JPH01168856A - Method for case-hardening steel - Google Patents
Method for case-hardening steelInfo
- Publication number
- JPH01168856A JPH01168856A JP32594587A JP32594587A JPH01168856A JP H01168856 A JPH01168856 A JP H01168856A JP 32594587 A JP32594587 A JP 32594587A JP 32594587 A JP32594587 A JP 32594587A JP H01168856 A JPH01168856 A JP H01168856A
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- Prior art keywords
- ion
- nitrogen
- vapor
- deposition
- nitrogen ion
- Prior art date
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Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
耐摩耗性が要求される鋼製の、各種圧延、加工に使用さ
れるロール、その他ローラ、又は軸受その他、金型など
の鋼材の表面硬化方法に関し、とくに、密着性の良い高
耐摩耗性のTiN被膜を形成するに当り、イオン注入と
真空蒸着とを同時又は交互に行うイオンミキシング処理
の活用を図った開発研究の成果を以下に述べる。Detailed Description of the Invention (Industrial Field of Application) Surface hardening of steel materials such as rolls, other rollers, bearings, molds, etc. used in various rolling and processing processes that require wear resistance. Regarding the method, the following describes the results of development research that aimed to utilize ion mixing processing, in which ion implantation and vacuum deposition are performed simultaneously or alternately, in order to form a TiN film with good adhesion and high wear resistance. .
たとえば最近の冷間圧延技術の分野では、圧延能率の向
上、難圧延材の増加、製品品質の高級化のために、高速
圧下圧延や連続圧延を指向している。さらに、ワークロ
ールの小径化が進むにつれて、ワークロールが使用され
る環境は年々厳しさを増しており、特にロールの摩耗が
激しく圧延操業上のネックとなっている。For example, in the recent field of cold rolling technology, high-speed reduction rolling and continuous rolling are being used to improve rolling efficiency, increase the number of difficult-to-roll materials, and improve product quality. Furthermore, as the diameter of work rolls continues to become smaller, the environment in which work rolls are used is becoming more severe year by year, and wear of the rolls in particular is severe, becoming a bottleneck in rolling operations.
ワークロールは圧延中、特に通板エツジ部の摩耗が激し
いために、通板エツジ部と圧延板に接触しない未通板部
との間に大きな粗さの差を生゛じる。During rolling, work rolls are subject to severe wear, particularly at the passing edges, resulting in a large difference in roughness between the passing edges and non-passing areas that do not contact the rolling plate.
そのため、狭幅から広幅の板へ圧延を移行すると、ワー
クロールの部分的な粗さの違いが、そのまま圧延板へ転
写する問題があるため、−船釣には、広幅の板から狭幅
の板を圧延するようなスケジュール圧延を行っている。Therefore, when rolling is transferred from a narrow plate to a wide plate, there is a problem in that the local roughness differences of the work roll are directly transferred to the rolled plate. Scheduled rolling, similar to rolling plates, is performed.
また、狭幅から広幅の板へ圧延を移行する場合には、再
研摩を行ったロールに組み替えて圧延を行っているのが
現状である。Furthermore, when rolling is transferred from a narrow width plate to a wide width plate, the current situation is that rolling is performed using re-ground rolls.
このようなスケジュール圧延を行っている現状では、い
くら圧延能率の向上を計ろうとしても、おのずと限界が
ある。In the current situation where such schedule rolling is performed, no matter how much we try to improve rolling efficiency, there is a limit to it.
そこで、スケジュール圧延の廃止すなわちスケジュール
フリー圧延を行うことが理想的な圧延操業であり、この
ような圧延方法に対応できるような耐摩耗性の優れたワ
ークロールの研究開発が盛んに行われている。。Therefore, the ideal rolling operation is to abolish schedule rolling, that is, to perform schedule-free rolling, and research and development is actively being conducted on work rolls with excellent wear resistance that can be used with this rolling method. . .
