JPH01276454A - Initializing method for magneto-optical recording medium - Google Patents
Initializing method for magneto-optical recording mediumInfo
- Publication number
- JPH01276454A JPH01276454A JP10274688A JP10274688A JPH01276454A JP H01276454 A JPH01276454 A JP H01276454A JP 10274688 A JP10274688 A JP 10274688A JP 10274688 A JP10274688 A JP 10274688A JP H01276454 A JPH01276454 A JP H01276454A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- light
- recording medium
- optical recording
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10502—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing characterised by the transducing operation to be executed
- G11B11/10526—Bulk initialisation or erasing, e.g. at least one whole information track with a single action
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/10576—Disposition or mounting of transducers relative to record carriers with provision for moving the transducers for maintaining alignment or spacing relative to the carrier
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気光学効果により信号の記録・再生が行なわ
れるディスク状、カード状の光磁気記録媒体の初期化方
法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for initializing a magneto-optical recording medium in the form of a disk or a card, in which signals are recorded and reproduced by the magneto-optic effect.
高密度記録可能なメモリ媒体として光磁気タイプが知ら
れている。このタイプの媒体は、第2図に示されるよう
にトラッキング制御用の案内溝(グループ部)2と信号
記録トラック(ランド部)3とを有し、この信号記録ト
ラック3は案内溝2間に設けられ、いわゆる溝間記録が
行なわれるようになっている。情報の記録、再生はビー
ム16の移動により行なわれる。A magneto-optical type is known as a memory medium capable of high-density recording. As shown in FIG. 2, this type of medium has a guide groove (group part) 2 for tracking control and a signal recording track (land part) 3, and this signal recording track 3 is located between the guide grooves 2. A so-called groove-to-groove recording is performed. Information is recorded and reproduced by moving the beam 16.
使用前のディスク、または記録済のディスクに新たに情
報を記録する場合、記録トラック3の磁性層の磁化の向
きを一度消去方向に一律にそろえ、初期化しなければな
らない。When new information is to be recorded on a disk before use or a disk on which information has been recorded, the direction of magnetization of the magnetic layer of the recording track 3 must be uniformly aligned in the erasing direction and initialized.
従来、この初期化は、バイアス用コイルを用いて光磁気
記録媒体に対して消去方向に磁場を印加し、この状態に
おいて、光出力が記録時と同等またはそれ以上の連続ビ
ームを照射して磁性層の温度を上昇させることにより、
その部分の保磁力を低下させ、磁化の向きを上述の磁場
の向きにそろえることにより行なわれている。Conventionally, this initialization involves applying a magnetic field in the erasing direction to the magneto-optical recording medium using a bias coil, and in this state, irradiating a continuous beam with an optical output equal to or greater than that during recording to generate a magnetic field. By increasing the temperature of the layer,
This is done by lowering the coercive force of that part and aligning the direction of magnetization with the direction of the above-mentioned magnetic field.
(発明が解決しようとする課題)
しかしながら、従来の消去では案内溝(グループ部)に
おける磁性層の磁化は消去方向にそろっていないため、
この部分の磁化の不整合が再生信号にノイズとしてあら
れれ、その結果C/N比(Carrier to
N o is eRatio;ディスクに単一周波数の
信号を記録し、再生して、一定の帯域の測定系でスペク
トル分析したときの信号対雑音比)が低下してしまうと
いう問題点があった。(Problem to be Solved by the Invention) However, in conventional erasing, the magnetization of the magnetic layer in the guide groove (group portion) is not aligned in the erasing direction.
The magnetization mismatch in this part appears as noise in the reproduced signal, and as a result, the C/N ratio (Carrier to
There is a problem in that the signal-to-noise ratio (signal-to-noise ratio when a single-frequency signal is recorded on a disk, reproduced, and subjected to spectrum analysis using a measurement system of a certain band) is reduced.
