JP7553329B2 - Shape measuring device and shape measuring method - Google Patents

Description

The present invention relates to a shape measuring device and a shape measuring method for measuring the shape of a measurement object.

There is known a shape measuring device that measures the shape of a measurement object by analyzing an image of the measurement object. In three-dimensional measurement using a shape measuring device, if the size of the measurement object is large, a missing area where three-dimensional measurement cannot be performed may occur if only an image taken from one measurement position is used. Patent Document 1 describes a method of performing three-dimensional measurement from multiple measurement positions and narrowing the missing area by integrating multiple three-dimensional measurement data corresponding to each of these measurement positions.

JP 2019-184340 A

When integrating multiple pieces of 3D measurement data, there was a problem in that the accuracy of the 3D measurement could decrease due to poor alignment when integrating the 3D measurement data.

The present invention was made in consideration of this point, and aims to provide a shape measuring device that can improve the accuracy of three-dimensional measurements.

A shape measuring device according to a first aspect of the present invention includes a shape data creating unit that creates, based on a first captured image generated by an imaging unit capturing an image of a measurement object at a first relative position, first shape data indicating a shape of at least a part of the measurement object and first position information indicating the coordinates of a plurality of comparison reference points obtained when the first shape data is acquired, and creates, based on a second captured image generated by the imaging unit capturing an image of the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least partially different from the first shape data and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired; a reference data creating unit that creates reference first shape data and reference second shape data by converting the coordinates of at least one of the first shape data or the second shape data so that the distance between the positions of the plurality of comparison reference points indicated by the first position information and the positions of the plurality of comparison reference points indicated by the second position information becomes closer; and (1) the positions of the plurality of comparison reference points after the coordinate positions of at least a portion of the comparison reference points indicated by the second position information are changed by a predetermined amount of change, and the first position information. (2) creating the changed first shape data by converting the coordinates of the first shape data after changing the coordinate positions of at least some of the comparison reference points among the plurality of comparison reference points indicated by the first position information by a predetermined change amount so that the distance between the positions of the plurality of comparison reference points after changing the coordinate positions of the comparison reference points and the positions of the plurality of comparison reference points indicated by the second position information becomes closer; or (3) creating the changed first shape data by converting the coordinates of the first shape data after changing the coordinate positions of at least some of the comparison reference points among the plurality of comparison reference points indicated by the second position information by a predetermined change amount so that the distance between the positions of the plurality of comparison reference points after changing the coordinate positions of the comparison reference points and the positions of the plurality of comparison reference points indicated by the second position information becomes closer. The system has a post-change data creation unit that creates the changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the comparison reference points by a predetermined change amount and the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the comparison reference points among the multiple comparison reference points indicated by the first position information by a predetermined change amount becomes closer, and an output unit that outputs combined shape data that combines the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition.

The output unit may acquire the amount of vibration of at least one of the shape measuring device or the object to be measured when the imaging unit captures an image, and output the combined shape data if the acquired amount of vibration is equal to or less than an allowable value and the first changed shape data satisfies the specified condition.

The output unit may acquire at least one of the temperature of the shape measuring device, the temperature of the object to be measured, or the temperature of the surrounding environment when the imaging unit captures an image, and output the combined shape data when the acquired temperature is equal to or lower than an allowable value and the first changed shape data satisfies the specified condition.

The reference data creation unit may create the reference first shape data and the reference second shape data corresponding to each of a plurality of combinations of a plurality of comparison reference points, the changed data creation unit may create a plurality of changed first shape data corresponding to the plurality of combinations, and the output unit may output the combined shape data obtained by combining the reference second shape data and the reference first shape data corresponding to the combination in which the difference between the reference first shape data and the changed first shape data is smallest.

The output unit may not output the combined shape data obtained by combining the reference second shape data and the reference first shape data when the difference between the reference first shape data and the changed first shape data exceeds a threshold value. The output unit may create modified first shape data by removing a portion of the reference first shape data where the difference from the changed first shape data is equal to or greater than a reference value when the difference between the reference first shape data and the changed first shape data exceeds a threshold value, and output modified combined shape data obtained by combining the modified first shape data and the reference second shape data.

The shape measuring device may further include a shape data diagnostic unit that converts the coordinates of at least one of the first shape data so that the sum of the distance between each of the positions of the multiple comparison reference points after the positions of all or some of the multiple comparison reference points indicated by the first position information have been changed by a first change amount and the position of the corresponding comparison reference point after the positions of all or some of the multiple comparison reference points indicated by the first position information have been changed by a second change amount different from the first change amount or the position of the comparison reference point has not been changed is minimized, and determines that the first shape data cannot be used for alignment when the difference between the first shape data after conversion and the first shape data before conversion exceeds a threshold value.

The shape measuring device may further include a shape data diagnostic unit that converts the coordinates of at least one of the second shape data so that the sum of the distance between each of the positions of the multiple comparison reference points after the positions of all or some of the multiple comparison reference points indicated by the second position information have been changed by a first change amount and the position of the corresponding comparison reference point after the positions of all or some of the multiple comparison reference points indicated by the second position information have been changed by a second change amount different from the first change amount or the position of the comparison reference point has not been changed is minimized, and determines that the second shape data cannot be used for alignment when the difference between the second shape data after conversion and the second shape data before conversion exceeds a threshold value.

The shape measuring device may further include an extraction unit that extracts new comparison reference points from the first captured image and the second captured image when the difference between the reference first shape data and the changed first shape data exceeds a threshold value, and a shape data diagnosis unit that determines whether the difference between the reference first shape data created by the reference data creation unit using the new comparison reference point extracted by the extraction unit and the changed first shape data created by the changed data creation unit using the new comparison reference point is equal to or less than a threshold value.

The post-change data creation unit may change the amount of change that changes the coordinate position of the comparison reference point indicated by the first position information or the second position information, and create the post-change first shape data corresponding to the changed amount of change each time the amount of change is changed, and the output unit may output the combined shape data when the multiple pieces of post-change first shape data created by the post-change data creation unit satisfy a predetermined condition.

The post-change data creation unit creates the changed first shape data by converting the coordinates of the first shape data after changing the coordinate positions so that the distance between the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the multiple comparison reference points indicated by the first position information by a first change amount and the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the multiple comparison reference points indicated by the second position information by a second change amount becomes closer, the post-change data creation unit changes the first change amount and the second change amount, and creates the changed first shape data corresponding to the changed first change amount and the changed second change amount each time the first change amount and the second change amount are changed, and the output unit may output the combined shape data when the multiple changed first shape data created by the post-change data creation unit satisfy a predetermined condition.

A shape measuring device according to a second aspect of the present invention includes a shape data creating unit that creates, based on a first captured image generated by an imaging unit capturing an image of a measurement object at a first relative position, first shape data indicating a shape of at least a part of the measurement object and first position information indicating the coordinates of a plurality of comparison reference points obtained when the first shape data is acquired, and a shape data creating unit that creates, based on a second captured image generated by the imaging unit capturing an image of the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least partially different from the first shape data and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired; an acquisition unit that acquires information indicating the positions of a plurality of reference points of the measurement object; and a reference first shape data is created by converting the coordinates of the first shape data so that the distance between the positions of the plurality of comparison reference points indicated by the first position information and the positions of the corresponding reference reference points acquired by the acquisition unit is reduced, and the reference first shape data is created by converting the positions of the plurality of comparison reference points indicated by the second position information and the positions of the plurality of comparison reference points indicated by the second position information. a reference data creation unit that creates reference second shape data by converting the coordinates of the second shape data so that the distance between the position of the corresponding reference point acquired by the acquisition unit is reduced; a changed data creation unit that creates first changed shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the multiple comparison reference points indicated by the first position information by a predetermined change amount and the positions of the corresponding reference points is reduced, or creates changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple reference points after changing the coordinate positions of at least some of the multiple reference points by a predetermined change amount is reduced; and an output unit that outputs combined shape data obtained by combining the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition.

A shape measurement method according to a third aspect of the present invention includes the steps of: (1) creating, based on a first captured image generated by an imaging unit capturing an image of a measurement object at a first relative position, first shape data indicating the shape of at least a portion of the measurement object and first position information indicating the coordinates of a plurality of comparison reference points obtained when the first shape data is acquired; and (2) creating, based on a second captured image generated by the imaging unit capturing an image of the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least partially different from the first shape data and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired; and (3) creating reference first shape data and reference second shape data by converting the coordinates of at least one of the first shape data or the second shape data so that the distance between the positions of the plurality of comparison reference points indicated by the first position information and the positions of the plurality of comparison reference points indicated by the second position information becomes closer; and (4) converting the positions of the plurality of comparison reference points after the coordinate positions of at least a portion of the comparison reference points indicated by the second position information are changed by a predetermined amount of change, and converting the positions of the plurality of comparison reference points indicated by the first position information into the positions of the plurality of comparison reference points indicated by the second position information into ... first position information into the positions of the plurality of comparison reference points indicated by the second position information into the positions of the plurality of comparison reference points indicated by the first position information into the positions of the plurality (2) creating the changed first shape data by converting the coordinates of the first shape data so that the distances between the positions of the plurality of comparison reference points indicated by the position information and the positions of the plurality of comparison reference points after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the first position information by a predetermined change amount and the distances between the positions of the plurality of comparison reference points indicated by the second position information and the positions of the plurality of comparison reference points after changing the coordinate positions of the first shape data by a predetermined change amount are close to each other; or (3) creating the changed first shape data by converting the coordinates of the first shape data after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the second position information. The method includes a step of creating the changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the comparison reference points among the quasi-points by a predetermined change amount and the positions of the multiple comparison reference points after changing the coordinate positions of at least some of the comparison reference points among the multiple comparison reference points indicated by the first position information by a predetermined change amount is reduced, and a step of outputting combined shape data by combining the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition.

The present invention has the effect of improving the accuracy of three-dimensional measurements.