ここで圧延用ロールそれもとくに冷間圧延ワークロール
の動向を代表事例として掲げたが、耐摩耗性の要請は一
般用のロールやローラはもちろん軸受や、金型などにつ
いても同様である。Here, trends in rolling rolls, especially cold rolling work rolls, are cited as a representative example, but the requirements for wear resistance are the same not only for general rolls and rollers, but also for bearings, molds, etc.
(従来の技術)
ロール材質については、特開昭61−21300号公報
や特開昭57−47849号公報など数多提案がなされ
、なかでもCr、 Mo、 Vといった炭化物形成元素
を多量に添加し、硬質炭化物を組織中に分散させた鍛鋼
ロールや、Cr含有量が20%程度の鋳鉄ロールなどの
提案がなされているが、いずれも耐摩耗性がなお十分で
あるとは言えない。(Prior art) Many proposals have been made regarding the roll material, such as in JP-A-61-21300 and JP-A-57-47849. , forged steel rolls with hard carbides dispersed in their structure, and cast iron rolls with a Cr content of about 20% have been proposed, but none of them can be said to have sufficient wear resistance.
さらに、表面処理ロールとして、硬質Crめっきロール
やイオンブレーティング法によるTiN、 TiCなど
の超硬質被膜を形成させることも、特開昭61−201
800号公報、特開昭61−273206号公報にて提
案されているが、いずれも耐摩耗性については満足して
いても、母材と表面処理被膜との密着性が不十分なとこ
ろに問題がある。Furthermore, as a surface treatment roll, it is also possible to form an ultra-hard coating such as TiN or TiC using a hard Cr plating roll or an ion-blating method, as described in Japanese Patent Laid-Open No. 61-2011.
No. 800 and Japanese Unexamined Patent Publication No. 61-273206 have proposed these proposals, but although they both satisfy the wear resistance, there is a problem in that the adhesion between the base material and the surface treatment film is insufficient. There is.
また、特開昭62−180062号公報においては、イ
オンミキシング法におけるロール表面処理装置が提案さ
れ、具体例として、Tiをロールの表面に1〜3μ一蒸
着させ、さらに窒素イオン注入を同時あるいは交互に1
0” 〜10” 1ons/cm”注入することが示さ
れている。しかし、イオンミキシング処理においても、
Tiの蒸着量や窒素イオン投入量のみでは、なお密着性
の優れた被膜を得ることが困難であることがわかった。Furthermore, in JP-A No. 62-180062, a roll surface treatment device using the ion mixing method was proposed, and as a specific example, Ti was deposited on the surface of the roll by 1 to 3 μm, and nitrogen ions were implanted simultaneously or alternately. to 1
It has been shown that 0" to 10"1ons/cm" is implanted. However, even in the ion mixing process,
It has been found that it is difficult to obtain a film with excellent adhesion only by changing the amount of Ti vapor deposited or the amount of nitrogen ions added.
(発明が解決しようとする問題点)
上に述べたような問題点を解決するために、窒素イオン
の加速電圧及び電流密度を、Tiの蒸着量、窒素イオン
投入量に加えてTiの蒸着速度とともに最適化した条件
のもとてイオンミキシングを行い、従来法に比較して密
着性と耐摩耗性の優れたTiN被膜の形成を可能ならし
めた、鋼材の表面硬化方法を提供することがこの発明の
目的である。(Problems to be Solved by the Invention) In order to solve the above-mentioned problems, in addition to the acceleration voltage and current density of nitrogen ions, the amount of Ti evaporation and the input amount of nitrogen ions, the rate of Ti evaporation Our objective is to provide a surface hardening method for steel materials that performs ion mixing under optimized conditions and enables the formation of a TiN film with superior adhesion and wear resistance compared to conventional methods. This is the object of the invention.
