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JPH01319709A - Device for adjusting incident angle of light beam - Google Patents

Device for adjusting incident angle of light beam

Info

Publication number
JPH01319709A
JPH01319709A JP15298288A JP15298288A JPH01319709A JP H01319709 A JPH01319709 A JP H01319709A JP 15298288 A JP15298288 A JP 15298288A JP 15298288 A JP15298288 A JP 15298288A JP H01319709 A JPH01319709 A JP H01319709A
Authority
JP
Japan
Prior art keywords
transparent rod
light beam
angle
incident
transmission fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15298288A
Other languages
Japanese (ja)
Inventor
Yuji Ueno
裕司 上野
Minoru Toyama
遠山 実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP15298288A priority Critical patent/JPH01319709A/en
Publication of JPH01319709A publication Critical patent/JPH01319709A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206Optical features

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To facilitate the angle adjustment at the time of casting a light beam through a condenser lens to a light transmission fiber by disposing a transparent rod to the incident side of the condenser lens, holding the rod in such a manner that the normal direction of the end face thereof is freely adjustable and adjusting the angle of inclination of the transparent rod. CONSTITUTION:Since both ends 16a, 16b of the transparent rod 16 are parallel planes, the transparent rod has no divergent and convergent properties and the main ray of the emitted light beam is parallel with the main ray of the incident light beam 10. Since the parallel exit light thereof is condensed by the condenser lens 12, the position of the focus thereof does not depends on the angle of inclination of the transparent rod 16 and is always at one point on the optical axis. The incident angle theta to the light transmission fiber 14, therefore, changes and can be easily adjusted to the optimum conditions by adjusting the angle alpha of inclination of the transparent rod 16 as far as the incident end face 14a of the fiber 14 exists in said position.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、ガスレーザや半導体レーザ等の光ビームを、
集光レンズを通して光伝送ファイバーに効率よく入射さ
せるための装置に関し、更に詳しくは、両端面が平行平
面をなす透明ロッドを集光レンズの入射側に所定の向き
で配置した光ビームの入射角調整装置に関するものであ
る。
[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for using a light beam of a gas laser, a semiconductor laser, etc.
Regarding a device for efficiently inputting a light beam into an optical transmission fiber through a condensing lens, in more detail, it is an incident angle adjustment device in which a transparent rod whose end surfaces are parallel planes is arranged in a predetermined direction on the incident side of a condensing lens. It is related to the device.

[従来の技術] 従来技術では、第4図に示すようにガスレーザや半導体
レーザ等から発生した光ビームlOは、集光レンズ12
によって集光されて光伝送ファイバー14へ送られる。
[Prior Art] In the conventional art, as shown in FIG. 4, a light beam lO generated from a gas laser, a semiconductor laser, etc.
The light is focused and sent to the optical transmission fiber 14.

光ビーム10を光伝送ファイバー14に効率よく入射さ
せるためには、光ビーム10に対して集光レンズ12及
び光伝送ファイバー14が精度よく配置されている必要
があり、その精度が入射効率を左右することになる。
In order for the light beam 10 to enter the optical transmission fiber 14 efficiently, the condensing lens 12 and the optical transmission fiber 14 must be arranged with high accuracy with respect to the light beam 10, and the accuracy affects the incidence efficiency. I will do it.

入射効率を悪化させる原因の一つとして、光伝送ファイ
バー14に入射する光ビームの主光線が光伝送ファイバ
ー14の入射端面14aに対して垂直でないことに起因
するものがある。
One of the causes of deterioration of the incidence efficiency is that the principal ray of the light beam incident on the optical transmission fiber 14 is not perpendicular to the input end surface 14a of the optical transmission fiber 14.

従って、光伝送ファイバー14は、その入射端面14a
が光軸上で且つ集光レンズ12のほぼ焦点に位置すると
共に、入射端面14aの法線方向が光軸0−oと平行に
なるように調整されていなければならない、このような
調整は光ファイバー14の取り付は位置と方向を動かし
て行うことになる。
Therefore, the optical transmission fiber 14 has an input end face 14a.
must be adjusted so that it is located on the optical axis and approximately at the focal point of the condensing lens 12, and the normal direction of the incident end surface 14a is parallel to the optical axis 0-o. 14 will be installed by moving the position and direction.