1 is a diagram for explaining an overview of a shape measuring device according to a first embodiment; 1 is a diagram for explaining an overview of a shape measuring device according to a first embodiment; 1 is a diagram for explaining an overview of a shape measuring device according to a first embodiment; FIG. 2 is a diagram showing a configuration of a shape measuring device. 13A and 13B are diagrams illustrating examples of comparison reference points extracted by a shape data generating unit. 13 is a diagram showing another example of extraction of comparison reference points by the shape data creation unit; FIG. 13 is a diagram showing another example of extraction of comparison reference points by the shape data creation unit; FIG. FIG. 13 is a diagram showing an example of a projected image including a marker. 13 is a diagram showing a method for a shape data diagnostic unit to determine whether or not the first shape data and the other shape data can be aligned. FIG. FIG. 13 is a diagram showing an example of aligning three pieces of shape data. 10 is a flowchart showing a processing procedure for aligning a plurality of shape data by the shape measuring device. 13 is a flowchart showing a processing procedure for aligning a plurality of shape data by the shape measuring device in the modified example. 13 is a flowchart showing a processing procedure for aligning a plurality of shape data by the shape measuring device in the modified example. FIG. 13 is a diagram illustrating a configuration of a shape measuring apparatus according to a second embodiment. FIG. 13 is a diagram illustrating a configuration of a shape measuring apparatus according to a third embodiment.

First Embodiment
[Overview of shape measuring device 100]
1 to 3 are diagrams for explaining an overview of a shape measuring device 100 according to a first embodiment. Fig. 1(a) shows how a measurement object is measured by the shape measuring device 100. Fig. 1(b) shows how an image of a measurement object is captured by the shape measuring device 100. As shown in Fig. 1(a), the shape measuring device 100 includes a measuring head 10 that houses or connects a projection unit 1 and an image capturing unit 2, and a control unit 3.

The projection unit 1 is a projection device having a light source such as a light-emitting diode or a laser. The projection unit 1 projects a projection image including a predetermined pattern onto the measurement surface of the measurement object. The pattern is, for example, a stripe pattern. The number of projection units 1 is not limited to one, and the shape measurement device 100 may be equipped with any number of projection units. The projection unit 1 projects a projection image including a pattern whose brightness changes depending on the position onto the measurement object.

The imaging unit 2 has a lens 21 and an image sensor 22. The imaging unit 2 generates an image by capturing an image of the measurement object. When the projection unit 1 projects a projection image onto the measurement object, the imaging unit 2 generates an image by capturing an image projected onto the measurement object. The number of imaging units 2 is not limited to one, and the shape measurement device 100 may be equipped with any number of imaging units.

The imaging unit 2 and the projection unit 1 are fixed to the measurement head 10. When measuring the object, the imaging unit 2 generates captured images of the object from multiple relative positions by moving the measurement head 10 or the object using a movable stage or a robot, etc.

The control unit 3 is, for example, a CPU (Central Processing Unit). The control unit 3 generates a captured image by having the imaging unit 2 capture an image of the measurement object. At this time, the control unit 3 moves the measurement head 10 or the measurement object to change the relative position of the imaging unit 2 with respect to the measurement object. For example, the control unit 3 changes the relative position by moving the measurement head 10 using a robot or by moving the measurement object using a movable stage. The control unit 3 causes the imaging unit 2 to capture an image of the measurement object at these multiple relative positions.

The measurement head 10 may also be provided with at least one of a plurality of imaging units 2 or a plurality of projection units 1. The control unit 3 may change the relative position of the imaging unit 2 with respect to the measurement object by switching the imaging unit 2 that generates the captured image. In the example of FIG. 1, the control unit 3 moves the projection unit 1 and the imaging unit 2 as a unit, but the present invention is not limited to this. For example, the control unit 3 may move the projection unit 1 and the imaging unit 2 independently. The measurement head 10 is not limited to one, and the measurement object may be imaged at a plurality of relative positions using the imaging units 2 attached to each of the plurality of measurement heads 10. In the plurality of measurement heads 10, the projection unit 1 and the imaging unit 2 may be arranged with a shifted positional relationship with each other.

Figure 1(b) shows how the imaging unit 2 captures an image of the measurement object. The control unit 3 generates a first captured image by having the imaging unit 2 capture an image of the measurement surface of the measurement object at a first relative position. In Figure 1(b), the imaging range of the imaging unit 2 is indicated by a dashed line. In the example of Figure 1(b), the size of the measurement surface of the measurement object is larger than the imaging range of the imaging unit 2, so part of the measurement surface is outside the imaging range of the imaging unit 2. The control unit 3 captures an image of the measurement object at a second relative position to generate a second captured image. In the example of Figure 2, the control unit 3 translates the imaging unit 2, but the control unit 3 may also rotate the imaging unit 2.

The control unit 3 creates first shape data indicating at least a part of the shape of the object to be measured by analyzing the first captured image generated by the imaging unit 2. The control unit 3 creates second shape data that is at least partially different from the first shape data by analyzing the second captured image generated by the imaging unit 2. The first shape data and the second shape data include, for example, coordinate data indicating the contour line or feature points such as multiple vertices of the object to be measured, and the positions of markers, etc.

Figures 2(a) and 2(b) are diagrams showing an example of alignment between the first shape data and the second shape data. Figure 2(a) shows an example of the first shape data and the second shape data created by the control unit 3. Figure 2(b) is a diagram showing how the control unit 3 aligns the first shape data and the second shape data.

The control unit 3 executes various processes for aligning the first shape data and the second shape data. The control unit 3 extracts, from the first captured image and the second captured image, for example, a plurality of feature points such as an edge or undulation of the measurement object, a texture specific to the measurement object, or a marker attached to the measurement object or the jig, as a comparison reference point. For example, when the marker attached to the measurement object or the jig is a circle, the control unit 3 extracts the center position of the circle as the comparison reference point. In addition to information indicating the coordinates of the comparison reference point, the control unit 3 may extract information indicating a normal vector passing through the comparison reference point on the surface of the measurement object from the first captured image and the second captured image.

The control unit 3 creates first position information indicating the position of the comparison reference point in the first shape data by identifying the position on the measurement object of the comparison reference point extracted from the first captured image. The control unit 3 creates second position information indicating the position of the comparison reference point in the second shape data by identifying the position on the measurement object of the comparison reference point extracted from the second captured image. In FIG. 2, the comparison reference points extracted from the first captured image and the second captured image are shown by circles on the first shape data and the second shape data, respectively.

The control unit 3 aligns the first shape data and the second shape data using the first position information and the second position information. More specifically, the control unit 3 converts the coordinates of the second shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple comparison reference points indicated by the second position information becomes closer. The coordinates of the second shape data are the coordinates of multiple pixels included in the second shape data. Hereinafter, the first shape data after alignment is also called reference first shape data, and the second shape data after alignment is also called reference second shape data. FIG. 2(b) shows the reference first shape data and the reference second shape data after alignment by the control unit 3. In the example of FIG. 2(b), the control unit 3 creates the reference first shape data without converting the coordinates of the first shape data. Instead, the control unit 3 may convert the coordinates of the first shape data, or convert the coordinates of both the first shape data and the second shape data to align them.

When the control unit 3 extracts a sufficient number of comparison reference points with a certain spread, the first shape data and the second shape data are aligned with relatively high accuracy. On the other hand, when the control unit 3 extracts a small number of comparison reference points or the distribution of the comparison reference points is uneven, the accuracy of the alignment between the first shape data and the second shape data may decrease.

For this reason, the control unit 3 judges whether the alignment between the first shape data and the second shape data is satisfactory. Figures 3(a) and 3(b) are diagrams showing a method by which the control unit 3 judges whether the alignment between the first shape data and the second shape data is satisfactory.

3(a), the control unit 3 changes the positions of some or all of the comparison reference points indicated by the first position information by a predetermined amount of change. The predetermined amount of change is, for example, a magnitude determined based on the measurement performance (for example, the maximum value or standard deviation value of the measurement error) of the shape measurement device 100. The amount or direction of this change may be, for example, random for each comparison reference point, or may correspond to a known error distribution obtained in advance. The comparison reference points before the control unit 3 changes their positions are indicated by dashed circles, and the comparison reference points after the control unit 3 changes their positions are indicated by solid circles. As shown in FIG. 3(a) and FIG. 3(b), after changing the positions of some or all of the comparison reference points indicated by the first position information, the control unit 3 converts the coordinates of the second shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple comparison reference points indicated by the second position information becomes closer. The control unit 3 may change the positions of one or both of the multiple comparison reference points indicated by the first position information and the multiple comparison reference points indicated by the second position information.

By changing the positions of some or all of the comparison reference points indicated by the first position information, the coordinates of the second shape data after alignment (hereinafter also referred to as changed second shape data) change. The reference second shape data when the first shape data and the second shape data are aligned before changing the position of the comparison reference point is shown by the dashed line in FIG. 3(b), and the second shape data when the first shape data and the second shape data are aligned after changing the position of the comparison reference point (hereinafter also referred to as changed second shape data) is shown by the solid line in FIG. 3(b).

The control unit 3 identifies the difference between the reference second shape data and the changed second shape data. The control unit 3 determines that the alignment between the reference first shape data and the reference second shape data is good, provided that the difference between the reference second shape data and the changed second shape data is equal to or less than a threshold value. At this time, the control unit 3 creates combined shape data by combining the reference first shape data and the reference second shape data. The control unit 3 outputs the created combined shape data. In this way, the control unit 3 determines whether the alignment between the reference first shape data and the reference second shape data is good or bad, and therefore it is possible to suppress a decrease in the measurement accuracy of the shape of the measurement object caused by poor alignment between the reference first shape data and the reference second shape data.

When changing the positions of multiple comparison reference points, the control unit 3 may change the amount of change given to each comparison reference point and perform alignment each time. The control unit 3 may perform a judgment based on a threshold using a statistical quantity such as the maximum value or standard deviation value of the multiple alignment errors that occur at this time as an index.

[Configuration of shape measuring device]
4 is a diagram showing the configuration of the shape measuring device 100. The shape measuring device 100 measures the three-dimensional shape of a measurement target object using one or more shape measurement methods. In the example of this specification, the shape measurement method is a light pattern projection method, but a light section method, a stereo method, a light wave interference method, etc. may also be applied. The shape measurement method may be a non-contact type or a contact type.

