JPH0198471U - - Google Patents
Info
- Publication number
- JPH0198471U JPH0198471U JP1987195018U JP19501887U JPH0198471U JP H0198471 U JPH0198471 U JP H0198471U JP 1987195018 U JP1987195018 U JP 1987195018U JP 19501887 U JP19501887 U JP 19501887U JP H0198471 U JPH0198471 U JP H0198471U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample surface
- direction movement
- movement mechanism
- speed reduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000005211 surface analysis Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 2
- 239000011295 pitch Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の一実施例による試料面分析装
置の概略構成図、第２図はその変速機構の詳細を
示す断面構成図である。
１……試料、２……電子銃、１０……試料ステ
ージ、１１……Ｘ方向移動部、１２……Ｙ方向移
動部、１３……Ｚ方向移動部、１１ａ，１２ａ，
１３ａ，３５……パルスモータ、３３……従動ギ
ヤ、３６……アイドリングギヤ、３７……駆動ギ
ヤ。
FIG. 1 is a schematic configuration diagram of a sample surface analysis apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional configuration diagram showing details of its speed change mechanism. DESCRIPTION OF SYMBOLS 1...Sample, 2...Electron gun, 10...Sample stage, 11...X direction moving part, 12...Y direction moving part, 13...Z direction moving part, 11a, 12a,
13a, 35...pulse motor, 33...driven gear, 36...idling gear, 37...driving gear.
Claims (1)
励起された試料面からの放射線を測定して前記試
料の面分析を行う試料面分析装置において、前記
試料の載置された試料ステージを、同一の駆動信
号に対してそれぞれＸ，Ｙ方向に１ステツプ当た
りほぼ等しいピツチだけ移動させるＸ方向移動機
構及びＹ方向移動機構と、装置本体外部に、前記
Ｘ方向移動機構及びＹ方向移動機構の少なくとも
いずれか一方に着脱自在に連結されて設けられ、
前記試料ステージのＸ，Ｙ方向移動ピツチを相互
に異ならせるための変速機構とを備えたことを特
徴とする試料面分析装置。 (2) 前記変速機構は前記Ｘ方向移動機構もしく
はＹ方向移動機構に連結された減速機構であり、
分析結果の表示に際しては、前記減速機構の連結
された方向の分析結果を前記減速機構の減速比に
応じた比率で拡大して表示するようにしたことを
特徴とする実用新案登録請求の範囲第１項記載の
試料面分析装置。[Claims for Utility Model Registration] (1) In a sample surface analyzer that excites a sample surface with a charged particle beam and measures radiation from the excited sample surface to analyze the surface of the sample, An X-direction moving mechanism and a Y-direction moving mechanism that move the sample stage on which a sample is mounted by approximately equal pitches per step in the X and Y directions, respectively, in response to the same drive signal, and the provided detachably connected to at least one of the direction movement mechanism and the Y direction movement mechanism,
A sample surface analysis apparatus comprising: a speed change mechanism for mutually varying the moving pitches of the sample stage in the X and Y directions. (2) The speed change mechanism is a deceleration mechanism connected to the X direction movement mechanism or the Y direction movement mechanism,
When displaying the analysis results, the analysis results in the direction in which the speed reduction mechanisms are connected are enlarged and displayed at a ratio corresponding to the speed reduction ratio of the speed reduction mechanisms. The sample surface analysis device according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195018U JPH0198471U (en) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195018U JPH0198471U (en) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198471U true JPH0198471U (en) | 1989-06-30 |
Family
ID=31485715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987195018U Pending JPH0198471U (en) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198471U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265490A (en) * | 1992-05-01 | 1994-09-22 | Link Analytical Ltd | Apparatus and method for display of visual image of x-ray response of test object |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57210548A (en) * | 1981-06-22 | 1982-12-24 | Agency Of Ind Science & Technol | Method for scanning charged corpuscular beam |
-
1987
- 1987-12-22 JP JP1987195018U patent/JPH0198471U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57210548A (en) * | 1981-06-22 | 1982-12-24 | Agency Of Ind Science & Technol | Method for scanning charged corpuscular beam |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265490A (en) * | 1992-05-01 | 1994-09-22 | Link Analytical Ltd | Apparatus and method for display of visual image of x-ray response of test object |
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