JPH01297173A - Process and apparatus for forming organic thin film - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Object of the Invention] (Industrial Application Field) The present invention relates to a forming method and a forming apparatus for forming an organic thin film on a substrate surface.

(Prior Art) In recent years, material technology using organic molecules has made remarkable progress. Along with this, there is a growing momentum to create new functional devices using organic molecules. In particular, the development of devices using ultra-thin films made of organic molecules is being actively studied.

Conventionally known methods for forming organic thin films include a spin code method, a vacuum evaporation method, a Langmuir-Prodgett method, and the like. Among these methods, the Langmuir-Prodgett method in particular has attracted much attention in recent years as the only formation method that can align and accumulate organic molecules in units of λ.

In the following explanation, the Langmuir-Prodgett method is
It is abbreviated as LB method, and the film formed by this LB method is called LB method.
It is called a membrane.

Devices to which the LB film can be applied include MIS type light emitting devices (is) transistors using the LB film as an insulating film, photoelectric conversion devices using dye molecules, optical recording media, various sensors,
There are piezoelectric elements that use a polar film structure. Further, the use of the LB film as a resist for ultra-fine processing is also being considered.

In the normal LB method, a single amphiphilic molecule is spread on the water surface, compressed to a predetermined surface pressure to form a condensed film, and then the sample substrate is passed across this monomolecular film. A method has been adopted in which organic molecules are accumulated on the substrate by moving the substrate up and down.

This method is called the vertical immersion method. On the other hand, a method for depositing an organic molecular film on a substrate by bringing the sample substrate into contact with the developed monomolecular film in parallel is called a horizontal deposition method. The structures of cumulative monolayers obtained by these methods include Y-type structures in which hydrophilic groups and hydrophobic groups are accumulated adjacent to each other, X-type structures in which hydrophobic groups are accumulated adjacent to hydrophilic groups, and There is a Z type.

If the substrate surface is hydrophobic, the hydrophobic groups of the first monolayer to be attached will be on the substrate side, and the hydrophobic groups of the next monolayer will be attached to the hydrophilic groups of this monolayer, and the monomolecules will be successively attached. A cumulative film in which films are accumulated is called an X-type film. Furthermore, a film in which hydrophilic groups and hydrophobic groups are sequentially stacked adjacent to each other on the surface of a substrate having hydrophilic properties is called a Z-type film.

However, when a monomolecular film is accumulated with hydrophilic groups and hydrophobic groups adjacent to each other, the energy at the interface between these films becomes extremely large. Therefore, the structure of the X- and Z-type cumulative films is unstable in terms of energy and tends to change over time. From this, in order to obtain a high-quality laminated structure, the Y-type cumulative film is effective in any of the cumulative methods.

Generally, in a forming apparatus for forming a monomolecular film, a substrate is held in a holder, and this holder is connected to an elevating mechanism via an arm. For example, when forming a Y-shaped cumulative film on the substrate surface using such a manufacturing apparatus,
The substrate held in the holder is transported above the monomolecular film spread on the liquid surface of the water tank, and is immersed into the water tank through the monomolecular film by an elevating mechanism. attached. Subsequently, the substrate is lifted out of the water tank through the monomolecular film by a lifting mechanism, and at this time, a second monomolecular film is attached to the surface of the substrate.

(Problem to be Solved by the Invention) However, in such a forming apparatus, when the substrate is pulled up from the water tank, the arm located between the substrate and the lifting mechanism moves the monomolecular film developed before the substrate. may pass through. For example, this is the case where the aforementioned X-type and Y-type monomolecular films or single-layer heterostructure films are formed. When this arm passes through the monolayer, it destroys the monomolecule or changes the surface pressure of the monolayer. Furthermore, since the monomolecular film after the arm has passed is attached to the substrate surface, it is not possible to form a high-quality film on the substrate.

The present invention has been made in view of the above points, and an object thereof is to provide an organic thin film forming method and a forming apparatus that can form a high quality organic thin film.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the formation method of the present invention provides a method for forming a liquid by forming a plurality of development regions, which are separated from each other and are capable of developing organic molecules, on the surface of a liquid. a step of forming a monomolecular film of amphiphilic organic molecules on at least one of the development regions, and a step of forming a monomolecular film of amphiphilic organic molecules on at least one of the development regions, and a step of forming a monomolecular film on a workpiece held by a holding means having a holding portion that engages with the workpiece. a step of transporting the workpiece to a vicinity of a desired developed development area, and a step of transporting the workpiece so that the holding section passes through the monomolecular film after substantially the entirety of the workpiece has passed through the developed monomolecular film; moving the workpiece through the developed monomolecular film so that the monomolecular film does not pass through the monomolecular film, and depositing the monomolecular film on the surface of the workpiece.

The forming apparatus of the present invention also includes a developing means that contains a liquid and has a plurality of developing regions that are partitioned from each other on the surface of the liquid and are each capable of developing organic molecules, and a workpiece driving means for moving the workpiece in a desired direction through the development region and attaching the monomolecular film developed in the development region to the surface of the workpiece when passing through the development region; and transporting the workpiece between the plurality of development regions. and a moving means, wherein the workpiece drive means has a holding part that engages with the workpiece, and when passing through a spreading area where a monolayer is spread, substantially the entire workpiece is a bipedal monolayer. holding means for holding the workpiece so that the engaging part passes through the development area after passing through the development area where the workpiece is expanded, or the holding part does not pass through the development area. .

(Function) According to the forming method and forming apparatus configured as described above, when the holding part that engages with the workpiece moves the workpiece through the developed area of single molecules, the holding part is configured to prevent the workpiece from passing through the developed area at all. Alternatively, it is configured such that substantially the entire workpiece passes through the developing area and then passes through the developing area. Therefore, when a monomolecular film is attached to the work surface, the developed monomolecular film is not adversely affected by the holding section. Therefore, a high-quality monomolecular film can be formed on the workpiece surface.

(Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 2 shows a heterostructure film forming apparatus according to a first embodiment of the present invention. This apparatus is equipped with three independent waters 1411, 12 and 13 for developing three types of amphipathic organic molecules as a developing means 10. Each water tank is formed into a rectangular shape. And these waters 111
, 12 and 13 are respectively attached to the vibration isolating frame 1 by the supporting legs 14.
6 in parallel, and each is located horizontally.

To explain in detail one aquarium, for example, the aquarium 11, as shown in FIG.
For example, it contains water and has a groove 24 that is deeper than other parts. The water level is partitioned by a partition rod 25 into first and second development areas 11a and llb. Desired organic molecules 21 are spread on the liquid surface of the first region 11a, and no molecules are spread on the liquid surface of the second region 11b. In addition, the first area 11
In a, there is a movable barrier 22 made of Teflon of a compression drive mechanism to be described later for condensing the molecules 21 into a film at a predetermined surface pressure.
is provided. In addition, other aquariums 12 and 13 are also aquarium 1.
It is configured in the same way as 1.

A support frame 28 is provided on the pedestal 16, and the upper plate 30 is supported by this frame, and the water tank 11.12.13
It is located above and parallel to the pedestal. And upper plate 3
0, there are water tanks 11, . 12.13 Liquid 1
Three surface pressure detectors 32 are provided to detect the surface pressure of the monomolecular film spread on the liquid surface of 8. Although only the detector 32 corresponding to the water tank 11 is shown in FIG. 2, in reality, detectors having the same configuration are provided corresponding to the water tanks 12 and 13. As the detector 32, for example, a Wll11e1my type detector using an electronic balance is used. This electronic balance suspends a filter paper 33 in a liquid 18 and measures the surface tension of a molecular film spread on the liquid surface.

