JPH01172568A - Board attachment/detachment device - Google Patents

Abstract

PURPOSE:To prevent a substrate from chattering or inclination during treatment or detachment from a holder by inserting the substrate into an opening part of the substrate holder at the time of fitting the substrate to bed treated to the substrate holder in a sputtering apparatus and pushing the margin part thereof with a clip piece. CONSTITUTION:At the time of accommodating plural substrate 41 in the opening part 42a of the substrate holder 42, a substrate receiving part 43 receiving the margin part of the substrate 41 is arranged at the opening part 42a and also a substrate holding part 44 for holding the margin part of the base plate 41 is arranged. The substrate holding part 44 is possible to rotate to right angle direction to the plane containing the opening part 6a as centering a supporting shaft 21 penetrated at center part and also the clip piece 22 for pushing the margin of the substrate 2 to the one side is constituted through the supporting shaft 21. Further, the other side part acts as pushing piece 23 for rotating the clip piece 22 and surely holds the substrate 2 in the opening part 6a of the holder 6 and the substrate in the opening part during carrying the holder is prevented from chattering or detachment.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a substrate attachment/detachment device, which includes: a thin plate-like substrate; a substrate holder provided with an opening for mounting the substrate; The hand parts attached to the substrate holders are respectively placed at predetermined positions on the manufacturing line and used for the sputtering processing process.

(Prior Art) The structure of a conventional substrate holder used in a sputtering process is shown in FIGS. 9 and 10.

In the figure, a indicates a substrate holder, and b indicates rectangular openings, which are provided at four locations in this example. This opening is provided with a slight incline in one direction (downward to the left in the drawing). Further, C is a board holder fixed to the periphery of the opening with screws d. A total of three board receiving parts C are provided for one opening, one each on the left and right sides of the lower edge, and one on the upper left side edge. Reference numeral e denotes a substrate mounted so as to close the opening of the substrate holder a. This board e is fitted into the grooves f and f of the two board holders c and c provided at the lower edge of the opening, and the groove of the board holder C provided at the left edge of the opening. The receiver is attached to f in such a way that it can be stopped.

The substrate e mounted on the substrate holder a in this manner is conveyed into a vacuum chamber (not shown), and four substrates e, e, . . . are spun on both sides at the same time.

(Problems to be Solved by the Invention) However, in the substrate holder a having the above-described structure, the substrate e is simply fitted into the substrate receiving portion C.
There was a problem that the substrate e was shaken due to vibrations during transportation, became slightly tilted, or fell off, and the holding state was unstable.

(Means for Solving the Problems) The present invention has been made in view of the actual situation, and includes a thin plate-like substrate, a substrate holder provided with an opening for mounting the substrate, and a substrate holder that supports the substrate. In the sputtering processing step, in which a hand portion to be attached to the substrate holder is placed at a predetermined position on a production line, the substrate holder is provided with a substrate receiving portion for receiving a peripheral edge of the substrate at the periphery of the opening thereof. At the same time, a substrate holder is provided to hold the periphery of the substrate, and the substrate holder rotates in a direction perpendicular to a plane including the opening about a support shaft inserted through a substantially central portion. One end is a clip piece that presses the periphery of the substrate via the support shaft, and the other end is a push piece for rotating the clip piece, and the push piece is attached to the substrate holder. It is provided so that it can be pushed into a push-in port established near the periphery of the opening, and on the other hand,
The hand portion is provided with a support claw at its tip portion for supporting the peripheral edge of the substrate, and is also provided with a push claw for pushing the push piece of the substrate holding portion into the push opening; The pawl is provided so as to protrude a certain distance ahead of the support pawl.

(Function) When the substrate is supported by the support claws of the hand part and the substrate is brought close to the opening of the substrate holder, the push-in claws protrude a certain distance ahead of the support claws, so the push-in claws first hold the board. It comes into contact with the pushing piece of the section. When the hand part is further advanced in this state, the pushing piece is pushed into the pushing opening by the pushing claw, and as a result, the clip piece rotates until it becomes an upright state and exits from the board mounting area. Next, in this state, the hand portion is further advanced so that the substrate supported by the support claw faces the opening, and the substrate is fitted into the substrate receiving portion provided at the periphery of the opening.

