JP7635499B2 - Clean room system and air exhaust method - Google Patents

Description

The present invention relates to a clean room system and an air exhaust method.

In clean rooms, methods of ventilating indoor air are known to ensure the indoor environment, including temperature and cleanliness. For example, a displacement ventilation air-conditioning system is known that includes a fan coil unit that controls the temperature of the air, a filter unit that takes in air from the fan coil unit and passes it through a filter to make it purified air, and a wall air supply opening that is provided on the wall of the clean room and supplies the purified air from the filter unit into the clean room (for example, Patent Document 1, etc.).

JP 2017-026242 A

However, the above methods may result in spots within the clean room becoming hot. Meanwhile, in many cases, the temperature and cleanliness of the clean room are set to meet certain environmental conditions. Therefore, if spots within the clean room become hot, the clean room may no longer be able to meet the set conditions, such as temperature.

The present invention was made in consideration of the above problems, and aims to maintain conditions such as temperature in a clean room.

The clean room system according to each embodiment of the present invention includes the following configuration:

A clean room system (e.g., clean room system 10) installed in a clean room where temperature and cleanliness are controlled includes:
A blower (e.g., a first air conditioner 11 or a second air conditioner 12) that blows air into the clean room at a lower part of the clean room;
A suction section (e.g., a first air intake 13 or a second air intake 14) that sucks in the air above the blower section;
The air blowing unit includes a discharge unit (e.g., a damper 15) that discharges the air from a lower layer (e.g., lower layer E2) to an upper layer (e.g., upper layer E1) that is stratified by the blowing of air by the blowing unit and the suction of air by the suction unit, and the discharge unit (e.g., a damper 15) that discharges the air from the lower layer to the upper layer.

In other words, in a displacement ventilation air conditioning system, a high temperature area with a high concentration of pollutants is formed in the upper layer of the air-conditioned space, but the low temperature air supplied to the air-conditioned space gradually pushes it out from the lower layer, and the high temperature air with a high concentration of pollutants is exhausted upwards without being stirred up, so the living area at the bottom of the air-conditioned space is maintained in a clean environment.

However, in large spaces such as clean rooms, the low-temperature air from the air blowers installed on the walls may not reach the central location sufficiently, and there are also points where high-temperature equipment is located, making the temperature relatively high.

In contrast, according to the configuration of the present invention, by installing an exhaust section at a point where the temperature becomes high, the air can be exhausted, and the upward pressure from the clean air in the lower layer is assisted. Therefore, the temperature rise and decrease in cleanliness at the high temperature point can be suppressed.

In addition, the blower unit includes:
It is desirable to blow air into the clean room so that it contains a swirling component that rotates in the blowing direction (for example, from right to left in Figs. 2 and 3, which is the x-axis direction) (for example, when blowing air as shown in Fig. 2 or 3). When a swirling component is imparted by such a configuration, the amount of air induced (attraction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

In addition, the blower unit includes:
It is desirable to blow air into the clean room by inducing the surrounding air (for example, as in the case of blowing air as shown in FIG. 2 or FIG. 3). With such a configuration, when the air-induction action occurs, the amount of air drawn (induction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

It is also preferable to further include an obstruction section (e.g., a filter FR and a wall WL) that equalizes the flow speed of the air sent into the clean room. When an obstruction section is included, the air speed at the air outlet is uniformized, and variation can be suppressed.

It is also desirable that the first temperature trend (e.g., first temperature trend TS1) indicating the amount of temperature change relative to the amount of height increase in the upper layer is greater than the second temperature trend (e.g., second temperature trend TS2) indicating the amount of temperature change relative to the amount of height increase in the lower layer (e.g., as shown in Figure 6). With this configuration, a "heat pool" can be created in the upper layer. In this way, the presence of a "heat pool" can increase the temperature difference between the lower and upper parts. And a large temperature difference between the supply air and the exhaust air can reduce the transport power. Therefore, creating a "heat pool" can save energy.

In addition, the discharge section includes:
It is desirable to install the exhaust unit at a point where the temperature rises in the lower layer between the first wall (e.g., the first wall W1) where the blower unit is installed and the second wall (e.g., the second wall W2) facing the first wall (e.g., the damper 15 installed at a point such as that shown in Fig. 7 or at the midpoint PM shown in Fig. 21). If the exhaust unit is installed at such a point, air can be exhausted at the point where the temperature rises, and the temperature inside the clean room can be kept to satisfy the conditions.

It is also desirable that the certain distance is the distance at which the air in the lower layer reaches a set temperature (e.g., a certain distance DI, etc.). If an exhaust section is installed at such a point, the air can be exhausted at a point where the temperature is high, so that the temperature conditions of the clean room can be maintained.

In addition, a plurality of the blowing units are installed (for example, an air conditioner installed as shown in FIG. 7 ).
Among the blowing units, a first blowing unit is installed on any one of the first walls of the clean room;
Among the blowing units, at least a second blowing unit is provided on a second wall facing the first wall,
The discharge section is
It is desirable to install the exhaust unit at least at the midpoint between the first blower unit and the second blower unit (for example, the midpoint PM shown in FIG. 21). If the exhaust unit is installed at such a point, air can be exhausted at the point where the temperature becomes high, so that the temperature conditions in the clean room can be maintained.

In addition, the discharge section includes:
It is desirable that the opening (e.g., opening 40) sucks the air from the lower layer to the upper layer at a wind speed of 0.2 meters per second or less. It is desirable that the wind speed does not increase too much near the ceiling. If the wind speed increases too much, the air in the upper layer and the lower layer often mix. Therefore, it is desirable that the wind speed does not mix the air in the upper layer and the lower layer, especially near the ceiling. With such a wind speed, the mixing of the air in the upper layer and the lower layer can be reduced and a "heat pool" can be created in the upper layer. Therefore, when air is exhausted with such a configuration, a "heat pool" can be created in the upper layer, and the temperature difference between the lower layer and the upper layer can be increased. In this way, if the temperature difference between the intake air and the exhaust air can be increased, the transport power can be reduced. Therefore, energy can be saved.

In addition, the discharge section includes:
It is desirable that the opening/closing or the opening degree is adjusted in accordance with the temperature of the air (for example, the damper 15, etc.). With such a configuration, the flow rate or flow velocity of the air passing through can be adjusted in accordance with the temperature, etc.