Moreover, three compression drive mechanisms 34 are independently provided on the pedestal 16 corresponding to the water tanks 11, 12, and 13. To explain the drive mechanism 34 provided corresponding to the water tank 13, this drive mechanism includes a movable barrier 22 made of Teflon that expands and compresses single molecules in the first expansion region 13a. The barrier 22 is formed into a rod shape and extends over the entire length of the water tank 13 in the width direction, that is, in parallel with the partition rod 25. One end of the barrier 22 is fixed to a support base 36 via a leaf spring 35. The support stand 36 is slidably mounted on a guide rail 38 fixed on the pedestal 16 and is engaged with the feed screw 40 . Feed screw 4
Both ends of 0 are support posts 41 erected on the pedestal] and 6.
It is rotatably supported by. The guide rail 38 and the feed screw 40 extend parallel to each other along the longitudinal direction of the water tank 13. The driving force of a motor 44 supported by a support post 42 fixed on the frame 6 is transmitted to the feed bar 40 via teeth and wheels 45 and 46. When the feed screw 40 is rotationally driven by the motor 44, the support base 36 is moved along the guide rail 38. As a result, the barrier 22 moves on the liquid surface and compresses the organic molecules floating in the first development area to the left, as shown by arrow A in FIG. 3, thereby achieving a predetermined surface pressure. Forms a condensed monolayer.

Another compression drive mechanism 34 provided for the water tank 11, 1.2
also has the same configuration as above. In addition, in the embodiment, these drive mechanisms 34 are connected to the water tanks 11, . For water tank 12, it is provided on the left side of the water tank, and for water tank 13, it is provided on the right side of the water tank.

This arrangement is a result of consideration of storage space, and can be changed as necessary.

The forming apparatus includes a substrate driving apparatus 50 that moves the substrate 48 as a workpiece on which a film is to be formed by immersing or lifting the substrate into the liquid in each water tank, and a driving apparatus that moves the substrate 48 as a workpiece on which a film is to be formed into the liquid in the water tank 1.
1, 12, and 13 are provided. These devices 50.52.
Each compression drive mechanism 34 and surface pressure detector 32 are connected to control means 5, and their respective operations are controlled by this control means.

As shown in detail in FIG. 3, the drive device 50 includes:
It has a holding mechanism 54 that holds the substrate 48, a lifting mechanism 56 that raises and lowers the substrate, and a horizontal movement mechanism 58 that horizontally moves the substrate along the longitudinal direction of the water tank 11. Further, the drive device 5o includes a support plate 60 extending perpendicularly to the liquid level of the water tank 11, and the elevating mechanism 56 has first and second moving tables 61, a, and 61b and is attached to the support plate. ing.

The movable table 61a is slidably held by a guide rail 62a fixed on the support plate 60, and is engaged with a feed screw 64a attached to the support plate t via a pair of support posts 63. There is. The guide rail 62a and the feed screw 64a extend parallel to each other and perpendicularly to the liquid level in the water tank 11. Further, a motor 65a is fixed on the support plate 60, and the driving force of this motor is transmitted to the feed screw 64a via a worm gear 66a attached to the rotating shaft of the motor and a gear 67a attached to the feed screw. When the feed screw 64a is rotationally driven by the motor 65a, the movable base 61a is moved up and down along the guide rail 62a.The second movable base 61b is also transmitted to the support plate 60 in the same way. The feed screw 6 is engaged with the attached guide rail 62b extending vertically and the feed screw 64b, and is driven by a motor 65b fixed to the support plate via a gear 66b and a gear 67b.
By rotationally driving the guide rail 62b
is moved up and down along the

The holding mechanism 54 has an L-shaped support arm A 68 extending downward from the first moving stage 61a and perpendicular to the liquid level in the water tank 11, and has a substrate at the extending end of the arm. A first holder 70 for holding 48 is provided. As best seen in FIG. 3, the holder 70 can engage the lower edge of the substrate 48 and hold the substrate such that both surfaces of the substrate are perpendicular to the liquid level in the tank. Then, as the moving stage 61a moves up and down, the substrate 48 held by the holder 70 is immersed in or pulled up from the water 18 in the water tank. Further, the holding mechanism 54 has a second holder 72 made of a chuck, and this holder is supported by a second support base 61b. As clearly seen in FIG. 1, the holder 72 can hold the upper edge of the substrate 48 and hold the substrate so that both surfaces of the substrate are perpendicular to the liquid level in the water tank. Then, as the moving stage 61b moves up and down, the substrate 48 held by the holder 72 is immersed in or pulled up from the water 18 in the water tank.

The support board 60 to which the lifting mechanism 56 and the holding mechanism 54 are attached is supported by a horizontal movement mechanism 58 so as to be horizontally movable. In other words, the horizontal movement mechanism 58
A guide rail 74 is fixed on this holding plate, and a feed screw 76 is also attached via a pair of support posts 75. These guide rails 7
4 and the screw 76 extend horizontally along the longitudinal direction of the water tank 11. Further, on the holding plate 73, there is a support post 7.
A motor 78 is attached via 7, and this motor is connected to one end of the feed screw 76. And the support plate 60
is guided by a guide rail 74 and engaged with a feed screw 76 . And motor 78
By rotating the feed screw 76, the support plate 6
0 is moved horizontally. Therefore, the substrate 48 held by the holding mechanism 54 can be moved between the first deployment area and the second deployment area of the aquarium.

The substrate driving device 50 configured as described above transports the water tank 11 by the transport device 52. ．． It is possible to transport above 12.13. As shown in FIG. 2, the conveyance device 52 is
A pair of pillars 84 are provided at both ends of the pedestal 16,
A pair of guide rails 86 are fixed between the upper ends of the columns. The guide rail 86 extends horizontally above the water tanks 11, 12, 13 and parallel to each other. A movable plate 88 is placed on the guide rail 86 so as to be slidable along the guide rail, and the holding plate 73 of the substrate driving device 50 is suspended from the movable plate 88. Further, the moving plate 88 is engaged with a feed screw 89, which extends parallel to the guide rail 86, and both ends of the feed screw are connected to both ends of the G and 1' trails through a support plate 90, respectively. Supported. A motor 91 is fixed on one support plate 90, and the feed screw 89 is rotationally driven by the motor 91 via gears 92 and 93. And the feed screw 8
By driving 9, the substrate driving device 5o can freely move between the water tanks 11, 12, and 13 along the guide rail 86.

Next, the substrate 4 is formed using the forming apparatus configured as described above.
The process of forming a monomolecular film on the surface of 8 will be explained.

First, we will explain how many monomolecular films are deposited on the substrate surface when (1) the substrate 48 is raised, and (2) how many monomolecular films are deposited on the substrate surface when the substrate 48 is lowered. I will explain using

In the case of (1), first, as shown in FIG. 3, the support plate 60 is moved by the horizontal movement mechanism 58 so that the first holder 70 is located on the second deployment area where molecules are not deployed. let After mounting the substrate 48 on the holder 70, the moving table 61. a is lowered to immerse the substrate 48 together with the holder 70 into the water 18 through the second development area 11b. Subsequently, as shown by the two-dot chain line in FIG.
By moving 0 to the right, the substrate 48 is moved to the molecule 21.
moves below the first development area 11a where is developed. Thereafter, by raising the first moving table 61a, the substrate 48 is slowly pulled up through the first development area 11a. At this time, as shown in FIG. 1, the second moving table is moved to the lowered position. Then, when the upper end of the substrate 48 reaches the second holder 72, the second moving table 61b is increased in speed to the same speed as the first moving table 61a. In this state, the upper end of the substrate 48 is held by the second holder 72, thereby transferring the substrate from the first holder to the second holder. After the delivery is completed, the first moving table 61a is stopped. At this time, the first holder 70 is located below the first developing region 11a and does not contact the developed monomolecular film 21. Subsequently, by further raising the second moving table 61b, the substrate 48 is pulled up above the liquid level through the first development area 11a, as shown in FIG. Then, by passing through the first development region as described above, a monomolecular film is formed on both surfaces of the substrate 48. Note that the substrate 48 is held in the first holder 70.
When passing the receiver from the first holder to the second holder 72, the first and second
The movable tables 61a and 61b may be stopped.

