JPH01144520A - Manufacture of electricity conductive film - Google Patents
Manufacture of electricity conductive filmInfo
- Publication number
- JPH01144520A JPH01144520A JP30409087A JP30409087A JPH01144520A JP H01144520 A JPH01144520 A JP H01144520A JP 30409087 A JP30409087 A JP 30409087A JP 30409087 A JP30409087 A JP 30409087A JP H01144520 A JPH01144520 A JP H01144520A
- Authority
- JP
- Japan
- Prior art keywords
- film
- solution
- application layer
- moisture
- base application
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 230000005611 electricity Effects 0.000 title 1
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims abstract description 15
- 238000000576 coating method Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000001723 curing Methods 0.000 claims description 4
- 238000013008 moisture curing Methods 0.000 claims description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 abstract description 16
- -1 polyethylene Polymers 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 14
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 abstract description 12
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 abstract description 6
- 238000001125 extrusion Methods 0.000 abstract description 4
- 239000004698 Polyethylene Substances 0.000 abstract description 2
- 239000010419 fine particle Substances 0.000 abstract description 2
- 239000012948 isocyanate Substances 0.000 abstract description 2
- 229920000573 polyethylene Polymers 0.000 abstract description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 239000001294 propane Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 52
- 239000002904 solvent Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 125000005442 diisocyanate group Chemical group 0.000 description 6
- 229920000728 polyester Polymers 0.000 description 6
- 239000002585 base Substances 0.000 description 5
- 229910021595 Copper(I) iodide Inorganic materials 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- LSXDOTMGLUJQCM-UHFFFAOYSA-M copper(i) iodide Chemical compound I[Cu] LSXDOTMGLUJQCM-UHFFFAOYSA-M 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- FVAUCKIRQBBSSJ-UHFFFAOYSA-M sodium iodide Chemical compound [Na+].[I-] FVAUCKIRQBBSSJ-UHFFFAOYSA-M 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- HXVNBWAKAOHACI-UHFFFAOYSA-N 2,4-dimethyl-3-pentanone Chemical compound CC(C)C(=O)C(C)C HXVNBWAKAOHACI-UHFFFAOYSA-N 0.000 description 2
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- SYBYTAAJFKOIEJ-UHFFFAOYSA-N 3-Methylbutan-2-one Chemical compound CC(C)C(C)=O SYBYTAAJFKOIEJ-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- HYTRYEXINDDXJK-UHFFFAOYSA-N Ethyl isopropyl ketone Chemical compound CCC(=O)C(C)C HYTRYEXINDDXJK-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 229910021612 Silver iodide Inorganic materials 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- BQVVSSAWECGTRN-UHFFFAOYSA-L copper;dithiocyanate Chemical compound [Cu+2].[S-]C#N.[S-]C#N BQVVSSAWECGTRN-UHFFFAOYSA-L 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 2
- 239000005453 ketone based solvent Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- HSZCZNFXUDYRKD-UHFFFAOYSA-M lithium iodide Chemical compound [Li+].[I-] HSZCZNFXUDYRKD-UHFFFAOYSA-M 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- 229920005749 polyurethane resin Polymers 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229940045105 silver iodide Drugs 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 230000002747 voluntary effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- OZXIZRZFGJZWBF-UHFFFAOYSA-N 1,3,5-trimethyl-2-(2,4,6-trimethylphenoxy)benzene Chemical compound CC1=CC(C)=CC(C)=C1OC1=C(C)C=C(C)C=C1C OZXIZRZFGJZWBF-UHFFFAOYSA-N 0.000 description 1
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- BEJQXBXPRXFJDP-UHFFFAOYSA-N 3-(3,3-dihydroxypropoxy)propane-1,1-diol Chemical compound OC(O)CCOCCC(O)O BEJQXBXPRXFJDP-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- 101100454194 Caenorhabditis elegans mei-1 gene Proteins 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- QORUGOXNWQUALA-UHFFFAOYSA-N N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 Chemical compound N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 QORUGOXNWQUALA-UHFFFAOYSA-N 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229920000538 Poly[(phenyl isocyanate)-co-formaldehyde] Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 235000010980 cellulose Nutrition 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- BULLHNJGPPOUOX-UHFFFAOYSA-N chloroacetone Chemical compound CC(=O)CCl BULLHNJGPPOUOX-UHFFFAOYSA-N 0.000 description 1
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 1
- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
- KORSJDCBLAPZEQ-UHFFFAOYSA-N dicyclohexylmethane-4,4'-diisocyanate Chemical compound C1CC(N=C=O)CCC1CC1CCC(N=C=O)CC1 KORSJDCBLAPZEQ-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012799 electrically-conductive coating Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N hexane Substances CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229940117955 isoamyl acetate Drugs 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 1
- 229940011051 isopropyl acetate Drugs 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- SHOJXDKTYKFBRD-UHFFFAOYSA-N mesityl oxide Natural products CC(C)=CC(C)=O SHOJXDKTYKFBRD-UHFFFAOYSA-N 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- AYLRODJJLADBOB-QMMMGPOBSA-N methyl (2s)-2,6-diisocyanatohexanoate Chemical compound COC(=O)[C@@H](N=C=O)CCCCN=C=O AYLRODJJLADBOB-QMMMGPOBSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- PJGSXYOJTGTZAV-UHFFFAOYSA-N pinacolone Chemical compound CC(=O)C(C)(C)C PJGSXYOJTGTZAV-UHFFFAOYSA-N 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- RHUVFRWZKMEWNS-UHFFFAOYSA-M silver thiocyanate Chemical compound [Ag+].[S-]C#N RHUVFRWZKMEWNS-UHFFFAOYSA-M 0.000 description 1
- 235000009518 sodium iodide Nutrition 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Liquid Crystal (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は電気伝導性被覆を有する透明導電膜の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to a method for producing a transparent conductive film having an electrically conductive coating.
