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JP7602943B2 - Pressure Detector - Google Patents

Pressure Detector Download PDF

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JP7602943B2
JP7602943B2 JP2021041800A JP2021041800A JP7602943B2 JP 7602943 B2 JP7602943 B2 JP 7602943B2 JP 2021041800 A JP2021041800 A JP 2021041800A JP 2021041800 A JP2021041800 A JP 2021041800A JP 7602943 B2 JP7602943 B2 JP 7602943B2
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housing
pressure
rear end
insulating
tip
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JP2022141475A (en
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貴司 岩下
和久 上野
元樹 小畑
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Citizen Watch Co Ltd
Citizen Fine Device Co Ltd
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Citizen Watch Co Ltd
Citizen Fine Device Co Ltd
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Description

本発明は、検出素子を用いて圧力を検出する圧力検出装置に関する。 The present invention relates to a pressure detection device that detects pressure using a detection element.

内燃機関等の燃焼室内の圧力を検出する装置として、圧電素子等の検出素子を使用したものが提案されている。 Devices that use detection elements such as piezoelectric elements have been proposed to detect the pressure inside the combustion chamber of an internal combustion engine, etc.

例えば特許文献1には、筒状のハウジングと、ハウジングの先端側に取り付けられるダイアフラムと、ハウジング内においてダイアフラムの後端側に配置され、ダイアフラムを介して作用する圧力を検知する圧電素子と、ハウジング内においてダイアフラムと圧電素子との間でこれら両者に当接して設けられ、ダイアフラムを介して作用する圧力を圧電素子に伝達する圧力伝達部と、圧力伝達部をハウジングの軸方向に向けて加圧するようにハウジングに固定されることで圧電素子に荷重を作用させる加圧部材と、を備え、レーザ溶接によりハウジングと加圧部材とが固定された圧力検出装置が記載されている。 For example, Patent Document 1 describes a pressure detection device that includes a cylindrical housing, a diaphragm attached to the front end of the housing, a piezoelectric element that is disposed inside the housing on the rear end side of the diaphragm and detects pressure acting through the diaphragm, a pressure transmission section that is disposed inside the housing between the diaphragm and the piezoelectric element in contact with both of them and transmits the pressure acting through the diaphragm to the piezoelectric element, and a pressure member that is fixed to the housing so as to apply pressure to the pressure transmission section in the axial direction of the housing, thereby applying a load to the piezoelectric element, and the housing and pressure member are fixed by laser welding.

特許第5820759号公報Patent No. 5820759

圧力検出装置において、ハウジングを構成する複数の部材どうしの取り付けや、ハウジングとダイアフラムヘッドや支持部材等の部材との取り付けの方法として、レーザ溶接が行われる場合がある。レーザ溶接が行われると、部材の溶接箇所が盛り上がる溶接ビードが生じる。ここで、溶接ビードが生じると、溶接箇所の近傍で溶接箇所から離隔させて配置されている部品に対し、溶接ビードで盛り上がった部位が接触することが起こり得る。すると、溶接ビードが接触した部品に障害の発生等の影響が起こるおそれがある。
本発明は、圧力検出装置の溶接箇所において、溶接ビードが接触することによる他の部位への影響を抑制することを目的とする。
In a pressure detection device, laser welding may be used to attach multiple components constituting a housing together, or to attach the housing to components such as a diaphragm head or a support member. When laser welding is performed, a weld bead is generated, which causes the welded portion of the component to bulge. When a weld bead is generated, the raised portion of the weld bead may come into contact with a component that is disposed near the welded portion but spaced apart from the welded portion. This may cause an effect such as an injury to the component that the weld bead comes into contact with.
The present invention aims to suppress the influence of a weld bead at a welded portion of a pressure detection device on other portions due to contact with the weld bead.

上記の目的を達成する本発明の圧力検出装置は、筒状のハウジングと、このハウジング内に設けられ、圧力の変化を検知する圧電素子と、このハウジング内で圧電素子に接して配置され、圧力を圧電素子に伝達する圧力伝達部と、この圧力伝達部をハウジングの軸方向に向けて加圧するようにハウジングに固定され、圧電素子に荷重を作用させる加圧部材と、ハウジングに対して溶接されることによりハウジング内で加圧部材を固定する固定部材と、を備える。そして、加圧部材は、固定部材により固定された状態でハウジングと固定部材との溶接箇所を避ける退避部を有する。
ここで、加圧部材の退避部は、少なくとも加圧部材におけるハウジングと固定部材との溶接箇所に対向する部位であって、隣接する部位よりも低く形成されている構成としても良い。
より好ましくは、加圧部材の退避部として、溶接箇所に対向する部位に、この溶接箇所に沿う方向に延びる溝が形成されている構成としても良い。
また、加圧部材の退避部は、少なくとも加圧部材におけるハウジングと固定部材との溶接箇所に対向する部位に設けられ、加圧部材の退避部に隣接する部位が、退避部よりも高く形成されている構成としても良い。
また、好ましくは、加圧部材は、導電性を有し、圧電素子と電気的に接続され、ハウジングおよび固定部材は、導電性を有し、加圧部材および圧電素子と電気的に絶縁されている構成としても良い。
また、上記の圧力検出装置において、加圧部材は、筒状であって、外周面に外方へ突出する突出部を備え、ハウジングの内周面と固定部材とが絶縁部材を介して加圧部材の突出部を挟んだ状態で、ハウジングと固定部材とが溶接されることにより、加圧部材が固定され、突出部とは異なる加圧部材の外周面において、ハウジングの内部で固定された状態で絶縁部材と対向する部位が、溶接箇所に対向する部位よりも高く形成され、絶縁部材に当たる構成としても良い。
また、上記の目的を達成する他の本発明の圧力検出装置は、圧力の変化を検出する検出素子と、導電性を有し、検出素子を内部に収容すると共に、検出素子と電気的に接続される第1筐体と、導電性を有し、第1筐体を内部に収容すると共に、検出素子と電気的に絶縁される第2筐体と、第2筐体に対して溶接されることにより第1筐体を固定する固定部材と、を備える。そして、第1筐体は、第2筐体に対する溶接により部材の盛り上がりが生じる箇所に対向する部位に、この部材の盛り上がりとの接触を避ける凹部を有する。
ここで、第1筐体は、溶接により部材の盛り上がりが生じる箇所に対向する部位に、第2筐体の溶接箇所に沿う方向に延びる溝が形成されている構成としても良い。
The pressure detection device of the present invention that achieves the above object includes a cylindrical housing, a piezoelectric element provided within the housing and detecting a change in pressure, a pressure transmission part disposed within the housing in contact with the piezoelectric element and transmitting pressure to the piezoelectric element, a pressure member fixed to the housing so as to apply pressure to the pressure transmission part in the axial direction of the housing and apply a load to the piezoelectric element, and a fixing member welded to the housing to fix the pressure member within the housing. The pressure member has a retracted part that avoids the welded portion between the housing and the fixing member when fixed by the fixing member.
Here, the retracted portion of the pressure member may be at least a portion of the pressure member that faces the welded portion between the housing and the fixed member, and may be formed lower than an adjacent portion.
More preferably, a groove extending in a direction along the welded portion may be formed in a portion facing the welded portion as the retracted portion of the pressure member.
In addition, the retracted portion of the pressure applying member may be provided at least in a portion of the pressure applying member facing the welded portion between the housing and the fixed member, and a portion of the pressure applying member adjacent to the retracted portion may be formed higher than the retracted portion.
Also, preferably, the pressure member is conductive and electrically connected to the piezoelectric element, and the housing and the fixing member are conductive and electrically insulated from the pressure member and the piezoelectric element.
In addition, in the above pressure detection device, the pressure application member is cylindrical and has a protrusion that protrudes outward from its outer peripheral surface, and the pressure application member is fixed by welding the housing and the fixing member with the inner peripheral surface of the housing and the fixing member sandwiching the protrusion of the pressure application member through the insulating member, and the portion of the outer peripheral surface of the pressure application member that is different from the protrusion and that faces the insulating member when fixed inside the housing is formed higher than the portion facing the welded point and comes into contact with the insulating member.
Another pressure detection device of the present invention that achieves the above object includes a detection element that detects a change in pressure, a first housing that is conductive and that houses the detection element and is electrically connected to the detection element, a second housing that is conductive and that houses the first housing and is electrically insulated from the detection element, and a fixing member that fixes the first housing by being welded to the second housing. The first housing has a recess in a portion facing a portion where a member will swell due to welding to the second housing, to avoid contact with the swell of the member.
Here, the first housing may be configured such that a groove is formed in a portion opposite to a portion where a bulge occurs in a member due to welding, the groove extending in a direction along the welded portion of the second housing.

本発明によれば、圧力検出装置の溶接箇所において、溶接ビードが接触することによる他の部位への影響を抑制することができる。 According to the present invention, it is possible to suppress the influence of the weld bead on other parts at the welded portion of the pressure detection device.

実施の形態に係る圧力検出システムの概略構成図である。1 is a schematic configuration diagram of a pressure detection system according to an embodiment. 圧力検出装置の側面図である。FIG. 圧力検出装置の断面図(図2のIII-III断面図)である。FIG. 3 is a cross-sectional view (cross-sectional view taken along line III-III in FIG. 2) of the pressure detection device. 圧力検出装置の先端側の拡大断面図である。FIG. 2 is an enlarged cross-sectional view of the tip side of the pressure detection device. 加圧部材の斜視図である。FIG. 収容部材の斜視図である。FIG. 図4に示した断面における第1溶接部および退避部の近傍の拡大図である。5 is an enlarged view of the first welded portion and the retreated portion in the cross section shown in FIG. 4 . FIG.

以下、添付図面を参照して、本発明の実施の形態について詳細に説明する。
[圧力検出システムの構成]
図1は、実施の形態に係る圧力検出システム1の概略構成図である。
この圧力検出システム1は、内燃機関10における燃焼室C内の圧力(燃焼圧)を検出する圧力検出装置20と、圧力検出装置20に対する給電を行うとともに圧力検出装置20が検出した圧力に基づいて内燃機関10の動作を制御する制御装置80と、圧力検出装置20と制御装置80とを電気的に接続する接続ケーブル90とを備えている。
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[Configuration of Pressure Detection System]
FIG. 1 is a schematic configuration diagram of a pressure detection system 1 according to an embodiment.
This pressure detection system 1 includes a pressure detection device 20 that detects the pressure (combustion pressure) in the combustion chamber C of the internal combustion engine 10, a control device 80 that supplies power to the pressure detection device 20 and controls the operation of the internal combustion engine 10 based on the pressure detected by the pressure detection device 20, and a connection cable 90 that electrically connects the pressure detection device 20 and the control device 80.

ここで、圧力の検出対象となる内燃機関10は、内部にシリンダが形成されたシリンダブロック11と、シリンダ内を往復運動するピストン12と、シリンダブロック11に締結されてピストン12等とともに燃焼室Cを構成するシリンダヘッド13とを有している。また、シリンダヘッド13には、燃焼室Cと外部とを連通する連通孔13aが設けられている。そして、この連通孔13aに、圧力検出装置20の先端側を挿入するとともに、圧力検出装置20に設けられたリブ部312b(後述する図2参照)をシリンダヘッド13に固定することで、内燃機関10に対して圧力検出装置20を取り付けている。ここで、内燃機関10を構成するシリンダブロック11、ピストン12およびシリンダヘッド13は、鋳鉄やアルミニウム等、導電性を有する金属材料で構成されている。 Here, the internal combustion engine 10, which is the subject of pressure detection, has a cylinder block 11 with a cylinder formed therein, a piston 12 that reciprocates within the cylinder, and a cylinder head 13 that is fastened to the cylinder block 11 and forms a combustion chamber C together with the piston 12. The cylinder head 13 is also provided with a communication hole 13a that connects the combustion chamber C to the outside. The pressure detection device 20 is attached to the internal combustion engine 10 by inserting the tip side of the pressure detection device 20 into this communication hole 13a and fixing a rib portion 312b (see FIG. 2 described later) provided on the pressure detection device 20 to the cylinder head 13. Here, the cylinder block 11, piston 12, and cylinder head 13 that constitute the internal combustion engine 10 are made of conductive metal materials such as cast iron and aluminum.

[圧力検出装置の構成]
図2は、圧力検出装置20の側面図である。図3は、圧力検出装置20の断面図(図2のIII-III断面図)である。図4は、圧力検出装置20の先端側の拡大断面図である。
[Configuration of the Pressure Detection Device]
Fig. 2 is a side view of the pressure detection device 20. Fig. 3 is a cross-sectional view (cross-sectional view taken along III-III in Fig. 2) of the pressure detection device 20. Fig. 4 is an enlarged cross-sectional view of the tip side of the pressure detection device 20.

本実施の形態の圧力検出装置20は、外部に露出する筐体部30と、圧力を検出するための各種機構を含み、ほぼ全体が筐体部30に収容されるとともに一部(後述する接続部材54)が外部に露出するように設けられる検出機構部40と、筐体部30の外周面に取り付けられるシール部70とを有している。そして、この圧力検出装置20は、図1に示す内燃機関10に対し、図2における左側(筐体部30が露出する部位)が燃焼室C(図1において下側)を向くとともに、図2における右側(検出機構部40が露出する部位)が外部(図1において上方)を向くように取り付けられる。また、この状態において、シール部70は、シリンダヘッド13に設けられた連通孔13aの内部に位置する。なお、以下の説明では、図2において、図中左に向かう側を圧力検出装置20の「先端側」と称し、図中右に向かう側を圧力検出装置20の「後端側」と称する。また、以下の説明では、図2に一点鎖線で示す圧力検出装置20の中心線方向を、単に中心線方向と称する。 The pressure detection device 20 of this embodiment has a housing part 30 exposed to the outside, a detection mechanism part 40 that includes various mechanisms for detecting pressure and is almost entirely housed in the housing part 30 with a part (connecting member 54 described later) exposed to the outside, and a seal part 70 attached to the outer circumferential surface of the housing part 30. The pressure detection device 20 is attached to the internal combustion engine 10 shown in FIG. 1 so that the left side in FIG. 2 (the part where the housing part 30 is exposed) faces the combustion chamber C (the lower side in FIG. 1) and the right side in FIG. 2 (the part where the detection mechanism part 40 is exposed) faces the outside (upward in FIG. 1). In this state, the seal part 70 is located inside the communication hole 13a provided in the cylinder head 13. In the following description, the side facing the left in FIG. 2 is referred to as the "front end side" of the pressure detection device 20, and the side facing the right in FIG. 2 is referred to as the "rear end side" of the pressure detection device 20. In addition, in the following description, the center line direction of the pressure detection device 20 shown by the dashed line in FIG. 2 will simply be referred to as the center line direction.

[筐体部の構成]
筐体部30は、先端側筐体31と、先端側筐体31の先端側に取り付けられたダイアフラムヘッド32と、先端側筐体31の後端側に取り付けられた後端側筐体33とを備えている。
[Configuration of the housing]
The housing portion 30 includes a front end housing 31 , a diaphragm head 32 attached to the front end side of the front end housing 31 , and a rear end housing 33 attached to the rear end side of the front end housing 31 .

(先端側筐体)
先端側筐体31は、中空構造を有し且つ全体として筒状を呈する部材である。この先端側筐体31は、導電性を有するとともに耐熱性および耐酸性が高いステンレス等の金属材料によって構成されている。筒状の先端側筐体31の軸方向は、上記の中心線方向に一致する。先端側筐体31は、ハウジングの一例であり、第2筐体の一例である。
(Tip side housing)
The tip side housing 31 is a member having a hollow structure and a cylindrical shape as a whole. The tip side housing 31 is made of a metal material such as stainless steel that is conductive and has high heat resistance and acid resistance. The axial direction of the cylindrical tip side housing 31 coincides with the above-mentioned center line direction. The tip side housing 31 is an example of a housing and an example of a second housing.

この先端側筐体31は、相対的に先端側に位置する第1先端側筐体311と、相対的に後端側に位置する第2先端側筐体312とを有している。ここで、先端側筐体31は、第1先端側筐体311の後端側の外周面と、第2先端側筐体312の先端側の内周面とをレーザ溶接することで、両者を一体化させる構成となっている。そして、第1先端側筐体311の先端側には、レーザ溶接によってダイアフラムヘッド32が取り付けられるとともに、第2先端側筐体312の後端側には、はめ合いによって後端側筐体33が取り付けられる。 The tip housing 31 has a first tip housing 311 located relatively closer to the tip, and a second tip housing 312 located relatively closer to the rear end. Here, the tip housing 31 is configured such that the outer peripheral surface of the rear end side of the first tip housing 311 and the inner peripheral surface of the tip side of the second tip housing 312 are laser welded together to form an integrated body. A diaphragm head 32 is attached to the tip side of the first tip housing 311 by laser welding, and a rear housing 33 is attached to the rear end side of the second tip housing 312 by fitting.

ここで、第1先端側筐体311の外周面には、シール部70を構成する第1シール部材71(詳細は後述する)を装着するための凹部311aが設けられている。また、第1先端側筐体311の内部には、先端側において第1の直径に設定された部位と、後端側において第1の直径よりも大きい第2の直径に設定された部位とが存在しており、これら2つの部位の境界には、両者を接続する内側段差部311bが設けられている。 Here, the outer peripheral surface of the first tip side housing 311 is provided with a recess 311a for mounting the first seal member 71 (described in detail below) that constitutes the seal portion 70. Inside the first tip side housing 311, there is a portion on the tip side that is set to a first diameter, and a portion on the rear end side that is set to a second diameter that is larger than the first diameter, and at the boundary between these two portions, there is an inner step portion 311b that connects the two portions.

一方、第2先端側筐体312の外周面には、第1シール部材71とともにシール部70を構成する第2シール部材72(詳細は後述する)を装着するための凹部312aが設けられている。また、第2先端側筐体312の外周面のうち、上記凹部312aよりも後端側には、外側に突出するリング状のリブ部312bが設けられている。このリブ部312bは、上述したように、圧力検出装置20を内燃機関10(より具体的にはシリンダヘッド13)に固定するために用いられる。 On the other hand, a recess 312a is provided on the outer peripheral surface of the second tip side housing 312 for mounting a second seal member 72 (described in detail below) which constitutes the seal portion 70 together with the first seal member 71. Also, on the outer peripheral surface of the second tip side housing 312, a ring-shaped rib portion 312b which protrudes outward is provided on the rear end side of the recess 312a. As described above, this rib portion 312b is used to fix the pressure detection device 20 to the internal combustion engine 10 (more specifically, the cylinder head 13).

(ダイアフラムヘッド)
ダイアフラムヘッド32は、全体として円板状を呈する部材である。このダイアフラムヘッド32は、導電性を有するとともに耐熱性および耐酸性が高いステンレス等の金属材料によって構成されている。特に、この例では、ダイアフラムヘッド32および上記先端側筐体31を、同じ材料で構成している。
(Diaphragm head)
The diaphragm head 32 is a member having a disk shape as a whole. The diaphragm head 32 is made of a metal material such as stainless steel that is conductive and has high heat resistance and acid resistance. In particular, in this example, the diaphragm head 32 and the tip side housing 31 are made of the same material.