また、この問題を解決する方法として、トラッキングの
極性を切り替えて案内溝(案内トラック)にもビームを
照射し、この部分も消去を行なうことが考えられる。し
かし、この方法は、従来に比べて2倍の初期化時間を必
要とするという問題がある。Further, as a method to solve this problem, it is conceivable to switch the tracking polarity and irradiate the beam onto the guide groove (guide track) so that this portion is also erased. However, this method has a problem in that it requires twice as much initialization time as the conventional method.
本発明の光磁気記録媒体の初期化方法は、先行するトラ
ッキング制御用ビームを用いて光学系のサーボを行ない
ながら、この制御用ビームに追従し記録トラックおよび
その両サイドの案内トラックを照射できる消去ビームに
より一度の消去でディスク全面の磁化の向きを消去状態
の方向にそろえるものである。The method for initializing a magneto-optical recording medium of the present invention is to perform servoing of the optical system using a preceding tracking control beam, and then follow this control beam to irradiate the recording track and the guide tracks on both sides of the erase track. A beam is used to align the magnetization direction of the entire surface of the disk in the direction of the erased state in one erase.
スポット系の大きな消去ビームを用いて記録トラックお
よび案内トラックを一度に消去することにより、初期化
時間の短縮が可能となる。また、この消去ビームとトラ
ッキング、フォーカッシング用ビーム(再生ビーム)と
は、共通の光学レンズを介してディスク上に集光され、
また、それぞれのビームの波長差を利用することにより
再生ビームの反射光が選択的に取出されてサーボ情報が
得られるため、再生ビームを用いて光学系のトラッキン
グおよびフォー力ッシングサーボを行ないながら、これ
に追従する消去ビームで正確に初期化を行なうことがで
きる。By erasing the recording track and the guide track at once using a large spot type erasing beam, the initialization time can be shortened. In addition, this erasing beam and the tracking and focusing beam (reproduction beam) are focused onto the disk through a common optical lens.
In addition, by utilizing the wavelength difference between the respective beams, the reflected light of the playback beam is selectively extracted and servo information can be obtained. Accurate initialization can be performed with an erasing beam that follows.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明の一実施例を適用するための初期化装置
の構成を示す図である。FIG. 1 is a diagram showing the configuration of an initialization device to which an embodiment of the present invention is applied.
案内溝2と記録トラック3とを有する光ディスク1の上
方には消去磁場を形成するためのバイアスコイル13が
設けられている。また、レーザ光照射手段として、半導
体レーザ4,8と、集光レンズ5.9と、偏光レンズ6
と、フィルタ10と、絞りレンズ7.11と、光検出器
12と、自動焦点/トラッキングアクチュエータ14と
が設けられている。絞りレンズ7は光軸方向ならびにト
ラックと垂直な方向の2軸方向に移動可能に保持されて
いる。半導体レーザ4は波長830mmのレーザ光2を
出射し、半導体レーザ8は波長780mmのレーザ光m
を出射する。A bias coil 13 is provided above the optical disk 1 having a guide groove 2 and a recording track 3 for forming an erasing magnetic field. Further, as laser beam irradiation means, semiconductor lasers 4 and 8, a condensing lens 5.9, and a polarizing lens 6 are used.
, a filter 10, an aperture lens 7.11, a photodetector 12, and an autofocus/tracking actuator 14. The diaphragm lens 7 is held movably in two axes: an optical axis direction and a direction perpendicular to the track. The semiconductor laser 4 emits a laser beam 2 with a wavelength of 830 mm, and the semiconductor laser 8 emits a laser beam m with a wavelength of 780 mm.
is emitted.
次に、本実施例の動作を説明する。Next, the operation of this embodiment will be explained.
バイアスコイル13に電流を流して消去磁場を形成し、
この状態で、半導体レーザ4,8をともに発光させる。A current is passed through the bias coil 13 to form an erasing magnetic field,
In this state, both semiconductor lasers 4 and 8 are caused to emit light.
