JP7580886B2 - Inspection equipment and tape expansion equipment - Google Patents

Description

The present invention relates to an inspection device used to check the spacing between chips obtained by dividing a plate-shaped workpiece, and a tape expansion device that includes this inspection device.

Device chips equipped with devices with various functions are essential components of electronic devices such as mobile phones and personal computers. Device chips are obtained, for example, by dividing a wafer made of a material such as silicon or sapphire into multiple regions along planned division lines (streets), forming devices in each region, and then dividing the wafer along these planned division lines.

When dividing a plate-like workpiece such as a wafer into multiple chips, for example, a laser beam with a wavelength that passes through the workpiece is focused on the planned division lines, and the workpiece is modified at the planned division lines (see, for example, Patent Document 1). Then, by applying a force to the workpiece from the outside, the workpiece is divided into multiple chips at the border of the region that corresponds to the planned division lines, which has been modified and made fragile.

Before dividing the workpiece using the method described above, it is common to apply tape to the workpiece, which has the property of expanding when force is applied (extensibility). By applying tape to the workpiece in advance, the multiple chips are held by the tape after the workpiece is divided, making the workpiece (multiple chips) easier to handle. Also, by applying a force (tension) to the tape in a direction that expands the tape, gaps can be formed between adjacent chips.

JP 2002-192370 A

However, it is not easy to make the tension applied to the tape constant throughout the entire area of the tape. Therefore, the size of the gaps formed between adjacent chips is not necessarily equal throughout the entire workpiece. For example, if the gaps between adjacent chips are small, the chips may come into contact with each other during transportation and be damaged, or the chips may not be picked up properly from the tape.

Therefore, the object of the present invention is to provide an inspection device that can easily check the spacing between adjacent chips, and a tape expansion device that includes this inspection device.

According to one aspect of the present invention, there is provided an inspection device used to check the spacing between two adjacent chips obtained by dividing a plate-shaped workpiece with its first surface attached to tape along a planned division line, the inspection device including: a table that holds an annular frame attached to the tape so as to surround the workpiece; a light source that irradiates light onto the first surface of the workpiece held on the table via the frame and the tape or onto a second surface opposite the first surface; a camera that captures one of the first surface and the second surface that is not irradiated with light by the light source to generate an image; a threshold memory unit that stores a brightness threshold value for pixels between the two adjacent chips that appear in the image generated by the camera; an evaluation image generation unit that generates an evaluation image in which the pixels are given different colors according to the brightness divisions divided by the threshold value; an image display unit that displays the evaluation image on a display device; and a threshold change unit that changes the threshold value and stores it in the threshold memory unit.

Preferably, when the threshold changed by the threshold change unit is stored in the threshold storage unit, the evaluation image generation unit generates the evaluation image corresponding to the changed threshold again, and the image display unit displays the evaluation image generated again by the evaluation image generation unit on the display device. Also, preferably, the threshold change unit changes the threshold according to the position of a knob portion of a slider displayed on the display device.

According to another aspect of the present invention, there is provided a tape expansion device including the above-mentioned inspection device and a tape expansion unit that expands the tape while the frame is held on the table.

When light is irradiated onto the first or second surface of the plate-shaped workpiece after it has been divided, and the workpiece is photographed from the opposite side to generate an image, the brightness of the pixels between two adjacent chips in the image will depend on the spacing between the chips. For example, if the spacing between the chips is large, the brightness of the pixels between the chips will be high, and if the spacing between the chips is small, the brightness of the pixels between the chips will be low.

Under these assumptions, an inspection device according to one aspect of the present invention includes a threshold memory unit that stores a brightness threshold value for pixels between two adjacent chips captured in an image generated by a camera, an evaluation image generation unit that generates an evaluation image in which the pixels between the chips are colored differently according to the brightness divisions separated by the threshold value, an image display unit that displays the evaluation image on a display device, and a threshold change unit that changes the threshold value and stores it in the threshold memory unit.

