JPH01308174A - Rotary driven actuator - Google Patents
Rotary driven actuatorInfo
- Publication number
- JPH01308174A JPH01308174A JP63136319A JP13631988A JPH01308174A JP H01308174 A JPH01308174 A JP H01308174A JP 63136319 A JP63136319 A JP 63136319A JP 13631988 A JP13631988 A JP 13631988A JP H01308174 A JPH01308174 A JP H01308174A
- Authority
- JP
- Japan
- Prior art keywords
- shaped elastic
- piezoelectric elements
- rotor
- piezoelectric element
- circumferential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は圧電素子を利用した回転駆動アクチュエータ
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a rotary drive actuator using a piezoelectric element.
第9図(&)は例えは特開昭60−20’/’75号公
報に示された、従来の圧電素子を用いた回転駆動アクチ
ュエータの部分断面図、第9図(b)は第9図(a)の
IX (b) −IX Cb’)線断面図であり、図に
おいて、(1)はケーシング、(2)は軸体、(3)は
軸受、(4)は圧電体である。また、第10図は従来の
回転駆動アクチュエータの駆動状態を示す構成図であり
、図において、(4A)は移動部、(5A) 、 (5
B) # (6A) l (6B)は電極、(7) +
(8)は電源である。FIG. 9(&) is a partial sectional view of a rotary drive actuator using a conventional piezoelectric element, as shown in Japanese Unexamined Patent Publication No. 60-20'/'75, and FIG. This is a cross-sectional view taken along line IX (b) - IX Cb') in figure (a), and in the figure, (1) is the casing, (2) is the shaft, (3) is the bearing, and (4) is the piezoelectric body. . Moreover, FIG. 10 is a configuration diagram showing the driving state of a conventional rotary drive actuator, and in the figure, (4A) is a moving part, (5A), (5
B) # (6A) l (6B) is the electrode, (7) +
(8) is a power source.
次に動作について説明する。第10図の矢印(A)で示
すように、圧電体(4)は分極処理されている。Next, the operation will be explained. As shown by the arrow (A) in FIG. 10, the piezoelectric body (4) is polarized.
この圧電体(4)の分極(A)と直角な対向表面および
分極(A)と平行な対向表面には、それぞれ対の電極(
5A) 、 (5B)および(6A) 、 (6B)が
設けられている。A pair of electrodes (
5A), (5B) and (6A), (6B) are provided.
電源(7)によって正弦波の電圧を電極(5A) 、
(5B)に印加すると分極(A)方向と同方向の振動モ
ードを生じる。また電源(8)によって正弦波の電圧を
電極(6A) 、 (6B)に印加すると分極(A)と
直交方向の振動モードを生じる。したがって等周波数で
90度位相差を有する正弦波の電圧をそれぞれ電極(5
A)。A sinusoidal voltage is applied to the electrode (5A) by the power supply (7),
(5B) produces a vibration mode in the same direction as the polarization (A) direction. Further, when a sinusoidal voltage is applied to the electrodes (6A) and (6B) by the power source (8), a vibration mode in a direction orthogonal to the polarization (A) is generated. Therefore, a sinusoidal voltage with equal frequency and a 90 degree phase difference is applied to each electrode (5
A).
(5B)および(6A) ? (6B)に印加すると圧
電体(4)の移動部(4A)は第10図の矢印(E)で
示すだ円の周回軌跡を描く。そして、移動部(4A)は
だ円の周回軌跡運動の上部でケーシング(1)の内面に
接触し回転駆動力を生じる。(5B) and (6A)? (6B) causes the moving part (4A) of the piezoelectric body (4) to draw an elliptical orbit shown by the arrow (E) in FIG. Then, the moving part (4A) contacts the inner surface of the casing (1) at the upper part of the elliptical orbital movement and generates a rotational driving force.
従来の圧電素子を用いた回転駆動アクチュエータは以上
のように構成されているので、高々数μm程度の圧電素
子の変位をそのまま利用しているため、各構成要素の加
工精度を非常に高くする必要があるとともに湿度変化に
よる熱膨張、熱収縮により駆動が困難になるなど実用的
な構成とは言い難いという問題点があった。Conventional rotary drive actuators using piezoelectric elements are configured as described above, and since the displacement of the piezoelectric element of several μm at most is directly utilized, the processing accuracy of each component must be extremely high. In addition, there were problems in that it was difficult to drive due to thermal expansion and contraction due to changes in humidity, making it difficult to say that it was a practical configuration.