半導体レーザ4の出力光2は、偏光ビームスプリッタ6
および絞りレンズ7を介して光磁気記録ディスク1上に
集光し、スポットLを形成する。スポットL(ビームI
L)の光磁気記録ディスク1からの反射光は絞りレンズ
7.偏光ビームスプリッタ6、フィルタ10.絞りレン
ズ11を順次通過して光検出器12に導かれる。光検出
器12は4分割のPINダイオードで構成されており、
ここで光電変換が行なわれ、得られた電気信号は自動焦
点/トラッキングアクチュエータ14に送出される。こ
れを受けてアクチュエータ14は、絞りレンズ7を光軸
方向およびトラックと垂直な方向に制御してフォー力ッ
シングおよびトラッキング調整を行なう。The output light 2 of the semiconductor laser 4 is sent to a polarizing beam splitter 6.
The light is focused onto the magneto-optical recording disk 1 via the aperture lens 7 to form a spot L. Spot L (beam I
The reflected light from the magneto-optical recording disk 1 (L) is passed through the aperture lens 7. Polarizing beam splitter 6, filter 10. The light passes sequentially through an aperture lens 11 and is guided to a photodetector 12. The photodetector 12 is composed of a 4-divided PIN diode,
Photoelectric conversion is performed here, and the resulting electrical signal is sent to the autofocus/tracking actuator 14. In response to this, the actuator 14 controls the aperture lens 7 in the optical axis direction and in a direction perpendicular to the track to perform force adjustment and tracking adjustment.
一方、半導体レーザ8から出射された光mは、光2と同
じく偏光ビームスプリッタ6、絞りレンズ7を介して光
磁気記録ディスク1上に、トラックピッチ幅以上のビー
ム径を有するスポットMを形成する。この光スポットM
は、常に記録トラック3およびその内側の案内トラック
の少なくとも局以上を照射する。また、このスポットM
の反射光はフィルタ10により阻止され、光検出器12
には到達しない。したがって、絞りレンズ7のフォー力
ッシングおよびトラッキング調整は光1の反射光に基づ
いて行なわれる。ただし、光mは光2と同じく絞りレン
ズ7により光磁気記録ディスク1上に集光されるため、
光スポットL、光スポットMはトラックと垂直方向に同
時にかつ同一量移動し、光スポットMは光スポットLに
追従してフォー力ッシングおよびトラッキングサーボさ
れながら正確に移動する。これにより磁化の向きがバイ
アスコイル13の発生する磁場の向きに一律にそろえら
れ、初期化が行なわれる。On the other hand, the light m emitted from the semiconductor laser 8 forms a spot M having a beam diameter equal to or larger than the track pitch width on the magneto-optical recording disk 1 via the polarizing beam splitter 6 and the aperture lens 7 like the light 2. . This light spot M
always irradiates at least the recording track 3 and the guide track inside it. Also, this spot M
The reflected light is blocked by the filter 10 and the photodetector 12
will not be reached. Therefore, the force adjustment and tracking adjustment of the aperture lens 7 are performed based on the reflected light of the light 1. However, since the light m is focused on the magneto-optical recording disk 1 by the aperture lens 7 like the light 2,
The light spot L and the light spot M move simultaneously and by the same amount in the direction perpendicular to the track, and the light spot M follows the light spot L and moves accurately while being subjected to force steering and tracking servo. As a result, the direction of magnetization is uniformly aligned with the direction of the magnetic field generated by the bias coil 13, and initialization is performed.
上述の構成により、バイアス用コイル13により磁場を
印加しながらトラッキング制御用の光出力を1mW、消
去パワーを10mWとしてディスク回転数180Orp
mで消去を行なったところ、従来の再生と同じビーム径
で消去する場合と比べて再生信号のノイズレベルが低下
した。また、−度の消去で記録トラックおよび案内トラ
ックを消去できるため初期化の時間短縮が可能となった
。With the above configuration, while applying a magnetic field by the bias coil 13, the optical output for tracking control is 1 mW, the erasing power is 10 mW, and the disk rotation speed is 180 Orp.