Therefore, this inspection device can generate an evaluation image in which pixels between chips are given different colors according to brightness divisions that are divided by an arbitrary threshold value, and display it on a display device. In other words, the inspection device can generate an evaluation image in which pixels between chips are given different colors according to the reference chip spacing, and display it on a display device. Then, the operator can easily check the spacing between adjacent chips based on the evaluation image displayed on the display device.

FIG. 1 is a perspective view showing a tape expanding device including an inspection device. FIG. 2 is a cross-sectional view illustrating a tape expansion device. FIG. 3 is a functional block diagram showing a part of the functional structure of a control unit constituting the inspection device. FIG. 4 is a cross-sectional view that shows a schematic diagram of how the workpiece is photographed to acquire an image after it has been divided into a plurality of chips. FIG. 5 is a diagram showing a schematic example of a generated image. FIG. 6 is a diagram showing an example of a slider and an image for evaluation displayed on the touch screen. FIG. 7 is a diagram showing another example of a slider and an image for evaluation displayed on the touch screen.

Hereinafter, an embodiment of the present invention will be described with reference to the attached drawings. FIG. 1 is a perspective view that shows a tape expansion device 4 including an inspection device 2 of this embodiment, and FIG. 2 is a cross-sectional view that shows a tape expansion device 4. Note that in FIG. 1, some elements of the inspection device 2 and the tape expansion device 4 are shown as functional blocks.

As shown in FIG. 1, the plate-shaped workpiece 11 to be inspected by the inspection device 2 of this embodiment is, for example, a disk-shaped wafer made of a material such as silicon or sapphire. The front surface (second surface) 11a of this workpiece 11 is partitioned into a number of small regions by a number of mutually intersecting planned division lines (streets), and devices such as ICs (Integrated Circuits) and LEDs (Light Emitting Diodes) are formed in each small region.

The workpiece 11 is modified along the planned division lines so that they will be the starting points for division, and the areas corresponding to these planned division lines are more fragile than other areas. Therefore, when an external force is applied to the workpiece 11, the workpiece 11 is divided into multiple chips along the planned division lines. Note that when modifying the workpiece 11 along the planned division lines, a method is used in which a laser beam of a wavelength that passes through the workpiece 11 is focused on the target area.

For example, an expandable tape (tape) 13, which has the property of expanding (extensibility) when force is applied, is attached to the back surface (first surface) 11b of the workpiece 11. In addition, an annular frame 15 that surrounds the workpiece 11 is attached to the outer periphery of the expandable tape 13. In other words, the diameter of the expandable tape 13 and the diameter of the opening located in the center of the frame 15 are larger than the diameter of the workpiece 11. In this way, in this embodiment, the workpiece 11 is supported by the frame 15 via the expandable tape 13.

There are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other semiconductors, other ceramics, resin, metal, or other materials can also be used as the workpiece 11. Similarly, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of devices formed on the workpiece 11. The workpiece 11 does not have to have any devices formed thereon. Furthermore, the expandable tape 13 may be attached to the surface 11a side of the workpiece 11.

The tape expansion device 4 of this embodiment is used when expanding the above-mentioned expanding tape 13. When the expanding tape 13 is expanded, a force is applied from the expanding tape 13 to the workpiece 11, and the workpiece 11 is divided into multiple chips. The inspection device 2 of this embodiment is used to check (inspect) the spacing between two adjacent chips obtained by dividing the workpiece 11 along the planned division line.

As shown in Figures 1 and 2, the tape expansion device 4 of this embodiment includes a base 6 that supports various elements that make up the tape expansion device 4 (inspection device 2). As shown in Figure 2, the base 6 has a circular hole (recess) 6b that opens on the upper surface 6a of the base 6, and an expansion drum 10 of a tape expansion unit 8 that can expand an expanding tape 13 is partially inserted into the hole 6b.