[発明が解決しようとする課題] ところで光伝送ファイバー14の入射端面14aは、該
光伝送ファイバー14の中心軸に対して完全に直角に切
断されているとは限らない、従って例え光伝送ファイバ
ー14を光軸〇−〇に沿って設置したとしても、その入
射端面14aの法線方向は光軸0−0に対しである角度
傾いている可能性はある。
[Problems to be Solved by the Invention] Incidentally, the incident end surface 14a of the optical transmission fiber 14 is not necessarily cut completely at right angles to the central axis of the optical transmission fiber 14. Therefore, even if the optical transmission fiber 14 Even if it is installed along the optical axis 0--0, there is a possibility that the normal direction of the incident end surface 14a is inclined at a certain angle with respect to the optical axis 0-0.

この傾きのために光伝送ファイバーへの入射効率が低下
する可能性が大きい、特に光伝送ファイバー14として
単一モードファイバーを用いている時などは、光伝送フ
ァイバー14の開口角が0.1程度と非常に小さいので
、それに入射する光ビームの主光線の調整精度はより高
くしなければならない。
There is a high possibility that the incidence efficiency into the optical transmission fiber will decrease due to this inclination. Especially when a single mode fiber is used as the optical transmission fiber 14, the aperture angle of the optical transmission fiber 14 is about 0.1. is very small, so the adjustment precision of the principal ray of the light beam incident on it must be higher.

前記のように入射端面14aは光伝送ファイバー14の
中心軸に対して必ずしも直角になってはいないから、例
え光伝送ファイバー14の中心軸を光軸に合わせたとし
ても最適な結合状態が得られるとは限らない。その上、
第4図に示すような光学系で光伝送ファイバー14の取
り付は角度を変えて調整することは大変困難である。
As mentioned above, since the input end face 14a is not necessarily perpendicular to the central axis of the optical transmission fiber 14, an optimal coupling state can be obtained even if the central axis of the optical transmission fiber 14 is aligned with the optical axis. Not necessarily. On top of that,
In an optical system as shown in FIG. 4, it is very difficult to adjust the attachment of the optical transmission fiber 14 by changing the angle.

本発明の目的は、このような従来技術の欠点を解消し、
集光レンズを通して光ビームを光伝送ファイバーに入射
させるときの角度調整を容易に行うことができ、それに
よって入射効率を高めることができるような光ビームの
入射角調整装置を提供することにある。
The purpose of the present invention is to eliminate such drawbacks of the prior art,
An object of the present invention is to provide a light beam incident angle adjustment device that can easily adjust the angle when a light beam is incident on an optical transmission fiber through a condensing lens, thereby increasing the incidence efficiency.

[課題を解決するための手段] 上記の目的を達成できる本発明は、第1図に示すように
、ガスレーザや半導体レーザ等で発生した光ビーム10
を、集光レンズ12で集光して光伝送ファイバー14に
入射させるための入射角調整装置で、あって、集光レン
ズ120入射側に透明ロッド16を配置したものである
[Means for Solving the Problems] As shown in FIG. 1, the present invention, which can achieve the above object,
This is an incident angle adjusting device for condensing the light with a condensing lens 12 and making it incident on the optical transmission fiber 14, and a transparent rod 16 is arranged on the incident side of the condensing lens 120.

