JPH01155509A - Magnetic head - Google Patents

Abstract

PURPOSE:To prevent diffusion of elements between respective layers and to prevent generation of a pseudo gap while maintaining the adhesive strength of an oxide magnetic material and alloy magnetic material by forming an intermediate film layer consisting of metal elements of a group IVa or group Va or the oxide of these metal elements between the oxide magnetic material and alloy magnetic material layers. CONSTITUTION:Since the metal elements of the groups IVa, Va, or the metal oxides thereof are hardly diffusible in the alloy magnetic material 4 such as 'SENDUST(R)', the diffusion of such elements into the alloy magnetic material 4 and the consequent deterioration of the magnetic characteristics are obviated. Since this intermediate film layer 3 prevents the diffusion of oxygen, the diffu sion of the oxygen in the oxide magnetic material into the alloy magnetic material 4 layer by passing the intermediate 3 does not arise and the deteriora tion of the magnetic characteristics of the oxide magnetic material is prevented at the time of glass bonding. The formation of the pseudo gap is thereby suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in video tape decks, magnetic recording devices, and the like.

[Prior Art] In the magnetic head as described above, in addition to magnetic properties (high saturation magnetic flux density Bs, high magnetic permeability, etc.), mechanical properties (high wear resistance, formability, etc.) are required. (good) is required. In order to obtain such characteristics, Mn-Zn ferrite, an oxide magnetic material with high magnetic permeability and high resistivity, is used at the base of the head core, and the gap-forming surface is sputtered with an alloy magnetic material. A composite head that forms a coating such as Sendas 1 is used. In such cases, even if the alloy magnetic material is sputtered directly onto the surface of the oxide magnetic material, the adhesion strength between the two is not sufficient, so microscopic peeling occurs between the two during machining, etc., which reduces the yield. Therefore, in order to increase the adhesion strength between the two, an intermediate film layer made of chromium has been formed between them.

[Problems to be Solved by the Invention] However, in the conventional techniques as described above, the chromium layer increases the adhesion strength between the oxide magnetic layer and the alloy magnetic layer and prevents the generation of micro-peeling; Due to the temperature increase during glass bonding during head manufacturing, chromium diffuses into the alloy magnetic layer and changes its magnetic properties, and oxygen in the oxide magnetic material diffuses into the alloy magnetic material through the intermediate layer. The oxygen-depleted area is no longer able to maintain the original ferrite crystal structure, and the magnetic properties deteriorate, and the initial formation layer of the alloy magnetic material, the oxygen-deficient layer of the oxide magnetic material, or the intermediate film layer made of chromium generates a pseudo gap. There was a problem with that.

This invention prevents the formation of the initial formation layer of the alloy magnetic material and the oxygen-deficient layer of the oxide magnetic material due to the diffusion of elements between these parts while maintaining the adhesion strength between the alloy magnetic material and the oxide magnetic material. The purpose of this invention is to suppress the formation of a pseudo gap in a so-called simple MIG head, which has a structure in which the magnetic gap and the surface on which the alloy magnetic film is formed are parallel.

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention includes a metal element of the rVa group or the Va group, for example, between the oxide magnetic material and the alloy magnetic layer. T i, Z r.

1-If, V, Nb, Ta, or an intermediate film layer made of oxides of these metal elements is formed.

[Function] In such a magnetic head, ■a, Vati?
Since the metal elements i or their metal oxides are difficult to diffuse into the magnetic alloy such as sendust, these elements do not diffuse into the magnetic alloy and deteriorate the magnetic properties during glass bonding. In addition, this intermediate film layer prevents oxygen diffusion, so during glass bonding,
Oxygen in the oxide magnetic material does not diffuse into the alloy magnetic material layer through the intermediate layer, thereby preventing deterioration of the magnetic properties of the oxide magnetic material.

[Example] Hereinafter, the present invention will be described in detail with reference to the drawings.

FIGS. 1 and 2 show a magnetic head using the present invention, in which an L core made of Mn-Zn ferrite and a C
It is composed of cores 2 that are butted against each other. These cores 1
．． 2, as shown in FIG. 1, an intermediate film layer 3 made of Ti is formed on Mn-Zn ferrite, which is a core material, and a sendust alloy magnetic layer 4 is further formed on it. This Sendust alloy magnetic layer 4 is 5iO
They have a structure in which they are bonded via a gap spacer layer 5 of y, and the grooves on the sides of the gap portion are filled with glass 6 for bonding.

Below, the method for manufacturing this magnetic head will be described.
What is shown in the figure is Mn-Zn ferrite core block 7.
A plurality of grooves 8 are formed parallel to each other in the length direction on the - face, and the plane between this d-18 becomes the gap face 9. Groove 8
By sputtering, on the top surface of the block on the side with
A Ti coating (intermediate film layer 3) was formed under the following conditions.