The expansion drum 10 has a cylindrical drum portion 10a and an annular flange portion 10b protruding from the outer side of the drum portion 10a. The diameter (outer diameter) of the outer side of the drum portion 10a is slightly smaller than the diameter of the hole 6b and is also smaller than the diameter (inner diameter) of the opening located in the center of the frame 15, and the diameter (inner diameter) of the inner side of the drum portion 10a is larger than the diameter of the workpiece 11.

A part of the drum part 10a located below the flange part 10b is inserted into the hole 6b in a state in which the expansion drum 10 can be rotated around a rotation axis that is approximately perpendicular to the upper surface 6a of the base 6. The drum part 10a is inserted into the hole 6b so that the lower surface of the flange part 10b contacts the upper surface 6a of the base 6.

A lifting mechanism 12 that constitutes the tape expansion unit 8 together with the expansion drum 10 is disposed on the upper surface of the flange portion 10b. The lifting mechanism 12 is, for example, an actuator that uses a fluid, and includes a cylindrical cylinder case 14 whose lower portion is fixed to the upper surface of the flange portion 10b, and a piston rod 16 that is inserted into the cylinder case 14 so that the upper portion is exposed.

For example, the piston rod 16 can be moved up and down by supplying fluid to the cylinder case 14 from the outside or discharging fluid from the cylinder case 14 to the outside. Fluids used in the actuator include gases such as air and liquids such as oil. The tape expansion device 4 of this embodiment is composed of this tape expansion unit 8 and the inspection device 2.

A ring-shaped table 18 capable of holding the frame 15 is fixed to the upper end of the piston rod 16. The diameter (inner diameter) of the opening located in the center of the table 18 is larger than the diameter of the outer side of the drum section 10a, and the upper part of the drum section 10a is located within the opening of the table 18. Therefore, when the piston rod 16 of the lifting mechanism 12 is moved up and down, the height of the table 18 relative to the expansion drum 10 changes with the upper part of the drum section 10a being located within the opening of the table 18.

A number of clamps 20 are provided on the outer periphery of the table 18 for fixing the frame 15 placed on the top surface of the table 18. The frame 15 is placed on the top surface of the table 18 with the surface 11a of the workpiece 11 facing upwards, for example, and is fixed to the table 18 by the number of clamps 20. The frame 15 can also be fixed to the table 18 with the surface 11a of the workpiece 11 facing downwards.

For example, when the frame 15 is fixed to the table 18, the table 18 can be lowered by the lifting mechanism 12, so that the upper end of the drum portion 10a pushes up and expands the expanding tape 13. The workpiece 11 is modified at the planned division lines, and the areas of the workpiece 11 corresponding to the planned division lines are more fragile than other areas. Therefore, when the expanding tape 13 is expanded, a force is applied to the workpiece 11, and the workpiece 11 is divided into multiple chips along the planned division lines.

As shown in FIG. 1, a rotation mechanism 22 such as a motor and a pulley 24 connected to the rotation mechanism 22 and rotating around a rotation axis roughly perpendicular to the top surface 6a of the base 6 are disposed near the expansion drum 10. An endless belt 26 is stretched between the pulley 24 and the outer circumferential surface of the flange portion 10b. By rotating the pulley 24 with the rotation mechanism 22, the tape expansion unit 8 and the table 18 can be rotated around a rotation axis roughly perpendicular to the top surface 6a of the base 6.

In addition, a lifting mechanism 28 is disposed near the expansion drum 10. The lifting mechanism 28 is, for example, an actuator that uses a fluid, and includes a cylindrical cylinder case 30 fixed to the base 6, and an L-shaped support arm 32 whose one end is inserted into the cylinder case 14 so that the other end is exposed. For example, the support arm 32 can be moved up and down by supplying fluid to the cylinder case 30 or discharging fluid from the cylinder case 30.