The air exhaust method performed by the clean room system installed in the clean room where temperature and cleanliness are controlled is as follows:
A step (e.g., step S01) of blowing air into a room of the clean room in a lower part of the clean room by the clean room system;
A suction step (e.g., step S02) in which the clean room system sucks in the air at a height above the height at which the air blowing step is performed;
The clean room system includes a discharge procedure (e.g., step S03) of discharging the air from the lower layer to the upper layer, of the lower and upper layers formed by the blowing of the air by the blowing procedure and the suction of the suction procedure, at a point located a certain distance or more away from the point where the air blowing procedure is performed.

Each embodiment of the present invention allows the temperature and other conditions to be maintained in a clean room.

FIG. 1 is a cross-sectional view showing an example of the overall configuration of a clean room system. 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a counterclockwise swirling component to the air being blown when viewed from inside the room. FIG. 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a clockwise swirling component to the air being blown when viewed from inside the room. FIG. FIG. 11 is a contour diagram showing the temperature in a clean room to which the clean room system of the comparative example is applied. FIG. 2 is a contour diagram showing the temperature in a clean room to which the clean room system according to the present embodiment is applied. FIG. 1 is a diagram showing an example of layering. 11 is a cross-sectional view showing an example in which the exhaust section is installed at a position at least a certain distance away from the blower section. FIG. FIG. 13 is a diagram illustrating an example of the relationship between room temperature and distance. 1 is a flowchart showing a first example of a method for discharging air in a clean room system. 10 is a flowchart showing a second example of a method for discharging air in a clean room system. FIG. 2 is a cross-sectional view showing a clean room system of a first comparative example. FIG. 11 is a cross-sectional view showing a clean room system of a second comparative example. FIG. 13 is a diagram showing an example of an opening. FIG. 1 shows experimental results. FIG. 2 is a second diagram showing the experimental results. FIG. 13 is a diagram showing experimental results of a comparative example. FIG. 2 is a functional block diagram showing an example of a functional configuration of the clean room system according to the first embodiment. FIG. 13 is a functional block diagram showing an example of a functional configuration of a clean room system according to a second embodiment. FIG. 2 is a diagram showing a configuration of a first example of an inhibition portion. FIG. 11 is a diagram showing a configuration of a second example of the inhibition portion. 11A and 11B are cross-sectional views showing an example of installation of a discharge section and temperature distribution.

Details of each embodiment will be described below with reference to the attached drawings. Note that components having substantially the same functional configurations in the description of the specification and drawings relating to each embodiment will be denoted by the same reference numerals to avoid redundant description.

First Embodiment
<Overall configuration example>
1 is a cross-sectional view showing an example of the overall configuration of a clean room system. The following description will be given taking as an example a clean room system 10 as shown in the figure. In the following description, the devices and the like necessary for explaining the embodiment are illustrated, and therefore the clean room system 10 may be configured to further include devices other than those shown in the figure.

As shown in the figure, in this example, two manufacturing devices MC are placed in a clean room. These manufacturing devices MC manufacture products such as semiconductors. Below, an example of manufacturing devices MC with the number and placement shown in the figure will be described.

In the following, the x-axis, which is the horizontal direction of the diagram, is the width direction of the clean room. In the example shown below, the air conditioner blows air in the x-axis direction. Meanwhile, the z-axis, which is the vertical direction of the diagram, is the height direction of the clean room. In other words, the z-axis direction is the so-called direction of gravity. Furthermore, the depth direction is the y-axis.

<Example of a blower>
As shown in the figure, the clean room system 10 has an air conditioner that blows air into the clean room. For example, as shown in the figure, an air conditioner (an air conditioner installed at the left end of the clean room in the figure. Hereinafter, referred to as the "first air conditioner 11") is installed on one wall (e.g., the wall at the left end in the figure. Hereinafter, referred to as the "first wall"). Then, an air conditioner (an air conditioner installed at the right end of the clean room in the figure. Hereinafter, referred to as the "second air conditioner 12") is installed separately from the first air conditioner 11 on a wall facing the first wall (e.g., the wall at the right end in the figure. Hereinafter, referred to as the "second wall"). Hereinafter, an example in which two air conditioners, the first air conditioner 11 and the second air conditioner 12, are installed as shown in the figure, will be described.

Furthermore, the air conditioner is installed at a lower part, at a height lower than the suction part, for example as shown in the figure.

It is desirable that the first air conditioner 11 and the second air conditioner 12 have the following configuration, for example.

Figure 2 is a front view showing an example of the configuration of an air intake port with fins attached so as to give the air being blown a counterclockwise swirling component as viewed from inside the room.

Figure 3 is a front view showing an example of the configuration of an air intake port with fins attached so as to give the air being blown a swirling component in a clockwise direction as viewed from inside the room.

The air conditioner is configured with multiple fins 20 installed at the air intake port 21 on the front side. The fins 20 blow air into the clean room by imparting a rotating component (hereinafter referred to as the "swirl component"). Note that in Figures 2 and 3, the direction from right to left is the blowing direction, i.e., the direction toward the inside of the clean room.

For example, as shown in the figure, the fins 20 are attached at equal intervals and radially in the rotational direction around the center of the air intake port 21. Furthermore, each fin 20 is arranged so as to be inclined with respect to the central axis 22. Note that Figs. 2 and 3 are examples in which each fin 20 has an opposite inclination angle with respect to the central axis 22.

In this way, when the fins 20 are arranged so as to be inclined with respect to the central axis 22 and the fins 20 are arranged radially, the air can be made to flow along the fins 20 when it is blown, i.e., when it passes through the air intake port 21. This allows the air conditioner to blow air into the clean room with a swirling component.

The air conditioner may have a plurality of configurations, such as those shown in the figure. In this way, the temperature, cleanliness, etc. of the managed area EC are controlled by sending air into the area (hereinafter referred to as the "managed area EC") where the temperature, cleanliness, etc. are to be managed. The following explanation is given using an example in which the temperature is the object of management.

When air is blown in, if the air contains a swirling component, interference between the individual swirling components is likely to occur. Specifically, by making the swirling components of the air blown out of adjacent air intakes go in the same or opposite directions, the swirling components can interact to enhance each other, or to cancel each other out.

