JP7607164B1 - Cleaning device, cleaning system, and cleaning method - Google Patents

Abstract

A cleaning device, a cleaning system, and a cleaning method are provided that are capable of cleaning the interior space of a storage container without providing the storage container with an additional structure for cleaning.
[Solution] The cleaning device 1 is a cleaning device for cleaning the internal space of a storage container that includes a container body having an opening and an internal space for storing a panel, and a lid that closes the opening. The cleaning device 1 includes a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, and an air supply device that supplies gas to the internal space via the air inlet.
[Selected Figure] Figure 4

Description

This disclosure relates to a cleaning device, a cleaning system, and a cleaning method.

Technology is known for cleaning the internal space of a storage container with gas. For example, in the substrate storage container described in Patent Document 1, gas is sprayed onto the retainer from a gas outlet provided on the inner wall surface of the lid that closes the container body, thereby blowing off particles that have adhered to the retainer.

JP 2021-145008 A

The technology described in Patent Document 1 requires the provision of a gas outlet on the lid, and further requires the provision of a flow path for introducing gas supplied from the outside to the air intake valve of the container body to the gas outlet on the lid. In this technical field, it is desirable to purify the internal space of a storage container without providing the storage container with an additional structure for purification.

This disclosure describes a cleaning device, a cleaning system, and a cleaning method that can clean the interior space of a storage container without providing the storage container with additional structures for cleaning.

A cleaning device according to one aspect of the present disclosure is a cleaning device that cleans the internal space of a storage container that includes a container body having an opening and an internal space that houses a panel, and a lid that closes the opening. This cleaning device includes a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, and an air supply device that supplies gas to the internal space through the air inlet.

In this cleaning device, the opening of the container body with the lid removed is blocked by a blocking body having an air inlet and an exhaust port, and gas is supplied to the internal space of the container body through the air inlet by the air supply device. This causes particles in the internal space to be discharged from the exhaust port together with the gas. In this way, by using a blocking body for cleaning instead of the lid, the internal space of the storage container is cleaned, so there is no need to provide the storage container with additional structures for cleaning. In other words, the above cleaning device makes it possible to clean the internal space of the storage container without providing the storage container with additional structures for cleaning.

The above-mentioned cleaning device may further include an exhaust device that exhausts gas from the internal space through an exhaust port. This configuration makes it easier for gas to be exhausted from the exhaust port. Therefore, it is possible to improve the cleaning efficiency of the internal space.

The cleaning device may further include a control device that controls the air supply device or the exhaust device so that the air pressure in the internal space is maintained at a positive pressure. When the air pressure in the internal space is positive, the possibility of particles entering the internal space from the outside is reduced. Therefore, it is possible to improve the cleaning efficiency of the internal space.

The above-mentioned cleaning device may further include a first moving mechanism that moves the container body and the closure relative to one another so that the closure closes the opening when the lid is removed. According to this configuration, the opening is closed with the closure by the first moving mechanism. This shortens the work time required to close the opening with the closure, and reduces the possibility of particles entering the internal space from the outside. This makes it possible to improve the cleaning efficiency of the internal space.

The above-mentioned cleaning device may further include a mounting table including a stage on which the container body is placed and which moves the container body in a first direction. The obstruction body may be provided on an edge of the mounting table in the first direction. The first moving mechanism may include a stage. According to this configuration, the stage allows the container body to be moved in the first direction toward the obstruction body. Therefore, since there is no need to move the obstruction body in the first direction, changes in the distance between the air supply device and the obstruction body in the first direction are suppressed. Therefore, the length of the air supply pipe for supplying gas provided between the air supply device and the obstruction body can be shortened.

The mounting table may further include a clamping mechanism for fixing the container body to the stage. With this configuration, the container body is fixed to the stage by the clamping mechanism, so that the container body can be firmly pressed against the closure body, and the closure body can more reliably close the opening. This reduces the possibility of particles entering the internal space from the outside, making it possible to improve the efficiency of cleaning the internal space.

The above-mentioned cleaning device may further include an opening and closing mechanism that has a suction pad that suctions the lid body and locks and unlocks the lid body. With this configuration, the lid body can be locked and unlocked while it is held by the suction pad. This shortens the time required to lock and unlock the lid body, and reduces the possibility of particles entering the internal space from the outside. This makes it possible to improve the cleaning efficiency of the internal space.

The above-mentioned cleaning device may further include a second movement mechanism that moves the closure and the opening/closing mechanism relative to the container body in a second direction that intersects with the first direction. The closure and the opening/closing mechanism may be arranged in the second direction. With this configuration, the second movement mechanism can move the opening/closing mechanism and the closure together. Therefore, by simply moving the opening/closing mechanism and the closure in the second direction, it is possible to switch between a state for locking and unlocking the lid and a state for cleaning the internal space.

The air supply device may further supply gas to the internal space via an air supply valve provided on the bottom plate of the container body. With this configuration, gas is supplied to the internal space not only through the air supply port of the closure body, but also through the air supply valve provided on the bottom plate of the container body, making it easier for gas to spread throughout the internal space. This makes it possible to improve the cleaning efficiency of the internal space.

The air supply device may have a filter for removing particles. With this configuration, the amount of particles contained in the gas supplied by the air supply device can be reduced, so that fewer particles get into the internal space. This makes it possible to improve the efficiency of cleaning the internal space.

The above-mentioned cleaning device may further include a particle counter that counts particles contained in the gas discharged from the internal space. It can be said that the amount of particles contained in the gas discharged from the internal space is correlated with the amount of particles contained in the internal space. Therefore, the cleanliness of the internal space can be estimated from the count value of the particle counter.

The above-mentioned purifying device may further include a barometer that measures the air pressure in the internal space. The obstruction may further include a measurement port to which the barometer is connected. For example, if an exhaust device is connected to the exhaust port, the pressure of the gas discharged from the exhaust port may be increased by the exhaust device, and the pressure may deviate from the air pressure in the internal space. According to the above-mentioned configuration, the barometer is connected to a measurement port different from the exhaust port, so that it is possible to reduce the measurement error of the air pressure caused by the exhaust device.

A cleaning system according to another aspect of the present disclosure includes the above-mentioned cleaning device and a storage container. Because this cleaning system includes the above-mentioned cleaning device, it is possible to clean the internal space of the storage container without providing the storage container with an additional structure for cleaning.

A cleaning method according to yet another aspect of the present disclosure is a method for cleaning the internal space of a storage container that includes a container body having an opening and an internal space for storing a panel, and a lid that closes the opening. This cleaning method includes: closing the opening when the lid is removed with a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space; and supplying gas to the internal space through the air inlet of the closing body.

In this cleaning method, the opening of the container body with the lid removed is blocked by a blocking body having an air inlet and an exhaust port, and gas is supplied to the internal space of the container body through the air inlet. This causes particles in the internal space to be discharged from the exhaust port together with the gas. In this way, by using a blocking body for cleaning instead of the lid, the internal space of the storage container is cleaned, so there is no need to provide the storage container with additional structures for cleaning. In other words, with the above cleaning device, it is possible to clean the internal space of the storage container without providing the storage container with additional structures for cleaning.

According to the present disclosure, the internal space of a storage container can be cleaned without providing the storage container with any additional structure for cleaning.