A camera 34 is fixed to one end of the support arm 32, which can capture an image (image data) of the upward facing surface 11a (or back surface 11b) of the workpiece 11 held on the table 18 via the frame 15 and the expanding tape 13. This camera 34 is positioned, for example, directly above the area inside the drum section 10a so that an image showing the entire surface 11a (or back surface 11b) can be generated.

There are no limitations on the specific structure of the camera 34. For example, a camera 34 equipped with a two-dimensional optical sensor, such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor or a CCD (Charge Coupled Device) image sensor, that is sensitive to light of an arbitrary wavelength that is difficult to transmit through the workpiece 11, and a lens, can be used.

A light source 36 capable of irradiating light from below onto the workpiece 11 held on the table 18 is disposed inside the drum portion 10a. The light source 36 is typically an LED capable of emitting light of any wavelength that is difficult to transmit through the workpiece 11. It is also desirable that the light source 36 is configured so as to achieve a generally uniform illuminance over the entire back surface 11b (or front surface 11a) onto which the light is irradiated.

The elements constituting the tape expansion device 4 (inspection device 2), such as the lifting mechanism 12, the rotation mechanism 22, the lifting mechanism 28, the camera 34, and the light source 36, are each connected to a control unit 38. The control unit 38 is, for example, configured by a computer including a processing device and a storage device, and controls each of the above-mentioned elements in accordance with a series of processes required for expanding the expanding tape 13 and checking the spacing between the chips.

The processing device is typically a CPU (Central Processing Unit) and performs various processes necessary to control the above-mentioned elements. The storage device includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive or flash memory. The functions of this control unit 38 are realized, for example, by the processing device operating in accordance with software stored in the storage device. However, the functions of the control unit 38 may also be realized by hardware alone.

A touch screen (display device, input device) 40, which serves as a user interface, is also connected to the control unit 38. For example, images and the like sent from the control unit 38 are displayed on the touch screen 40. In addition, for example, information used to check the chip spacing is input to the control unit 38 via this touch screen 40.

In addition, instead of the touch screen 40 in which the display device and the input device are integrated, a display device such as a liquid crystal display and an input device such as a keyboard or a mouse may each be connected to the control unit 38. Furthermore, the display device and the input device do not need to be elements constituting the tape expansion device 4 (inspection device 2), and may be provided outside the tape expansion device 4 (inspection device 2). For example, a smartphone or the like may be used as the display device and the input device.

Figure 3 is a functional block diagram showing part of the functional structure of the control unit 38 constituting the inspection device 2. As shown in Figure 3, the control unit 38 includes an image acquisition unit 38a that controls the operation of each element so as to acquire an image showing the workpiece 11 after it has been divided into multiple chips. For example, when an operator inputs an instruction to check (inspect) the chip spacing to the control unit 38 using a touch screen 40 or the like, the image acquisition unit 38a controls the operation of each element to acquire an image showing the workpiece 11.

Figure 4 is a cross-sectional view that shows a schematic diagram of how the workpiece 11 after being divided into a number of chips 17 is photographed to acquire an image. The image acquisition unit 38a first controls the supply of power to the light source 36, causing the light source 36 to emit light 21. For example, a portion of the light 21 emitted from the light source 36 passes through the expanding tape 13 and is irradiated onto the downward-facing back surface 11b of the workpiece 11.

A gap 19 is formed between two adjacent chips 17 in the workpiece 11. Therefore, a portion of the light 21 that passes through the expanding tape 13 passes through the gap 19 and enters the camera 34 above. On the other hand, most of the light 21 that is irradiated onto the back surface 11b of the workpiece 11 does not pass through the workpiece 11 and does not enter the camera 34.

In this state, the image acquisition unit 38a controls the operation of the camera 34 and other components to cause the camera 34 to capture the entire upward facing surface 11a of the workpiece 11. In other words, the entire surface 11a that is not irradiated with light 21 is captured by the camera 34. This allows the camera 34 to generate an image that captures the entire surface 11a of the workpiece 11.