Sputtering: Magnetron sputtering Target: 99.99 wt% titanium Power source: High frequency power source, 2 KW Atmosphere: I mT orrA r Temperature: 100°C On top of this, a sendust alloy magnetic layer 4 was further formed by sputtering, and the magnetic layer 4 was formed on the top surface of the block perpendicular to the groove. A winding groove 10 and a reinforcing groove 11 are formed, and a gap spacer layer 5 made of SiO or the like is formed on the upper surface of the − side of the block, and with the blocks butted against each other, 1r48 is filled with molten glass 6. Let solidify. Then, as shown by the arrow in FIG. 3, the core block 7 is cut along >I#8, and predetermined machining is performed to form a magnetic head as shown in FIG.

In order to confirm the effect of the magnetic head manufactured in this way, a sample was prepared in which an intermediate film layer 3 made of Ti and a sendust alloy layer 4 were formed on the gap surface 9, and this was bonded to a predetermined position assuming glass bonding. temperature (570℃) in a non-oxidizing atmosphere (N, gas) for a predetermined time (20w
in) Perform annealing, and observe changes in the distribution of each element near the gap surface 9 before and after annealing using Auger electron spectroscopy (
AES) (see Figures 4 and 5). Furthermore, as a comparative example, a sample using Cr instead of Ti was similarly analyzed (see FIGS. 6 and 7).

As seen in these results, in this example,
Even after annealing, almost no Ti diffusion into the sendust alloy layer 4 is observed, whereas in the conventional example, C
``Diffusion into the sendust alloy layer can be seen.

Regarding the oxygen distribution, it can be seen in Fig. 4 that there is already a considerable amount of oxygen in the Ti layer before annealing, which is due to the sputtering formation (3) of the sendust alloy.
50°C), Ti is oxidized. In this example, there is no particular difference in the oxygen distribution before and after annealing, and it is presumed that there is little change in the magnetic properties near the intermediate film layer of the ferrite layer, but in the conventional example,
The amount of oxygen in this area has decreased significantly, and it is presumed that the ferrite has dissociated from its original crystal structure. This is because Ti, IVa, and Va group metals become oxides due to their getter effect (effect of trapping oxygen and making it passivate), and act as a barrier against oxygen diffusion (barrier effect). Seem.

In order to more specifically compare the effects of this example and the comparative example, a high frequency current was applied to each head and the magnetic output of the gap was measured (FIGS. 7 and 8). According to this, in the conventional case where Cr is used as the interlayer film layer 3, a decrease in output is observed at every fixed frequency. This is considered to be due to the output loss in the pseudo gap. On the other hand, in the example, a smooth output is obtained in all frequency ranges, and it can be confirmed that there is almost no occurrence of pseudo gaps.

In the above embodiment, 'ri' was used as the material for the intermediate film layer 3, but any metal element belonging to the IVa group or ■ariA group, or any oxide thereof, may have the same effect as the above. , and can be selected as appropriate.

[Effects of the Invention] As detailed above, the present invention provides an intermediate film layer made of a metal element of the IVa group or Va group or an oxide thereof between the oxide magnetic material and the alloy magnetic material layer. While maintaining the parallel strength of oxide magnetic material and alloy magnetic material,
It is possible to prevent the diffusion of elements between each layer in the gap portion due to temperature rise during manufacturing, prevent deterioration of the magnetic properties of each layer, and prevent the generation of pseudo gaps. As a result, it is possible to provide a magnetic head with a performance of ρ that takes advantage of the magnetic and mechanical characteristics of the oxide magnetic material and the alloy magnetic material.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the main parts of an embodiment of the present invention, and FIG.
3 is a perspective view showing the method of manufacturing the same, FIG. 4 is a graph showing the results of examining the composition of the gap portion of the example immediately after film formation using an Auger electron spectrometer, and FIG.
Figure 6 is a graph of the results after annealing, Figure 6 is a graph of the composition of the conventional example immediately after coating formation, Figure 7 is a graph of the results after annealing, and Figure 8 is the magnetic head of the example. FIG. 9 is a graph showing the characteristics of a conventional magnetic head. 1.2...Core (oxide magnetic material), 3...
... Intermediate film layer, 4... Alloy magnetic layer.

Claims (1)

[Claims] IVa is placed on the gap surface of a pair of cores made of oxide magnetic material.
1. A magnetic head characterized in that an alloy magnetic layer is formed through an intermediate film layer made of a metal element belonging to the group Va or the group Va, or an oxide thereof.