FIG. 1 is a perspective view of a cleaning system according to one embodiment. FIG. 2 is an exploded perspective view of the panel housing container shown in FIG. FIG. 3 is a bottom view of the panel housing container shown in FIG. FIG. 4 is a perspective view of the cleaning device shown in FIG. FIG. 5 is a block diagram of the cleaning device shown in FIG. FIG. 6 is a perspective view of the stage shown in FIG. FIG. 7 is a perspective view of the door shown in FIG. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. FIG. 9 is a flow chart showing a cleaning method performed by the cleaning device shown in FIG. FIG. 10 is a flow chart for explaining in detail the lid removal process of FIG. FIG. 11 is a flow chart for explaining in detail the lid mounting process of FIG. Fig. 12(a) is a schematic diagram for explaining a process for preparing a panel storage container. Fig. 12(b) and Fig. 12(c) are schematic diagrams for explaining a process for removing a lid. Fig. 12(d) and Fig. 12(e) are schematic diagrams for explaining a process for closing an opening with a closing body.

Below, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions are omitted. Each figure shows an XYZ coordinate system. The Y-axis direction (first direction) is a direction that intersects (here, perpendicular to) the X-axis direction and the Z-axis direction (second direction). The Z-axis direction is a direction that intersects (here, perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction).

A cleaning system according to one embodiment will be described with reference to FIG. 1. FIG. 1 is a perspective view of a cleaning system according to one embodiment. The cleaning system 100 shown in FIG. 1 is a system for cleaning the internal space V (see FIG. 2) of a panel storage container 101 (storage container). The cleaning system 100 includes a cleaning device 1 and a panel storage container 101.

The cleaning device 1 is a device that cleans the internal space V of the panel storage container 101. The cleaning device 1 can remove particles contained in the internal space V of the panel storage container 101 by supplying gas to the internal space V. The cleaning device 1 is installed, for example, in a clean room. Details of the cleaning device 1 will be described later.

The panel storage container 101 is a container for storing multiple panels. The panel storage container 101 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. The panel storage container 101 is, for example, called a FOUP (Front Opening Unified Pod) and is used to transport panels within a factory. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels are rectangular. Examples of panel sizes include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels that can be stored in the panel storage container 101 is determined arbitrarily and may be, for example, 6, 12, 16, or 24.

The panel storage container 101 is used, for example, in a manufacturing device that manufactures electronic component assemblies. Electronic component assemblies are manufactured through a process that includes mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, sealing these electronic components with epoxy resin or the like, peeling the sealed electronic components from the carrier panel in panel form, and cutting out the panel-form electronic components individually. The panel storage container 101 is used to transport panels between these processes.

The panel storage container 101 will be described in detail with reference to Figures 2 and 3. Figure 2 is an exploded perspective view of the panel storage container shown in Figure 1. Figure 3 is a bottom view of the panel storage container shown in Figure 1. As shown in Figure 2, the panel storage container 101 includes a container body 102, a lid body 103, and a handle 104.

The container body 102 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 102 is a front-open box-type container with an opening 102a on the front face. The container body 102 has an internal space V for storing multiple panels. Specifically, the container body 102 stores multiple panels stacked at intervals in the vertical direction. The panels are inserted and removed from the container body 102 via the opening 102a.

The container body 102 includes a top plate 121, a bottom plate 122, a pair of side walls 123, a rear wall 124, a flange 125, and a base portion 127 (see FIG. 3).

The top plate 121, the bottom plate 122, the side walls 123, and the rear wall 124 are rectangular plate materials. The top plate 121 and the bottom plate 122 face each other in the up-down direction and are arranged substantially parallel to each other. The pair of side walls 123 face each other in the left-right direction and are arranged substantially parallel to each other. The rear wall 124 faces the lid body 103 in the front-rear direction when the lid body 103 closes the opening 102a. Any two adjacent members of the top plate 121, the bottom plate 122, the side walls 123, and the rear wall 124 are connected to each other. An internal space V is defined by the top plate 121, the bottom plate 122, the pair of side walls 123, and the rear wall 124.

The flange 125 is a rectangular frame body that is provided across the front end of the top plate 121, the front end of the bottom plate 122, and the front ends of the pair of side walls 123. The flange 125 defines the opening 102a. The upper and lower frame portions of the flange 125 each have two locking holes 125h that are spaced apart in the left-right direction. The locking holes 125h in the upper frame portion and the locking holes 125h in the lower frame portion are provided in positions that face each other in the up-down direction.

The pedestal portion 127 is the base of the container body 102. The pedestal portion 127 is provided on the underside of the bottom plate 122. The pedestal portion 127 is formed by combining multiple columnar support members.

The lid body 103 is a member for closing the opening 102a of the container body 102. The lid body 103 airtightly closes the opening 102a of the container body 102 via a sealing member such as a gasket. The lid body 103 is removably attached to a flange 125 that defines the opening 102a. The lid body 103 includes a lid body 131, a cover member 132, and a locking mechanism 133.

The lid body 131 is the main body of the lid body 103. The lid body 131 is a rectangular plate material. The cover member 132 is a member that covers the front surface of the lid body 131. The cover member 132 is a rectangular plate material. The cover member 132 is provided with a keyhole 132h. A key (not shown) is inserted into the keyhole 132h.

The locking mechanism 133 locks or unlocks the lid 103 by operating the key inserted in the keyhole 132h. The locking mechanism 133 includes a latch (not shown). With the lid 103 attached to the flange 125, the latch is inserted into the locking hole 125h provided in the flange 125 by operating the key, thereby locking the lid 103. With the lid 103 locked, the latch is pulled out of the locking hole 125h by operating the key, thereby unlocking the lid 103.

The pair of handles 104 are members used when the transport device transports the panel storage container 101. The pair of handles 104 are provided at both the left and right ends of the top plate 121. The transport device can transport the panel storage container 101 by grasping the pair of handles 104 and lifting up the panel storage container 101.

The container body 102, the lid 103, and the pair of handles 104 are constructed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these may be used as the resins contained in the molding material of the resin material.

Conductive materials and various antistatic agents may be added to these resins. The conductive materials may be, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. As the antistatic agent, anionic, cationic, and nonionic antistatic agents may be used. Benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine ultraviolet absorbers may be added. Glass fibers or carbon fibers that improve rigidity may also be selectively added.

The panel storage container 101 further includes a shaft 161 and a shaft 162. The shafts 161 and 162 are members extending in the front-rear direction. The shaft 161 is used to support the center of the panel in the left-right direction. The shaft 162 is used to support the left and right ends of the panel. The rear end of the shaft 161 is fixed to a support provided on the inner surface of the rear wall 124. The rear end of the shaft 162 is fixed to another support provided on the inner surface of the rear wall 124. The shaft 162 is supported by a support member provided on the inner surface of the side wall 123. The one shaft 161 and the two shafts 162 provided at the same height form a storage stage for storing one panel. The shaft 161 is disposed between the two shafts 162 in the left-right direction.

As shown in FIG. 3, the panel storage container 101 further includes a base substrate 151, a mounting plate 152, a mounting plate 153, a positioning member 154, an air intake valve 155, and an exhaust valve 156.

The base substrate 151 is a substrate for mounting the positioning member 154, the intake valve 155, and the exhaust valve 156. The base substrate 151 is a rectangular plate material. The base substrate 151 is provided below the pedestal portion 127. The base substrate 151 is provided with through holes 151h for mounting the intake valve 155 or the exhaust valve 156. The base substrate 151 is provided with four through holes 151h. The four through holes 151h are provided near the four corners of the base substrate 151.

