JPH0188094U - - Google Patents
Info
- Publication number
- JPH0188094U JPH0188094U JP18324687U JP18324687U JPH0188094U JP H0188094 U JPH0188094 U JP H0188094U JP 18324687 U JP18324687 U JP 18324687U JP 18324687 U JP18324687 U JP 18324687U JP H0188094 U JPH0188094 U JP H0188094U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- rotor
- pump
- bearing formed
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示すターボ分子ポ
ンプの要部断面図である。第２図は変形実施例を
示す部分断面図である。第３図、第４図及び第５
図はいずれも従来の磁気軸受装置を示すターボ分
子ポンプの要部断面図である。
Ｒ……ロータ、Ｓ……ロータシヤフト、ＳＲ…
…スラストランナ、１，２……永久磁石、３……
電磁石、５……ホルダ、６……ラジアル・スラス
ト磁気軸受、７……スラスト磁気軸受、１０……
センサ。
FIG. 1 is a sectional view of essential parts of a turbomolecular pump showing an embodiment of the present invention. FIG. 2 is a partial sectional view showing a modified embodiment. Figures 3, 4 and 5
Each figure is a sectional view of a main part of a turbomolecular pump showing a conventional magnetic bearing device. R...rotor, S...rotor shaft, SR...
...Thrust runner, 1, 2...Permanent magnet, 3...
Electromagnet, 5... Holder, 6... Radial thrust magnetic bearing, 7... Thrust magnetic bearing, 10...
sensor.
Claims (1)
ンプにおいて、前記ロータの一端側に永久磁石に
より構成した磁気軸受を、他端側に電磁石により
構成した磁気軸受を配してなることを特徴とする
ターボ分子ポンプの磁気軸受装置。 A turbo molecular pump in which a rotor is supported by magnetic levitation, characterized in that a magnetic bearing formed by a permanent magnet is disposed at one end of the rotor, and a magnetic bearing formed by an electromagnet is arranged at the other end. Pump magnetic bearing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324687U JPH0188094U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324687U JPH0188094U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188094U true JPH0188094U (en) | 1989-06-09 |
Family
ID=31474675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18324687U Pending JPH0188094U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188094U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653198A (en) * | 1992-06-03 | 1994-02-25 | Hitachi Ltd | Cleaning agent and cleaning method for semiconductor substrate using same |
| JP2011529542A (en) * | 2008-07-31 | 2011-12-08 | オーリコン レイボルド バキューム ゲーエムベーハー | Vacuum pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (en) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh |
-
1987
- 1987-11-30 JP JP18324687U patent/JPH0188094U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (en) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653198A (en) * | 1992-06-03 | 1994-02-25 | Hitachi Ltd | Cleaning agent and cleaning method for semiconductor substrate using same |
| JP2011529542A (en) * | 2008-07-31 | 2011-12-08 | オーリコン レイボルド バキューム ゲーエムベーハー | Vacuum pump |