(従来の技術)
透明導電性フィルムは電子写真記録のベース材料、静電
写真記録のベース材料、8型液晶デイスプレイの透明電
極、分散型ELの透明電極、タッチパネルの透明電極、
クリーンルーム、メーター窓、VTRテープ等の帯電防
止膜、透明ヒーターなど、幅広い応用分野を有している
。(Prior art) Transparent conductive films are used as base materials for electrophotographic recording, base materials for electrostatic photographic recording, transparent electrodes for 8-inch liquid crystal displays, transparent electrodes for dispersion type EL, transparent electrodes for touch panels,
It has a wide range of applications, including clean rooms, meter windows, antistatic films for VTR tapes, and transparent heaters.
従来の透明導電性膜のうちで半導体薄膜タイプとしては
スズをトープした酸化インジウム膜(Indium T
in 0xide−ITO膜)、アンチモンをドープし
た酸化スズ膜、カドミウム・スズ酸化物膜((:adm
ium Tin 0xide−C70膜)、ヨウ化銅膜
、酸化チタン膜および酸化ジルコニウム膜などがある。Among conventional transparent conductive films, tin-topped indium oxide film (Indium T
in Oxide-ITO film), antimony-doped tin oxide film, cadmium tin oxide film ((:adm
ium Tin Oxide-C70 film), copper iodide film, titanium oxide film, and zirconium oxide film.
この中でITO膜が透明性、導電性ともに最も優れてい
る。酸化スズ膜は、膜形成に高い基板温度が必要であり
、高分子フィルムへの適用は難しい、C70膜は酸化イ
ンジウム膜よりエネルギーギャップが小さく(吸収端が
長波長側にあり)、膜厚が大きくなるとやや黄味を帯び
る。ヨウ化銅膜、酸化チタン膜、酸化ジルコニウム膜は
これらに比較して透明性、導電性ともに劣る。Among these, ITO film is the most excellent in both transparency and conductivity. Tin oxide film requires a high substrate temperature for film formation, making it difficult to apply to polymer films.C70 film has a smaller energy gap than indium oxide film (absorption edge is on the long wavelength side) and film thickness. As it grows, it becomes slightly yellowish. Copper iodide films, titanium oxide films, and zirconium oxide films are inferior in both transparency and conductivity compared to these films.
またこれらの半導体薄膜導電膜は、蒸着、その後の処理
工程において作成されるが、大型の製造設備が必要で、
そのため高価であった。In addition, these semiconductor thin conductive films are created through vapor deposition and subsequent processing steps, but large-scale manufacturing equipment is required.
Therefore, it was expensive.
このような半導体薄膜を安価に形成させる一方法として
高分子フィルムに予め下塗りを施し、その層表面に半導
体化合物を吸収させることにより透明性導電膜を作成す
る方法が、支持体、上層への密着の改良法として記載さ
れている(特公昭48−9984号)。One way to form such a semiconductor thin film at low cost is to create a transparent conductive film by applying an undercoat to a polymer film in advance and absorbing a semiconductor compound onto the surface of the layer, which is effective in adhering to the support and upper layer. (Japanese Patent Publication No. 48-9984).
(発明が解決しようとする問題点)
従来の下塗りは支持体に接着性を有する回度潤性、電気
絶縁性重合体物質を用いて行われているがしかしこのよ
うな透明導電性フィルムは密着性、透明性などは優れて
いるが導電性はまた十分とはいえなかった。(Problems to be Solved by the Invention) Conventional undercoating is performed using a hydrophobic, electrically insulating polymer material that has adhesive properties to the support, but such transparent conductive films do not adhere well. Although the properties and transparency were excellent, the conductivity was not sufficient.
(問題点を解°決するための手段)
本発明者らはこのような従来の透明導電性フィルムの欠
点を克服するため鋭意研究を重ねた結果、下塗層として
湿気硬化型ウレタン樹脂を塗布し、硬化することにより
、その上に塗布した半導体化合物溶液の溶剤による膨潤
性が所定範囲に制御され、半導体化合物が支持体の反対
側の表面近くに最も高い濃度で存在している導電層を形
成しうることを見出し、この知見に基づき本発明をなす
に至った。(Means for solving the problem) The present inventors have conducted intensive research to overcome the drawbacks of conventional transparent conductive films, and as a result, we have developed a film that coats a moisture-curable urethane resin as an undercoat layer. , by curing, the swelling property of the semiconductor compound solution applied thereon by the solvent is controlled within a predetermined range, and a conductive layer is formed in which the semiconductor compound is present in the highest concentration near the opposite surface of the support. Based on this knowledge, the present invention has been completed.