The mounting plates 152 and 153 are members for attaching the positioning member 154 to the base substrate 151. The mounting plates 152 and 153 are plate-shaped members. The mounting plate 152 has two through holes 152g for exposing the positioning member 154. The mounting plate 152 further has a through hole 152h between the two through holes 152g, which is used to fix the panel storage container 101. The mounting plate 152 has two through holes 152h. The two through holes 152h are aligned in the left-right direction. Each through hole 152h is, for example, a rectangular long hole extending in the left-right direction.

The mounting plate 153 is provided on the underside of the rear portion of the base substrate 151. The mounting plate 153 is provided with a through hole 153g for exposing the positioning member 154. The positioning member 154 is a member used by an external device such as a transport device or a processing device to position the panel storage container 101 (container body 102). The positioning member 154 is a V-shaped plate material. The positioning member 154 is fitted into the mounting hole of the base substrate 151 so as to be recessed (upward) toward the bottom plate 122. A V-shaped groove is defined by the V-shaped surface of the positioning member 154. The V-shaped surface is subjected to a wear-resistant surface treatment. The panel storage container 101 includes three positioning members 154.

The intake valve 155 and the exhaust valve 156 are used to maintain the cleanliness and low humidity of the inside (internal space V) of the panel housing container 101. The intake valve 155 is a mechanism for supplying gas to the internal space V. The exhaust valve 156 is a mechanism for exhausting gas from the internal space V. In this embodiment, the panel housing container 101 includes two intake valves 155 and two exhaust valves 156. The intake valve 155 and the exhaust valve 156 are provided on the bottom plate 122 and disposed between the bottom plate 122 and the base substrate 151.

The two intake valves 155 are provided so as to be exposed from two through holes 151h located at the rear. Each intake valve 155 supplies gas to the internal space V through a through hole provided in the bottom plate 122 and a through hole 151h provided in the base substrate 151. The two exhaust valves 156 are provided so as to be exposed from two through holes 151h located at the front. Each exhaust valve 156 exhausts gas from the internal space V through a through hole provided in the bottom plate 122 and a through hole 151h provided in the base substrate 151.

Next, the cleaning device 1 will be described with reference to Figures 4 to 8. Figure 4 is a perspective view of the cleaning device shown in Figure 1. Figure 5 is a block diagram of the cleaning device shown in Figure 1. Figure 6 is a perspective view of the stage shown in Figure 4. Figure 7 is a perspective view of the door shown in Figure 4. Figure 8 is a cross-sectional view taken along line VIII-VIII in Figure 1. As shown in Figures 4 and 5, the cleaning device 1 includes a mounting table 2, a door 3, a lifting mechanism 4 (second moving mechanism), an air supply device 5, an exhaust device 6, a barometer 7, a particle counter 8, a guide monitor 9, a control device 10, a housing 11, an air supply pipe 12 (see Figure 8), an exhaust pipe 13 (see Figure 8), a piping 14 (see Figure 8), an air supply pipe 15 (see Figure 8), an exhaust pipe 16 (see Figure 8), an air supply device 17, and an air supply pipe 18 (see Figure 8).

The housing 11 is installed on the floor of the clean room and has a rectangular parallelepiped shape that extends in the vertical direction. The housing 11 houses the air supply device 5, the exhaust device 6, the barometer 7, the particle counter 8, and the air supply device 17. The housing 11 has a surface 11a that extends in the vertical and horizontal directions.

The mounting table 2 is a table on which the panel storage container 101 is placed. The mounting table 2 is provided alongside the housing 11 and faces the surface 11a. As in the description of the panel storage container 101, in the description of the cleaning device 1, the direction from the housing 11 towards the mounting table 2 will be referred to as the "rear" and the direction from the mounting table 2 towards the housing 11 will be referred to as the "front". The mounting table 2 includes a base portion 21, a top surface member 22, a moving mechanism 23 (first moving mechanism), and a clamping mechanism 24.

The pedestal portion 21 is a portion that supports the stage 26 (described later) so that it can move in the front-rear direction. The pedestal portion 21 is installed on the floor surface in the clean room, and has a rectangular parallelepiped shape that extends in the vertical direction. The pedestal portion 21 houses, for example, the control device 10. The top surface member 22 is provided on the pedestal portion 21. The top surface member 22 has a rectangular outer shape that is slightly larger than the pedestal portion 21 in a plan view. The top surface member 22 has a shape in which the central portion 22a in the left-right direction protrudes upward beyond both sides.

The moving mechanism 23 is a mechanism for moving the panel storage container 101 (container body 102) in the front-rear direction. The moving mechanism 23 includes a pair of rails 25 and a stage 26. The pair of rails 25 are provided on the central portion 22a. Each rail 25 is a rod-shaped member that extends linearly in the front-rear direction. The pair of rails 25 are spaced apart from each other in the left-right direction and are arranged substantially parallel to each other. The pair of rails 25 define the moving path of the stage 26.

The stage 26 is a plate-like member on which the panel storage container 101 (container body 102) is placed. Specifically, the panel storage container 101 is placed on the stage 26 so that the lid 103 faces the surface 11a in the front-rear direction. The stage 26 is provided on the central portion 22a and is sandwiched between a pair of rails 25. The stage 26 moves in the front-rear direction along the pair of rails 25. The stage 26 moves the panel storage container 101 (container body 102) placed on the stage 26 in the front-rear direction. The range of motion of the stage 26 in the front-rear direction is, for example, 70 mm. The movement mechanism 23 further includes a driving device (not shown) that drives the stage 26. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device.

Here, the stage 26 will be described in detail with reference to FIG. 6. As shown in FIG. 6, the stage 26 includes a main body 61, a positioning pin 62, an air supply port 63, and an exhaust port 64.

The main body 61 is a plate-shaped portion that forms the main body of the stage 26. The main body 61 has a mounting surface 61a that faces the bottom plate 122 of the container body 102 in the vertical direction when the panel storage container 101 (container body 102) is placed on the stage 26.

The positioning pins 62 are provided on the mounting surface 61a and protrude upward from the mounting surface 61a. The stage 26 includes the same number of positioning pins 62 as the number of positioning members 154 (three in this embodiment). The three positioning pins 62 are disposed at positions corresponding to the three positioning members 154 of the panel storage container 101.

The air supply port 63 is a portion that introduces gas into the internal space V via the air supply valve 155. The air supply port 63 is connected to, for example, the air supply device 5, and introduces gas supplied from the air supply device 5 into the internal space V. The stage 26 includes the same number of air supply ports 63 as the air supply valves 155 (two in this embodiment). The two air supply ports 63 are disposed at positions that respectively correspond to the two air supply valves 155. In other words, with the container body 102 fixed to the stage 26, each air supply port 63 is connected to the corresponding air supply valve 155.

The exhaust port 64 is a portion for discharging gas from the internal space V through the exhaust valve 156. The exhaust port 64 is connected to, for example, the exhaust device 6. When the exhaust device 6 operates, gas is discharged from the internal space V through the exhaust valve 156 and the exhaust port 64. The stage 26 includes the same number of exhaust ports 64 as the exhaust valves 156 (two in this embodiment). The two exhaust ports 64 are disposed at positions corresponding to the two exhaust valves 156, respectively. In other words, when the container body 102 is fixed to the stage 26, each exhaust port 64 is connected to the corresponding exhaust valve 156.

