JPH01307539A - Structure for supporting damping - Google Patents

Abstract

PURPOSE:To favorably carry out damping by supporting a device-placing base on a fixed base via a plural stages of air springs, enabling at least one air spring to be switched over to an operating condition and non-operating condition, and suppressing vibration in X-Z axis directions with linear motors. CONSTITUTION:As a base plate 1 is vibrated because of earthquake etc., the vibration is propagated to suspended supporting bases, i.e., air tanks 3a, 3b in a delayed condition in the horizontal direction, and slight shocks are absorbed while releasing the vibration in order by means of air springs 4a, 4b on an air tank 3c as a supporting member in the vertical direction, to propagate only a long-period vibration to a device-placing base 6. By detecting long-period vibrations in X-Z axis direction with their respective vibration sensors, correspondent linear motors are operated based thereon. Also, by providing fixing mechanisms 30a, 30b on the air springs 4a, 4b, the number of the air springs are varied by the operation thereof, to adjust the rigidity and natural frequency in the horizontal and vertical directions in accordance with the weight of placed equipment. Thereby, the vibration of the device-placing base can be effectively suppressed.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention is designed to absorb vibrations such as vibrations caused by earthquakes and microvibrations generated by automobiles etc. from a support such as a floor of a structure. Due to this, vibration damping is constructed to prevent vibrations of equipment mounting tables on which manufacturing equipment for manufacturing ultra-precision products such as semiconductors and printed circuit boards is placed in LSI manufacturing factories and laser application product factories. Regarding support structures.

<Conventional technology> In LSI manufacturing factories and laser application product factories, even slight vibrations can cause product defects, so it is necessary to suppress such vibrations. Between the equipment mounting table etc. and the support such as the floor of the structure,
Spring elements such as laminated rubber and air springs were interposed to elastically support the device mounting table, and the structure was configured to efficiently absorb minute vibrations while alleviating the impact caused by vibrations.

<Problems to be Solved by the Invention> However, although the vibrations propagating to the device mounting table can be alleviated, the vibrations cannot be eliminated.

Therefore, some devices have been equipped with an auxiliary mass and a damper such as a hydraulic cylinder to prevent the device mounting table from vibrating. Moreover, the weight of the device mounting table increases, and the structure for elastically supporting the device is required to be strong.

Further, since the damper adjusts the damping force by the viscosity of the oil, the viscosity is large in the case of minute vibrations, which causes a problem of deteriorating the vibration isolation performance of the device mounting table.

The present invention has been made in view of the above circumstances, and is intended to prevent vibrations caused by earthquakes, minute vibrations generated by automobiles, etc. from being applied to floors or equipment placed thereon. 3! It is an object of the present invention to extremely effectively suppress the propagation to a device mounting table without increasing the size of the device mounting table and in accordance with the weight of equipment placed on the device mounting table.

<Means for Solving the Problems> In order to achieve the above object, the vibration damping support structure of the present invention suspends and supports a support base movably in the horizontal direction on a fixed part, and A device mounting table is provided through a plurality of supporting members, and air springs are provided between the supporting table and the supporting member, between the supporting members, and between the supporting member and the device mounting table. A fixing mechanism is provided that interposes the air spring and switches at least one of the air springs between an activated state and a non-activated state, and the fixed part and the 88 devices are connected in two directions orthogonal to each other in the horizontal direction and in the vertical direction. A vibration sensor is attached to the device mounting table, and a control device is provided that operates the linear motor to cancel the vibration based on the detection result of the vibration sensor. Configure.

<Function> According to the above configuration, when the fixed part vibrates due to earthquakes, microvibrations, etc., the vibration is propagated to the suspended support base in a horizontal direction with a delay from the vibration of the fixed part. and,
In the vertical direction, three or more air springs absorb minute vibrations while sequentially relaxing the vibrations, and finally, these three or more air springs produce long-period vibrations!
! The long-cycle vibration is detected by a vibration sensor, and the linear motor is operated based on the detected vibration, thereby suppressing the vibration from propagating to the device mounting table.

In addition, by changing the number of actuated air springs using the fixing mechanism, the rigidity and natural frequency in the horizontal and vertical directions can be adjusted. Appropriate stiffness and natural frequency can be provided.

<Example> Hereinafter, an example of the present invention will be described in detail based on the drawings.

FIG. 1 is an overall plan view of an embodiment of the vibration damping support structure of the present invention, FIG. 2 is an overall side view of FIG. 1, and FIG.
4 is a cross-sectional view taken along the line TV-IV in FIG. A first air tank 3a serving as a support base is suspended so as to be horizontally displaceable.

