JPH01165494U

JPH01165494U -

Info

Publication number: JPH01165494U
Application number: JP6194888U
Authority: JP
Priority date: 1988-05-11
Filing date: 1988-05-11
Publication date: 1989-11-20

Description

[Brief explanation of the drawing]

第１図はこの考案の一実施例の一部切欠きを含
む斜視図、第２図は第１図の―断面図、第３
図は第１図の―断面図、第４図はこの実施例
を光電顕微鏡に組込んだ際の要部平面図、第５図
は第４図の―断面図、第６図は第５図の―
断面図である。１……クランプ機構、２……固定台、３……ク
ランプ部材、４，５……ガイド部材、６……スラ
イド棒、７，８……挟持部、９……アクチユエー
タ、１０，１１……ガイド孔、１００……光電顕
微鏡、１０１……被測定面、１０２……可動部、
１０３……対物レンズ、１２０……マイクロメー
タヘツド。 Figure 1 is a partially cutaway perspective view of an embodiment of this invention, Figure 2 is a sectional view of Figure 1, and Figure 3 is a cross-sectional view of Figure 1.
The figure is a sectional view of Fig. 1, Fig. 4 is a plan view of the main part when this embodiment is incorporated into a photoelectron microscope, Fig. 5 is a sectional view of Fig. 4, and Fig. 6 is a sectional view of Fig. 5. of-
FIG. DESCRIPTION OF SYMBOLS 1... Clamp mechanism, 2... Fixed base, 3... Clamp member, 4, 5... Guide member, 6... Slide rod, 7, 8... Holding part, 9... Actuator, 10, 11... Guide hole, 100...Photoelectron microscope, 101...Measurement surface, 102...Movable part,
103...Objective lens, 120...Micrometer head.

Claims

[Scope of utility model registration request]

A clamp member that includes a pair of clamping parts and can clamp and fix a predetermined member with the pair of clamping parts facing each other, and a fixing member that fixes the clamp member with the pair of clamping parts facing each other. The base is rod-shaped and is usually clamped and fixed to the pair of clamping parts of the clamp member, and engages with a detection part of a detection device such as a lens or a detection needle, or an object to be positioned such as a detector. A slide rod for positioning the positioning object with respect to the ramp member, and a slide rod facing each other and fixed to the fixing base so that each slide rod of the clamp member is at an outer position in the sliding direction of the slide rod, and further tightened to the clamp member. two guide members each having a guide hole for inserting a fixed slide rod and guiding the slide rod in the sliding direction when the fixed slide rod is released;
an actuator that is disposed between the pair of clamping parts of the clamp member and applies a pressing force to release the clamping part on the pair of clamping parts so that the slide rod that is clamped and fixed can slide when a voltage is applied; Equipped with a clamp mechanism.