すなわち本発明は、支持体上に湿気硬化型ウレタン樹脂
を塗布し硬化させて下塗層を形成し、該下塗層上に半導
体化合物を含有する溶液を塗布することにより導電層が
形成されることを特徴とする導電膜の製造方法を提供す
るものである。That is, in the present invention, a moisture-curable urethane resin is applied onto a support and cured to form an undercoat layer, and a conductive layer is formed by applying a solution containing a semiconductor compound onto the undercoat layer. The present invention provides a method for manufacturing a conductive film characterized by the following.
本発明において支持体としては従来公知のものを用いる
ことかでき1例えば、ポリエチレンテレフタレートなど
のポリエステル類、ポリエチレン、ポリプロピレンなど
のポリオレフィン類、セルロースアセテートなどのセル
ロース類、ポリメチルメタクリレート類、ナイロン6な
どのポリアミド類、ポリイミド類、ポリカーボネート類
、ポリビニルアルコール類、塩化ビニル−酢酸ビニル共
重合体類、ガラス、前記ポリオレフィン類、ポリエステ
ル類を被覆した被覆紙なども用いることができる。In the present invention, conventionally known supports can be used. For example, polyesters such as polyethylene terephthalate, polyolefins such as polyethylene and polypropylene, celluloses such as cellulose acetate, polymethyl methacrylates, nylon 6, etc. Also usable are polyamides, polyimides, polycarbonates, polyvinyl alcohols, vinyl chloride-vinyl acetate copolymers, glass, and coated paper coated with the above-mentioned polyolefins and polyesters.
本発明においてこのような支持体上に湿気硬化型ウレタ
ン樹脂の下塗層を形成する。In the present invention, a moisture-curable urethane resin undercoat layer is formed on such a support.
本発明において使用する湿気硬化型ウレタン樹脂とは一
液型の硬化型ウレタン樹脂で、空気中の湿気を吸収して
三次元的に架橋反応が進行して硬化する型の樹脂である
。このような湿気硬化型ウレタン樹脂は多価アルコール
に過剰のジイソシアネートを反応させて末端に遊離イソ
シアネート基を残した樹脂で、湿気によりイソシアネー
ト基が反応し硬化する型の樹脂が一般的である。また非
黄変性のジイソシアネートを用いる場合は反応促進剤と
してジブチルチンジラウレートなどの触媒を用いること
もある。The moisture-curing urethane resin used in the present invention is a one-component curable urethane resin that absorbs moisture in the air and undergoes a three-dimensional crosslinking reaction to cure. Such moisture-curable urethane resins are resins in which polyhydric alcohols are reacted with excess diisocyanate to leave free isocyanate groups at the ends, and are generally resins that harden when the isocyanate groups react with moisture. Further, when a non-yellowing diisocyanate is used, a catalyst such as dibutyltin dilaurate may be used as a reaction accelerator.
ここて使用される多価アルコールとしてはエチレングリ
コール、プロピレングリコール、1.3−ブチレンゲリ
コール、1.6−ヘキサンジオール、ジエチレングリコ
ール、ジプロピレングリコール、ネオペンチルグリコー
ル、トリエチレンクリコール、水素化ビスフェノールA
、ビスフェノールジヒドロキシプロピルエーテル、グリ
セリン、トリメチロールエタン、トリメチロールプロパ
ン、トリスヒドロキシメチルアミノメタン、ペンタエリ
トリット、ジペンタエリトリットが挙げられ、またジイ
ソシアネートとしては2.4−トリレンジイソシアネー
ト、2.6−トリレンジイソシアネート、4.4′−ジ
フェニルメタンジイソシアネート、パラキシリレンジイ
ソシアネート、メタキシリレンジイソシアネート、ヘキ
サメチレンジイソシアネート、リジンジイソシアネート
、4.4′−メチレンビス(シクロヘキシルイソシアネ
ート)、メチルシクロヘキサン−2,4−ジイソシアネ
ート、メチルシクロヘキサン−2,6−ジイソシアネー
ト、l、3− (イソシアナートメチル)シクロヘキサ
ン、イソホロンジイソシアネート、トリメチルへキサメ
チレンジイソシアネート、ダイマー酸ジイソシアネート
などが挙げられる。また、他の湿気硬化型ウレタン樹脂
としてはトリフェニルメタントリイソシアナート、ナフ
チレン−1,5−ジイソシアナート、ポリメチレンポリ
フェニルイソシアナート等が挙げられる。他にフェノー
ル、クレゾール等のフェノール類、アルコール類でブロ
ックしたブロック型イソシアナートを用いることができ
るが特にこれらに限定されるものではない。The polyhydric alcohols used here include ethylene glycol, propylene glycol, 1,3-butylene gelicol, 1,6-hexanediol, diethylene glycol, dipropylene glycol, neopentyl glycol, triethylene glycol, and hydrogenated bisphenol A.
