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JPH01149018A - Acoustooptic element - Google Patents

Acoustooptic element

Info

Publication number
JPH01149018A
JPH01149018A JP30912687A JP30912687A JPH01149018A JP H01149018 A JPH01149018 A JP H01149018A JP 30912687 A JP30912687 A JP 30912687A JP 30912687 A JP30912687 A JP 30912687A JP H01149018 A JPH01149018 A JP H01149018A
Authority
JP
Japan
Prior art keywords
reflection film
film
faces
acousto
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30912687A
Other languages
Japanese (ja)
Inventor
Takako Takeda
竹田 隆子
Fumio Tanaka
文雄 田中
Koichi Kanayama
光一 金山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP30912687A priority Critical patent/JPH01149018A/en
Publication of JPH01149018A publication Critical patent/JPH01149018A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To assemble a compact optical system easy to produce and to reduce the cost by forming the face opposite to the light incidence face of an acoustooptic medium into many faces and providing a partial reflection film on one of these many faces and providing a total reflection film on the other faces. CONSTITUTION:An acoustooptic medium 1 is provided with a transducer 3 which generates an ultrasonic wave, and the face opposite to a light incidence face 1c of the acoustooptic medium 1 is formed into many faces, and a partial reflection film 5 is provided on one face 1d out of these faces and a total reflection film 6 is provided on the other faces 1b. That is, a part of the diffracted light is emitted from the partial reflection film 5 and the quantity of this diffracted light is monitored. Consequently, this information is fed back to an acoustooptic element to stabilize the quantity of laser light, and the use of optical parts such as a beam splitter 5 on the outside is unnecessary to miniaturize the optical system. Further, a dielectric multilayered film or a metallic film is used and the film thickness is only controlled to produce the partial reflection film 5 and the total reflection film 6. Thus, the workability is good and the cost is reduced.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は音響光学素子に関するものである。[Detailed description of the invention] Industrial applications The present invention relates to an acousto-optic device.

従来の技術 従来、この種の音響光学素子は、第2図に示すような構
成であった。第2図において、21は音響光学媒体であ
シ、その一端面21aには電気信号源(例えば発振器)
22に接続されたトランスジューサ23が取付けられる
とともに、他端面21bには吸音材24が取付けられて
いる。
BACKGROUND OF THE INVENTION Conventionally, this type of acousto-optic device has had a configuration as shown in FIG. In FIG. 2, 21 is an acousto-optic medium, and one end surface 21a of the medium is equipped with an electric signal source (for example, an oscillator).
A transducer 23 connected to 22 is attached, and a sound absorbing material 24 is attached to the other end surface 21b.

上記構成において、電気信号源22からトランスジュー
サ23に[完信号が加えられると、ここで超音波25が
発生し、音響光学媒体21の中を吸音材24に向って進
行する。このとき、音響光学媒体21の光入射面21c
から入射された入射光26は、音響光学素子によシ回折
されて光出射面21dよシ回折光27として出射される
。なお、28は非回折光である。
In the above configuration, when a complete signal is applied from the electrical signal source 22 to the transducer 23, an ultrasonic wave 25 is generated and travels through the acousto-optic medium 21 toward the sound absorbing material 24. At this time, the light incidence surface 21c of the acousto-optic medium 21
The incident light 26 is diffracted by the acousto-optic element and output as diffracted light 27 from the light exit surface 21d. Note that 28 is non-diffracted light.

発明が解決しょうとする問題点 このような従来の構成では音響光学素子を用いて回折さ
せた光のパワーをモニターし、音響光学素子にフィード
バックして強度変調し、レーザ光量を一定に保つ場合入
射光をビームスプリッタなどで一部分割して光it−モ
ニターしなければならず、光学系も大きくなり、コスト
高になるという問題があった。
Problems to be Solved by the Invention In such a conventional configuration, the power of the diffracted light is monitored using an acousto-optic element, and the power is fed back to the acousto-optic element to modulate the intensity, thereby keeping the amount of laser light constant. There is a problem in that the light must be partially split using a beam splitter or the like for optical IT-monitoring, which increases the size of the optical system and increases the cost.