Figure 5 is a diagram showing a schematic example of an image 23 generated by the camera 34. Note that, for ease of explanation, in Figure 5, dark areas in the image 23 corresponding to the chips 17 are shown in white, and light areas in the image 23 corresponding to the gaps 19 between adjacent chips 17 are shown in black. In other words, light and dark are inverted in the area in the image 23 corresponding to the workpiece 11. The acquired image 23 is sent from the camera 34 to the control unit 38 and stored in the image storage section 38b of the control unit 38.

As shown in FIG. 4, the control unit 38 includes an evaluation image generating section 38c that processes the image 23 generated by the camera 34 to generate an image for evaluation (evaluation image). The evaluation image generating section 38c extracts, for example, bright areas in the image 23 that correspond to the gaps 19 between the chips 17, and assigns a color to each pixel according to the magnitude of the brightness of the pixels that make up the area that corresponds to this gap 19 (i.e., the pixels between adjacent chips 17).

The control unit 38 includes a threshold memory 38d that stores one or more thresholds (brightness thresholds) used to determine the magnitude of the brightness of each pixel. The evaluation image generator 38c, for example, refers to the thresholds stored in advance in the threshold memory 38d, compares the brightness of each pixel with the thresholds, and determines to which of multiple divisions (brightness divisions) divided by the thresholds the brightness of each pixel belongs.

For example, if the luminance of a pixel belongs to a first category of magnitudes equal to or greater than the threshold value stored in the threshold memory unit 38d (or exceeding the threshold value), the evaluation image generating unit 38c assigns a first color to the pixel. If the luminance of a pixel belongs to a second category of magnitudes less than the threshold value (or less than the threshold value), the evaluation image generating unit 38c assigns a second color different from the first color to the pixel. Note that it is desirable to select the first and second colors to be assigned to the pixels so that the operator can easily distinguish between them.

The process is similar when multiple different thresholds are stored in the threshold memory unit 38d. For example, when two different thresholds are stored in the threshold memory unit 38d, the evaluation image generating unit 38c assigns one of three different colors to the target pixel according to the three divisions defined by the two thresholds.

The threshold memory unit 38d may store multiple thresholds that are selectively applied depending on the properties and attributes of the target pixel. For example, when a workpiece 11 having multiple planned division lines that intersect with each other is divided, gaps 19 are formed along the planned division lines that extend in a first direction, and gaps 19 are formed along the planned division lines that extend in a second direction that intersects with the first direction.

In such a case, it may be desirable to evaluate the spacing between adjacent chips by applying different criteria to the gap 19 extending in the first direction and the gap 19 extending in the second direction. Therefore, the threshold value applied to the pixels in the area corresponding to the gap 19 extending in the first direction and the threshold value applied to the pixels in the area corresponding to the gap 19 extending in the second direction are each stored in the threshold memory unit 38d. This allows the spacing between adjacent chips to be evaluated more appropriately.

The evaluation image generated by the evaluation image generating unit 38c is stored in the image storage unit 38b, similar to the original image 23. The control unit 38 includes an image display unit 38e that displays the evaluation image, etc. on the touch screen 40. The image display unit 38e displays the stored evaluation image on the touch screen 40, for example, each time an evaluation image is stored in the image storage unit 38b.

The control unit 38 further includes a threshold change unit 38f that changes the threshold used when generating an image for evaluation and stores the changed threshold in the threshold memory unit 38d. For example, when an operator inputs information about a new changed threshold into the control unit 38 using the touch screen 40, the threshold change unit 38f stores the changed threshold in the threshold memory unit 38d based on this information so as to replace the threshold already stored.

The image display unit 38e displays on the touch screen 40 an input field used for inputting information related to the threshold value based on an instruction from the threshold value change unit 38f. In this embodiment, a slider is used as the input field, which allows a value to be selected (changed) by linearly moving the knob. That is, the threshold value change unit 38f changes the threshold value according to the position of the knob of the slider. However, the image display unit 38e may also display on the touch screen 40 an input field into which a numerical value or the like can be directly input.

