JPH0129413Y2 - - Google Patents
Info
- Publication number
- JPH0129413Y2 JPH0129413Y2 JP18377283U JP18377283U JPH0129413Y2 JP H0129413 Y2 JPH0129413 Y2 JP H0129413Y2 JP 18377283 U JP18377283 U JP 18377283U JP 18377283 U JP18377283 U JP 18377283U JP H0129413 Y2 JPH0129413 Y2 JP H0129413Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- gas supply
- pressure
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 18
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000007664 blowing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 39
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- -1 for safety reasons Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Feeding And Controlling Fuel (AREA)
Description
【考案の詳細な説明】
本考案はボンベ連結用ガス供給管路清浄装置に
関する。[Detailed Description of the Invention] The present invention relates to a gas supply pipe cleaning device for connecting cylinders.
種々の産業用、例えば半導体工業用等には高純
度を常に維持してガスを供給することが重要であ
る。さらにこれらのガスには毒性、可燃性、腐食
性のガスで、取扱いは危険を伴うものもあり、こ
れらのガスを収容してあるボンベ等を交換する場
合、供給ガスの高純度を維持すると共に安全性を
確保するため、ガス供給管路内にあるガスを安全
かつ完全にパージして清浄化する必要がある。 For various industrial applications, such as the semiconductor industry, it is important to supply gas while always maintaining high purity. Furthermore, some of these gases are toxic, flammable, and corrosive and can be dangerous to handle, so when replacing cylinders containing these gases, it is important to maintain the high purity of the supplied gas and to To ensure safety, it is necessary to safely and completely purge and clean the gas in the gas supply lines.
本考案者はガス供給管路の清浄化手段を種々検
討した結果、本考案装置の開発に成功したもので
あり、本考案装置の技術的構成は前記実用新案登
録請求の範囲各項に明記したとおりであるが、本
考案の一具体例を示す添付図面に基いて本考案の
構成を詳述する。 The inventor of the present invention has successfully developed the device of the present invention after studying various means for cleaning gas supply pipes, and the technical configuration of the device of the present invention is specified in each claim of the above-mentioned utility model registration. However, the configuration of the present invention will be explained in detail based on the attached drawings showing a specific example of the present invention.
第１図は本考案装置の管路略図であり、第２図
はボンベに取付けるパージアセンブリの部分断面
略図である。 FIG. 1 is a schematic diagram of the pipeline of the apparatus of the present invention, and FIG. 2 is a schematic partial cross-sectional diagram of a purge assembly attached to a cylinder.
ボンベ開口に取付けられたパージアセンブリ５
に連通するガス供給管路は、ガス供給側Ｆに向つ
て順次、一次側圧力指示計６、開閉弁７、減圧弁
８、二次側圧力指示計９、開閉弁１０、逆止弁１
１及びフイルター１２を備えている。 Purge assembly 5 attached to the cylinder opening
The gas supply pipeline connected to the gas supply side F includes a primary pressure indicator 6, an on-off valve 7, a pressure reducing valve 8, a secondary pressure indicator 9, an on-off valve 10, and a check valve 1.
1 and a filter 12.
ガスベント用管路は前記ガス供給管路の一次側
圧力指示計６を介して分岐してあり、ベントガス
処理部Ｖに連通してあり、有害ガスを処理する機
構としてある。該ベント用管路は開閉弁１６及び
逆止弁１５を備えており、更にガス供給管路の二
次側圧力指示計９を介してバイパス管路により該
ガス供給管路に連通してあり、このバイパス管路
には開閉弁１３及び逆止弁１４が設けてある。 The gas vent pipe is branched via the primary side pressure indicator 6 of the gas supply pipe and communicates with the vent gas processing section V, serving as a mechanism for processing harmful gases. The vent pipe is equipped with an on-off valve 16 and a check valve 15, and is further communicated with the gas supply pipe through a bypass pipe via a secondary side pressure indicator 9 of the gas supply pipe. This bypass line is provided with an on-off valve 13 and a check valve 14.