このダイアフラムヘッド32は、先端側における中央部に凹部32bが形成されるとともに、外部(燃焼室C側)に露出することで圧力を受ける圧力受面(表面)32aと、圧力受面32aの裏側となる裏面を環状に切り欠くことによって設けられた凹部32cと、凹部32cの存在により、結果として圧力受面32aの中央部(凹部32bの形成部位)から後端側に突出する凸部32dとを有している。このダイアフラムヘッド32は、第1先端側筐体311における先端側の開口部を塞ぐように設けられている。そして、ダイアフラムヘッド32と第1先端側筐体311との境界部には、外周面の一周にわたってレーザ溶接が施されている。 The diaphragm head 32 has a recess 32b formed in the center of the tip side, a pressure receiving surface (surface) 32a that is exposed to the outside (combustion chamber C side) and receives pressure, a recess 32c formed by cutting out an annular shape in the back side of the pressure receiving surface 32a, and a protrusion 32d that protrudes from the center of the pressure receiving surface 32a (the portion where the recess 32b is formed) toward the rear end due to the presence of the recess 32c. The diaphragm head 32 is provided so as to close the opening on the tip side of the first tip side housing 311. The boundary between the diaphragm head 32 and the first tip side housing 311 is laser welded around the entire outer circumference.

(後端側筐体)
後端側筐体33は、中空構造を有し且つ全体として筒状を呈する部材である。この後端側筐体33は、導電性を有するとともに耐熱性および耐酸性が高いステンレス等の金属材料によって構成されている。ただし、内燃機関10に圧力検出装置20を装着した状態において、後端側筐体33は、内燃機関10の外部に位置することから、上述した先端側筐体31よりも耐熱性および耐酸性が低い材料を用いることができる。筒状の後端側筐体33の軸方向は、上記の中心線方向に一致する。
(Rear end housing)
The rear end housing 33 is a member having a hollow structure and a cylindrical shape as a whole. The rear end housing 33 is made of a metal material such as stainless steel that is conductive and has high heat resistance and acid resistance. However, since the rear end housing 33 is located outside the internal combustion engine 10 when the pressure detection device 20 is attached to the internal combustion engine 10, a material having lower heat resistance and acid resistance than the front end housing 31 can be used for the rear end housing 33. The axial direction of the cylindrical rear end housing 33 coincides with the above-mentioned center line direction.

この後端側筐体33は、相対的に先端側に位置する第1後端側筐体331と、相対的に後端側に位置する第2後端側筐体332とを有する。ここで、後端側筐体33は、第1後端側筐体331の後端側の内周面に、第2後端側筐体332の先端側の外周面をはめ込むことで、両者を一体化させる構成となっている。そして、第1後端側筐体331の先端側には、はめ合いによって先端側筐体31(より具体的には第2先端側筐体312)が取り付けられるとともに、第2後端側筐体332の後端側には、はめ込みによって接続部材54(詳細は後述する)が取り付けられる。 The rear housing 33 has a first rear housing 331 located relatively closer to the front end, and a second rear housing 332 located relatively closer to the rear end. Here, the rear housing 33 is configured such that the outer peripheral surface of the front end side of the second rear housing 332 is fitted into the inner peripheral surface of the rear end side of the first rear housing 331, thereby integrating the two. The front end housing 31 (more specifically, the second front end housing 312) is attached to the front end side of the first rear housing 331 by fitting, and a connection member 54 (described in detail below) is attached to the rear end side of the second rear housing 332 by fitting.

[検出機構部の構成]
検出機構部40は、圧電素子41と、先端電極部材42と、後端電極部材43とを備えている。また、検出機構部40は、絶縁リング45と、第1コイルバネ46と、伝導部材47と、保持部材48とを備えている。さらに、検出機構部40は、加圧部材49と、支持部材50と、第2コイルバネ51と、収容部材52とを備えている。さらにまた、検出機構部40は、回路基板53と、接続部材54と、接地板55と、Oリング56とを備えている。また、検出機構部40は、突き当てパイプ57を備えている。そして、検出機構部40は、絶縁パイプ60と、第1絶縁部材61と、第2絶縁部材62と、第3絶縁部材63と、第4絶縁部材64と、第5絶縁部材65とを備えている。
[Configuration of the detection mechanism]
The detection mechanism 40 includes a piezoelectric element 41, a front electrode member 42, and a rear electrode member 43. The detection mechanism 40 also includes an insulating ring 45, a first coil spring 46, a conductive member 47, and a holding member 48. The detection mechanism 40 also includes a pressure member 49, a support member 50, a second coil spring 51, and a housing member 52. The detection mechanism 40 also includes a circuit board 53, a connection member 54, a ground plate 55, and an O-ring 56. The detection mechanism 40 also includes a butting pipe 57. The detection mechanism 40 also includes an insulating pipe 60, a first insulating member 61, a second insulating member 62, a third insulating member 63, a fourth insulating member 64, and a fifth insulating member 65.

(圧電素子)
圧電素子41は、全体として円柱状を呈する部材である。圧電素子41は、圧力の変化を検出する検出素子の一例である。この圧電素子41は、圧電縦効果の圧電作用を示す圧電体を備えている。圧電縦効果とは、圧電体の電荷発生軸と同一方向の応力印加軸に外力を加えると、電荷発生軸方向の圧電体の表面に電荷が発生することをいう。この圧電素子41は、先端側筐体31の内側であって、ダイアフラムヘッド32の後端側に配置されている。この圧電素子41は、中心線方向が応力印加軸の方向となるように、先端側筐体31内に収容されている。ここで、圧電素子41は、先端側筐体31の内部に設けられた加圧部材49の内側であって、この加圧部材49の内部に設けられた絶縁パイプ60の内側に配置されている。また、圧電素子41の外径は、この圧電素子41を内部に収容する絶縁パイプ60の内径よりもわずかに小さい。そして、圧電素子41の先端側の面は、先端電極部材42の後端側の面と接触している。一方、圧電素子41の後端側の面は、後端電極部材43の先端側の面と接触している。また、圧電素子41の外周面は、絶縁パイプ60の内周面と対峙している。このように、加圧部材49の内周面と圧電素子41の外周面との間に、絶縁パイプ60を設けることにより、加圧部材49および圧電素子41は、直接には接触しない。
(Piezoelectric element)
The piezoelectric element 41 is a member having a cylindrical shape as a whole. The piezoelectric element 41 is an example of a detection element that detects changes in pressure. The piezoelectric element 41 includes a piezoelectric body that exhibits a piezoelectric action of the piezoelectric longitudinal effect. The piezoelectric longitudinal effect means that when an external force is applied to a stress application axis in the same direction as the charge generation axis of the piezoelectric body, a charge is generated on the surface of the piezoelectric body in the charge generation axis direction. The piezoelectric element 41 is disposed inside the tip side housing 31 and on the rear end side of the diaphragm head 32. The piezoelectric element 41 is housed in the tip side housing 31 so that the center line direction is the direction of the stress application axis. Here, the piezoelectric element 41 is disposed inside the pressure member 49 provided inside the tip side housing 31 and inside the insulating pipe 60 provided inside the pressure member 49. The outer diameter of the piezoelectric element 41 is slightly smaller than the inner diameter of the insulating pipe 60 that houses the piezoelectric element 41 inside. The surface on the tip side of the piezoelectric element 41 is in contact with the surface on the rear end side of the tip electrode member 42. On the other hand, the rear end surface of the piezoelectric element 41 is in contact with the front end surface of the rear end electrode member 43. Also, the outer circumferential surface of the piezoelectric element 41 faces the inner circumferential surface of the insulating pipe 60. In this manner, by providing the insulating pipe 60 between the inner circumferential surface of the pressure applying member 49 and the outer circumferential surface of the piezoelectric element 41, the pressure applying member 49 and the piezoelectric element 41 are not in direct contact with each other.

次に、圧電素子41に圧電横効果を利用した場合を例示する。圧電横効果とは、圧電体の電荷発生軸に対して直交する位置にある応力印加軸に外力を加えると、電荷発生軸方向の圧電体の表面に電荷が発生することをいう。薄板状に薄く形成した圧電体を複数枚積層して構成しても良く、このように積層することで、圧電体に発生する電荷を効率的に集めてセンサの感度を上げることができる。圧電素子41で使用可能な圧電体としては、圧電縦効果及び圧電横効果を有するランガサイト系結晶(ランガサイト、ランガテイト、ランガナイト、LTGA)や水晶、ガリウムリン酸塩などを使用することを例示することができる。なお、本実施の形態の圧電素子41では、圧電体としてLTGA単結晶を用いている。 Next, an example will be given of the case where the piezoelectric transverse effect is used in the piezoelectric element 41. The piezoelectric transverse effect refers to the generation of charges on the surface of the piezoelectric body in the charge generation axis direction when an external force is applied to a stress application axis that is positioned perpendicular to the charge generation axis of the piezoelectric body. The piezoelectric body may be configured by stacking multiple thin piezoelectric bodies in a thin plate shape. By stacking in this manner, the charges generated in the piezoelectric body can be efficiently collected and the sensitivity of the sensor can be increased. Examples of piezoelectric bodies that can be used in the piezoelectric element 41 include Langasite-based crystals (Langasite, Langatate, Langanite, LTGA), quartz, gallium phosphate, etc., which have the piezoelectric longitudinal effect and the piezoelectric transverse effect. In the piezoelectric element 41 of this embodiment, a LTGA single crystal is used as the piezoelectric body.

(先端電極部材)
先端電極部材42は、全体として円柱状を呈する部材である。先端電極部材42は、圧力伝達部の一例である。この先端電極部材42は、導電性を有するとともに耐熱性が高いステンレス等の金属材料によって構成されている。また、先端電極部材42の先端側の面における中央部には、アルミナやジルコニア等を含む、絶縁性を呈するセラミックス材料をコートしてなる絶縁皮膜42aが形成されている。ここで、絶縁皮膜42aは、例えば円形状を呈しており、その直径は、ダイアフラムヘッド32の裏面に設けられた凸部32dの直径よりも大きく、加圧部材49の先端側に設けられた開口部の直径よりも小さい。
(Tip electrode member)
The tip electrode member 42 is a member having a cylindrical shape as a whole. The tip electrode member 42 is an example of a pressure transmitting part. The tip electrode member 42 is made of a metal material such as stainless steel that has electrical conductivity and high heat resistance. In addition, an insulating coating 42a is formed on the center of the tip side surface of the tip electrode member 42 by coating with an insulating ceramic material including alumina, zirconia, etc. Here, the insulating coating 42a has, for example, a circular shape, and its diameter is larger than the diameter of the protrusion 32d provided on the back surface of the diaphragm head 32 and smaller than the diameter of the opening provided on the tip side of the pressure member 49.

この先端電極部材42は、先端側筐体31の内部に設けられた加圧部材49の内側に配置されている。そして、先端電極部材42は、ダイアフラムヘッド32の後端側であって、圧電素子41の先端側に配置されている。ただし、先端電極部材42は、上述した圧電素子41とは異なり、絶縁パイプ60内に収容されていない。また、先端電極部材42の外径は、この先端電極部材42を内部に収容する加圧部材49の内径よりもわずかに小さい。そして、先端電極部材42の先端側の面のうち、絶縁皮膜42aが設けられている中央部の領域は、ダイアフラムヘッド32の裏面に設けられた凸部32dの後端側の面と接触している。また、先端電極部材42の先端側の面のうち、絶縁皮膜42aが設けられていない周縁部の領域は、加圧部材49の先端側に設けられた開口部の裏側の面に接触している。一方、先端電極部材42の後端側の面は、圧電素子41の先端側の面に接触している。また、先端電極部材42の外周面は、加圧部材49の内周面と対峙している。 The tip electrode member 42 is disposed inside the pressure member 49 provided inside the tip housing 31. The tip electrode member 42 is disposed on the rear end side of the diaphragm head 32 and on the tip side of the piezoelectric element 41. However, unlike the above-mentioned piezoelectric element 41, the tip electrode member 42 is not housed in the insulating pipe 60. The outer diameter of the tip electrode member 42 is slightly smaller than the inner diameter of the pressure member 49 that houses the tip electrode member 42 inside. The central area of the tip side surface of the tip electrode member 42 where the insulating coating 42a is provided is in contact with the rear end side surface of the convex portion 32d provided on the back surface of the diaphragm head 32. The peripheral area of the tip side surface of the tip electrode member 42 where the insulating coating 42a is not provided is in contact with the back side surface of the opening provided on the tip side of the pressure member 49. On the other hand, the rear end side surface of the tip electrode member 42 is in contact with the tip side surface of the piezoelectric element 41. In addition, the outer peripheral surface of the tip electrode member 42 faces the inner peripheral surface of the pressure member 49.

(第1後端電極部材)
後端電極部材43は、全体として円板状を呈する部材である。この後端電極部材43は、導電性を有するとともに耐熱性が高く、圧電素子41との熱膨張差が小さいステンレス等の金属材料によって構成されている。
(First rear electrode member)
The rear electrode member 43 is a member having an overall disk shape and is made of a metal material such as stainless steel that is conductive, has high heat resistance, and has a small thermal expansion difference with respect to the piezoelectric element 41.

この後端電極部材43は、先端側筐体31の内部に設けられた加圧部材49の内側に配置されている。そして、後端電極部材43は、圧電素子41の後端側に配置されている。ここで、後端電極部材43は、加圧部材49の内部に設けられた絶縁パイプ60の内側に配置されている。また、後端電極部材43の外径は、圧電素子41の外径とほぼ同じであって、絶縁パイプ60の内径よりもわずかに小さい。そして、後端電極部材43の先端側の面は、圧電素子41の後端側の面と接触している。一方、後端電極部材43の後端側の面は、絶縁リング45の先端側の面と接触している。また、後端電極部材43の外周面は、絶縁パイプ60の内周面と対峙している。このように、加圧部材49の内周面と後端電極部材43の外周面との間に、絶縁パイプ60を設けることにより、加圧部材49および後端電極部材43は、直接には接触しない。 The rear electrode member 43 is disposed inside the pressure member 49 provided inside the tip housing 31. The rear electrode member 43 is disposed on the rear end side of the piezoelectric element 41. Here, the rear electrode member 43 is disposed inside the insulating pipe 60 provided inside the pressure member 49. The outer diameter of the rear electrode member 43 is approximately the same as the outer diameter of the piezoelectric element 41 and is slightly smaller than the inner diameter of the insulating pipe 60. The tip side surface of the rear electrode member 43 is in contact with the rear end side surface of the piezoelectric element 41. On the other hand, the rear end side surface of the rear electrode member 43 is in contact with the tip side surface of the insulating ring 45. The outer peripheral surface of the rear electrode member 43 faces the inner peripheral surface of the insulating pipe 60. In this way, by providing the insulating pipe 60 between the inner peripheral surface of the pressure member 49 and the outer peripheral surface of the rear electrode member 43, the pressure member 49 and the rear electrode member 43 do not come into direct contact.

(絶縁リング)
絶縁リング45は、全体として環状を呈する部材である。この絶縁リング45は、絶縁性を有するとともに耐熱性が高いアルミナ等のセラミックス材料によって構成されている。
(insulation ring)
The insulating ring 45 is an annular member as a whole, and is made of a ceramic material such as alumina that has insulating properties and high heat resistance.

この絶縁リング45は、先端側筐体31の内部に設けられた加圧部材49の内側に配置されている。そして、絶縁リング45は、後端電極部材43の後端側であって、支持部材50の先端側に位置している。ここで、絶縁リング45に設けられた貫通孔の内部には、伝導部材47の先端の第2凸部47bおよび第2凸部47bに装着された第1コイルバネ46が配置されている。また、絶縁リング45の外径は、加圧部材49の内径よりもわずかに小さい。さらに、絶縁リング45の貫通孔の内径は、第1コイルバネ46の外径よりもわずかに大きい。そして、絶縁リング45の先端側の面は、後端電極部材43の後端側の面と接触している。一方、絶縁リング45の後端側の面は、支持部材50の先端側の面と接触している。また、絶縁リング45の外周面は、加圧部材49の内周面と対峙している。さらに、絶縁リング45の内周面は、第1コイルバネ46と対峙している。 The insulating ring 45 is disposed inside the pressure member 49 provided inside the tip side housing 31. The insulating ring 45 is located on the rear end side of the rear electrode member 43 and on the tip side of the support member 50. Here, the second convex portion 47b at the tip of the conductive member 47 and the first coil spring 46 attached to the second convex portion 47b are disposed inside the through hole provided in the insulating ring 45. The outer diameter of the insulating ring 45 is slightly smaller than the inner diameter of the pressure member 49. Furthermore, the inner diameter of the through hole of the insulating ring 45 is slightly larger than the outer diameter of the first coil spring 46. The tip side surface of the insulating ring 45 is in contact with the rear end side surface of the rear electrode member 43. On the other hand, the rear end side surface of the insulating ring 45 is in contact with the tip side surface of the support member 50. The outer peripheral surface of the insulating ring 45 faces the inner peripheral surface of the pressure member 49. Furthermore, the inner surface of the insulating ring 45 faces the first coil spring 46.

(第1コイルバネ)
第1コイルバネ46は、全体として螺旋状を呈する部材であって、中心線方向に伸縮する。この第1コイルバネ46は、導電性を有するとともに先端側筐体31よりも導電性が高い真ちゅう等の金属材料によって構成されており、その表面には金めっきが施されている。
(First coil spring)
The first coil spring 46 is a member having a helical shape as a whole, and expands and contracts in the direction of the center line. The first coil spring 46 is made of a metal material such as brass that is conductive and has a higher conductivity than the distal end housing 31, and its surface is gold plated.

この第1コイルバネ46は、先端側筐体31の内部に設けられており、加圧部材49の内側であって支持部材50の内側に配置されている。そして、第1コイルバネ46は、後端電極部材43の後端側であって、伝導部材47の先端側に配置されている。すなわち、第1コイルバネ46は、後端電極部材43と伝導部材47とに跨って配置されている。ここで、第1コイルバネ46の先端側は、絶縁リング45の貫通孔内で後端電極部材43の後端側の面と接触しており、第1コイルバネ46の後端側は、伝導部材47の先端側に設けられた第2凸部47bに巻き回されている。そして、第1コイルバネ46の内径は、伝導部材47の先端側に設けられた第2凸部47bの外径よりも大きく且つ第1凸部47aの内径よりも小さい。一方、第1コイルバネ46の外径は、絶縁リング45の貫通孔の内径よりも小さい。その結果、第1コイルバネ46の先端は、絶縁リング45の貫通孔内で後端電極部材43の後端側の面と突き当たっている。これに対し、第1コイルバネ46の後端は、伝導部材47における第1凸部47aと第2凸部47bとの境界部(段差部)に突き当たっている。また、第1コイルバネ46の絶縁リング45から露出した部分の外周は、エアギャップを介して支持部材50の内周面と対峙している。このように、支持部材50の内周面と第1コイルバネ46との間に、エアギャップを設けることで、支持部材50と第1コイルバネ46とは、直接には接触しない。 The first coil spring 46 is provided inside the tip side housing 31 and is disposed inside the pressure member 49 and inside the support member 50. The first coil spring 46 is disposed on the rear end side of the rear electrode member 43 and on the tip side of the conductive member 47. That is, the first coil spring 46 is disposed across the rear electrode member 43 and the conductive member 47. Here, the tip side of the first coil spring 46 is in contact with the surface of the rear end side of the rear electrode member 43 in the through hole of the insulating ring 45, and the rear end side of the first coil spring 46 is wound around the second convex portion 47b provided on the tip side of the conductive member 47. The inner diameter of the first coil spring 46 is larger than the outer diameter of the second convex portion 47b provided on the tip side of the conductive member 47 and smaller than the inner diameter of the first convex portion 47a. On the other hand, the outer diameter of the first coil spring 46 is smaller than the inner diameter of the through hole of the insulating ring 45. As a result, the tip of the first coil spring 46 abuts against the surface of the rear end electrode member 43 inside the through hole of the insulating ring 45. In contrast, the rear end of the first coil spring 46 abuts against the boundary (step) between the first convex portion 47a and the second convex portion 47b of the conductive member 47. In addition, the outer periphery of the portion of the first coil spring 46 exposed from the insulating ring 45 faces the inner circumferential surface of the support member 50 via an air gap. In this way, by providing an air gap between the inner circumferential surface of the support member 50 and the first coil spring 46, the support member 50 and the first coil spring 46 do not come into direct contact with each other.