この発明は上記のような課題を解消するために々された
もので、各構成要素の加工精度をそれ程高くする必要が
無く、熱膨張々ど温度変化の影響も少ない実用的々構成
の回転駆動アクチュエータを得ることを目的とする。This invention was developed to solve the above-mentioned problems, and it is a rotary drive with a practical configuration that does not require high machining accuracy of each component and is less affected by thermal expansion and temperature changes. The purpose is to obtain an actuator.
この発明に係る回転駆動アクチュエータは、軸方向圧電
素子の変位および周方向圧電素子の変位を帯状弾性体に
より拡大してロータに伝達して駆動を行なうものである
。The rotational drive actuator according to the present invention magnifies the displacement of the axial piezoelectric element and the circumferential piezoelectric element using a band-shaped elastic body, and transmits the expanded displacement to the rotor to drive the rotor.
圧電素子の変位は帯状弾性体により拡大されて駆動接触
部の変位となる0
〔実施例〕
以下、この発明の実施例を図について説明する。The displacement of the piezoelectric element is magnified by the band-shaped elastic body and becomes the displacement of the driving contact portion. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第1図はこの発明の一実施例の回転駆動アクチュエータ
ーの一部切欠き斜視図であシ、図において、αpはロー
タ、(6)はステータ、(138L)は第1の軸方向圧
電素子、(14−)は第1の周方向圧電素子であシ、第
1の帯状弾性体(15−)と接続している。(13b
)は第2の軸方向圧電素子、(14b)は第2の周方向
圧電素子であり、第2の帯状弾性体(15b)と接続し
ている。(至)は軸受、071は軸、(至)は支持板、
(19−)は第1の帯状弾性体(15−)上の駆動接触
部、(,9b)は第2の帯状弾性体(15b)上の駆動
接触部である。FIG. 1 is a partially cutaway perspective view of a rotary drive actuator according to an embodiment of the present invention. In the figure, αp is a rotor, (6) is a stator, (138L) is a first axial piezoelectric element, (14-) is a first circumferential piezoelectric element, which is connected to the first elastic band (15-). (13b
) is a second axial piezoelectric element, (14b) is a second circumferential piezoelectric element, and is connected to the second band-shaped elastic body (15b). (to) is the bearing, 071 is the shaft, (to) is the support plate,
(19-) is a driving contact portion on the first elastic band (15-), and (, 9b) is a driving contact portion on the second elastic band (15b).
次に動作について説明する。第2図の、この発明の一実
施例の回転駆動アクチュエーターのf’+4+状態を示
す構成図に示すように、軸方向圧電素子(13a) 、
(13b)は帯状弾性体(15a) 、 (15b)
と接続しており、軸方向圧電素子(13a) 、 (1
sb)の変位は拡大されて、帯状弾性体(15−) 、
(15b)の駆動接触部(19a) 、 (19b)
における変位となる。軸方向圧電素子(131L) 、
(1sb)が伸長すると帯状弾性体(15a) 、
(15b)はロータ01)と離れる方向に移動し、軸方
向圧電素子(13a) 、 (13b)が縮長すると帯
状弾性体(15a) 、 (15b)はロータ(社)に
近づく方向に移動する。周方向圧電素子(14−) 、
(14b)は第3図の、この発明の一実施例の回転駆
動アクチュエーターの作動状態を示す構成図に示すよう
に帯状弾性体(15a) 、 (lδb)と接続してお
り、周方向圧電素子(14a) 、 (14b)の変位
は拡大されて、駆動接触部(19a) 、 (19b)
における変位となる。Next, the operation will be explained. As shown in the configuration diagram in FIG. 2 showing the f'+4+ state of the rotary drive actuator according to an embodiment of the present invention, an axial piezoelectric element (13a),
(13b) is a band-shaped elastic body (15a), (15b)
The axial piezoelectric elements (13a), (1
The displacement of sb) is expanded, and the elastic band (15-)
(15b) drive contact parts (19a), (19b)
The displacement is . Axial piezoelectric element (131L),
(1sb) expands, the band-shaped elastic body (15a),
(15b) moves in the direction away from the rotor 01), and when the axial piezoelectric elements (13a) and (13b) contract, the band-shaped elastic bodies (15a) and (15b) move in the direction closer to the rotor (sha). . Circumferential piezoelectric element (14-),
(14b) is connected to the band-shaped elastic bodies (15a) and (lδb) as shown in the configuration diagram of FIG. The displacements of (14a) and (14b) are magnified and drive contact parts (19a) and (19b)
The displacement is .