As shown in the cross-sectional view of FIG. 5 (cross-sectional view taken along the line V-V in FIG. 1), a first stage first air spring 4a is provided on the first air tank 3a, and a first air spring 4a is provided on the first air tank 3a. 3a and the first air spring 4a are connected to each other via an orifice 5.

A second air tank 3b at the second stage as a support member is supported on the first air spring 4a, and a second air spring 4b at the second stage is provided on the second air tank 3b. The second air tank 3b and the second air spring 4b are connected to each other via an orifice 5.

Further, on the second air spring 4b, a support member 3 is provided.
A third air tank 3C in the third stage is supported, a third air spring 4c in the third stage is provided on the third air tank 3c, and the third air tank 3c and the third air spring 4
c is connected through the orifice 5, and furthermore, the third
A device mounting table 6 is mounted and supported on the air spring 4c.

The first air tank 3a, the second air tank 3b, and the third air tank 3c are each configured in a cross shape in a plan view, and each of the first air tank 3a, the second air tank 3b, and the third air tank 3c has a cross-shaped configuration. The auxiliary air tanks 7a, 7b, and 7c are connected in communication.

A support leg 8 is erected on the base plate 1, and the support leg 8
A linear motor 9 for vertical direction control is provided on the upper part of the predetermined support leg 8, and a pair of linear motors 10, 11 for horizontal direction control are provided on the upper part of the predetermined support leg 8 so that the displacement directions are orthogonal to each other.
is installed.

The apparatus R mounting table 6 has a rectangular shape in plan view, and the vertical direction control linear motor 9 and the horizontal direction control linear motor 10.11 are connected at each of its four corners.
Each and the device mounting table 6 are interlocked and connected via a piano wire 12, and by driving these linear motors 9, 10, and 11, a three-dimensional control force is applied to the device mounting table 6. It is configured to control vibration.

Vertical direction control linear motor 9 and device mounting table 6
A vertical sensor 13 for measuring vibrations in the vertical direction of the device mounting table 6 is attached to the interlocking connection point between each of the horizontal control linear motors 10 and 11 and the device mounting table 6. horizontal sensors 14 and 1 that measure vibrations in the horizontal direction (X, Y directions) of the device mounting table 6 are installed.
5 are attached to each.

The measured values by the vertical sensor 13 and the horizontal sensors 14 and 15 are as shown in the schematic diagram of FIG.
The measured values are input to the computer 16 constituting the control device via the amplifier 17 and the A/D converter 18, and are input into a preset relational expression to determine the amount of operation for each of the linear motors 9 and 10° 11. is calculated in real time, and a control output corresponding to the calculated operation amount is given to each of the linear motors 9 and 10.11 via the D/A converter 19 and the amplifier 17, and the linear motors 9 and 10.11 are driven so that the measured value becomes zero. , is configured to perform control so as to cancel out vibrations of the device mounting table 6.

As shown in the front view of FIG. 7, the side view of FIG. 8, and the partially cutaway front view of FIG.
1, and a movable body 23 with a voice coil 22 displaceably attached to the permanent magnet 21 is provided, and the piano wire 12 is connected to a rod 24 as a movable shaft connected to the movable body 23. By adjusting the amount of current flowing through the voice coil 22 and changing the direction of the current, vibration can be controlled by applying a control force to the device mounting table 6 by a predetermined amount in a predetermined direction.

A bearing frame 25 is attached to the shield case 20, and the bearing frame 25 is cut to allow elastic deformation in the moving direction of the rod 24, as shown in the enlarged side view of FIG. Leaf spring 27 with grooves 26...
is attached, and its temporary spring 27 and rod 2
4 are integrally connected, and the rod 24 is configured so that it can be smoothly displaced without being affected by frictional resistance.

A fixing bracket 28 is connected to the upper side of the first air tank 3a, and the fixing bracket 28
A fixing bracket 28 is connected to the lower side of the second air tank 3b, facing both fixing brackets) 28.2.
By connecting and fixing 8 with bolts 29, the first
The first fixing mechanism 30a is configured to switch the air spring 4a to a non-active state.

Further, the fixing bracket 2 of the second air tank 3b is
8 are integrally connected to the upper part, and a fixing bracket 28 is connected to the lower side of the third air tank 3c opposite to the fixing bracket 2, and both fixing brackets 28 and 28 are connected together with bolts 29. The second fixing mechanism 30b is configured to switch the second air spring 4b to a non-operating state by connecting and fixing the second air spring 4b.