ここで透明ロッド16は、入射する光ビーム10の波長
に対して透過性を有する材料からなり、その両端面16
a、16bはそれぞれ平面で且つ互いに平行な形状であ
る。そしてこの透明ロッド16は、その端面16a、1
6bの法線方向を自由に設定できるように調整自在に保
持されている。即ちこの法線方向と光軸0−0とのなす
(頃斜角をαとすると、角度αを自由に変化できるよう
に保持されている。
Here, the transparent rod 16 is made of a material that is transparent to the wavelength of the incident light beam 10, and its both end surfaces 16
a and 16b are each flat and parallel to each other. This transparent rod 16 has its end surfaces 16a, 1
It is held adjustable so that the normal direction of 6b can be freely set. That is, if the oblique angle between this normal direction and the optical axis 0-0 is α, the angle α is held so as to be freely variable.

[作用] 光ビーム】Oに対して透明口7ド16を角度αだけ傾け
て配置すると、透明ロッド16の両端面16a、16b
は互いに平行平面であるから、出射する光ビームの主光
線は元の光ビーム10から距離δだけ離れた位置で元の
光ビーム10の主光線と平行となる。この光ビーム主光
線の位置ずれ量δは、透明ロフト16の長さをa、屈折
率をnとすると、次式で表される。
[Operation] When the transparent opening 7 and 16 are arranged at an angle α with respect to the light beam O, both end surfaces 16a and 16b of the transparent rod 16
are mutually parallel planes, so the chief ray of the emitted light beam becomes parallel to the chief ray of the original light beam 10 at a position separated by a distance δ from the original light beam 10. The amount of positional deviation δ of the principal ray of the light beam is expressed by the following equation, where a is the length of the transparent loft 16 and n is the refractive index.

、δ−=a−tan(α−5in−’(sinα/n)
) ・・・(1)この光ビームは集光レンズ12に、そ
の中心から距離δだけ離れた位置に平行に入射し、光軸
0−0上の光伝送ファイバー14の入射端面14aで焦
点を結ぶ。集光レンズ12の焦点距離を1とすると、光
伝送ファイバー14への入射角度θは次式で表される。
, δ-=a-tan(α-5in-'(sin α/n)
)...(1) This light beam enters the condensing lens 12 in parallel at a distance δ from its center, and focuses at the incident end face 14a of the optical transmission fiber 14 on the optical axis 0-0. tie. Assuming that the focal length of the condensing lens 12 is 1, the angle of incidence θ on the optical transmission fiber 14 is expressed by the following equation.

θ=sin−’ (δ/ f )        −(
2+従って上記+1i式及び(2)式から、透明ロッド
16の傾斜角αを変化させることによって、光伝送ファ
イバー14への入射角θを変化させうろことが判る。
θ=sin-'(δ/f)-(
2+ Therefore, from the +1i formula and the formula (2) above, it can be seen that by changing the inclination angle α of the transparent rod 16, the incident angle θ to the optical transmission fiber 14 can be changed.

本発明では、透明ロッド16は前記のように両端面が平
行平面をなしているから発散・収束性を持たず、且つ入
射する光ビーム10の主光線に対して出射する光ビーム
の主光線は平行となる。その平行な出射光が集光レンズ
12により集光されるため、その焦点の位置は透明ロッ
ド16の傾き角に依存せず常に光軸上の一点である。従
って光伝送ファイバー14の入射端面14aがその位置
にありさえすれば、透明ロフト16の傾斜角αを調整す
ることによって光伝送ファイバー14への入射角θが変
化し、容易に最適条件に調整することが可能となる。
In the present invention, since both end surfaces of the transparent rod 16 are parallel planes as described above, the transparent rod 16 does not have diverging or converging properties, and the principal ray of the emitted light beam is different from the principal ray of the incident light beam 10. become parallel. Since the parallel emitted light is condensed by the condenser lens 12, the position of its focal point is always at one point on the optical axis, regardless of the inclination angle of the transparent rod 16. Therefore, as long as the incident end face 14a of the optical transmission fiber 14 is at that position, the incident angle θ to the optical transmission fiber 14 can be changed by adjusting the inclination angle α of the transparent loft 16, and the angle of incidence θ to the optical transmission fiber 14 can be easily adjusted to the optimum condition. becomes possible.