周方向圧電素子(14a) 、 (14−’b)が伸長
・縮長すると駆動接触部(19a) 、 (19b)は
ロータ(11)の周方向に移動する。軸方向圧電素子(
lj5a) 、 (13b)と周方向圧電素子(14a
) 、 (14b)の駆動周波数を等しくし駆動を行い
、ロータ(社)を回転させる。When the circumferential piezoelectric elements (14a) and (14-'b) expand and contract, the driving contact portions (19a) and (19b) move in the circumferential direction of the rotor (11). Axial piezoelectric element (
lj5a), (13b) and circumferential piezoelectric element (14a
) and (14b) are made equal in driving frequency to rotate the rotor.
次に、第4図はこの発明の他の実施例の回転駆動アクチ
ュエーターの一部切欠き斜視図であシ、α9は軸方向圧
電素子、041は周方向圧電素子、αGは帯状弾性体、
α0は帯状弾性体上の駆動接触部である。第5図(a)
(b)は各々この発明の他の実施例の回転駆動アクチ
ュエーターに係わる帯状弾性体の正面図および側面図で
あシ、帯状弾性体が厚み方向が直交する薄板を組み合わ
せた構造となっておシ、第5図の例では一体で製作され
ている。第1図に示した例と同様に、軸方向圧電素子0
3を変位させると帯状弾性体QI3はロータ(11)と
近づく方向あるいは離れる方向に移動する。まだ、周方
向圧電素子(14)により駆動トルクを発生させるのも
第1図に示した例と同様である。第4図の例では、帯状
弾性体(至)が第5図に示すような形状であるため、周
方向圧電素子α舶を系の共振周波数かあるいは共振周波
数に近い周波数で駆動すると帯状弾性体(2)の駆動接
触部αIは大きな変位を生じ、ロータ01)の高速回転
が可能となる。周方向圧電素子α4を系の共振周波数か
ら離して駆動すると高精度にロータ0が回転可能となり
、高精度に位置決めが可能となる。Next, FIG. 4 is a partially cutaway perspective view of a rotary drive actuator according to another embodiment of the present invention, α9 is an axial piezoelectric element, 041 is a circumferential piezoelectric element, αG is a band-shaped elastic body,
α0 is a driving contact portion on the elastic band. Figure 5(a)
(b) is a front view and a side view of a band-shaped elastic body related to a rotary drive actuator according to another embodiment of the present invention, respectively. , in the example shown in FIG. 5, they are manufactured in one piece. Similar to the example shown in FIG. 1, the axial piezoelectric element 0
When QI3 is displaced, the elastic band QI3 moves toward or away from the rotor (11). However, the driving torque is generated by the circumferential piezoelectric element (14) in the same manner as in the example shown in FIG. 1. In the example shown in Fig. 4, the band-shaped elastic body has a shape as shown in Fig. 5, so when the circumferential piezoelectric element α is driven at the resonance frequency of the system or at a frequency close to the resonance frequency, the band-shaped elastic body The drive contact portion αI (2) produces a large displacement, allowing the rotor 01) to rotate at high speed. If the circumferential piezoelectric element α4 is driven away from the resonance frequency of the system, the rotor 0 can be rotated with high accuracy, and positioning can be performed with high accuracy.
なお、以上の実施例において、帯状弾性体を第6図のこ
の発明の実施例の回転駆動アクチュエーターに係わる帯
状弾性体の斜視図のように先端で分離し、駆動接触部α
9を複数設けても良い。また圧電素子の数は実施例と異
っても良い。たとえば第1図の例では第7図のこの発明
の実施例の回転駆動アクチュエーターに係わる圧電素子
と帯状弾性体の構成図のように構成しても良い。第4図
の例では第8図のこの発明の実施例の回転駆動アクチュ
エーターに係わる圧電素子と帯状弾性体の構成図のよう
に構成しても良い0
〔発明の効果〕
以上のように、この発明は軸方向圧電素子の変位および
周方向の圧電素子の変位を帯状弾性体により拡大してロ
ータに伝達して駆動を行なうものを用いることにより、
各構成要素の加工精度をそれ程高くする必要が無く、温
度変化があっても駆動がスムーズであシ、実用的な回転
駆動アクチュエーターが得られる回転駆動アクチュエー
ターを得ることができる0In the above embodiment, the band-shaped elastic body is separated at its tip as shown in the perspective view of the band-shaped elastic body related to the rotary drive actuator of the embodiment of the present invention in FIG.