4 and 5, the description of the cleaning device 1 will be continued. The clamp mechanism 24 is a mechanism for fixing the container body 102 to the stage 26. The clamp mechanism 24 has a pair of clamp members 24a. Each clamp member 24a has a T-shape. More specifically, each clamp member 24a has a shaft portion extending upward from the mounting surface 61a and a tip portion connected to the tip of the shaft portion and extending in a direction intersecting the shaft portion. The tip portion of each clamp member 24a extends in the left-right direction when the panel storage container 101 (container body 102) is not fixed, and extends in the front-rear direction when the panel storage container 101 (container body 102) is fixed. The two clamp members 24a are arranged in the left-right direction between the two positioning pins 62 provided in the front. Each clamp member 24a may have an L-shape.

The clamp mechanism 24 further includes a driving device (not shown) that drives the clamp member 24a. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device. The driving device rotates the clamp member 24a around the shaft of the clamp member 24a. The clamp mechanism 24 rotates the clamp member 24a inserted into the through hole 152h of the panel storage container 101 around the shaft of the clamp member 24a, thereby hooking the tip of the clamp member 24a onto the upper surface of the mounting plate 152, thereby fixing the container body 102 to the stage 26.

The door 3 is a member that opens and closes the lid 103, and closes the opening 102a when the lid 103 is removed. The door 3 is provided at the edge (the front end in this embodiment) of the mounting table 2 in the front-rear direction. Here, the door 3 will be described in detail with reference to FIG. 7. As shown in FIG. 7, the door 3 includes an opening/closing mechanism 31 and a closing body 32. The opening/closing mechanism 31 and the closing body 32 are arranged in the vertical direction and are integrated. The door 3 has a surface 3a that faces the stage 26 in the front-rear direction.

The opening/closing mechanism 31 is a mechanism for operating the locking and unlocking of the lid 103. The opening/closing mechanism 31 includes a main body 33, a frame 34, a suction pad 35, and a latch operation mechanism 36. The main body 33 is a rectangular plate material. The main body 33 has a surface 33a that faces the stage 26 in the front-rear direction. The surface 33a is located forward of the surface 3a. The frame 34 is an annular member provided along the periphery of the surface 33a, and surrounds the surface 33a. The frame 34 has a shape that allows the flange 125 to be inserted, and is slightly larger than the outer shape of the flange 125.

The suction pads 35 are members that suction the lid body 103. In this embodiment, the opening/closing mechanism 31 has four suction pads 35. The four suction pads 35 are provided at the four corners of the surface 33a. The four suction pads 35 are disposed at positions that respectively correspond to the four pads 132a provided at the four corners of the cover member 132. The suction pads 35 hold the lid body 103 that has been removed from the container body 102.

The latch operating mechanism 36 operates the locking and unlocking of the lid body 103. The latch operating mechanism 36 includes the same number of keys 36a as the keyholes 132h (two in this embodiment). Each key 36a protrudes rearward from the surface 33a. The tip of each key 36a has a T-shape. The two keys 36a are arranged at positions corresponding to the two keyholes 132h. The latch operating mechanism 36 operates the latch of the lid body 103 by inserting the key 36a into the keyhole 132h and rotating the key 36a. The latch operating mechanism 36 further includes a driving device (not shown) that drives the key 36a. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device.

The blocking body 32 is a member that blocks the opening 102a when the lid 103 is removed. The blocking body 32 is located above the opening/closing mechanism 31. The blocking body 32 includes a main body 37 and a sealing member 38. The main body 37 is a rectangular plate material. The outer shape of the main body 37 is larger than the outer shape of the lid 103. The main body 37 has a surface 37a that faces the stage 26 in the front-rear direction. The surface 37a is located slightly forward of the surface 3a.

The sealing member 38 is a member that seals between the main body 37 and the container body 102. The sealing member 38 is provided on the surface 37a. The sealing member 38 has a rectangular annular shape that is substantially the same as the front end of the flange 125. The sealing member 38 is pressed against the entire circumference of the front end of the flange 125, thereby airtightly closing the opening 102a of the container body 102. The sealing member 38 is made of, for example, an elastic member. Examples of elastic members that make up the sealing member 38 include fluororubber, EPDM (ethylene propylene rubber), silicone rubber, urethane, and elastomer. The position of the rear end of the sealing member 38 in the front-rear direction is substantially the same as the position of the surface 33a in the front-rear direction.

The main body 37 is provided with an air inlet 37b, an exhaust port 37c, and a measurement port 37d. The air inlet 37b is a through hole that penetrates the main body 37 in the front-rear direction. Gas is introduced into the internal space V through the air inlet 37b. The exhaust port 37c is a through hole that penetrates the main body 37 in the front-rear direction. Gas is exhausted from the internal space V through the exhaust port 37c. The measurement port 37d is a through hole that penetrates the main body 37 in the front-rear direction. The barometer 7 is connected to the measurement port 37d.

Air inlet 37b, exhaust outlet 37c, and measurement outlet 37d are provided in the portion of surface 37a surrounded by sealing member 38. Specifically, air inlet 37b, measurement outlet 37d, and exhaust outlet 37c are arranged in that order on a diagonal line of the portion of surface 37a surrounded by sealing member 38. Measurement outlet 37d is provided at substantially the same position as the center of the portion of surface 37a surrounded by sealing member 38. Air inlet 37b and exhaust outlet 37c are provided at positions that are substantially point-symmetrical with respect to the center of the portion of surface 37a surrounded by sealing member 38.

Returning to Figures 4 and 5, the description of the cleaning device 1 will continue. The lifting mechanism 4 is a mechanism that moves the door 3 (the opening/closing mechanism 31 and the blocking body 32) in the up-down direction. The lifting mechanism 4 includes a guide member 41. The guide member 41 is a plate-shaped member that extends in the up-down direction and the left-right direction. The guide member 41 is provided at the front end of the mounting table 2 and extends upward from the top surface member 22. The length of the guide member 41 in the left-right direction is substantially the same as the length of the top surface member 22 in the left-right direction. The guide member 41 defines the movement path of the door 3. The guide member 41 is provided with a window 41a. The window 41a penetrates the guide member 41 in the front-rear direction and exposes the opening/closing mechanism 31 or the blocking body 32.

The lifting mechanism 4 further includes a driving device (not shown) that lifts and lowers the door 3 along the guide member 41. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device. The range of movement of the door 3 in the vertical direction is, for example, 400 mm. The lifting mechanism 4 lifts and lowers the door 3 to switch the vertical position of the door 3 between a first position where the opening and closing mechanism 31 is exposed from the window 41a and a second position where the blocking body 32 is exposed from the window 41a. For example, after the lid body 103 is unlocked by the opening and closing mechanism 31, the lifting mechanism 4 switches the vertical position of the door 3 from the first position to the second position. For example, after the internal space V is cleaned, the lifting mechanism 4 switches the vertical position of the door 3 from the second position to the first position.