一方、パージアセンブリ５のパージノズル５２
は清浄用ガス源に連通してあり、この清浄用ガス
吹込管路には逆止弁１及び２、開閉弁３及びフイ
ルター４が設けてある。尚、第１図において１７
はボンベ口金開閉器、第２図の５１はガス供給口
（パージガス排出口も兼ねる）であり、これはな
るべくボンベの取付け部から遠ざけて設けるのが
好ましい。 On the other hand, the purge nozzle 52 of the purge assembly 5
is in communication with a cleaning gas source, and check valves 1 and 2, an on-off valve 3, and a filter 4 are provided in this cleaning gas blowing line. In addition, in Figure 1, 17
Reference numeral 51 in FIG. 2 indicates a gas supply port (also serves as a purge gas discharge port), and it is preferable to provide this as far away from the cylinder mounting portion as possible.
本考案装置は前述の如き構成からなつている
が、本考案装置の作動プロセスを以下に詳述す
る。本考案装置のプロセスは手動、自動の何れも
可能であり、手動の場合は各開閉弁をプロセス順
に作動させることもできる。以下各プロセスにつ
いて説明する。 The device of the present invention has the above-mentioned configuration, and the operating process of the device of the present invention will be explained in detail below. The process of the device of the present invention can be performed either manually or automatically, and in the case of manual operation, each on-off valve can be operated in the order of the process. Each process will be explained below.
ａ 清浄化−気密−サイクル清浄化工程
ボンベを固定し開閉器１７をセツトする。清浄
用ガス（N2ガス）が流れているか否かを開閉弁
３を開いて確認する。一次側圧力指示計６の指針
が圧力の上昇を示すことにより確認できる。この
際N2ガスはパージアセンブリ５を通り口金部内
に残留している有害ガスを追い出す。一次側圧力
指示計６で昇圧が確認されたら、ベント用開閉弁
１６を開くと該指示計６の指針が下り、N2ガス
がガスベント用管路を流れていることが確認でき
る。ベント用開閉弁１６を閉じると該指示計６が
昇圧を示し、この操作により荒パージが完了す
る。ついで、ベント用開閉弁１６を閉じたまゝ放
置するとガス洩れをチエツクすることができる。a Cleaning-Airtight-Cycle Cleaning Step The cylinder is fixed and the switch 17 is set. Open the on-off valve 3 and check whether the cleaning gas ( N2 gas) is flowing. This can be confirmed by the pointer of the primary side pressure indicator 6 indicating a rise in pressure. At this time, the N 2 gas passes through the purge assembly 5 to expel any harmful gas remaining in the mouthpiece. When pressure rise is confirmed by the primary side pressure indicator 6, when the vent on-off valve 16 is opened, the pointer of the indicator 6 goes down, confirming that N 2 gas is flowing through the gas vent pipe. When the vent on-off valve 16 is closed, the indicator 6 indicates pressure increase, and this operation completes the rough purge. Next, by leaving the vent on-off valve 16 closed, it is possible to check for gas leakage.
次に、開閉弁１６及び３の開閉を交互に10数回
繰返し、サイクル・パージを行ない、従つて系内
は充分に清浄化され、有害ガス、不純物等は皆無
となる。 Next, cycle purge is performed by alternately opening and closing the on-off valves 16 and 3 more than 10 times, so that the inside of the system is thoroughly cleaned and free of harmful gases and impurities.
ｂ ガス供給工程
前記ａ工程が完了したことを確認し、開閉器１
７を開とすると、ボンベ内のガスの供給が開始さ
れ一次側圧力指示計の指針が昇圧したことを示
す。開閉弁７を開くと減圧弁８の１次圧が上昇す
る。該減圧弁８を調圧すると該減圧弁８の二次圧
が上昇し、二次側圧力指示計９の指針が昇圧した
ことを示す。バイパス管路の開閉弁１３を開き、
一時的にガスをベントする。この際二次側圧力指
示計の指針が下ることにより確認できる。この操
作を数回繰返すことにより、供給管路内のN2ガ
スを完全にパージすることができる。次いで、前
記開閉弁１３を閉じ（二次側圧力指示計が昇圧し
たことを示す）、アイソレート用の開閉弁１０を
開くことにより高純度のガスが使用側Ｆに供給さ
れる。b Gas supply process After confirming that the above step a has been completed, switch 1
When 7 is opened, the supply of gas in the cylinder is started and the pointer of the primary side pressure indicator indicates that the pressure has increased. When the on-off valve 7 is opened, the primary pressure of the pressure reducing valve 8 increases. When the pressure of the pressure reducing valve 8 is adjusted, the secondary pressure of the pressure reducing valve 8 increases, and the pointer of the secondary side pressure indicator 9 indicates that the pressure has increased. Open the on-off valve 13 of the bypass pipeline,
Temporarily vent the gas. At this time, it can be confirmed by the pointer of the secondary side pressure indicator going down. By repeating this operation several times, the N 2 gas in the supply pipe can be completely purged. Next, the on-off valve 13 is closed (the secondary side pressure indicator indicates that the pressure has increased), and the isolation on-off valve 10 is opened to supply high-purity gas to the use side F.