, bisphenol dihydroxypropyl ether, glycerin, trimethylolethane, trimethylolpropane, trishydroxymethylaminomethane, pentaerythritol, dipentaerythritol, and the diisocyanates include 2.4-tolylene diisocyanate, 2.6- Tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, paraxylylene diisocyanate, metaxylylene diisocyanate, hexamethylene diisocyanate, lysine diisocyanate, 4,4'-methylenebis(cyclohexyl isocyanate), methylcyclohexane-2,4-diisocyanate, methyl Examples include cyclohexane-2,6-diisocyanate, 1,3-(isocyanatomethyl)cyclohexane, isophorone diisocyanate, trimethylhexamethylene diisocyanate, dimer acid diisocyanate, and the like. Other moisture-curable urethane resins include triphenylmethane triisocyanate, naphthylene-1,5-diisocyanate, and polymethylene polyphenylisocyanate. In addition, blocked isocyanates blocked with phenols, phenols such as cresol, and alcohols can be used, but are not particularly limited to these.
本発明の下塗層中には湿気硬化型ウレタン樹脂の他に、
これらの化合物と相溶性のよい他の樹脂を含有してもよ
い。例えば、スチレン−ブタジェンコポリマー、スチレ
ン樹脂、アルキッド樹脂。In addition to the moisture-curing urethane resin, the undercoat layer of the present invention contains
It may also contain other resins that are compatible with these compounds. For example, styrene-butadiene copolymers, styrene resins, alkyd resins.
塩化ビニル樹脂、塩化ビニル−酢酸ビニル樹脂、ポリビ
ニリデンクロライド樹脂、酢酸ビニル樹脂、ポリビニル
アセタール、ポリアクリル酸エステル、ポリメタクリル
酸エステル、イソブチレンポリマー、ポリエステル、ケ
トン樹脂、ポリアミド類、ポリカーボネート類、ポリチ
オカーボネート類、ビニルハロアリレート類のコポリマ
ー、ビニルアセテート等を挙げることができるが、特に
これらに限定されるものではない。Vinyl chloride resin, vinyl chloride-vinyl acetate resin, polyvinylidene chloride resin, vinyl acetate resin, polyvinyl acetal, polyacrylic acid ester, polymethacrylic acid ester, isobutylene polymer, polyester, ketone resin, polyamides, polycarbonates, polythiocarbonate Examples thereof include copolymers of vinyl haloarylates, vinyl acetates, etc., but are not particularly limited thereto.
下塗層の厚さは特に制限はないが0.O1〜100終、
好ましくは0.05〜10ILとする。The thickness of the undercoat layer is not particularly limited, but may be 0. O1~100 end,
Preferably it is 0.05 to 10 IL.
本発明において下塗層は半導体化合物溶液の溶剤の塗布
処理中に膨潤して半導体化合物溶液を吸収するが溶解し
ない(溶剤膨潤性を有する)。これは三次元網目構造に
よるものと考えられる。またこの結果、下塗層の表面近
くに導電層が形成されることになる。In the present invention, the undercoat layer swells and absorbs the semiconductor compound solution during coating treatment with a solvent for the semiconductor compound solution, but does not dissolve (has solvent swellability). This is considered to be due to the three-dimensional network structure. This also results in the formation of a conductive layer near the surface of the undercoat layer.
本発明において用いられる湿気硬化型ウレタン樹脂は、
膨潤度ΔT/T、−To (Toは浸漬前の膜厚、T1
は半導体化合物を溶解する溶剤に5分間浸漬後の膜厚、
ΔTは測定された膜厚の変位)がT。が約1OILの時
好ましくは1.05〜2.5の範囲であり、より好まし
くは1.05〜1.7である。The moisture-curable urethane resin used in the present invention is
Swelling degree ΔT/T, -To (To is the film thickness before immersion, T1
is the film thickness after immersion for 5 minutes in a solvent that dissolves semiconductor compounds,
ΔT is the measured displacement in film thickness). When is about 1 OIL, it is preferably in the range of 1.05 to 2.5, more preferably 1.05 to 1.7.
本発明の導電層を作るための好ましい方法は、揮発性溶
剤中に可溶化された半導体化合物を溶かした溶液を適当
な支持体上に形成した硬化された湿気硬化型ポリウレタ
ン樹脂の下塗層上に塗布し、下塗層中に塗布液を吸収さ
せ、その溶剤を蒸発させる方法である。A preferred method for making the conductive layer of the present invention is to apply a solution of a semiconductor compound solubilized in a volatile solvent to a base coat layer of a cured moisture-curing polyurethane resin on a suitable support. In this method, the coating liquid is absorbed into the undercoat layer, and the solvent is evaporated.
また本発明の導電性薄膜の導電層に用いられる半導体化
合物としては、好ましくは沃化第一銅及び沃化銀である
が他の金属含有半導体化合物、例えば他のハロゲン化第
−銅;ハロゲン化銀:ビスマス、金、インジウム、イリ
ジウム、鉛、ニッケル、パラジウム、レニウム、錫、テ
ルリウム、及びタングステンのハライド:チオシアン酸
第−銅、第二銅及び銀;あるいはヨードマーキュレート
等も使用しうる。Semiconductor compounds used in the conductive layer of the conductive thin film of the present invention are preferably cuprous iodide and silver iodide, but other metal-containing semiconductor compounds, such as other cuprous halides; Silver: bismuth, gold, indium, iridium, lead, nickel, palladium, rhenium, tin, tellurium, and tungsten halides: cupric, cupric, and silver thiocyanate; or iodomerculate, etc. may also be used.