In the case of (2), as shown in FIG.
Then, the elevating mechanism 56 is driven to set the first holder 70 below the first deployment area 11a and the second holder 72 above the first deployment area. Subsequently, after the upper end of the substrate 48 is held by the second holder 72, the second moving stage 61b is lowered to lower the substrate 48 through the first development area 11a.

Then, as shown in FIG. 1, when three parts (or almost the entire fishing rod) of the board 48 have passed through the first development area 11a, the second moving table 61a is stopped, and the second holder 72 is stopped. The substrate is transferred from the receiver to the first holder 70.

Subsequently, the first moving table 61a is lowered until the entire substrate 48 passes through the first development area 11a, and the monomolecular film is deposited on both sides of the substrate. Thereafter, as shown in FIG. 3, the horizontal movement mechanism 58 moves the substrate 48 to the second development area 11.
After moving to a position below b, the first moving stage 61a is raised to pull the substrate out of the water tank 11 through the second development area 11b.

Next, a method of forming a heterostructure film on a substrate surface by performing the above-described attachment step on a plurality of water tanks will be described.

(a) As shown in FIG. 5A, for example, through a membrane of monomolecules 21 developed in the first development region 11a of the water tank 11,
The substrate 48 held by the second holder 72 is lowered to form a first monomolecular film on the surface of the substrate. Subsequently, after passing the substrate from the second holder 72 to the first holder 70, the substrate is pulled up from the water tank through the second development area 11b, and the lifted substrate is transferred to the second holder again. hand over. Thereafter, as shown in FIG. 5B, the substrate 48 is again lowered through the first developing region 11a to form a second monomolecular film on the surface of the substrate. As a result, as shown in FIG. 5C, an X-shaped organic thin film is formed on the substrate surface in which the same molecules 21 are attached in the order of hydrophobic group, hydrophilic group, hydrophobic group, and hydrophilic group.

(b) As shown in FIG. 6A, the substrate 48 held by the second holder 72 is lowered through the film of monomolecules 21 spread in the first development area 11a, and the first monolayer film is formed. Formed on the substrate surface. Subsequently, the first holder 70 pulls up the substrate 48 through the second development area 11b, and then the transport device 52 transports the substrate driving device 50 onto the water tank 12. Then, the substrate 48 held by the second holder 72 is immersed in the water tank 12 through a film of monomolecules 80 developed in the first development region 12a of the water tank 12, and the substrate 48 is coated with a second layer of monomolecules. Forms a film. As a result, as shown in FIG. 6C, an X-shaped organic thin film composed of different single molecules is formed on the substrate surface.

(C) As shown in FIG. 7A, the substrate 48 held by the second holder 72 is immersed into the water tank 11 through the first development area 11a of the water tank 11, and the first layer of monomolecules is applied to the surface of the substrate 1-5. A film 21 is formed. Subsequently, after transferring the lA temporary 48 to the first holder 70, the substrate 48 is again pulled up from the water tank 11 through the first development area 11a, and a second monomolecular film 21 is formed on the surface of the substrate. As a result, a Y-shaped organic thin film is formed on the substrate surface, in which the same monomolecules are attached in the order of hydrophobic group, hydrophilic group, hydrophilic group, and hydrophobic group.

(d) As shown in FIG. 8A, the substrate 48 is immersed into the water tank through the first developing region 11a of the water tank 11, and a first monomolecular film is formed on the surface of the substrate.

Subsequently, after the substrate 48 is moved within the water 18, it is pulled up from the water tank 11 through the second development area 11b. Next, after the substrate driving device 50 is transported onto the water tank 12, the substrate 48 is immersed into the water tank 12 through the second development area 12b.

Subsequently, as shown in FIG. 8B, after moving the substrate 48 below the first development area 12a,
It is pulled up from the water tank 12 through a membrane of monomolecules 80 that has been developed. As a result, as shown in FIG. 8C, a Y-shaped organic thin film made of different single molecules is formed on the surface of the substrate 48.

(e) As shown in FIG. 9A, after immersing the substrate 48 into the water tank through the second expansion area 11b of the water tank 11,
The monomolecular film 21 is formed on the surface of the substrate.

Subsequently, as shown in FIG. 9B, the substrate 48 is immersed in the water tank 11 through the first development area 11a, and two
As shown in FIG. 9C, a Y-shaped organic thin film in which the same molecules are attached in the order of hydrophilic group, hydrophobic group, hydrophobic group, and hydrophilic group is formed on the substrate surface. It is formed.

(f) As shown in FIG. 10A, after the substrate 48 is immersed in the water tank through the second development area 11b of the water tank 11, it is pulled up from the water tank through the first development area 11a, and the monomolecular film 21 is coated on the surface of the substrate. Form.

Subsequently, as shown in FIG. 10B, the substrate 48 is placed in the water tank 12.
After being transported to the second stage, the substrate is immersed in the water tank 12 through the first development area 12a to form a second monomolecular film 80 on the surface of the substrate. Thereby, as shown in FIG. 10C, a Y-shaped organic thin film composed of different single molecules is formed on the substrate surface.

(g) As shown in FIG. 11A, the substrate 48 is immersed in the water tank through the second expansion region 11b of the water tank 11 (after 7
It is pulled up from the water tank through the first development region 11a, and a monomolecular film 21 is formed on the surface of the substrate.

Subsequently, as shown in FIG. 11B, the substrate 48 is again immersed into the water tank through the second development area 1.1b of the water tank 11, and then pulled out of the water tank through the first development area 1.1a. A second monomolecular film 21 is formed on the surface of the substrate. As a result, as shown in FIG. 11C, on the substrate surface,
A Z-shaped organic thin film is formed in which the same molecules are attached in the order of hydrophilic group, hydrophobic group, hydrophilic group, and hydrophobic group.

(h) As shown in FIG. 12A, the substrate 48 is immersed in the water tank through the second development area 1.1b of the water tank 11, and then pulled up from the water tank through the first development area 11a, and monomolecules are deposited on the substrate surface. A film 21 is formed.

Subsequently, the substrate 48 is transported onto the water tank 12. Next, the first
As shown in Figure 2B, the substrate 48 is immersed in the water tank through the second development area 12b of the water tank 12, and then pulled up from the water tank through the first development area 12a, and a second monomolecular film 80 is applied to the surface of the substrate. form.

As a result, as shown in FIG. 12C, a Z-shaped organic thin film consisting of different single molecules is formed on the substrate surface.

As described above, by various combinations of the lifting and lowering operations of the substrate and the transporting operations between the water tanks, it is possible to cumulatively form a plurality of types of monomolecular films in various combinations.

In each of the above-mentioned steps, a two-layer monomolecular film was formed on the substrate surface by moving the substrate up and down in one or two water tanks, but the substrate was moved multiple times in three water tanks. By raising and lowering the substrate, three or more layers of different monomolecules may be attached to the substrate surface.

According to the forming apparatus configured as described above, the first and second holders 70 and 72 that hold the substrate 48 are always used when the substrate is raised or lowered through the development region where single molecules are developed. It is configured so that it does not pass through the deployment area at all. However, after the substrate 48 has passed through the development area, the first and second holders 70 .
72 may pass through this deployment area. Similarly, the support arm 68 supporting the first holder 70 is formed in an L-shape and is configured to cross only the second deployment area where no single molecules are deployed. Therefore, the substrate can be moved up and down without the developed monomolecular film being adversely affected by the first and second holders 1 and the support arms. In other words, the monomolecular film before it is attached to the substrate can be prevented from being destroyed by the first and second holders and the support arm, or its surface pressure can be prevented from being changed, and as a result,
A good monomolecular film can be formed on the substrate surface.