(問題点を解決するための手段)
この発明は、イオンミキシング処理によりTiN被膜を
鋼材の上に形成する際に、
窒素イオン加速電圧を10〜40kV、窒素イオン電流
密度を0.5〜2.0m^/cm”sTi蒸着速度を5
Å/s以上でかつ、
窒素イオン全投入量を10” 1ons/ cm”以上
、Ti全蒸着量を5 XIO” 1ons/ cm”以
上とすることを特徴とする鋼材の表面硬化方法である。(Means for Solving the Problems) According to the present invention, when forming a TiN film on a steel material by ion mixing treatment, the nitrogen ion acceleration voltage is set at 10 to 40 kV, and the nitrogen ion current density is set at 0.5 to 2.0 kV. 0m^/cm”sTi deposition rate 5
This is a surface hardening method for steel materials, characterized in that the total amount of nitrogen ions introduced is 10"1 ounces/cm" or more, and the total amount of Ti vapor deposited is 5XIO"1 ons/cm" or more.
第1図に、窒素イオン全投入量が10I[1ions/
cm”〜10”1ons/c+++”の範囲であり、且
つ、Ti全蒸着量が5 XIO” tons/cm”
〜5 ×1QI9 tons/cm”の範囲となるよう
な条件下でイオンミキシング処理を行った際の、窒素イ
オン加速電圧が30 kVにおける、窒素イオン電流密
度及びTi蒸着速度が密着性に及ぼす関係をグラフで示
した。Figure 1 shows that the total input amount of nitrogen ions is 10I [1ions/
cm" to 10"1 ons/c+++", and the total amount of Ti deposited is 5 XIO"tons/cm"
The relationship between nitrogen ion current density and Ti deposition rate on adhesion at a nitrogen ion accelerating voltage of 30 kV when ion mixing treatment is performed under conditions such that Shown in a graph.
この密着性試験は、二円W式摩耗試験機を用い、ヘルツ
応力100 kgf/in” 、すべり率20%、相手
材の硬さHv200.3%鉱油エマルジョン潤滑の条件
を課し1万回転後はく離の有無を・印と○印とで区別整
理したものである。This adhesion test was carried out using a two-circle W type abrasion tester under the following conditions: Hertzian stress of 100 kgf/in'', slip rate of 20%, hardness of the mating material Hv of 200.3%, mineral oil emulsion lubrication, and after 10,000 rotations. The presence or absence of peeling is categorized by ・ and ○ marks.
窒素イオン電流密度が0.5m^/ cm ”未満でか
つTi蒸着速度が5Å/s未満では密着性が悪いのに反
し、この発明に従い窒素イオン電流密度が0.5 mA
/cm”以上で、さらにTi蒸着速度が5Å/s以上の
領域では、優れた密着性を示している。Adhesion is poor when the nitrogen ion current density is less than 0.5 m^/cm'' and the Ti evaporation rate is less than 5 Å/s.
/cm'' or more and the Ti evaporation rate is 5 Å/s or more, excellent adhesion is shown.
第2図は、窒素イオン電流密度が0.5〜2.0 mA
7cm” 、Ti蒸着速度が5〜30Å/sを満足させ
た条件下でイオンミキシング処理を行った際の、窒素イ
オン全投入量およびTi全蒸着量と密着性の関係を示す
グラフである。Figure 2 shows nitrogen ion current density of 0.5 to 2.0 mA.
7 cm", and a Ti vapor deposition rate of 5 to 30 Å/s. FIG.
窒素イオン全投入量が1018ions/cm”未満、
またTi全投入量が5 XIO” 1ons/cm”未
満では・印で示したようにはく離を生じ、密着性が悪い
。窒素イオン全投入量が10” 1ons/cm”以上
であり、且つ、Ti全蒸着量が5 XIO” 1ons
/cm2以上とすることにより、図にO印で示したよう
に優れた密層性を示している。The total nitrogen ion input amount is less than 1018 ions/cm",
Further, if the total amount of Ti added is less than 5 XIO" 1 oz/cm", peeling occurs as indicated by the mark ., and the adhesion is poor. The total nitrogen ion input amount is 10" 1 ounces/cm" or more, and the total Ti vapor deposition amount is 5 XIO" 1 ons.