[実施例] 光伝送ファイバー14への入射角θを如何に高精度で調
整できるかは、透明ロッド16の傾斜角αを如何に高精
度で調節できるかによって決まる。第2図及び第3図は
透明ロッド16の具体的な支持構造の一例を示している
[Example] How accurately the angle of incidence θ to the optical transmission fiber 14 can be adjusted depends on how accurately the inclination angle α of the transparent rod 16 can be adjusted. FIGS. 2 and 3 show an example of a specific support structure for the transparent rod 16. FIG.

透明ロッド16は全体はぼ丸棒状であり、出射側の外周
部には互いに直角な切欠き部16c。
The transparent rod 16 has a round rod shape as a whole, and has cutout portions 16c at right angles to each other on the outer periphery on the output side.

16dが形成されている。透明ロッド16は、その入射
側の端部では支点18により揺動可能に保持される。こ
の支点18は例えばジャイロスコープに類似した構造で
、出射側端部をX軸方向とY軸方向に自由度を持つよう
に保持する。
16d is formed. The transparent rod 16 is swingably held by a fulcrum 18 at its end on the incident side. This fulcrum 18 has a structure similar to, for example, a gyroscope, and holds the output side end so as to have degrees of freedom in the X-axis direction and the Y-axis direction.

透明ロッド16の出射側には調節点が設けられる。この
調節点は、切欠き部16c、16dにそれぞれ当接する
調節ネジ20a、20bと、それらの反対側に位1する
バネ22との3点支持機構である。バネ22の内部には
固定用の押さえネジ24が設けられる。
An adjustment point is provided on the exit side of the transparent rod 16. This adjustment point is a three-point support mechanism consisting of adjustment screws 20a and 20b that abut the notches 16c and 16d, respectively, and a spring 22 located on the opposite side thereof. A fixing screw 24 is provided inside the spring 22.

例えば調整ネジ20aを回転することによってそれらの
調整ネジは距離すだけ前進もしくは後退し、透明ロッド
16の端部はY軸方向にバネ22の力に抗して変化する
。これによって透明ロッド16の傾斜角αを調整でき、
調整が済んだならば押さえネジ24を回転させて透明ロ
ッド16の外周面に当接させることによってその位置で
固定できる。
For example, by rotating the adjustment screws 20a, they move forward or backward by a distance, and the end of the transparent rod 16 changes against the force of the spring 22 in the Y-axis direction. This allows the inclination angle α of the transparent rod 16 to be adjusted,
Once the adjustment is completed, the holding screw 24 can be rotated and brought into contact with the outer peripheral surface of the transparent rod 16 to fix it in that position.

さて透明口7ド16における支点18と調節点との間の
距離Cを80m5,11節点におけるネジ20a、20
bのピッチを0.5−一とし、ドライバー等で調整ネジ
の回転角を5度単位で調整できるとすると、ネジの軸方
向の分解能す。
Now, the distance C between the fulcrum 18 and the adjustment point at the transparent opening 7 door 16 is 80m5, and the screws 20a and 20 at the 11th node are
If the pitch of b is 0.5-1, and the rotation angle of the adjustment screw can be adjusted in 5 degree increments using a screwdriver, etc., then the resolution in the axial direction of the screw is:

は、 bc =0.5・ (5/360) =6. 94X10−1 (−一) となる、この分解能す、だけ調節点が変動した時の透明
ロッド16の傾斜角αは、 α(= jan−’ (b c / c )=tan−
’ (6,94X 10−”/ 80)=4.97X1
0−3(度) となる。その時、第1図における光ビームの主光線の位
置ずれ量δ、は、透明ロッド16の屈折率nを1.51
5、長さaを90Il#lとすると、δc−2.65X
10−’(Ilm) とな名、ここで第1図における光伝送ファイバー14へ
の入射角θは、集光レンズ12の焦点距離fを4.5I
とすると、次のようになる。
is bc =0.5・(5/360) =6. The inclination angle α of the transparent rod 16 when the adjustment point changes by this resolution S, which is 94X10-1 (-1), is α(=jan-' (b c / c ) = tan-
'(6,94X 10-"/80)=4.97X1
0-3 (degrees). At that time, the amount of positional deviation δ of the principal ray of the light beam in FIG.
5. If the length a is 90Il#l, δc-2.65X
10-' (Ilm), where the angle of incidence θ on the optical transmission fiber 14 in FIG.
Then, it becomes as follows.