Further, since the water tanks 11, 12, and 13 are provided independently, it is possible to prevent single molecules developed in these water tanks from mixing with each other and contaminating the water tanks. Furthermore, the composition of the stored water, such as pH, temperature, and ion concentration, can be arbitrarily set for each water tank according to the single molecules to be developed, and as a result, the selection range of usable single molecules is increased. spreads.

Although the above embodiment shows the case where three water tanks are used, the present invention is effective as long as there is at least one water tank. Furthermore, it is also possible to provide four or more water tanks and develop a variety of molecules to form a complex heterostructure membrane. In addition, the present invention is not limited to a configuration using a plurality of independent water tanks, and for example, the inside of one water tank may be partitioned into a plurality of independent expansion areas using a partition plate or the like. Furthermore, the configuration of the drive device that raises and lowers the substrate and the configuration of the transport device that conveys the substrate can be modified in various ways as necessary.

In the embodiment described above, the horizontal movement mechanism 58 is driven to move the substrate 48, thereby transporting the substrate between the first and second development areas. however,
Conversely, the substrate 48 may be fixed, and the partition rod 22 and movable barrier 22 may be moved to move the first and second development areas themselves.

Further, as shown in FIGS. 13 and 14, the substrate 48 may be transported between the first and second development areas by rotating the support arm 68. Specifically, the upper end of the support arm 68 is rotatably attached to the first movable base 61a around an axis perpendicular to the water level in the water tank.
installed on. Further, a motor 82 is attached to the moving table 61a, and the rotating shaft of the motor is connected to the support arm 68 via a gear train 83. Therefore, by driving the motor 82 and rotating the support arm 68, the substrate 48 held in the first holder 70 is transported between the first and second development areas, as shown in FIG. be able to. At this time, if the center of rotation of the support arm 68 is within the second region where molecules are not developed, vibrations etc. when the substrate moves will adversely affect the single molecules developed in the first development region. Never.

Further, as shown in FIG. 15, the support arm 68 includes a plurality of, for example, four, horizontal parts 68b extending radially from the lower end of the vertical part, and a first holder 7 at the tip of each horizontal part.
0 may be provided. In this case, the support arm 6
By rotating 8, any substrate held in the first holder 7°O can be transported between the first and second development areas.

Note that in these embodiments, the horizontal movement mechanism 58 of the substrate driving device may be omitted. Also, partition rod 2
5 is not limited to a straight line, as shown in FIGS. 14 and 15, the center portion thereof may be curved toward the second development area 11b, and in this case, the shape may be expanded to the first development area 11a. This makes it easier to compress single molecules.

The support arm 68 may have a multi-joint structure, as shown in FIGS. 16-19. That is, the support arm 68 includes a cylindrical fixed rod 84 extending vertically downward from the first movable table 61a, and a number of joint members 86 connected to the lower end of the rod. Each joint member 86 is formed in a cylindrical shape and is rotatably connected to the adjacent joint member by a pair of pins 87.

Two adjacent joint members 86 cannot rotate at an angle of 20 to 30 degrees with respect to each other, but the joint members as a whole cannot rotate.
That is, the joint member 86a at the tip can rotate 180 degrees with respect to the fixed rod 84.

A suction cup constituting the first holder 70 is attached to the joint member 86a at the tip. This suction cup is connected to the movable table 61 via a suction tube 94 extending inside the support arm 68.
It is connected to a pump 95 attached to a. Therefore, by driving the pump 95 to create a negative pressure inside the suction cup, the substrate 48 can be attracted to the suction cup. Also,
A pair of wires 88 are fixed to the joint member 86a at the tip at positions 180 degrees apart from each other. These wires are guided through through holes 89 formed in each joint member and through fixed rods 84 to the upper ends of the rods. The wire 88 is connected to a pulley 90 attached to the moving table 61a. The pulley 90 is moved by a pulley 92 by a motor 91 fixed to the moving table 61a.
and belt 93 to rotate in any direction and speed. For example, by rotating the pulley 90 counterclockwise from the vertical state of the support arm 68 as shown in FIG. 16, the support arm 68 is attracted to the first holder 70 as shown in FIG. 180 to the right side of the board 48
Can be reversed.

Also, by rotating the pulley 90 in the opposite direction,
The substrate 48 can be flipped 180 degrees to the left.

The process of forming a monomolecular film on the surface of a substrate using the forming apparatus that forms the support arm 86 configured as described above will be described.

First, as shown in FIG. 20, the substrate 48 is held in the holder 70 and transported to a water tank, for example, above the second development area 11b of the water tank 11. Subsequently, by lowering the movable table 61a, the second deployment area 11.
The substrate 48 is immersed into the water tank 11 through the tube 48b. At this time,
The support arm is in a vertically extending state, and the support arm is in a vertically extending state and is
extends downward from the first holder 70 toward the deployment area 11b. Therefore, after substantially the entire substrate 48 passes through the second deployment area 11b, the first holder and support arm 68 crosses the second deployment area.

Subsequently, by bending the support arm 68 to the right, the substrate 48 is transported below the first development area 11a where the single molecules 21 are developed, and the substrate is turned over by 180 degrees. Thereafter, by raising the moving stage 61a, the substrate 48 is pulled up from the water tank 11 through the first development area 11a, and at this time, the single molecules 21 are attached to the substrate surface.

During this raising step, the substrate 48 is in a state of extending upward from the first holder 70 toward the first development area 11a. Therefore, after substantially the entire substrate 48 passes through the first deployment area 11a, the first holder 70 and the support arm 68 also cross the first deployment area. The lifted substrate 48 is transferred to the second holder 72.

In this embodiment, the holder and the support arm are configured to pass through the monomolecular film after substantially the entire substrate 48 has passed through the monomolecular film when attaching the monomolecular film to the surface of the substrate. ing. Therefore, the monomolecular film developed by the holder and the support arm is not adversely affected, and a high-quality monomolecular film can be formed on the substrate surface. Further, according to this embodiment, even when lowering the substrate 48 through the second deployment area 11b, the first holder and the support arm pass through the second deployment area after almost the entire substrate passes through the deployment area. do. Therefore, by spreading the monomolecules in the second spreading area, when the substrate 48 is lowered, it will not be adversely affected by the first holder and the support arm (i.e., a high-quality monomolecular film can be attached to the substrate surface). Therefore, the substrate can be transferred between the first and second holders without any transfer operation, and two layers of high-quality monomolecular films can be deposited on the substrate surface by a single lifting and lowering operation of the support arm 68. Note that in this case, it is necessary to provide another movable barrier 22 for compressing the single molecules developed in the second deployment region.

Further, in the above embodiment, the substrate 48 can be raised and lowered in a state where the surface of the substrate 48 is inclined at a predetermined angle with respect to the developed monomolecular film. Therefore, a decrease in surface pressure of the monomolecular film that occurs when the monomolecular film is attached to the substrate can be prevented, and a high-quality monomolecular film can be formed on the surface of the substrate.

FIGS. 21 and 22 show a support arm 68 having an alternative articulated structure. According to this embodiment, the plurality of joint members 86 are rotatably connected to other adjacent joint members by one pin 87. This pin 87 is
It is located eccentrically with respect to the central axis of the joint member 86.

Further, each joint member 86 is formed with a through hole (not shown), and this through hole is located 180 degrees apart from the pin 87 around the central axis of the joint member O. A single wire 88 fixed to the joint portion +486a at the tip extends through the through hole and the fixed rod 84, and extends through the movable table 61a.
It is connected to a pulley 90 attached to the.