ｃ ガス供給停止−ボンベ交換工程
開閉弁１０を閉じ、開閉器１７も閉じる。開閉
器１７をボンベ頭部より外す。バイパス用開閉弁
１３を開くと、二次側圧力指示計９が降圧したこ
とを示し、次いで一次側圧力指示計６も降圧した
ことを示す。開閉弁７、減圧弁８及び開閉弁（バ
イパス用）１３を順次閉じ、開閉弁３を開き、
N2ガスを流すと、一次側圧力指示計６が昇圧し
たことを示す。開閉弁３を閉じ、ベント用開閉弁
１６を開くと、一次側圧力指示計６が降圧したこ
とを示す。次いで前記開閉弁１６を閉じる。前記
の開閉弁３の開、閉及び開閉弁１６の開、閉の動
作を更に12回程繰返し行なうことにより、系内は
充分にパージされ、ボンベのガスが系内に残留し
ない。ついで、本考案装置のパージアセンブリ５
からボンベの口金をはずし、ボンベを交換する。c Gas supply stop - cylinder replacement process Close the on-off valve 10 and close the switch 17 as well. Remove the switch 17 from the cylinder head. When the bypass on-off valve 13 is opened, the secondary pressure indicator 9 indicates that the pressure has decreased, and then the primary pressure indicator 6 also indicates that the pressure has decreased. Close the on-off valve 7, pressure reducing valve 8 and on-off valve (bypass) 13 in sequence, open the on-off valve 3,
When N 2 gas is supplied, the primary side pressure indicator 6 indicates that the pressure has increased. When the on-off valve 3 is closed and the vent on-off valve 16 is opened, the primary side pressure indicator 6 indicates that the pressure has decreased. Then, the on-off valve 16 is closed. By repeating the opening and closing of the on-off valve 3 and the opening and closing of the on-off valve 16 about 12 times, the system is sufficiently purged and no gas from the cylinder remains in the system. Next, purge assembly 5 of the device of the present invention
Remove the cap from the cylinder and replace the cylinder.
以上の具体例における一次側圧力指示計６及び
二次側圧力指示計９は何れも指示計付圧力伝送器
とすることができる。 Both the primary side pressure indicator 6 and the secondary side pressure indicator 9 in the above specific example can be a pressure transmitter with an indicator.
これらの各弁、圧力指示計等は、一般にすべて
ボンベボツクス内に収納されているので、ボンベ
内のガスが可燃性、爆発性のものである場合に
は、安全のために、開閉弁としてエア作動弁を用
いるのが好ましい。 These valves, pressure indicators, etc. are generally all housed in the cylinder box, so if the gas in the cylinder is flammable or explosive, for safety reasons, air can be used as an on-off valve. Preferably, actuated valves are used.
本考案装置は以上詳述した如き構成及び作用効
果を達成し得るものであり、手動または自動の両
方何れでも簡単に操作することができ、かつ構造
も公知の開閉弁、減圧弁、逆止弁等を組み合せる
ことにより、有害ガスを大気中に放出することな
くボンベを容易に交換することができ、実用的効
果は顕著なものである。 The device of the present invention can achieve the configuration and operation effects detailed above, and can be easily operated either manually or automatically, and has a known structure such as an on-off valve, a pressure reducing valve, or a check valve. By combining the above, cylinders can be easily replaced without releasing harmful gases into the atmosphere, and the practical effect is remarkable.