(伝導部材)
伝導部材47は、全体として棒状を呈する部材である。この伝導部材47は、導電性を有する真ちゅう等の金属材料によって構成されており、その表面には金めっきが施されている。この伝導部材47には、その先端に、上述した第1凸部47aおよび第2凸部47bが設けられており、その後端に、中心線方向の中央部よりも直径が小さく且つ後端側に向かって突出する後端側凸部47cが設けられている。
(Conductive member)
The conductive member 47 is a rod-shaped member as a whole. The conductive member 47 is made of a metal material such as brass having electrical conductivity, and its surface is gold-plated. The conductive member 47 is provided at its tip with the above-mentioned first convex portion 47a and second convex portion 47b, and at its rear end with a rear end side convex portion 47c that has a smaller diameter than the central portion in the center line direction and that protrudes toward the rear end side.

この伝導部材47は、先端側筐体31の内部に設けられており、先端部および後端部(後端側凸部47c)を除くほぼすべての部位が、保持部材48の内部に配置されている。また、伝導部材47の先端側は加圧部材49の内側に、伝導部材47の後端側は収容部材52の内側に、先端側と後端側との間に位置する中間部は第2コイルバネ51の内側に、それぞれ位置している。そして、伝導部材47は、第1コイルバネ46の後端側であって、回路基板53の先端側に配置されている。この伝導部材47は、保持部材48に中心線方向に沿って設けられた貫通孔を貫通するように配置されている。そして、伝導部材47の先端部(保持部材48に覆われていない部位)の外径は、支持部材50の内径よりも小さい。さらに、伝導部材47の後端部(後端側凸部47c)の外径は、保持部材48に設けられた保持部の内幅とほぼ同じである。さらにまた、伝導部材47の中心線方向中央部の外径は、保持部材48の内径とほぼ同じである。そして、伝導部材47の第2凸部47bには、第1コイルバネ46の後端側が装着されることで、第1コイルバネ46と接触している。一方、伝導部材47の後端側凸部47cは、保持部材48に設けられた保持部にはめ込まれている。また、伝導部材47の先端部の外周面は、エアギャップを介して支持部材50の内周面と対峙している。さらに、伝導部材47の中心線方向中央部の外周面は、保持部材48およびエアギャップを介して第2コイルバネ51と対峙している。さらにまた、伝導部材47の後端部の外周面は、エアギャップおよび保持部材48を介して収容部材52の外周面と対峙している。このように、支持部材50の内周面と伝導部材47の外周面との間に、エアギャップおよび保持部材48を設けることにより、支持部材50および伝導部材47は、直接には接触しない。また、第2コイルバネ51の内周面と伝導部材47の外周面との間に、エアギャップおよび保持部材48を設けることにより、第2コイルバネ51および伝導部材47は、直接には接触しない。さらに、収容部材52の内周面と伝導部材47の外周面との間に、エアギャップを設けることにより、収容部材52および伝導部材47は、直接には接触しない。 The conductive member 47 is provided inside the tip housing 31, and almost all parts except the tip and rear end (rear end convex part 47c) are arranged inside the holding member 48. The tip side of the conductive member 47 is located inside the pressure member 49, the rear end side of the conductive member 47 is located inside the housing member 52, and the intermediate part located between the tip side and the rear end side is located inside the second coil spring 51. The conductive member 47 is located on the rear end side of the first coil spring 46 and on the tip side of the circuit board 53. The conductive member 47 is arranged so as to pass through a through hole provided in the holding member 48 along the center line direction. The outer diameter of the tip part (part not covered by the holding member 48) of the conductive member 47 is smaller than the inner diameter of the support member 50. Furthermore, the outer diameter of the rear end part (rear end convex part 47c) of the conductive member 47 is approximately the same as the inner width of the holding part provided in the holding member 48. Furthermore, the outer diameter of the central portion of the conductive member 47 in the center line direction is substantially the same as the inner diameter of the holding member 48. The rear end side of the first coil spring 46 is attached to the second protrusion 47b of the conductive member 47, so that the conductive member 47 is in contact with the first coil spring 46. Meanwhile, the rear end side protrusion 47c of the conductive member 47 is fitted into a holding portion provided on the holding member 48. The outer peripheral surface of the tip end of the conductive member 47 faces the inner peripheral surface of the support member 50 via an air gap. Furthermore, the outer peripheral surface of the central portion of the conductive member 47 in the center line direction faces the second coil spring 51 via the holding member 48 and an air gap. Furthermore, the outer peripheral surface of the rear end of the conductive member 47 faces the outer peripheral surface of the accommodation member 52 via the air gap and the holding member 48. In this way, by providing the air gap and the holding member 48 between the inner peripheral surface of the support member 50 and the outer peripheral surface of the conductive member 47, the support member 50 and the conductive member 47 do not come into direct contact with each other. In addition, by providing an air gap and a retaining member 48 between the inner peripheral surface of the second coil spring 51 and the outer peripheral surface of the conductive member 47, the second coil spring 51 and the conductive member 47 do not come into direct contact. Furthermore, by providing an air gap between the inner peripheral surface of the housing member 52 and the outer peripheral surface of the conductive member 47, the housing member 52 and the conductive member 47 do not come into direct contact.

(保持部材)
保持部材48は、先端側に位置し筒状を呈する部位と、後端側に位置し板状を呈する部位とを、一体化してなる部材である。この保持部材48は、絶縁性を有するPPT(Polypropylene Terephthalate:ポリプロピレンテレフタレート)等の合成樹脂材料によって構成された基材と、導電性を有する銅等の金属材料で構成された配線および端子等とを含んでいる。この保持部材48の先端側に位置する筒状の部位には、伝導部材47が収容され、この保持部材48の後端側に位置する板状の部位には、回路基板53が装着される。このように、保持部材48は、伝導部材47および回路基板53を保持する機能を有している。
(Holding member)
The holding member 48 is a member formed by integrating a cylindrical portion located at the front end side and a plate-shaped portion located at the rear end side. The holding member 48 includes a base material made of a synthetic resin material such as PPT (Polypropylene Terephthalate) having insulating properties, and wiring and terminals made of a metal material such as copper having electrical conductivity. The cylindrical portion located at the front end side of the holding member 48 houses the conductive member 47, and the plate-shaped portion located at the rear end side of the holding member 48 is fitted with a circuit board 53. In this way, the holding member 48 has the function of holding the conductive member 47 and the circuit board 53.

保持部材48のうち、支持部材50、第2コイルバネ51および収容部材52と対向する部位(外周面)は、合成樹脂材料で構成されており、この部位に金属材料を露出させないようになっている。また、保持部材48のうち、伝導部材47の先端部と後端部との間に位置する中間部と対向する部位(内周面)も、合成樹脂材料で構成されており、この部位に金属材料を露出させないようになっている。また、保持部材48における筒状部の後端側には、金属材料で構成され、伝導部材47の後端側凸部47cをはめ込んで保持する保持部が設けられている。この保持部には、回路基板53の信号入力端子(図示せず)と電気的に接続するための配線が取り付けられている。 The portion (outer circumferential surface) of the holding member 48 that faces the support member 50, the second coil spring 51, and the housing member 52 is made of synthetic resin material so that no metal material is exposed at this portion. In addition, the portion (inner circumferential surface) of the holding member 48 that faces the intermediate portion located between the front end and rear end of the conductive member 47 is also made of synthetic resin material so that no metal material is exposed at this portion. In addition, a holding portion made of metal material is provided at the rear end side of the cylindrical portion of the holding member 48, into which the rear end side protrusion 47c of the conductive member 47 is fitted and held. Wiring is attached to this holding portion for electrical connection with the signal input terminal (not shown) of the circuit board 53.

この保持部材48は、先端側筐体31の内部と後端側筐体33の内部とに跨って設けられている。また、保持部材48の先端側は加圧部材49の内側に、伝導部材47の後端側は収容部材52の内側に、先端側と後端側との間に位置する中間部は第2コイルバネ51の内側に、それぞれ位置している。そして、保持部材48は、絶縁リング45の後端側であって、接続部材54の先端側に配置されている。 The holding member 48 is provided across the interior of the front housing 31 and the interior of the rear housing 33. The front side of the holding member 48 is located inside the pressure member 49, the rear side of the conductive member 47 is located inside the housing member 52, and the intermediate portion located between the front and rear sides is located inside the second coil spring 51. The holding member 48 is located on the rear side of the insulating ring 45, on the front side of the connecting member 54.

保持部材48の先端側に位置する筒状の部位の外径は、支持部材50の内径よりも小さく、この被覆部材の後端側に位置する板状の部位の外径は、この部位における収容部材52の内径よりも小さい。また、保持部材48の筒状の部位の先端側の外周面は、エアギャップを介して支持部材50の内周面および第2コイルバネ51の内周面に対峙している。さらに、保持部材48の筒状の部位の後端側の外周面および板状部の部位の外周面は、収容部材52の内周面に接触しあるいはエアギャップを介して収容部材52の内周面に対峙している。 The outer diameter of the cylindrical portion located at the tip end of the holding member 48 is smaller than the inner diameter of the support member 50, and the outer diameter of the plate-like portion located at the rear end of this covering member is smaller than the inner diameter of the housing member 52 at this portion. In addition, the outer peripheral surface at the tip end of the cylindrical portion of the holding member 48 faces the inner peripheral surface of the support member 50 and the inner peripheral surface of the second coil spring 51 via an air gap. Furthermore, the outer peripheral surface at the rear end of the cylindrical portion of the holding member 48 and the outer peripheral surface of the plate-like portion are in contact with the inner peripheral surface of the housing member 52 or face the inner peripheral surface of the housing member 52 via an air gap.

(加圧部材)
加圧部材49は、全体として筒状を呈する部材である。この加圧部材49は、導電性を有するとともに耐熱性が高いステンレス等の金属材料によって構成されている。加圧部材49は、第1筐体の一例である。
(Pressure Member)
The pressure member 49 is a member having an overall cylindrical shape and is made of a metal material such as stainless steel that has electrical conductivity and high heat resistance. The pressure member 49 is an example of a first housing.

図5は、加圧部材49の斜視図である。以下では、図5も参照しつつ、加圧部材49の構成について説明を行う。なお、図5においては、図中左下側が先端側となり、図中右上側が後端側となる。 Figure 5 is a perspective view of the pressure member 49. Below, the configuration of the pressure member 49 will be described with reference to Figure 5. Note that in Figure 5, the lower left side is the leading end side, and the upper right side is the trailing end side.

本実施の形態の加圧部材49は、最も先端側に位置するとともに先端には開口部が設けられる先端筒状部491と、先端筒状部491の後端側に配置される後端筒状部493と、後端筒状部493に設けられた円環状の突出部492とを備える。この加圧部材49では、先端筒状部491および後端筒状部493よりも突出部492の外径が大きくなっており、先端筒状部491よりも後端筒状部493の外径が大きくなっている。加圧部材49において、先端筒状部491と後端筒状部493との境界部には、段差部49aが形成される。より詳しくは、段差部49aは、後端筒状部493における突出部492よりも先端側の部位のうち最も先端側に位置し、外径が異なる先端筒状部491と後端筒状部493との間の段差をなす、先端側を向いた面である。また、突出部492の先端側に第1押さえ面49bが設けられ、突出部492の後端側に第2押さえ面49cが設けられている。なお、加圧部材49の内径は、先端に設けられた開口部を除き、同じ大きさである。このため、この加圧部材49においては、後端筒状部493の肉厚が先端筒状部491の肉厚よりも大きくなっている。したがって、加圧部材49では、先端筒状部491が後端筒状部493よりも撓みやすく(バネとして機能しやすく)なっている。また、後端筒状部493において、突出部492の肉厚は、突出部492以外の部位の肉厚よりも大きい。さらに、詳しくは後述するが、後端筒状部493における突出部492の後端側には、肉厚の薄い部位である退避部494が形成される。 The pressure member 49 of this embodiment includes a tip tubular portion 491 located at the most distal end side and having an opening at the tip, a rear end tubular portion 493 located at the rear end side of the tip tubular portion 491, and an annular protruding portion 492 provided on the rear end tubular portion 493. In this pressure member 49, the outer diameter of the protruding portion 492 is larger than that of the tip tubular portion 491 and the rear end tubular portion 493, and the outer diameter of the rear end tubular portion 493 is larger than that of the tip tubular portion 491. In the pressure member 49, a step portion 49a is formed at the boundary between the tip tubular portion 491 and the rear end tubular portion 493. More specifically, the step portion 49a is located at the most distal end side of the portion on the tip side of the protruding portion 492 in the rear end tubular portion 493, and is a surface facing the tip side that forms a step between the tip tubular portion 491 and the rear end tubular portion 493, which have different outer diameters. In addition, a first pressing surface 49b is provided on the tip side of the protruding portion 492, and a second pressing surface 49c is provided on the rear end side of the protruding portion 492. The inner diameter of the pressure member 49 is the same size except for the opening provided at the tip. Therefore, in this pressure member 49, the thickness of the rear end tubular portion 493 is greater than the thickness of the tip tubular portion 491. Therefore, in the pressure member 49, the tip tubular portion 491 is more flexible (more likely to function as a spring) than the rear end tubular portion 493. In addition, in the rear end tubular portion 493, the thickness of the protruding portion 492 is greater than the thickness of the portion other than the protruding portion 492. Furthermore, as will be described in detail later, a retracted portion 494, which is a thin portion, is formed on the rear end side of the protruding portion 492 in the rear end tubular portion 493.

この加圧部材49は、先端側筐体31の内部に、先端筒状部491が先端側となるように設けられている。加圧部材49の内部には、圧電素子41、先端電極部材42、後端電極部材43、絶縁リング45、支持部材50の先端側、絶縁パイプ60、第1コイルバネ46、伝導部材47の先端側および保持部材48の先端側が収容されている。そして、加圧部材49は、ダイアフラムヘッド32の後端側であって、収容部材52の先端側に配置されている。また、加圧部材49の外径は、先端筒状部491と突出部492と後端筒状部493とで異なるが、すべての位置において先端側筐体31の内径よりも小さい。さらに、加圧部材49の内径は、先端電極部材42、絶縁パイプ60(圧電素子41、後端電極部材43、絶縁リング45)と対峙する部位では、これらの外径よりもわずかに大きく、支持部材50と対峙する部位では、支持部材50の外径とほぼ同じである。 The pressure member 49 is provided inside the tip housing 31 so that the tip tubular portion 491 is at the tip side. The pressure member 49 contains the piezoelectric element 41, the tip electrode member 42, the rear electrode member 43, the insulating ring 45, the tip side of the support member 50, the insulating pipe 60, the first coil spring 46, the tip side of the conductive member 47, and the tip side of the holding member 48. The pressure member 49 is disposed on the rear end side of the diaphragm head 32 and on the tip side of the housing member 52. The outer diameter of the pressure member 49 is different between the tip tubular portion 491, the protruding portion 492, and the rear tubular portion 493, but is smaller than the inner diameter of the tip housing 31 at all positions. Furthermore, the inner diameter of the pressure member 49 is slightly larger than the outer diameter of the tip electrode member 42 and the insulating pipe 60 (piezoelectric element 41, rear electrode member 43, insulating ring 45) at the portion facing the tip electrode member 42 and the insulating pipe 60, and is approximately the same as the outer diameter of the support member 50 at the portion facing the support member 50.

ここで、加圧部材49の後端側に設けられた後端筒状部493の外周面と第1先端側筐体311の後端側の内周面との間には、突き当てパイプ57が配置されている。突き当てパイプ57は、固定部材の一例である。詳しくは後述するが、加圧部材49の突出部492が、第4絶縁部材64および第5絶縁部材65を介して、第1先端側筐体311の内側段差部311bと突き当てパイプ57とに挟まれることにより、加圧部材49が先端側筐体31の内部に固定される。 Here, a butt pipe 57 is disposed between the outer peripheral surface of the rear end tubular portion 493 provided on the rear end side of the pressure member 49 and the inner peripheral surface of the rear end side of the first tip side housing 311. The butt pipe 57 is an example of a fixing member. As will be described in detail later, the protruding portion 492 of the pressure member 49 is sandwiched between the inner step portion 311b of the first tip side housing 311 and the butt pipe 57 via the fourth insulating member 64 and the fifth insulating member 65, whereby the pressure member 49 is fixed inside the tip side housing 31.

そして、加圧部材49における先端筒状部491の先端側の面(開口部の表側の面)は、エアギャップを介してダイアフラムヘッド32の凹部32cと対峙している。一方、後端筒状部493の後端側は、エアギャップを介して第1絶縁部材61と対峙している。また、先端筒状部491の外周面は、エアギャップを介して第1先端側筐体311の内周面と対峙し、段差部49aは、エアギャップを介して第1先端側筐体311の内側段差部311bと対峙している。また、加圧部材49における突出部492の第1押さえ面49bおよび第1押さえ面49bの先端側に位置する後端筒状部493の外周面は、先端筒状部491の内側段差部311bに接して配置される第4絶縁部材64と対峙している。また、突出部492の外周面は、エアギャップを介して第1先端側筐体311の内周面と対峙している。また、突出部492の第2押さえ面49cおよび第2押さえ面49cの後端側に隣接する部位における後端筒状部493の外周面は、第5絶縁部材65と対峙している。また、後端筒状部493の外周面は、エアギャップを介して突き当てパイプ57の内周面と対峙している。このように、加圧部材49の外周面と第1先端側筐体311の内周面および突き当てパイプ57の内周面との間に、エアギャップ、第4絶縁部材64および第5絶縁部材65を設けることにより、加圧部材49と、第1先端側筐体311および突き当てパイプ57とは、直接には接触しない。 The surface (front surface of the opening) of the tip end tubular portion 491 of the pressure member 49 faces the recess 32c of the diaphragm head 32 through an air gap. On the other hand, the rear end side of the rear end tubular portion 493 faces the first insulating member 61 through an air gap. The outer peripheral surface of the tip end tubular portion 491 faces the inner peripheral surface of the first tip side housing 311 through an air gap, and the step portion 49a faces the inner step portion 311b of the first tip side housing 311 through an air gap. The first pressing surface 49b of the protrusion 492 of the pressure member 49 and the outer peripheral surface of the rear end tubular portion 493 located on the tip side of the first pressing surface 49b face the fourth insulating member 64 arranged in contact with the inner step portion 311b of the tip end tubular portion 491. The outer peripheral surface of the protruding portion 492 faces the inner peripheral surface of the first tip side housing 311 through an air gap. The outer peripheral surface of the rear end tubular portion 493 at the portion adjacent to the second pressing surface 49c of the protruding portion 492 and the rear end side of the second pressing surface 49c faces the fifth insulating member 65. The outer peripheral surface of the rear end tubular portion 493 faces the inner peripheral surface of the butt pipe 57 through an air gap. In this way, by providing the air gap, the fourth insulating member 64, and the fifth insulating member 65 between the outer peripheral surface of the pressure member 49 and the inner peripheral surface of the first tip side housing 311 and the inner peripheral surface of the butt pipe 57, the pressure member 49 does not directly contact the first tip side housing 311 and the butt pipe 57.