/cm2 or more, excellent dense layer properties are exhibited as indicated by O in the figure.
このように、適正な窒素イオン電流密度(0,5〜2.
0mA/ctA)とTi蒸着速度(5λ/s〜30人/
s)さらには、最終的に注入した窒素イオン全投入量(
10XIO”tons/ clll)とTi全蒸着量の
バランスが密着性を大きく左右しているわけである。In this way, an appropriate nitrogen ion current density (0.5 to 2.
0mA/ctA) and Ti evaporation rate (5λ/s ~ 30 people/
s) Furthermore, the total amount of nitrogen ions finally implanted (
The balance between the total amount of Ti deposited (10XIO"tons/clll) and the total amount of Ti deposited greatly influences the adhesion.
なお、イオンミキシング処理の際、加速された窒素イオ
ンによる鋼材上への投入エネルギー密度が10 J/c
m”未満では、密着性の優れたTiN被膜が得られにく
く、一方投入エネルギー密度が、80J/cm”を越え
ると、鋼材表面が高温(700″C以上)となってその
表面を劣化させるので、投入エネルギー密度は、10〜
80 J/c+++”の範囲が好ましい。In addition, during the ion mixing process, the energy density input onto the steel material by accelerated nitrogen ions is 10 J/c.
If the input energy density is less than 80 J/cm, it will be difficult to obtain a TiN film with excellent adhesion, whereas if the input energy density exceeds 80 J/cm, the steel surface will become hot (more than 700 C) and deteriorate. , the input energy density is 10~
A range of 80 J/c+++'' is preferred.
(作 用)
密着性と耐摩耗性の優れたTiN被膜を得るための条件
に限定を付した理由について述べる。(Function) The reason for limiting the conditions for obtaining a TiN film with excellent adhesion and wear resistance will be described.
窒素イオン電流密度:0.5〜2.0 mA/cが窒素
イオン電流密度が0.5 mA/cが未満では密着性が
悪< 、2.0 mA/cm2を越えると鋼材表面が高
温となって、その表面を劣化させる。そのため、窒素イ
オン電流密度は、0.5〜2.0 +mA/c+a”の
範囲とした。Nitrogen ion current density: 0.5 to 2.0 mA/c If the nitrogen ion current density is less than 0.5 mA/c, the adhesion is poor, and if it exceeds 2.0 mA/cm2, the steel surface may become hot. This causes the surface to deteriorate. Therefore, the nitrogen ion current density was set in the range of 0.5 to 2.0 +mA/c+a''.
窒素イオン加速電圧二10〜40 kV窒素イオン加速
電圧は、窒素イオン電流密度と投入エネルギー密度の制
約を考慮して10〜40 kVの範囲としなければなら
ない。Nitrogen ion acceleration voltage 2 10 to 40 kV The nitrogen ion acceleration voltage must be in the range of 10 to 40 kV, taking into account constraints on nitrogen ion current density and input energy density.
Ti蒸蒸着速度2久
Ti蒸着速度が5Å/s未満では、密着性が悪く、しか
も処理時間が長くかかるため、Ti蒸着速度は5人/s
ec以上を必要とする。Ti evaporation rate: 2 If the Ti evaporation rate is less than 5 Å/s, the adhesion is poor and the processing time is long, so the Ti evaporation rate is 5 people/s.
Requires ec or higher.
なお、Ti蒸着速度は30Å/sを越えると窒素イオン
電流密度をより高くする必要を生じて、鋼材表面を劣化
させるので、36人八へ下にすることが望ましい。Note that if the Ti deposition rate exceeds 30 Å/s, it becomes necessary to increase the nitrogen ion current density, which deteriorates the surface of the steel material, so it is desirable to lower the Ti deposition rate to 36 or 8.
