JPH01127237U - - Google Patents

Description

[Brief explanation of the drawing]

Figures 1a and b are a simplified perspective view and a simplified sectional view showing the configuration of an embodiment of the electrode of the present invention, respectively, and Figures 2a and b are a simplified perspective view and a cross-sectional view of the configuration of an example of a conventional electrode, respectively. The top view and FIGS. 3a and 3b are a perspective view and a plan view, respectively, showing the structure of another example of the conventional electrode. 1, 1a, 1b... Disk-type electrode plate, 2... Holding jig, 3a, 3b... Electrode wire, 4a, 4b... Conductive clip, 5a, 5b... Conductive wire, 6a, 6b...
...Insulated tube.

Claims (1)

[Claims for Utility Model Registration] (1) A plurality of disc-shaped electrode plates 1 are held in parallel inside the holding jig 2, and these disc-shaped electrode plates 1 are alternately connected to electrode wires 3a and 3b. Vertical plasma CVD electrodes connected by . (2) The electrode wires 3a and 3b are conductive wires that are in contact with every other disc-shaped electrode plate 1a and every other disc-shaped electrode plate 1b of the plurality of disc-shaped electrode plates 1, respectively. Clips 4a and 4b, conductive wires 5a and 5b that respectively connect one conductive clip 4a and the other conductive clip 4b, and one conductive wire 5.
an insulating tube 6a applied to the conductive wire 5a to prevent contact between the conductive wire 5a and the other electrode plate 1b and plasma discharge between the conductive wire 5b and the other electrode plate 1b; The vertical plasma CVD electrode according to claim 1, which is comprised of an insulating tube 6b that prevents contact with the plate 1a and plasma discharge between the electrode plate 1a and one of the electrode plates 1a.