Thereafter, the support claw is released from the substrate and moved back together with the push-in claw, thereby pulling out the push-in claw from the inside of the push-in opening and releasing the contact with the push-in piece. As a result, the clip piece that was in the upright position rotates back to its original position and presses the periphery of the board attached to the opening.

(Example) Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

1 to 3 show a part of the sputtering process using the substrate attachment/detachment apparatus of the present invention.

In the same figure, 1.1... is the substrate 2 before sputtering treatment.
, 2 . A board rotating part 5 rotates the board 2 by 90° to bring it into an upright state, and reference numeral 5 denotes a belt in which board holders 6° 6... are arranged in a vertical row (in a horizontal row in FIG. 1) with a constant interval. Conveyor,
7 is a supply traverser for supplying the substrate 2 mounted on the substrate holder 6 into a sputtering tank (vacuum tank: not shown);
Reference numeral 10 denotes a substrate attachment/detachment device having a hand portion 33 for attaching the substrate 2 to the substrate holder 6.

The unprocessed substrate storage body 1 is formed into a box shape that can store a large number of rectangular substrates 2 stacked on top of each other. A horizontally elongated outlet is formed for taking out the substrate 2 at the lowest position. This unprocessed substrate storage body 1 is arranged on two sides on the storage body mounting part 11. And A on the drawing
The unprocessed substrate storage bodies 1 are sequentially placed on the storage body mounting section 11 at the position shown in FIG. At the position, the conveying direction is changed to the direction of arrow P2, and the sheet is conveyed in this direction to position D, where it stops. At this position D, all the substrates 2, 2, . . . in the unprocessed substrate storage body 1 are taken out in order from the one at the lowest position. Then, in the state where the unprocessed substrate storage body 1 is empty, it is then transported in the direction of arrow P3 to position E, and at this position E, the transport direction is changed to the direction of arrow P4, and is transported to position F. Stop. At this position F, the empty unprocessed substrate storage 1 is removed from the storage mounting section 11. In addition, position E on the drawing is unprocessed substrate storage body 1.
This is an empty position, and the unprocessed substrate storage body 1 does not stop at this position E.

The substrate ejecting section 3 is provided to be movable up and down by an extensible body 12 such as a hydraulic cylinder, and takes out the substrate 2 from the unprocessed substrate storage body 1 at the lowest position (the position indicated by the two-dot chain line in FIG. 2). , and lifts the board to the upper position where the board rotation unit 4 is on standby.

The substrate rotation section 4 holds the substrate 2 lifted by the substrate removal section 3 and rotates from a horizontal position to a vertical position, so that the substrate 2 and the hand section 33 of the substrate attachment/detachment device 10 face each other. .

The belt conveyor 5 moves a distance l in the direction of the arrow R, temporarily stops, and after a certain period of time moves again in the direction of the arrow R a distance l! Continuously repeats intermittent movements of moving and then stopping. Here, the distance l is the distance from one substrate holder 6 on the belt conveyor 5 to the next adjacent substrate holder 6, and the stopping position of the substrate holder 6 is the distance from one substrate holder 6 on the belt conveyor 5 to the next adjacent substrate holder 6. Position H attached to board holder 6
It is. Although this position H is not shown in the figure,
Detected by a position detector.

As shown in FIG. 4, the substrate holder 6 is a rectangular plate, and rectangular openings 6a having a diameter slightly larger than the external dimensions of the substrate 2 are formed at four locations. There is. However, in the drawing, the other three openings 6a are shown with chain double-dashed lines and are omitted from illustration. A lip 13 (see also FIG. 6) for receiving the peripheral edge of the substrate 2 is formed over the entire circumference on one side of the inner peripheral edge of the opening 6a. Further, in this opening 6a, board receiving parts 15a and 15b for receiving the lower left and right corners of the board 2, respectively, are mounted on both the left and right corners of the lower side with screws 16.16 (seventh
Further, substrate holding parts 17a and 17b for holding the left and right side edges of the substrate 2, respectively, are attached to the lower part of the left side edge and the upper part of the right side edge. The board receiving parts 15a and 15b are connected to the board 2 by means of a groove part 18 (see FIG. 7) having an L-shaped cutout and a cross section of a square shape.
It is designed to receive the two sides of the corner of the
Movement in the left and right directions can also be regulated. As shown in FIGS. 4 and 5, the substrate holding parts 17a and 17b are attached in such a way that they fit into a recess 20 formed at the periphery of the opening 6a. A frame is rotatably provided between the opposite side walls of the frame around a supporting shaft 21 extending therebetween. In other words, the substrate holding section 17a.

