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JPH0160889B2 - - Google Patents

Info

Publication number
JPH0160889B2
JPH0160889B2 JP59045541A JP4554184A JPH0160889B2 JP H0160889 B2 JPH0160889 B2 JP H0160889B2 JP 59045541 A JP59045541 A JP 59045541A JP 4554184 A JP4554184 A JP 4554184A JP H0160889 B2 JPH0160889 B2 JP H0160889B2
Authority
JP
Japan
Prior art keywords
hot cathode
chamber
discharge
ion
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59045541A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60189841A (ja
Inventor
Kazuo Takayama
Eiji Yabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
Ulvac Inc
Original Assignee
Tokai University
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, Nihon Shinku Gijutsu KK filed Critical Tokai University
Priority to JP59045541A priority Critical patent/JPS60189841A/ja
Publication of JPS60189841A publication Critical patent/JPS60189841A/ja
Publication of JPH0160889B2 publication Critical patent/JPH0160889B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59045541A 1984-03-12 1984-03-12 イオン源 Granted JPS60189841A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59045541A JPS60189841A (ja) 1984-03-12 1984-03-12 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59045541A JPS60189841A (ja) 1984-03-12 1984-03-12 イオン源

Publications (2)

Publication Number Publication Date
JPS60189841A JPS60189841A (ja) 1985-09-27
JPH0160889B2 true JPH0160889B2 (de) 1989-12-26

Family

ID=12722226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59045541A Granted JPS60189841A (ja) 1984-03-12 1984-03-12 イオン源

Country Status (1)

Country Link
JP (1) JPS60189841A (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278735A (ja) * 1986-05-28 1987-12-03 Ulvac Corp イオン源
JPH0762981B2 (ja) * 1986-05-30 1995-07-05 日本真空技術株式会社 イオン源
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
JPS6326927A (ja) * 1986-07-19 1988-02-04 Ulvac Corp イオン源
JPS62281235A (ja) * 1986-05-30 1987-12-07 Ulvac Corp イオン源
JPS62278734A (ja) * 1986-05-28 1987-12-03 Ulvac Corp イオン源
JPH0824031B2 (ja) * 1986-07-01 1996-03-06 日本真空技術株式会社 イオン源
JPH088072B2 (ja) * 1986-07-03 1996-01-29 日本真空技術株式会社 イオン源
JPS6369966A (ja) * 1986-09-09 1988-03-30 Ulvac Corp イオン源
JP2523552B2 (ja) * 1986-12-17 1996-08-14 富士通株式会社 圧力勾配型イオン源
JPH0648400Y2 (ja) * 1987-02-14 1994-12-12 オムロン株式会社 海苔検査装置

Also Published As

Publication number Publication date
JPS60189841A (ja) 1985-09-27

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