窒素イオン全投入量: 10” tons/cm”以上
、Ti全蒸着量: 5 XIO” 1ons/c+++
”以上窒素イオン全投入量が10” tons/cm”
以上、Ti全蒸着量が5 XIO” 1ons/am”
以上のいずれか又は両者とも満足しない場合には、密着
性が悪く、はく離を生じる。そのため、窒素イオン全投
入量は10” 1ons/cm”以上、Ti全蒸着量は
5X1016ions/cm2以上にしなければならな
い。Total amount of nitrogen ion input: 10"tons/cm" or more, total amount of Ti vapor deposited: 5 XIO" 1ons/c+++
``The total nitrogen ion input amount is 10 tons/cm''
Above, the total amount of Ti deposited is 5XIO"1ons/am"
If either or both of the above are not satisfied, the adhesion will be poor and peeling will occur. Therefore, the total amount of nitrogen ions introduced must be 10''1 ounces/cm'' or more, and the total amount of Ti deposited must be 5×1016 ions/cm2 or more.
なお、窒素イオン全投入量が10I9ions/cm”
を越えると処理時間が長くかかるため、上限は10′雫
1ons/cm”以下が好ましい。In addition, the total nitrogen ion input amount is 10I9ions/cm"
The upper limit is preferably 10' drops/1 ounce/cm" or less, since processing time will be longer if the drop exceeds 1 oz/cm".
Ti全蒸着量の上限についても、経済性の観点から、5
XIO” 1ons/cm2を越えてもそれに見合っ
た経済効果を期待できないので、5 xto” 1on
s/cm”以下が好ましい。Regarding the upper limit of the total amount of Ti vapor deposited, from the economic point of view, 5.
Even if it exceeds XIO" 1ons/cm2, it is not possible to expect a commensurate economic effect, so 5xto" 1on
s/cm" or less is preferable.
つぎに、鋼材の材質については、耐摩耗性が要求される
各種の圧延加工に利用されるロール又はローラーのほか
軸受けや金型といった分野に適しているが、これらの分
野で利用する際には、耐摩耗性の他に強度・靭性あるい
は疲労特性等の優れた鋼が要求される。Next, regarding the material of steel, it is suitable for use in fields such as rolls or rollers used in various rolling processes that require wear resistance, as well as bearings and molds. In addition to wear resistance, steel with excellent strength, toughness, and fatigue properties is required.
そこで、例えば圧延用ロールを対象とした場合には、C
: 0.85 〜1.2%, St : 0.1 〜
1.6%, Mn:o.1〜1.5%, Ni : 0
.1 〜1.0%,Cr:2.0〜12、0%, Mo
: 0.3 〜2.0%, V : 0.1 〜2.
0%。Therefore, for example, when targeting rolling rolls, C
: 0.85 ~ 1.2%, St: 0.1 ~
1.6%, Mn:o. 1-1.5%, Ni: 0
.. 1 to 1.0%, Cr:2.0 to 12, 0%, Mo
: 0.3 to 2.0%, V: 0.1 to 2.
0%.
P : 0.025%以下、S : 0.010%以下
であり、残部がFeおよび不可避的不純物よりなる鋼で
あり、その表面硬さが、ビッカース硬さでHv500〜
900の範囲であるものが好ましい。P: 0.025% or less, S: 0.010% or less, the remainder is Fe and unavoidable impurities, and the surface hardness is Hv500 to Vickers hardness.
A range of 900 is preferred.
(実施例)
外径30mm,内径16閣1幅3IIII11の形状を
した鋼材外周面上へ、イオンミキシング処理を行い、実
機冷間圧延を想定した摩耗試験を実施した。摩耗試験は
、二円筒式摩耗試験機を用いた。鋼材の化学成分を表1
に示す。(Example) An ion mixing treatment was performed on the outer circumferential surface of a steel material having a shape of 30 mm in outer diameter, 16 mm in inner diameter, 3 III in 11 in width, and a wear test assuming actual cold rolling was conducted. For the wear test, a two-cylindrical wear tester was used. Table 1 shows the chemical composition of steel materials.