17b is provided so as to be rotatable in a direction perpendicular to a plane including the opening 6a of the substrate holder 6.

One side of the support shaft 21 serves as a clip piece 22 for pressing the peripheral edge of the substrate 2, and the other side serves as a push piece 23 for rotating the clip piece 22. Furthermore, the push-in piece 23 can be pushed into a push-in opening 25 provided at the rear of the bottom of the recessed portion 20 . However, the push-in port 25 is substantially closed by the push-in piece 23, so that it has a shape that does not leave much of a gap. Although not shown, the substrate holding parts 17a and 17b are always urged in a direction to press the substrate 2 by a coiled spring fitted into the support shaft 21. In addition, the substrate holding section 17
a, 17b is at least 1 for each opening 6a.
It suffices if the number of the number is two, and the number is not limited to two as in the embodiment.

The substrate attachment/detachment device 10 includes a first arm 31 that is rotatable in the horizontal direction and movable up and down in the vertical direction around the robot body 30, and a first arm 31 that is attached to the tip of the first arm 31 and that is attached to the tip of the first arm 31. A second arm 32 is provided to be horizontally rotatable about the center, and a hand part 33 is attached laterally to the tip of the second arm 32 and is also provided to be horizontally rotatable about the tip. It is made up of. The hand portion 33 includes a support claw 34 for supporting the substrate 2 by sandwiching the upper and lower edges of the substrate 2, and is arranged on both left and right outer sides of the support claw 34, and is arranged on the left and right outer sides of the support claw 34, and is arranged on the left and right outer sides of the support claw 34,
, 17b and a push-in claw 35 for pushing the push-in piece 23 into the push-in opening 25. This pushing claw 35 projects forward from the supporting claw 34 by a certain distance.

Next, each process of a manufacturing line using the substrate attachment/detachment device 10 having the above configuration will be sequentially explained.

One unprocessed substrate storage body 1 is stopped at position D on the storage body mounting section 11. In this state, the substrate 2 at the lowest position is taken out from the unprocessed substrate storage body 1 at the D position by the substrate takeout section 3. The substrate 2 taken out onto the substrate take-out part 3 is lifted upward by the stretching action of the extensible body 12 to the position shown by the solid line in FIG. 2, and then held by the board rotating part 4. It is rotated approximately 90'' from a horizontal position to a vertical position.

In this state, each arm 31, 32 and hand part 33 of the board attachment/detachment device 10 are horizontally rotated to the position shown by the solid line in FIG. Supported by 34.

Next, with the substrate 2 supported, each of the arms 31 and 32 and the hand portion 33 are horizontally rotated to a position H shown by a two-dot chain line in FIG. It is made to face the opening 6a.

In this facing state, the hand section 33 is advanced toward the substrate holder 6. First, the push-in pawl 35 is advanced to the Q2 position in FIG. 5, brought into contact with the push-in piece 23, and further advanced to the Q2 position where it passes through the inside of the push-in opening 25. At this time, the pusher piece 23 is also pushed into the pusher opening 25, and the clip piece 22 is rotated to leave the board mounting area and stand upright with respect to the board holder 6. Further, the substrate 2 supported by the support claws 34 at this time is at the position indicated by the two-dot chain line in the figure.

From this state, the hand section 33 is further advanced, and the substrate 2
is brought into contact with the rib 13 formed on the inner peripheral edge of the opening 6a, and both left and right corners of the lower side of the board 2 are brought into contact with the board receiving part 1.
5a, 15b into the respective grooves 18, 18 (seventh
(see figure). The positional relationship between the substrate 2, the support claws 34, and the substrate holder 6 at this time is shown in FIG. Further, the position of the push-in claw 35 at this time is the 03 position in FIG.

