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JPH01175187U - - Google Patents

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Publication number
JPH01175187U
JPH01175187U JP7200088U JP7200088U JPH01175187U JP H01175187 U JPH01175187 U JP H01175187U JP 7200088 U JP7200088 U JP 7200088U JP 7200088 U JP7200088 U JP 7200088U JP H01175187 U JPH01175187 U JP H01175187U
Authority
JP
Japan
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7200088U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7200088U priority Critical patent/JPH01175187U/ja
Publication of JPH01175187U publication Critical patent/JPH01175187U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
図面は本考案の一実施例を示し、第1図は自走
ロボツトを示す斜視図、第2図は同側面図、第3
図は同平面図、第4図は搬送容器の斜視図、第5
図はキヤリアの斜視図である。 1……走行体、2……床面、5……荷受部、5
b……可動区画、6……作業腕、9……ウエハ、
10……キヤリア、11……搬送容器、20……
操作部、21A,21B……押引面、22……ク
ランプアーム、23……プロセス装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 床面上を移動可能な走行体に、回動自在な作業
    腕と、荷を載置可能な荷受部とを設け、この荷受
    部に荷を幅方向に移動自在に支持する複数の遊転
    ローラを配置したことを特徴とする自走ロボツト
JP7200088U 1988-05-31 1988-05-31 Pending JPH01175187U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7200088U JPH01175187U (ja) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7200088U JPH01175187U (ja) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01175187U true JPH01175187U (ja) 1989-12-13

Family

ID=31297179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7200088U Pending JPH01175187U (ja) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01175187U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022092262A1 (ja) * 2020-10-30 2022-05-05 川崎重工業株式会社 自走ロボット及びそれを備える物品搬送システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58192774A (ja) * 1982-05-07 1983-11-10 豊田工機株式会社 搬送装置の位置補正装置
JPS591650A (ja) * 1982-05-04 1984-01-07 アルカン・インタ−ナショナル・リミテッド 金属合金製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591650A (ja) * 1982-05-04 1984-01-07 アルカン・インタ−ナショナル・リミテッド 金属合金製造方法
JPS58192774A (ja) * 1982-05-07 1983-11-10 豊田工機株式会社 搬送装置の位置補正装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022092262A1 (ja) * 2020-10-30 2022-05-05 川崎重工業株式会社 自走ロボット及びそれを備える物品搬送システム

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