金属含有半導体化合物は水とか多くの有機溶剤の如き揮
発性溶剤の殆どのものに易溶性ではない。従って半導体
のための可溶化剤としてその半導体と可溶性錯塩を生成
する化合物を使用することができる。Metal-containing semiconductor compounds are not readily soluble in most volatile solvents such as water and many organic solvents. Compounds which form soluble complex salts with semiconductors can therefore be used as solubilizers for semiconductors.
一般にアルカリ金属パライト及びアンモニウムハライド
をハロゲン化銀、ハロゲン化第−銅、ハロゲン化第−錫
、ハロゲン化鉛その他の如き半導体ハロゲン化金属のあ
るものとの錯化合剤として使用することができ、ケトン
溶剤に易溶性の錯化合物を生成する0通常は、例えば水
で洗浄することによりその可溶化剤を取り除くのが好ま
しいけれども、若干の具体例では、その錯塩自体か十分
な導電性を提供する。後者の場合、その錯化合物自体が
半導体化合物である。これらの錯化合物を溶かすのに適
した揮発性ケトン溶剤の例としてはアセトン、メチルエ
チルケトン、2−ペンタノン、3−ペンタノン、2−ヘ
キサン、2−ヘプタノン、4−ヘプタノン、メチルイソ
プロピルケトン、エチルイソプロピルケトン、ジイソプ
ロピルケトン、メチルイソブチルケトン、メチル−t−
プチルケトン、ジアセチル、アセチルアセトン。In general, alkali metal pallites and ammonium halides can be used as complexing agents with certain semiconducting metal halides such as silver halides, cupric halides, tin halides, lead halides, and others; Although it is usually preferred to remove the solubilizing agent, for example by washing with water, in some embodiments the complex salt itself provides sufficient conductivity. In the latter case, the complex compound itself is a semiconductor compound. Examples of volatile ketone solvents suitable for dissolving these complex compounds are acetone, methyl ethyl ketone, 2-pentanone, 3-pentanone, 2-hexane, 2-heptanone, 4-heptanone, methyl isopropyl ketone, ethyl isopropyl ketone, Diisopropyl ketone, methyl isobutyl ketone, methyl-t-
butylketone, diacetyl, acetylacetone.
アセトニルアセトンジアセトンアルコール、メシチルオ
キサイド、クロロアセトン、シクロペンタノン、シクロ
ヘキサノン、アセトフェノンがある。ケトン溶剤の混合
物を用いることもでき、また場合によっては単一のケト
ン溶剤を使用できる。ある場合においては、特に沃化リ
チウム、沃化ナトリウムが錯塩化剤として使用される場
合、ケトン以外の溶剤の若干のものを沃化錯化合物を溶
かすため使用してもかまわない。メチルアセテート、エ
チルアセテート、n−プロピルアセテート、イソプロピ
ルアセテート、n−ブチルアセテート、イソ−アミルア
セテート、テトラヒドロフラン、ジメチルフォルムアミ
ド
ソルブ、メチルセロソルブアセテート、エチルアセテー
ト及びその他のものが沃化錯化合物を溶解するため有効
に使用することができる。These include acetonyl acetone diacetone alcohol, mesityl oxide, chloroacetone, cyclopentanone, cyclohexanone, and acetophenone. Mixtures of ketone solvents can also be used, and in some cases a single ketone solvent can be used. In some cases, some solvents other than ketones may be used to dissolve the iodide complex compound, particularly when lithium iodide, sodium iodide are used as complexing agents. Methyl acetate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, iso-amyl acetate, tetrahydrofuran, dimethylformamide solve, methyl cellosolve acetate, ethyl acetate and others to dissolve iodide complex compounds It can be used effectively.
沃化第一銅の溶剤としては沃化第一銅とアセトニトリル
が錯塩を作るため、アセトニトリルを使用することがで
きる。As a solvent for cuprous iodide, acetonitrile can be used because cuprous iodide and acetonitrile form a complex salt.
半導体化合物を濃度0.1〜50重量%溶液として用い
るのが好ましい。また、この溶液を40〜2000mg
/rn’の割合で塗布することが好ましく、特に100
−1000mg/rn”の割合で塗布することが好まし
い。Preferably, the semiconductor compound is used as a solution with a concentration of 0.1 to 50% by weight. Also, add 40 to 2000 mg of this solution.
It is preferable to apply at a ratio of /rn', especially 100
It is preferable to apply at a rate of -1000 mg/rn''.
本発明の透明導電膜は支持体上に湿気硬化型ウレタンの
下塗層を形成させ、この上に半導体化合物の溶液を塗布
し、導電層を形成することにより得ることができる。硬
化させる時間は特に制限はなく、硬化する温度によって
も異なる。The transparent conductive film of the present invention can be obtained by forming a moisture-curable urethane undercoat layer on a support, and applying a solution of a semiconductor compound thereon to form a conductive layer. The curing time is not particularly limited and varies depending on the curing temperature.