The support arm 68 configured in this way also has the movable base 61a.
By rotating the pulley 90 by a motor 91 attached to the holder, the substrate 48 held by the first boulder 70 can be turned over 180 degrees, as shown in FIG. Therefore, the same effects as in the above embodiment can be obtained.

Also in this embodiment, various heterostructure films can be formed by performing the delivery process between the second holder 72 and the first holder 70 in combination.

FIG. 23 shows an organic thin film forming apparatus according to a second embodiment of the present invention. This device includes a base 100 and an aquarium 10 placed on the base and containing water.
1. The water level is divided into two first deployment areas 102, 104 and a second deployment area 106 located around these. In other words, the deployment area of the container box 1 consists of a pair of parallel movable barriers 10 floating on the water surface.
8 and a pair of parallel fixed barriers 110 to form a rectangular shape. A single molecule 112 is developed in the region 102, a single molecule 114 is developed in the region 104, and no single molecule is developed in the second developed region 106. Further, each movable barrier 108 is moved on the liquid surface by a compression drive mechanism (not shown) having a configuration similar to that of the first embodiment. Furthermore, the surface pressure of the single molecule developed in the development region is detected by a surface pressure detector (not shown).

The forming apparatus includes a substrate driving device 50 that immerses a substrate 48 as a workpiece in water in a water tank 101 and pulls it out of the water. This device 50 has a first elevating mechanism 118 disposed in the water of an aquarium 101, a second elevating mechanism 116 provided above the water surface, and a first elevating mechanism 118 horizontally in the water. It includes a first horizontal movement mechanism 122 that moves the second lifting mechanism 116 and a second horizontal movement mechanism 120 that moves the second lifting mechanism 116 horizontally above the water surface, and the operations of these mechanisms are each controlled by a control device 124. be done.

The second elevating mechanism 116 has a support base 126, and this support base includes two sets of endless belts 130 that are parallel to each other and are stretched around a drive pulley 128a and a driven pulley 128b, respectively, and a drive pulley 132a, respectively. Two sets of endless belts 134, which are parallel to each other and are stretched around the driven pulley 132b, are attached facing each other.

The drive pulleys 128a are connected to each other by a shaft and are spaced apart from each other by a distance slightly less than the width of the substrate 48. Similarly, driven pulley 128
b to each other, drive pulleys 132a to each other, driven pulley 13
2b are connected to each other by shafts, and are spaced apart from each other by a distance slightly shorter than the width of the substrate 48. Furthermore, the driving pulleys 128a and 132a are the driven pulleys 128b and 132b.
are spaced apart from each other by a distance approximately equal to the thickness of the substrate 48, respectively. Therefore, both side edges of the substrate 48 can be held between the belt 130 and the belt 134, and this second elevating mechanism 116 also serves as a second holding mechanism 136 that holds the substrate 48. Further, the driving pulleys 128a and 134a are driven by a motor 14 attached to a moving table 138 of a second moving horizontal moving mechanism 120, which will be described later.
0 via the shaft. By rotating the drive pulleys 128a and 132a by the motor 140, the belts 130 and 134 can be caused to run in the same direction in synchronization with each other. Therefore, the substrate 48 held between the belts 130 and 134 can be immersed into or pulled out of the water from above the water tank 101.

Further, the support base 126 is rotatably supported by a movable base 138, and the support base can be rotated by a motor 142 provided on the movable base. Therefore, the inclination of the substrate 48 held between the belts 130 and 134 with respect to the water surface can be adjusted.

The second horizontal movement mechanism 120 is configured in the above-mentioned 1. As shown, the second
A moving platform 138 is provided that supports a lifting mechanism 116. This moving table is guided by a guide rail 144 fixed on the base 100, and is engaged with a feed screw 146 attached to the base via a pair of support posts 147. The guide rail 144 and the screw 146 extend parallel to each other and along the longitudinal direction of the water tank 101. One support post 147
A motor 148 is attached to and connected to a screw 146 . By rotating the screw 146 by the motor 148, the movable table 138 can be moved along the guide rail 144. And the second lifting mechanism 1
16 moves horizontally above the water surface as the moving table 138 moves.

The first elevating mechanism 118 includes a support base 150 located in the water of the water tank 101. Similarly to the second elevating mechanism 116, the support stand 150 has drive pulleys 152, respectively.
Two sets of endless belts 154 that are parallel to each other and are stretched between a drive pulley 156a and a driven pulley 152b, and two sets of endless belts 158 that are parallel to each other and are stretched between a drive pulley 156a and a driven pulley 156b, respectively, face each other. installed. And belts 154 and 158
Both side edges of the substrate 48 can be held between them, and this first elevating mechanism 118 also serves as a second holding mechanism 160. In addition, drive pulleys 152a, 1.56a
is the moving table 1 of the first moving horizontal moving mechanism 122, which will be described later.
62 is connected to a motor 164 attached to the motor 62.

The motor 162 drives the pulley 152a,
By rotating belt 156a, belt 154.15
8 can be run in the same direction in synchronization with each other. Therefore, the substrate 48 held between the belts can be immersed in water or lifted out of the water from inside the water tank 101.

Further, the support stand 150 is rotatably supported by a moving stand 162, and the support stand can be rotated by a motor 166 provided on the moving stand. Therefore, the inclination of the substrate 48 held between the belts 154 and 158 with respect to the water surface can be adjusted.

As described above, the first horizontal movement mechanism 122 includes a moving table 62 that supports the first elevating mechanism 118.

This moving table is guided by a guide rail 168 fixed on the base 100, and is engaged with a feed screw 170 attached to the base via a pair of support posts 169. The guide rail 168 and the screw 170 extend parallel to each other and along the longitudinal direction of the water tank 101. A motor 172 is attached to one support post 169 and connected to a screw 170.

By rotating the screw 170 by the motor 172, the movable table 162 can be moved along the guide rail 168. Therefore, the first lifting mechanism 116
can be moved horizontally within the water in the water tank 101.

Next, the substrate 48 is formed using the forming apparatus configured as described above.
An example of the process of forming a monomolecular film on the surface will be explained.

First, as shown in FIG. 24A, after the substrate 48 is held between the belts 130 and 134 of the second lifting mechanism 116, the lifting mechanism 116 is moved above the first deployment area 102 by the second horizontal movement mechanism 120. move it to Similarly, the first horizontal movement mechanism 122 transports the first elevating mechanism below the first deployment area 102 and makes it face the second elevating mechanism 116 .

At this time, belt 130.134 and belt 154.158
The support stands 126 and 15 are arranged in a straight line.
Adjust the angle of 0. In this state, the belts of the first and second lifting mechanisms 116 and 118 are moved in the same direction, that is,
The substrate 48 is caused to travel in a downward direction. The substrate 48 is thereby driven by the belts 130, 134 of the second lifting mechanism and immersed through the deployment area 102 into the water tank 101. When about half of the substrate 48 is immersed in water,
The lower end of the board is attached to the belt 154 of the first lifting mechanism 118.
158, and the substrate is transferred from the second lifting mechanism to the first lifting mechanism. Thereafter, the substrate 48 is further lowered by the belts 154 and 158 of the first lifting mechanism 118. Then, when the substrate 48 is completely immersed in water, the driving of the belt is stopped. In this way, when the substrate 48 passes through the first development area 102, the 24th B.
As shown, an expanded film of monomolecules 112 is deposited on the substrate surface.

