JPH02124251A - Micro hole processing method - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an improvement in a microhole machining method using an ultrasonic machining machine.

(Prior Art) Conventionally, in order to machine micro holes in a workpiece using an ultrasonic processing machine, wax 3 is applied onto a fixed glass plate 2 on a machine table 1 as shown in FIG. Place item 4,
For drilling, an abrasive liquid 5 was applied to the part, and a minute hole 8 was ultrasonically machined using a tool 7 of an ultrasonic machine 6.

(Problems to be Solved by the Invention) In the above-mentioned microhole drilling method, the tool 7 may break when the tool 7 and the workpiece 4 come into contact with each other at the start, as shown in FIG. 1a. This is because the ultrasonic vibration of the tool 7 is in the vertical direction, but it comes into contact with the workpiece 4! - This is because when the tool 7 is not guided, longitudinal vibrations escape in the lateral direction. Further, the tool 7 may break due to vibration during machining of the minute hole 8 as shown in FIG. 4. In this case, the tool 7 is held at its base (double chain part) in the holder 9, its tip (lower end) is held in the fine hole 8 of the workpiece 4, and pressurized from above with the middle part open. This is because the vertical vibration escapes in the horizontal direction, resulting in horizontal vibration. Furthermore, since the length of the tool 7 is limited, the microhole 8 becomes tapered as shown in FIG. As the diameter of the hole 8 decreases, it is impossible to form a straight microhole 8 with high dimensional accuracy.

Therefore, the present invention aims to provide a micro-hole machining method that does not cause the tool to break during machining of a micro-hole, is not limited by the machining depth of the micro-hole, and can always machine straight micro-holes with high dimensional accuracy. It is something.

(Means for Solving the Problems) The microhole processing method of the present invention for solving the above problems is as follows:
In a micro-hole drilling method using an ultrasonic processing machine, a tool guide that also serves as a tool making die having a hole of the desired shape is installed on the workpiece, and a wire tool is inserted and fed through the tool guide to form the desired cross-sectional shape of the tool. The tool is characterized by ultrasonically machining micro holes in the workpiece using the tool.

(Function) As described above, in the microhole drilling method of the present invention, a tool guide that also serves as a tool making die is installed on the workpiece, and a wire tool is inserted and supplied through the tool guide to form the tool into a desired cross-sectional shape. Therefore, the tool is not limited in any way no matter how deep the microhole can be machined. In addition, when a tool formed into the desired cross-sectional shape drills a microscopic hole in a workpiece, it descends straight along the guide hole of the tool guide, so when the tool comes into contact with the workpiece, it is vertically emitted by ultrasonic waves. Since vibrations do not escape in the lateral direction, and since the middle part of the tool is held by the tool guide during machining, longitudinal vibrations do not escape in the lateral direction. Therefore, the tool will not be damaged during the machining of a minute hole, and there is no limit to the length of the tool), so the machined minute hole will be straight and have high dimensional accuracy.

(Example) An example of the microhole processing method of the present invention will be described with reference to FIG. In the micro hole processing method using the ultrasonic processing machine 6, a rubber seam is attached to the base plate 10 on the machine table I.
・Wax 3 is applied on a glass plate 2 which is fixed with 11 interposed between the workpiece 4, and in this example, the thickness is 1. omm, !
Place a 25mm x 25mm horizontal Al2O3 plate and place 1 on it.
□0. Apply wax 3 on plate 4 and make an inner diameter of 0.5 in the center.
5 mm thick with a 0 mm circular guide hole 12;
A tool guide 13 made of carbide with a width of 10 mm and a width of 101 and a DI of 11 was installed which also served as a tool making die. Next, the abrasive liquid 5 is applied onto the tool guide 13 and the S U is fed out from the coil 16 by the feeding device 15 provided below the horn 111 of the ultrasonic processing machine 6 into the guide hole 12 of the tool guide 13. A wire tool 17 made of S304 with an outer diameter of 1.0 mm is inserted and supplied, and a tool 17' having a circular cross section with an outer diameter of 0.50 mm is formed by the opening of the guide hole 12 and the die portion 12a at the edge, as shown in FIG. At the same time, the tool 17' was moved straight down along the guide hole 12 of the tool guide 13, and a circular microhole 8 with an inner diameter of 0.60 mm was formed in the Al2O2 plate as the workpiece 4 by ultrasonic processing.

When the 100 minute holes 8 thus obtained were inspected,
None had an inner diameter error of 50j1 m or more. In addition, there were no cases in which the microholes 8 were inclined, and all of them were straight. The tool 17' was not broken at all during machining.

The above embodiment is a case in which circular microholes 8 are ultrasonically machined, but when ultrasonically machining irregularly shaped microholes such as triangular, Y-shaped, peanut-shaped, etc., the guide hole 12 is triangular, Y-shaped, etc. It is preferable to use a tool guide l-'13 which also serves as a tool making die and has an irregularly shaped hole such as a peanut shape.

Further, the above embodiment is based on the wire tool 1 of SUS 304.
7 was used, but the present invention is not limited to this, and wire tools made of copper, brass, iron, titanium, tungsten, etc. may be used as appropriate depending on the material of the workpiece. Further, in Example L, the tool guide 13 which also serves as a tool making die made of carbide is used, but it may be made of diamond, sintered die steel, or the like. Furthermore, in the above embodiment, the workpiece 4 is A
Although it is an A203 plate, that is, a ceramic plate, it can also be applied to spinnerets for chemical fibers made of stainless steel, iron, tungsten, precious metal alloys, charcoal, glass fiber, etc.

(Effects of the Invention) As can be seen from the above explanation, according to the microhole machining method of the present invention, the tool does not break during ultrasonic machining of microholes.
In addition, there is an excellent effect that there is no limit to the depth of machining of the microholes, and it is possible to always obtain straight microholes with high dimensional accuracy.

[Brief explanation of drawings]

Figure 1 is a diagram that does not show the microhole drilling method of the present invention, Figure 2 is a sectional view of the main part of the microhole drilling method of the present invention, Figure 3 is a diagram showing the conventional microhole drilling method, and Figure 4 Figures a and C do not show the problems caused by the conventional microhole drilling method.

Claims (1)

[Claims] 1. In the micro-hole machining method using an ultrasonic machining machine, a tool guide that also serves as a tool-making die with a hole of the desired shape is installed on the workpiece, and a wire tool is inserted and fed through the tool guide to form the required shape. A method for machining microholes, which comprises forming a tool into a cross-sectional shape and using the tool to ultrasonically process microholes in a workpiece.