JPH01192006A - Production of thin film magnetic head - Google Patents

Abstract

PURPOSE:To prevent swelling of an insulating layer and to obtain a head which is hardly deteriorated in magnetic characteristics by forming the insulating layer by heating and curing of an inorg. material coated by a sol-gel method. CONSTITUTION:The insulating layer 3 which insulates a conductor coil 4 from magnetic layers 1, 5 is formed of the inorg. material which is coated by the sol-gel method and is cured by a heat treatment. The flat layer of the inorg. material such as SiO2 of high purity is easily formed by heating at a relatively low temp. in the sol-gel method. The inorg. material is generally less likely to be swollen by humidity than org. materials and decreases the volumetric change of the insulating layer 3 by a temp. change. The head gap part is, therefore, less cracked and the insulating layer 3 is prevented from swelling even if said layer is exposed to high humidity. The magnetic head which is hardly deteriorated in the characteristic is thus obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a thin film magnetic head used in a magnetic recording device.

[Conventional technology]

The drawing is a cross-sectional view illustrating a method of manufacturing a conventional thin-film magnetic head. In FIG. 99, (1) is a lower magnetic node.

(2) is a gap layer, (3) is an insulating layer, and (4) is a conductor coil.

(5) is the upper magnetic layer.

First, the general manufacturing method for thin film magnetic heads is as follows.

A permalloy film plated on an Al2O3-TiC substrate is formed into islands of several micrometers, and the lower magnetic layer (
1) will be provided. Next, the a12o5 film is patterned by dry etching, and unnecessary parts are removed by chemical etching to form a gap layer (2). Next, after patterning the photosensitive resist by photolithography, an insulating layer (3) is provided by heat curing. Next, a conductor coil (4) is provided using steel in the same manner as in forming the lower magnetic layer.
An insulating layer (3) and an upper magnetic layer (5) are sequentially provided.

A conventional thin film magnetic head is constructed as described above.

By passing a current through the conductor coil (4) and inducing a current '4', information is written to and read from the magnetic disk. The conductor coil (4) goes up to the insulating layer (3) made of organic material such as resist, and the magnetic layer (1), (51
and is insulated from the adjacent conductor coil (4).

[Problem to be solved by the invention]

The conventional thin film magnetic head is constructed as described above.
The insulating layer (3) is formed by spin-coding an organic photoresist and then baking and hardening it.

Therefore, if a thin film magnetic head is placed in high humidity, the insulating layer (3
) may swell, causing cracks to occur in the head gap portion (2a) or deformation of the magnetic layer (5), leading to deterioration of the magnetic properties of the head. Further, since the volume of the insulating layer (3) changes greatly due to temperature changes, there is a possibility that a similar effect may be brought about.

The present invention has been made to solve the above-mentioned problems, and aims to prevent the swelling of the insulating layer (3) and to obtain a thin film magnetic head in which the la magnetic characteristics are less likely to deteriorate.

[Means to solve the charge]

A method of manufacturing a thin film magnetic head according to the present invention is as follows.

It is formed by heating and curing an inorganic material coated with a sol-gel method.

[Function] In this invention, the insulating layer is formed of a scorched proboscis coated by a sol-gel method and hardened by an fA treatment. Inorganic materials generally swell with humidity more than organic materials. Volume changes due to temperature changes are also small, so the insulating layer will not swell even if the thin-film magnetic head is exposed to high humidity.

Further, the volume change of the insulating layer due to temperature change is small.

Therefore, it is possible to prevent deterioration of the custom-made head due to the occurrence of cracks in the head gap portion and deformation of the magnetic layer. In addition, since the insulating layer is coated using the sol-gel method,
Easy to flatten.

〔Example〕

A thin film magnetic head according to an embodiment of the present invention.

It is completely the same as the conventional one shown in the drawings except for the material and formation method of the insulating layer (3). Namely.

The insulating layer (3) is formed by heating and curing an inorganic material coated by a sol-gel method.

An example of a specific method for forming insulation No. 31 is shown below. For example, when using 8102 t- as an inorganic substance, first dilute 5to2 tetra-ethoxy-silane with an organic solvent, and add water to hydrolyze it. This sol-like 8102 is applied onto the gap layer (2) or the conductor coil (4), and then heat-cured at a temperature of about 250°C to form a gel. Form layer (3).

In the thin-film magnetic head configured as described above, the insulating layer (3) is formed of an inorganic material coated by the sol-gel method. A flat layer is easily formed. Furthermore, this method is characterized by being able to be performed using inexpensive equipment and by repeating simple operations. Therefore, if the inorganic insulating layer (3) is formed using the sol-gel method, it will not swell even if the a-molecular magnetic head is exposed to high humidity, and the volume change of the insulating layer (3) due to temperature changes can be suppressed. Therefore, it is possible to prevent deterioration of the characteristics of the head due to occurrence of cracks in the head gap portion (2a) and deformation of the magnetic layer (5).

In addition, although the said Example showed the case where S hotpot was 5to2, it is not limited to this.

For example 'rto2. 51o2-'rto2. Mu103
, 5t4N4.

It may also be BaTiO3, Or205, etc.

[Effects of the Invention] As described above, according to the present invention, the insulating layer of the thin film magnetic head is formed by heating and curing the inorganic material coated by the sol-gel method, so even if the thin film magnetic head is exposed to high humidity. Since the insulating layer does not swell and the change in volume of the insulating layer due to temperature changes is small, it is possible to prevent deterioration of head characteristics due to cracks in the head gap and deformation of the magnetic layer.

[Brief explanation of the drawing]

The drawings illustrate an embodiment of the present invention and a conventional method of manufacturing a thin film magnetic head. ? It is a front view. 2 in the figure, (1) is the lower magnetic layer, (2) is the gap +
4° (3) is an insulating layer, (4) is a conductor coil, and (5) is an upper magnetic layer.

Claims (1)

[Claims] In a method for manufacturing a thin film magnetic head in which a lower magnetic layer, a gap layer, an insulating layer, a conductor coil, an insulating layer, and an upper magnetic layer are sequentially formed on a substrate, the insulating layer is formed by heating and curing an inorganic material coated by a sol-gel method. 1. A method of manufacturing a thin film magnetic head, characterized by forming a thin film magnetic head.