(支持部材)
支持部材50は、全体として筒状を呈する部材である。この支持部材50は、導電性を有するとともに耐熱性が高いステンレス等の金属材料によって構成されている。
(Support member)
The support member 50 is a member having an overall cylindrical shape and is made of a metal material such as stainless steel that has electrical conductivity and high heat resistance.

この支持部材50は、先端側筐体31の内部に設けられており、その先端側は加圧部材49の内側に位置し、その後端側は加圧部材49の外側に突出している。また、支持部材50は、その内部に、第1コイルバネ46、伝導部材47の先端側および保持部材48の先端側を収容している。そして、支持部材50は、絶縁リング45の後端側であって、収容部材52の先端側に配置されている。また、支持部材50の外径は、加圧部材49の内径とほぼ同じである。さらに、支持部材50の内径は、中心線方向の位置によって異なるが、第1コイルバネ46と対峙する部位においては第1コイルバネ46の外径よりも大きく、伝導部材47と対峙する部位においては伝導部材47の外径よりも大きく、保持部材48と対峙する部位においては保持部材48の外径よりも大きい。そして、支持部材50の先端側の面(開口部の表側の面)は、絶縁リング45の後端側の面と接触している。一方、支持部材50の後端側の面は、エアギャップを介して収容部材52と対峙している。また、支持部材50の外周面の先端側は、加圧部材49の内周面と接触しており、支持部材50の外周面の後端側は、第2コイルバネ51の先端側と接触している。ここで、加圧部材49における後端側の内周面と、この部位と対峙する支持部材50の外周面とを、一周にわたってレーザ溶接することで得た第2溶接部59によって、加圧部材49と支持部材50とを接合し固定している。これに対し、支持部材50の内周面は、エアギャップを介して第1コイルバネ46、伝導部材47および保持部材48と対峙している。このように、支持部材50の内周面と、第1コイルバネ46、伝導部材47および保持部材48との間に、エアギャップを設けることにより、支持部材50と、第1コイルバネ46、伝導部材47および保持部材48とは、直接には接触しない。 The support member 50 is provided inside the tip side housing 31, and its tip side is located inside the pressure member 49, and its rear end side protrudes outside the pressure member 49. The support member 50 also houses the first coil spring 46, the tip side of the conductive member 47, and the tip side of the holding member 48 inside. The support member 50 is located on the rear end side of the insulating ring 45 and on the tip side of the housing member 52. The outer diameter of the support member 50 is approximately the same as the inner diameter of the pressure member 49. The inner diameter of the support member 50 varies depending on the position in the center line direction, but is larger than the outer diameter of the first coil spring 46 at the part facing the first coil spring 46, larger than the outer diameter of the conductive member 47 at the part facing the conductive member 47, and larger than the outer diameter of the holding member 48 at the part facing the holding member 48. The surface on the tip side of the support member 50 (the surface on the front side of the opening) is in contact with the surface on the rear end side of the insulating ring 45. On the other hand, the rear end side surface of the support member 50 faces the housing member 52 via an air gap. The tip side of the outer peripheral surface of the support member 50 is in contact with the inner peripheral surface of the pressure member 49, and the rear end side of the outer peripheral surface of the support member 50 is in contact with the tip side of the second coil spring 51. Here, the pressure member 49 and the support member 50 are joined and fixed by a second welded portion 59 obtained by laser welding the inner peripheral surface of the rear end side of the pressure member 49 and the outer peripheral surface of the support member 50 facing this portion around the circumference. On the other hand, the inner peripheral surface of the support member 50 faces the first coil spring 46, the conductive member 47, and the holding member 48 via an air gap. In this way, by providing an air gap between the inner peripheral surface of the support member 50 and the first coil spring 46, the conductive member 47, and the holding member 48, the support member 50 does not directly contact the first coil spring 46, the conductive member 47, and the holding member 48.

(第2コイルバネ)
第2コイルバネ51は、全体として螺旋状を呈する部材であって、中心線方向に伸縮する。この第2コイルバネ51は、導電性を有するとともに耐熱性が高いステンレス等の金属材料によって構成されており、その表面には金めっきが施されている。このように、本実施の形態では、第1コイルバネ46と第2コイルバネ51とで、材質を異ならせている。
(Second coil spring)
The second coil spring 51 is a member having a helical shape as a whole, and expands and contracts in the direction of the center line. The second coil spring 51 is made of a metal material such as stainless steel that is conductive and highly heat resistant, and its surface is gold plated. In this manner, in this embodiment, the first coil spring 46 and the second coil spring 51 are made of different materials.

この第2コイルバネ51は、先端側筐体31の内部に設けられており、その先端側は支持部材50における後端側且つ外側に、その後端側は収容部材52における先端側且つ外側に、それぞれ位置している。すなわち、第2コイルバネ51は、支持部材50と収容部材52とに跨って配置されている。また、第2コイルバネ51の外径は、先端側筐体31(より具体的には第2先端側筐体312)の内径よりも小さい。さらに、第2コイルバネ51の内径は、支持部材50の後端側の外径および収容部材52の先端側の外径よりもわずかに小さい。そして、第2コイルバネ51の外周は、エアギャップを介して先端側筐体31の内周面と対峙している。このように、第2コイルバネ51の外周と先端側筐体31の内周面との間に、エアギャップを設けることで、第2コイルバネ51と先端側筐体31とは、直接には接触しない。 The second coil spring 51 is provided inside the tip housing 31, and its tip side is located on the rear end side and outside of the support member 50, and its rear end side is located on the tip side and outside of the storage member 52. That is, the second coil spring 51 is arranged across the support member 50 and the storage member 52. The outer diameter of the second coil spring 51 is smaller than the inner diameter of the tip housing 31 (more specifically, the second tip housing 312). Furthermore, the inner diameter of the second coil spring 51 is slightly smaller than the outer diameter of the rear end side of the support member 50 and the outer diameter of the tip side of the storage member 52. The outer periphery of the second coil spring 51 faces the inner peripheral surface of the tip housing 31 via an air gap. In this way, by providing an air gap between the outer periphery of the second coil spring 51 and the inner peripheral surface of the tip housing 31, the second coil spring 51 and the tip housing 31 do not come into direct contact.

(収容部材)
収容部材52は、全体として筒状を呈する部材である。この収容部材52は、導電性を有するとともに先端側筐体31よりも導電性が高い真ちゅうやステンレス等の金属材料によって構成されており、その表面には金めっきが施されている。
(Housing member)
The housing member 52 is a member having a cylindrical shape as a whole. The housing member 52 is made of a metal material such as brass or stainless steel that is conductive and has a higher conductivity than the tip side housing 31, and the surface of the housing member 52 is gold plated.

図6は、収容部材52の斜視図である。以下では、図6も参照しつつ、収容部材52の構成について説明を行う。なお、図6においても、図中左下側が先端側となり、図中右上側が後端側となる。 Figure 6 is a perspective view of the storage member 52. Below, the configuration of the storage member 52 will be described with reference to Figure 6. Note that in Figure 6 as well, the lower left side of the figure is the leading end side, and the upper right side of the figure is the trailing end side.

本実施の形態の収容部材52は、最も先端側に位置するとともに先端には開口部が設けられる第1筒状部521と、第1筒状部521の後端側に配置される第2筒状部522と、第2筒状部522の後端側に配置される第3筒状部523と、第3筒状部523の後端側に配置される第4筒状部524とを備えている。この収容部材52では、第1筒状部521、第2筒状部522、第3筒状部523および第4筒状部524の順で、外径が大きくなっている。すなわち、この収容部材52では、先端側から後端側に向かって、階段状(4段)に直径が大きくなっている。そして、収容部材52は、第1筒状部521と第2筒状部522との境界部において両者を接続する第1段差部52aと、第2筒状部522と第3筒状部523との境界部において両者を接続する第2段差部52bと、第3筒状部523と第4筒状部524との境界部において両者を接続する第3段差部52cとをさらに備えている。なお、この収容部材52は、上述した加圧部材49とは異なり、その肉厚が、中心線方向の位置によらず一定の大きさに設定されている。このため、加圧部材49では、第1筒状部521、第2筒状部522、第3筒状部523および第4筒状部524の順で、内径が大きくなっている。 The storage member 52 of this embodiment includes a first cylindrical portion 521 located at the most distal end side and having an opening at the distal end, a second cylindrical portion 522 arranged at the rear end side of the first cylindrical portion 521, a third cylindrical portion 523 arranged at the rear end side of the second cylindrical portion 522, and a fourth cylindrical portion 524 arranged at the rear end side of the third cylindrical portion 523. In this storage member 52, the outer diameter increases in the order of the first cylindrical portion 521, the second cylindrical portion 522, the third cylindrical portion 523, and the fourth cylindrical portion 524. That is, in this storage member 52, the diameter increases in a stepped manner (four steps) from the distal end side to the rear end side. The housing member 52 further includes a first step 52a that connects the first cylindrical portion 521 and the second cylindrical portion 522 at the boundary between them, a second step 52b that connects the second cylindrical portion 522 and the third cylindrical portion 523 at the boundary between them, and a third step 52c that connects the third cylindrical portion 523 and the fourth cylindrical portion 524 at the boundary between them. Unlike the above-mentioned pressure member 49, the housing member 52 has a constant wall thickness regardless of the position in the center line direction. Therefore, in the pressure member 49, the inner diameter increases in the order of the first cylindrical portion 521, the second cylindrical portion 522, the third cylindrical portion 523, and the fourth cylindrical portion 524.

この収容部材52は、先端側筐体31の内部と後端側筐体33の内部とに跨って、第1筒状部521が先端側となるように設けられている。収容部材52の内部には、伝導部材47の後端側、保持部材48の後端側、回路基板53および接地板55が収容されている。そして、収容部材52は、支持部材50の後端側であって、接続部材54の先端側に配置されている。また、収容部材52の外径は、第1筒状部521と第2筒状部522と第3筒状部523と第4筒状部524とで異なるが、すべての位置において先端側筐体31および後端側筐体33の内径よりも小さい。さらに、収容部材52の内径も、第1筒状部521と第2筒状部522と第3筒状部523と第4筒状部524とで異なるが、内部に収容される各部材の外径よりも大きい。 The housing member 52 is provided so that the first cylindrical portion 521 is at the tip side, spanning the inside of the front end housing 31 and the inside of the rear end housing 33. The rear end side of the conductive member 47, the rear end side of the holding member 48, the circuit board 53, and the ground plate 55 are housed inside the housing member 52. The housing member 52 is disposed at the rear end side of the support member 50 and at the tip side of the connection member 54. The outer diameter of the housing member 52 is different between the first cylindrical portion 521, the second cylindrical portion 522, the third cylindrical portion 523, and the fourth cylindrical portion 524, but is smaller than the inner diameter of the front end housing 31 and the rear end housing 33 at all positions. The inner diameter of the housing member 52 is also different between the first cylindrical portion 521, the second cylindrical portion 522, the third cylindrical portion 523, and the fourth cylindrical portion 524, but is larger than the outer diameter of each member housed inside.

ここで、収容部材52における第2筒状部522の後端側および第2段差部52bと、第2先端側筐体312の内周面との間には、第1絶縁部材61が配置されている。また、収容部材52における第3筒状部523の後端側および第3段差部52cと、第2先端側筐体312の内周面との間には、第2絶縁部材62が配置されている。さらに、収容部材52における第4筒状部524と第1後端側筐体331との間には、第3絶縁部材63が配置されている。 Here, a first insulating member 61 is disposed between the rear end side and second step portion 52b of the second cylindrical portion 522 in the housing member 52 and the inner peripheral surface of the second tip side housing 312. Also, a second insulating member 62 is disposed between the rear end side and third step portion 52c of the third cylindrical portion 523 in the housing member 52 and the inner peripheral surface of the second tip side housing 312. Furthermore, a third insulating member 63 is disposed between the fourth cylindrical portion 524 in the housing member 52 and the first rear side housing 331.

そして、収容部材52における第1筒状部521の先端側の面(開口部の表側の面)は、エアギャップを介して支持部材50の後端側の面と対峙している。また、第1筒状部521は、第2コイルバネ51と接触している。一方、第4筒状部524の後端側は、保持部材48と対峙している。また、第1筒状部521および第1段差部52aの外周面は、エアギャップを介して第2先端側筐体312の内周面と対峙している。さらに、第2筒状部522の外周面は、エアギャップおよび第1絶縁部材61を介して第2先端側筐体312の内周面と対峙している。さらにまた、第2段差部52bは、第1絶縁部材61を介して第2先端側筐体312の内周面と対峙している。また、第3筒状部523の外周面は、エアギャップおよび第2絶縁部材62を介して第2先端側筐体312の内周面と対峙している。さらに、第3段差部52cの外周面は、第2絶縁部材62を介して第2先端側筐体312の内周面と対峙している。そして、第4筒状部524の外周面は、エアギャップを介して第2先端側筐体312の内周面と対峙し、且つ、エアギャップおよび第3絶縁部材63を介して第1後端側筐体331の内周面と対峙している。このように、収容部材52の外周面と、第2先端側筐体312および第1後端側筐体331との間に、エアギャップ、第1絶縁部材61、第2絶縁部材62および第3絶縁部材63を設けることで、収容部材52と、第2先端側筐体312および第1後端側筐体331とは、直接には接触しない。 The surface of the tip side of the first cylindrical portion 521 in the housing member 52 (the surface on the front side of the opening) faces the surface of the rear end side of the support member 50 through an air gap. The first cylindrical portion 521 is in contact with the second coil spring 51. On the other hand, the rear end side of the fourth cylindrical portion 524 faces the holding member 48. The outer peripheral surfaces of the first cylindrical portion 521 and the first step portion 52a face the inner peripheral surface of the second tip side housing 312 through an air gap. Furthermore, the outer peripheral surface of the second cylindrical portion 522 faces the inner peripheral surface of the second tip side housing 312 through the air gap and the first insulating member 61. Furthermore, the second step portion 52b faces the inner peripheral surface of the second tip side housing 312 through the first insulating member 61. The outer peripheral surface of the third cylindrical portion 523 faces the inner peripheral surface of the second tip housing 312 through the air gap and the second insulating member 62. The outer peripheral surface of the third step portion 52c faces the inner peripheral surface of the second tip housing 312 through the second insulating member 62. The outer peripheral surface of the fourth cylindrical portion 524 faces the inner peripheral surface of the second tip housing 312 through the air gap, and faces the inner peripheral surface of the first rear housing 331 through the air gap and the third insulating member 63. In this way, the air gap, the first insulating member 61, the second insulating member 62, and the third insulating member 63 are provided between the outer peripheral surface of the housing member 52 and the second tip housing 312 and the first rear housing 331, so that the housing member 52 does not come into direct contact with the second tip housing 312 and the first rear housing 331.

(回路基板)
回路基板53は、全体として矩形板状を呈する部材である。この回路基板53は、受けた圧力に応じて圧電素子41が出力する微弱な電荷による電気信号に、電気回路を用いた各種処理を施すものであって、所謂プリント配線板によって構成されている。この回路基板53は、先端側筐体31の内部と後端側筐体33の内部とに跨って設けられている。また、回路基板53は、伝導部材47の後端側であって、接続部材54の先端側に配置されている。さらに、この回路基板53は、保持部材48に搭載されるとともにその全体が収容部材52の内側に配置されている。
(Circuit board)
The circuit board 53 is a member having a rectangular plate shape as a whole. The circuit board 53 performs various processes using an electric circuit on the electric signal generated by the weak electric charge output by the piezoelectric element 41 in response to the pressure received, and is configured by a so-called printed wiring board. The circuit board 53 is provided across the inside of the front end housing 31 and the inside of the rear end housing 33. The circuit board 53 is disposed on the rear end side of the conductive member 47 and on the front end side of the connecting member 54. The circuit board 53 is mounted on the holding member 48 and is disposed entirely inside the housing member 52.

この回路基板53には、圧電素子41から入力される入力信号(電荷信号)を積分して電圧信号に変換する積分回路と、積分回路から入力される電圧信号を増幅して出力信号とする増幅回路と、これら積分回路および増幅回路を構成するオペアンプ等の素子の電源となる電源回路とが搭載されている(すべて図示せず)。 This circuit board 53 is equipped with an integration circuit that integrates the input signal (charge signal) input from the piezoelectric element 41 and converts it into a voltage signal, an amplifier circuit that amplifies the voltage signal input from the integration circuit and produces an output signal, and a power supply circuit that serves as the power source for elements such as the operational amplifiers that make up the integration circuit and amplifier circuit (all not shown).

(接続部材)
接続部材54は、全体として柱状を呈する部材である。この接続部材54は、絶縁性を有するPPT等の合成樹脂材料によって構成された基材と、導電性を有する銅等の金属材料で構成された配線および端子等とを含んでいる。ただし、接続部材54のうち、第2後端側筐体332と接触あるいは対峙する部位(外周面)は、合成樹脂材料で構成されており、この部位に金属材料を露出させないようになっている。また、接続部材54の後端側には、凹んだ形状を有するとともに後端側に向かって開口する開口部が設けられている。そして、この接続部材54の先端側には、先端側に向かって突出するとともに回路基板53と電気的に接続される基板側コネクタ54aが設けられている。一方、この接続部材54の後端側であって、上記開口部の内側には、後端側に向かって突出するとともに、図1に示す接続ケーブル90の接続対象となるケーブル側コネクタ54bが設けられている。また、接続部材54における先端側の外周面には、一周にわたって凹部が設けられており、この凹部には、Oリング56が取り付けられている。
(Connection member)
The connection member 54 is a columnar member as a whole. The connection member 54 includes a base material made of a synthetic resin material such as PPT having insulating properties, and wiring and terminals made of a metal material such as copper having electrical conductivity. However, the portion (outer peripheral surface) of the connection member 54 that contacts or faces the second rear end housing 332 is made of a synthetic resin material, so that the metal material is not exposed at this portion. In addition, an opening having a concave shape and opening toward the rear end side is provided at the rear end side of the connection member 54. Then, a board side connector 54a that protrudes toward the front end side and is electrically connected to the circuit board 53 is provided at the tip side of the connection member 54. On the other hand, a cable side connector 54b that protrudes toward the rear end side and is to be connected to the connection cable 90 shown in FIG. 1 is provided on the rear end side of the connection member 54, inside the opening. In addition, a recess is provided around the outer peripheral surface of the tip side of the connection member 54, and an O-ring 56 is attached to this recess.

この接続部材54は、その先端側が第2後端側筐体332の内側に、その後端側が第2後端側筐体332の外側に、それぞれ位置している。そして、接続部材54の外周面に取り付けられたOリング56は、第2後端側筐体332の内側において、第2後端側筐体332の内周面と接触している。 The tip of the connection member 54 is located inside the second rear housing 332, and the rear of the connection member 54 is located outside the second rear housing 332. The O-ring 56 attached to the outer circumferential surface of the connection member 54 is in contact with the inner circumferential surface of the second rear housing 332 inside the second rear housing 332.