Shown below.
表2にイオンミキシング処理条件と密着性及び摩耗試験
結果を示す。Table 2 shows the ion mixing treatment conditions and the adhesion and wear test results.
表1.綱材の化学成分
(貨tl
イオンミキシング処理は、1O−4〜10−” tor
rの減圧で行い、イオンミキシング処理前に鋼材表面の
クリーニングを目的として、プレスパツタ処理を実施し
た。Table 1. The chemical composition of the rope material (contains tl) The ion mixing treatment
A press spatter treatment was carried out under a reduced pressure of r, and the purpose of cleaning the surface of the steel material was before the ion mixing treatment.
密着性および摩耗試験は、ヘルツ応力100 kgf/
m”、すべり率20%、相手材の硬さHV200.3%
鉱油エマルジョン潤滑の条件で行った。密着性は、1万
回転後のはく離の有無により、耐摩耗性は300万回転
後の摩耗量により評価した。Adhesion and abrasion tests were performed using a Hertzian stress of 100 kgf/
m”, slip rate 20%, hardness of mating material HV200.3%
The tests were carried out under conditions of mineral oil emulsion lubrication. Adhesion was evaluated by the presence or absence of peeling after 10,000 rotations, and abrasion resistance was evaluated by the amount of wear after 3 million rotations.
この発明で規定した条件の範囲外で得られたイオンミキ
シング処理によるTiN被膜は、1万回転後、はく離を
生じ、密着性が悪い。これに反しこの発明の方法で得ら
れたイオンミキシング処理によるTiN被膜は1万回転
後、はく離を生ずることなく、優れた密着性を具備して
いる。A TiN film obtained by ion mixing treatment outside the range of conditions specified in this invention peels off after 10,000 rotations and has poor adhesion. On the other hand, the TiN coating obtained by the ion mixing process obtained by the method of the present invention does not peel off after 10,000 rotations and has excellent adhesion.
第3図に摩耗試験結果を示す。Figure 3 shows the wear test results.
この発明に従うイオンミキシング処理によるTiN被膜
は、300万回転後の摩耗量が0.5n+g以下であり
、未処理の場合と比較しておよそ1/10となり、優れ
た耐摩耗性を有していることがわかる。The TiN coating produced by the ion mixing treatment according to the present invention has an abrasion loss of 0.5n+g or less after 3 million rotations, which is approximately 1/10 of that of the untreated case, and has excellent abrasion resistance. I understand that.
なお、この発明とは条件を異に得られたイオンミキシン
グ処理によるTiN被膜は、1万回転後、はく離を生じ
たため1■以上の重量減少を示した。It should be noted that the TiN coating obtained by the ion mixing treatment under different conditions from the present invention exhibited weight loss of more than 1 inch due to peeling after 10,000 rotations.
(発明の効果)
この発明は、イオン注入と真空蒸着とを同時又は交互に
行うイオンミキシング処理により、鋼母材と被膜との間
にFe、 Ti、 Nを含む混合層を有し、且つ、混合
層の上へTiN被膜を形成する被膜形成方法において、
窒素イン加速電圧を10〜40 kV、窒素イオン電流
密度を0.5〜2.0 m17cm”、 Ti蒸着速度
を5人/sec以上であり、且つ、窒素イオン全投入量
を10” 1ons/cm”以上、Ti全蒸着量を5X
IO” 1ons/cm”以上を特徴とする被膜形成方
法であり、圧延用のロールやローラー、さらには軸受け
・金型といった耐摩耗性が要求される部材・工具への適
用により、優れた性能を発揮し、その効果は大きい。(Effects of the Invention) The present invention has a mixed layer containing Fe, Ti, and N between the steel base material and the coating by an ion mixing process in which ion implantation and vacuum deposition are performed simultaneously or alternately, and In a film forming method for forming a TiN film on a mixed layer,
Nitrogen acceleration voltage is 10 to 40 kV, nitrogen ion current density is 0.5 to 2.0 m17 cm, Ti deposition rate is 5 people/sec or more, and total nitrogen ion input is 10 to 1 ounce/cm. ”The total amount of Ti deposited is 5X.