半導体化合物の溶液を塗布する方法は,例えば回転塗布
、浸液塗布、噴霧塗布、連続塗布機によるビート塗布,
連続的に移動するウィック法、ホッパーを用いる塗布法
などがあるか、特にこれに限定されるものではない。Methods for applying a solution of a semiconductor compound include, for example, spin coating, dip coating, spray coating, beat coating using a continuous coating machine,
There are methods such as a continuously moving wick method, a coating method using a hopper, etc., but the method is not particularly limited thereto.
このような導電層の形成方法自体は特公昭48−998
4号,同46−34499号の方法により行うことがで
きる。The method of forming such a conductive layer itself is described in Japanese Patent Publication No. 48-998.
4, No. 46-34499.
(発明の効果)
本発明方法により得られた導電膜は透明性、及び導電層
の密着性が優れ、とりわけ、高い導電性を示す。この透
明導電性フィルムは電子写真記録のベース材料、静電写
真記録のベース材料、薄型液晶デイスプレィの透明電極
、分散型ELの透明電極、タッチパネルの透明電極,ク
リーンルーム、メーター窓,VTRテープ等の帯電防止
膜、透明ヒーターなど幅広く用いることかできる。(Effects of the Invention) The conductive film obtained by the method of the present invention has excellent transparency and adhesion of the conductive layer, and particularly exhibits high conductivity. This transparent conductive film is used as a base material for electrophotographic recording, a base material for electrostatic photographic recording, transparent electrodes for thin liquid crystal displays, transparent electrodes for distributed EL, transparent electrodes for touch panels, clean rooms, meter windows, VTR tapes, etc. It can be used in a wide range of applications such as preventive films and transparent heaters.
(実施例) 以下に本発明を実施例に基づきさらに詳細に説明する。(Example) The present invention will be explained in more detail below based on examples.
実施例1
厚さ100ILのポリエチレンテレフタレートフィルム
の上にトリレンジイソシアナートのトリメチロールプロ
パン付加体からなる湿気硬化型ウレタン樹脂5.0gを
ジクロロメタン95.0gに溶解した溶液を押しだしホ
ッパーで塗布し、100°Cで乾燥した。この下塗層の
膜厚は約0、5.てあった。この膜を50℃80%RH
で1日間放置し硬化した。その後、この層の上に97g
のアセトニトリル中に3gのヨウ化第−銅を含む溶液を
乾燥重量で0.3g/m’の割合で塗布し、100°C
て乾燥した。この溶液はバインダーを含まないが、下塗
層に吸収され、主に下塗層の上層にCuIの微粒子層が
できる。、この導電膜の表面抵抗をLoresta M
CP−TESTER (三菱油化社製)で測定した結果
1.OX10’Ω/口であった。Example 1 A solution prepared by dissolving 5.0 g of a moisture-curable urethane resin consisting of a trimethylolpropane adduct of tolylene diisocyanate in 95.0 g of dichloromethane was applied onto a 100 IL thick polyethylene terephthalate film using an extrusion hopper. Dry at °C. The thickness of this undercoat layer is approximately 0.5. There was. This film was heated at 50℃80%RH.
It was left to stand for one day to harden. Then add 97g on top of this layer.
A solution containing 3 g of cupric iodide in acetonitrile was applied at a dry weight of 0.3 g/m' and heated at 100°C.
and dried. Although this solution does not contain a binder, it is absorbed by the undercoat layer, forming a fine particle layer of CuI mainly on top of the undercoat layer. , the surface resistance of this conductive film was determined by Loresta M
Results measured with CP-TESTER (manufactured by Mitsubishi Yuka Co., Ltd.) 1. It was OX10'Ω/mouth.
実施例2
厚さlongのポリエチレンテレフタレートフィルムの
上に湿気硬化型ウレタン樹脂:コロネートL(商品名,
日本ポリウレタン社製)4.0g、ポリエステル樹脂;
ポリエステルアドヘシブ49000 (商品名、デュポ
ン社製)3.0gをジクロロメタン93.0gに溶解し
た溶液を押しだしホッパーで塗布し、100℃で乾燥し
た。この下塗層の膜厚は約0.3鉢であった、。この膜
を50’C80%RHで2日間放置し硬化した。この層
の上に97gのアセトニトリル中に3gのヨウ化第−銅
を含む溶液を乾燥重量で0.3g/m″の割合で塗布し
loo’cで乾燥した。この導電膜の表面抵抗は1.O
Xlo4Ω/口であった。Example 2 Moisture-curable urethane resin: Coronate L (trade name,
(manufactured by Nippon Polyurethane Co., Ltd.) 4.0g, polyester resin;
A solution prepared by dissolving 3.0 g of Polyester Adhesive 49000 (trade name, manufactured by DuPont) in 93.0 g of dichloromethane was applied using an extrusion hopper and dried at 100°C. The film thickness of this undercoat layer was approximately 0.3 mm. This film was left to stand at 50'C, 80% RH for 2 days to cure. On top of this layer, a solution containing 3 g of cupric iodide in 97 g of acetonitrile was applied at a dry weight of 0.3 g/m'' and dried at loo'c.The surface resistance of this conductive film was 1 .O
Xlo4Ω/mouth.