In addition, when there is a swirling component as shown in the figure, an attraction effect occurs. In other words, when a swirling component is included, a flow that draws in surrounding air, a so-called induced airflow, is likely to occur. In this way, when a swirling component is provided, the amount of induced air (attraction ratio) increases. As a result, a large amount of air can be blown out, and the air can be blown out efficiently.

<About clean rooms>
A clean room is a space having an area where environmental conditions such as temperature and cleanliness are controlled. For example, the environmental conditions are conditions defined by standards such as ISO (International Organization for Standardization) 14644-1 or the United States Federal Air Cleanliness Standard 209E.

Specifically, in the case of "Class 6" in ISO 14644-1, the temperature conditions are set to be within the range of "23°C ± 5°C." Furthermore, in the case of "Class 6" in ISO 14644-1, the cleanliness conditions are set to be such that the number of particles with a particle size of 0.1 micrometers (μm) or more in the room is 1.0 x ¹⁰⁶ particles/cubic meter (particles/ ^m3 ) or less.

In this way, the clean room has a space that is managed by air conditioners, etc. so that the controlled area EC meets specified conditions.

<Example of suction part>
As shown in Fig. 1, an intake port as an example of the suction unit is installed at an upper part at a height higher than the air conditioner in the z-axis direction. For example, in the illustrated example, an intake port (in the figure, an intake port installed at the left end of the clean room and installed above the first air conditioner 11. Hereinafter, referred to as "first intake port 13") is installed on one wall. Then, an intake port (in the figure, an intake port installed at the right end of the clean room and installed above the second air conditioner 12. Hereinafter, referred to as "second intake port 14") is installed separately from the first intake port 13 on the wall opposite the wall where the first air conditioner 11 is located. Below, an example in which two intake ports are installed as shown in the figure will be described.

As shown in the figure, the first air intake 13 is configured to have devices such as an exhaust fan 13F and a cooling coil 13C. On the other hand, the second air intake 14 is configured to have devices such as an exhaust fan 14F and a cooling coil 14C.

<Example of discharge section>
The damper 15, which is an example of a discharge portion, is installed on a ceiling 16 or the like, as shown in FIG.

The following describes an example in which the discharge part is a damper 15.

The exhaust section is installed at a point at least a certain distance away from the blower section (in the figure, this is in the x-axis direction). First, the damper 15 is placed together with the air conditioner. The damper 15 is placed at a point where the temperature of the air blown by the air conditioner rises. Specifically, at least one damper (hereinafter referred to as the "first damper") is placed for one air conditioner.

In some cases, a heat generating element such as a manufacturing device MC is placed between the first damper and the air conditioner. In such cases, a damper different from the first damper (hereinafter referred to as the "second damper") is further installed at a predetermined interval between the first damper and the air conditioner to accommodate the heat generating element.

The specified interval is, for example, an interval determined by the standard manufacturing equipment MC and the working area of the manufacturing equipment MC. By setting such an interval, it is possible to respond even if the layout of the manufacturing equipment MC is changed.

First, as in the above example, when the blower at the bottom blows air into the room and the suction unit at the top sucks in air, a layer that can be managed to meet conditions such as temperature (hereinafter referred to as "lower layer E2") and a layer formed above the lower layer E2 (hereinafter referred to as "upper layer E1") are formed.

Comparative Example
4 is a contour diagram showing the temperature in a clean room to which the comparative clean room system is applied. In the diagram, the horizontal direction is the x-axis. Meanwhile, the vertical direction is the z-axis. The comparative example shown in the figure shows the results of a simulation.

As shown in the figure, manufacturing equipment and the like are installed in the lower part of the clean room. Then, as shown in the figure, the air becomes hot due to heat generation from the manufacturing equipment, etc. Therefore, in the example shown, an area such as an upper high temperature area TP1 is created. In this way, when an upper high temperature area TP1 is created, some or all areas in the clean room may not be able to meet the temperature conditions, etc. For this reason, the air blowing section needs to blow air multiple times, which may increase power consumption.

<Simulation results>
Fig. 5 is a contour diagram showing the temperature in a clean room to which the clean room system according to the present embodiment is applied. Compared with Fig. 4, the illustrated example is different in that it has an exhaust port 131, which is an example of a suction unit. That is, the suction unit may be installed, for example, at a position as shown in the figure.

In the simulation results shown in the figure, the temperature of the area near the exhaust port 131 (hereinafter referred to as the "area TP2 near the exhaust port") is lower than that of the comparative example shown in Figure 4. As shown in Figure 4, high-temperature air is likely to accumulate due to stratification in the upper part, i.e., near where the exhaust port 131 is installed. Therefore, by sucking air in the upper part through the exhaust port 131, the temperature can be lowered as shown in the figure. Therefore, even if the number of times that the blower blows air is reduced, the temperature conditions can be met, and the temperature conditions can be maintained in the clean room.

As a first example, an example will be described in which the lower layer E2 is the management area EC. Below, an example will be described in which the management area EC, i.e., the lower layer E2, is set in advance to be an area with a height of 2 meters or less based on the floor surface GD. For example, the stratification is performed as follows.

Note that a height of 2 meters based on the floor surface GD is an example of the maximum height of the air blowing unit. In other words, the maximum height at which the air blowing unit can directly blow air is 2 meters based on the floor surface GD. Therefore, the maximum height of the air blowing unit is determined by the size of the air conditioner and the height to which it can blow air, etc. Therefore, the area below a height of 2 meters based on the floor surface GD becomes the controlled area EC, and the temperature, etc. of the controlled area EC is controlled by the air conditioner, etc.

Figure 6 shows an example of stratification. In the figure, the horizontal axis represents room temperature, while the vertical axis represents height.

When the upper layer E1 and the lower layer E2 are layered, the amount of change in temperature relative to the amount of increase in height in the upper layer (hereinafter referred to as the "first temperature trend TS1") differs from the amount of change in temperature relative to the amount of increase in height in the lower layer (hereinafter referred to as the "second temperature trend TS2").

In the illustrated example, in the upper layer E1, for example, the increase in height is from 2.5 meters to 3.5 meters, or 3.5 - 2.5 = 1.0 meters. In contrast, the temperature changes from 22.0 °C to 25.0 °C, or 25.0 - 22.0 = 3 °C. Therefore, the upper layer E1 includes an area where the first temperature trend TS1 is 3 °C ÷ 1.0 meters = 3 °C/meter.