The air supply device 5 is a device that supplies gas to the internal space V. The gas is, for example, CDA (Clean Dry Air). CDA is dry air that conforms to JIS B8392 and is a gas obtained by filtering 99% or more of the particles having a particle size of 0.01 μm or more contained in the dry air. For example, class 1 dry air as specified in JIS B8392 is used as the dry air. The gas supplied by the air supply device 5 may be an inert gas such as nitrogen gas or argon gas. Here, CDA is used from the viewpoint of improving safety and reducing costs.

8, the air supply device 5 is connected to the air supply inlet 37b by the air supply pipe 12 and to the air supply port 63 by the air supply pipe 15. For example, the air supply pipe 12 connected to the air supply inlet 37b and the air supply pipe 15 connected to the air supply port 63 are connected to a main air supply pipe (not shown) that is connected to the air supply device 5. The air supply device 5 supplies gas to the internal space V via the air supply pipe 12 and the air supply inlet 37b. The air supply device 5 may also supply gas to the internal space V via the air supply pipe 15, the air supply port 63, and the air supply valve 155.

The air supply device 5 may supply gas through an air supply pipe 18. In this embodiment, the cleaning device 1 includes two air supply pipes 18. The two air supply pipes 18 are inserted into two through holes (not shown) that penetrate the front surface of the mounting table 2 in the front-rear direction. These two through holes are provided in positions that face the surface 33a of the opening/closing mechanism 31 when the door 3 is in the second position. The two through holes face, for example, two diagonal corners of the surface 33a. The air supply pipes 18 are connected to a main air supply pipe (not shown) that is connected to the air supply device 5.

The air supply device 5 includes a fan 51 and a filter 52. The rotation speed of the fan 51 is adjusted by the control device 10, thereby adjusting the air supply flow rate of the air supply device 5. The filter 52 is a filter for removing particles. When the above-mentioned dry air passes through the filter 52, 99% or more of particles having a particle size of 0.01 μm or more are removed from the dry air, thereby obtaining CDA.

The exhaust device 6 is a device that exhausts gas from the internal space V. As shown in FIG. 8, the exhaust device 6 is connected to the exhaust port 37c by the exhaust pipe 13 and to the exhaust port 64 by the exhaust pipe 16. For example, the exhaust pipe 13 connected to the exhaust port 37c and the exhaust pipe 16 connected to the exhaust port 64 are connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6. The exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c and the exhaust pipe 13. The exhaust device 6 may exhaust gas from the internal space V through the exhaust valve 156, the exhaust port 64, and the exhaust pipe 16. The exhaust device 6 includes, for example, an exhaust fan. The exhaust flow rate of the exhaust device 6 is adjusted by the control device 10.

The air supply device 17 is a device for maintaining a clean environment inside the housing 11. The air supply device 17 is provided at the top inside the housing 11. The air supply device 17 is, for example, a Fan Filter Unit (FFU) including a fan and a filter. The rotation speed of the fan is adjusted by the control device 10, and the air supply flow rate of the air supply device 17 is adjusted accordingly. The filter removes foreign matter such as particles. When the air supply device 17 supplies air to the internal space of the housing 11, the air pressure in the internal space of the housing 11 increases, and the internal space of the housing 11 is maintained in a positive pressure state.

The barometer 7 is an instrument that measures the air pressure in the internal space V. The barometer 7 is airtightly connected to the measurement port 37d by the piping 14. The barometer 7 outputs the measured air pressure value to the control device 10 at a predetermined time interval. The particle counter 8 is an instrument that counts the particles contained in the gas (exhaust gas) exhausted from the internal space V. The particle counter 8 is connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6. The particle counter 8 outputs the particle count value to the control device 10 at a predetermined time interval.

The guide monitor 9 is a device (control panel) that functions as an input/output device. The guide monitor 9 is provided on the side of the housing 11. The guide monitor 9 displays various information using a GUI (Graphical User Interface) and accepts operations by the user (operator). The guide monitor 9 displays information received from the control device 10. When the guide monitor 9 accepts a user operation, it outputs information indicating the content of the operation to the control device 10.

The control device 10 is a device (controller) that controls the cleaning device 1. The control device 10 is configured as a computer that includes, for example, a processor such as a CPU (Central Processing Unit), memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), and a communication interface such as a network card. The control device 10 controls, for example, the moving mechanism 23, the clamping mechanism 24, the opening and closing mechanism 31, the lifting mechanism 4, the air supply device 5, the exhaust device 6, the barometer 7, the particle counter 8, the guide monitor 9, and the air supply device 17.

Next, the cleaning method performed by the cleaning device 1 will be described with reference to Figs. 9 to 12(e). Fig. 9 is a flowchart showing the cleaning method performed by the cleaning device shown in Fig. 4. Fig. 10 is a flowchart explaining in detail the lid removal process of Fig. 9. Fig. 11 is a flowchart explaining in detail the lid attachment process of Fig. 9. Fig. 12(a) is a schematic diagram for explaining the process of preparing a panel storage container. Figs. 12(b) and 12(c) are schematic diagrams for explaining the lid removal process. Figs. 12(d) and 12(e) are schematic diagrams for explaining the process of blocking the opening with a blocking body.

The series of processes shown in FIG. 9 is started, for example, by the user performing a cleaning start operation on the guide monitor 9. The user may set an end condition on the guide monitor 9. The user may set, for example, a target count value of the particle counter 8 as the end condition. The user may set the intake air flow rate of the intake device 5 and the exhaust air flow rate of the exhaust device 6 on the guide monitor 9. At the start of the cleaning method, the door 3 is set to the first position in the vertical direction. The control device 10 controls the air supply device 17 to continue to maintain a positive pressure state in the housing 11.

First, the control device 10 prepares the panel storage container 101 to be cleaned (step S1). In step S1, the control device 10 controls a transport device (not shown) to place the panel storage container 101 on the stage 26. At this time, as shown in FIG. 12(a), the panel storage container 101 is placed on the stage 26 so that the lid 103 faces the window 41a in the front-rear direction and each positioning pin 62 of the stage 26 is accommodated in the V-shaped groove of the corresponding positioning member 154. As a result, each air supply port 63 of the stage 26 is connected to the corresponding air supply valve 155, each exhaust port 64 of the stage 26 is connected to the corresponding exhaust valve 156, and each clamp member 24a is inserted into the corresponding through hole 152h.

In this state, the control device 10 controls the clamp mechanism 24 to fix the panel storage container 101 to the stage 26. Specifically, the clamp mechanism 24 fixes the panel storage container 101 to the stage 26 by hooking the tip of the clamp member 24a onto the upper surface of the mounting plate 152.

Then, the control device 10 performs a process of removing the lid body 103 (step S2). In step S2, as shown in FIG. 12(b), the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the flange 125 is inserted into the frame body 34 of the opening/closing mechanism 31 through the window 41a and the pad 132a of the cover member 132 abuts against the suction pad 35 of the opening/closing mechanism 31 (step S21). The control device 10 then controls the opening/closing mechanism 31 to adsorb the lid body 103 to the suction pad 35 of the opening/closing mechanism 31 (step S22). Specifically, the suction pad 35 adsorbs the pad 132a of the cover member 132.

In this state, the control device 10 controls the opening/closing mechanism 31 to insert the key 36a of the latch operating mechanism 36 into the keyhole 132h and rotate the key 36a to unlock the lid 103 (step S23). Then, as shown in FIG. 12(c), the control device 10 controls the moving mechanism 23 to move the stage 26 backward until the flange 125 is pulled out of the frame 34 (step S24). At this time, the suction pad 35 is adsorbing the lid 103, so the lid 103 is removed from the container body 102.