実施例3
実施例2のポリエステルアドヘシブ490000、3g
の代わりに第1表に記載のポリマーを使用した以外は実
施例2を全く同様に実施した。得られた導電膜は何れも
良好な導電性を示した。Example 3 Polyester adhesive 490000 of Example 2, 3 g
Example 2 was carried out in exactly the same manner, except that the polymers listed in Table 1 were used instead of the polymers listed in Table 1. All of the obtained conductive films showed good conductivity.
実施例4
実施例2のコロネートL4.Ogの代わりに第2表に記
載の湿気硬化型ウレタン樹脂(ポリイソシアネート)を
使用した以外は実施例2を全く同様に実施した。何れも
良好な導電性を示した。Example 4 Coronate L4 of Example 2. Example 2 was carried out in exactly the same manner except that a moisture-curable urethane resin (polyisocyanate) listed in Table 2 was used instead of Og. All showed good conductivity.
比較例1
厚さ100ILのポリエチレンテレフタレートフィルム
の上にポリエステルアドヘシブ490005、Ogをメ
チルエチルケトン95.0gに溶解した溶液を押しだし
ホッパーで塗布し、100℃で乾燥した。この下塗層の
膜厚は約o、5ILであった。この層の上に97gのア
セトニトリル中に3gのヨウ化第−銅を含む溶液を乾燥
重量で0.3g/rn’の割合で塗布し、100’Cて
乾燥させた。この導電膜の表面抵抗は5.0xlO9Ω
/口であった。Comparative Example 1 A solution of polyester adhesive 490005, Og dissolved in 95.0 g of methyl ethyl ketone was applied onto a 100 IL thick polyethylene terephthalate film using an extrusion hopper and dried at 100°C. The thickness of this undercoat layer was about 0.5 IL. A solution of 3 g of cupric iodide in 97 g of acetonitrile was applied onto this layer at a dry weight of 0.3 g/rn' and dried at 100'C. The surface resistance of this conductive film is 5.0xlO9Ω
/It was a mouth.
比較例2
比較例1の下塗層の代わりに塩化ビニリデン、アクリロ
ニトリル、アクリル酸を80:19:1(重量比)で共
重合させて調製した樹脂5.0gをジクロロメタン95
.0gに溶解した溶液を押しだしホッパーて塗布し、1
00℃で乾燥した。Comparative Example 2 Instead of the undercoat layer of Comparative Example 1, 5.0 g of a resin prepared by copolymerizing vinylidene chloride, acrylonitrile, and acrylic acid at a ratio of 80:19:1 (weight ratio) was mixed with 95 g of dichloromethane.
.. Apply the solution dissolved in 0g using a hopper and apply 1
It was dried at 00°C.
この層の膜厚は約0.51Lであった。その後実施例1
と全く同様にして導電膜を作成し表面抵抗を測定した結
果3.0xlO6Ω/口であった。The thickness of this layer was approximately 0.51L. Then Example 1
A conductive film was prepared in exactly the same manner as above, and the surface resistance was measured to be 3.0xlO6Ω/mouth.
実施例5
厚さ100.のポリエチレンテレフタレートフィルム上
に実施例2と全く同様の操作により約0.3川の下塗層
を設けた。この膜を50℃80%RHで2日間放置して
硬化した後、この上にヨウ化銀776g、ヨウ化カリウ
ム2.14gを2−ブタン中に溶解した溶液を乾燥重量
で0.6g/rrfの割合で塗布し100℃で乾燥した
。この導電膜の抵抗は3゜0x106Ω/口であった。Example 5 Thickness: 100. An undercoat layer of approximately 0.3 mm was provided on the polyethylene terephthalate film by the same procedure as in Example 2. After this film was left to stand at 50°C and 80% RH for 2 days to cure, a solution of 776 g of silver iodide and 2.14 g of potassium iodide dissolved in 2-butane was added to the film at a dry weight of 0.6 g/rrf. It was applied at a ratio of 100°C and dried at 100°C. The resistance of this conductive film was 3°0×10 6 Ω/hole.
実施例1から4に示すように下塗層に湿気硬化型ポリウ
レタン樹脂を用いた導電膜は比較例に比べ良好な導電性
を示す。As shown in Examples 1 to 4, conductive films using a moisture-curable polyurethane resin for the undercoat layer exhibit better conductivity than the comparative examples.
手続有す正置(自発)
昭和63年4月19日
特許庁長官 小 川 邦 夫 殿
1、s件の表示
昭和62年特許願第304090号
2、発明の名称
導電膜の製造方法
3、補正をする者
事件との関係 特許出願人
住所 神奈川県南足柄市中沼21O#地名称 (52
0)富士写真フィルム株式会社代表者 大 西 實
4、代理人
住所 〒105東京都港区新橋3丁目7番3号ミドリヤ
第2ビル 7階
電話 (03)591−7387 。Establishment of procedure (voluntary) April 19, 1988 Director General of the Patent Office Kunio Ogawa 1. Indication of s Patent Application No. 304090 1988 2. Title of invention Method for manufacturing conductive film 3. Amendment Relationship with the case of a person who does
0) Fuji Photo Film Co., Ltd. Representative: Minoru Ohnishi 4, Agent address: 7th floor, Midoriya Building 2, 3-7-3 Shinbashi, Minato-ku, Tokyo 105 Telephone: (03) 591-7387.