On the other hand, in the lower layer E2, for example, the increase in height is from 0.0 meters to 2.0 meters, that is, 2.0-0.0=2.0 meters. In contrast, the temperature changes from 20.0°C to 20.8°C, that is, 20.8-20.0=0.8°C. Therefore, the lower layer E2 includes an area where the second temperature trend TS2 is 0.8°C÷2.0 meters=0.4°C/meter.

The lower layer E2 is preferably formed within the range of the control area EC. On the other hand, the upper layer E1 is preferably formed at the top. The lower layer E2 is preferably a layer that is easy to control with a blower or the like so as to satisfy the conditions. Therefore, if the lower layer E2 is formed within a range where the air blown by the blower can easily reach, it becomes easier to control the room temperature in the clean room.

The first temperature trend TS1 is preferably greater than the second temperature trend TS2. In other words, it is preferable that the first temperature trend TS1 is greater than the second temperature trend TS2, and is a temperature trend that is more likely to become high temperatures. In this way, when stratification is achieved, a high temperature area, a so-called "heat pool," can be created in the upper part of the clean room.

Specifically, in the example shown, areas with a height of 2.5 meters or more become "heat pools."

If there is a "heat pool," the temperature difference between the bottom and top can be made larger. And if the temperature difference between the intake air and exhaust air is large, the transport power required can be reduced. Therefore, creating a "heat pool" can help save energy.

In addition, creating a "heat pool" makes it easier for cool air to stagnate at the bottom. This makes it easier for the bottom to become cooler, and reduces the amount of energy needed to cool the bottom.

Furthermore, by creating a "heat pool", the area that needs to be cooled by air blowing etc. is often limited to the lower layer. In other words, by creating a "heat pool", the area that needs to be controlled by air blowing etc. can be smaller than the entire clean room. Therefore, compared to controlling the entire clean room, creating a "heat pool" can save energy.

<Example of a fixed distance>
The location where the exhaust unit is to be installed, which is away from the blower unit by a certain distance or more, is, for example, the following location.

Figure 7 is a cross-sectional view showing an example in which the exhaust section is installed at a point more than a certain distance away from the blower section. For example, the distance from the first wall W1 to the second wall W2 (hereinafter simply referred to as "width RW") is "40 meters." In this case, the damper 15 is installed at a point, for example, more than the certain distance DI away. In this case, the certain distance DI is, for example, "1.0 meter."

The fixed distance DI is not limited to 1.0 meter. In other words, the fixed distance DI varies depending on the conditions of the clean room, the strength of the air blown by the blower, the width RW, the layout of the manufacturing equipment, etc.

When the room is a certain distance DI or more away from the air blower, the room temperature becomes as follows:

Figure 8 is a diagram showing an example of the relationship between room temperature and distance. In the diagram, the horizontal axis shows the distance in the x-axis direction, while the vertical axis shows the room temperature. In other words, the point where the distance is "0.0 meters" is the point where the blower is installed, which in the case of Figure 7 is the point on both walls.

As shown in the figure, the room temperature is basically the lowest at a distance of "0.0 meters," and the room temperature increases as the distance increases. In this example, the set temperature is "22.0°C."

As shown in the figure, when the distance is 1.0 meter or more, the room temperature is almost the set temperature. Therefore, it is desirable to install a heating element such as a manufacturing device at a point 1.0 meter or more away from the air blowing unit. In other words, as shown in the figure, stratification is likely to occur due to the rise in room temperature at a point 1.0 meter or more away from the air blowing unit. Therefore, it is desirable to install a heating element at a point 1.0 meter or more away, and to install an exhaust unit at a distance of 1.0 meter or more. If the exhaust unit is installed at such a point, air can be exhausted at the point where the temperature is high, and the temperature and other conditions can be maintained in the clean room.

<First example of air exhaust method>
The clean room system performs an air exhaust method, for example, as follows.

Figure 9 is a flowchart showing a first example of an air exhaust method for a clean room system.

<Example of air blowing> (Step S01)
In step S01, the blower blows air at a lower height.

<Suction Example> (Step S02)
In step S02, the suction unit performs suction. The suction is performed at an upper height.

Furthermore, by performing a stratification process in which this type of air blowing and suction is performed, it is possible to form upper and lower layers. Specifically, when the stratification process is performed, low-temperature air is blown into the clean room at the bottom, and high-temperature air is sucked in at the top. High-temperature air is lighter than low-temperature air, so it is easier to suck in. Therefore, high-temperature air tends to accumulate at the top. On the other hand, low-temperature air tends to accumulate relatively easily at the bottom. In this way, the stratification process can form upper and lower layers.

<Example of discharging air from the lower layer to the upper layer> (Step S03)
In step S03, the exhaust unit exhausts air from the lower layer to the upper layer at a point that is a certain distance or more away from the point where air is blown.

<Second example of air exhaust method>
The air discharge method may be as follows:

Figure 10 is a flow chart showing a second example of a method for discharging air using a clean room system. Compared to the first example, it differs in that step S20 is performed. In the following, the same processes are given the same reference numerals, and the differences will be mainly explained.

<Example of discharging air from a lower layer to an upper layer at a predetermined wind speed> (Step S20)
In step S20, the exhaust unit exhausts air from the lower layer to the upper layer at a predetermined wind speed, which will be described later in the second embodiment.

As described above, by discharging air through processes such as stratification and discharging air, it is possible to maintain the temperature and other conditions in the clean room.

<First Comparative Example>
An example of a clean room as a comparative example will be described below.

Figure 11 is a cross-sectional view showing a clean room system of a first comparative example. The first comparative example clean room system 120 differs from the clean room system shown in Figure 1 in that an additional air conditioner (hereinafter referred to as "third air conditioner 121") is installed at the midpoint of the clean room, etc.

That is, the third air conditioner 121 is installed at a location where the room temperature is likely to become high. The third air conditioner 121 then blows additional air to ensure that the room temperature meets the conditions. However, space is required in the clean room to install the third air conditioner 121, etc. Also, costs are incurred for the construction work required to install the third air conditioner 121, etc.

<Second Comparative Example>
Fig. 12 is a cross-sectional view showing a clean room system of a second comparative example. The second comparative example clean room system 30 differs from the clean room system shown in Fig. 1 in that an air conditioner (hereinafter referred to as "fourth air conditioner 31") is further installed at the midpoint of the clean room. Furthermore, it differs from the first comparative example in that the fourth air conditioner 31 is an apparatus installed under the floor.