Then, the control device 10 closes the opening 102a of the container body 102 with the blocking body 32 (step S3). In step S3, as shown in FIG. 12(d), the control device 10 first controls the lifting mechanism 4 to lower the door 3 and switch the vertical position of the door 3 from the first position to the second position. Then, as shown in FIG. 12(e), the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the front end of the flange 125 abuts against the sealing member 38 of the blocking body 32. As a result, the sealing member 38 is pressed against the entire circumference of the front end of the flange 125, and the opening 102a of the container body 102 is airtightly blocked by the blocking body 32.

Next, the control device 10 cleans the internal space V of the container body 102 (step S4). In step S4, the control device 10 controls the air supply device 5 so as to obtain a preset air supply flow rate, and controls the exhaust device 6 so as to obtain a preset exhaust flow rate. Then, the control device 10 starts measurement on the barometer 7 and the particle counter 8. As a result, gas (CDA) is supplied from the air supply device 5 to the internal space V through the air supply pipe 12 and the air supply port 37b, and gas (CDA) is supplied from the air supply device 5 to the internal space V through the air supply pipe 15, the air supply port 63, and the air supply valve 155. Particles attached to the members in the internal space V are brushed off by the gas supplied from the air supply device 5. Then, the brushed off particles are exhausted from the internal space V together with the gas through the exhaust port 37c and the exhaust pipe 13, or through the exhaust valve 156, the exhaust port 64, and the exhaust pipe 16. At this time, the air supply device 5 blows gas onto the back surface of the lid 103 (the surface facing the internal space V when the lid 103 is attached to the container body 102) via the air supply pipe 18. This blows off particles adhering to the back surface of the lid 103.

In this example, the supply air flow rate is set to a value greater than the exhaust air flow rate, so the air pressure in the internal space V is a positive pressure greater than the air pressure outside the container body 102. This reduces the possibility of particles entering the internal space V from outside the container body 102.

Then, the control device 10 determines whether or not the termination condition is satisfied (step S5). Here, an example of the termination condition is that the count value of the particle counter 8 falls below a preset target value. If the count value output from the particle counter 8 is greater than the target value, the control device 10 determines that the termination condition is not satisfied (step S5: NO), and repeats steps S4 and S5 until the termination condition is satisfied.

On the other hand, if the count value output from the particle counter 8 is smaller than the target value, the control device 10 determines that the termination condition is satisfied (step S5: YES) and terminates the purification (step S6). In step S6, the control device 10 stops the operation of the air supply device 5, the exhaust device 6, the barometer 7, and the particle counter 8.

Then, the control device 10 performs the installation process of the lid body 103 (step S7). In step S7, as shown in FIG. 11, the control device 10 controls the movement mechanism 23 to move the stage 26 backward so that the front end of the flange 125 is positioned rearward of the window 41a (step S71). Then, the control device 10 controls the lifting mechanism 4 to lift the door 3 and switch the vertical position of the door 3 from the second position to the first position (step S72).

Here, the internal space of the housing 11 is maintained at a positive pressure, so even if the internal space of the housing 11 temporarily connects to the external space while the door 3 is being raised, the possibility of particles entering the internal space from the external space of the housing 11 is reduced.

Then, the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the flange 125 is inserted into the frame 34 of the opening/closing mechanism 31 through the window 41a and the lid body 103 held by the suction pad 35 of the opening/closing mechanism 31 is attached to the flange 125 (step S73). In this state, the control device 10 controls the opening/closing mechanism 31 to insert the key 36a of the latch operation mechanism 36 into the keyhole 132h and lock the lid body 103 by rotating the key 36a (step S74). The control device 10 then controls the opening/closing mechanism 31 to release the suction by the suction pad 35 of the opening/closing mechanism 31 and release the lid body 103 (step S75).

Then, the control device 10 controls the moving mechanism 23 to move the stage 26 backward until the flange 125 is pulled out from the frame 34 (step S76). In this way, the lid 103 is attached to the container body 102.

Then, the control device 10 removes the cleaned panel storage container 101 (step S8). In step S8, the control device 10 controls the clamp mechanism 24 to release the fixation of the panel storage container 101, and controls a conveying device (not shown) to remove the panel storage container 101 from the stage 26.

This completes the cleaning process.

As described above, in the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1, the opening 102a of the container body 102 with the lid 103 removed is blocked by the blocking body 32 having the air inlet 37b and the exhaust port 37c, and the gas is supplied to the internal space V of the container body 102 through the air inlet 37b by the air supply device 5. As a result, particles in the internal space V are discharged from the exhaust port 37c together with the gas. In this way, by using the blocking body 32 for cleaning instead of the lid 103, the internal space V of the panel storage container 101 is cleaned, so there is no need to provide an additional structure for cleaning in the panel storage container 101. In other words, according to the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1, it is possible to clean the internal space V of the panel storage container 101 without providing an additional structure for cleaning in the panel storage container 101.

It is possible to purify the internal space V using the intake valve 155 and the exhaust valve 156 provided on the bottom plate 122. However, since the positions of the intake valve 155 and the exhaust valve 156 are determined by the SEMI standard, the intake valve 155 and the exhaust valve 156 cannot be freely provided. Since the intake valve 155 and the exhaust valve 156 are provided on the bottom plate 122, even if gas is supplied to the internal space V from the intake valve 155, the gas may not be distributed throughout the internal space V. In contrast, in the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1, the blocking body 32 is used instead of the lid body 103, so that the number and arrangement of the intake port 37b and the exhaust port 37c can be freely designed. Therefore, it is possible to improve the cleaning efficiency of the internal space V.

The exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c, so gas is more easily exhausted from the exhaust port 37c compared to a configuration in which the exhaust device 6 is not connected to the exhaust port 37c. This makes it possible to improve the cleaning efficiency of the internal space V.

Since the supply air flow rate is set to a value greater than the exhaust air flow rate, the air pressure in the internal space V becomes positive. This reduces the possibility of particles entering the internal space V from outside the container body 102. This makes it possible to improve the cleaning efficiency of the internal space V.

The moving mechanism 23 includes a stage 26 that moves the container body 102 placed on the stage 26 in the front-rear direction. When the position of the door 3 in the vertical direction is set to the second position, the blocking body 32 is located at the front end of the mounting table 2. According to this configuration, the container body 102 can be moved forward toward the blocking body 32 by the stage 26. Therefore, compared with the case where the user performs the work of blocking the opening 102a with the blocking body 32, the work time can be shortened, and the possibility of particles entering the internal space V from the outside of the container body 102 is reduced. Therefore, it is possible to improve the cleaning efficiency of the internal space V. Furthermore, according to the above configuration, since it is not necessary to move the blocking body 32 in the front-rear direction, the change in the distance between the air supply device 5 and the blocking body 32 in the front-rear direction is suppressed. Therefore, the length of the air supply pipe (air supply pipe 12) for supplying gas provided between the air supply device 5 and the blocking body 32 can be shortened. Similarly, the change in the distance between the exhaust device 6 and the blocking body 32 in the front-rear direction is suppressed. Therefore, the length of the exhaust pipe (exhaust pipe 13) for discharging gas, which is provided between the exhaust device 6 and the obstruction body 32, can be shortened.