The shape measuring device 100 includes an imaging unit 2, a control unit 3, a display unit 4, and a memory unit 5. The control unit 3 includes a shape data creation unit 301, a reference data creation unit 302, a post-change data creation unit 303, an output unit 304, and a shape data diagnosis unit 305.

The display unit 4 displays data such as characters, images, or shapes generated by the control unit 3. For example, the display unit 4 displays the measurement results of the shape of the object to be measured. The memory unit 5 includes storage media such as a ROM (Read Only Memory), a RAM (Random Access Memory), and a hard disk. The memory unit 5 stores programs executed by the control unit 3. The control unit 3 functions as a shape data creation unit 301, a reference data creation unit 302, a post-change data creation unit 303, an output unit 304, and a shape data diagnosis unit 305 by executing the programs stored in the memory unit 5.

The shape data creation unit 301 measures the shape of the measurement object. The shape data creation unit 301 generates a first captured image by having the imaging unit 2 capture the measurement surface of the measurement object at the first relative position. The shape data creation unit 301 generates a second captured image by having the imaging unit 2 capture the measurement surface of the measurement object at the second relative position. The second relative position is a position different from the first relative position. For example, the first relative position is the position where the imaging unit 2 first captures an image, and the second relative position is the position where the imaging unit 2 captures an image for the second or subsequent time, but the present invention is not limited to this, and the numbering method of the first relative position and the second relative position may be arbitrary. For example, the second relative position may be the position where the imaging unit 2 first captures an image, and the first relative position may be the position where the imaging unit 2 captures an image for the second or subsequent time.

The shape data creation unit 301 may capture an image of the measurement object at the second relative position in a different orientation from the first relative position. In the example of this specification, the shape data creation unit 301 projects a projection image onto the measurement object using the projection unit 1, and generates a first captured image and a second captured image of the measurement object in a state in which the projection image is projected. At this time, the shape data creation unit 301 may generate multiple images by capturing images with different projected images or capturing images in a non-projected state.

The shape data creation unit 301 creates first shape data indicating the shape of at least a portion of the object to be measured based on the generated first captured image. More specifically, the shape data creation unit 301 measures the shape of the object to be measured by analyzing distortions, etc. of the projected image projected onto the object to be measured in the first captured image. The shape data creation unit 301 creates first shape data based on this measurement result. Similarly, the shape data creation unit 301 creates second shape data, which is at least partially different from the first shape data of the object to be measured, based on the generated second captured image.

The shape data creation unit 301 extracts, from the first captured image and the second captured image, multiple feature points such as edges or undulations of the measurement object, textures specific to the measurement object, or feature points such as markers attached to the measurement object or jig, as comparison reference points. The shape data creation unit 301 creates first position information indicating the positions of the multiple comparison reference points in the first shape data by identifying the positions on the measurement object or jig of the multiple comparison reference points extracted from the first captured image. Similarly, the shape data creation unit 301 creates second position information indicating the multiple comparison reference points in the second shape data by identifying the positions on the measurement object or jig of the multiple comparison reference points extracted from the second captured image.

It is desirable for the shape data creation unit 301 to extract a sufficient number of comparison reference points that are distributed over a range of a predetermined size or more. Figures 5(a) and 5(b) are diagrams showing examples of comparison reference points extracted by the shape data creation unit 301. Figure 5(a) shows an example in which the number and spread of comparison reference points extracted by the shape data creation unit 301 are good, and Figure 5(b) shows an example in which the number and spread of comparison reference points extracted by the shape data creation unit 301 are not good. Figure 5(a) shows the first shape data and the second shape data created by the shape data creation unit 301. The circles in Figure 5(a) indicate comparison reference points. The double arrows indicate that the comparison reference points indicated by the first position information and the comparison reference points indicated by the second position information correspond to common feature points on the measurement object. The comparison reference points shown in Figure 5(a) are more numerous and distributed over a wider range than the comparison reference points shown in Figure 5(b).

The shape data creation unit 301 creates the first shape data and first position information indicating the coordinates of multiple comparison reference points obtained when the first shape data is acquired. The shape data creation unit 301 outputs the created first shape data and first position information to the reference data creation unit 302 and the changed data creation unit 303. The shape data creation unit 301 creates the created second shape data and second position information indicating the coordinates of multiple comparison reference points obtained when the second shape data is acquired. The shape data creation unit 301 outputs the created second shape data and second position information to the reference data creation unit 302 and the changed data creation unit 303.

The shape data creation unit 301 is not limited to the example of creating shape data based on the first captured image or the second captured image, and may acquire the first shape data, the second shape data, the first position information, and the second position information from the storage unit 5, which are prestored in the storage unit 5. The first shape data and the first position information, and the second shape data and the second position information may be acquired by different shape measurement devices. In this way, for example, a part that cannot be measured by a certain shape measurement device can be measured by using another shape measurement device, and the measurement target can be measured over a wider range. For example, in a shape measurement device using a light pattern projection method, it is possible to use another shape measurement device to measure a part that cannot be measured due to the influence of a shadow, etc., and to integrate the results.

[Extraction of comparison reference points using projected images]
The shape data creation unit 301 may project a projection image including a marker onto the measurement object and extract the position of the marker projected onto the measurement object from the captured image as a comparison reference point. For example, the shape data creation unit 301 projects the projection image including the marker using a sub-projection unit provided separately from the projection unit 1 in the measurement head 10. The shape data creation unit 301 may also project this projection image using the projection unit 1 in the measurement head 10.

Figures 6 and 7 are diagrams showing another example of extraction of a comparison reference point by the shape data creation unit 301. Figure 6 is a diagram showing how the shape data creation unit 301 projects a marker onto the measurement object using the sub-projection unit 61. Figure 7 is a diagram showing an example of a projection image including a marker projected onto the measurement object. The shape data creation unit 301 projects a projection image that can be used as a marker from the sub-projection unit onto the measurement object while fixing the relative position of the sub-projection unit 61 with respect to the measurement object. At this time, the shape data creation unit 301 may extract the position of the marker projected onto the measurement object from the first captured image and the second captured image as a comparison reference point.

In addition, when multiple imaging units 2 are provided in the measurement head 10, the shape data creation unit 301 may project a projection image including a marker from the projection unit 1 in the measurement head 10. The shape data creation unit 301 generates a first captured image of the measurement object in a state where the projection image is projected by the first imaging unit, and generates a second captured image of the measurement object in the same state by the second imaging unit. The shape data creation unit 301 may extract the position of the marker projected on the measurement object from the first captured image and the second captured image as a comparison reference point. In addition, even when multiple measurement heads are used, a sub-projection unit prepared separately from the measurement head or a projection unit in the measurement head may be used to project a projection image including a marker and perform similar processing.

The multiple markers projected onto the measurement object are shown by circles in FIG. 7. The projection images used as markers may have any brightness distribution and any number, both when using the projection images projected by the projection unit 1 included in the measurement head 10 and when using the projection images projected by the sub-projection unit 61. The shape data creation unit 301 can adjust the number or distribution of comparison reference points by extracting the markers projected onto the measurement object as comparison reference points from the first captured image and the second captured image. The shape data creation unit 301 may also use a combination of comparison reference points extracted from feature points such as the edges of the measurement object and comparison reference points corresponding to the positions of the markers projected onto the measurement object.

Figures 8(a) and 8(b) are diagrams showing examples of projected images including markers. The shape data creation unit 301 can extract, as a comparison reference point, the center position of the black pattern shown in Figure 8(a) or a position specified by the shading of the stripe pattern shown in Figure 8(b).

[Aligning shape data using comparison reference points]
The reference data creation unit 302 aligns the first shape data and the second shape data to create reference first shape data and reference second shape data indicating the positions of the comparison reference points after the alignment. For example, the reference data creation unit 302 creates the reference first shape data and reference second shape data by converting the coordinates of at least one of the first shape data or the second shape data so that the distances between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple comparison reference points indicated by the second position information become closer.

式（１）中、Ｎは、比較基準点の数であり、ａ_ｉは、第１位置情報が示すｉ番目の比較基準点の座標であり、ｂ_ｉは、第２位置情報が示すｉ番目の比較基準点の座標である。これらの同一の順番は、空間上に存在する同じ比較基準点を表すものとする。一般に、第１形状データと第２形状データとでは、それぞれ異なる個数の比較基準点を観測するが、位置合わせの誤差を算出するのに使用されるのは、第１形状データと第２形状データとで共通に観測された比較基準点である。基準データ作成部３０２は、誤差ｅが最小になるように複数の比較基準点の座標ｂ_ｉを位置合わせする。このとき、基準データ作成部３０２は、複数の比較基準点の座標ｂ_ｉに対応する第２形状データの座標を複数の比較基準点の座標ｂ_ｉとともに変換して基準第２形状データとする。 The alignment error e between the first shape data and the second shape data is expressed by the following equation (1).

In formula (1), N is the number of comparison reference points, a _i is the coordinate of the i-th comparison reference point indicated by the first position information, and b _i is the coordinate of the i-th comparison reference point indicated by the second position information. The same order of these represents the same comparison reference points existing in space. In general, the first shape data and the second shape data each observe a different number of comparison reference points, but the comparison reference points observed in common in the first shape data and the second shape data are used to calculate the alignment error. The reference data creation unit 302 aligns the coordinates b _i of the multiple comparison reference points so that the error e is minimized. At this time, the reference data creation unit 302 converts the coordinates of the second shape data corresponding to the coordinates b _i of the multiple comparison reference points together with the coordinates b _i of the multiple comparison reference points to obtain the reference second shape data.

In the example of this specification, the reference data creation unit 302 does not convert the coordinates of the first shape data when aligning the first shape data with the second shape data, but the reference data creation unit 302 may minimize the error e by converting the coordinates of both the first shape data and the second shape data. The reference data creation unit 302 may minimize the error e by converting only the coordinates of the first shape data when aligning the first shape data with the second shape data. The reference data creation unit 302 outputs the created first reference shape data and second reference shape data to the output unit 304.