Even when an air conditioner is installed under the floor like the fourth air conditioner 31, in many cases, equipment cannot be installed above the fourth air conditioner 31 in order to avoid interfering with the air flow. Therefore, even if an air conditioner like the fourth air conditioner 31 is used, space is still required in the clean room. In addition, costs are incurred for construction work to install the fourth air conditioner 31.

Second Embodiment
The second embodiment differs from the first embodiment in that, first, the ceiling of the clean room system is installed at a height that is included in the upper level out of the lower and upper levels, and prevents air from rising. Furthermore, the second embodiment differs in that the exhaust part of the clean room system is, for example, an opening as shown below.

In the absence of a ceiling, for example, if the total height of the clean room is 4,300 mm, the ideal stratification of the upper and lower layers would be approximately 2,500 mm for the lower layer and 1,800 mm for the upper layer. In this state, the upper and lower layers are stratified, and a "heat pool" can be created in the upper layer. And because a "heat pool" can be created in the upper layer, the temperature difference between the lower and upper parts can be increased. In this way, the temperature difference between the intake air and the exhaust air can be increased, which reduces the transport power required. This allows for energy savings.

On the other hand, if there is a ceiling (especially if it is a low ceiling), it often separates the upper floors. Such a ceiling tends to prevent the air from rising, which often results in poor air flow.

Therefore, a ceiling that prevents air from rising is, for example, a ceiling part that meets the following conditions:

- A ceiling installed at a height that separates the upper layer when temperature stratification occurs between the upper and lower layers.

- A low ceiling that allows the upper floors to be no more than half or even one-third the height of the lower floor (such as the management area).

-Ceilings no higher than 1.5 times the height of the ventilation section.

<Example of opening>
Fig. 13 is a diagram showing an example of an opening. Below, an example will be described in which the ceiling has an opening 40, which is an example of an opening as shown in the figure. In this example, an opening is provided in a part of the ceiling by creating an opening through which air flows between the upper and lower parts.

The openings are provided at positions corresponding to the manufacturing equipment. This allows the clean room system to exhaust the hot air generated by the manufacturing equipment without it hitting the ceiling surface.

For example, the area of the openings relative to the area of the entire ceiling is adjusted so that the wind speed at the openings is 0.2 meters per second or less, preferably 0.1 meters per second or less. In other words, it is determined so that the wind speed of the air passing through the openings is appropriate in the situation of the number of air conditioners and the set wind speed (e.g., 0.1 meters per second or less). It is preferable that the ceiling be a system ceiling so that the location of the openings can be changed as appropriate.

The openings are also arranged in a line perpendicular to the air conditioner's air outlet direction. This means that the distance between the air conditioner and each opening is equal compared to when they are arranged parallel to the air conditioner's air outlet direction, so air of similar temperatures rises to the ceiling, resulting in less turbulence in the airflow. Furthermore, if the openings are dispersed rather than concentrated, air is less likely to concentrate in one place, which means that the air at the bottom is less likely to be hindered from rising to the top.

For example, if the ceiling is low, it often prevents the air at the bottom from rising to the top.

On the other hand, if the ceiling is low, lighting or work equipment such as power strips can be installed on the ceiling. This allows the distance between the work equipment and the production equipment to be reduced, improving workability.

In the illustrated example, the clean room system controls the wind speed v by making "10%" of the ceiling an opening 40 (in the figure, the percentage of the ceiling that is occupied by openings is shown as the "ceiling opening ratio"). That is, in this example, when the ceiling opening ratio is increased, the wind speed v slows down because the amount of air flowing per unit time is the same. In this way, the clean room system, for example, controls the ceiling opening ratio to exhaust air at a predetermined wind speed v.

Below, we will explain the case where the specified wind speed v is "0.1 meters per second" as an example. When the specified wind speed v is "0.1 meters per second", the temperature distribution inside the clean room will be as follows.

<Experimental Results>
Fig. 14 is a diagram (part 1) showing the experimental results. In the diagram, the horizontal axis shows room temperature. Meanwhile, the vertical axis shows height. The diagram shows the temperature distribution when there is a ceiling part like that in Fig. 13, there is an opening, and the wind speed v is "0.1 meters per second."

In this example, the ceiling is installed at a height of 2.0 meters to 2.5 meters.

As shown in the example, when the wind speed v is "0.1 meters per second", the temperature trend in the upper layer (hereinafter referred to as "upper layer temperature trend TS21") can be made greater than the temperature trend in the lower layer (hereinafter referred to as "lower layer temperature trend TS22"). In other words, when the wind speed v is "0.1 meters per second", the clean room system can create a "heat pool" in the upper layer.

Figure 15 shows the experimental results (part 2). In the figure, the vertical and horizontal axes are the same as in Figure 14. The difference between the cases shown in Figure 14 and Figure 15 is the presence or absence of a ceiling. Without a ceiling, the entire area of the room would be openings, so the wind speed v would be less than 0.1 meters per second.

As shown in the figure, in the "no ceiling" case, the wind speed v is "0.1 meters per second" or less, and the upper layer temperature trend (hereinafter referred to as "upper layer temperature trend TS31") can be increased.

By creating a large temperature trend like upper layer temperature trend TS31, i.e. a "heat pool" in the upper layer, energy savings can be achieved.

Note that, as shown in the example below at a height of "1.0 meters," even in the lower layers, the temperature trend may be large. For example, if the temperature of the supplied air is low relative to the heat generated in the room, the temperature trend may be large at the air outlet, as shown in the figure, even in the lower layers. However, as long as there are areas where the temperature trend is suddenly larger in the upper layers, such as the upper and lower layers with the boundary at "2.0 meters," the temperature trend may be large in other areas.

Comparative Example
Fig. 16 is a diagram showing the experimental results of the comparative example. In the figure, the vertical and horizontal axes are the same as those in Fig. 14 and the like. In the illustrated example, the wind speed v is "0.35 meters per second". With such a wind speed v, as illustrated, the temperature tendency in the upper layer cannot be made very large. Specifically, in the illustrated comparative example, at heights of "2.0 meters" or more, the room temperature is almost constant at about "26.0°C".

