JPH0173929U - - Google Patents
Info
- Publication number
- JPH0173929U JPH0173929U JP1987170363U JP17036387U JPH0173929U JP H0173929 U JPH0173929 U JP H0173929U JP 1987170363 U JP1987170363 U JP 1987170363U JP 17036387 U JP17036387 U JP 17036387U JP H0173929 U JPH0173929 U JP H0173929U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- etching
- etching tank
- tank
- side walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170363U JPH0173929U (fr) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170363U JPH0173929U (fr) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173929U true JPH0173929U (fr) | 1989-05-18 |
Family
ID=31461236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987170363U Pending JPH0173929U (fr) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173929U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100232998B1 (ko) * | 1996-06-05 | 1999-12-01 | 윤종용 | 식각량 조절수단을 갖는 케미컬 배스 유니트 |
| JP2008153640A (ja) * | 2006-11-24 | 2008-07-03 | Shinko Electric Ind Co Ltd | アルカリ過マンガン酸エッチング溶液又はデスミア液の再生方法及び装置 |
-
1987
- 1987-11-06 JP JP1987170363U patent/JPH0173929U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100232998B1 (ko) * | 1996-06-05 | 1999-12-01 | 윤종용 | 식각량 조절수단을 갖는 케미컬 배스 유니트 |
| JP2008153640A (ja) * | 2006-11-24 | 2008-07-03 | Shinko Electric Ind Co Ltd | アルカリ過マンガン酸エッチング溶液又はデスミア液の再生方法及び装置 |