本発明はこのような問題点を解決するもので、音響光学
媒体自体に部分反射膜を設け、光量モニター用ビーム1
導き出すことを目的とするものである。
The present invention solves these problems by providing a partially reflective film on the acousto-optic medium itself, so that the light intensity monitoring beam 1
The purpose is to derive

問題点を解決するための手段 上記問題点を解決するため、本発明の音響光学素子は、
音響光学媒体に超音波を発生させるトランスジューサを
設けるとともに、この音響光学媒体の光入射面に対向す
る面を多面となし、この多面のうち一面に部分反射膜を
設けるとともに残シの面に全反射膜を設けたものである
Means for Solving the Problems In order to solve the above problems, the acousto-optic element of the present invention includes:
A transducer that generates ultrasonic waves is provided in the acousto-optic medium, and the surface of the acousto-optic medium that faces the light incident surface is multifaceted, and one of the multifaceted surfaces is provided with a partial reflection film, and the remaining surface is provided with a total reflection film. It is equipped with a membrane.

作用 上記構成において、回折光の一部は部分反射膜より出射
し、この回折光の光量をモニターすることができる。し
たがって、この情報を音響光学素子にフィードバックし
てレーザ光it安定化でき、外部にビームスプリッタな
どの光学部品を使用する必要がなく、光学系も小さくな
シ、低コスト化が図れることとなる。さらに、部分反射
膜、全反射膜の作製は誘電体多層膜や金属膜を用いて膜
厚の制御のみで可能であるので作業性も良く、さらに低
コスト化が行なえることとなる。・実施例 以下、本発明の一実施例を図面に基づき、説明する。
Effect In the above configuration, a part of the diffracted light is emitted from the partially reflective film, and the amount of this diffracted light can be monitored. Therefore, this information can be fed back to the acousto-optic element to stabilize the laser beam, there is no need to use external optical components such as a beam splitter, and the optical system can also be made smaller and lower in cost. Furthermore, since the partially reflective film and the total reflective film can be manufactured by using a dielectric multilayer film or a metal film and only by controlling the film thickness, workability is improved and costs can be further reduced. -Example Hereinafter, an example of the present invention will be described based on the drawings.

第1図は音響光学素子の概略構成を示すものである。第
1図において、1は音響光学媒体で、その一端面1aに
は電気信号源(例えば発振u)2に接続されて超音波を
発生させるトランスジューサ3が装着されるとともに他
端面1bには吸音材4が設けられている。そして、上記
一端面1aに垂直な一側面1cが光入射面とされるとと
もに、この光入射面に対向する他側部は山形状に突出さ
れて2個の他側面1d 、 leが形成されている。す
なわち、2個の他側面1d 、 leは光入射面に対し
て互いに対称に傾斜させられている。そして、このうち
一方の面1dには部分反射膜5が設けられるとともに、
他方の面1eには全反射膜6が設けられている。
FIG. 1 shows a schematic configuration of an acousto-optic element. In FIG. 1, reference numeral 1 denotes an acousto-optic medium, on one end surface 1a of which is attached a transducer 3 that is connected to an electric signal source (for example, an oscillation u) 2 to generate ultrasonic waves, and on the other end surface 1b is a sound absorbing material. 4 is provided. One side surface 1c perpendicular to the one end surface 1a is used as a light incident surface, and the other side opposite to this light incident surface is protruded in a mountain shape to form two other side surfaces 1d and 1e. There is. That is, the two other side surfaces 1d and le are inclined symmetrically with respect to the light incident surface. A partially reflective film 5 is provided on one of the surfaces 1d, and
A total reflection film 6 is provided on the other surface 1e.

以上の工うに構成され友音響光学素子について、以下そ
の動作を説明する。
The operation of the friend acousto-optic device configured as described above will be explained below.

光入射面よシ入射した入射光11は、音響光学媒体1の
内部でトランスジュー+t、3から発生する超音波12
による音響光学効果により回折される。そして、回折光
13は部分反射膜5でその一部13aが透過し、透過し
ない反射回折光13bは全反射[6で再び反射され、光
入射面より出射する。ところで、部分反射膜5を透過し
t透過回折光13aは、その光量がモニターされ、この
情報が音響光学素子にフィードバックされて、レーザ光
量が一定に保つように制御される。このため、外部にビ
ームスプリッタなどの部品を使用する仁ともなく、空間
を有効に利用したコンパクトな光学系にでき、低コスト
化が図れることとなる。ま几、部分反射膜5、全反射膜
6は作製する際に、誘電体多層膜や金属膜にて作製し、
その膜厚を制御するだけで、作製可能であるので、作業
が容易で、低コスト化が行える。なお、非回折光14も
一部14aが部分反射膜5で透過し、伐り14bは全反
射膜6で反射される。
The incident light 11 entering from the light incidence surface is an ultrasonic wave 12 generated from the transducer +t,3 inside the acousto-optic medium 1.
is diffracted by the acousto-optic effect. Then, a part 13a of the diffracted light 13 is transmitted through the partial reflection film 5, and the reflected diffracted light 13b that is not transmitted is reflected again by total reflection [6 and exits from the light incident surface. Incidentally, the amount of the t-transmitted diffracted light 13a transmitted through the partially reflective film 5 is monitored, and this information is fed back to the acousto-optic element to control the amount of laser light to be kept constant. Therefore, there is no need to use external components such as a beam splitter, and a compact optical system that makes effective use of space can be achieved, resulting in lower costs. When manufacturing the mirror, the partial reflection film 5, and the total reflection film 6, they are made of a dielectric multilayer film or a metal film,
Since it can be manufactured simply by controlling the film thickness, the work is easy and costs can be reduced. Note that a portion 14a of the undiffracted light 14 is transmitted by the partial reflection film 5, and a portion 14b of the undiffracted light 14 is reflected by the total reflection film 6.

