JPH01308093A - Thick film circuit lithography device - Google Patents

Abstract

PURPOSE:To accurately conduct the measurement of a height of the surface of a material to be coated and the vertical movements of a nozzle in a real time by measuring the height of the surface of the material directly under a position isolated at a predetermined distance from the nozzle forward of the reactive movement of the nozzle for discharging thick film paste by a sensor, storing its sensor information to a shift register at each predetermined time, and shifting it. CONSTITUTION:The height from the surface of a material 3 to be coated directly under a sensor 5 disposed at a predetermined distance from a nozzle 2 forward of the relative movement of the nozzle 2 for discharging thick film paste 1 is measured by the sensor 5 to measure the height of the surface of the material 3 directly thereunder. Its sensor information is stored in a shift register 7 through a sensor information line 6 at each predetermined time, and shifted. Since the sensor 5 is always preceded on the moving passage of the nozzle 2, the stored sensor information is output at the time delay in which the nozzle 2 is arrived at the measured distance position of the sensor 5, and used as the height information of the surface of the material 3 directly under the nozzle 2. A height information selector 9 calculates the delay time, and selects the height information through a shift register information line 8.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thick film circuit drawing apparatus used for manufacturing thick film circuits for electronic equipment.

Conventional technology In recent years, thick film circuit writing equipment has developed a completely non-contact system that maintains the gap between the nozzle and the surface of the workpiece without using contact pieces or paste back pressure, in order to respond to the increasing density and multifunctionality of thick film circuits. The contact method has been emphasized.

Hereinafter, the conventional thick film circuit drawing apparatus as described above will be explained with reference to FIG.

In FIG. 4, 1 is a thick film paste, 2 is a nozzle that discharges the thick film paste 1, 3 is an object to be coated, 4 is a moving tape that moves the object to be coated 3, and 6 is a moving tape that moves the object to be coated 30. 6 is an information line that transmits information from the sensor 6; 10 is an information line that transmits information regarding the height of the surface of the object 3 directly below the nozzle 2; 11 is the information line of the nozzle 2; 12 is an information line that transmits information from the nozzle drive control unit 11; 13 is a nozzle drive unit that moves the nozzle 2 up and down based on information sent through the nozzle information line 12; 17 is a nozzle drive control unit that controls vertical movement; Sensor 6 and nozzle drive unit 13
14 is a microcomputer, and 21 is a memory.

The operation of the thick film circuit drawing apparatus configured as described above will be described below.

First, the object 3 to be coated is moved below the sensor 5 by the moving table 4. Then, the sensor 5 measures the height of any one point on the surface of the object 3 to be coated. The measured sensor information is stored in the memory 21 by the microcomputer 14 through the information line 6. Further, by repeating the above operations while moving the object 3 to be coated using the moving tape /I/4, sensor information on the entire surface of the object 3 to be coated is stored in the memory 21 as two-dimensional information. Next, the object 3 to be coated is moved below the nozzle 2 by the moving tape μ4. Then, the current height of the surface of the object 3 directly under the nozzle 2 is calculated by the microcomputer 14 using two-dimensional information stored in the memory 21 in advance. The calculated height information of the surface of the object 3 directly below the nozzle V2 is sent to the nozzle drive control section 11 through the information line 1o. The nozzle drive control section 11 generates nozzle drive control information based on the sent height information so as to keep the gap between the tip of the nozzle 2 and the direct surface of the object 3 constant. The nozzle drive control information is then sent to the nozzle drive section 13 through the information line 12, thereby moving the nozzle /I/2 up and down. Simultaneously with the above vertical movement of the nozzle, the object to be coated 3 is moved by the moving table 4, and the thick film paste 1 is transferred to the nozzle 2.
A thick film circuit is drawn on the surface of the object to be coated 3 by discharging it from the tip.

Problems to be Solved by the Invention However, with the above configuration, it is necessary to take time to measure the height of the entire object to be coated in advance, which reduces the manufacturing speed of thick film circuits. In addition, due to the manufacturing speed and the limit on the number of height measurement points on the surface of the object to be coated due to the capacity of the memory in which sensor information is stored,
There was a limit to the accuracy of height information on the surface of the object to be coated directly below the nozzle.

In addition, it is necessary to process the two-dimensional information stored in the memory and calculate the height information of the surface of the object directly under the nozzle.
The processing was complex and difficult to implement in hardware. Furthermore, when drawing is performed over a thick film that has been drawn once, it is necessary to measure the height and draw again, which has the problem of complicating the manufacturing process.