接続部材54の先端側に位置する筒状の部位の外径は、第2後端側筐体332の内径よりも小さい。これに対し、接続部材54の後端側に位置する筒状の部位の外径は、第2後端側筐体332の外径とほぼ同じである。また、接続部材54の先端側は、エアギャップあるいはOリング56を介して第2後端側筐体332の内周面と対峙している。 The outer diameter of the cylindrical portion located at the tip end of the connection member 54 is smaller than the inner diameter of the second rear end housing 332. In contrast, the outer diameter of the cylindrical portion located at the rear end of the connection member 54 is approximately the same as the outer diameter of the second rear end housing 332. In addition, the tip end of the connection member 54 faces the inner peripheral surface of the second rear end housing 332 via an air gap or an O-ring 56.

(接地板)
接地板55は、全体として帯状を呈する部材である。この接地板55は、導電性を有するリン青銅等の金属材料によって構成されており、その表面には金めっきが施されている。
(Ground plate)
The ground plate 55 is a band-shaped member as a whole and is made of a metal material such as phosphor bronze having electrical conductivity, and its surface is gold-plated.

この接地板55は、先端側筐体31の内部と後端側筐体33の内部とに跨って設けられており、その先端は収容部材52の内部であって回路基板53の上方に位置し、その後端は収容部材52の後端よりも後端側に突出している。そして、接地板55の先端側は、回路基板53の接地端子(図示せず)と電気的に接続され、接地板55の後端側は、収容部材52における第4筒状部524の内周面と電気的に接続されている。 The ground plate 55 is provided across the interior of the front housing 31 and the interior of the rear housing 33, with its front end located inside the housing member 52 and above the circuit board 53, and its rear end protruding rearward beyond the rear end of the housing member 52. The front end of the ground plate 55 is electrically connected to the ground terminal (not shown) of the circuit board 53, and the rear end of the ground plate 55 is electrically connected to the inner circumferential surface of the fourth cylindrical portion 524 of the housing member 52.

(Oリング)
Oリング56は、全体として環状を呈する部材である。このOリング56は、絶縁性を有するとともに耐熱性、耐透湿性および耐酸性が高いPTFE(Poly tetra fluoro ethylene:ポリテトラフルオロエチレン)等の合成樹脂材料によって構成されている。
(O-ring)
The O-ring 56 is an annular member as a whole, and is made of a synthetic resin material such as PTFE (Polytetrafluoroethylene), which has insulating properties and is highly heat-resistant, moisture-resistant, and acid-resistant.

このOリング56は、接続部材54の外周面に取り付けられており、第2後端側筐体332に接続部材54を取り付けた際に、接続部材54の外周面と第2後端側筐体332の内周面とに挟まれるようになっている。 This O-ring 56 is attached to the outer circumferential surface of the connection member 54, and is sandwiched between the outer circumferential surface of the connection member 54 and the inner circumferential surface of the second rear end housing 332 when the connection member 54 is attached to the second rear end housing 332.

(突き当てパイプ)
突き当てパイプ57は、全体として筒状を呈する部材である。この突き当てパイプ57は、導電性を有するとともに耐熱性が高いステンレス等の金属材料によって構成されている。
(Butt pipe)
The butt pipe 57 is a member having an overall cylindrical shape and is made of a metal material such as stainless steel that is electrically conductive and highly heat resistant.

この突き当てパイプ57は、先端側筐体31において第1先端側筐体311と第2先端側筐体312とが重なる領域の内部であって、第1先端側筐体311の内側に配置されている。そして、突き当てパイプ57は、加圧部材49における突出部492の後端側であって、第1絶縁部材61の先端側に位置している。また、突き当てパイプ57の外径は、この突き当てパイプ57を収容する第1先端側筐体311における後端側の内径とほぼ同じである。一方、突き当てパイプ57の内径は、加圧部材49における後端筒状部493の外径よりも大きい。そして、突き当てパイプ57の先端側の面は、加圧部材49における突出部492の後端側に配置される第5絶縁部材65と接触している。一方、突き当てパイプ57の後端側の面は、エアギャップを介して第1絶縁部材61の先端側の面と対峙している。また、突き当てパイプ57の外周面は、第1先端側筐体311における後端側の内周面と接触している。ここで、第1先端側筐体311における後端側の内周面と、この部位と対峙する突き当てパイプ57の外周面とを、一周にわたってレーザ溶接することで得た第1溶接部58によって、第1先端側筐体311と突き当てパイプ57とを接合し固定している。これに対し、突き当てパイプ57の内周面は、エアギャップを介して加圧部材49における後端筒状部493の外周面と対峙している。このように、加圧部材49における突出部492および後端筒状部493と、突き当てパイプ57との間に、第5絶縁部材65およびエアギャップを設けることにより、突き当てパイプ57と加圧部材49とは、直接には接触しない。 The butt pipe 57 is disposed inside the first tip housing 311 in the area where the first tip housing 311 and the second tip housing 312 overlap. The butt pipe 57 is located on the rear end side of the protruding portion 492 of the pressure member 49 and on the tip side of the first insulating member 61. The outer diameter of the butt pipe 57 is approximately the same as the inner diameter of the rear end side of the first tip housing 311 that houses the butt pipe 57. On the other hand, the inner diameter of the butt pipe 57 is larger than the outer diameter of the rear end tubular portion 493 of the pressure member 49. The tip side surface of the butt pipe 57 is in contact with the fifth insulating member 65 disposed on the rear end side of the protruding portion 492 of the pressure member 49. On the other hand, the rear end side surface of the butt pipe 57 faces the tip side surface of the first insulating member 61 via an air gap. The outer peripheral surface of the butt pipe 57 is in contact with the inner peripheral surface of the rear end of the first tip housing 311. The first tip housing 311 and the butt pipe 57 are joined and fixed by a first welded portion 58 obtained by laser welding the inner peripheral surface of the rear end of the first tip housing 311 and the outer peripheral surface of the butt pipe 57 facing this portion around the circumference. In contrast, the inner peripheral surface of the butt pipe 57 faces the outer peripheral surface of the rear end tubular portion 493 of the pressure member 49 via an air gap. In this way, by providing the fifth insulating member 65 and the air gap between the protrusion 492 and the rear end tubular portion 493 of the pressure member 49 and the butt pipe 57, the butt pipe 57 and the pressure member 49 do not come into direct contact.

(第1溶接部)
第1溶接部58は、第1先端側筐体311における後端側の内周面と、突き当てパイプ57の外周面とを、一周にわたってレーザ溶接することで形成される部位である。第1溶接部58およびその近傍には、レーザ溶接により溶接ビード(溶接によって生じる部材の盛り上がり)が形成される場合がある。溶接ビードの形成場所や形状は、溶接部位の構造、形状、溶接の仕方等によって異なる。そして、加圧部材49を固定する第1先端側筐体311および突き当てパイプ57の構造や突き当てパイプ57の肉厚によっては、突き当てパイプ57の内周面側に溶接ビードが形成されることが起こり得る。例えば、レーザ光を照射して母材を溶融し、凝固させる溶接方法の場合、肉厚の薄い突き当てパイプ57の内周面側に溶接ビードが形成される場合がある。
(First welded part)
The first welded portion 58 is a portion formed by laser welding the inner peripheral surface of the rear end side of the first tip side housing 311 and the outer peripheral surface of the butt pipe 57 around the circumference. A weld bead (a bulge of a member caused by welding) may be formed by laser welding at the first welded portion 58 and its vicinity. The location and shape of the welded bead vary depending on the structure, shape, and welding method of the welded portion. Depending on the structure of the first tip side housing 311 that fixes the pressure member 49 and the butt pipe 57 and the thickness of the butt pipe 57, a welded bead may be formed on the inner peripheral surface of the butt pipe 57. For example, in the case of a welding method in which a base material is melted and solidified by irradiating a laser beam, a welded bead may be formed on the inner peripheral surface of the butt pipe 57, which has a thin wall thickness.

(第2溶接部)
第2溶接部59は、加圧部材49における後端側の内周面と、支持部材50の外周面とを、一周にわたってレーザ溶接することで形成される部位である。第2溶接部59の近傍にはレーザ溶接により溶接ビードが形成される場合がある。
(Second welded part)
The second welded portion 59 is a portion formed by laser welding, around the entire circumference, an inner circumferential surface of the rear end side of the pressure member 49 and an outer circumferential surface of the support member 50. A weld bead may be formed in the vicinity of the second welded portion 59 by laser welding.

(絶縁パイプ)
絶縁パイプ60は、全体として円筒状を呈する部材である。この絶縁パイプ60は、絶縁性を有するLCP(Liquid Crystal Polymer:液晶ポリマ)等の合成樹脂材料によって構成されている。この絶縁パイプ60は、先端側筐体31の内部に設けられた加圧部材49の内側に配置されている。この絶縁パイプ60の内部には、圧電素子41、後端電極部材43の先端側が収容されている。そして、絶縁パイプ60は、先端電極部材42の後端側であって絶縁リング45の先端側に位置している。また、絶縁パイプ60の外径は、加圧部材49の内径よりもわずかに小さい。さらに、絶縁パイプ60の内径は、圧電素子41および後端電極部材43の外径よりもわずかに大きい。そして、絶縁パイプ60の先端側は、先端電極部材42の後端側の面に対峙している。一方、絶縁パイプ60の後端側は、絶縁リング45の先端側の面に対峙している。また、絶縁パイプ60の外周面は、加圧部材49の内周面と対峙している。さらに、絶縁パイプ60の内周面は、圧電素子41、後端電極部材43の外周面と対峙している。このように、加圧部材49と、圧電素子41、後端電極部材43との間に、絶縁パイプ60を設けることにより、加圧部材49と、後端電極部材43とは、直接には接触しない。
(insulated pipe)
The insulating pipe 60 is a member having a cylindrical shape as a whole. The insulating pipe 60 is made of a synthetic resin material such as LCP (Liquid Crystal Polymer) having insulating properties. The insulating pipe 60 is disposed inside the pressure member 49 provided inside the tip side housing 31. The piezoelectric element 41 and the tip side of the rear end electrode member 43 are accommodated inside the insulating pipe 60. The insulating pipe 60 is located on the rear end side of the tip electrode member 42 and on the tip side of the insulating ring 45. The outer diameter of the insulating pipe 60 is slightly smaller than the inner diameter of the pressure member 49. The inner diameter of the insulating pipe 60 is slightly larger than the outer diameters of the piezoelectric element 41 and the rear end electrode member 43. The tip side of the insulating pipe 60 faces the surface on the rear end side of the tip electrode member 42. On the other hand, the rear end side of the insulating pipe 60 faces the surface on the tip side of the insulating ring 45. The outer peripheral surface of the insulating pipe 60 faces the inner peripheral surface of the pressing member 49. Furthermore, the inner peripheral surface of the insulating pipe 60 faces the outer peripheral surfaces of the piezoelectric element 41 and the rear end electrode member 43. By providing the insulating pipe 60 between the pressure member 49 and the piezoelectric element 41 and the rear end electrode member 43 in this manner, the pressure member 49 and the rear end electrode member 43 do not come into direct contact with each other.

(第1絶縁部材)
第1絶縁部材61は、先端側が筒状を呈し、後端側が環状を呈する部材である。この第1絶縁部材61は、絶縁性を有するとともに耐熱性が高いアルミナ等のセラミックス材料によって構成されている。
(First insulating member)
The first insulating member 61 is a member having a cylindrical shape at its front end and an annular shape at its rear end, and is made of a ceramic material such as alumina that has insulating properties and high heat resistance.

この第1絶縁部材61は、先端側筐体31の内部に配置されている。そして、第1絶縁部材61は、収容部材52における第2筒状部522および第2段差部52b(図6参照)の外側に配置されている。また、第1絶縁部材61の外径は、対応する部位の第2先端側筐体312の内径よりもわずかに小さく、第1絶縁部材61の内径は対応する部位の収容部材52の外径よりもわずかに大きい。そして、第1絶縁部材61の外周面は、第2先端側筐体312と接触しており、第1絶縁部材61の内周面は、収容部材52と接触している。 The first insulating member 61 is disposed inside the tip housing 31. The first insulating member 61 is disposed outside the second cylindrical portion 522 and the second step portion 52b (see FIG. 6) of the housing member 52. The outer diameter of the first insulating member 61 is slightly smaller than the inner diameter of the second tip housing 312 at the corresponding portion, and the inner diameter of the first insulating member 61 is slightly larger than the outer diameter of the housing member 52 at the corresponding portion. The outer peripheral surface of the first insulating member 61 is in contact with the second tip housing 312, and the inner peripheral surface of the first insulating member 61 is in contact with the housing member 52.

(第2絶縁部材)
第2絶縁部材62は、全体として環状を呈する部材である。この第2絶縁部材62は、絶縁性を有するとともに耐熱性が高いアルミナ等のセラミックス材料によって構成されている。
(Second insulating member)
The second insulating member 62 is an annular member as a whole, and is made of a ceramic material such as alumina that has insulating properties and high heat resistance.

この第2絶縁部材62は、先端側筐体31の内部であって第1絶縁部材61よりも後端側となる位置に配置されている。そして、第2絶縁部材62は、収容部材52における第3筒状部523および第3段差部52c(図6参照)の外側に配置されている。また、第2絶縁部材62の外径は、対応する部位の第2先端側筐体312の内径よりもわずかに小さく、第2絶縁部材62の内径は対応する部位の収容部材52の外径よりもわずかに大きい。そして、第2絶縁部材62の外周面は、第2先端側筐体312と接触しており、第2絶縁部材62の内周面は、収容部材52と接触している。 The second insulating member 62 is disposed inside the tip housing 31 at a position closer to the rear end than the first insulating member 61. The second insulating member 62 is disposed outside the third cylindrical portion 523 and the third step portion 52c (see FIG. 6) of the housing member 52. The outer diameter of the second insulating member 62 is slightly smaller than the inner diameter of the second tip housing 312 at the corresponding portion, and the inner diameter of the second insulating member 62 is slightly larger than the outer diameter of the housing member 52 at the corresponding portion. The outer peripheral surface of the second insulating member 62 is in contact with the second tip housing 312, and the inner peripheral surface of the second insulating member 62 is in contact with the housing member 52.

このように、先端側筐体31(第2先端側筐体312)と収容部材52との間に、エアギャップ、第1絶縁部材61および第2絶縁部材62を設けることで、先端側筐体31と収容部材52とは、直接には接触しない。 In this way, by providing an air gap, a first insulating member 61, and a second insulating member 62 between the tip housing 31 (second tip housing 312) and the housing member 52, the tip housing 31 and the housing member 52 do not come into direct contact with each other.

(第3絶縁部材)
第3絶縁部材63は、全体として筒状を呈する部材である。この第3絶縁部材63は、絶縁性を有するとともに耐熱性が高いアルミナ等のセラミックス材料によって構成されている。
(Third insulating member)
The third insulating member 63 is a member having an overall cylindrical shape and is made of a ceramic material such as alumina that has insulating properties and high heat resistance.

この第3絶縁部材63は、後端側筐体33の内部であって第2絶縁部材62よりも後端側となる位置に配置されている。そして、第3絶縁部材63は、収容部材52における第4筒状部524の外側に位置している。また、第3絶縁部材63の外径は、第1後端側筐体331の内径とほぼ同じであり、第3絶縁部材63の内径は、収容部材52における第4筒状部524の外径よりも大きい。そして、第3絶縁部材63の外周面は、第1後端側筐体331の内周面と接触しており、第3絶縁部材63の内周面は、先端側の一部が収容部材52と接触し、その他はエアギャップを介して収容部材52と対峙する。 The third insulating member 63 is disposed inside the rear housing 33 at a position closer to the rear end than the second insulating member 62. The third insulating member 63 is disposed outside the fourth cylindrical portion 524 of the housing member 52. The outer diameter of the third insulating member 63 is approximately the same as the inner diameter of the first rear housing 331, and the inner diameter of the third insulating member 63 is larger than the outer diameter of the fourth cylindrical portion 524 of the housing member 52. The outer peripheral surface of the third insulating member 63 contacts the inner peripheral surface of the first rear housing 331, and a part of the inner peripheral surface of the third insulating member 63 on the tip side contacts the housing member 52, and the rest faces the housing member 52 via an air gap.

(第4絶縁部材)
第4絶縁部材64は、全体として環状を呈する部材である。この第4絶縁部材64は、絶縁性を有するとともに耐熱性が高いジルコニア等のセラミックス材料によって構成されている。
(Fourth insulating member)
The fourth insulating member 64 is an annular member as a whole, and is made of a ceramic material such as zirconia, which has insulating properties and high heat resistance.

この第4絶縁部材64は、先端側の面が、第1先端側筐体311の内側段差部311bと接し、後端側の面が加圧部材49の突出部492の第1押さえ面49bと接するように配置されている。また、第4絶縁部材64は、外径が、第1先端側筐体311の内径のうち大きい方の第2の直径とほぼ同じであり、第4絶縁部材64の外周面は、第1先端側筐体311の内周面と接している。また、第4絶縁部材64は、内径が、加圧部材49の後端筒状部493の外径とほぼ同じであり、第4絶縁部材64の内周面は、加圧部材49の突出部492よりも先端側における後端筒状部493の外周面と接している。そして、第4絶縁部材64の厚さは、加圧部材49の後端筒状部493の外径と突出部492の外径との差分、言い換えれば、後端筒状部493の外周面に対する突出部492の外周面の高さよりも大きい。 The fourth insulating member 64 is disposed so that its tip surface contacts the inner step portion 311b of the first tip housing 311 and its rear surface contacts the first pressing surface 49b of the protruding portion 492 of the pressure member 49. The outer diameter of the fourth insulating member 64 is approximately the same as the larger second diameter of the inner diameters of the first tip housing 311, and the outer peripheral surface of the fourth insulating member 64 contacts the inner peripheral surface of the first tip housing 311. The inner diameter of the fourth insulating member 64 is approximately the same as the outer diameter of the rear end tubular portion 493 of the pressure member 49, and the inner peripheral surface of the fourth insulating member 64 contacts the outer peripheral surface of the rear end tubular portion 493 on the tip side of the protruding portion 492 of the pressure member 49. The thickness of the fourth insulating member 64 is greater than the difference between the outer diameter of the rear end tubular portion 493 of the pressure member 49 and the outer diameter of the protruding portion 492, in other words, the height of the outer circumferential surface of the protruding portion 492 relative to the outer circumferential surface of the rear end tubular portion 493.

(第5絶縁部材)
第5絶縁部材65は、全体として環状を呈する部材である。この第5絶縁部材65は、絶縁性を有するとともに耐熱性が高いジルコニア等のセラミックス材料によって構成されている。
(Fifth insulating member)
The fifth insulating member 65 is an annular member as a whole, and is made of a ceramic material such as zirconia, which has insulating properties and high heat resistance.