θc =sin−’ (δc / f )−3,37X
10弓(度) この値は開口角で表すとs、ss×to−’であり、光
伝送ファイバー14の開口角0.1に対しても十分小さ
い、それ故、調整ネジによって十分精度の高い調整が可
能である。
θc = sin-' (δc/f)-3,37X
10 bow (degrees) This value is s, ss x to-' when expressed in terms of the aperture angle, and is sufficiently small even for the aperture angle of 0.1 of the optical transmission fiber 14. Therefore, it can be adjusted with a sufficiently high precision by adjusting the adjustment screw. Adjustment is possible.

以上本発明の好ましい一実施例について詳述したが、透
明ロッドが角度調節可能に保持されていれば上記のよう
な保持機構のみに限定されるものではない。実際に製作
し使用することを考えると、透明ロッドの長さは400
m5以下、集光レンズの焦点距離は11以上であること
が望ましく、上記のように支点と調節点とで支持する構
造ではそれらの間の間隔を10mm以上に設定するのが
望ましい、何れにしても、ある程度の主光線の位置ずれ
量δを生じさせるためには、透明ロッドはその両端面の
間隔が長くなければならず薄板状であってはならないこ
とになる。つまり透明ロッドとは、両端面間の距離があ
る程度大きければよく、その断面形状は円柱状に限らず
多角柱状等であってもよい。
Although a preferred embodiment of the present invention has been described in detail above, the holding mechanism is not limited to the above-described holding mechanism as long as the transparent rod is held in an adjustable angle. Considering the actual production and use, the length of the transparent rod is 400 mm.
m5 or less, the focal length of the condenser lens is preferably 11 or more, and in the structure supported by the fulcrum and adjustment point as described above, it is desirable to set the interval between them to 10 mm or more. However, in order to produce a certain amount of positional deviation δ of the principal ray, the transparent rod must have a long distance between its both end faces and must not be in the form of a thin plate. In other words, the transparent rod only needs to have a certain distance between both end faces, and its cross-sectional shape is not limited to a cylindrical shape but may be a polygonal column or the like.

[発明の効果] 本発明は上記のように集光レンズの入射側に透明ロッド
を配置し、それを端面の法線方向が調整自在となるよう
に保持したから、透明ロッドの傾斜角を調整することに
よって光伝送ファイバーの入射端面での入射角を垂直に
合わせることができ、入射効率の悪化を防止できる優れ
た効果がある。
[Effects of the Invention] As described above, the present invention arranges the transparent rod on the incident side of the condensing lens and holds it so that the normal direction of the end face can be adjusted freely. Therefore, the inclination angle of the transparent rod can be adjusted. By doing so, the angle of incidence at the input end face of the optical transmission fiber can be aligned perpendicularly, which has the excellent effect of preventing deterioration of the incidence efficiency.

本発明では透明ロッドは両端面が平面であるから発散・
収束性を持たず、しかも両端面が平行に配置されている
から入射する光ビームの主光線に対して出射する光ビー
ムの主光線は平行となり、そのため集光レンズによる焦
点の位置は常に一定となる。従って集光レンズと光伝送
ファイバーの入射端面との位置さえ正確に合わせておけ
ば、その入射端面の角度に応じて透明ロッドの傾きを調
節するだけで最大の入射光量を得るように容易に調整す
ることができる。
In the present invention, since both end surfaces of the transparent rod are flat, they can emit light and
Since it has no convergence and both end faces are arranged in parallel, the principal ray of the outgoing light beam is parallel to the principal ray of the incident light beam, so the position of the focal point by the condenser lens is always constant. Become. Therefore, as long as the position of the condensing lens and the input end face of the optical transmission fiber is precisely aligned, the maximum amount of incident light can be easily adjusted by simply adjusting the inclination of the transparent rod according to the angle of the input end face. can do.