At this wind speed v, it is not possible to create much of a "heat pool" in the upper layer.

In FIG. 14 and other figures, an example is shown in which the wind speed v is 0.1 meters per second, but the same effect can be achieved even if the wind speed v is about 0.2 meters per second. Therefore, it is desirable for the wind speed v to be 0.2 meters per second or less.

<Functional configuration example>
17 is a functional block diagram showing an example of the functional configuration of the clean room system in the first embodiment. As shown in the figure, the clean room system 10 has a functional configuration including a blower 10F1, a suction unit 10F2, and a discharge unit 10F3.

The blower unit 10F1 is located in the lower part of the clean room and performs a blowing procedure to blow air into the interior of the clean room. For example, the blower unit 10F1 is realized by the first air conditioner 11 and the second air conditioner 12, etc.

The suction unit 10F2 is located above the blower unit 10F1 and performs a suction procedure to suck in the air blown into the clean room by the blower unit 10F1. For example, the suction unit 10F2 is realized by the first intake port 13 and the second intake port 14, etc.

The exhaust unit 10F3 performs an exhaust procedure to exhaust air from the lower layer E2 to the upper layer E1, which are layered by the blowing of air by the blowing unit 10F1 and the suction by the suction unit 10F2. For example, the exhaust unit 10F3 is realized by a damper 15, etc.

In a clean room, when air is pumped in at the bottom and sucked in at the top, the lower and upper layers can be stratified. When stratification occurs in this way, the air exhausted by suction is often high temperature air. On the other hand, low temperature air is heavier than high temperature air and tends to accumulate at the bottom. Therefore, even if manufacturing equipment or the like is installed at the bottom and generates heat, the clean room system 10 can lower the temperature at the bottom and keep the temperature of the controlled area, etc., to meet the conditions.

Therefore, with the above configuration, it is possible to maintain temperature and other conditions in the clean room.

Figure 18 is a functional block diagram showing an example of the functional configuration of a clean room system in the second embodiment. As shown in the figure, the clean room system 10 has a functional configuration including a blower section 10F1, a suction section 10F2, a ceiling section 10F10, and an opening 10F11.

The blower unit 10F1 is located in the lower part of the clean room and performs a blowing procedure to blow air into the interior of the clean room. For example, the blower unit 10F1 is realized by the first air conditioner 11 and the second air conditioner 12, etc.

The suction unit 10F2 is located above the blower unit 10F1 and performs a suction procedure to suck in the air blown into the clean room by the blower unit 10F1. For example, the suction unit 10F2 is realized by the first intake port 13 and the second intake port 14, etc.

The ceiling section 10F10 is installed at a height that is included in the upper layer of the lower and upper layers that are stratified by the air blown by the blower section 10F1 and the air sucked by the suction section 10F2, and is a ceiling that prevents air from rising.

The opening 10F11 is installed in the ceiling portion 10F10 and performs an exhaust procedure to exhaust air at a predetermined wind speed.

For example, the ceiling portion 10F10 and the opening portion 10F11 are realized as shown in FIG. 13.

In a clean room, when air is pumped in from the bottom and sucked in from the top, the lower and upper layers can be stratified. When stratification occurs in this way, the air exhausted by sucking in is often high temperature air. On the other hand, low temperature air is heavier than high temperature air and tends to accumulate at the bottom. Therefore, even if manufacturing equipment or the like is installed at the bottom and generates heat, the clean room system 10 can lower the temperature at the bottom and keep the temperature and other conditions in the controlled area, etc., satisfied by exhausting air from the bottom to the top at a specified wind speed.

Therefore, with the above configuration, it is possible to maintain temperature and other conditions in the clean room.

<Modification>
The clean room system may include the following components:

<Examples of inhibition parts>
It is desirable for the clean room system to be configured to further include an obstruction section, for example, as described below.

Figure 19 is a configuration diagram showing a first example of an obstruction section. Below, as shown in the figure, a cross-sectional view will be used to explain the first air conditioner 11 as an example. In the example shown in the figure, the filter FR is installed in the direction of air blowing from the first air conditioner 11.

As shown in the figure, when the air passes through the filter FR, the wind speed of the air becomes a uniform wind speed (hereinafter referred to as "second wind speed V2"), which is higher than the wind speed before passing through the filter FR (hereinafter referred to as "first wind speed V1"). In this way, the filter FR uniformizes the wind speed of the air sent into the clean room from the first wind speed V1 to the second wind speed V2. In this way, by having an obstruction section, the clean room system can uniformize the wind speed of the air sent into the clean room. And by uniformizing the wind speed, that is, by making the air flow even, air can flow at a uniform wind speed above and below, even if the air conditioner is a tall device.

In addition, the air can be purified by passing it through the filter FR.

The number of filters FR is not limited to one, and there may be multiple filters. Furthermore, the obstruction portion is not limited to the filter FR, and may be any object that allows a certain amount of air to pass through and obstructs the flow of air, like the filter FR.

Figure 20 is a configuration diagram showing a second example of the inhibition section. The inhibition section may be configured as shown, for example. In the example shown, the final airflow direction, i.e., the direction inside the clean room, is the x-axis direction, while the first air conditioner 11 first blows air in the y-axis direction. Then, by blowing the air against the wall WL, the clean room system equalizes the wind speed of the air sent into the clean room from the first wind speed V1 to the second wind speed V2.

The direction in which the first air conditioner 11 first blows out air does not have to be the y-axis. In other words, it only needs to be at a certain angle with respect to the x-axis.

In addition, the first air conditioner 11 does not have to hit the wall WL. In other words, the obstruction portion is not limited to the wall WL, and can be any material or structure that can allow air to flow in another direction to some extent.

The manufacturing equipment MC may be an equipment such as an inspection device. In other words, the manufacturing equipment MC is an object that serves as a heat source. If a damper 15 or the like is installed at a point above such an object, it becomes easier to exhaust the air in accordance with the heat generation, and management becomes easier.

Furthermore, the air conditioner may be a blower, etc.

The predetermined wind speed may be slower than the wind speed at which the blower blows air. Specifically, when the blower blows air at a wind speed of 1 meter per second, the predetermined wind speed is a wind speed slower than the wind speed of 1 meter per second. Alternatively, the predetermined wind speed may be slower than the wind speed at which the suction unit sucks in air.

