JP7571656B2 - 金属皮膜の成膜方法 - Google Patents
金属皮膜の成膜方法 Download PDFInfo
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- JP7571656B2 JP7571656B2 JP2021077971A JP2021077971A JP7571656B2 JP 7571656 B2 JP7571656 B2 JP 7571656B2 JP 2021077971 A JP2021077971 A JP 2021077971A JP 2021077971 A JP2021077971 A JP 2021077971A JP 7571656 B2 JP7571656 B2 JP 7571656B2
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- Prior art keywords
- film
- plating solution
- forming
- metal
- porous
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- 229910052751 metal Inorganic materials 0.000 title claims description 34
- 239000002184 metal Substances 0.000 title claims description 34
- 238000000151 deposition Methods 0.000 title description 9
- 238000007747 plating Methods 0.000 claims description 51
- 239000012528 membrane Substances 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 25
- 229910021645 metal ion Inorganic materials 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 239000000243 solution Substances 0.000 description 48
- 238000003860 storage Methods 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000007772 electroless plating Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 6
- 239000011148 porous material Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- -1 silver ions Chemical class 0.000 description 2
- 239000007784 solid electrolyte Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Electroplating Methods And Accessories (AREA)
- Chemically Coating (AREA)
Description
図1に示すように、本実施形態に係る成膜装置1は、金属イオンを含むめっき液Lが含浸された多孔質膜50を、被成膜体Wに押し当てることにより、前記被成膜体Wの表面のうち、めっき液Lが接触した被成膜面Fに、前記金属イオンに由来する金属からなる金属皮膜を成膜する金属皮膜の成膜装置である。
Claims (1)
- 金属イオンを含むめっき液が含浸された多孔質膜を、被成膜体に押し当てることにより、前記被成膜体の表面のうち、前記めっき液が接触した被成膜面に、前記金属イオンに由来する金属からなる金属皮膜を成膜する金属皮膜の成膜方法であって、
前記被成膜体の前記被成膜面が露出するように、前記被成膜体を収容する収容凹部が形成された載置台と、前記載置台に載置された前記被成膜体の前記被成膜面と対向する位置に前記めっき液が保持された液保持孔が形成された挟持部材とで、前記多孔質膜に前記被成膜面が接触するように前記多孔質膜を挟み込む工程と、
前記液保持孔に保持された前記めっき液を加圧して、前記めっき液を前記多孔質膜に含浸させる工程と、
前記めっき液の加圧を停止し、前記多孔質膜に含浸させためっき液により、前記被成膜面に前記金属皮膜を成膜する工程と、
を少なくとも含む金属皮膜の成膜方法。
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JP2021077971A JP7571656B2 (ja) | 2021-04-30 | 2021-04-30 | 金属皮膜の成膜方法 |
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JP2021077971A JP7571656B2 (ja) | 2021-04-30 | 2021-04-30 | 金属皮膜の成膜方法 |
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JP2022171371A JP2022171371A (ja) | 2022-11-11 |
JP7571656B2 true JP7571656B2 (ja) | 2024-10-23 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015072481A1 (ja) | 2013-11-14 | 2015-05-21 | トヨタ自動車株式会社 | 金属皮膜の成膜装置およびその成膜方法 |
JP2019056142A (ja) | 2017-09-21 | 2019-04-11 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
JP2020152987A (ja) | 2019-03-22 | 2020-09-24 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
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2021
- 2021-04-30 JP JP2021077971A patent/JP7571656B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015072481A1 (ja) | 2013-11-14 | 2015-05-21 | トヨタ自動車株式会社 | 金属皮膜の成膜装置およびその成膜方法 |
JP2019056142A (ja) | 2017-09-21 | 2019-04-11 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
JP2020152987A (ja) | 2019-03-22 | 2020-09-24 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
CN111719176A (zh) | 2019-03-22 | 2020-09-29 | 丰田自动车株式会社 | 金属被膜的成膜装置 |
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