Thereafter, the supporting claws 34 are opened up and down to release the support of the substrate 2a, and together with the pushing claws 35, they are moved backward. Then, when the push-in claw 35 retreats to the 01 position in FIG. Press.

As a result, the periphery of the substrate 2 is formed between the rib 13 and the clip piece 2.
2, and is stably held by the substrate holder 6.

After repeating the above-mentioned operations and mounting the substrates 2 in all the openings 6a of the substrate holder 6, the substrate holder 6 is transported to the supply traverser 7 and sent into the sputtering tank, where the substrates 2 are subjected to sputtering processing. will be applied.

On the other hand, when all the substrates 2 in the unprocessed substrate storage body 1 at position D are taken out, this empty unprocessed substrate storage body 1 is transported in the direction of arrow P3 to position E, and then in the direction of arrow P4. F
It is conveyed to the position and collected at this F position. and,
The next unprocessed substrate storage unit 1 that was waiting at position C is indicated by arrow P.
It is transported in two directions to position D, and is in a standby state for board removal.

Sputtering is performed by repeating this series of operations.

FIG. 8 shows another embodiment of the substrate holder, and shows an example of the simplest structure of the substrate holder 42 on which a disk-shaped substrate 41 is mounted. That is, the substrate holder 4
One board receiving part 43 is provided at the lower end edge of one of the openings 42a of 2, and one board holding part 44 is provided at the upper end edge of the opening 42a. However, it is sufficient to provide only the necessary number of substrate holding parts 44 for one opening 42a. Note that the board holder 42, the board receiving part 43, and the board holding part 44
The structure is substantially the same as that of the above embodiment except that the opening 42a is circular, so the explanation thereof will be omitted here.

(Effects of the Invention) As explained above, according to the substrate attachment/detachment device of the present invention,
The board holder securely holds the periphery of the board, so
The board does not wobble or fall off the board holder during transportation, and even if there is a molding error in the opening provided in the board holder or an error in the stopping position between the board holder and the hand part, it is ensured. can hold the board.

[Brief explanation of the drawing]

1 to 8 show an embodiment of the present invention, FIG. 1 is a plan view showing a part of the sputtering process equipped with the substrate attaching/detaching device of the present invention, and FIG. 2 is an unprocessed substrate storage FIG. 3 is a side view showing the board mounting/detaching device and the board holder, FIG. 4 is a front view of the board holder, and FIG. 5 shows a board mounted in the opening of the board holder. FIG. 6 is a partial longitudinal sectional view showing the state in which the board supported by the support claws is installed in the opening of the board holder, and FIG. FIG. 8 is a partially omitted front view showing another embodiment of the board holder, FIG. 9 is a front view of a conventional board holder, and FIG. 10 is a board holder. FIG. 3 is a partial vertical cross-sectional view showing a state in which the substrate is fitted into the groove of the part. 1... Unprocessed substrate storage body 2... Substrate 5...
Belt conveyor 6, 42...Substrate holder 6a, 42
a... Openings 15a, 15b, 43 - Board receiving parts 17a, 17b, 44 - Board holding part

Claims (1)

[Scope of Claims] 1) A thin plate-like substrate, a substrate holder provided with an opening for mounting the substrate, and a hand section for supporting the substrate and mounting it on the substrate holder are each installed at a predetermined location on a production line. In the sputtering processing step, the substrate holder is provided with a substrate receiving part for receiving the peripheral edge of the substrate on the peripheral edge of the opening thereof, and a substrate holding part for holding the peripheral edge of the substrate. , the substrate holder is rotatable in a direction orthogonal to a plane including the opening about a support shaft inserted through the substantially central portion, and one side is provided with a support shaft inserted through the support shaft. The clip piece is configured to press the periphery of the substrate, and the other side is a push piece for rotating the clip piece, and the push piece is pushed into a push-in opening provided near the periphery of the opening of the board holder. On the other hand, the hand portion is provided with a support claw at its tip portion to support the peripheral edge of the substrate, and a push claw for pushing the push piece of the substrate holding portion into the push opening. 1. A board attachment/detachment device, wherein the push-in claw is provided so as to protrude forward by a certain distance from the support claw.