ところで、上記実施例においては、光入射面に対向する
面を2面としたが、例えば3面まtはそれ以上に形成し
てもよい。この場合、−面に部分反射膜が設けられ、伐
シの面に全反射膜が設けられる。
Incidentally, in the above embodiment, there are two surfaces facing the light incident surface, but for example, three or more surfaces may be formed. In this case, a partial reflection film is provided on the negative surface, and a total reflection film is provided on the cutting surface.

発明の効果 上記本発明の構成によれば、音響光学媒体の光入射面に
対向する面を多面と々し、この多面のうち一面に部分反
射膜を設けるとともに残りの面に全反射膜を設は友ので
、回折光の一部を取り出してその光景をモニターするこ
とができ、したがって外部にビームスプリッタなどの部
品を使用することなくレーザ光量を一定に制御すること
ができるので、作製が容易でコンパクトな光学系が組め
るとともに低コスト化を図ることができる。
Effects of the Invention According to the above configuration of the present invention, the acousto-optic medium has multiple surfaces facing the light incident surface, and one of the multiple surfaces is provided with a partial reflection film, and the remaining surfaces are provided with a total reflection film. Since it is possible to extract a part of the diffracted light and monitor the scene, it is possible to control the amount of laser light at a constant level without using external components such as a beam splitter, making it easy to fabricate. A compact optical system can be assembled and costs can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における音響光学素子の概略
構成図、第2図は従来例の音響光学素子の概略構成図で
ある。 1・・・音響光学媒体、ld 、 le・・・他側面、
3・・・トランスジューサ、5・・・部分反射膜、6・
・・全反射膜、11・・・入射光、13・・・回折光。 代理人   森  木  義  弘
FIG. 1 is a schematic diagram of an acousto-optic device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of a conventional acousto-optic device. 1... Acousto-optic medium, ld, le... other side,
3...Transducer, 5...Partial reflection film, 6.
... Total reflection film, 11... Incident light, 13... Diffracted light. Agent Yoshihiro Moriki

Claims (1)

【特許請求の範囲】[Claims] 1、音響光学媒体に超音波を発生させるトランスジユー
サを設けるとともに、この音響光学媒体の光入射面に対
向する面を多面となし、この多面のうち一面に部分反射
膜を設けるとともに残りの面に全反射膜を設けた音響光
学素子。
1. A transducer that generates ultrasonic waves is provided on an acousto-optic medium, and the surface of the acousto-optic medium that faces the light incident surface is multifaceted, and a partially reflecting film is provided on one of the multifaceted surfaces, and the remaining surfaces are provided with a transducer that generates ultrasonic waves. An acousto-optic element with a total reflection film.
JP30912687A 1987-12-07 1987-12-07 Acoustooptic element Pending JPH01149018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30912687A JPH01149018A (en) 1987-12-07 1987-12-07 Acoustooptic element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30912687A JPH01149018A (en) 1987-12-07 1987-12-07 Acoustooptic element

Publications (1)

Publication Number Publication Date
JPH01149018A true JPH01149018A (en) 1989-06-12

Family

ID=17989205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30912687A Pending JPH01149018A (en) 1987-12-07 1987-12-07 Acoustooptic element

Country Status (1)

Country Link
JP (1) JPH01149018A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1027756A1 (en) * 1997-10-30 2000-08-16 Zygo Corporation Apparatus for generating orthogonally polarized beams having different frequencies

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1027756A1 (en) * 1997-10-30 2000-08-16 Zygo Corporation Apparatus for generating orthogonally polarized beams having different frequencies
EP1027756A4 (en) * 1997-10-30 2001-01-10 Zygo Corp Apparatus for generating orthogonally polarized beams having different frequencies

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