In the cleaning device 1, the container body 102 is fixed to the stage 26 by the clamping mechanism 24. Therefore, even if the container body 102 is pressed against the blocking body 32, it will not shift backward, so the container body 102 can be firmly pressed against the blocking body 32, and the blocking body 32 can more reliably block the opening 102a. This reduces the possibility of particles entering the internal space V from outside the container body 102, making it possible to improve the cleaning efficiency of the internal space V.

The opening/closing mechanism 31 has a suction pad 35 that suctions the lid body 103, and operates to lock and unlock the lid body 103. With this configuration, the lid body 103 can be locked and unlocked while it is held by the suction pad 35. Therefore, compared to when the lid body 103 is not held by the suction pad 35, the time required to lock and unlock the lid body 103 can be shortened, and the possibility of particles entering the internal space V from outside the container body 102 is reduced. Therefore, it is possible to improve the cleaning efficiency of the internal space V.

The lifting mechanism 4 raises and lowers the door 3. In other words, the lifting mechanism 4 moves the opening/closing mechanism 31 and the blocking body 32 in the vertical direction. With this configuration, the lifting mechanism 4 can move the opening/closing mechanism 31 and the blocking body 32 as a unit by moving the door 3. Therefore, simply by moving the door 3 in the vertical direction, it is possible to switch between a state for locking and unlocking the lid body 103 and a state for cleaning the internal space V.

The air supply device 5 supplies gas to the internal space V further via an air supply valve 155 provided on the bottom plate 122 of the container body 102. With this configuration, gas is supplied to the internal space V not only through the air supply port 37b of the blocking body 32 but also through the air supply valve 155, making it easier for gas to spread throughout the internal space V. This makes it possible to improve the cleaning efficiency of the internal space V.

The air supply device 5 has a filter 52 for removing particles, and supplies gas that has passed through the filter 52. With this configuration, the amount of particles contained in the gas supplied by the air supply device 5 can be reduced, so fewer particles enter the internal space V. This makes it possible to improve the cleaning efficiency of the internal space V.

The exhaust device 6 further exhausts gas from the internal space V via an exhaust valve 156 provided on the bottom plate 122 of the container body 102. With this configuration, gas is exhausted from the internal space V not only through the exhaust port 37c of the obstruction body 32 but also through the exhaust valve 156. This improves exhaust efficiency.

The particle counter 8 counts the particles contained in the gas discharged from the internal space V. It can be said that the amount of particles contained in the gas discharged from the internal space V is correlated with the amount of particles contained in the internal space V. Therefore, the cleanliness of the internal space V can be estimated from the count value of the particle counter 8. Therefore, when the count value falls below the target value, it is possible to determine that the internal space V has been sufficiently cleaned and to end the cleaning.

For example, if an exhaust device 6 is connected to the exhaust port 37c, the pressure of the gas exhausted from the exhaust port 37c will be increased by the exhaust device 6, and this pressure may deviate from the air pressure in the internal space V. In the purifying device 1, a barometer 7 is connected to the measurement port 37d. With this configuration, the barometer 7 is connected to a measurement port 37d different from the exhaust port 37c, so that the measurement error of the air pressure caused by the exhaust device 6 can be reduced. For example, when the guide monitor 9 displays the measurement value of the barometer 7, the user can more accurately grasp the air pressure in the internal space V.

Note that the cleaning device, cleaning system, and cleaning method disclosed herein are not limited to the above embodiments.

The panel storage container 101 may be a FOSB (Front Opening Shipping Box) used to transport panels (substrates) between factories.

The configuration of the moving mechanism 23 is not limited as long as it can relatively move the container body 102 and the blocking body 32 so that the blocking body 32 blocks the opening 102a when the lid 103 is removed. For example, the moving mechanism 23 may be a mechanism that moves the door 3 in the front-rear direction instead of a configuration that moves the stage 26 in the front-rear direction. Even in this configuration, the opening 102a is blocked by the blocking body 32 by the moving mechanism 23. Therefore, compared to a case where a user performs the task of blocking the opening 102a with the blocking body 32, the work time can be shortened and the possibility of particles entering the internal space V from the outside of the container body 102 is reduced. Therefore, it is possible to improve the cleaning efficiency of the internal space V.

The opening/closing mechanism 31 and the blocking body 32 may be arranged in the left-right direction. In this case, the cleaning device 1 includes a movement mechanism (second movement mechanism) that moves the door 3 in the left-right direction instead of the lifting mechanism 4.

The opening/closing mechanism 31 and the blocking body 32 do not have to be integrated. In this case, the cleaning device 1 includes a mechanism for switching between the opening/closing mechanism 31 and the blocking body 32 instead of the lifting mechanism 4.

Instead of the opening/closing mechanism 31, the user may open and close the lid 103. In this case, the door 3 may not include the opening/closing mechanism 31. The door 3 is fixed in a position where the blocking body 32 is exposed from the window 41a, and the cleaning device 1 may not include the lifting mechanism 4. The mounting table 2 may not include the clamp mechanism 24.

The air supply device 5 may not include a filter 52, and may supply CDA generated outside the air supply device 5. The air supply device 5 may not supply gas to the internal space V through the air supply valve 155, as long as the air supply device 5 supplies gas to the internal space V through the air supply port 37b. In this case, the purifying device 1 may not include an air supply pipe 15.

The exhaust device 6 does not need to exhaust gas from the internal space V through the exhaust valve 156, so long as the exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c. In this case, the cleaning device 1 does not need to include the exhaust pipe 16.

Each of the air intake pipes 12 and 15 may be provided with an electromagnetic valve (not shown) that opens and closes the gas flow path. In this case, the control device 10 can select the path through which the gas is supplied by opening one or both of the air intake pipes 12 and 15. Each of the exhaust pipes 13 and 16 may be provided with an electromagnetic valve (not shown) that opens and closes the gas flow path. In this case, the control device 10 can select the path through which the gas is exhausted by opening one or both of the exhaust pipes 13 and 16.

When gas is supplied to the internal space V by the air supply device 5, the air pressure in the internal space V becomes higher than the air pressure outside the container body 102, and the gas can be naturally exhausted from the exhaust port 37c. Therefore, the cleaning device 1 does not need to include the exhaust device 6.

The barometer 7 may be connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6, and the obstruction body 32 may not have a measurement port 37d. In this case, the air pressure in the internal space V can be calculated based on the measurement value of the barometer 7 and the exhaust flow rate of the exhaust device 6.

The cleaning device 1 does not need to include a barometer 7. Even in this case, the air pressure in the internal space V can be calculated from the intake air flow rate of the intake air device 5, the exhaust air flow rate of the exhaust air device 6, the elapsed time from when the intake air device 5 started operating, and the elapsed time from when the exhaust air device 6 started operating.

The cleaning device 1 may not include a particle counter 8. In this case, for example, the end condition in step S5 may be that the elapsed time from the start of cleaning has reached a preset time.

The location of the guide monitor 9 is not limited to the side of the housing 11, and the guide monitor 9 may be provided, for example, outside the clean room.

The control device 10 may control at least one of the air supply device 5 and the exhaust device 6 so that the air pressure in the internal space V is maintained at a positive pressure. When the air pressure in the internal space V is positive, the possibility of particles entering the internal space V from outside the container body 102 is reduced. Therefore, it is possible to improve the cleaning efficiency of the internal space V.