6、補正の対象
明細書の「発明の詳細な説明」の欄
7、補正の内容
(1)明細書第1ページ下から第7行の「透明」を削除
します。6. Column 7 of "Detailed Description of the Invention" of the specification subject to amendment. Contents of amendment (1) Delete "Transparent" in line 7 from the bottom of the first page of the specification.
(2)同書第11ページ第9行の「この溶液を」の次に
「半導体化合物か」を加入します。(2) Add "Is this a semiconductor compound" next to "This solution" on page 11, line 9 of the same book.
(3)回書同ページ第13行の「支持体上に」の次に「
硬化された」を加入します。(3) On the 13th line of the same page of the circular, after “on the support”, “
Add "Hardened".
(以上)
手続補装置(自発)
昭和63年9月8日
特許庁長官 吉 1)文 毅 殿
1、Is件の表示
昭和62年特許願第304090号
2、発明の名称
導電膜の製造方法
3、補正をする者
事件との関係 特許出願人
住所 神奈川県南足柄市中沼210番地名称 (52
0)富士写真フィルム株式会社代表者 大 西 實
4、代理人
住所 〒105東京都港区新橋3丁目7番3号ミドリヤ
第2ビル 7階
電話 (03)591−7387
氏名 (7643)弁理士 飯 1)敏 三5、補正命
令の日付 自発
6、補正の対象
7、補正の内容
(1)明細書第8ページ第6行の「ΔT/T1−To」
を「T1/To」に補正します。(Above) Procedural auxiliary device (spontaneous) September 8, 1988 Director General of the Japan Patent Office Yoshi 1) Takeshi Moon 1, Indication of Is Patent Application No. 304090 of 1988 2, Title of invention Method for manufacturing conductive film 3 , Relationship with the case of the person making the amendment Patent applicant address 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name (52
0) Fuji Photo Film Co., Ltd. Representative Minoru Ohnishi 4, Agent address 7th floor, Midoriya Building 2, 3-7-3 Shinbashi, Minato-ku, Tokyo 105 Telephone (03) 591-7387 Name (7643) Patent attorney Mei 1) Toshi 35, date of amendment order Voluntary action 6, subject of amendment 7, content of amendment (1) "ΔT/T1-To" on page 8, line 6 of the specification
Correct to "T1/To".
(2)同書同ページ第8〜9行のQΔTは・・・の変位
」を削除します。(2) Delete "QΔT is the displacement of..." from lines 8 to 9 on the same page of the same book.
(3)同書第18ページ最下行のr3.0Xlo J
をr3.0xlO7Jに補正します。(3) r3.0Xlo J on the bottom line of page 18 of the same book
Correct to r3.0xlO7J.
(以上)(that's all)
Claims (1)
させて下塗層を形成し、この下塗層上に半導体化合物を
含有する溶液を塗布することにより、導電層が形成され
ることを特徴とする導電膜の製造方法。1. A conductive layer is formed by coating a moisture-curing urethane resin on a support and curing it to form an undercoat layer, and then applying a solution containing a semiconductor compound onto this undercoat layer. A method for producing a conductive film characterized by:
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62304090A JP2572245B2 (en) | 1987-12-01 | 1987-12-01 | Method for manufacturing conductive film |
US07/675,069 US5075171A (en) | 1987-09-10 | 1991-03-26 | Conductive film and method for preparing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62304090A JP2572245B2 (en) | 1987-12-01 | 1987-12-01 | Method for manufacturing conductive film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01144520A true JPH01144520A (en) | 1989-06-06 |
JP2572245B2 JP2572245B2 (en) | 1997-01-16 |
Family
ID=17928901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62304090A Expired - Fee Related JP2572245B2 (en) | 1987-09-10 | 1987-12-01 | Method for manufacturing conductive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2572245B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004078476A1 (en) * | 2003-02-17 | 2004-09-16 | Tokuyama Corporation | Layered product, optical part, processes for producing these, and coating fluid |
US8153194B2 (en) | 2006-03-01 | 2012-04-10 | Tokuyama Corporation | Method for producing laminate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60150508A (en) * | 1984-01-18 | 1985-08-08 | 日本写真印刷株式会社 | Method of producing transparent electrode board |
-
1987
- 1987-12-01 JP JP62304090A patent/JP2572245B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60150508A (en) * | 1984-01-18 | 1985-08-08 | 日本写真印刷株式会社 | Method of producing transparent electrode board |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004078476A1 (en) * | 2003-02-17 | 2004-09-16 | Tokuyama Corporation | Layered product, optical part, processes for producing these, and coating fluid |
US8012588B2 (en) | 2003-02-17 | 2011-09-06 | Tokuyama Corporation | Layered product, optical part, processes for producing these, and coating fluid |
US8153194B2 (en) | 2006-03-01 | 2012-04-10 | Tokuyama Corporation | Method for producing laminate |
Also Published As
Publication number | Publication date |
---|---|
JP2572245B2 (en) | 1997-01-16 |
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