JPH01307637A - Method for preventing air bubbles in the sample cooling device - Google Patents
Method for preventing air bubbles in the sample cooling deviceInfo
- Publication number
- JPH01307637A JPH01307637A JP13790388A JP13790388A JPH01307637A JP H01307637 A JPH01307637 A JP H01307637A JP 13790388 A JP13790388 A JP 13790388A JP 13790388 A JP13790388 A JP 13790388A JP H01307637 A JPH01307637 A JP H01307637A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cooling device
- cooling medium
- air bubbles
- bubbles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001073 sample cooling Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 title claims description 9
- 239000002826 coolant Substances 0.000 claims description 18
- 238000009835 boiling Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、半導体ウェハなどの光学特性を低温で測定す
る試料測定装置内において、気泡の発生するのを防止す
る方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for preventing the generation of bubbles in a sample measuring device that measures optical properties of semiconductor wafers and the like at low temperatures.
［従来の技術］
半導体のウェハなどのような極低温測定領域での光学的
特性を計測する必要があるものは、試料を液体窒素など
の冷却媒体に浸漬する方法があるが、従来の冷却装置を
第２図に示して説明する。[Prior art] For items such as semiconductor wafers that need to measure optical characteristics in a cryogenic measurement area, there is a method of immersing the sample in a cooling medium such as liquid nitrogen, but conventional cooling equipment will be explained with reference to FIG.
液体窒素などの冷却媒体３が充填された内側容器２との
間に真空空間４を保って、この内側容器２を包囲する外
側容器５が一体的に設けられている。An outer container 5 is integrally provided to surround the inner container 2 while maintaining a vacuum space 4 between the inner container 2 and the inner container 2 filled with a cooling medium 3 such as liquid nitrogen.
内側容器２中に挿入されている試料操作捧１０によって
試料１は上下、左右に移動させることが出来る。The sample 1 can be moved vertically and horizontally by a sample handling shaft 10 inserted into the inner container 2.
なお、試料操作棒１０は断熱性の高い断熱上蓋１１と当
該試料操作棒１０の支持板１２とを貫通する。Note that the sample manipulation rod 10 passes through the heat insulating upper lid 11 with high heat insulation properties and the support plate 12 of the sample manipulation rod 10 .
内側容器２．および外側容器５にはそれぞれ７．８，６
．９の窓が設けられていて測定光りは窓６，７．試料１
．窓８，９とを透過し、これによって試料１の光学的特
性を調べることが出来るようになっている。Inner container 2. and 7.8 and 6 for outer container 5, respectively.
．． There are 9 windows, and the measurement light is from windows 6, 7. Sample 1
．． The light passes through the windows 8 and 9, thereby making it possible to examine the optical characteristics of the sample 1.
［発明が解決しようとする課題］
上述の従来の装置では試料を液化ガスの中に浸漬する方
法で試料を冷却していたために、液化ガスが気化すると
きに発生する気泡が測定用光線を妨害して、光学的測定
が困戴であった。[Problems to be Solved by the Invention] In the conventional apparatus described above, the sample was cooled by immersing it in liquefied gas, so the bubbles generated when the liquefied gas vaporized interfered with the measurement light beam. Therefore, optical measurement was difficult.
それで、液化ガス中に浸漬しない方法として、冷却ガス
で冷却した金属棒を伝達体として、試料を間接的に冷却
する方法が、気泡の妨害を受けない方法として用いられ
ていたが、試料の冷却が不均一で、冷却速度が遅いとい
う欠点があった・
従って、本発明の目的は、第２図に示したような装置に
おいて、気泡の発生を防止する方法を提供しようとする
ものである。Therefore, as a method that does not involve immersing the sample in liquefied gas, a method has been used in which the sample is indirectly cooled using a metal rod cooled with cooling gas as a transmitter, which is not affected by air bubbles. Therefore, it is an object of the present invention to provide a method for preventing the formation of bubbles in an apparatus such as that shown in FIG. 2.
［課題を解決するための手段］
本発明は、上記の点に鑑みなされたもので、第１図の具
体例に示すように、光学的特性を測定する試料１を冷却
媒体３に浸漬し、測定するのであるが、冷却媒体３を入
れたあと、内側容器２の空間を断熱上蓋１１に取付けた
減圧用パイプ１３を介して減圧することにした。[Means for Solving the Problems] The present invention has been made in view of the above points, and as shown in the specific example of FIG. 1, a sample 1 whose optical characteristics are to be measured is immersed in a cooling medium 3, For the purpose of measurement, after the cooling medium 3 was introduced, the space in the inner container 2 was depressurized via a decompression pipe 13 attached to the heat insulating upper lid 11.