In addition, multiple exhaust sections whose opening/closing or opening degree can be adjusted may be provided in a dispersed manner on the ceiling. Such a configuration can accommodate changes in the placement of heat generating elements (such as manufacturing equipment) in the clean room. In addition, such a configuration is preferable because it can accommodate not only placement changes but also operation or non-operation of the manufacturing equipment. In this case, for example, opening/closing and the opening degree can be adjusted manually or using a control device depending on the placement of the manufacturing equipment. In addition, opening/closing and the opening degree can be adjusted manually or using a control device depending on operation or non-operation of the manufacturing equipment.

Note that there may be any number of air conditioners, and there may be only one, or three or more. Furthermore, the air conditioners may be installed anywhere on the x-axis and y-axis. For example, when the distance from wall to wall is long, i.e., when the space is large, the volume of air blown by the air conditioners may be insufficient. In such cases, the air conditioners are placed facing each other on the x-axis, as shown in FIG. 1, etc. In this way, it is possible to make up for the volume of air that is insufficient with a single air conditioner. Furthermore, with such a configuration, the air blown by both air conditioners will collide at a midpoint, etc. By colliding the air with each other in this way, the effect of pushing the air upwards is achieved.

On the other hand, if the distance from wall to wall is short, i.e., the space is small, stratification can be achieved with a single air conditioner. In such cases, taking into account construction costs, etc., a single air conditioner may be sufficient.

The blower unit does not have to be configured as shown in FIG. 2. For example, the blower unit may have a mechanism with a different shape, arrangement, or inclination angle. It is preferable that the blower unit be configured so that the air being sent into the clean room attracts the surrounding air and blows the air.

Specifically, the configuration for inducing the surrounding air is a mechanism that first collects the air to be sent out and then pushes out the collected air. With such a mechanism, the air pressure at the location where the air was once pushed out drops, causing the surrounding air to flow in and making it easier for an induced airflow to occur. In this way, with a configuration that induces the surrounding air to blow air, air can be blown out efficiently. Note that the blowing unit may also induce and blow the surrounding air using methods and mechanisms other than those described above.

The blower may also have mechanisms other than those shown in the figure. For example, the blower may further have a filter or an air cooler. The air cooler (cooling coil) can be arranged extending in the height direction corresponding to the management area EC. The presence of an air cooler can keep the temperature of the air blown from the first air conditioner 11 and the second air conditioner 12 almost constant. The air cooler can also be arranged in the upper blower unit. With such a configuration, the thickness of the air conditioner can be made thinner, allowing for greater utilization of the work area of the clean room.

Furthermore, the air cooler etc. can use an evaporator of a refrigeration cycle. In this case, the condenser of the refrigeration cycle can be placed on the outer wall of the clean room etc. In the above example, the air cooler etc. can be placed on the roof etc. via refrigerant piping, that is, as an outdoor unit. Also, the air cooler etc. can be of a type that circulates cold water from the outside through a heat exchanger. Also, a heat exchanger can be placed outside, and cold air can be supplied to the air cooler etc. through a duct. This allows for more efficient use of the indoor space.

In addition, in a clean room, conditions other than temperature may also be subject to management. For example, cleanliness and the like may be managed in addition to temperature. When managing conditions such as cleanliness, the cleanliness and the like may be measured using a measuring device capable of measuring the items to be managed, such as a particle counter, and ventilation may be performed based on feedback from the measuring device. Similarly, when measuring temperature, for example, a measuring device such as a temperature sensor may be used.

Other environmental conditions that may be controlled in a clean room include humidity, pressure, gas components, static electricity, electromagnetic waves, and microorganisms.

In addition, not all spaces in a clean room need to meet the environmental conditions defined as "Class 6". That is, the area in a clean room that is set in advance as meeting the environmental conditions (the management area EC in the above example) may be a part of the clean room. For example, the management area EC is set as a range up to a certain height based on the floor surface GD as shown in the figure. Therefore, the management area EC is managed by an air conditioner or the like so that the temperature is, for example, "23°C ± 5°C". On the other hand, areas other than the management area EC (areas at a height higher than the management area EC and areas at a height lower than the floor surface GD in the example shown in FIG. 1) are not subject to management and the temperature does not have to be in the range of "23°C ± 5°C".

The number of air intakes may be any number, and may be one or more than two. The air intakes may be located anywhere on the x-axis and y-axis. It is also desirable that the wind speed at which the air intake draws in is equal to or lower than a predetermined wind speed. In other words, if the air intake draws in a large amount of air at once, the air in the upper and lower layers tends to mix. Therefore, it is desirable that the air intake draws in air at a wind speed that makes it difficult for the air in the upper and lower layers to mix. Specifically, it is desirable that the predetermined wind speed is equal to or lower than 1 meter per second. In addition, the number of air intakes or the direction of intake may be determined so that the wind speed is low enough not to mix the air in the upper and lower layers.

The suction section may be configured to be connected to a duct DT or the like. As shown in FIG. 1, for example, a mechanism may be used in which air is sucked in from the inlet of the duct DT in the center of the clean room, and the air flows from the inlet of the duct DT to the second air intake port 14 via piping. In other words, the suction section only needs to be able to suck in air above the blower section, and the mechanism of the duct DT or the like, the location on the plane, and the configuration of the device are not important. A configuration in which a duct DT or the like is connected is particularly effective in a configuration without a ceiling.

In addition, the air sent through the duct DT may be exhausted outside the clean room through a separate exhaust duct, etc., without being circulated within the clean room.

Furthermore, the air intakes are not limited to a combination of the first air intake 13 and the second air intake 14. For example, in a configuration using two or more air intakes, all of them may be the first air intake 13. In a configuration using the first air intake 13, the air being sent out can be cooled evenly in the height direction.

On the other hand, for example, in a configuration using two or more intake ports, all may be second intake ports 14. In a configuration using second intake ports 14, the filter portion, etc. can be made thinner.

The exhaust section preferably has an opening like the damper 15. In other words, the exhaust section preferably has a mechanism that can open/close the opening or adjust the opening degree. In this way, with a configuration that can open/close or adjust the opening degree, the exhaust section can adjust the flow rate or flow speed of the air passing through in accordance with the temperature, etc. For example, when the temperature rises due to the operation of the manufacturing equipment, the opening may be opened to make it easier for the air to be exhausted. In addition, the flow rate may be adjusted to keep the wind speed below a predetermined wind speed.