特に実施例で示したように一方の端部では支点により揺
動可能に保持し、他方の端部では光軸に直角な2軸方向
で調整ネジにより位置調整可能な3点支持機構を採用す
ると、ネジの微小な進退によって透明ロッドの傾斜角を
調整できるから、光伝送ファイバーでの受光光量を測定
しつつ調整ネジを回転させて最大光量が得られるように
調整すればよく、調整に特別な技術が要らず未熟練者で
あっても容易に且つ迅速に入射角を調整できる効果があ
る。
In particular, as shown in the example, if a three-point support mechanism is adopted in which one end is swingably held by a fulcrum, and the other end is position-adjustable in two axes perpendicular to the optical axis using adjustment screws. The inclination angle of the transparent rod can be adjusted by moving the screw back and forth minutely, so all you have to do is measure the amount of light received by the optical transmission fiber and rotate the adjustment screw to obtain the maximum amount of light. This has the effect that even an unskilled person can easily and quickly adjust the angle of incidence without requiring any skill.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る光ビームの入射角調整装置の基本
的な構成を示す説明図、第2図はその透明ロッドの支持
構造の一例を示す側面図、第3図はその正面図、第4図
は従来技術を示す説明図である。 10・・・光ビーム、12・・・集光レンズ、14・・
・光伝送ファイバー、16・・・透明ロッド、18・・
・支点、20a、20b・・・調整ネジ、22・・・ス
プリング。 特許出願人  日本板硝子株式会社
FIG. 1 is an explanatory diagram showing the basic configuration of a light beam incident angle adjusting device according to the present invention, FIG. 2 is a side view showing an example of the support structure of the transparent rod, and FIG. 3 is a front view thereof. FIG. 4 is an explanatory diagram showing the prior art. 10... Light beam, 12... Condensing lens, 14...
・Optical transmission fiber, 16...Transparent rod, 18...
-Fully point, 20a, 20b...adjustment screw, 22...spring. Patent applicant Nippon Sheet Glass Co., Ltd.

Claims (1)

【特許請求の範囲】 1、光ビームを光伝送ファイバーに集光レンズを通して
入射させるための装置であって、集光レンズの入射側に
透明ロッドが配置され、該透明ロッドは両端面が平行平
面をなし且つその端面の法線方向が調整自在となるよう
に保持されていることを特徴とする光ビームの入射角調
整装置。 2、透明ロッドはその一方の端部では支点により揺動可
能に保持され、他方の端部では光軸に直角な2方向で調
整可能な3点支持機構で支持されている請求項1記載の
光ビームの入射角調整装置。
[Claims] 1. A device for making a light beam enter an optical transmission fiber through a condensing lens, in which a transparent rod is arranged on the incident side of the condensing lens, and both end surfaces of the transparent rod are parallel planes. What is claimed is: 1. An incident angle adjusting device for a light beam, characterized in that the device is held so that the normal direction of its end face can be freely adjusted. 2. The transparent rod according to claim 1, wherein one end of the transparent rod is swingably held by a fulcrum, and the other end is supported by a three-point support mechanism adjustable in two directions perpendicular to the optical axis. Light beam incident angle adjustment device.
JP15298288A 1988-06-21 1988-06-21 Device for adjusting incident angle of light beam Pending JPH01319709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15298288A JPH01319709A (en) 1988-06-21 1988-06-21 Device for adjusting incident angle of light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15298288A JPH01319709A (en) 1988-06-21 1988-06-21 Device for adjusting incident angle of light beam

Publications (1)

Publication Number Publication Date
JPH01319709A true JPH01319709A (en) 1989-12-26

Family

ID=15552378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15298288A Pending JPH01319709A (en) 1988-06-21 1988-06-21 Device for adjusting incident angle of light beam

Country Status (1)

Country Link
JP (1) JPH01319709A (en)

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