When the threshold value change unit 38f stores the changed threshold value in the threshold value storage unit 38d, the evaluation image generation unit 38c generates an evaluation image again using the changed threshold value. The evaluation image generated again using the changed threshold value is similarly stored in the image storage unit 38b. The image display unit 38e then displays this evaluation image on the touch screen 40.

Fig. 6 is a diagram showing an example of sliders 27a, 27b, 27c, and 27d and an evaluation image (evaluation image) 25 displayed on the touch screen 40. As shown in Fig. 6, four types of sliders 27a, 27b, 27c, and 27d are displayed in the display area 40a of the touch screen 40.

For example, slider 27a is used to change a first threshold value for pixels in the region corresponding to horizontally extending gap 19, and slider 27c is used to change a second threshold value for pixels in the region corresponding to horizontally extending gap 19. That is, in the example of FIG. 6, two threshold values for pixels in the region corresponding to horizontally extending gap 19 are stored in threshold memory unit 38d.

For example, slider 27b is used to change the third threshold value for the pixels in the region corresponding to vertically extending gap 19, and slider 27d is used to change the fourth threshold value for the pixels in the region corresponding to vertically extending gap 19. That is, in the example of FIG. 6, two threshold values for the pixels in the region corresponding to vertically extending gap 19 are stored in threshold memory unit 38d.

As shown in FIG. 6, when all four thresholds are set to 20.0, an image 25 is generated in which all pixels 25a in the area corresponding to the gap 19 are given the same first color (e.g., green). This indicates that the luminance of all pixels 25a in the area corresponding to the gap 19 belongs to a category with a size equal to or greater than each threshold (20.0). Note that in FIG. 6, for ease of explanation, the pixels 25a given the first color are shown by solid lines.

Next, assume that the operator moves the knob of slider 27a to change the first threshold to 50.0. Figure 7 is a schematic diagram showing an example of sliders 27a, 27b, 27c, and 27d and an evaluation image (evaluation image) 29 displayed on touch screen 40 in this case.

As shown in FIG. 7, when the first threshold is set to 50.0, pixels in the region corresponding to the horizontally extending gap 19 are assigned different colors according to the three divisions (luminance divisions) defined by the first and second thresholds. For example, in the region mainly on the outer periphery of the workpiece 11, pixels 29a in the region corresponding to the gap 19 are assigned a first color (e.g., green) indicating that they belong to a division equal to or greater than the first threshold and equal to or greater than the second threshold. Note that in FIG. 7, for ease of explanation, the first color assigned to pixels 29a is shown by a solid line.

For example, in the region mainly in the center of the workpiece 11, pixels 29b in the region corresponding to the gap 19 are given a second color (e.g., red) indicating that they belong to the category between the first and second thresholds (i.e., the category below the first threshold and equal to or greater than the second threshold). In FIG. 7, the appearance of pixels 29b given the second color is represented by a dashed line. Note that there are no pixels in the image 29 that belong to the category below the first and second thresholds and are given the third color. Also, the first color is given to all pixels in the region corresponding to the gap 19 extending vertically.

As described above, when light is irradiated onto the rear surface (first surface) 11b of the plate-shaped workpiece 11 after it has been divided and the workpiece 11 is photographed from the opposite side to generate an image 23, the brightness of the pixels between two adjacent chips 17 shown in this image 23 depends on the spacing between the adjacent chips 17. For example, if the spacing between the adjacent chips 17 is large, the brightness of the pixels between the adjacent chips 17 will be high, and if the spacing between the adjacent chips 17 is small, the brightness of the pixels between the adjacent chips 17 will be low.

