JPH01176955U - - Google Patents
Info
- Publication number
- JPH01176955U JPH01176955U JP7177088U JP7177088U JPH01176955U JP H01176955 U JPH01176955 U JP H01176955U JP 7177088 U JP7177088 U JP 7177088U JP 7177088 U JP7177088 U JP 7177088U JP H01176955 U JPH01176955 U JP H01176955U
- Authority
- JP
- Japan
- Prior art keywords
- photodetecting element
- impurity
- single crystal
- crystal substrate
- silicon single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
第１図は本考案の半導体光検出素子の一実施例
を示す断面構成図、第２図は従来例を示す断面図
、第３図は空乏層近傍での電子の移動状態を示す
模式図、第４図は従来の光検出素子の波長と感度
の関係を示す図である。
１…シリコン単結晶基板、２…ｐ型層、３…絶
縁層、６…空乏層、１０…凹部。
FIG. 1 is a cross-sectional configuration diagram showing one embodiment of the semiconductor photodetecting element of the present invention, FIG. 2 is a cross-sectional diagram showing a conventional example, and FIG. 3 is a schematic diagram showing the state of electron movement near the depletion layer. FIG. 4 is a diagram showing the relationship between wavelength and sensitivity of a conventional photodetecting element. DESCRIPTION OF SYMBOLS 1... Silicon single crystal substrate, 2... P-type layer, 3... Insulating layer, 6... Depletion layer, 10... Recessed part.
Claims (1)
一部にｐ（またはｎ）型の不純物を形成した光検
出素子において、前記不純物が形成された部分は
紫外線を吸収し赤外線を透過する程度の厚さに形
成したことを特徴とする半導体光検出素子。 In a photodetecting element in which a p (or n) type impurity is formed on a part of the surface of an n (or p) type silicon single crystal substrate, the portion where the impurity is formed absorbs ultraviolet rays and transmits infrared rays. A semiconductor photodetecting element characterized in that it is formed to a thick thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7177088U JPH01176955U (en) | 1988-06-01 | 1988-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7177088U JPH01176955U (en) | 1988-06-01 | 1988-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176955U true JPH01176955U (en) | 1989-12-18 |
Family
ID=31296960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7177088U Pending JPH01176955U (en) | 1988-06-01 | 1988-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176955U (en) |
-
1988
- 1988-06-01 JP JP7177088U patent/JPH01176955U/ja active Pending