to provide a compact vertical crystal resonator with very little vibration leakage and a small R.

Quartz is a physically and chemically very stable substance and therefore forms from this. A so-called crystal resonator can have a low loss resistance and a high Q value. However, such excellent characteristics can only be obtained by designing a vibrator shape with small vibration leakage. In the present invention, the energy of the vibrating part can be confined within the vibrating part by devising and improving the shape of the supporting part of the quartz crystal resonator in which the vibrating part and the supporting part are integrally formed by etching. As a result, a vertical crystal resonator with a small loss resistance R and a high Q value can be obtained.

[Prior art 1] In a conventional vertical crystal resonator in which the vibrating part and the supporting part are integrally formed by etching, the width of the frame of the supporting part is uniform;
Moreover, since they are formed in the same direction and mounted at their ends, the energy of the vibrating part is transmitted to the mount part, causing vibration leakage. Therefore, the loss resistance R1
I couldn't get a small water quality vibrator.

[Problems to be Solved by the Invention] To address this issue, attempts have been made to increase the power boost of the amplifier, but this has drawbacks such as increased current consumption, and in severe cases, when placed in equipment, vibration leakage may occur. was large, causing a major problem in which oscillation stopped. Therefore, the present invention proposes a vertical crystal resonator with extremely small vibration leakage. That is, it provides a shape with very little vibration leakage.

[Means for Solving the Problems] Fig. 1 shows an embodiment of the vertical crystal resonator of the present invention, and Fig. 2 is a simplified plan view for explaining the principle of the vertical crystal resonator of Fig. 1. It is. In Fig. 2, the vibrator l is the vibrating part 2.
It can be considered that the support part 3 is fixed under the boundary condition that both ends are fixed. Also, if the vibrating part 2 is expressed by length LL, width W1, and thickness T, and the support part 3 is expressed by length 1-21 and width W2, now the vibrating part 2 of the vibrator l
When the supporting portion 3 undergoes an elongation displacement as shown by arrow A, the bent portion of the support portion 3 naturally generates a bending mode inward as shown by arrow B. Here, the part that causes the bending mode is shown as a bending part 5 6 Conversely, when the vibrating part 2 contracts, the bending part 5 of the support part 3 generates a bending mode outward. That is, in the present invention, by converting the displacement of the vibrating part 2 in the width direction into the bending mode of the support part 3, the degree of freedom of vibration is not suppressed. In reality, there are dimensions that do not suppress vibrations. The shape and dimensions are determined by the strain energy of the vibrating section 2. Namely.

When the strain energy of the vibrating section 2 is tJ, and the strain energy of the bending section is U2, U, U2 are expressed by the following equation.

However, stress T2. Strain S2. The Young's modulus E, the second moment of area (■), the displacement V1 body fiV + , and the V2 coordinate X are shown. Also, the relationship that does not suppress the vibration of the vertical crystal oscillator is expressed by the formula (
From 1) and (2), the following relationship holds true.

01>tJ2 −(
3) From this, the dimension L2 of the bent portion 5. For example, when the frequency of the present invention is g91 LI Hz, the dimensions of the vibrating part are length = 2.6 mm, W80LLm, T
= 160 um, the dimension ratio of the bent part of the support part W,'/
L2 may be 0.16 or less. By determining the dimensions in this way, a vertical crystal resonator with low loss resistance and a high Q value can be obtained.6 Next, vibration leakage will be described. 2 As can be seen from the simplified diagram in FIG. 2, the vibration energy of the vibrating part 2 is transmitted to the support part 3 via the bridge part 4. Therefore, it is only necessary to reduce the energy loss in the support part 3, and since the mode of the support part 3 is converted to a bending mode, if the masses of the fixed parts at both ends are substantially infinitely large, the bending of the support part 3 The energy in the portion 5 will not leak up to the mount portion 8. In other words, the present invention has a shape that converts the bending mode of the support part 3 transmitted from the vibrating part 2, that is, the width W2 and the length 1. ．． 2 ratio W
, /L2, the object of the present invention can be achieved by freeing the vibration of the vibrating part and infinitely increasing the mass of the supporting part which has a boundary condition of fixed both ends connected to the bending mode part. It is something to be achieved.