[Adding changes to the comparison reference point]
The post-change data creation unit 303 changes the positions of at least some or all of the multiple comparison reference points indicated by the second position information by a predetermined change amount. The predetermined change amount is determined, for example, according to the measurement accuracy of the shape measurement device 100. As an example, the post-change data creation unit 303 may change at least one of the orientations or magnitudes of the individual positions of the multiple comparison reference points so as to have a specific distribution or a random distribution. The predetermined change amount may specify a maximum value or a standard deviation value of at least one of the orientations or magnitudes for changing the individual positions of the multiple comparison reference points.

The post-change data creation unit 303 changes the positions of at least some of the comparison reference points indicated by the second position information by a predetermined change amount, and then converts the coordinates of the first shape data so that the distance between the positions of the comparison reference points indicated by the first position information and the positions of the comparison reference points indicated by the second position information becomes closer to each other, to obtain the changed first shape data. More specifically, the post-change data creation unit 303 sets the coordinates of the comparison reference points indicated by the second position information in the above-mentioned formula (1) as a _i , sets the coordinates of the comparison reference points indicated by the first position information as b _i , and aligns the coordinates of the comparison reference points b _i indicated by the first position information so that the error e shown in formula (1) is minimized. The reference data creation unit 302 converts the coordinates of the first shape data corresponding to the coordinates b _i of the comparison reference points together with the coordinates b _i of the comparison reference points. The post-change data creation unit 303 outputs the changed first shape data, which is the first shape data after the conversion, to the output unit 304.

In addition, the post-change data creation unit 303 may change the coordinate positions of at least some or all of the multiple comparison reference points indicated by the first position information by a predetermined change amount, instead of the comparison reference points indicated by the second position information. Similar to when the positions of the multiple comparison reference points indicated by the second position information are changed, the post-change data creation unit 303 may change the positions of at least some of the multiple comparison reference points indicated by the first position information by a predetermined change amount, and then convert the coordinates of the first shape data after changing the coordinate positions so that the distance between the positions of these multiple comparison reference points and the positions of the multiple comparison reference points indicated by the second position information becomes closer, to obtain the changed first shape data.

In addition, the post-change data creation unit 303 may change both the comparison reference point indicated by the first position information and the comparison reference point indicated by the second position information. The post-change data creation unit 303 changes the coordinate positions of at least some of the comparison reference points among the multiple comparison reference points indicated by the first position information by a predetermined first change amount. The post-change data creation unit 303 changes the coordinate positions of at least some of the multiple comparison reference points among the multiple comparison reference points indicated by the second position information by a predetermined second change amount. After changing the positions of the comparison reference points indicated by the first position information and the second position information, the post-change data creation unit 303 may create the changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points corresponding to the first position information after the coordinate positions have been changed and the positions of the multiple comparison reference points corresponding to the second position information after the coordinate positions have been changed becomes closer.

[Determining whether alignment is good or bad]
The output unit 304 determines whether the changed first shape data created by the changed data creation unit 303 satisfies a predetermined condition. The output unit 304 specifies the difference between the reference first shape data created by the reference data creation unit 302 and the changed first shape data created by the changed data creation unit 303. For example, the output unit 304 specifies the amount of deviation of corresponding coordinates in the two shape data as the difference between the two shape data. The output unit 304 determines whether the difference between the two shape data is equal to or less than a threshold as a predetermined condition. The threshold is determined according to, for example, the measurement accuracy required for the shape measuring device 100. In addition, when determining the difference between the shape data, the output unit 304 may calculate the amount of deviation between the second shape data and the reference first shape data and the amount of deviation between the second shape data and the changed first shape data, and use the difference between the two as an index.

When the changed first shape data created by the post-change data creation unit 303 satisfies a predetermined condition, the output unit 304 creates combined shape data by combining the reference first shape data and the reference second shape data created by the reference data creation unit 302. In the example of this specification, the output unit 304 determines that the alignment between the first shape data and the second shape data is good and creates combined shape data when the changed first shape data satisfies a predetermined condition that the difference between the reference first shape data and the changed first shape data is equal to or less than a threshold value. The output unit 304 outputs the created combined shape data. For example, the output unit 304 outputs the created combined shape data to the display unit 4. In this way, the output unit 304 can avoid using shape data that results in poor alignment, thereby obtaining highly accurate results.

When the difference between the reference first shape data and the changed first shape data exceeds a threshold, the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. In this case, the output unit 304 creates modified first shape data by removing the portion of the reference first shape data where the difference from the changed first shape data is equal to or greater than a reference value. For example, the output unit 304 creates modified first shape data by removing the portion where the deviation amount of the corresponding coordinates in the two shape data is equal to or greater than a threshold. The threshold is determined, for example, according to the measurement accuracy required for the shape measurement device 100. The output unit 304 creates modified combined shape data by combining the reference second shape data created by the reference data creation unit 302 and the created modified first shape data.

The output unit 304 outputs the created modified bond shape data to the display unit 4. The output unit 304 may output the modified bond shape data to an external device via a communication interface. The output unit 304 creates the modified bond shape data using a portion where the difference between the reference first shape data and the changed first shape data is relatively small, improving the accuracy of the created shape data. The output unit 304 may not output the bond shape data and modified bond data if the difference between the reference first shape data and the changed first shape data exceeds a threshold value.

The output unit 304 may also output, together with the created combined shape data, to the display unit 4, numerical information indicating the difference between the reference first shape data and the changed first shape data, or a color map indicating the difference between the reference first shape data and the changed first shape data. In this case, the output unit 304 may not need to determine whether the difference between the reference first shape data and the changed first shape data is equal to or less than a threshold value. In this way, the output unit 304 may enable the user to determine whether the alignment between the first shape data and the second shape data is good or bad.

In addition, the output unit 304 is not limited to an example in which the difference between the reference first shape data and the changed first shape data is equal to or less than a threshold value, and determines that the changed first shape data satisfies this predetermined condition. For example, the output unit 304 may compare the reference first shape data with the changed second shape data. The output unit 304 may identify the amount of deviation of the coordinates corresponding to the reference second shape data in the changed first shape data, and determine that the changed first shape data satisfies the predetermined condition when the identified amount of deviation is equal to or less than a threshold value. The threshold value is determined, for example, according to the measurement accuracy required of the shape measuring device 100. At this time, the output unit 304 may create combined shape data by combining the reference first shape data and the reference second shape data when the identified amount of deviation is equal to or less than the threshold value.

[Registration using a single shape data]
The shape data diagnostic unit 305 judges whether the first shape data can be aligned with other shape data before aligning the first shape data with the second shape data. At that time, the shape data diagnostic unit 305 may notify the user of the judgment result in advance. Figures 9(a) and 9(b) are diagrams showing a method for the shape data diagnostic unit 305 to judge whether the first shape data can be aligned with other shape data. Figure 9(a) shows two pieces of first shape data before alignment. Figure 9(b) shows the state of alignment after changing the comparison reference point.

The shape data diagnostic unit 305 copies the first shape data and changes the positions of all or some of the multiple comparison reference points indicated by one of the first position information by a first change amount. For example, the shape data diagnostic unit 305 changes the positions of the comparison reference points by the first change amount in the same manner as in the example of FIG. 3(a). At this time, the shape data diagnostic unit 305 may randomly give different change amounts to each comparison reference point. In addition, for the other first shape data, the shape data diagnostic unit 305 may similarly change the positions of all or some of the multiple comparison reference points indicated by the first position information by a second change amount, or may not change the positions of the comparison reference points. The second change amount corresponds to a change different from the first change amount. The shape data diagnostic unit 305 may determine the first change amount and the second change amount to be given based on the measurement accuracy of the shape measuring device 100, etc.

The shape data diagnosis unit 305 converts the coordinates of the comparison reference point indicated by at least one of the first position information so that the sum of the distances between each of the positions of the multiple comparison reference points including the comparison reference point changed by the first change amount and the positions of the corresponding comparison reference points including the comparison reference point changed by the second change amount or not changed is minimized. For example, the shape data diagnosis unit 305 defines the coordinates of the i-th comparison reference point including the comparison reference point changed by the first change amount as a _i in the above formula (1), defines the coordinates of the corresponding comparison reference point including the comparison reference point changed by the second change amount as b _i , and aligns the coordinates b _i of the multiple comparison reference points so that the error e is minimized. At this time, the shape data diagnosis unit 305 converts the coordinates of the first shape data corresponding to the comparison reference point of the coordinate b _i together with the coordinate b _i of the comparison reference point. In the example of FIG. 9B, the shape data diagnosis unit 305 does not convert the coordinates of the first shape data corresponding to the comparison reference point of the coordinate a _i .

In this example, two pieces of first shape data are used, but the shape data diagnosis unit 305 may prepare more pieces of first shape data and perform similar alignment multiple times by giving different amounts of position change to the coordinates of the comparison reference point for each piece of shape data. In this way, the shape data diagnosis unit 305 can take into account various changes as the amount of position change, thereby making it possible to make a more reliable judgment.

In FIG. 9(b), the first shape data corresponding to a plurality of comparison reference points, including a comparison reference point changed by the shape data diagnosis unit 305 by a first change amount, is shown by a dashed line, and the first shape data corresponding to a plurality of comparison reference points, including a comparison reference point changed by the shape data diagnosis unit 305 by a second change amount, is shown by a solid line.

If the difference between the converted first shape data and the same first shape data before conversion exceeds a threshold, the shape data diagnosis unit 305 determines that this first shape data cannot be used to align with other shape data. The difference between the two first shape data is, for example, the amount of deviation between corresponding coordinates in the two first shape data. For example, the shape data diagnosis unit 305 displays a message on the display unit 4 indicating that the first shape data cannot be used to align with other shape data. The threshold is determined, for example, according to the accuracy required for measuring the shape by the shape measurement device 100.

On the other hand, if the difference between the first shape data after conversion and the same first shape data before conversion is equal to or less than a threshold value, the shape data diagnosis unit 305 does not notify that the first shape data cannot be used for alignment. In the same manner, the shape data diagnosis unit 305 performs diagnosis on each of the multiple acquired shape data. By using the multiple shape data selected in this manner to align different shape data, it is possible to improve the accuracy and efficiency of alignment. Furthermore, the shape data diagnosis unit 305 may determine whether the second shape data can be aligned with other shape data in the same manner as when determining whether the first shape data can be aligned with other shape data.