［作用］
冷却媒体を減圧することにより、冷却媒体の気化熱を奪
って冷却媒体の温度が沸点以下となり、冷却媒体から発
生する気泡がなくなり１、信頼性の高い光学測定が可能
となる。[Operation] By reducing the pressure of the cooling medium, the heat of vaporization of the cooling medium is removed and the temperature of the cooling medium becomes below the boiling point, and bubbles generated from the cooling medium are eliminated 1, making highly reliable optical measurement possible.
［実施例コ
第１図の試料冷却装置によって、試料３インチのＧａＡ
ｓウェハに対し、波数５８２ｃｍ の赤外光りを照射
透過してカーボン吸収ピークの強度分布を測定した。[Example 1] Using the sample cooling device shown in Fig. 1, a 3-inch GaA sample was
The intensity distribution of the carbon absorption peak was measured by irradiating and transmitting infrared light with a wave number of 582 cm 2 onto the S wafer.
内側容器の窓７，８．外側容器の窓６，９には赤外光透
過性の優れた結晶板ＫＲ８−５を使用した。Inner container windows 7, 8. A crystal plate KR8-5 having excellent infrared light transmittance was used for the windows 6 and 9 of the outer container.
従来のものの如く、内側容器に冷却媒体を入れただけで
は、冷却媒体の表面、底面、および試料１の表面から液
化ガスの気泡が大量に発生していたが、内側容器の空間
を減圧（１０ｍｍ Ｈｇ以上）にすることで、液化ガス
の気泡の発生が皆無となり、測定ができた。When the cooling medium was simply placed in the inner container as in the conventional method, a large amount of liquefied gas bubbles were generated from the surface and bottom of the cooling medium and the surface of sample 1. Hg or higher), there was no generation of liquefied gas bubbles and measurements were possible.
［発明の効果］
試料冷却装置内で、冷却媒体が減圧されて、冷却媒体の
温度が沸点以下となっているので。[Effects of the Invention] The pressure of the cooling medium is reduced in the sample cooling device, and the temperature of the cooling medium is below the boiling point.
冷却媒体からの気泡の発生が防止されて、信頼性の高い
測定雅できることが、本発明の大きな効果である。A major effect of the present invention is that the generation of bubbles from the cooling medium is prevented and highly reliable measurements can be made.
第１図は本発明の具体例で、気泡発生防止の手段を講じ
た試料冷却装置の断面図、第２図は試料冷却装置の従来
例の断面図である。
１・・試料、２・・内側容器、３・・冷却媒体、４・・
真空空間、５・・外側容器、６，７゜８．９・・窓、１
０・・操作棒、１１・・断熱上蓋、１２・・操作捧支持
板、１３・・減圧用パイプ、Ｌ・・測定光。
手続補正書
平成１年２月 ７日
特許庁長官 吉田文毅 殿
昭和６３年特許願第１３７９０３号
２ 発明の名称
試料冷却装置内の気泡発生防止方法
３ 補正をする者
事件との関係 特許出願人
住所 〒５４１
大阪市東区北浜５丁目１５番地
大阪府豊中市蛍池北町２丁目４番６号
５ 補正命令の日付
自発補正
６ 補正の対象
（１）明細書中特許請求の範囲の欄
（２）明細書中発明の詳細な説明の欄
（３）明細書中国面の簡単な説明の欄
（４）図面
７ 補正の内容
（１）別紙の通り
（２）明細書中筒３頁下から６行目〜５行目の「・・・
に取付けた減圧用パイプ・・・」を［・・・に取付けた
ストップバルブ付減圧用パイプ・・・」と補正する。
同書中筒４頁下から８行目〜７行目の
「・・・内側容器の空間を減圧（１０ｍｍ Ｈｇ以上に
することで、・・・」を
ることで、・・・」と補正する。
同書中筒４頁の最下行の
「測定雅できる・・・」を「測定ができる・・・」と補
正する。
（３）明細書中筒５頁９行目〜１０行目の「１３・・減
圧用パイプ」を「１３・・ストップバルブ付減圧用パイ
プ」と補正する。
（４）図面（第１図）を別紙の通り補正する。
、）
２、特許請求の範囲
１．試料冷却装置内における気泡の発生を防止するため
、冷却媒体槽の気相を減圧して。
該冷却媒体の温度を沸点以下にした後、減圧を停止する
ことを特徴とする試料冷却装置内の気泡発生防止方法。
仲１図FIG. 1 shows a specific example of the present invention, which is a sectional view of a sample cooling device that takes measures to prevent bubble generation, and FIG. 2 is a sectional view of a conventional sample cooling device. 1. Sample, 2. Inner container, 3. Cooling medium, 4.