With these configurations, by activating either or both of the first fixing mechanism 30a and the second fixing mechanism 30b, either the first air spring 4a or the second air spring 4b, or both of them are activated. The elastic support action of both is released, and the first to third air springs 4a, 4b,
4c, the second air spring 4b and the third
Air spring 4c, first air spring 4a and third air spring 24c,
Alternatively, it is possible to switch to a state in which only the third air spring 4c elastically supports the weight of the device mounting table 6, U, and various devices placed thereon.

Further, a fixing plastic raft 31 is connected to a predetermined location on the lower side of the first air tank 3a, while the base plate 1
A fixing bracket 32 is connected to a location corresponding to the fixing bracket 31, and both fixing brackets) 31.
32 are connected and fixed with bolts, the first air tank 3a is connected and fixed to the base plate l, and the first air tank 3a is connected and fixed to the base plate l.
The air crank 3a is locked to the base plate 1 and can be switched to a state in which horizontal vibrations are suppressed only by the first to third air springs 4a, 4b, and 4c.

The above-described fixing mechanisms 30a and 30b include fixing brackets 28 connected to mutually corresponding positions on the upper side of the device mounting table 6 and the third air tank 3C, and the fixing brackets 28 and 28 are connected to each other by bolts 29. They may be connected and fixed using a suitable fixture such as.

Further, the present invention may be configured by providing four or more stages of air springs 4a.

<Effects of the Invention> According to the present invention, without adding an auxiliary mass to the device mounting table,
Since vibrations can be suppressed from propagating to the device mounting table, the device! 32 There is no need to increase the size of the device, and an increase in its weight can be avoided, and there is no need to use an air spring that is stronger than necessary.Although the overall structure is inexpensive, it is possible to reduce the size of the device mounting table. Vibration can now be suppressed well.

In addition, since multiple stages of air springs are provided, not only can vibrations be effectively alleviated, but also fine vibrations can be successfully absorbed one after another.
The period of vibration that is ultimately propagated to the equipment mounting table can be controlled, and by controlling the period of vibration that is left behind,
A device that uses a linear motor to reduce vibration to zero with little start-up! ! The mounting table can now be driven, and the vibrations of the device mounting table can now be effectively suppressed.

Moreover, by switching a predetermined one out of three or more air springs into an activated state and a non-activated state by a fixing mechanism, and changing the number of air springs to be activated, M
Since the rigidity and natural frequency can be adjusted, it is possible to provide appropriate stiffness and natural frequency to reduce vibration, depending on the weight of the equipment installed on the equipment mounting table or weight changes due to the addition of acumentation. It has become possible to control it well.

[Brief explanation of the drawing]

The drawings show an embodiment of the vibration damping support structure according to the present invention, FIG. 1 is an overall plan view of the vibration damping support structure, FIG. 2 is an overall side view of FIG. 1, and FIG. 111-I [1 line arrow view in Figure 2, Figure 4 is a sectional view taken along the line IV-IV in Figure 1, Figure 5 is a sectional view taken along the line V-V in Figure 1, and Figure 6 is a schematic view. 7 is a front view of the linear motor, FIG. 8 is a side view of FIG. 7, FIG. 9 is a partially cutaway front view of the linear motor, and FIG. 10 is an enlarged front view of the temporary spring. . 1...Base plate 3a as a fixed part...First air tank 3b as a support base...Second air tank 3c as a support member...Third air tank 4a as a support member...No. 1 Air spring 4b...Second air spring 4c...Third air spring 6...Device mounting table 9...Vertical direction control linear motor 10.11...Horizontal direction control linear motor 13.・
・Vertical sensor 14.15...Horizontal sensor 16...Computer 30a as a control device...
First fixing mechanism 30b...Second fixing mechanism Applicant Takenaka Komu Co., Ltd. Agent Patent attorney Tsutomu Sugitani Figure 5

Claims (1)

[Claims] (1) A support stand is suspended and supported on the fixed part so as to be movable in the horizontal direction, and a device mounting stand is provided on the support stand via a plurality of support members, and between the support stand and the support member, Air springs are interposed between the support members and between the support member and the device mounting table, and a fixing mechanism is provided for switching at least one of the air springs between an activated state and a non-active state. , and the fixing part and the device mounting table are interlocked and connected via linear motors that act in two directions perpendicular to each other in the horizontal direction and in the vertical direction, and a vibration sensor is attached to the device mounting table. A vibration damping support structure characterized by comprising: a control device that operates a linear motor to cancel vibrations based on detection results by the vibration sensor.