Under these assumptions, the inspection device 2 according to this embodiment includes a threshold memory unit 38d that stores the brightness threshold of the pixels between two adjacent chips 17 captured in the image 23 generated by the camera 34, an evaluation image generation unit 38c that generates evaluation images (evaluation images) 25, 29 in which the pixels between the chips are colored differently according to the brightness divisions divided by the threshold, an image display unit 38e that displays the evaluation images 25, 29 on a touch screen (display device) 40, and a threshold change unit 38f that changes the threshold and stores it in the threshold memory unit 38d.

The inspection device 2 of this embodiment can therefore generate evaluation images 25, 29 in which pixels between chips 17 are given different colors according to brightness divisions that are divided by an arbitrary threshold, and display them on the touch screen 40. That is, the inspection device 2 can generate evaluation images 25, 29 in which pixels between chips 17 are given different colors according to the spacing between the reference chips 17, and display them on the touch screen 40. The operator can then easily check the spacing between adjacent chips 17 based on the evaluation images 25, 29 displayed on the touch screen 40.

The present invention is not limited to the above-described embodiment, and can be modified in various ways. For example, the above-described embodiment describes an example in which the workpiece 11 is modified at the intended dividing line, and the workpiece 11 is divided into multiple chips 17 by applying a force to the workpiece 11. However, the inspection device 2 of the present invention can be used to check the spacing between adjacent chips in a workpiece that has been divided into multiple chips by any method.

In addition, the structures, methods, etc. of the above-mentioned embodiments and modified examples can be modified as appropriate without departing from the scope of the purpose of the present invention.

2: Inspection device 4: Tape expansion device 6: Base 6a: Top surface 6b: Hole (recess)
Description of the Reference Signs 8: Tape expansion unit 10: Expansion drum 10a: Drum section 10b: Flange section 12: Lifting mechanism 14: Cylinder case 16: Piston rod 18: Table 20: Clamp 22: Rotation mechanism 24: Pulley 26: Endless belt 28: Lifting mechanism 30: Cylinder case 32: Support arm 34: Camera 36: Light source 38: Control unit 38a: Image acquisition section 38b: Image storage section 38c: Evaluation image generation section 38d: Threshold storage section 38e: Image display section 38f: Threshold change section 40: Touch screen (display device, input device)
40a: Display area 11: Workpiece 11a: Front surface (second surface)
11b: Back side (first side)
13: Expandable tape (tape)
15: Frame 17: Chip 19: Gap 21: Light 23: Image 25: Image for evaluation (evaluation image)
25a: Pixel 27a: Slider 27b: Slider 27c: Slider 27d: Slider 29: Image for evaluation (evaluation image)
29a: pixel 29b: pixel

Claims (4)

An inspection device used to check a distance between two adjacent chips obtained by dividing a plate-shaped workpiece having a first surface attached to a tape along a division line, the inspection device comprising:
a table holding an annular frame attached to the tape so as to surround the workpiece;
a light source that irradiates light onto the first surface or a second surface opposite to the first surface of the workpiece held on the table via the frame and the tape;
a camera that captures one of the first surface and the second surface that is not illuminated by the light source to generate an image;
a threshold memory unit that stores a brightness threshold value of a pixel between two adjacent chips in an image generated by the camera;
an evaluation image generating unit that generates an evaluation image in which the pixels are given different colors according to the luminance divisions divided by the threshold value;
an image display unit that displays the evaluation image on a display device;
and a threshold changing unit that changes the threshold and stores the changed threshold in the threshold storage unit. When the threshold value changed by the threshold value changing unit is stored in the threshold value storage unit,
The evaluation image generating unit regenerates the evaluation image corresponding to the changed threshold value,
2. The inspection apparatus according to claim 1, wherein the image display unit displays the evaluation image regenerated by the evaluation image generation unit on the display device. The inspection device according to claim 1 or 2, wherein the threshold change unit changes the threshold according to the position of the knob of the slider displayed on the display device. An inspection device according to any one of claims 1 to 3,
a tape expansion unit that expands the tape while the frame is held on the table.

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