It is a coating formation method characterized by an IO of 1 ounce/cm or more, and can be applied to parts and tools that require wear resistance, such as rolling rolls and rollers, as well as bearings and molds, to achieve excellent performance. The effect is great.
第1図は、窒素イオン電流密度およびTi蒸着速度と密
着性の関係を示すグラフ、
第2図は、窒素イオン全投入量およびTi全蒸着量と密
着性の関係を示すグラフ、
第3図は、摩耗試験結果を示すグラフである。Figure 1 is a graph showing the relationship between nitrogen ion current density and Ti evaporation rate and adhesion. Figure 2 is a graph showing the relationship between total nitrogen ion input amount and total Ti deposition amount and adhesion. Figure 3 is a graph showing the relationship between adhesion and nitrogen ion current density and Ti evaporation rate. , is a graph showing the results of a wear test.
Claims (1)
に形成する際に、 窒素イオン加速電圧を10〜40kV、 窒素イオン電流密度を0.5〜2.0mA/cm^2、
Ti蒸着速度を5Å/s以上でかつ、 窒素イオン全投入量を10^1^6ions/cm^2
以上、 Ti全蒸着量を5×10^1^8ions/cm^2以
上とすることを特徴とする鋼材の表面硬化方法。[Claims] 1. When forming a TiN film on a steel material by ion mixing treatment, the nitrogen ion acceleration voltage is 10 to 40 kV, the nitrogen ion current density is 0.5 to 2.0 mA/cm^2,
The Ti deposition rate is 5 Å/s or more, and the total nitrogen ion input is 10^1^6 ions/cm^2.
As described above, a method for surface hardening a steel material, characterized in that the total amount of Ti deposited is 5×10^1^8 ions/cm^2 or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32594587A JPH01168856A (en) | 1987-12-23 | 1987-12-23 | Method for case-hardening steel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32594587A JPH01168856A (en) | 1987-12-23 | 1987-12-23 | Method for case-hardening steel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01168856A true JPH01168856A (en) | 1989-07-04 |
Family
ID=18182357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32594587A Pending JPH01168856A (en) | 1987-12-23 | 1987-12-23 | Method for case-hardening steel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01168856A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02129359A (en) * | 1988-11-09 | 1990-05-17 | Nippon Steel Corp | Thin film formation method with excellent adhesion |
US5700546A (en) * | 1994-05-30 | 1997-12-23 | Ebara Corporation | Seal or bearing |
KR20030073693A (en) * | 2002-03-12 | 2003-09-19 | (주) 유니플라텍 | Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology |
US6797335B1 (en) * | 1999-08-16 | 2004-09-28 | Paderov Anatol Y Nikolaevich | Method for deposition of wear-resistant coatings and for increasing the lifespan of parts |
-
1987
- 1987-12-23 JP JP32594587A patent/JPH01168856A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02129359A (en) * | 1988-11-09 | 1990-05-17 | Nippon Steel Corp | Thin film formation method with excellent adhesion |
US5700546A (en) * | 1994-05-30 | 1997-12-23 | Ebara Corporation | Seal or bearing |
US6797335B1 (en) * | 1999-08-16 | 2004-09-28 | Paderov Anatol Y Nikolaevich | Method for deposition of wear-resistant coatings and for increasing the lifespan of parts |
KR20030073693A (en) * | 2002-03-12 | 2003-09-19 | (주) 유니플라텍 | Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology |
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