[Modification for determining whether alignment is good or bad depending on vibration amount or temperature]
The output unit 304 acquires the vibration amount of at least one of the shape measuring device 100 or the measurement object when the imaging unit 2 captures an image. For example, the output unit 304 measures the vibration amount of the measurement head 10 using a three-axis acceleration sensor (not shown) attached to the measurement head 10 and acquires the measurement result. The vibration amount is, for example, a value indicating the magnitude of vibration of the imaging unit 2 or the measurement object when the imaging unit 2 captures an image of the measurement object. The output unit 304 acquires at least one of the temperature of the shape measuring device 100, the temperature of the measurement object, or the temperature of the surrounding environment when the imaging unit 2 captures an image. For example, the output unit 304 acquires the temperature measurement result from a temperature sensor (not shown) that measures the temperature of the measurement head 10 of the shape measuring device 100.

The output unit 304 determines whether the acquired vibration amount is equal to or less than an allowable value. The allowable value of the vibration amount is determined, for example, according to the accuracy required in measuring the object to be measured. If the vibration amount is equal to or less than the allowable value and the changed first shape data created by the changed data creation unit 303 satisfies the above-mentioned predetermined condition, the output unit 304 may output combined shape data that combines the reference first shape data and the reference second shape data.

The output unit 304 may also determine whether the acquired temperature is equal to or lower than an allowable value. The allowable temperature value is determined, for example, according to the accuracy required in measuring the object to be measured. When the acquired temperature is equal to or lower than the allowable value and the changed first shape data created by the changed data creation unit 303 satisfies the above-mentioned predetermined condition, the output unit 304 may output combined shape data that combines the reference first shape data and the reference second shape data. In this way, the output unit 304 determines whether the alignment of the shape data is good or bad by using an index other than the comparison reference point in combination, and therefore the accuracy of the determination can be further improved.

[Alignment of three or more pieces of shape data]
The reference data creation unit 302 may align three or more pieces of shape data. FIG. 10 is a diagram showing an example of aligning three pieces of shape data A to C. Shape data A is shown by a thick solid line. Shape data B is shown by a dashed line. Shape data C is shown by a thin solid line. In the example of FIG. 10, the reference data creation unit 302 sequentially aligns three or more pieces of shape data A to C one by one. Furthermore, the reference data creation unit 302 may align the pieces of shape data while changing the order of alignment so as to become more appropriate. The reference data creation unit 302 may align multiple pieces of shape data simultaneously.

As shown in FIG. 10, it is assumed that the reference data creation unit 302 has aligned the shape data A and the shape data B. At this time, it is assumed that the output unit 304 has determined that the alignment between the shape data A and the shape data B is poor.

At this time, the reference data creation unit 302 attempts to align the shape data A with the shape data C, or the shape data B with the shape data C. For example, the reference data creation unit 302 aligns the shape data B with the shape data C as shown in FIG. 10. In this case, the output unit 304 determines that the alignment between the shape data B and the shape data C is good, and creates combined shape data B+C by combining the shape data B and the shape data C.

Next, the reference data creation unit 302 aligns the shape data A with the combined shape data B+C. At this time, the output unit 304 determines that the alignment between the shape data A and the combined shape data B+C is good, and creates combined shape data A+B+C by combining the shape data A with the combined shape data B+C. The number of comparison reference points for the combined shape data B+C increases by combining, which allows for good alignment with the shape data A. In this way, the reference data creation unit 302 can improve the accuracy of alignment of multiple shape data by appropriately selecting the order of alignment, and can efficiently use the shape data without discarding it.

[Modification of converting coordinates of first shape data in position matching]
The post-change data creation unit 303 may convert the coordinates of the second shape data instead of converting the coordinates of the first shape data to create the changed first shape data in the alignment using the comparison reference point. The post-change data creation unit 303 changes the coordinate positions of at least some or all of the comparison reference points indicated by the first position information by a predetermined change amount. The post-change data creation unit 303 converts the coordinates of the second shape data in the same manner as when converting the coordinates of the first shape data, so that the distance between the positions of the multiple comparison reference points after changing the coordinate positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple comparison reference points indicated by the second position information becomes closer. Hereinafter, the second shape data after the coordinate conversion is also referred to as changed second shape data.

At this time, the post-change data creation unit 303 may change the coordinate positions of at least some or all of the multiple comparison reference points indicated by the second position information by a predetermined change amount, instead of the comparison reference points indicated by the first position information. After changing the positions of at least some of the multiple comparison reference points indicated by the second position information by a predetermined change amount, the post-change data creation unit 303 may convert the coordinates of the second shape data after changing the coordinate positions so that the distance between the positions of these multiple comparison reference points and the positions of the multiple comparison reference points indicated by the first position information becomes closer, and obtain the changed second shape data.

The output unit 304 determines whether the changed second shape data created by the changed data creation unit 303 satisfies a predetermined condition. If the changed second shape data created by the changed data creation unit 303 satisfies a predetermined condition, the output unit 304 determines that the alignment between the first shape data and the second shape data is good. For example, if the difference between the reference second shape data and the changed second shape data is equal to or less than a threshold, the output unit 304 determines that the alignment between the first shape data and the second shape data is good. At this time, the output unit 304 outputs combined shape data that combines the reference first shape data and the reference second shape data.

On the other hand, if the changed second shape data created by the changed data creation unit 303 does not satisfy the predetermined condition, the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. For example, if the difference between the reference second shape data and the changed second shape data exceeds a threshold, the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. In this case, the output unit 304 creates modified second shape data by removing the portion of the reference second shape data where the difference from the changed second shape data is equal to or greater than the reference value. The output unit 304 creates modified combined shape data by combining the reference first shape data created by the reference data creation unit 302 and the created modified second shape data. The output unit 304 outputs the created modified combined shape data to the display unit 4.

[Processing procedure for alignment with multiple shape data]
11 is a flowchart showing a processing procedure for aligning a plurality of shape data by the shape measuring device 100. This processing procedure starts, for example, when an operation receiving unit (not shown) of the control unit 3 receives a user's operation instructing measurement of the shape of a measurement object. First, the shape data creation unit 301 generates first shape data and second shape data based on a first captured image and a second captured image generated by causing the imaging unit 2 to capture an image of the measurement object at a first relative position and a second relative position (S101).

The reference data creation unit 302 creates reference first shape data and reference second shape data by converting the coordinates of the second shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple comparison reference points indicated by the second position information becomes closer (S102). The changed data creation unit 303 changes the positions of some or all of the multiple comparison reference points indicated by the first position information by a predetermined change amount. Note that, instead of changing the positions of the multiple comparison reference points indicated by the first position information, the changed data creation unit 303 may change the positions of some or all of the multiple comparison reference points indicated by the second position information by a predetermined change amount, or may change both the comparison reference points indicated by the first position information and the comparison reference points indicated by the second position information.

After changing the positions of the comparison reference points, the post-change data creation unit 303 creates changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of these multiple comparison reference points and the positions of the multiple comparison reference points indicated by the second position information becomes closer (S103).

The output unit 304 identifies the difference between the reference first shape data created by the reference data creation unit 302 and the changed first shape data created by the changed data creation unit 303. The output unit 304 determines whether the difference between the reference first shape data and the changed first shape data is equal to or less than a threshold (S104). If the difference between the reference first shape data and the changed first shape data is equal to or less than the threshold (YES in S104), the output unit 304 outputs combined shape data that combines the reference first shape data and the reference second shape data created by the reference data creation unit 302 to the display unit 4 (S105). The operation acceptance unit determines whether the user has accepted an operation instructing the end of the measurement of the measurement object (S106). If the operation acceptance unit determines that the user has accepted an operation instructing the end of the measurement of the measurement object (YES in S106), the process ends.

If the difference between the reference first shape data and the changed first shape data exceeds the threshold value in the judgment of S104 (NO in S104), the output unit 304 creates modified first shape data by removing the portions of the reference first shape data where the difference from the changed first shape data is equal to or greater than the reference value. At this time, if the positional deviation amount is large at all portions, the output unit 304 does not create modified first shape data. The output unit 304 creates modified combined shape data by combining the reference second shape data created by the reference data creation unit 302 and the created modified first shape data. The output unit 304 outputs the created modified combined shape data to the display unit 4 (S107) and proceeds to the judgment of S106. If the operation acceptance unit judges in the judgment of S106 that the user's operation to instruct the end of the measurement of the measurement object has not been accepted (NO in S106), the process returns to S101.

In addition, if the difference between the reference first shape data and the changed first shape data exceeds a threshold value in the determination of S104 (NO in S104), the output unit 304 may skip the process of S107 and proceed to the process of S106. After the changed data creation unit 303 creates the changed first shape data in S103, the output unit 304 may skip the determination of S104 and proceed to the process of S107.

[Modification for changing the amount of change for changing the comparison reference point indicated by the first position information]
The post-change data creation unit 303 may change the amount of change that changes the coordinate position of the comparison reference point indicated by the first position information or the second position information. Every time the post-change data creation unit 303 changes the amount of change, it creates changed first shape data corresponding to the changed amount of change. The output unit 304 may output combined shape data when the multiple changed first shape data created by the post-change data creation unit 303 satisfy a predetermined condition.

Figure 12 is a flowchart showing the processing procedure for aligning multiple shape data by the shape measuring device 100 in this modified example. S101 to S103, S105, and S106 in Figure 12 are similar to S101 to S103, S105, and S106 in Figure 11, respectively, and therefore will not be described.

After creating the changed first shape data in S103, the changed data creation unit 303 changes the amount of change for changing the coordinate positions of all comparison reference points indicated by the second position information (S201). For example, the changed data creation unit 303 changes at least one of the direction or distance for changing all comparison reference points indicated by the second position information. The output unit 304 determines whether the number of times the changed data creation unit 303 has changed the amount of change is equal to or greater than a target value (S202).

When the number of times that the post-change data creation unit 303 has changed the amount of change is equal to or greater than the target value (YES in S202), the output unit 304 identifies the difference between the reference first shape data created by the reference data creation unit 302 and the changed first shape data created by the post-change data creation unit 303 each time the post-change data creation unit 303 changes the amount of change. The output unit 304 identifies statistics of the identified multiple differences. The statistics is, for example, a maximum value or a standard deviation value.