この第5絶縁部材65は、先端側の面が、加圧部材49の突出部492の第2押さえ面49cと接し、後端側の面が突き当てパイプ57の先端側の面と接するように配置されている。また、第5絶縁部材65は、外径が、第1先端側筐体311の内径のうち大きい方の第2の直径とほぼ同じであり、第5絶縁部材65の外周面は、第1先端側筐体311の内周面と接している。また、第5絶縁部材65は、内径が、加圧部材49の後端筒状部493の外径とほぼ同じであり、第5絶縁部材65の内周面は、加圧部材49の後端筒状部493の外周面と接している。そして、第5絶縁部材65の厚さは、加圧部材49の後端筒状部493の外径と突出部492の外径との差分、言い換えれば、後端筒状部493の外周面に対する突出部492の外周面の高さよりも大きい。 The fifth insulating member 65 is disposed so that its tip surface contacts the second pressing surface 49c of the protruding portion 492 of the pressure member 49, and its rear surface contacts the tip surface of the butt pipe 57. The fifth insulating member 65 has an outer diameter that is approximately the same as the larger second diameter of the inner diameters of the first tip housing 311, and the outer peripheral surface of the fifth insulating member 65 contacts the inner peripheral surface of the first tip housing 311. The fifth insulating member 65 has an inner diameter that is approximately the same as the outer diameter of the rear end tubular portion 493 of the pressure member 49, and the inner peripheral surface of the fifth insulating member 65 contacts the outer peripheral surface of the rear end tubular portion 493 of the pressure member 49. The thickness of the fifth insulating member 65 is greater than the difference between the outer diameter of the rear end tubular portion 493 of the pressure member 49 and the outer diameter of the protruding portion 492, in other words, the height of the outer circumferential surface of the protruding portion 492 relative to the outer circumferential surface of the rear end tubular portion 493.

第4絶縁部材64および第5絶縁部材65の厚さを上記のようにしたことにより、加圧部材49の外周面は、第4絶縁部材64および第5絶縁部材65と接触するか、または、エアギャップを介して第1先端側筐体311および突き当てパイプ57の内周面と対峙する。したがって、加圧部材49と第1先端側筐体311および突き当てパイプ57とは、直接には接触しない。 By setting the thickness of the fourth insulating member 64 and the fifth insulating member 65 as described above, the outer peripheral surface of the pressure member 49 contacts the fourth insulating member 64 and the fifth insulating member 65, or faces the inner peripheral surfaces of the first tip side housing 311 and the butt pipe 57 via an air gap. Therefore, the pressure member 49 does not come into direct contact with the first tip side housing 311 and the butt pipe 57.

[シール部の構成]
シール部70は、相対的に先端側に位置する第1シール部材71と、相対的に後端側に位置する第2シール部材72とを有する。なお、内燃機関10に圧力検出装置20を取り付けた状態において、第1シール部材71および第2シール部材72は、シリンダヘッド13に設けられた連通孔13a(図1参照)の内周面に突き当たる。
[Configuration of sealing part]
The seal portion 70 has a first seal member 71 located relatively toward the front end side and a second seal member 72 located relatively toward the rear end side. When the pressure detection device 20 is attached to the internal combustion engine 10, the first seal member 71 and the second seal member 72 abut against the inner circumferential surface of a communication hole 13a (see FIG. 1 ) provided in the cylinder head 13.

(第1シール部材)
第1シール部材71は、中空構造を有し全体として筒状を呈する部材である。この第1シール部材71は、絶縁性を有するとともに耐熱性および耐酸性が高いPTFE等の合成樹脂材料によって構成されている。
(First seal member)
The first seal member 71 is a hollow, cylindrical member made of a synthetic resin material such as PTFE, which has insulating properties and is highly resistant to heat and acid.

この第1シール部材71は、第1先端側筐体311の外周面に設けられた凹部311aにはめ込まれている。そして、その内径は、凹部311aの外径よりもわずかに小さくなっており、その外径は、連通孔13aの内径よりもわずかに大きくなっている。 The first seal member 71 is fitted into a recess 311a provided on the outer circumferential surface of the first tip side housing 311. The inner diameter of the first seal member 71 is slightly smaller than the outer diameter of the recess 311a, and the outer diameter of the first seal member 71 is slightly larger than the inner diameter of the communication hole 13a.

(第2シール部材)
第2シール部材72は、全体として環状を呈する部材であり、ここではOリングを用いている。この第2シール部材72も、絶縁性を有するとともに耐熱性および耐酸性が高いPTFE等の合成樹脂材料によって構成されている。
(Second seal member)
The second seal member 72 is an O-ring having an overall annular shape, and is made of a synthetic resin material such as PTFE, which has insulating properties and is highly resistant to heat and acid.

この第2シール部材72は、第2先端側筐体312の外周面に設けられた凹部312aにはめ込まれている。そして、その内径は、凹部312aの外径よりもわずかに小さくなっており、その外径は、連通孔13aの内径よりもわずかに大きくなっている。 The second seal member 72 is fitted into a recess 312a provided on the outer circumferential surface of the second tip side housing 312. The inner diameter of the second seal member 72 is slightly smaller than the outer diameter of the recess 312a, and the outer diameter of the second seal member 72 is slightly larger than the inner diameter of the communication hole 13a.

[圧力検出装置における電気的な接続構造]
ここで、圧力検出装置20における電気的な接続構造について説明を行う。
[Electrical connection structure in pressure detection device]
Here, the electrical connection structure of the pressure detection device 20 will be described.

(正の経路)
圧力検出装置20において、圧電素子41の後端側の端面(正極)は、金属製の後端電極部材43と、金属製の第1コイルバネ46とを介して、金属製の伝導部材47と電気的に接続されている。そして、金属製の伝導部材47は、保持部材48に設けられた金属製の保持部、配線および端子を介して、回路基板53に設けられた入力端子(図示せず)と電気的に接続される。以下では、圧電素子41の後端側の面から、後端電極部材43、第1コイルバネ46、伝導部材47および保持部材48を介して、回路基板53に至る電気的な経路を、『正の経路』と称する。
(Positive Path)
In the pressure detection device 20, the rear end surface (positive electrode) of the piezoelectric element 41 is electrically connected to a metallic conductive member 47 via a metallic rear end electrode member 43 and a metallic first coil spring 46. The metallic conductive member 47 is electrically connected to an input terminal (not shown) provided on a circuit board 53 via a metallic holding portion, wiring, and terminals provided on a holding member 48. Hereinafter, the electrical path from the rear end surface of the piezoelectric element 41 to the circuit board 53 via the rear end electrode member 43, the first coil spring 46, the conductive member 47, and the holding member 48 is referred to as the "positive path."

(負の経路)
一方、圧力検出装置20において、圧電素子41の先端側の端面(負極)は、金属製の先端電極部材42と、金属製の加圧部材49と、金属製の支持部材50(第2溶接部59)と、金属製の第2コイルバネ51と、金属製の収容部材52と、金属製の接地板55とを介して、回路基板53に設けられた接地端子(図示せず)と電気的に接続されている。以下では、圧電素子41の先端側の面から、先端電極部材42、加圧部材49、支持部材50、第2コイルバネ51、収容部材52および接地板55を介して、回路基板53に至る電気的な経路を『負の経路』と称する。
(Negative Path)
On the other hand, in the pressure detection device 20, the end face (negative electrode) on the tip side of the piezoelectric element 41 is electrically connected to a ground terminal (not shown) provided on the circuit board 53 via a metallic tip electrode member 42, a metallic pressure member 49, a metallic support member 50 (second welded portion 59), a metallic second coil spring 51, a metallic housing member 52, and a metallic ground plate 55. Hereinafter, the electrical path from the tip side surface of the piezoelectric element 41 to the circuit board 53 via the tip electrode member 42, the pressure member 49, the support member 50, the second coil spring 51, the housing member 52, and the ground plate 55 is referred to as the "negative path."

(筐体経路)
他方、圧力検出装置20において、金属製のダイアフラムヘッド32は、金属製の先端側筐体31(第1先端側筐体311および第2先端側筐体312)を介して、金属製の後端側筐体33(第1後端側筐体331および第2後端側筐体332)と電気的に接続されている。また、この圧力検出装置20では、金属製の第1先端側筐体311が、金属製の突き当てパイプ57(第1溶接部58)と電気的に接続されている。以下では、ダイアフラムヘッド32から先端側筐体31を介して後端側筐体33および突き当てパイプ57に至る電気的な経路を『筐体経路』と称する。
(Housing route)
On the other hand, in the pressure detection device 20, the metallic diaphragm head 32 is electrically connected to the metallic rear end housing 33 (first rear end housing 331 and second rear end housing 332) via the metallic front end housing 31 (first front end housing 311 and second front end housing 312). In addition, in this pressure detection device 20, the metallic first front end housing 311 is electrically connected to the metallic butt pipe 57 (first welded portion 58). Hereinafter, the electrical path from the diaphragm head 32 to the rear end housing 33 and butt pipe 57 via the front end housing 31 is referred to as the "housing path".

(正の経路と負の経路との関係)
ここで、本実施の形態の圧力検出装置20では、正の経路の外側に負の経路が存在している。換言すれば、負の経路の内部に正の経路が収容されている。そして、正の経路と負の経路とは、絶縁パイプ60、絶縁リング45、保持部材48および両経路の間に形成されるエアギャップによって、電気的に絶縁されている。ここで、本実施の形態では、負の経路が第1電気経路の一例となっており、正の経路が第2電気経路の一例となっている。
(Relationship between positive and negative pathways)
In the pressure detection device 20 of this embodiment, the negative path exists outside the positive path. In other words, the positive path is housed inside the negative path. The positive path and the negative path are electrically insulated by the insulating pipe 60, the insulating ring 45, the holding member 48, and an air gap formed between both paths. In this embodiment, the negative path is an example of a first electrical path, and the positive path is an example of a second electrical path.

(負の経路と筐体経路との関係)
また、この圧力検出装置20では、負の経路の外側に筐体経路が存在している。換言すれば、筐体経路の内部に負の経路が収容されている。そして、負の経路と筐体経路とは、先端電極部材42に設けられた絶縁皮膜42a、加圧部材49の突出部492を挟む第4絶縁部材64と第5絶縁部材65、第1絶縁部材61、第2絶縁部材62、第3絶縁部材63および両経路の間に形成されるエアギャップによって、電気的に絶縁されている。
(Relationship between negative path and housing path)
In addition, in the pressure detection device 20, the housing path exists outside the negative path. In other words, the negative path is housed inside the housing path. The negative path and the housing path are electrically insulated by the insulating coating 42a provided on the tip electrode member 42, the fourth insulating member 64 and the fifth insulating member 65 that sandwich the protruding portion 492 of the pressure member 49, the first insulating member 61, the second insulating member 62, and the third insulating member 63, and the air gap formed between both paths.

(筐体経路と正の経路との関係)
そして、この圧力検出装置20では、結果として、正の経路の外側に筐体経路が存在している。換言すれば、筐体経路の内部に正の経路が収容されている。そして、上述したように、正の経路と負の経路とが電気的に絶縁され、且つ、負の経路と筐体経路とが電気的に絶縁されていることにより、筐体経路と正の経路とが、電気的に絶縁されていることになる。
(Relationship between the housing path and the positive path)
As a result, in the pressure detection device 20, the housing path exists outside the positive path. In other words, the positive path is accommodated inside the housing path. As described above, the positive path and the negative path are electrically insulated from each other, and the negative path and the housing path are electrically insulated from each other, so that the housing path and the positive path are electrically insulated from each other.

(加圧部材の外周面に設けられた退避部)
ここで、加圧部材49の外周面に設けられた退避部494について説明する。第1先端側筐体311と突き当てパイプ57とをレーザ溶接することにより第1溶接部58に溶接ビードが形成される場合があることを述べた。突き当てパイプ57の内周面と加圧部材49の外周面とは、エアギャップを介して対峙しており、電気的に絶縁されている。しかし、第1溶接部58において突き当てパイプ57の内周面に溶接ビードが形成され、溶接ビードが加圧部材49に接触すると、突き当てパイプ57が含まれる筐体経路と加圧部材49が含まれる負の経路とが短絡してしまう。第1溶接部58において第1先端側筐体311の外周面に形成される溶接ビードは、研削して除去することも可能である。しかし、突き当てパイプ57の内周面に形成される溶接ビードを研削することは、突き当てパイプ57の内周面と加圧部材49の外周面との間にわずかな隙間しかないため、容易ではない。また、たとえ研削できたとしても、かかる部位の機械的強度が低下する懸念がある。そこで、本実施の形態では、加圧部材49の外周面の第1溶接部58(溶接が行われる箇所)と対向する位置に、溶接ビードから退避するための退避部494を設けた。
(Retreat portion provided on outer peripheral surface of pressure member)
Here, the retraction portion 494 provided on the outer peripheral surface of the pressure member 49 will be described. It has been mentioned that a weld bead may be formed on the first welded portion 58 by laser welding the first tip side housing 311 and the butt pipe 57. The inner peripheral surface of the butt pipe 57 and the outer peripheral surface of the pressure member 49 face each other via an air gap and are electrically insulated. However, when a weld bead is formed on the inner peripheral surface of the butt pipe 57 at the first welded portion 58 and the weld bead comes into contact with the pressure member 49, the housing path including the butt pipe 57 and the negative path including the pressure member 49 are short-circuited. The weld bead formed on the outer peripheral surface of the first tip side housing 311 at the first welded portion 58 can also be removed by grinding. However, grinding the weld bead formed on the inner peripheral surface of the butt pipe 57 is not easy because there is only a small gap between the inner peripheral surface of the butt pipe 57 and the outer peripheral surface of the pressure member 49. Even if grinding is possible, there is a concern that the mechanical strength of the portion may be reduced. In view of this, in this embodiment, a retraction portion 494 for retracting from the weld bead is provided at a position facing the first weld portion 58 (the portion where welding is performed) on the outer circumferential surface of the pressure member 49 .

図7は、図4に示した断面における第1溶接部58および退避部494の近傍の拡大図である。退避部494は、後端筒状部493における突出部492の後端側の外周面で、少なくとも第1溶接部58に対向する位置に形成されている。退避部494は、後端筒状部493における隣接する部位よりも肉厚が薄く形成されている。そして、退避部494は、隣接する後端筒状部493の外周面よりも低く形成された凹部となっている(図5参照)。退避部494の具体的な形状の例を挙げると、退避部494は、第1溶接部58に沿う方向に延びる溝として、言い換えれば、後端筒状部493の外周面を一周にわたって連続する溝として形成される。 Figure 7 is an enlarged view of the first welded portion 58 and the vicinity of the retracted portion 494 in the cross section shown in Figure 4. The retracted portion 494 is formed on the outer peripheral surface of the rear end side of the protruding portion 492 in the rear end tubular portion 493 at a position facing at least the first welded portion 58. The retracted portion 494 is formed to be thinner than the adjacent portion in the rear end tubular portion 493. The retracted portion 494 is a recess formed lower than the outer peripheral surface of the adjacent rear end tubular portion 493 (see Figure 5). As an example of a specific shape of the retracted portion 494, the retracted portion 494 is formed as a groove extending in a direction along the first welded portion 58, in other words, as a groove that is continuous around the outer peripheral surface of the rear end tubular portion 493.

加圧部材49の外周面において、上記のような退避部494を形成することにより、加圧部材49の外周面と突き当てパイプ57の内周面との間の距離が、退避部494が形成されていない部位よりも広くなる。このため、第1溶接部58に溶接ビードが形成された場合であっても、溶接ビードと加圧部材49とが接触して負の経路と筐体経路とが短絡することを防止できる。 By forming the above-mentioned retreated portion 494 on the outer peripheral surface of the pressure member 49, the distance between the outer peripheral surface of the pressure member 49 and the inner peripheral surface of the butt pipe 57 becomes wider than the portion where the retreated portion 494 is not formed. Therefore, even if a weld bead is formed on the first welded portion 58, it is possible to prevent the weld bead from coming into contact with the pressure member 49 and causing a short circuit between the negative path and the housing path.

退避部494は、第1溶接部58に溶接ビードが形成されても接触しない程度に加圧部材49と突き当てパイプ57との間の距離を確保できればよく、退避部494の具体的な形状は、上述した溝に限定しない。例えば、加圧部材49の後端筒状部493の外周面において、第4絶縁部材64および第5絶縁部材65に接する部位を、退避部494を含む他の部位よりも高く形成しても良い。ただし、加圧部材49は、圧電素子41に対して予荷重を付与する部材であるため、先端筒状部491および後端筒状部493の各々において、ある程度の剛性を有することが要求される。そのため、加圧部材49のサイズや材料によっては、後端筒状部493における第4絶縁部材64および第5絶縁部材65に接する部位以外の全体の肉厚を薄くするのではなく、退避部494のみが隣接する部位に対して窪んだ形状とすることが望ましい。 The specific shape of the retreated portion 494 is not limited to the groove described above, as long as it can secure a distance between the pressure member 49 and the butt pipe 57 so that they do not come into contact even if a weld bead is formed on the first welded portion 58. For example, the portion of the outer circumferential surface of the rear end tubular portion 493 of the pressure member 49 that contacts the fourth insulating member 64 and the fifth insulating member 65 may be formed higher than other portions including the retreated portion 494. However, since the pressure member 49 is a member that applies a preload to the piezoelectric element 41, it is required that each of the tip end tubular portion 491 and the rear end tubular portion 493 has a certain degree of rigidity. Therefore, depending on the size and material of the pressure member 49, it is preferable that only the retreated portion 494 is recessed from the adjacent portions, rather than thinning the entire thickness of the rear end tubular portion 493 other than the portions that contact the fourth insulating member 64 and the fifth insulating member 65.

なお、本実施の形態では、第1溶接部58に対峙する加圧部材49の外周面において、第1溶接部58の溶接ビードから退避するための退避部494を設ける構成を説明した。これに対し、加圧部材49の内周面と支持部材50の外周面とを溶接して形成される第2溶接部59にも溶接ビードは発生し得る。しかし、支持部材50が十分に厚さを有するため、本実施の形態では、第1溶接部58とは異なり、第2溶接部59において支持部材50の内周面側に溶接ビードが形成されることは考慮しない。また、支持部材50の内部であって第2溶接部59と対向する位置には、合成樹脂材料で形成された保持部材48が存在するため、溶接ビードが接触することによる電気的な短絡は発生しない。したがって、第2溶接部59における溶接ビードから退避する構成は設けていない。 In this embodiment, a configuration has been described in which a retreat section 494 for retreating from the weld bead of the first weld section 58 is provided on the outer peripheral surface of the pressure member 49 facing the first weld section 58. In contrast, a weld bead may also be generated in the second weld section 59 formed by welding the inner peripheral surface of the pressure member 49 and the outer peripheral surface of the support member 50. However, since the support member 50 has a sufficient thickness, in this embodiment, unlike the first weld section 58, it is not considered that a weld bead is formed on the inner peripheral surface side of the support member 50 in the second weld section 59. In addition, since a holding member 48 made of a synthetic resin material is present inside the support member 50 at a position facing the second weld section 59, an electrical short circuit due to contact of the weld bead does not occur. Therefore, a configuration for retreating from the weld bead in the second weld section 59 is not provided.

(その他)
ここで、筐体経路を構成する筐体部30は、圧力検出装置20において外部に露出する部位であり、特に、ダイアフラムヘッド32は、燃焼に伴って酸性度が高くなる燃焼室Cに対峙する部位となっている。これに対し、正の経路および負の経路を構成する各部材は、圧力検出装置20において筐体部30内に収容される部位である。このため、正の経路および負の経路を構成する各部材は、筐体経路(筐体部30)を構成する各部材よりも導電性が高い材料とすることが好ましく、また、筐体経路(筐体部30)を構成する各部材は、正の経路および負の経路を構成する各部材よりも耐酸性が高い材料とすることが好ましい。
(others)
Here, the housing part 30 constituting the housing path is a part exposed to the outside in the pressure detection device 20, and in particular, the diaphragm head 32 is a part facing the combustion chamber C where the acidity increases with combustion. In contrast, the members constituting the positive path and the negative path are parts housed within the housing part 30 in the pressure detection device 20. For this reason, it is preferable that the members constituting the positive path and the negative path are made of a material having a higher conductivity than the members constituting the housing path (housing part 30), and it is also preferable that the members constituting the housing path (housing part 30) are made of a material having a higher acid resistance than the members constituting the positive path and the negative path.