Vacuum space, 5... Outer container, 6,7° 8.9... Window, 1
0...Operation rod, 11...Insulated upper cover, 12...Operation support plate, 13...Pipe for pressure reduction, L...Measuring light. Procedural Amendment February 7, 1999 Director General of the Japan Patent Office Fumiki Yoshida Patent Application No. 137903 of 1988 2 Name of the Invention Method for Preventing Air Bubbles in a Sample Cooling Device 3 Person Making the Amendment Relationship to the Case Patent Applicant Address 5-15 Kitahama, Higashi-ku, Osaka 541 2-4-6-5 Hotarugaike Kitamachi, Toyonaka-shi, Osaka Date of amendment order Voluntary amendment 6 Subject of amendment (1) Claims column in the specification (2) Specification Column for detailed explanation of the invention in the document (3) Column for brief explanation on the Chinese side of the specification (4) Drawing 7 Contents of the amendment (1) As shown in the attached sheet (2) Line 6 from the bottom of page 3 of the central cylinder of the specification ~5th line “...
"Pipe for pressure reduction attached to..." is corrected to "Pipe for pressure reduction with stop valve attached to...". In the same book, page 4, lines 8 to 7 from the bottom, "... by reducing the pressure in the space of the inner container (by making it 10 mm Hg or more...") is corrected to "..." . "Measurement is possible..." on the bottom line of page 4 of the middle cylinder of the same book is corrected to "measurable...". (3) "13 of page 5 of the specification, lines 9-10, ...Pipe for pressure reduction" is corrected to "13. Pipe for pressure reduction with stop valve." (4) The drawing (Figure 1) is corrected as shown in the attached sheet. 2. Scope of Claims 1. To prevent the formation of air bubbles in the sample cooling device, reduce the pressure of the gas phase in the cooling medium tank. A method for preventing bubble generation in a sample cooling device, comprising stopping pressure reduction after the temperature of the cooling medium is lowered to below the boiling point. Naka 1 diagram
Claims (1)
、冷却媒体槽の気相を減圧して、該冷却媒体の温度を沸
点以下にすることを特徴とする試料冷却装置内の気泡発
生防止方法。1. A method for preventing the generation of bubbles in a sample cooling device, which comprises reducing the pressure of the gas phase in a cooling medium tank to bring the temperature of the cooling medium below the boiling point in order to prevent the formation of bubbles in the sample cooling device. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13790388A JPH01307637A (en) | 1988-06-04 | 1988-06-04 | Method for preventing air bubbles in the sample cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13790388A JPH01307637A (en) | 1988-06-04 | 1988-06-04 | Method for preventing air bubbles in the sample cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01307637A true JPH01307637A (en) | 1989-12-12 |
Family
ID=15209374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13790388A Pending JPH01307637A (en) | 1988-06-04 | 1988-06-04 | Method for preventing air bubbles in the sample cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01307637A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016156706A (en) * | 2015-02-25 | 2016-09-01 | 国立大学法人名古屋大学 | Carbon isotope analysis device and carbon isotope analysis method |
| JP2016156752A (en) * | 2015-02-25 | 2016-09-01 | 国立大学法人名古屋大学 | Carbon isotope analyzer and carbon isotope analysis method |
-
1988
- 1988-06-04 JP JP13790388A patent/JPH01307637A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016156706A (en) * | 2015-02-25 | 2016-09-01 | 国立大学法人名古屋大学 | Carbon isotope analysis device and carbon isotope analysis method |
| JP2016156752A (en) * | 2015-02-25 | 2016-09-01 | 国立大学法人名古屋大学 | Carbon isotope analyzer and carbon isotope analysis method |
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