When erasing was performed with m, the noise level of the reproduced signal was lower than when erasing with the same beam diameter as in conventional reproduction. In addition, since the recording track and the guide track can be erased by -degree erasure, the initialization time can be shortened.
以上説明したように本発明は、正確にフォー力ッシング
およびトラッキング制御された大口径の光ビームを用い
て記録トラック場よび案内トラックを一度に消去するた
め、ノイズを低減でき、かつ初期化時間を短縮すること
が可能となる。As explained above, the present invention erases the recording track field and the guide track at once using a large-diameter light beam that is precisely controlled by forcing and tracking, thereby reducing noise and reducing the initialization time. It becomes possible to shorten the length.
第1図は本発明の一実施例を適用するための初期化装置
の構成を示す図、
第2図は光磁気記録媒体(ディスク)の基本的構成を示
す図である。
1・・・・・・・・・・光磁気ディスク、2・・・・・
・・・・・案内溝、
3・・・・・・・・・・記録トラック、4.8・・・・
・・半導体レーザ、
5.9・・・・・・集光レンズ、
6・・・・・・・・・・偏光ビームスプリッタ、7.1
1・・・・絞りレンズ、
12・・・・・・・・光検出器、
13・・・・・・・・バイアスコイル、14・・・・・
・・・自動焦点/トラッキングアクチュエータ、
L、M・・・・・・光スポット。FIG. 1 is a diagram showing the configuration of an initialization device to which an embodiment of the present invention is applied, and FIG. 2 is a diagram showing the basic configuration of a magneto-optical recording medium (disk). 1......Magneto-optical disk, 2...
...Guide groove, 3... Recording track, 4.8...
... Semiconductor laser, 5.9 ... Condensing lens, 6 ... Polarizing beam splitter, 7.1
1...Aperture lens, 12...Photodetector, 13...Bias coil, 14...
...Automatic focus/tracking actuator, L, M...Light spot.
Claims (1)
案内溝間に位置する信号記録トラックとを有する光磁気
記録媒体を、消去方向に形成された磁場中におき、この
状態で、光を前記信号記録トラックおよびその両側の案
内溝に照射し、該光および光磁気記録媒体を所定方向に
移動させ、該媒体の全面に前記光の照射を行なって磁化
の向きを前記磁場の方向にそろえて初期化を行なう光磁
気記録媒体の初期化方法であって、 前記記録トラックのピッチ幅に適合するスポット径を有
する第1のビームによりトラッキングおよびフォーカッ
シングサーボを行ない、スポット径が該第1のビームよ
り大きく、かつ該第1のビームに追従する第2のビーム
により前記信号記録トラックおよびその両側に位置する
案内溝を照明し、これにより、被照明部の磁化の向きを
前記磁場の方向にそろえて初期化を行なう光磁気記録媒
体の初期化方法。 2、トラッキング制御用案内溝と該トラッキング制御用
案内溝間に位置する信号記録トラックとを有する光磁気
記録媒体を、消去方向に形成された磁場中におき、この
状態で、光を前記信号記録トラックおよびその両側の案
内溝に照射し、該光および光磁気記録媒体を所定方向に
移動させ、該媒体の全面に前記光の照射を行なって磁化
の向きを前記磁場の方向にそろえて初期化を行なう光磁
気記録媒体の初期化方法であって、 第1の光源から出射された光をレンズを用いて前記信号
記録トラック上に集光し、この集光ビームをトラッキン
グおよびフォーカッシング制御用ビームとして用いて前
記レンズのサーボを行ない、これと同時に第2の光源か
ら出射され、前記第1の光源から出射された光とは波長
の異なる光を前記レンズに導き、このレンズを共用して
前記信号記録トラックおよびその両側に位置する前記案
内溝の少なくとも所定ピッチ幅以上を照明し、これによ
り、被照明部の磁化の向きを前記磁場の方向にそろえて
初期化を行なう光磁気記録媒体の初期化方法。 3、前記第1の光源から出射され、トラッキングおよび
フォーカッシング制御用に用いられるビームは、信号再
生に用いられる再生ビームと同一スポット径である請求
項2記載の光磁気記録媒体の初期化方法。[Claims] 1. A magneto-optical recording medium having tracking control guide grooves and a signal recording track located between the tracking control guide grooves is placed in a magnetic field formed in the erasing direction, and in this state. , irradiate the signal recording track and the guide grooves on both sides thereof with light, move the light and the magneto-optical recording medium in a predetermined direction, and irradiate the entire surface of the medium with the light to change the direction of magnetization according to the magnetic field. A method for initializing a magneto-optical recording medium by aligning the recording track in a direction, the method comprising: performing tracking and focusing servo with a first beam having a spot diameter matching the pitch width of the recording track; A second beam that is larger than the first beam and follows the first beam illuminates the signal recording track and the guide grooves located on both sides thereof, thereby changing the direction of magnetization of the illuminated portion by the magnetic field. A method for initializing a magneto-optical recording medium by aligning it in the direction of . 