The output unit 304 determines whether the statistical amount of the difference between the reference first shape data and the changed first shape data is equal to or less than the threshold (S203). When the output unit 304 determines that the statistical amount of the difference between the reference first shape data and the changed first shape data is equal to or less than the threshold (YES in S203), the output unit 304 outputs the combined shape data, which is the combination of the reference first shape data and the reference second shape data created by the reference data creation unit 302, to the display unit 4 (S105), and proceeds to the determination in S106.

If the determination in S202 is that the number of times the post-change data creation unit 303 has changed the amount of change is less than the target value (NO in S202), the output unit 304 returns to the process of S103. At this time, the post-change data creation unit 303 changes the positions of the comparison reference points indicated by the second position information by the post-change amount of change, and then creates the changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points and the positions of the multiple comparison reference points indicated by the first position information becomes closer (S103). Also, instead of creating the changed first shape data every time the amount of change is changed, the changed data creation unit 303 may create changed second shape data corresponding to the changed amount of change.

When the output unit 304 determines in the judgment of S203 that the statistical amount of the difference between the reference first shape data and the changed first shape data is greater than the threshold value (NO in S203), it creates modified first shape data by removing the portions of the reference first shape data where the statistical amount of the difference from the changed first shape data is equal to or greater than the reference value. At this time, if the positional deviation amount is large at all portions, the output unit 304 does not create modified first shape data. The output unit 304 creates modified combined shape data by combining the reference second shape data created by the reference data creation unit 302 and the created modified first shape data. The output unit 304 outputs the created modified combined shape data to the display unit 4 (S204) and proceeds to the judgment of S106.

According to this modified example, when the post-change data creation unit 303 changes the multiple comparison reference points indicated by the first position information, it calculates the statistics of the difference between the reference first shape data and the changed first shape data by changing the way in which the changes are made, so that it is possible to more accurately determine whether the first shape data and the second shape data are aligned.

In this modified example, the output unit 304 outputs the combined shape data to the display unit 4 when the statistical amount of the difference between the reference first shape data and the changed first shape data is equal to or less than a threshold value. However, the present invention is not limited to the example of comparing the reference first shape data and the changed first shape data. For example, when the difference between the changed first shape data corresponding to any of the amounts of change changed by the changed data creation unit 303 and the changed first shape data corresponding to another amount of change changed by the changed data creation unit 303 is equal to or less than a threshold value, the output unit 304 may determine that the changed first shape data satisfies a predetermined condition and output the combined shape data obtained by combining the reference first shape data and the reference second shape data to the display unit 4 or the like. On the other hand, when the difference between the changed first shape data corresponding to any of the amounts of change changed by the changed data creation unit 303 and the changed first shape data corresponding to another amount of change is greater than a threshold value, the output unit 304 may not output the combined shape data.

[Modification for changing the amount of change in the comparison reference point indicated by the first position information and the second position information]
The post-change data creation unit 303 changes the comparison reference point indicated by the first position information by a first change amount, and changes the comparison reference point indicated by the second position information by a second change amount. The post-change data creation unit 303 may change the first change amount that changes the coordinate position of the comparison reference point indicated by the first position information, and the second change amount that changes the coordinate position of the comparison reference point indicated by the second position information. The post-change data creation unit 303 may create changed first shape data corresponding to the changed first change amount and second change amount each time the post-change data creation unit 303 changes the first change amount and the second change amount.

Figure 13 is a flowchart showing the processing procedure for aligning multiple shape data by the shape measuring device 100 in this modified example. S101, S102, and S106 in Figure 13 are similar to S101, S102, and S106 in Figure 11, respectively, and S204 in Figure 13 is similar to S204 in Figure 12, so a description will be omitted.

The post-change data creation unit 303 changes the coordinate positions of at least some of the multiple comparison reference points indicated by the first position information by a first change amount in S301. The post-change data creation unit 303 changes the coordinate positions of at least some of the multiple comparison reference points indicated by the second position information by a second change amount. The post-change data creation unit 303 changes the coordinate positions of the multiple comparison reference points indicated by the first position information and the second position information, respectively, and then creates the changed first shape data by converting the coordinates of the first shape data after the coordinate positions are changed so that the distance between the positions of the multiple comparison reference points corresponding to the first position information after the coordinate positions are changed and the positions of the multiple comparison reference points corresponding to the second position information after the coordinate positions are changed becomes closer (S301).

The post-change data creation unit 303 changes both the first change amount and the second change amount (S302). For example, the post-change data creation unit 303 changes the direction or distance in which all comparison reference points indicated by the first position information are changed, and the direction or distance in which all comparison reference points indicated by the second position information are changed. The output unit 304 determines whether the number of times the post-change data creation unit 303 has changed both the first change amount and the second change amount is equal to or greater than a target value (S303).

If the number of times that the post-change data creation unit 303 has changed both the first change amount and the second change amount is equal to or greater than a target value (YES in S303), the output unit 304 determines whether the multiple changed first shape data created by the post-change data creation unit 303 satisfy a predetermined condition. If the multiple changed first shape data satisfy the predetermined condition (YES in S304), the output unit 304 outputs combined shape data that combines the reference first shape data and the reference second shape data created by the reference data creation unit 302.

More specifically, the output unit 304 identifies the difference between the reference first shape data created by the reference data creation unit 302 and the changed first shape data created by the changed data creation unit 303 each time the changed data creation unit 303 changes the amount of change. The output unit 304 identifies statistics of the identified multiple differences. The statistics is, for example, a maximum value or a standard deviation value. If the statistics of the identified multiple differences is equal to or less than a threshold value, the output unit 304 determines that the multiple changed first shape data satisfy a predetermined condition (YES in S304) and outputs the combined shape data (S305).

If the output unit 304 determines in S303 that the number of times the post-change data creation unit 303 has changed both the first change amount and the second change amount is less than the target value (NO in S303), the output unit 304 returns to the process of S301. Each time the post-change data creation unit 303 changes the first change amount and the second change amount, the output unit 304 creates changed first shape data corresponding to the changed first change amount and second change amount in S301 (S301). If the output unit 304 determines in S304 that the multiple changed first shape data created by the post-change data creation unit 303 do not satisfy the predetermined condition (NO in S304), the output unit 304 proceeds to the process of S204.

Second Embodiment
In the second embodiment, an example will be described in which a new comparison reference point is extracted when it is determined that the alignment between the first shape data and the second shape data is poor. Fig. 14 is a diagram showing the configuration of a shape measuring device 500 of the second embodiment. The shape measuring device 500 shown in Fig. 14 is similar to that in Fig. 4 except that it further includes an extraction unit 501. The same components as those in Fig. 4 are denoted by the same reference numerals as those in Fig. 4 and will not be described.

The extraction unit 501 extracts a new comparison reference point when the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. For example, when the output unit 304 determines that the difference between the reference second shape data created by the reference data creation unit 302 and the changed second shape data created by the changed data creation unit 303 exceeds a threshold, the extraction unit 501 extracts a new comparison reference point from the first captured image and the second captured image. Specifically, the extraction unit 501 re-searches for multiple feature points such as edges, undulations, or textures of the measurement object that are common between the first captured image and the second captured image, and extracts the found feature points as new comparison reference points. The extraction unit 501 notifies the reference data creation unit 302, the changed data creation unit 303, and the output unit 304 of the extracted new comparison reference point.

The reference data creation unit 302 re-creates the reference first shape data and the reference second shape data by re-aligning the first shape data and the second shape data using the comparison reference point extracted by the shape data creation unit 301 and the new comparison reference point extracted by the extraction unit 501. The reference data creation unit 302 outputs the created reference first shape data and reference second shape data to the output unit 304.

The post-change data creation unit 303 changes the positions of at least some of the comparison reference points, which are the multiple comparison reference points including the new comparison reference point extracted by the extraction unit 501 and which are indicated by the second position information, by a predetermined amount of change. After changing the positions of some of the comparison reference points, the post-change data creation unit 303 creates the changed first shape data again by converting the coordinates of the first shape data so that the distance between the positions of these multiple comparison reference points and the positions of the multiple comparison reference points indicated by the first position information becomes closer. The post-change data creation unit 303 may create the changed second shape data by converting the coordinates of the second shape data.

In addition to performing the same process as the shape data diagnosis unit 305 in FIG. 4, the shape data diagnosis unit 305 identifies a difference between the reference first shape data created by the reference data creation unit 302 using multiple comparison reference points including the new comparison reference point extracted by the extraction unit 501, and the changed first shape data created by the changed data creation unit 303 using multiple comparison reference points including the new comparison reference point. The shape data diagnosis unit 305 determines whether the identified difference is equal to or smaller than a threshold value. The shape data diagnosis unit 305 outputs the determination result to the output unit 304.

The output unit 304 displays the new comparison reference point on the display unit 4 together with the reference first shape data and the reference second shape data, on condition that the shape data diagnosis unit 305 determines that the difference between the reference first shape data created by the reference data creation unit 302 using a plurality of comparison reference points including the new comparison reference point and the changed first shape data created by the changed data creation unit using the new comparison reference point is equal to or less than a threshold value. On the other hand, when the identified difference exceeds the threshold value, the output unit 304 does not display the new comparison reference point on the display unit 4 together with the reference first shape data and the reference second shape data. When the identified difference is equal to or less than the threshold value, the output unit 304 may display combined shape data that combines the reference first shape data and the reference second shape data.

At this time, the extraction unit 501 may repeat the extraction of a new comparison reference point. In this way, the extraction unit 501 extracts a new comparison reference point when the output unit 304 determines that the alignment between the first shape data and the second shape data is poor, thereby improving the accuracy of the alignment between the first shape data and the second shape data.

In the second embodiment, an example has been described in which the extraction unit 501 extracts a new comparison reference point when the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. However, the present invention is not limited to this. For example, the reference data creation unit 302 may change the comparison reference point used for alignment when the output unit 304 determines that the alignment between the first shape data and the second shape data is poor. For example, the reference data creation unit 302 may avoid using a comparison reference point with a relatively large amount of positional deviation and perform alignment using a comparison reference point with a relatively small amount of positional deviation. In this way, the reference data creation unit 302 can avoid using a poor comparison reference point among the multiple comparison reference points.