[圧力検出装置の組立手順]
次に、本実施の形態で用いた圧力検出装置20の組立手順について説明を行う。
[Assembly procedure of pressure detection device]
Next, the assembly procedure for the pressure detection device 20 used in this embodiment will be described.

まず、第1先端側筐体311の先端側とダイアフラムヘッド32の裏面側(凸部32d側)とを対向させて両者を突き当てる。そして、この状態で、第1先端側筐体311とダイアフラムヘッド32との境界部に、一周にわたってレーザ溶接を行う。 First, the tip side of the first tip side housing 311 and the back side (the convex portion 32d side) of the diaphragm head 32 are brought into contact with each other. Then, in this state, laser welding is performed around the entire circumference of the boundary between the first tip side housing 311 and the diaphragm head 32.

次に、第1先端側筐体311とダイアフラムヘッド32とを含む構造体における第1先端側筐体311内に、後端側から、第4絶縁部材64を挿入し、次いで、先端筒状部491を先端側として加圧部材49を挿入する。このとき、加圧部材49の突出部492の第1押さえ面49bが、第4絶縁部材64を介して第1先端側筐体311の内周面に設けられた内側段差部311bに突き当たるまで、加圧部材49の挿入を行う。これにより、加圧部材49における先端筒状部491の先端側に設けられた開口部に、ダイアフラムヘッド32の凸部32dが挿入される。 Next, the fourth insulating member 64 is inserted from the rear end into the first tip housing 311 in the structure including the first tip housing 311 and the diaphragm head 32, and then the pressure member 49 is inserted with the tip tubular portion 491 at the tip side. At this time, the pressure member 49 is inserted until the first pressing surface 49b of the protruding portion 492 of the pressure member 49 abuts against the inner step portion 311b provided on the inner peripheral surface of the first tip housing 311 via the fourth insulating member 64. As a result, the convex portion 32d of the diaphragm head 32 is inserted into the opening provided on the tip side of the tip tubular portion 491 of the pressure member 49.

次に、第1先端側筐体311の内周面と加圧部材49における後端筒状部493の外周面との間に、後端側から、第5絶縁部材65を挿入し、次いで、突き当てパイプ57を挿入する。このとき、突き当てパイプ57の先端側が、第5絶縁部材65に突き当たるまで、突き当てパイプ57の挿入を行う。 Next, the fifth insulating member 65 is inserted between the inner peripheral surface of the first tip side housing 311 and the outer peripheral surface of the rear end tubular portion 493 of the pressure member 49 from the rear end side, and then the butt pipe 57 is inserted. At this time, the butt pipe 57 is inserted until the tip side of the butt pipe 57 butts against the fifth insulating member 65.

この状態で、第1先端側筐体311の後端側と突き当てパイプ57とを、一周にわたってレーザ溶接し、第1溶接部58を形成する。このとき、第1先端側筐体311の内側段差部311bと突き当てパイプ57の先端側との間に、第4絶縁部材64、第5絶縁部材65を介在させて加圧部材49の突出部492が挟み込まれることによって、加圧部材49は、第1先端側筐体311に対し固定される。これにより、第1先端側筐体311およびダイアフラムヘッド32に対する、加圧部材49の位置決めがなされる。なお、溶接により突き当てパイプ57の内周面に溶接ビードが形成されても、加圧部材49の外周面に退避部494が設けられているため、電気的に短絡することはない。 In this state, the rear end side of the first tip side housing 311 and the butt pipe 57 are laser welded around the circumference to form the first welded portion 58. At this time, the protrusion 492 of the pressure member 49 is sandwiched between the inner step portion 311b of the first tip side housing 311 and the tip side of the butt pipe 57 with the fourth insulating member 64 and the fifth insulating member 65 interposed therebetween, so that the pressure member 49 is fixed to the first tip side housing 311. This positions the pressure member 49 relative to the first tip side housing 311 and the diaphragm head 32. Even if a weld bead is formed on the inner surface of the butt pipe 57 by welding, there is no electrical short circuit because the retraction portion 494 is provided on the outer surface of the pressure member 49.

次に、第1先端側筐体311、ダイアフラムヘッド32、加圧部材49および突き当てパイプ57を含む構造体における加圧部材49内に、後端側から、先端電極部材42、絶縁パイプ60、圧電素子41、後端電極部材43、絶縁リング45および支持部材50を、この順に挿入する。なお、加圧部材49内に先端電極部材42を挿入する際、絶縁皮膜42aが形成されている面を先端側とする。このとき、加圧部材49内に収容される先端電極部材42の先端側に設けられた絶縁皮膜42aが、ダイアフラムヘッド32の後端側に設けられた凸部32dと接触する。また、絶縁パイプ60の内側に、圧電素子41、後端電極部材43が配置される。 Next, the tip electrode member 42, insulating pipe 60, piezoelectric element 41, rear electrode member 43, insulating ring 45, and support member 50 are inserted in this order from the rear end into the pressure member 49 in the structure including the first tip side housing 311, diaphragm head 32, pressure member 49, and butt pipe 57. When inserting the tip electrode member 42 into the pressure member 49, the surface on which the insulating coating 42a is formed is the tip side. At this time, the insulating coating 42a provided on the tip side of the tip electrode member 42 housed in the pressure member 49 comes into contact with the convex portion 32d provided on the rear end side of the diaphragm head 32. The piezoelectric element 41 and rear electrode member 43 are arranged inside the insulating pipe 60.

この状態で、加圧部材49に対する、支持部材50の中心線方向の位置調整を行い、加圧部材49および支持部材50を介して圧電素子41にかかる荷重(予荷重)を調整する。 In this state, the position of the support member 50 in the center line direction relative to the pressure member 49 is adjusted, and the load (preload) applied to the piezoelectric element 41 via the pressure member 49 and the support member 50 is adjusted.

そして、加圧部材49に対する支持部材50の中心線方向の位置調整が完了した後、加圧部材49の後端側と支持部材50とを、一周にわたってレーザ溶接し、第2溶接部59を形成する。このとき、圧電素子41は、その先端側が先端電極部材42を介して、その後端側が後端電極部材43、絶縁リング45および支持部材50を介して、加圧部材49に対して固定される。また、この状態では、既に、第1先端側筐体311およびダイアフラムヘッド32に対して、加圧部材49が固定されている。このため、加圧部材49内に収容される圧電素子41は、予め決められた予荷重が付与された状態で、ダイアフラムヘッド32に対して固定されることになる。これにより、第1先端側筐体311およびダイアフラムヘッド32に対する、加圧部材49、支持部材50および圧電素子41の位置決めがなされる。 After the position adjustment of the support member 50 in the center line direction relative to the pressure member 49 is completed, the rear end side of the pressure member 49 and the support member 50 are laser welded around the circumference to form a second weld 59. At this time, the piezoelectric element 41 is fixed to the pressure member 49 via the front end electrode member 42 at its front end and via the rear end electrode member 43, the insulating ring 45, and the support member 50 at its rear end. In this state, the pressure member 49 is already fixed to the first front end housing 311 and the diaphragm head 32. Therefore, the piezoelectric element 41 housed in the pressure member 49 is fixed to the diaphragm head 32 with a predetermined preload applied. This allows the pressure member 49, the support member 50, and the piezoelectric element 41 to be positioned relative to the first front end housing 311 and the diaphragm head 32.

続いて、支持部材50までが取り付けられた構造体における支持部材50内に、後端側から、伝導部材47の先端側に設けられた第2凸部47bおよび第2凸部47bに装着された第1コイルバネ46を挿入する。また、上記構造体における支持部材50の後端側に、後端側から第2コイルバネ51を挿入して装着する。さらに、上記構造体における第1先端側筐体311に、後端側から、第2先端側筐体312をねじ込んで取り付ける。さらにまた、第2先端側筐体312内に、後端側から第1絶縁部材61および第2絶縁部材62を、この順に挿入する。これに伴い、第1絶縁部材61は、第2先端側筐体312内の先端側に設けられた段差部に突き当たって位置決めされ、第2絶縁部材62は、第2先端側筐体312内の後端側に設けられた段差部に突き当たって位置決めされる。 Next, the second protrusion 47b provided on the tip side of the conductive member 47 and the first coil spring 46 attached to the second protrusion 47b are inserted from the rear end side into the support member 50 in the structure to which the support member 50 is attached. Also, the second coil spring 51 is inserted from the rear end side and attached to the rear end side of the support member 50 in the above structure. Furthermore, the second tip side housing 312 is screwed and attached from the rear end side to the first tip side housing 311 in the above structure. Furthermore, the first insulating member 61 and the second insulating member 62 are inserted in this order from the rear end side into the second tip side housing 312. Accordingly, the first insulating member 61 is positioned by hitting a step portion provided on the tip side in the second tip side housing 312, and the second insulating member 62 is positioned by hitting a step portion provided on the rear end side in the second tip side housing 312.

一方、上記構造体の組立とは別工程にて、保持部材48の先端側に、先端側から伝導部材47を挿入する。また、この保持部材48の後端側に、接地板55を含む回路基板53を取り付ける。このとき、保持部材48に取り付けられた伝導部材47の後端側凸部47cと回路基板53とが、電気的に接続される。そして、収容部材52内に、後端側から、伝導部材47および回路基板53(接地板55)を装着した保持部材48を、伝導部材47を先端側として挿入する。このとき、保持部材48における筒状部と板状部との境界(板状部の先端側)が、収容部材52に設けられた第2段差部52bの内周面に突き当てるまで、保持部材48の挿入を行う。これに伴い、保持部材48の筒状部の先端側および保持部材48の筒状部から露出する伝導部材47の先端側が、第1筒状部521よりも先端側に突出する。また、収容部材52の内周面と、接地板55の後端側とが接触する。 On the other hand, in a separate process from the assembly of the above structure, the conductive member 47 is inserted from the tip side into the tip side of the holding member 48. Also, the circuit board 53 including the ground plate 55 is attached to the rear end side of the holding member 48. At this time, the rear end side convex portion 47c of the conductive member 47 attached to the holding member 48 and the circuit board 53 are electrically connected. Then, the holding member 48 to which the conductive member 47 and the circuit board 53 (ground plate 55) are attached is inserted from the rear end side into the housing member 52 with the conductive member 47 on the tip side. At this time, the holding member 48 is inserted until the boundary (the tip side of the plate part) between the cylindrical part and the plate part of the holding member 48 abuts against the inner peripheral surface of the second step part 52b provided in the housing member 52. As a result, the tip side of the cylindrical part of the holding member 48 and the tip side of the conductive member 47 exposed from the cylindrical part of the holding member 48 protrude further to the tip side than the first cylindrical part 521. Additionally, the inner surface of the housing member 52 comes into contact with the rear end side of the ground plate 55.

そして、第2絶縁部材62までが取り付けられた構造体における第2先端側筐体312内に、後端側から、伝導部材47、回路基板53(接地板55)および保持部材48を含む収容部材52を、第1筒状部521を先端側として挿入する。このとき、収容部材52に設けられた第2段差部52bが、第2先端側筐体312内に取り付けられた第1絶縁部材61に突き当たるまで(収容部材52に設けられた第3段差部52cが、第2先端側筐体312内に取り付けられた第2絶縁部材62に突き当たるまで)、収容部材52の挿入を行う。これに伴い、収容部材52における第2筒状部522の後端側および第2段差部52bの外周面が、第1絶縁部材61の内周面および後端側の面と接触する。また、収容部材52における第3筒状部523の後端側および第3段差部52cの外周面が、第2絶縁部材62の内周面および後端側の面と接触する。また、収容部材52の第1筒状部521が第2コイルバネ51の後端側に挿入されるとともに、この第2コイルバネ51の後端が、収容部材52の第1段差部52aに突き当たる。その結果、第1コイルバネ46および第2コイルバネ51は、上記構造体に対して収容部材52を挿入する前と比べて、中心線方向に圧縮された状態となる。 Then, the housing member 52 including the conductive member 47, the circuit board 53 (ground plate 55) and the holding member 48 is inserted from the rear end side into the second tip side housing 312 in the structure to which the second insulating member 62 is attached, with the first cylindrical portion 521 at the tip side. At this time, the housing member 52 is inserted until the second step portion 52b provided on the housing member 52 abuts against the first insulating member 61 attached in the second tip side housing 312 (until the third step portion 52c provided on the housing member 52 abuts against the second insulating member 62 attached in the second tip side housing 312). As a result, the rear end side of the second cylindrical portion 522 in the housing member 52 and the outer peripheral surface of the second step portion 52b come into contact with the inner peripheral surface and the rear end side surface of the first insulating member 61. In addition, the rear end side of the third cylindrical portion 523 of the housing member 52 and the outer peripheral surface of the third step portion 52c come into contact with the inner peripheral surface and the rear end side surface of the second insulating member 62. In addition, the first cylindrical portion 521 of the housing member 52 is inserted into the rear end side of the second coil spring 51, and the rear end of the second coil spring 51 abuts against the first step portion 52a of the housing member 52. As a result, the first coil spring 46 and the second coil spring 51 are compressed in the center line direction compared to before the housing member 52 is inserted into the structure.

続いて、収容部材52までが取り付けられた構造体における第2先端側筐体312に、後端側から、第1後端側筐体331および第3絶縁部材63を挿入して取り付ける。これにより、収容部材52における第4筒状部524の外周面が、第3絶縁部材63の内周面に接触する。また、第1後端側筐体331に、後端側から、第2後端側筐体332を挿入する。 Next, the first rear end housing 331 and the third insulating member 63 are inserted from the rear end side into the second front end housing 312 in the structure to which the housing member 52 has been attached. This causes the outer peripheral surface of the fourth cylindrical portion 524 in the housing member 52 to come into contact with the inner peripheral surface of the third insulating member 63. In addition, the second rear end housing 332 is inserted from the rear end side into the first rear end housing 331.

それから、第2後端側筐体332までが取り付けられた構造体における第2後端側筐体332に対し、後端側から、外周面にOリング56を装着した接続部材54を、基板側コネクタ54aを先端側として挿入する。このとき、接続部材54に装着されたOリング56は、第2後端側筐体332の内部に入り込み、第2後端側筐体332と接触する。また、回路基板53と接続部材54に設けられた基板側コネクタ54aとが、電気的に接続される。 Then, the connecting member 54 with the O-ring 56 attached to its outer peripheral surface is inserted from the rear end side into the second rear end housing 332 in the structure to which the second rear end housing 332 has been attached, with the board side connector 54a at the tip side. At this time, the O-ring 56 attached to the connecting member 54 enters the interior of the second rear end housing 332 and comes into contact with the second rear end housing 332. In addition, the circuit board 53 and the board side connector 54a provided on the connecting member 54 are electrically connected.

最後に、接続部材54までが取り付けられた構造体における第1先端側筐体311の凹部311aに、第1シール部材71を取り付けるとともに、第2先端側筐体312の凹部312aに、第2シール部材72を取り付ける。
以上により、圧力検出装置20の組立が完了する。
Finally, in the structure to which the connecting member 54 has been attached, the first seal member 71 is attached to the recess 311a of the first tip side housing 311, and the second seal member 72 is attached to the recess 312a of the second tip side housing 312.
With the above, the assembly of the pressure detection device 20 is completed.

[圧力検出装置による圧力検出動作]
では、圧力検出装置20による圧力検出動作について説明を行う。
内燃機関10が動作しているとき、ダイアフラムヘッド32の圧力受面32aに、燃焼室C内で発生した圧力(燃焼圧)が付与される。ダイアフラムヘッド32では、圧力受面32aが受けた圧力が裏側の凸部32dに伝達され、さらに凸部32dから絶縁皮膜42aを介して先端電極部材42へと伝達される。そして、先端電極部材42に伝達された圧力は、先端電極部材42と後端電極部材43とに挟まれた圧電素子41に作用し、圧電素子41では、受けた圧力に応じた電荷が生じる。圧電素子41に生じた電荷は、正の経路を介して、回路基板53の入力信号端子(図示せず)電荷信号として供給される。回路基板53に供給された電荷信号は、回路基板53に実装された回路にて各種処理が施されることで出力信号とされる。そして、回路基板53から出力された出力信号は、接続部材54を介して、外部(ここでは接続ケーブル90および制御装置80)に送信される。
[Pressure detection operation by pressure detection device]
Next, the pressure detection operation by the pressure detection device 20 will be described.
When the internal combustion engine 10 is operating, the pressure (combustion pressure) generated in the combustion chamber C is applied to the pressure receiving surface 32a of the diaphragm head 32. In the diaphragm head 32, the pressure received by the pressure receiving surface 32a is transmitted to the convex portion 32d on the back side, and is further transmitted from the convex portion 32d to the tip electrode member 42 through the insulating coating 42a. The pressure transmitted to the tip electrode member 42 acts on the piezoelectric element 41 sandwiched between the tip electrode member 42 and the rear electrode member 43, and an electric charge corresponding to the received pressure is generated in the piezoelectric element 41. The electric charge generated in the piezoelectric element 41 is supplied as an electric charge signal to an input signal terminal (not shown) of the circuit board 53 through a positive path. The electric charge signal supplied to the circuit board 53 is subjected to various processes in a circuit mounted on the circuit board 53 to become an output signal. The output signal output from the circuit board 53 is transmitted to the outside (here, the connection cable 90 and the control device 80) through the connection member 54.

[本実施の形態の効果]
本実施の形態の圧力検出装置20では、加圧部材49と支持部材50との中心線方向の位置関係を固定することで、加圧部材49と支持部材50との間に圧電素子41を挟み込み、圧電素子41に予め決められた荷重を付与するようにした。そして、圧電素子41を内部に収容する加圧部材49の突出部492を、第4絶縁部材64と第5絶縁部材65とを介在させて、先端側筐体31の内周面と突き当てパイプ57とで挟むことにより、加圧部材49を先端側筐体31に対して固定した。これにより、加圧部材49と先端側筐体31とを電気的に絶縁するとともに、加圧部材49および支持部材50を介して筐体部30(先端側筐体31)に、荷重の変動を抑制した状態で圧電素子41を固定することができる。
[Effects of this embodiment]
In the pressure detection device 20 of the present embodiment, the positional relationship between the pressure member 49 and the support member 50 in the center line direction is fixed, so that the piezoelectric element 41 is sandwiched between the pressure member 49 and the support member 50, and a predetermined load is applied to the piezoelectric element 41. The protruding portion 492 of the pressure member 49, which houses the piezoelectric element 41 therein, is sandwiched between the inner circumferential surface of the tip side housing 31 and the butting pipe 57, with the fourth insulating member 64 and the fifth insulating member 65 interposed therebetween, so that the pressure member 49 is fixed to the tip side housing 31. This makes it possible to electrically insulate the pressure member 49 from the tip side housing 31, and to fix the piezoelectric element 41 to the housing part 30 (tip side housing 31) via the pressure member 49 and the support member 50 in a state in which fluctuations in the load are suppressed.