The processes shown in Figures 9 to 11 may be performed in response to the user inputting operations to start the process.

At least one of steps S1, S2, S3, S7, and S8 may be performed by the user instead of by the cleaning device 1.

(Additional Note)
[Clause 1]
A cleaning device for cleaning an internal space of a storage container, the device comprising: a container body having an opening and an internal space for accommodating a panel; and a lid body for closing the opening, the device comprising:
a closing body for closing the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space;
an air supply device for supplying gas to the internal space through the air supply port;
A cleaning device comprising:

[Clause 2]
13. The cleaning apparatus of claim 1, further comprising an exhaust system for exhausting gas from the interior space through the exhaust port.

[Clause 3]
3. The cleaning apparatus of claim 2, further comprising a control device for controlling the air supply device or the exhaust device so as to maintain a positive air pressure in the internal space.

[Clause 4]
A cleaning device as described in any one of clauses 1 to 3, further comprising a first moving mechanism that moves the container body and the closure body relatively so that the closure body blocks the opening when the lid body is removed.

[Clause 5]
a mounting table including a stage on which the container body is placed and which moves the container body in a first direction;
the blocking member is provided on an edge of the mounting table in the first direction,
5. The cleaning apparatus of claim 4, wherein the first moving mechanism includes the stage.

[Clause 6]
6. The cleaning apparatus according to claim 5, wherein the mounting table further includes a clamping mechanism for fixing the container body to the stage.

[Clause 7]
The cleaning device described in clause 5 or 6, further comprising an opening and closing mechanism having a suction pad that suctions the lid and that operates to lock and unlock the lid.

[Clause 8]
a second moving mechanism that relatively moves the closing body, the opening/closing mechanism, and the container body in a second direction intersecting the first direction,
8. The cleaning device of claim 7, wherein the closure and the opening and closing mechanism are aligned in the second direction.

[Clause 9]
The cleaning apparatus according to any one of clauses 1 to 8, wherein the air supply device further supplies gas to the internal space via an air supply valve provided on a bottom plate of the container body.

[Clause 10]
10. The cleaning apparatus of any one of claims 1 to 9, wherein the air intake device has a filter for removing particles.

[Clause 11]
11. The cleaning apparatus according to any one of claims 1 to 10, further comprising a particle counter that counts particles contained in the gas discharged from the internal space.

[Clause 12]
Further comprising a barometer for measuring the air pressure in the internal space,
The cleaning device of any one of claims 1 to 11, wherein the obstruction further has a measurement port to which the barometer is connected.

[Clause 13]
A cleaning device according to any one of claims 1 to 12,
The storage container;
A cleaning system comprising:

[Clause 14]
A cleaning method for cleaning an internal space of a storage container including a container body having an opening and an internal space for accommodating a panel, and a lid body for closing the opening, comprising the steps of:
a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, closing the opening when the lid is removed;
Supplying gas to the internal space through the air inlet of the obstruction;
A cleaning method comprising:

1...cleaning device, 2...mounting table, 4...lifting mechanism (second moving mechanism), 5...air supply device, 6...exhaust device, 7...barometer, 8...particle counter, 10...control device, 23...moving mechanism (first moving mechanism), 24...clamping mechanism, 26...stage, 31...opening/closing mechanism, 32...blocking body, 35...suction pad, 37b...air supply port, 37c...exhaust port, 37d...measurement port, 52...filter, 100...cleaning system, 101...panel storage container (storage container), 102...container body, 102a...opening, 103...lid, 122...bottom plate, 155...air supply valve, V...internal space.

Claims (15)

A cleaning device for cleaning an internal space of a storage container, the device comprising: a container body having an opening and an internal space for accommodating a panel; and a lid body for closing the opening, the device comprising:
a closing body for closing the opening when the lid is removed, the closing body having a main body portion provided with an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, and a sealing member for sealing between the main body portion and the container main body ;
an air supply device for supplying gas to the internal space through the air supply port;
a first moving mechanism that relatively moves the container body and the closing body so that the closing body airtightly closes the opening when the lid body is removed , and presses the container body against the sealing member ;
A cleaning device comprising: a mounting table including a stage on which the container body is placed and which moves the container body in a first direction;
the blocking member is provided on an edge of the mounting table in the first direction,
The cleaning apparatus of claim 1 , wherein the first moving mechanism includes the stage. The cleaning device according to claim 2, wherein the mounting table further includes a clamping mechanism for fixing the container body to the stage. The cleaning device according to claim 2, further comprising an opening/closing mechanism that has a suction pad that adheres to the lid and that operates to lock and unlock the lid. a second moving mechanism that relatively moves the closing body, the opening/closing mechanism, and the container body in a second direction intersecting the first direction,
The cleaning device of claim 4 , wherein the obstruction and the opening/closing mechanism are aligned in the second direction. A cleaning device for cleaning an internal space of a storage container, the device comprising: a container body having an opening and an internal space for accommodating a panel; and a lid body for closing the opening, the device comprising:
a closing body for closing the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space;
an air supply device for supplying gas to the internal space through the air supply port;
A barometer for measuring the air pressure in the internal space;
Equipped with
The obstruction further has a measurement port to which the barometer is connected. The cleaning device according to any one of claims 1 to 6, further comprising an exhaust device that exhausts gas from the internal space through the exhaust port. The cleaning device according to claim 7, further comprising a control device that controls the air supply device or the exhaust device so that the air pressure in the internal space is maintained at a positive pressure. The cleaning device according to any one of claims 1 to 6, wherein the air supply device further supplies gas to the internal space via an air supply valve provided on the bottom plate of the container body. The cleaning device according to any one of claims 1 to 6, wherein the air supply device has a filter for removing particles. The cleaning device according to any one of claims 1 to 6, further comprising a particle counter that counts particles contained in the gas discharged from the internal space. Further comprising a barometer for measuring the air pressure in the internal space,
The cleaning device according to any one of claims 1 to 5, wherein the obstruction further comprises a measurement port to which the barometer is connected. A cleaning device according to any one of claims 1 to 6,
The storage container;
A cleaning system comprising: A cleaning method for cleaning an internal space of a storage container including a container body having an opening and an internal space for accommodating a panel, and a lid body for closing the opening, comprising the steps of:
a closing body for closing the opening when the lid is removed, the closing body having a main body portion provided with an air inlet port through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space , and a sealing member for sealing between the main body portion and the container main body , the closing body airtightly closing the opening when the lid is removed;
Supplying gas to the internal space through the air inlet of the obstruction;
Including,
The cleaning method, wherein the opening is airtightly closed by a movement mechanism moving the container body and the closing body relative to each other and pressing the container body against the sealing member . A cleaning method for cleaning an internal space of a storage container including a container body having an opening and an internal space for accommodating a panel, and a lid body for closing the opening, comprising the steps of:
a blocking body for blocking the opening when the lid is removed, the blocking body having an air inlet through which gas is introduced into the internal space, an exhaust port through which gas is exhausted from the internal space, and a measurement port to which a barometer for measuring air pressure in the internal space is connected, the blocking body blocking the opening when the lid is removed;
Supplying gas to the internal space through the air inlet of the obstruction;
Measuring the air pressure in the internal space through the measurement port using the barometer;
A cleaning method comprising:

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