Subsequently, as shown in FIG. 25A, the first elevating mechanism 118 holding the substrate moves to the first horizontal moving mechanism 122.
As a result, it is transported within the water tank 101 to below the first development area 104. Similarly, the second elevating mechanism 116 also
The second horizontal movement mechanism transports the robot to the upper part of the deployment area 104 so as to face the lifting mechanism 118 of the second horizontal movement mechanism. Here, the support base of each elevating mechanism is such that the movement direction of the substrate 48 is in the second direction.
It is rotated 90 degrees from the state shown in Figure 4A. Here, in order to make the adhesion state of molecules the same when descending and ascending, the substrate is moved at an angle to the liquid surface. You can let me. In this state, the first and second lifting mechanisms 116.
The belts 118 are run in the same direction, that is, in the direction in which the substrate 48 is raised. The substrate 48 is thereby driven by the belts 154, 158 of the first lifting mechanism 118 and pulled up from the water tank 10 through the deployment area 104. When approximately half of the substrate 48 rises from the water surface, the upper end of the substrate 48 is lifted from the belt 130.13 of the second lifting mechanism 116.
4, and the substrate is transferred from the first lifting mechanism to the second lifting mechanism. Thereafter, the substrate 48 is further lifted by the belts 130 and 134 of the second lifting mechanism 116. Then, when the substrate 48 is completely lifted out of the water, the driving of the belt is stopped. In this way, the substrate 4
8 passes through the first development region 104, a film of developed single molecules 114 is deposited on the substrate surface, as shown in FIG. 25B.

Through the above steps, a Y-shaped organic thin film made of different single molecules is formed on the surface of the substrate.

Various heterostructure films can be formed by combining various movements of raising and lowering the substrate as described above and adding a step of raising and lowering the substrate through the second deployment region 106 where single molecules are not deployed. .

According to the second embodiment configured as described above, when the substrate is moved up and down through the development area where the monolayer is spread, the substrate is moved upward and downward through the development region where the monolayer is developed. and the second lifting mechanism.

Therefore, the elevating mechanism that holds the substrate does not cross the developed molecules, and the single molecules developed by these elevating mechanisms are not adversely affected. Therefore, similarly to the first embodiment, a high quality monomolecular film can be formed on the substrate surface.

Note that in the second embodiment, the number of first development regions for developing single molecules is not limited to two, and can be easily increased as necessary. Further, by adjusting the angle of the support base of each lifting mechanism, the substrate may be raised and lowered perpendicularly to the deployment area. Furthermore, each lifting mechanism may be configured such that only one side edge of the substrate is held between one set of belts.

FIG. 27 shows an organic thin film forming apparatus according to a third embodiment of the present invention. This device includes a base 100 and a water tank 101 placed on the base and containing water.
It is equipped with The water level is divided into two first development areas 1
02.104, and a second deployment area 106 located around these areas. In other words, the development area of each node 1 is a pair of parallel movable barriers 108 floating on the water surface.
It is partitioned into a rectangular shape by a pair of parallel fixed barriers 110. There is a single molecule 112 in the region 102, and
Single molecules 114 are each developed in the region 104, and the second
No single molecule is developed in the development region 106 . Further, each movable barrier 108 is moved on the liquid surface by a compression drive mechanism (not shown) having a configuration similar to that of the first embodiment. Furthermore, the surface pressure of the single molecule developed in the development region is detected by a surface pressure detector (not shown).

The forming device immerses the substrate 48 as a work in water in the water tank 101 and pulls it out of the water 2! A temporary drive device 50 is provided. This device 5o includes a holding mechanism 54 that holds the substrate 48, a lifting mechanism 56 that lifts and lowers the substrate held by the holding mechanism with respect to the water tank 101, and a lifting mechanism 56 that transports the substrate held by the holding mechanism in a direction parallel to the water surface. a horizontal movement mechanism 58,
The operations of these mechanisms are respectively controlled by a control device 124.

As shown in FIGS. 27 and 28, the holding mechanism 54 includes a support plate 174 supported by a movable table 61 of a lifting mechanism 56, which will be described later. This support plate includes a first portion 174a rotatably supported by the moving table 61, and a second portion rotatably connected to the first portion by a pair of hinges 175.
174b. first portion 174
On a, a solenoid 178 is mounted, the plunger cooperating with the solenoid being connected via a connecting rod 179 to a connecting projection 180 on the second part 174b. Then, by driving the solenoid 178, the second portion 174b is rotated relative to the first portion 174a.

The first portion 174a also has a pair of first holding claws 17 that act as a first holder capable of holding the substrate 48.
6 is rotatably attached. The tip of each holding claw 176 extends sufficiently downward beyond the lower end of the support plate 174. Between the holding claws 176, the first air cylinder 1
77 is connected, and the holding claws are rotated by this air cylinder in the direction toward each other and in the direction away from each other. By opening and closing the holding claws 176 using the air cylinder 177, the substrate 48 can be held between the tips of the holding claws. A pair of second holding claws 182 that act as a second holder capable of holding the substrate 48 are rotatably attached to the second portion 174b. The holding claw 182 is located inside the first holding claw 176, and its tip extends beyond the lower end of the support plate 174 and is located above the first holding claw. A second air cylinder 1 is located between the second holding claws 182.
83 is connected, and the holding claws are rotated by this air cylinder in the direction toward each other and in the direction away from each other. By opening and closing the holding claws 182 using the air cylinder 183, the substrate 48 can be held between the tips of the holding claws.

The lifting mechanism 56 includes a moving table 61 that supports the holding mechanism 54, and this moving table is engaged with a feed screw 184 extending perpendicularly to the water level in the water 1!101. The feed screw 184 is connected to a support base 185 of the horizontal movement mechanism 58, which will be described later.
The motor 78 is connected to the motor 78 attached to the motor 78 . and,
By rotating the screw 184 by the motor 78,
The movable table 6] can be vertically moved up and down.

The horizontal movement mechanism 58 has a pair of support posts 186 erected at both ends of the base, and a feed screw 187 is installed between these posts. The feed screw 187 is
．． The support stand 18 extends horizontally above the
It is engaged with 5. A motor 188 is attached to the - side support post 186 and connected to a feed screw 187. By rotating the feed screw 187 by the motor 188, the support base 185 that supports the holding mechanism 54 and the lifting mechanism 56 can be moved horizontally. As a result, the substrate 48 held by the holding mechanism can be moved to the first position. and the second deployment area 102.104.1, 06.

Next, the substrate 4 is formed using the forming apparatus configured as described above.
The process of forming a monomolecular film on the surface of 8 will be explained.

First, as shown in FIG. 29A, the short second holding claw 18
2, the horizontal movement mechanism 58 is moved so that the substrate 48 is positioned above the first development area 102.
to drive. At this time, the first and second portions 174a of the retaining plate 174.

174b is located in the same plane and set at a desired angle with respect to the deployment area 102. Also,
The first holding claw 176 is open.

Subsequently, as shown in FIG. 29B, the substrate 48 is lowered through the first development area 102 by the lifting mechanism 56, and
Completely immerse in water. At this time, the first holding claw 176 is immersed in water through the second deployment area 106 where the single molecules are not deployed. As a result, on the surface of the substrate 48,
A film of developed single molecules 112 is attached to the development region 102.

Next, as shown in FIG. 29C, the lower end of the substrate 48 is held by the holding claws 176 by closing the first holding claws. Then, the second holding claw 182 is released, and the holding of the substrate 48 by the holding claw 182 is released. Thereby, the substrate 48 is moved from the second holding claw 182 to the first holding claw 1.
Uke is passed in 76.

Subsequently, as shown in FIG. 29D, the second
By rotating the portion 174b upward, the second holding claw 182 is pulled up from the water tank 101. In this state,
The horizontal movement mechanism 58 moves the substrate 48 through the water to the first position.
It is transported to below the deployment area 104.