第１図は本考案装置の管路略図であり、第２図
はボンベに取付けるパージアセンブリの部分断面
略図である。
図中の符号は次のとおりである。１……逆止
弁、２……逆止弁、３……開閉弁（パージ用）、
４……フイルター、５……パージアセンブリ−、
６……圧力指示計（一次側）または圧力伝送器
（指示計付）、７……開閉弁（プロセス用）、８…
…減圧弁、９……圧力指示計（二次側）または圧
力伝送器（指示計付）、１０……開閉弁（アイソ
レート）、１１……逆止弁、１２……フイルター、
１３……開閉弁（バイパス用）、１４……逆止弁、
１５……逆止弁、１６……開閉弁（ベント用）、
１７……ボンベ口金開閉器、５１……ガス供給
口、５２……パージノズル。
FIG. 1 is a schematic diagram of the pipeline of the apparatus of the present invention, and FIG. 2 is a schematic partial cross-sectional diagram of a purge assembly attached to a cylinder. The symbols in the figure are as follows. 1...Check valve, 2...Check valve, 3...Open/close valve (for purge),
4... Filter, 5... Purge assembly,
6...Pressure indicator (primary side) or pressure transmitter (with indicator), 7...Opening/closing valve (for process), 8...
...Pressure reducing valve, 9...Pressure indicator (secondary side) or pressure transmitter (with indicator), 10...Opening/closing valve (isolate), 11...Check valve, 12...Filter,
13...Opening/closing valve (for bypass), 14...Check valve,
15...Check valve, 16...Open/close valve (for vent),
17...Cylinder cap switch, 51...Gas supply port, 52...Purge nozzle.
Claims (1)
６、開閉弁７、減圧弁８、二次側圧力指示計
９、開閉弁１０及びフイルター１２を夫々有す
るガス供給管路を具備し、前記ガス供給管路の
一次側圧力指示計６を介して開閉弁１６を有す
るガスベント用管路を設け、該ガス供給管路と
該ガスベント用管路を開閉弁１３を有するバイ
パス管路により連通し、かつパージアセンブリ
５のパージノズル５２に連通し、開閉弁３及び
フイルター４を具備する清浄用ガス吹込管路を
設けたボンベ連結用ガス供給管路清浄装置。 (2) 前記パージアセンブリ５のパージノズル５２
がガス通路の最深部で開口している実用新案登
録請求の範囲第１項記載のボンベ連結用ガス供
給管路清浄装置。 (3) 前記各開閉弁３，７，１０，１６がエア作動
弁である実用新案登録請求の範囲第１項記載の
ボンベ連結用ガス供給管路清浄装置。[Scope of Claim for Utility Model Registration] (1) In order toward the gas supply side F, the primary side pressure indicator 6, the on-off valve 7, the pressure reducing valve 8, the secondary side pressure indicator 9, the on-off valve 10, and the filter 12, respectively. A gas vent pipe is provided with a gas supply pipe having an on-off valve 16 via an inlet pressure indicator 6 of the gas supply pipe, and the gas vent pipe has an on-off valve 16 between the gas supply pipe and the gas vent pipe. 13, a gas supply pipe cleaning device for cylinder connection, which is provided with a cleaning gas blowing pipe that communicates with a purge nozzle 52 of a purge assembly 5 and is equipped with an on-off valve 3 and a filter 4. (2) Purge nozzle 52 of the purge assembly 5
The gas supply pipe cleaning device for cylinder connection according to claim 1, wherein the gas passage is opened at the deepest part of the gas passage. (3) The gas supply line cleaning device for cylinder connection according to claim 1, wherein each of the on-off valves 3, 7, 10, and 16 is an air-operated valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18377283U JPS6091898U (en) | 1983-11-30 | 1983-11-30 | Gas supply pipe cleaning device for cylinder connection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18377283U JPS6091898U (en) | 1983-11-30 | 1983-11-30 | Gas supply pipe cleaning device for cylinder connection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6091898U JPS6091898U (en) | 1985-06-22 |
| JPH0129413Y2 true JPH0129413Y2 (en) | 1989-09-07 |
Family
ID=30397645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18377283U Granted JPS6091898U (en) | 1983-11-30 | 1983-11-30 | Gas supply pipe cleaning device for cylinder connection |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6091898U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5065115B2 (en) * | 2008-03-25 | 2012-10-31 | 日本エア・リキード株式会社 | Gas supply system |
-
1983
- 1983-11-30 JP JP18377283U patent/JPS6091898U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6091898U (en) | 1985-06-22 |
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