本実施の形態の圧力検出装置20では、加圧部材49の外周面のうち、第1先端側筐体311と突き当てパイプ57とを溶接することにより形成される第1溶接部58と対向する位置に、退避部494を設けた。これにより、第1溶接部58における突き当てパイプ57の内周面側に溶接ビードが形成されても、突き当てパイプ57が含まれる筐体経路と加圧部材49が含まれる負の経路とが短絡することを防止することができる。 In the pressure detection device 20 of this embodiment, a retreat section 494 is provided on the outer peripheral surface of the pressure member 49 at a position facing the first welded section 58 formed by welding the first tip side housing 311 and the butt pipe 57. This makes it possible to prevent a short circuit between the housing path including the butt pipe 57 and the negative path including the pressure member 49, even if a weld bead is formed on the inner peripheral surface side of the butt pipe 57 at the first welded section 58.

また、本実施の形態の圧力検出装置20では、圧電素子41とダイアフラムヘッド32との間に存在する先端電極部材42の先端側に絶縁皮膜42aを設けた。これにより、先端電極部材42とダイアフラムヘッド32とを電気的に絶縁することができる。 In addition, in the pressure detection device 20 of this embodiment, an insulating coating 42a is provided on the tip side of the tip electrode member 42 that is located between the piezoelectric element 41 and the diaphragm head 32. This makes it possible to electrically insulate the tip electrode member 42 from the diaphragm head 32.

ここで、本実施の形態では、上述した先端電極部材42や加圧部材49が、圧電素子41の負の経路を兼ねる構成となっているが、上述した構成を採用することにより、この負の経路を、先端側筐体31およびダイアフラムヘッド32を含む筐体経路と電気的に絶縁することができる。 In this embodiment, the tip electrode member 42 and pressure member 49 described above are configured to also serve as the negative path of the piezoelectric element 41, but by adopting the above-mentioned configuration, this negative path can be electrically insulated from the housing path including the tip housing 31 and the diaphragm head 32.

本実施の形態の圧力検出装置20は内燃機関10に取り付けられており、この内燃機関10が自動車に搭載されている場合、クラクション、ヘッドライトおよびワイパー等で発生したkHzオーダーの周波数のノイズ(以下では低周波ノイズと称する)が、内燃機関10のシリンダヘッド13に侵入してくる。そして、本実施の形態では、金属で構成されたシリンダヘッド13に、圧力検出装置20のうち金属で構成された筐体部30を取り付けているため、シリンダヘッド13に侵入してきた低周波ノイズは、圧力検出装置20の筐体部30にも伝播する。 The pressure detection device 20 of this embodiment is attached to the internal combustion engine 10, and when this internal combustion engine 10 is installed in an automobile, noise with a frequency of the order of kHz (hereinafter referred to as low-frequency noise) generated by the horn, headlights, windshield wipers, etc., penetrates into the cylinder head 13 of the internal combustion engine 10. In this embodiment, the metal housing 30 of the pressure detection device 20 is attached to the cylinder head 13, which is made of metal, so the low-frequency noise that penetrates into the cylinder head 13 also propagates to the housing 30 of the pressure detection device 20.

ここで、本実施の形態の圧力検出装置20では、筐体部30を含む筐体経路と、圧電素子41から回路基板53に至る正の経路および負の経路とを、電気的に絶縁している。このため、シリンダヘッド13から圧力検出装置20の筐体部30に伝播した低周波ノイズは、加圧部材49および支持部材50や伝導部材47等を介して、回路基板53に伝達されにくくなる。その結果、低周波ノイズに起因する、回路基板53における電位の揺れ(変動)が抑制されることになり、回路基板53から外部(制御装置80等)に出力される出力信号の揺れ(変動)を低減させることが可能になる。 Here, in the pressure detection device 20 of this embodiment, the housing path including the housing portion 30 is electrically insulated from the positive path and the negative path from the piezoelectric element 41 to the circuit board 53. Therefore, low-frequency noise propagated from the cylinder head 13 to the housing portion 30 of the pressure detection device 20 is less likely to be transmitted to the circuit board 53 via the pressure member 49, the support member 50, the conductive member 47, etc. As a result, the fluctuation (variation) of the potential on the circuit board 53 caused by the low-frequency noise is suppressed, and it is possible to reduce the fluctuation (variation) of the output signal output from the circuit board 53 to the outside (control device 80, etc.).

また、内燃機関10が自動車に搭載されている場合、自動車の周囲には、通常、携帯電話、ラジオおよびテレビ等で使用されるMHzオーダーの周波数の電波が飛び交う。この電波が、圧力検出装置20に設けられた伝導部材47に照射されると、MHzオーダーの周波数のノイズ(以下では高周波ノイズと称する)が、回路基板53に伝達されることになってしまう。 In addition, when the internal combustion engine 10 is mounted in an automobile, radio waves with frequencies on the order of MHz, which are typically used in mobile phones, radios, televisions, etc., fly around the automobile. When these radio waves are irradiated to the conductive member 47 provided in the pressure detection device 20, noise with frequencies on the order of MHz (hereinafter referred to as high-frequency noise) is transmitted to the circuit board 53.

ここで、本実施の形態の圧力検出装置20では、加圧部材49および支持部材50を用いて、伝導部材47を覆っている。このため、外部から圧力検出装置20に照射される電波は、加圧部材49および支持部材50によって遮られることになり、伝導部材47に伝達されにくくなる。その結果、高周波ノイズに起因する、回路基板53における電位の揺れ(変動)が抑制されることになり、回路基板53から外部に出力される出力信号の揺れ(変動)を低減させることが可能になる。 Here, in the pressure detection device 20 of this embodiment, the conductive member 47 is covered using the pressure member 49 and the support member 50. Therefore, the radio waves irradiated from the outside to the pressure detection device 20 are blocked by the pressure member 49 and the support member 50, and are less likely to be transmitted to the conductive member 47. As a result, the fluctuation (variation) of the potential on the circuit board 53 caused by high frequency noise is suppressed, and it becomes possible to reduce the fluctuation (variation) of the output signal output from the circuit board 53 to the outside.

また、本実施の形態では、金属製の収容部材52を用いて、回路基板53を覆っている。このため、外部から圧力検出装置20に照射される電波は、収容部材52によって遮られることになり、回路基板53に到達しにくくなる。その結果、高周波ノイズに起因する、回路基板53における電位の揺れ(変動)が抑制されることになり、回路基板53から外部に出力される出力信号の揺れ(変動)を、さらに低減させることが可能になる。 In addition, in this embodiment, the circuit board 53 is covered with a metal housing member 52. Therefore, radio waves irradiated from the outside to the pressure detection device 20 are blocked by the housing member 52, making it difficult for them to reach the circuit board 53. As a result, fluctuations (variations) in the potential on the circuit board 53 caused by high-frequency noise are suppressed, and it becomes possible to further reduce fluctuations (variations) in the output signal output from the circuit board 53 to the outside.

[その他]
本実施の形態では、加圧部材49の外周面のうち、第1先端側筐体311と突き当てパイプ57とを溶接することにより形成される第1溶接部58と対向する位置に、退避部494を設けた。一方、加圧部材49と支持部材50とを溶接することにより形成される第2溶接部59に関しては、この第2溶接部59に対向する位置にある保持部材48に溶接ビードから退避する構成は設けていない。しかし、保持部材48のこの部位に関しても、溶接ビードから退避する構成を設けても良い。
[others]
In this embodiment, a retraction portion 494 is provided on the outer circumferential surface of the pressure member 49 at a position facing a first welded portion 58 formed by welding the first tip side housing 311 and the butt pipe 57. On the other hand, with respect to a second welded portion 59 formed by welding the pressure member 49 and the support member 50, no configuration is provided for retracting from the weld bead on the holding member 48 located at a position facing the second welded portion 59. However, a configuration for retracting from the weld bead may also be provided for this portion of the holding member 48.

本実施の形態の圧力検出装置20では、第1溶接部58および第2溶接部59以外にも、先端側筐体31を構成する第1先端側筐体311と第2先端側筐体312との接合部分や、ダイアフラムヘッド32と第1先端側筐体311との境界部に対してレーザ溶接を施している。これらの部位においても、溶接箇所の近傍の部材であって、溶接ビードが形成されることが想定される位置に対向する部位に、凹部等の溶接ビードから退避する構成を設けても良い。溶接時における溶接ビードが形成されている時点では、溶接ビードは高温である。そのため、溶接箇所の近傍の部材に高温の溶接ビードが接触することで、部材の特性が変化する等の影響が生じる可能性もある。そこで、溶接ビードから退避する構成を設けることで、そのような影響の発生を回避することができる。 In the pressure detection device 20 of this embodiment, in addition to the first welded portion 58 and the second welded portion 59, laser welding is performed on the joint between the first tip side housing 311 and the second tip side housing 312 that constitute the tip side housing 31, and on the boundary between the diaphragm head 32 and the first tip side housing 311. Even in these parts, a configuration for retracting from the weld bead, such as a recess, may be provided in a member near the welded portion and facing the position where the weld bead is expected to be formed. When the weld bead is formed during welding, the weld bead is at a high temperature. Therefore, there is a possibility that the contact of the high-temperature weld bead with the member near the welded portion may cause effects such as changes in the characteristics of the member. Therefore, by providing a configuration for retracting from the weld bead, it is possible to avoid the occurrence of such effects.

なお、本実施の形態では、先端電極部材42の先端側に絶縁皮膜42aを設けることにより、負の経路を構成する先端電極部材42と筐体経路を構成するダイアフラムヘッド32とを電気的に絶縁するようにしていたが、これに限られない。例えば、先端電極部材42とダイアフラムヘッド32との間に、絶縁性を有するとともに耐熱性が高いアルミナ等のセラミックス材料からなる絶縁プレートを配置するようにしてもかまわない。 In this embodiment, the tip electrode member 42 constituting the negative path and the diaphragm head 32 constituting the housing path are electrically insulated from each other by providing an insulating coating 42a on the tip side of the tip electrode member 42, but this is not limited to the above. For example, an insulating plate made of a ceramic material such as alumina, which has insulating properties and high heat resistance, may be placed between the tip electrode member 42 and the diaphragm head 32.

また、本実施の形態では、収容部材52における第2筒状部522の後端側および第2段差部52bと第2先端側筐体312の内周面との間、収容部材52における第3筒状部523の後端側および第3段差部52cと第2先端側筐体312の内周面との間、収容部材52における第4筒状部524と第1後端側筐体331との間に、それぞれ、第1絶縁部材61、第2絶縁部材62、第3絶縁部材63を配置することにより、負の経路を構成する収容部材52と筐体経路を構成する先端側筐体31および後端側筐体33とを電気的に絶縁するようにしていたが、これに限られない。例えば、収容部材52の外周面の一部にアルミナやジルコニア等を含む、絶縁性を呈するセラミックス材料をコートしてなる絶縁皮膜を形成したり、収容部材52と先端側筐体31、後端側筐体33との間にエアギャップを形成したりしてもかまわない。 In the present embodiment, the first insulating member 61, the second insulating member 62, and the third insulating member 63 are disposed between the rear end side and the second step portion 52b of the second cylindrical portion 522 in the housing member 52 and the inner peripheral surface of the second tip side housing 312, between the rear end side and the third step portion 52c of the third cylindrical portion 523 in the housing member 52 and the inner peripheral surface of the second tip side housing 312, and between the fourth cylindrical portion 524 in the housing member 52 and the first rear side housing 331, respectively, to electrically insulate the housing member 52 constituting the negative path from the tip side housing 31 and the rear side housing 33 constituting the housing path, but this is not limited to this. For example, an insulating coating formed by coating a part of the outer peripheral surface of the housing member 52 with an insulating ceramic material including alumina, zirconia, etc. may be formed, or an air gap may be formed between the housing member 52 and the tip side housing 31 and the rear side housing 33.

さらに、本実施の形態では、先端電極部材42を絶縁パイプ60内に収容しないようにしていたが、これに限られるものではなく、先端電極部材42を絶縁パイプ60内に収容するようにしてもかまわない。 Furthermore, in this embodiment, the tip electrode member 42 is not housed within the insulating pipe 60, but this is not limited thereto, and the tip electrode member 42 may be housed within the insulating pipe 60.

さらにまた、本実施の形態では、圧力検出装置20における圧力の検出素子として、圧電素子41を用いた場合を例として説明を行ったが、これに限られるものではなく、例えばひずみゲージや離間した電極等を用いてもかまわない。 Furthermore, in this embodiment, a piezoelectric element 41 is used as the pressure detection element in the pressure detection device 20, but this is not limited to this, and for example, a strain gauge or spaced electrodes may also be used.

1…圧力検出システム、10…内燃機関、20…圧力検出装置、30…筐体部、31…先端側筐体、32…ダイアフラムヘッド、33…後端側筐体、40…検出機構部、41…圧電素子、42…先端電極部材、42a…絶縁皮膜、43…後端電極部材、45…絶縁リング、46…第1コイルバネ、47…伝導部材、48…保持部材、49…加圧部材、492…突出部、493…後端筒状部、494…退避部、50…支持部材、51…第2コイルバネ、52…収容部材、53…回路基板、54…接続部材、55…接地板、56…Oリング、57…突き当てパイプ、58…第1溶接部、59…第2溶接部、60…絶縁パイプ、61…第1絶縁部材、62…第2絶縁部材、63…第3絶縁部材、64…第4絶縁部材、65…第5絶縁部材、70…シール部、71…第1シール部材、72…第2シール部材、80…制御装置、90…接続ケーブル 1...pressure detection system, 10...internal combustion engine, 20...pressure detection device, 30...housing section, 31...tip end housing, 32...diaphragm head, 33...rear end housing, 40...detection mechanism section, 41...piezoelectric element, 42...tip end electrode member, 42a...insulating coating, 43...rear end electrode member, 45...insulating ring, 46...first coil spring, 47...conductive member, 48...holding member, 49...pressure member, 492...protruding portion, 493...rear end tubular portion, 494...retraction portion, 50...support Component, 51...second coil spring, 52...accommodating component, 53...circuit board, 54...connecting component, 55...ground plate, 56...O-ring, 57...butt pipe, 58...first welded part, 59...second welded part, 60...insulating pipe, 61...first insulating component, 62...second insulating component, 63...third insulating component, 64...fourth insulating component, 65...fifth insulating component, 70...sealing component, 71...first sealing component, 72...second sealing component, 80...control device, 90...connecting cable

Claims (4)

筒状のハウジングと、
前記ハウジング内に設けられ、圧力の変化を検知する圧電素子と、
前記ハウジング内で前記圧電素子に接して配置され、圧力を当該圧電素子に伝達する圧力伝達部と、
前記圧力伝達部を前記ハウジングの軸方向に向けて加圧するように当該ハウジングに固定され、前記圧電素子に荷重を作用させる加圧部材と、
前記ハウジングに対して溶接されることにより当該ハウジング内で前記加圧部材を固定する固定部材と、を備え、
前記加圧部材は、前記固定部材により固定された状態で前記ハウジングと当該固定部材との溶接箇所を避ける退避部を有し、
前記加圧部材の前記退避部として、前記溶接箇所に対向する部位に、当該溶接箇所に沿う方向に延びる溝が形成されていることを特徴とする、圧力検出装置。
A cylindrical housing;
a piezoelectric element disposed within the housing for detecting a change in pressure;
a pressure transmitting portion disposed in the housing in contact with the piezoelectric element and configured to transmit pressure to the piezoelectric element;
a pressure member fixed to the housing so as to apply pressure to the pressure transmission portion in the axial direction of the housing and apply a load to the piezoelectric element;
a fixing member that is welded to the housing to fix the pressure member within the housing,
the pressing member has a retreat portion that avoids a welding portion between the housing and the fixing member in a state where the pressing member is fixed by the fixing member,
A pressure detection device, characterized in that a groove extending in a direction along the welded portion is formed in a portion of the pressure member facing the welded portion as the retreated portion .
前記加圧部材は、導電性を有し、前記圧電素子と電気的に接続され、
前記ハウジングおよび前記固定部材は、導電性を有し、前記加圧部材および前記圧電素子と電気的に絶縁されていることを特徴とする、請求項1に記載の圧力検出装置。
the pressure member is conductive and electrically connected to the piezoelectric element;
2. The pressure detection device according to claim 1 , wherein the housing and the fixing member are electrically conductive and electrically insulated from the pressure member and the piezoelectric element.
前記加圧部材は、筒状であって、外周面に外方へ突出する突出部を備え、
前記ハウジングの内周面と前記固定部材とが絶縁部材を介して前記加圧部材の前記突出部を挟んだ状態で、当該ハウジングと当該固定部材とが溶接されることにより、前記加圧部材が固定され、
前記突出部とは異なる前記加圧部材の外周面において、前記ハウジングの内部で固定された状態で前記絶縁部材と対向する部位が、前記溶接箇所に対向する部位よりも高く形成され、当該絶縁部材に当たることを特徴とする、請求項1または請求項2に記載の圧力検出装置。
The pressure member is cylindrical and has a protrusion that protrudes outward on an outer circumferential surface thereof.
the housing and the fixing member are welded together in a state in which the inner circumferential surface of the housing and the fixing member sandwich the protruding portion of the pressure member via an insulating member, thereby fixing the pressure member;
3. The pressure detection device according to claim 1, wherein a portion of the outer surface of the pressing member other than the protrusion that faces the insulating member when fixed inside the housing is formed higher than a portion that faces the welded portion and abuts against the insulating member.
筒状のハウジングと、A cylindrical housing;
前記ハウジング内に設けられ、圧力の変化を検知する圧電素子と、a piezoelectric element disposed within the housing for detecting a change in pressure;
前記ハウジング内で前記圧電素子に接して配置され、圧力を当該圧電素子に伝達する圧力伝達部と、a pressure transmitting portion disposed in the housing in contact with the piezoelectric element and configured to transmit pressure to the piezoelectric element;
前記圧力伝達部を前記ハウジングの軸方向に向けて加圧するように当該ハウジングに固定され、前記圧電素子に荷重を作用させる加圧部材と、a pressure member fixed to the housing so as to apply pressure to the pressure transmission portion in the axial direction of the housing and apply a load to the piezoelectric element;
前記ハウジングに対して溶接されることにより当該ハウジング内で前記加圧部材を固定する固定部材と、を備え、a fixing member that is welded to the housing to fix the pressure member within the housing,
前記加圧部材は、前記固定部材により固定された状態で前記ハウジングと当該固定部材との溶接箇所を避ける退避部を有し、the pressing member has a retreat portion that avoids a welding portion between the housing and the fixing member in a state where the pressing member is fixed by the fixing member,
前記加圧部材は、筒状であって、外周面に外方へ突出する突出部を備え、The pressure member is cylindrical and has a protrusion that protrudes outward on an outer circumferential surface thereof.
前記ハウジングの内周面と前記固定部材とが絶縁部材を介して前記加圧部材の前記突出部を挟んだ状態で、当該ハウジングと当該固定部材とが溶接されることにより、前記加圧部材が固定され、the housing and the fixing member are welded together in a state in which the inner circumferential surface of the housing and the fixing member sandwich the protruding portion of the pressure member via an insulating member, thereby fixing the pressure member;
前記突出部とは異なる前記加圧部材の外周面において、前記ハウジングの内部で固定された状態で前記絶縁部材と対向する部位が、前記溶接箇所に対向する部位よりも高く形成され、当該絶縁部材に当たることを特徴とする、圧力検出装置。A pressure detection device characterized in that, on the outer peripheral surface of the pressurizing member different from the protrusion, a portion that faces the insulating member when fixed inside the housing is formed higher than a portion that faces the welded point and abuts against the insulating member.
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