2. A magneto-optical recording medium having a tracking control guide groove and a signal recording track located between the tracking control guide grooves is placed in a magnetic field formed in the erasing direction, and in this state, light is applied to the signal recording medium. The track and the guide grooves on both sides thereof are irradiated, the light and the magneto-optical recording medium are moved in a predetermined direction, and the entire surface of the medium is irradiated with the light to align the direction of magnetization with the direction of the magnetic field and initialize it. A method for initializing a magneto-optical recording medium in which light emitted from a first light source is focused onto the signal recording track using a lens, and the focused beam is used as a tracking and focusing control beam. At the same time, light emitted from a second light source and having a different wavelength from the light emitted from the first light source is guided to the lens, and this lens is used in common to servo the lens. Initializing a magneto-optical recording medium by illuminating at least a predetermined pitch width or more of a signal recording track and the guide grooves located on both sides thereof, thereby aligning the direction of magnetization of the illuminated portion with the direction of the magnetic field. method. 3. The method for initializing a magneto-optical recording medium according to claim 2, wherein the beam emitted from the first light source and used for tracking and focusing control has the same spot diameter as a reproduction beam used for signal reproduction.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10274688A JPH01276454A (en) | 1988-04-27 | 1988-04-27 | Initializing method for magneto-optical recording medium |
DE1989612390 DE68912390T2 (en) | 1988-04-26 | 1989-04-21 | Method and device for initializing an area lying between the tracks of a magneto-optical recording medium. |
EP19890303971 EP0339875B1 (en) | 1988-04-26 | 1989-04-21 | Method and apparatus for initializing intermediate region between tracks on magnetooptical recording medium |
US08/082,507 US5309416A (en) | 1988-04-26 | 1993-06-25 | Method and apparatus for initializing intermediate region between tracks on magnetooptical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10274688A JPH01276454A (en) | 1988-04-27 | 1988-04-27 | Initializing method for magneto-optical recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01276454A true JPH01276454A (en) | 1989-11-07 |
Family
ID=14335792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10274688A Pending JPH01276454A (en) | 1988-04-26 | 1988-04-27 | Initializing method for magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01276454A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01286152A (en) * | 1988-05-12 | 1989-11-17 | Nec Corp | Magneto-optical disk manufacture equipment |
-
1988
- 1988-04-27 JP JP10274688A patent/JPH01276454A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01286152A (en) * | 1988-05-12 | 1989-11-17 | Nec Corp | Magneto-optical disk manufacture equipment |
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