A plurality of 9 may be provided. Further, the number of piezoelectric elements may be different from the embodiment. For example, the example shown in FIG. 1 may be configured as shown in FIG. 7, which is a configuration diagram of a piezoelectric element and a band-shaped elastic body related to a rotary drive actuator according to an embodiment of the present invention. The example shown in FIG. 4 may be configured as shown in FIG. 8, which is a configuration diagram of a piezoelectric element and a band-shaped elastic body related to a rotary drive actuator according to an embodiment of the present invention. The invention uses a belt-shaped elastic body to magnify the displacement of the piezoelectric element in the axial direction and the displacement of the piezoelectric element in the circumferential direction, and transmits it to the rotor to drive the rotor.
It is possible to obtain a rotary drive actuator that does not require high machining accuracy of each component, has smooth drive even under temperature changes, and can provide a practical rotary drive actuator.
第1図はこの発明の一実施例の回転駆動アクチュエータ
ーの一部切欠き斜視図、第2図および第3図は各々この
発明の一実施例の回転駆動アクチュエーターの作動状態
を示す構成図、第4図はこの発明の他の実施例の回転駆
動アクチュエーターの一部切欠き斜視図、第5図(a)
(b)は各々この発明の他の実施例の回転駆動アクチュ
エーターに係わる帯状弾性体の正面図および側面図、第
6図はこの発明の実施例の回転駆動アクチュエーターに
係わる帯状弾性体の斜視図、第7図および第8図はこの
発明の実施例の回転駆動アクチュエーターに係わる圧電
素子と帯状弾性体の構成図、第9図(a)は従来の回転
駆動アクチュエーターの部分断面図、第9図(b)は第
9図(、)のIX(b)−■(b)線断面図、第10図
は従来の回転駆動アクチュエーターの駆動状態を示す構
成図である。
図において、0℃はロータ、(至)、 (13a) 、
(1,3b)は軸方向圧電素子、σ411 (141
L) + (14b)は周方向圧電素子、QI191
(15a) + (15b)は帯状弾性体。
なお、図中、同一符号は同一、又は相当部分を示す。FIG. 1 is a partially cutaway perspective view of a rotary drive actuator according to an embodiment of the present invention, and FIGS. 4 is a partially cutaway perspective view of a rotary drive actuator according to another embodiment of the present invention, and FIG. 5(a)
(b) is a front view and a side view of a band-shaped elastic body related to a rotary drive actuator according to another embodiment of the present invention, and FIG. 6 is a perspective view of a band-shaped elastic body related to a rotation drive actuator according to an embodiment of the present invention. 7 and 8 are configuration diagrams of a piezoelectric element and a band-shaped elastic body related to a rotary drive actuator according to an embodiment of the present invention, FIG. 9(a) is a partial sectional view of a conventional rotary drive actuator, and FIG. b) is a sectional view taken along line IX(b)--(b) in FIG. 9(,), and FIG. 10 is a configuration diagram showing the driving state of a conventional rotary drive actuator. In the figure, 0°C is the rotor, (to), (13a),
(1, 3b) is an axial piezoelectric element, σ411 (141
L) + (14b) is a circumferential piezoelectric element, QI191
(15a) + (15b) is a band-shaped elastic body. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
状弾性体により拡大してロータに伝達し駆動を行う回転
駆動アクチュエータ。A rotary drive actuator that magnifies the displacement of an axial piezoelectric element and the circumferential piezoelectric element using a band-shaped elastic body, and transmits the amplified displacement to a rotor to drive the rotor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63136319A JPH01308174A (en) | 1988-06-02 | 1988-06-02 | Rotary driven actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63136319A JPH01308174A (en) | 1988-06-02 | 1988-06-02 | Rotary driven actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01308174A true JPH01308174A (en) | 1989-12-12 |
Family
ID=15172441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63136319A Pending JPH01308174A (en) | 1988-06-02 | 1988-06-02 | Rotary driven actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01308174A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002097905A3 (en) * | 2001-06-01 | 2003-10-16 | Pbt Ip Ltd | A rotary actuator mechanism |
CN112713803A (en) * | 2020-12-11 | 2021-04-27 | 南京航空航天大学 | Macro-micro combined piezoelectric driving rotary actuator and working method thereof |
-
1988
- 1988-06-02 JP JP63136319A patent/JPH01308174A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002097905A3 (en) * | 2001-06-01 | 2003-10-16 | Pbt Ip Ltd | A rotary actuator mechanism |
CN112713803A (en) * | 2020-12-11 | 2021-04-27 | 南京航空航天大学 | Macro-micro combined piezoelectric driving rotary actuator and working method thereof |
CN112713803B (en) * | 2020-12-11 | 2021-11-05 | 南京航空航天大学 | Macro-micro combined piezoelectric driving rotary actuator and working method thereof |
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