In view of the above-mentioned problems, the present invention is capable of measuring the height of the surface of the object to be coated and moving the nozzle up and down in real time and with high accuracy using a simple configuration and processing, and also enables overlapping drawing in a single process. The purpose is to provide a device.

Means for Solving the Problems To achieve this object, the thick film circuit drawing apparatus of the present invention includes a nozzle for discharging thick film paste, and a nozzle located directly below the nozzle at a certain distance forward in the direction of relative movement. A sensor that measures the height of the surface of the object to be coated, a shift register that saves and shifts sensor information measured by the sensor at regular intervals, and information on the height of the surface of the object directly below the nozzle. a height information selection section that selects from the shift register, and a vertical movement control of the nozzle so as to keep the gap between the nozzle tip and the surface of the object to be coated constant based on the height information selected by the height information selection section. The apparatus is characterized by comprising a nozzle drive control section and a nozzle drive section that moves the nozzle up and down based on nozzle drive information generated by the nozzle drive control section.

Operation The present invention, with the above configuration, makes it possible to measure the height of the surface of the object to be coated and to move the nozzle up and down in real time and with high accuracy with a simple configuration and processing.

In other words, a sensor measures the height of the surface of the object to be coated at a certain distance from the nozzle in front of the nozzle in the relative movement direction of the nozzle that discharges the thick film paste, and the sensor information is transferred to a shift register at regular intervals. evacuate and shift. Since the sensor is always ahead of the nozzle on its travel path, the evacuated sensor information is retrieved after the nozzle reaches the sensor's distance measurement position, and is used as information on the height of the surface of the workpiece directly below the nozzle. used as Here, the height information selection section calculates the delay time and selects height information from the shift register. Then, based on the selected height information, the nozzle is moved up and down so that the gap between the nozzle tip and the surface of the object to be coated is kept constant.

By repeating the above operations at high speed, distance measurement of the height of the surface of the object to be coated and vertical movement of the nozzle can be performed in real time. Furthermore, since it is only necessary to store sensor information between the sensor of the nozzle movement radius lh and the nozzle, it is possible to have sensor information at a much higher density, thereby making it possible to move the nozzle up and down with high precision. Furthermore, since the sensor constantly measures the height of the surface of the object to be coated in front of the nozzle, overlapping drawing can be performed in a single process.

EXAMPLES Hereinafter, examples of the present invention will be described with reference to FIGS. 1 to 3.

In FIG. 1, 7 is a shift register that saves and shifts sensor information at regular intervals, 8 is a shift register information line, and 9 is a shift register 7 that stores height information of the surface of the object 3 directly below the nozzle 2. Height information selection section to select from 1
6 is a command information line to the shift register 7, and 16 is a command information line to the height information selection section 9. 1 is thick film paste, 4
is a moving table, 5 is a sensor, 6 is a sensor information line, 1° is a height information line, 11 is a nozzle drive control unit, 12 is 717
g motion control line, 13 is nozzle drive unit, 14 is microcomputer, 1
7 is a fixed part.

The operation of the thick film circuit drawing apparatus configured as described above will be described below with reference to FIGS. 1 and 2. First, the sensor 5, which is located a certain distance ahead of the nozzle 2 in the relative movement direction of the nozzle 2 that discharges the thick film paste 1, evacuates and shifts the thick film paste 1 to a position 7 directly below the nozzle 2. Since the sensor 5 is always ahead of the nozzle IL/2 on the movement path, the evacuated sensor information is taken out after the time delay when the nozzle 2 reaches the distance measurement position of the sensor 5, and is sent to the object immediately below the nozzle 2. It is used as height information of the surface of the coating material 3. The height information selection section 9 calculates the delay time and selects the height information through the shift register 7 and the shift register information line 8.

Here, the calculation process of the delay time will be explained. Second
The figure shows the positional relationship between the nozzle 2 and the sensor 6.

As shown in the figure, if the distance between nozzle JV2 and sensor 6 is a1 nozzle) and the moving speed of V2 is v (x), nozzle 2
The time t required to move from X=-a to X=O is given by the following equation.

”=f(1/v(z))dx a Therefore, if the time interval for shifting sensor information is T, then
The height information to be selected in the shift register 7 is in the Nth register shown by the following equation.

N=('/T), J" (1/v(x))dxa Also, when the moving speed v (x) is a constant value V, the following formula is obtained. N=a/Tv was selected as above. The height information is sent to the nozzle drive control section 11 through the height information line 1o.

