JPH0113995Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an improvement of a spin dryer. Generally, when manufacturing a photomask used in manufacturing semiconductor devices, a positive photoresist film is coated on a glass substrate, exposed to light in a predetermined pattern, and then a metal film such as chromium is deposited by vapor deposition. A photomask is manufactured by forming a metal film in a predetermined pattern on a substrate by a so-called lift-off method in which the exposed portion of the photoresist film is removed and the metal film on the photoresist film is also removed. When manufacturing a photomask in this manner, a method is used in which the glass substrate is first washed with pure water, then washed with a detergent such as a surfactant, and then further washed with pure water and then dried.

A conventional spin dryer apparatus for drying such a glass substrate is shown in FIG.

FIG. 2 is a plan view showing the structure of a conventional spin dryer, and FIG. 1 is a sectional view taken along line A-A' in FIG. As shown in FIGS. 1 and 2, the conventional spin dryer has a cleaned glass substrate 2 embedded in a PVC disk 1 that rotates at high speed. The moisture adhering to the substrate is blown away from the substrate by centrifugal force. Here, 3 is a frame-shaped member made of the same material as the disc and slightly protrudes from the disc for embedding the board in a predetermined position, and 4 is a vinyl chloride casing in which the disc 1 is installed. The housing is provided with a discharge port 5 for collecting and discharging moisture blown off from the substrate.

However, when drying the substrate by blowing off the moisture on the substrate using a spin dryer with such a conventional structure, the atmosphere around the disk is cut at high speed, which creates turbulence around the disk. This turbulence causes the mist of moisture on the substrate that is blown onto the inner wall of the casing 4 to re-deposit on the substrate and contaminate the substrate.

The present invention eliminates the above-mentioned drawbacks and prevents turbulence from occurring around the rotating member in a spin dryer that dries the substrate by rotating the rotating member at high speed to blow away moisture attached to the substrate. It is an object of the present invention to provide a novel spin dryer in which moisture blown off the inner wall surface of the spin dryer does not re-adhere on the substrate and contaminate the substrate.

To achieve this purpose, a spin dryer has a substrate embedding section in a predetermined position, a disk that embeds the substrate in the embedding section and rotates at high speed, and a plurality of disks that collect and discharge moisture blown away by centrifugal force. In a spin dryer having a cylindrical casing provided with a discharge port and in which the disc is installed, the periphery of the disc is aligned with a tangent to the disc or forms a predetermined angle Θ with the tangent. It is characterized in that a plurality of flat plates are attached to the disk at approximately equal intervals in a substantially vertical direction, with their upper portions slightly protruding from the upper surface of the disk.

An embodiment of the present invention will be described in detail below with reference to the drawings.

FIG. 4 is a plan view of the spin dryer according to the present invention. FIG. 3 is a sectional view taken along line A-A' in the plan view. As shown in the figure, the spin dryer of the present invention has cutting grooves formed around a vinyl chloride disc 11 serving as a rotating member along the tangential direction of the disc or at an angle of less than 30° from the tangential direction.
A flat plate 12 made of vinyl chloride is fitted into the cut groove at a predetermined distance in a direction perpendicular to the disc. Here, the upper part of the flat plate is made to slightly protrude from the upper surface of the disc.

The number and size of the flat plates may be appropriately determined depending on the diameter of the disk and the rotation speed of the disk.

In this way, while the disk rotates at high speed, air flows in a laminar flow toward the inner wall surface of the casing 13 through the space between the flat plates, so that the air flows onto the substrate flying toward the inner wall surface. The mist of moisture will not collide with the inner wall surface and re-adhere onto the substrate, allowing the substrate to dry quickly in a clean state.

Furthermore, if a stainless steel mesh 14 is installed between the inner wall surface of the housing 13 and the disk 11 along the circumference of the disk, minute water droplets flying from the substrate will adhere to the mesh. , is more effective.

As described above, the use of the spin dryer of the present invention allows substrates to be dried quickly and in a clean state, making it extremely effective for use in drying glass substrates during mask manufacturing.

Furthermore, it goes without saying that the spin dryer of the present invention can be used not only for the above-mentioned glass substrates but also for drying semiconductor substrates such as Si after cleaning.

[Brief explanation of the drawing]

1 and 2 are a sectional view and a plan view of a conventional spin dryer, and FIGS. 3 and 4 are a sectional view and a plan view of a spin dryer according to the present invention. In the figure, 1 is a disk, 2 is a glass substrate, 3 is a frame, 4 is a housing, 5 is an outlet, 11 is a disk, 12 is a flat plate, 13 is a housing, and 14 is a mesh.

Claims (1)

[Claims for Utility Model Registration] (1) A disc that has a board embedding part in a predetermined position and rotates at high speed with the board buried in the part, and a plurality of discs that collect and discharge water blown away by centrifugal force. In a spin dryer having a cylindrical casing in which the disc is installed, and which is provided with a discharge port, the disc is aligned with the tangent to the disc or forms a predetermined angle Θ with the tangent. A spin dryer characterized in that a plurality of flat plates are attached to the peripheral part in a substantially vertical direction at substantially equal intervals, with the upper portions slightly protruding from the upper surface of the disks. (2) The spin dryer according to claim 1, wherein the angle Θ is 0°<Θ≦30°.