Next, as shown in FIG. 29E, the elevating mechanism 56
The substrate is raised through the first deployment area 104. Then, when the upper end of the substrate 48 is pulled up from the deployment area 104, the second portion 174b of the support plate 174 is rotated to the initial position, the second holding claw 182 is closed, and the upper end of the substrate is pulled up. Hold. After that, the first holding claw 176
is released to release the holding of the substrate 48, thereby passing the substrate from the first holding claw to the second holding claw. continue,
The substrate is further pulled up until the entire substrate 48 passes through the deployment area 104. At this time, the first holding claw passes through the second deployment area 106 where single molecules are not deployed. Thereby, a film of single molecules 114 is attached to the substrate surface.

Through the two-step process, a Y-shaped cumulative film having two different layers of 41 molecular films is formed on the substrate surface.

In this embodiment, after the substrate 48 is immersed in the water tank 101 through the first development area 102, the substrate may be pulled up from the water tank through the first development area 102 again.

In this case, first, hold the upper end of the board 48 with the second holding claw 18.
2, the substrate is lowered through the first development area 102 until the lower end of the holding claw 182 is located near the liquid level. At this time, the first holding claw 176 is immersed into the water tank 101 through the second deployment area 106. Subsequently, the first holding claw 176 is closed to hold the lower end of the substrate 48, and the second holding claw 182 is opened. Thereby, the board 48 is passed from the second holding claw 182 to the first holding claw 176. Thereafter, as shown in FIG. 29D, the second portion 174b of the support plate 174 is rotated in the direction in which the second holding claw 182 is separated from the liquid surface. In this state, the holding claws 176 are lowered until the entire substrate 48 is immersed in the water tank 101. As a result, a monomolecular film 112 is formed on the surface of the substrate 48.

Next, the substrate 4 is passed through the first development area 102 by a process similar to that shown in FIGS. 29D and 29E.
8 from the water tank 101, thereby forming a monomolecular film 112 on the surface of the substrate.

Even in the forming apparatus configured as described above, when the substrate 48 is moved up and down through the development area where single molecules are developed,
The second holding claw holding the substrate passes through the development area after substantially the entire substrate has passed through the development area, or
It does not pass through the deployment area at all. Moreover, the first holding claw does not pass through the development area at all. Therefore, the monomolecular film before it is attached to the substrate is not adversely affected by the holding claws, and a high-quality monomolecular film can be formed on the substrate surface.

In the third embodiment, the holding mechanism 54 may be configured as shown in FIGS. 30 and 31.

According to this embodiment, the holding mechanism 54 comprises a first cylinder 190 held by a clamp 189 fixed to the support plate 174, which cylinder extends perpendicularly to the surface of the water in the aquarium 101. There is.

The cylinder 190 is provided with first and second holders 70 , 72 that hold the substrate 48 .

That is, the second holder 72 is arranged in the cylinder 190 and has a plate spring 19 curved in a substantially V shape.
1, a pair of pins 192a fixed to one end of the leaf spring, and a pair of pins 192a fixed to the other end of the leaf spring.
The pin 192b is parallel to the pin 192b. These pins 1
92a, 192b project outwardly from the cylinder 190 through circumferentially extending elongated holes 193 formed in the cylinder 190. Normally, the pins 192a and 192b are biased toward each other by the leaf spring 191 and are in a closed state, that is, the board 192a and the pin 192b are
8 can be held. Second holder 72
Similarly, the first holder 70 has a leaf spring 194 and a pair of pins 195a and 195b, which protrude outward through a slot 196 formed in the cylinder 190. And the first and second holders 70
．． 72 are spaced apart from each other by a distance approximately equal to the length of the substrate 48.

A second cylinder 197 is coaxially inserted into the first cylinder 190, and its upper end is rotatably supported by a support post 198 erected on the support plate 174. A gear 200 is fixed to the outer periphery of the upper end of the cylinder 197. A motor 201 is attached to the support plate 174, and a gear 202 fixed to the rotating shaft of this motor meshes with the gear 200. Further, a flat rotating body 204 is fixed to the lower end of the second cylinder 197 and is located inside the leaf spring 191 of the second holder 72 . (In FIG. 31, the rotating body 204 is shown at a position shifted from the leaf spring 191 in order to avoid complicating the drawing.

) Then, by rotating the cylinder 197 and the rotating body 204 by the motor 201, the rotating body pushes out the leaf spring 191 against the biasing force, and as a result, the pins 192a and 192b can be released.

A rotary shaft 206 is coaxially inserted into the second cylinder 197, and its upper end is rotatably supported by a support post 207 erected on the support plate 174. A gear 208 is fixed to the outer periphery of the upper end of the shirt I-206. A motor 209 is attached to the support plate 174, and a gear 210 fixed to the rotating shaft of this motor is connected to the gear 209.
It meshes well with 08. Further, the lower end of the shaft 206 extends beyond the lower end of the second cylinder 197, and a flat rotating body 212 is fixed to this lower end, and the inner extension 1 of the leaf spring 194 of the first holder 70 positioned. Then, by rotating the shaft 206 and the rotating body 212 by the motor 209, the plate spring 1 is rotated by the rotating body.
94 is pushed out against the biasing force, and as a result, the pin 195
a, 195b can be opened. FIGS. 30 and 31 show the pins 195a and 195b in an open state.

Next, a process of forming a monomolecular film on a substrate surface using a forming apparatus having the holding mechanism 54 configured as described above will be described.

First, as shown in FIG. 32A, the upper end side edge of the substrate 48 is held by the second holder 72, and then the base 48 is positioned above the first development area 102 by the horizontal movement mechanism, In addition, the entire holding mechanism is moved so that the first cylinder 190 of the holding mechanism 54 is located above the second deployment area where single molecules are not deployed. In this state,
The substrate 4 is moved through the first development area 102 by the lifting mechanism.
8 and lower the first cylinder 190 through the second deployment area 106. At this time, the pin 195a of the second holder 70.

195b is in an open state so as not to hit the movable barrier 108.

Subsequently, as shown in FIG. 32B, with the lower end of the substrate 48 passing through the deployment area 102 and the movable barrier 108 being positioned between the first and second holders 70, 72, the first The pins 195a and 195b of the holder 70 are closed to hold the lower end side edge of the substrate 48, and the pins 192a and 192b of the second holder are opened to release the holding of the substrate. Thereby, the substrate 48 is transferred to the second holder 7
2 to the first holder 70.

Thereafter, the first
The substrate is further lowered through the development area 102. At this time, since the pins 192a and 192b of the second holder 72 are open, they descend without contacting the movable barrier 108.

Through the above steps, the film of the single molecules 112 developed in the first development region 102 is attached to the surface of the substrate 48.

When pulling up the substrate 48 through the first development area 102, the substrate is pulled up in a process reverse to the above-described lowering process.

Therefore, a two-layer cumulative film can be formed on the substrate surface.

Also in the forming apparatus configured as described above, when the substrate 48 is moved up and down through the first development area where single molecules are developed, the first and second holders 70 holding the substrate are used.
72 does not pass through the first development area. Therefore, the developed monomolecular film is not adversely affected by the holder, and a high-quality monomolecular film can be formed on the substrate surface.

[Effects of the Invention] According to the forming method and forming apparatus configured as described above, a high-quality organic thin film can be formed without damaging the monomolecular film by the holding means for holding the workpiece.