Third Embodiment
In the first and second embodiments, an example was described in which the coordinates of the first shape data or the second shape data are converted so that the distance between the position of the comparison reference point indicated by the first position information and the position of the comparison reference point indicated by the second position information is minimized. In contrast, in the third embodiment, an example was described in which the coordinates of the first shape data or the second shape data are converted so that the distance between the position of the comparison reference point indicated by the first position information and the position of a reference point whose position is known in advance on the measurement object is minimized.

Figure 15 is a diagram showing the configuration of a shape measuring device 600 of the third embodiment. Compared to the shape measuring device 100 of Figure 4, the shape measuring device 600 differs in that it further includes an acquisition unit 601. In Figure 15, the functional blocks other than the acquisition unit 601 are the same as in Figure 4, so the same reference numerals are used and the description is omitted.

The acquisition unit 601 acquires information indicating the positions of multiple reference reference points on the measurement object or on the jig. The reference reference points are feature points on the measurement object whose positions are known in advance. For example, an external measurement device (not shown) capable of more accurate measurements than the shape measurement device 100 is used to extract multiple feature points such as edges, undulations, or markers as reference reference points from an image captured on the same measurement object or on the jig, and the positions of the extracted multiple reference reference points are measured with relatively high accuracy. The memory unit 5 stores information indicating the positions of the reference reference points measured by this external measurement device in advance. The acquisition unit 601 acquires information indicating the positions of the multiple reference reference points from the memory unit 5.

The reference data creation unit 302 creates reference first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the corresponding reference points for reference acquired by the acquisition unit 601 becomes closer. For example, the reference data creation unit 302 aligns the coordinates b i of the multiple comparison reference points so as to minimize the error e, assuming that the coordinates of the i-th reference reference point in the above-mentioned formula (1 ₎ are a _i and the i-th comparison reference point indicated by the first position information are b _i . Similarly, the reference data creation unit 302 creates reference second shape data by converting the coordinates of the second shape data so that the distance between the positions of the multiple comparison reference points indicated by the second position information and the positions of the corresponding reference points for reference acquired by the acquisition unit 601 becomes closer.

As in the example of FIG. 4, the post-change data creation unit 303 changes the coordinate positions of at least some or all of the multiple comparison reference points indicated by the first position information and the second position information by a predetermined change amount. The predetermined change amount is determined, for example, according to the measurement accuracy of the shape measurement device 600. The post-change data creation unit 303 changes the coordinate positions of at least some of the multiple comparison reference points indicated by the first position information by the predetermined change amount, and then creates the changed first shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points after the coordinate positions are changed and the positions of the corresponding reference points becomes closer.

The post-change data creation unit 303 similarly changes the coordinate positions of at least some of the multiple comparison reference points indicated by the second position information by a predetermined change amount, and then creates the changed second shape data by converting the coordinates of the second shape data so that the distance between the positions of the multiple comparison reference points after the coordinate positions have been changed by the predetermined change amount and the positions of the corresponding reference points becomes closer.

The output unit 304 functions as a determination unit that determines whether the changed first shape data satisfies a predetermined condition. The output unit 304 identifies the difference between the reference first shape data created by the reference data creation unit 302 and the changed first shape data created by the changed data creation unit 303. For example, the output unit 304 identifies the amount of deviation between corresponding coordinates in the two shape data as the difference between the two shape data.

The output unit 304 determines whether the difference between the two shape data is equal to or less than a threshold value as a predetermined condition. The threshold value is determined, for example, according to the measurement accuracy required of the shape measuring device 100. In addition, when determining the difference between the shape data, the output unit 304 may calculate the amount of deviation between the second shape data and the reference first shape data, and the amount of deviation between the second shape data and the changed first shape data, and use the difference between the two as an index.

The output unit 304 determines whether the second changed shape data satisfies a predetermined condition. The output unit 304 identifies the difference between the reference second shape data created by the reference data creation unit 302 and the changed second shape data created by the changed data creation unit 303. For example, the output unit 304 identifies the amount of deviation of corresponding coordinates in the two shape data as the difference between the two shape data. The output unit 304 determines whether the difference between the two shape data is equal to or less than a threshold as a predetermined condition. The threshold is determined according to, for example, the measurement accuracy required of the shape measurement device 100. In addition, when determining the difference between the shape data, the output unit 304 may calculate the amount of deviation between the first shape data and the reference second shape data, calculate the amount of deviation between the first shape data and the changed second shape data, and use the difference between the two calculated amounts of deviation as an index.

When the first changed shape data or the second changed shape data created by the post-change data creation unit 303 satisfies a predetermined condition, the output unit 304 creates combined shape data by combining the reference first shape data and the reference second shape data created by the reference data creation unit 302. On the other hand, when the first changed shape data or the second changed shape data created by the post-change data creation unit 303 does not satisfy the predetermined condition, the output unit 304 does not create combined shape data. In addition, when both the first changed shape data and the second changed shape data created by the post-change data creation unit 303 satisfy the predetermined condition, the output unit 304 may create combined shape data by combining the reference first shape data and the reference second shape data created by the reference data creation unit 302.

In the third embodiment, an example has been described in which the post-change data creation unit 303 changes the coordinate positions of at least some of the multiple comparison reference points indicated by the first position information or the second position information by a predetermined amount of change. However, the present invention is not limited to this. The post-change data creation unit 303 may change the coordinate positions of the reference points for reference by a predetermined amount of change.

For example, the post-change data creation unit 303 changes the coordinate positions of at least some of the multiple reference reference points by a predetermined change amount. The predetermined change amount is, for example, a maximum error value expected from the accuracy of an external measurement device that measures the positions of the reference reference points. After changing the coordinate positions of at least some of the multiple reference reference points by the predetermined change amount, the post-change data creation unit 303 may create the first changed shape data by converting the coordinates of the first shape data so that the distance between the positions of the multiple comparison reference points indicated by the first position information and the positions of the multiple reference reference points after the coordinate positions have been changed becomes closer.

Similarly, the post-change data creation unit 303 may create the second changed shape data by converting the coordinates of the second shape data so that the sum of the distances between the positions of the multiple comparison reference points indicated by the second position information and the positions of the multiple reference reference points after the coordinate positions of at least some of the multiple reference reference points are changed by a predetermined change amount is minimized. The post-change data creation unit 303 may also change both the comparison reference points and the reference reference points indicated by the first position information.

When three or more pieces of shape data are combined, the output unit 304 may, for example, use the method described in the first embodiment to create one combined shape data by minimizing the distance between the comparison reference point indicated by the first position information and the comparison reference point indicated by the second position information, or may use the method described in the third embodiment to create one combined shape data by minimizing the distance between the comparison reference point and the reference point for reference. In addition, the output unit 304 may combine the method described in the first embodiment with the method described in the third embodiment. For example, the output unit 304 may combine some of the shape data using the method described in the first embodiment, and combine the remaining shape data using the method described in the third embodiment to create one combined shape data.

[Modification for selecting a combination of comparison reference points]
The shape data creation unit 301 may create a plurality of combinations consisting of a plurality of comparison reference points. For example, the shape data creation unit 301 projects a projection image including a plurality of markers onto the measurement object, and creates a first combination of comparison reference points identified by extracting the projected markers. The shape data creation unit 301 creates a second combination of comparison reference points identified by extracting a plurality of feature points such as edges or undulations of the measurement object, or textures unique to the measurement object.

The reference data creation unit 302 creates reference first shape data and reference second shape data corresponding to each of the multiple combinations of multiple comparison reference points. For example, the reference data creation unit 302 creates the reference first shape data and reference second shape data by alignment using a first combination of comparison reference points. The reference data creation unit 302 creates the reference first shape data and reference second shape data by alignment using a second combination of comparison reference points.

The post-change data creation unit 303 creates multiple pieces of changed second shape data corresponding to each of multiple combinations of comparison reference points. For example, the post-change data creation unit 303 creates changed second shape data corresponding to a first combination of comparison reference points. The post-change data creation unit 303 creates changed second shape data corresponding to a second combination of comparison reference points.

The output unit 304 identifies a combination that minimizes the difference between the reference second shape data and the changed second shape data. For example, the output unit 304 identifies the difference between the reference second shape data corresponding to the first combination of comparison reference points and the changed second shape data corresponding to the first combination of comparison reference points. Similarly, the output unit 304 identifies the difference between the reference second shape data corresponding to the second combination of comparison reference points and the changed second shape data corresponding to the second combination of comparison reference points.

The output unit 304 compares the two identified differences to identify the combination of comparison reference points that results in the smallest difference between the reference second shape data and the changed second shape data. The output unit 304 creates combined shape data by combining the reference first shape data corresponding to the identified combination with the reference second shape data used to identify the smallest difference, and outputs the created combined shape data. The output unit 304 uses the combination that results in the best alignment of the shape data out of the multiple combinations of comparison reference points, thereby improving the accuracy of alignment.

The shape data creation unit 301 may also create any combination. For example, the shape data creation unit 301 may include different types of comparison reference points in the same combination, such as a comparison reference point identified by extracting a plurality of projected markers, a comparison reference point identified by extracting a plurality of feature points such as an edge or undulation of the measurement object, or a texture unique to the measurement object.

[Effects of the shape measuring device according to this embodiment]
As described above, the accuracy of three-dimensional measurement can be improved by the output unit 304 outputting the shape data of the measurement target object created using the first shape data and the second shape data that have been satisfactorily aligned, thereby enabling the output unit 304 to expand the measurement range that can be measured with good measurement accuracy.

The shape measuring device may align the two shape data using the method that the output unit 304 determines to provide better alignment out of two methods: aligning the first shape data with the second shape data using a comparison reference point, and aligning the first shape data with the second shape data using the amount of movement or amount of change in posture when the measuring head 10 is moved or its posture is changed from the first relative position to the second relative position.

Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the invention. For example, all or part of the device can be configured by distributing or integrating functionally or physically in any unit. In addition, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment resulting from the combination also has the effect of the original embodiment.