The nozzle drive control section 11 generates nozzle drive control information to keep the gap between the tip of the nozzle 2 and the surface of the object 3 constant based on the sent height information. The nozzle drive control information is then sent to the nozzle drive section 13 through the nozzle drive control information line 12, thereby moving the nozzle 2 up and down. Simultaneously with the above vertical movement of the nozzle, the object 3 to be coated is moved by the moving table 4, and the thick film paste 1 is discharged from the tip of the nozzle 2, thereby drawing a thick film circuit on the surface of the object 3 to be coated.

Furthermore, the operations of the sensor 5 and the moving table 4 will be explained. FIG. 3 shows the configuration of the nozzle 2, the moving tape V4, and the sensor 6. As shown in the figure, an XY chi 7") V4a is used to move the object 3 to be coated. Then, in order to always position the sensor 5 in front of the relative movement direction of the nozzle 2, the sensor 5 is moved by the sensor rotation unit 20. Here, the rotation of the motor 18 is transmitted to the sensor rotating section 20 through the rotation transmission gear 19.

As described above, according to the present embodiment, distance measurement of the height of the surface of the object to be coated 3 and vertical movement of the nozzle/I/2 can be performed in real time and with high precision using a simple configuration and processing. That is, the height of the surface of the object 3 to be coated directly below is measured by the sensor 6 located a certain distance away from the nozzle /I/2 in the relative movement direction of the nozzle /I/2 that discharges the thick film paste 1. The distance is measured and the sensor information is sent to the shift register 7 at regular intervals.
evacuate to. Since the sensor 5 is always ahead of the nozzle lV2 on the movement path, the evacuated sensor information is transferred to the nozzle 2.
is taken out after a delay in reaching the ranging position of sensor 6,
This is used as height information of the surface of the object 3 directly under the nozzle 2. Here, the height information selection section 9 calculates the delay time and selects the height information from the shift register 7. Then, based on the selected height information, the nozzle/I/2 is moved up and down so that the gap between the tip of the nozzle/I/2 and the surface of the object 3 to be coated is kept constant.

By repeating the above operations at high speed, distance measurement of the height of the surface of the object to be coated 3 and vertical movement of the nozzle/I/2 can be performed in real time. Moreover, since it is only necessary to save the sensor information between the sensor 6 and the nozzle 2 on the movement path of the nozzle (V2), it is possible to have sensor information at a higher density, which makes it possible to move the nozzle up and down with high precision. . Further, by constantly measuring the height of the surface of the object 3 immediately in front of the nozzle/I/2 by the sensor 6, overlapping drawing can be performed in a single process.

Effects of the Invention As described above, the present invention can measure the height of the surface of the object to be coated and move the nozzle up and down in real time and with high precision using a simple configuration and processing. Moreover, since it is only necessary to store sensor information between the sensors on the nozzle's movement path and the nozzle, it is possible to have sensor information at a much higher density, thereby making it possible to move the nozzle up and down with high precision. Also,
The sensor constantly measures the height of the surface of the object to be coated in front of the nozzle, making it possible to perform overlapping drawings in a single process, which has great practical effects.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram of a thick film circuit drawing apparatus according to an embodiment of the present invention, FIG. 2 is a state diagram showing the positional relationship between a nozzle and a sensor, FIG. 3 is a configuration diagram of a nozzle, a moving table, and a sensor, and FIG. FIG. 4 is a configuration diagram of a conventional thick film circuit drawing apparatus. 2...nozzle, 6...sensor, 7...
φ...Shift register, 9...Height information selection unit, 11...Nozzle drive control unit, 13...
...Nozzle drive unit. Name of agent: Patent attorney Toshio Nakao and 1 other person +-
41E2;C. 2---Nos.

Claims (1)

[Claims] A nozzle that discharges thick film paste, a sensor that measures the height of the surface of the object to be coated directly below the nozzle at a certain distance forward in a relative movement direction, and sensor information that is measured by the sensor. a shift register that is retracted and shifted at regular intervals; a height information selection unit that selects height information of the surface of the object directly under the nozzle from the shift register; a nozzle drive control unit that controls the vertical movement of the nozzle so as to maintain a constant gap between the tip of the nozzle and the surface of the object to be coated based on the information; and a nozzle drive control unit that moves the nozzle up and down based on the nozzle drive information generated by the nozzle drive control unit. A thick film circuit drawing device equipped with a nozzle drive unit.