The discharge unit may be realized by other mechanisms. For example, the discharge unit may be configured to include a window or a hole. For example, the discharge unit may have a sensor that measures values such as temperature, flow rate, or flow speed, and may be configured as a system that feeds back the measurement results from the sensor and opens and closes the opening or adjusts the opening degree using an actuator or the like.

The first damper and the second damper may be different sizes. For example, the first damper may be a damper that always sucks in air and is larger than the second damper, etc.

It is desirable that the first damper and the second damper are configured so that their opening degree can be adjusted from inside the room. With such a configuration, the work of climbing up to the ceiling to adjust the opening degree can be reduced. It is also desirable that the opening degree can be adjusted remotely using a control device or the like. With such a configuration, the workload can be reduced.

Figure 21 is a cross-sectional view showing an example of the installation of the exhaust section and the temperature distribution. For example, as in Figure 1, air conditioners are installed on both walls (in the illustrated example, these are both ends of the clean room). In such a configuration, the room temperature inside the clean room tends to have a temperature distribution as shown in the figure.

Specifically, when air is sent out from the air conditioner, it is affected by heat generated by the manufacturing equipment MC. Therefore, as shown in the figure, when multiple blowing sections are installed, the room temperature is likely to rise at the midpoint of the clean room, which is the farthest point from both air conditioners and is an example of the first blowing section and the second blowing section (this example is an example where the midpoint between the first blowing section and the second blowing section coincides with the midpoint of the clean room. Hereinafter, simply referred to as the "midpoint PM")

Not only at the midpoint PM, but even when multiple air conditioners are installed and controlled to lower the room temperature, at points that are a certain distance away from the air conditioners, the temperature in the lower layers may rise to a preset temperature (hereinafter referred to as the "set temperature").

Therefore, it is desirable to install dampers 15 at points such as the midpoint PM where the room temperature is likely to rise to the set temperature. If dampers 15 are installed at such points, it is easy to manage the conditions so that they are met, even if there are points where the temperature is likely to rise due to the exhaust of air.

In this way, if the exhaust section is installed at a distance where the air in the lower layer reaches the set temperature, i.e., at a point that is more than a certain distance away, it is easy to manage the temperature to meet specified conditions.

The location where the air conditioner and damper are installed does not have to be the location shown in the figure. In other words, the air conditioner may be installed only on the second wall, not on the first wall. In such a case, the damper is installed, for example, symmetrically to the location shown in the figure (the midpoint of the clean room in the figure is the axis of symmetry).

Furthermore, the discharge section is not limited to being installed at the location as shown in the figure. For example, if there is a manufacturing device MC and the manufacturing device MC generates heat, the location of the manufacturing device MC may be prone to high temperatures. In such a case, it is desirable to install the damper at a location close to the manufacturing device MC.

As shown in Figure 5, the range in which the temperature is lowered by the suction section can be controlled by using a structure such as a beam. Specifically, as shown in the figure, if a beam is installed on the ceiling, the way the temperature drops will change at the point where the beam is located. In this way, by using a structure, it is possible to create a range in which the temperature is lowered and a range in which the temperature is not lowered very much.

The wind speed may be controlled by a method other than adjusting the opening ratio. That is, the wind speed may be controlled by an air conditioner that forcibly exhausts air. In addition, the wind speed may be controlled by the number of openings, the type of openings, or opening and closing of the openings.

[Other embodiments]
The present invention is not limited to the above configurations, such as the configurations described in the above embodiments, combinations with other elements, etc. These points can be changed without departing from the spirit of the present invention, and can be appropriately determined according to the application form.

10 Clean room system 11 First air conditioner 12 Second air conditioner 13 First air intake 13F, 14F Exhaust fan 13C, 14C Cooling coil 14 Second air intake 15 Damper 16 Ceiling 40 Opening 131 Exhaust port TS1 First temperature trend TS2 Second temperature trend TS21, TS31 Upper layer temperature trend TS22 Lower layer temperature trend E1 Upper layer E2 Lower layer MC Manufacturing equipment GD Floor surface EC Management area PM Midpoint DI Fixed distance W1 First wall W2 Second wall FR Filter WL Wall 10F1 Blower section 10F2 Suction section 10F3 Exhaust section 10F10 Ceiling section 10F11 Opening

Claims (5)

A displacement ventilation type clean room system that is installed in a clean room where temperature and cleanliness are controlled, and that ventilates by pushing relatively high-temperature air with a high concentration of contaminants up to an upper layer using air supplied to a lower layer,
a blower unit in a lower portion of the clean room that blows air into a room of the clean room;
a suction section that is located above the blower section and that draws in the air;
A ceiling part is provided at a height included in the upper layer of the lower layer and the upper layer that are formed by blowing air by the blowing part and suction by the suction part;
Including,
The ceiling portion has a structure protruding downward,
The suction unit has an exhaust port disposed around the structure,
The lower layer is a region below a maximum height at which the blower unit can directly blow air,
An auxiliary air conditioning means is disposed at a position affected by a heat generating body installed in the clean room.
Clean room system. The blower unit is provided in a plurality of locations in the clean room so as to face each other,
The auxiliary air conditioning means is provided at a position between the blower sections.
The clean room system according to claim 1 . The auxiliary air conditioning means is an air conditioner provided in the lower layer.
The clean room system according to claim 1 or 2. The auxiliary air conditioning means is an air conditioner installed under the floor.
The clean room system according to claim 1 or 2. An air exhaust method performed by a displacement ventilation type clean room system which is installed in a clean room where temperature and cleanliness are controlled, and which ventilates by pushing up relatively high-temperature air with a high concentration of contaminants to an upper layer using air supplied to a lower layer, comprising the steps of:
The clean room includes a ceiling portion installed at a height included in the upper layer,
The ceiling portion has a structure protruding downward,
a blowing step of the clean room system blowing air into a room of the clean room at a lower part of the clean room;
a suction step in which the clean room system draws in the air from an exhaust port located around the structure above a height at which the blowing step is performed;
an auxiliary air conditioning procedure in which the clean room system performs air conditioning at a position affected by a heat source installed in the clean room;
Including,
The lower layer is an area below the maximum height at which air can be directly blown in the blowing procedure.
Air exhaust method.

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