JPH01122064U - - Google Patents
Info
- Publication number
- JPH01122064U JPH01122064U JP1607088U JP1607088U JPH01122064U JP H01122064 U JPH01122064 U JP H01122064U JP 1607088 U JP1607088 U JP 1607088U JP 1607088 U JP1607088 U JP 1607088U JP H01122064 U JPH01122064 U JP H01122064U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- reaction tube
- cooling jacket
- water
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案構造の一実施例を適用した縦形
炉を示す簡略断面図、第２図は従来構造の一例を
適用した縦形炉を示す簡略断面図である。
１……加熱用の管状炉、２……（外側）反応管
（アウターチユーブ）、２ａ……炉口側ツバ部、
３……（内側）反応管（インナーチユーブ）、４
……ボート、５……ウエーハ、６……炉口フラン
ジ、７……反応管押え、８……Ｏリング、９……
炉口フランジ側水冷ジヤケツト、１０……反応管
押え側水冷ジヤケツト、１１……反応室。
FIG. 1 is a simplified sectional view showing a vertical furnace to which an embodiment of the structure of the present invention is applied, and FIG. 2 is a simplified sectional view showing a vertical furnace to which an example of the conventional structure is applied. 1...Tubular furnace for heating, 2...(outer) reaction tube (outer tube), 2a...furnace mouth side collar,
3... (inner) reaction tube (inner tube), 4
... Boat, 5 ... Wafer, 6 ... Furnace mouth flange, 7 ... Reaction tube holder, 8 ... O-ring, 9 ...
Furnace mouth flange side water cooling jacket, 10... Reaction tube holding side water cooling jacket, 11... Reaction chamber.
Claims (1)
保つ反応管２を配置し、この反応管２の炉口側を
、Ｏリング８を介在させて炉口フランジ６と反応
管押え７とで固定してシールし、炉口フランジ６
内に炉口フランジ側水冷ジヤケツト９を設けると
共に、反応管押え７内に反応管押え側水冷ジヤケ
ツト１０を設けてなる縦形炉におけるＯリングシ
ール部の冷却構造。 A reaction tube 2 that keeps the inside of the reaction chamber 11 airtight is arranged in a heating tubular furnace 1, and the furnace mouth side of the reaction tube 2 is connected to a furnace mouth flange 6 and a reaction tube holder 7 with an O-ring 8 interposed therebetween. Fix and seal with the furnace opening flange 6.
A cooling structure for an O-ring seal portion in a vertical furnace, in which a water-cooling jacket 9 on the furnace mouth flange side is provided inside the furnace, and a water-cooling jacket 10 on the reaction tube holding side is provided inside the reaction tube holding 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988016070U JPH0638113Y2 (en) | 1988-02-08 | 1988-02-08 | Cooling structure of O-ring seal part in vertical furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988016070U JPH0638113Y2 (en) | 1988-02-08 | 1988-02-08 | Cooling structure of O-ring seal part in vertical furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01122064U true JPH01122064U (en) | 1989-08-18 |
| JPH0638113Y2 JPH0638113Y2 (en) | 1994-10-05 |
Family
ID=31228676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988016070U Expired - Lifetime JPH0638113Y2 (en) | 1988-02-08 | 1988-02-08 | Cooling structure of O-ring seal part in vertical furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638113Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016087657A (en) * | 2014-11-06 | 2016-05-23 | 助川電気工業株式会社 | Casting metal mold |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210145079A (en) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | Flange and apparatus for processing substrates |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6070177A (en) * | 1983-08-31 | 1985-04-20 | アニコン・インコ−ポレ−テツド | Chemical evaporation device |
| JPS61142876U (en) * | 1985-02-26 | 1986-09-03 | ||
| JPS6256232A (en) * | 1985-09-02 | 1987-03-11 | Canon Inc | Paper transfer device |
-
1988
- 1988-02-08 JP JP1988016070U patent/JPH0638113Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6070177A (en) * | 1983-08-31 | 1985-04-20 | アニコン・インコ−ポレ−テツド | Chemical evaporation device |
| JPS61142876U (en) * | 1985-02-26 | 1986-09-03 | ||
| JPS6256232A (en) * | 1985-09-02 | 1987-03-11 | Canon Inc | Paper transfer device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016087657A (en) * | 2014-11-06 | 2016-05-23 | 助川電気工業株式会社 | Casting metal mold |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0638113Y2 (en) | 1994-10-05 |