REFERENCE SIGNS LIST 1 Projection unit 2 Imaging unit 3 Control unit 4 Display unit 5 Memory unit 10 Measuring head 21 Lens 22 Imaging element 61 Sub-projection unit 100 Shape measuring device 301 Shape data creation unit 302 Reference data creation unit 303 Changed data creation unit 304 Output unit 305 Shape data diagnosis unit 500 Shape measuring device 501 Extraction unit 600 Shape measuring device 601 Acquisition unit

Claims (13)

a shape data creation unit that creates, based on a first captured image generated by the imaging unit imaging the measurement object at a first relative position, first shape data indicating a shape of at least a portion of the measurement object and first position information indicating coordinates of a plurality of comparison reference points obtained when the first shape data is acquired, and creates, based on a second captured image generated by the imaging unit imaging the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least a portion of which differs from the first shape data, and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired;
a reference data creation unit that creates reference first shape data and reference second shape data by converting coordinates of at least one of the first shape data and the second shape data so that distances between positions of the plurality of comparison reference points indicated by the first position information and positions of the plurality of comparison reference points indicated by the second position information become closer;
(1) creating changed first shape data by converting coordinates of the first shape data so that a distance between positions of the plurality of comparison reference points after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the second position information by a predetermined change amount and positions of the plurality of comparison reference points indicated by the first position information becomes closer; or (2) creating changed first shape data by converting coordinates of the first shape data so that a distance between positions of the plurality of comparison reference points after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the first position information by a predetermined change amount and positions of the plurality of comparison reference points indicated by the second position information becomes closer. a changed data creation unit that creates the changed first shape data by converting the coordinates of the first shape data after the coordinate positions have been changed, or (3) creates the changed first shape data by converting the coordinates of the first shape data so that a distance between positions of a plurality of comparison reference points after the coordinate positions of at least some of the comparison reference points indicated by the second position information have been changed by a predetermined amount of change and positions of a plurality of comparison reference points after the coordinate positions of at least some of the comparison reference points indicated by the first position information have been changed by a predetermined amount of change becomes closer;
an output unit that outputs combined shape data obtained by combining the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition;
A shape measuring device having a the output unit acquires a vibration amount of at least one of the shape measuring device and the measurement object when the imaging unit captures an image, and outputs the combined shape data when the acquired vibration amount is equal to or less than a tolerable value and the changed first shape data satisfies the predetermined condition.
The shape measuring apparatus according to claim 1 . the output unit acquires at least one of a temperature of the shape measuring device, a temperature of the object to be measured, and a temperature of the surrounding environment when the imaging unit captures an image, and outputs the combined shape data when the acquired temperature is equal to or lower than a tolerance value and the changed first shape data satisfies the predetermined condition.
3. The shape measuring apparatus according to claim 1 or 2. the reference data creation unit creates the reference first shape data and the reference second shape data corresponding to each of a plurality of combinations of a plurality of comparison reference points;
the changed data creation unit creates a plurality of changed second shape data corresponding to the plurality of combinations, the changed second shape data being obtained by converting coordinates of the second shape data so that distances between positions of the plurality of comparison reference points after changing coordinate positions of the plurality of comparison reference points indicated by the first position information and positions of the plurality of comparison reference points indicated by the second position information become closer ;
the output unit outputs the combined shape data obtained by combining the reference first shape data corresponding to the combination in which the difference between the reference second shape data and the changed second shape data is the smallest, and the reference second shape data used to identify the smallest difference .
The shape measuring apparatus according to claim 1 . when a difference between the reference first shape data and the changed first shape data exceeds a threshold, the output unit does not output the combined shape data obtained by combining the reference second shape data and the reference first shape data.
The shape measuring apparatus according to claim 1 . When a difference between the reference first shape data and the changed first shape data exceeds a threshold value, the output unit creates corrected first shape data by removing a portion of the reference first shape data where the difference from the changed first shape data is equal to or greater than a reference value, and outputs corrected combined shape data by combining the corrected first shape data and the reference second shape data.
The shape measuring apparatus according to claim 1 . a shape data diagnosis unit that converts coordinates of at least one of the first shape data so that a sum of distances between each of positions of the multiple comparison reference points after positions of all or some of the multiple comparison reference points indicated by the first position information have been changed by a first change amount and a position of a corresponding comparison reference point after positions of all or some of the multiple comparison reference points indicated by the first position information have been changed by a second change amount different from the first change amount or the position of the comparison reference point has not been changed is minimized, and determines that the first shape data cannot be used for alignment when a difference between the first shape data after conversion and the first shape data before conversion exceeds a threshold value.
The shape measuring apparatus according to claim 1 . a shape data diagnosis unit that converts coordinates of at least one of the second shape data so that a sum of distances between each of positions of the multiple comparison reference points after positions of all or some of the multiple comparison reference points indicated by the second position information have been changed by a first change amount and a position of a corresponding comparison reference point after positions of all or some of the multiple comparison reference points indicated by the second position information have been changed by a second change amount different from the first change amount or the position of the comparison reference point has not been changed is minimized, and determines that the second shape data cannot be used for alignment when a difference between the second shape data after conversion and the second shape data before conversion exceeds a threshold value.
The shape measuring apparatus according to claim 1 . an extracting unit that extracts new comparison reference points from the first captured image and the second captured image when a difference between the reference first shape data and the changed first shape data exceeds a threshold;
a shape data diagnosis unit that determines whether a difference between the reference first shape data created by the reference data creation unit using the new comparison reference point extracted by the extraction unit and the changed first shape data created by the changed data creation unit using the new comparison reference point is equal to or smaller than a threshold value.
The shape measuring apparatus according to claim 1 . the changed data creation unit changes the amount of change that changes the coordinate position of the comparison reference point indicated by the first position information or the second position information, and creates the changed first shape data corresponding to the amount of change after the change each time the amount of change is changed;
The output unit outputs the combined shape data when the plurality of changed first shape data created by the changed data creation unit satisfies a predetermined condition.
The shape measuring apparatus according to claim 1 . the changed data creation unit creates the changed first shape data by converting coordinates of the first shape data after changing the coordinate positions of at least some of the comparison reference points among the plurality of comparison reference points indicated by the first position information so that a distance between a position of a plurality of comparison reference points after changing the coordinate positions of at least some of the comparison reference points among the plurality of comparison reference points indicated by the second position information by changing the coordinate positions of the at least some of the comparison reference points among the plurality of comparison reference points is reduced;
the post-change data creation unit changes the first change amount and the second change amount, and creates the post-change first shape data corresponding to the first change amount and the second change amount after the change each time the first change amount and the second change amount are changed;
The output unit outputs the combined shape data when the plurality of changed first shape data created by the changed data creation unit satisfies a predetermined condition.
The shape measuring apparatus according to claim 1 . a shape data creation unit that creates, based on a first captured image generated by the imaging unit imaging the measurement object at a first relative position, first shape data indicating a shape of at least a portion of the measurement object and first position information indicating coordinates of a plurality of comparison reference points obtained when the first shape data is acquired, and creates, based on a second captured image generated by the imaging unit imaging the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least a portion of which differs from the first shape data, and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired;
An acquisition unit that acquires information indicating positions of a plurality of reference reference points of the measurement object;
a reference data creation unit that creates reference first shape data by converting coordinates of the first shape data so that distances between positions of a plurality of comparison reference points indicated by the first position information and positions of corresponding reference reference points acquired by the acquisition unit become closer, and creates reference second shape data by converting coordinates of the second shape data so that distances between positions of a plurality of comparison reference points indicated by the second position information and positions of corresponding reference reference points acquired by the acquisition unit become closer;
a changed data creating unit that creates first changed shape data by converting coordinates of the first shape data so that a distance between a position of a plurality of comparison reference points after changing a coordinate position of at least a part of the plurality of comparison reference points indicated by the first position information by a predetermined change amount and a position of the corresponding reference point for reference becomes closer, or creates changed first shape data by converting coordinates of the first shape data so that a distance between a position of the plurality of comparison reference points indicated by the first position information and a position of a plurality of reference reference points after changing a coordinate position of at least a part of the plurality of reference reference points by a predetermined change amount becomes closer;
an output unit that outputs combined shape data obtained by combining the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition;
A shape measuring device comprising: The computer executes
creating, based on a first captured image generated by an imaging unit capturing an image of the measurement object at a first relative position, first shape data indicating a shape of at least a portion of the measurement object and first position information indicating coordinates of a plurality of comparison reference points obtained when the first shape data is acquired, and creating, based on a second captured image generated by the imaging unit capturing an image of the measurement object at a second relative position different from the first relative position, second shape data of the measurement object at least a portion of which differs from the first shape data and second position information indicating the coordinates of a plurality of comparison reference points obtained when the second shape data is acquired;
creating reference first shape data and reference second shape data by converting coordinates of at least one of the first shape data and the second shape data so that distances between positions of the plurality of comparison reference points indicated by the first position information and positions of the plurality of comparison reference points indicated by the second position information become closer;
(1) creating changed first shape data by converting coordinates of the first shape data so that a distance between positions of the plurality of comparison reference points after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the second position information by a predetermined change amount and positions of the plurality of comparison reference points indicated by the first position information becomes closer; or (2) creating changed first shape data by converting coordinates of the first shape data so that a distance between positions of the plurality of comparison reference points after changing the coordinate positions of at least some of the plurality of comparison reference points indicated by the first position information by a predetermined change amount and positions of the plurality of comparison reference points indicated by the second position information becomes closer. or (3) creating the changed first shape data by converting the coordinates of the first shape data after the coordinate positions of at least some of the comparison reference points indicated by the second position information are changed by a predetermined amount of change so that a distance between positions of a plurality of comparison reference points after the coordinate positions of at least some of the comparison reference points indicated by the first position information are changed by a predetermined amount of change becomes closer to positions of a plurality of comparison reference points after the coordinate positions of at least some of the comparison reference points indicated by the first position information are changed by a predetermined amount of change;
outputting combined shape data obtained by combining the reference first shape data and the reference second shape data when the changed first shape data satisfies a predetermined condition;
A shape measurement method comprising the steps of:

Images