[Brief explanation of the drawing]

1 to 12C show an organic thin film forming apparatus according to a first embodiment of the present invention, FIG. 1 is a partially cutaway side view showing a substrate driving device and a water tank, and FIG. 2 is a partially cutaway side view. FIG. 3 is a perspective view of the device shown in FIG.
4 and 4 are side views corresponding to FIG. 1 and FIGS.
2C is a diagram schematically showing the organic thin film formation process and the formed heterostructure film; FIGS. 13 and 14 are side views corresponding to FIG. 2 showing the first modified example of the support arm; FIG. 15 is a plan view showing a second modification of the support arm; FIGS. 16 to 20 show a third modification of the support arm; FIG. 16 is a plan view showing a second modification of the support arm; A side view of the arm, FIG. 17 is a longitudinal cross-sectional view of the support arm, and FIG. 18 is taken along line A-- in FIG. 17.
19 is a side view showing the support arm in a curved state; FIG. 20 is a partially cutaway side view showing the step of forming a monomolecular film using the support arm; FIG. 21 and 22 show a fourth modification of the support arm, FIG. 21 is a side view showing the support arm in a vertical state, FIG. 22 is a side view showing the support arm in a curved state, and FIG. 26 to 26 show a forming apparatus according to a second embodiment of the present invention, FIG. 23 is a perspective view showing the entire apparatus, and FIGS. 24A to 25B schematically illustrate the monomolecular film forming process. 26 shows a formed heterostructure film, FIGS. 27 to 29E show a forming apparatus according to a third embodiment of the present invention, and FIG. 27 shows the entire apparatus. 28 is an enlarged perspective view of the holding mechanism, FIGS. 29A to 29E are diagrams schematically showing the monomolecular film forming process, and FIGS. 30 to 3
2B shows a substrate driving device of a forming apparatus according to a fourth embodiment of the present invention, FIG. 30 is a perspective view of the above device, and FIG.
FIG. 1 is a perspective view showing the internal structure of the apparatus, and FIGS. 32A and 32B are side views showing the steps of forming a monomolecular film, respectively. 11.12.13.101...Aquarium, lla...First development area, 11b...Second development area, 48...
- Substrate, 50... Substrate driving device, 52... Substrate transport device, 54... Holding mechanism, 56... Lifting mechanism, 58
... horizontal movement mechanism, 70 ... first holder, 72
...Second holder, 102.104...First deployment area, 106...Second deployment area, 116...Second elevating mechanism, 118...First elevating mechanism. Applicant's agent Patent attorney Takehiko Suzue 45 Figure A No. 579B is&c No. 6 MA '2 6 'F” B
Oki 6':" C Figure 7 A Spit -:
B even 7. ,c"Xs 8 L'JA
7r 8 cs 9th figure A 9th is 8
9th Ta C'S 102A s 10
38 G, 10' ZC No. 11 rJA
'211? J B W 11 5
1c 12th A 5127s
11th review 4 L 16th kurei 19 drawing nails. 21 Figure 2411A Figure 24 B Raft 2
5 Goto 2A Tough 25 De-1B Otsu 8th 26th Tough 4a 28 Figure ζ) 29 Figure A 29 Figure 8 29th -
E No. 307

Claims (8)

[Claims] (1) Forming a plurality of development regions on the surface of the liquid that are separated from each other and capable of developing organic molecules, and developing a monomolecular film of amphiphilic organic molecules in at least one of the development regions. a step of holding the workpiece by a holding means having a holding portion engaged with the workpiece; and after substantially the entire workpiece passes through the developed monolayer, the holding portion passes through the monolayer. or, moving the work through the developed monolayer so that the holding part does not pass through the monolayer;
A method for forming an organic thin film, comprising the steps of: attaching a monomolecular film onto the surface of a workpiece. (2) a developing means that contains a liquid and has a plurality of developing regions that are separated from each other on the surface of the liquid and are capable of developing organic molecules, respectively; a workpiece driving means for moving the workpiece to the surface of the workpiece and attaching the monomolecular film developed in the development region to the surface of the workpiece when passing through the development region; and a moving means for transporting the workpiece between the plurality of development regions, The workpiece driving means has a holding part that engages with the workpiece, and when the workpiece passes through the spreading area where the monomolecular film is spread, substantially the entire work passes through the spreading area where the monomolecular film is spread. An apparatus for forming an organic thin film, comprising a holding means for holding the workpiece so that the holding part passes through the developing area later, or so that the holding part does not pass through the developing area. (3) The holding means includes a first holder that holds a portion of the workpiece located below the liquid level of the development region when the workpiece is moved through the development region where single molecules are developed. , a second holder for holding a portion of the workpiece located above the liquid level in the development area, and the first and second holders form the holding section. A forming apparatus according to claim 2, characterized in that: (4) The workpiece driving means includes a first elevating means for elevating the first holder along the predetermined direction, and a first elevating means for elevating the first holder along the predetermined direction in a region above the liquid level. The forming apparatus according to claim 3, further comprising a second elevating means for elevating and lowering the forming apparatus. (5) The holding means has a support arm supporting the first holder, and the arm has a vertical portion connected to the first elevating means and extending along the predetermined direction, and a vertical portion. a curved portion extending from the extending end of the curved portion and having an extending end provided with the first holder;
The curved portion extends coaxially with the vertical portion, and the first curved portion extends coaxially with the vertical portion.
an upright position in which the workpiece held by the holder extends downwardly from the first holder, and the first holder faces the second holder below and opposite the second holder and the workpiece extends upwardly from the first holder. The patent is characterized in that the holding means is formed to be deformable between an extended position and a curved position, and the holding means includes deformation means for deforming the curved part between the upright position and the curved position. A forming apparatus according to claim 4. (6) The workpiece driving means is provided within the liquid,
a first elevating means constituting the first holder for elevating and lowering the workpiece relative to the liquid level and holding the workpiece; and a first elevating mechanism provided above the liquid surface facing the first elevating mechanism; a second elevating means configured as the second holder for elevating and lowering the workpiece relative to the liquid level to transfer the workpiece to and from the first elevating mechanism and holding the workpiece; a first horizontal movement means for moving the first elevating means within the liquid along the liquid surface; and a second horizontal movement means for moving the second elevating means above the liquid surface along the liquid surface. 4. The forming apparatus according to claim 3, further comprising: means. (7) The holding means has a support member that supports the first and second holders, and the second holder is attached to the support member in an openable and closable manner and protrudes from the support member. The first holder has a tip end and a pair of second holding claws capable of holding the workpiece between the tip ends in the closed position, and the first holder is attached to the support member so as to be openable and closable. It has a tip located outside the second holding claw and protrudes beyond the tip of the second holding claw from the support member, and is capable of holding the workpiece between the tip in the closed position. The holding means has a pair of first holding claws, and the holding means has a first holding claw that opens and closes the first holding claws.
and a second opening/closing means for opening and closing the second holding pawl, the workpiece driving means has a lifting means for raising and lowering the holding means with respect to the liquid level, and the developing means has , having a first development region in which single molecules are developed, and a second development region formed around the first development region and in which no single molecules are developed, the first holding claw; 4. The forming apparatus according to claim 3, wherein the holding means is formed so as to pass through the second development area when the holding means is raised and lowered. (8) The holding means has a support member extending in a predetermined direction with respect to the liquid level and supporting the first and second holders, and the first holder is separated from the support member. The second holder is provided with a pair of pins extending from the first holder and extending from the first holder, each having a tip end and capable of holding the workpiece between the tip ends. A pair of pins are located spaced apart from each other and extend from the support member and each have a tip, and are capable of holding the workpiece between the tip portions, and the development region has a single molecule. The workpiece drive mechanism includes a first development region in which a single molecule is developed, and a second development region formed adjacent to the first development region in which a single molecule is not developed. 1 and/
Alternatively, the supporting member is raised and lowered along the predetermined direction through the second development area while the workpiece is held by a second holder, whereby the held workpiece is raised and lowered through the first development area. while the second holder is located above the liquid level, the holding means moves the pins of the second holder to a closed position where the workpiece can be held; a second opening mechanism for moving pins of the second holder to an open position allowing passage through the second deployment area while the second holder crosses the liquid surface and is located within the liquid; , while the first holder is located in the liquid, the pins of the first holder are moved to a closed position where the work can be held, and when the first holder crosses the liquid surface; A first opening mechanism that moves the pins of the first holder to an open position where they can pass through the second deployment area while the first holder is located above the liquid level. A forming apparatus according to claim 3.