[Function] As described above, the present invention is composed of a vibrating section and a supporting section.
By improving the shape and dimensions of the support part of the vertical crystal resonator formed by the etching method, the loss resistance is reduced.
Moreover, a vertical crystal resonator having a high Qla can be obtained. At the same time, by analyzing the vibration mode of the support part, a vertical quartz crystal resonator with small vibration leakage can be obtained.

[Example 1] Next, the results obtained with the present invention will be specifically described. 1st
The figure is a plan view of an embodiment of the vertical quartz crystal resonator of the present invention, in which the resonator l is constructed from a vibrating section 2 and a support section 3 via a notch section 4, and is integrally formed by an etching method. . Note that the support portion 3 has a bent portion 5, a hole 7. It consists of a frame 6 and a mount part 8. The vibrating part 2 is driven by an external electric field (not shown) to expand and contract in the longitudinal direction, but at the same time, it also vibrates in the vertical direction, that is, in the direction of the bridge part 4. At this time, first of all, in order to freely excite vibrations in the longitudinal direction of the vibrating part 2, it is important to make the vibrations in the direction of the bridge part 4 sufficiently free. Holes 7 are provided so that part 5 can vibrate sufficiently freely. Also, depending on the ratio of the length of the bent portion 5 to the width W (not shown), 1
For example, if the frequency is approximately IM)lz, the side ratio W/L is 0.
．． If it is 16 or less, the suppression of vibration in the longitudinal direction can be made sufficiently small. Next, regarding vibration leakage, the vibrator l is integrally formed from the vibrating part 2 to the bending part 5 via the bridge part 4 by an etching method, and in order to make the vibration of the bending part 5 sufficiently free, holes are formed. 7 is provided. Further, both ends of the hole 7 are connected to the frame 6 and extend to a mount section 8. At the same time, the bending section 5 is configured to surround the vibrating section 2. Therefore, the vibration of the vibrating part 2 in the direction of the bridge part 4 is converted into a bending mode, and is connected to the frame 6 through both ends of the hole 7 and extends to the mount part, so it can be fixed by the mount part 8. However, a vertical crystal resonator with no vibration leakage can be obtained.

[Effects of the Invention 1 As stated above, the present invention achieves the first order by proposing a vertical crystal resonator with a new shape in a vertical crystal resonator in which the vibrating part and the support part are integrally formed by an etching method. It has a remarkable effect.

■By improving the shape and dimensions of the support part, vibration can be made free, resulting in low tmm resistance.

■Since there is a hole between the bending part and the frame, the vibrating part can vibrate freely, and at the same time, the energy of the bending part is not transmitted to the frame, eliminating vibration leakage and fixing it with the mount part. However, a resonator with a small R1 can be obtained.

■Since it is mounted on one side, it is easy to manufacture and can be made smaller.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the shape and dimensions of a vertical crystal resonator of the present invention. FIG. 2 is a simplified plan view for explaining the principle of the vertical crystal resonator of the present invention. 1 ・ ・ ・ 2 ・ ・ ・ 3 ・ ・ 4 ・ ・ ・ 5 ・ ・ 6 ・ ・ 7 ・ ・ ・ 8 ・ ・ 11, L2 W, W2 Ll ・ ・ W ・ ・ Vibrator vibrating part support part bridge Bent part Frame hole Mount part Length of bent part Width of bent part Length of vibrating part Width of vibrating part

Claims (1)

[Claims] In a vertical crystal resonator in which the vibrating part and the supporting part are integrally formed by etching, the bent part connected to the vibrating part surrounds the vibrating part and is further connected to the frame through both ends of the hole. Also, a vertical crystal resonator characterized by extending to the mount part.