JP7498473B2 - Illumination device and illumination system - Google Patents

Description

The present invention relates to a lighting device and a lighting system.

A known lighting device of this type is equipped with multiple LEDs arranged in parallel in the X direction and a rod-shaped lens that focuses the light from each LED in the Y direction perpendicular to the X direction, and illuminates a linear illumination position (see, for example, Patent Document 1). This lighting device uses a diffusion plate that diffuses light in the X direction to reduce unevenness in the light at the illumination position.

There is also known a lighting device that has multiple point light sources arranged in parallel in the X direction and convex lenses corresponding to each of the multiple point light sources, and illuminates a linear illumination position (see, for example, Patent Document 2). This lighting device also uses a diffusion plate that diffuses light in the X direction to reduce unevenness in the light at the illumination position.

Patent No. 4457100 JP 2005-079495 A

Each of the illumination devices is used to illuminate a range detected by a line sensor in a line shape. Each of the illumination devices may also be used to expose a photocurable resin.
The light source of the former lighting device is a plurality of LEDs arranged in parallel in the X direction. Therefore, if the lighting device is separated from the lighting position by several tens of centimeters or more, or by more than 1 meter, the unevenness of the light at the lighting position can be eliminated, but the illuminance at the lighting position will decrease. If the distance between the lighting device and the lighting position is reduced to 10-odd centimeters or less in order to increase the illuminance at the lighting position, a diffusion plate is required to reduce the unevenness of the light at the lighting position.

The latter lighting device also requires a diffusion plate like the former lighting device, since there is a joint between the convex lenses.
There is also a need for an illumination device that supplies light with a large amount of parallel light components to the illumination position.

The present invention was made in consideration of these circumstances, and aims to provide a lighting device that can provide light with little or no unevenness to the lighting position even without using a diffusion plate, and can also be made compact.

A lighting device according to a first aspect of the present invention includes: a plurality of first parallel light units arranged at intervals in an X direction, each emitting parallel light in a Y direction substantially perpendicular to the X direction; a plurality of reflecting members arranged at intervals in the X direction corresponding to each of the plurality of first parallel light units, each reflecting the parallel light from the plurality of first parallel light units toward a predetermined direction substantially perpendicular to the X direction; and a plurality of second parallel light units arranged at intervals in the X direction, each emitting parallel light in the predetermined direction, The parallel light from each of the first parallel light units is configured to be irradiated onto the entire X-direction of the corresponding reflecting member, and the plurality of second parallel light units are arranged alternately with the plurality of reflecting members in the X-direction so that the parallel light from the plurality of first parallel light units reflected by the plurality of reflecting members and the parallel light from the plurality of second parallel light units are connected in the X-direction in an illumination area long in the X-direction illuminated by the illumination device, and each of the reflecting members does not reflect light at least at one end in the X-direction of the parallel light from the corresponding first parallel light unit .

In the first aspect, the parallel light from each first parallel light unit is reflected in a predetermined direction by the reflecting member. The second parallel light units are arranged at intervals in the X direction, and each emits parallel light in a predetermined direction. The second parallel light units are arranged alternately with the reflecting members in the X direction. Due to this alternating arrangement, the light from each second parallel light unit passes between the reflecting members to reach the illumination area. This configuration makes it possible to easily and reliably configure an illumination system that provides uniform or approximately uniform illuminance across approximately the entire illumination area. The reflecting members are arranged in the X direction, and this configuration is advantageous for miniaturizing the illumination device.

The lighting system according to the second aspect of the present invention includes the lighting device and a lens having a longitudinal direction in the longitudinal direction of the area illuminated by the lighting device, the lens focusing light from the illuminated area in the longitudinal direction toward an inspection sensor.

The present invention makes it possible to provide a lighting device that can provide light with little or no unevenness at the illumination position even without using a diffusion plate, and that can also be made compact.

1 is a perspective view showing a schematic configuration of an illumination device according to an embodiment of the present invention. 1 is a front view showing a schematic configuration of a lighting device according to an embodiment of the present invention. 3 is a cross-sectional view taken along line III-III in FIG. 2. 4 is a cross-sectional view taken along line IV-IV in FIG. 2. FIG. 11 is a cross-sectional view of a lighting device according to a first modified example of the present embodiment. FIG. 11 is a cross-sectional view of a lighting device according to a second modified example of the present embodiment. FIG. 11 is a cross-sectional view of an illumination device according to a third modified example of the present embodiment. FIG. 13 is a front view of a refractive lens portion of a fourth modified example of the embodiment. FIG. 13 is a front view showing a schematic configuration of an illumination device according to a fifth modified example of the present embodiment. FIG. 13 is a cross-sectional view of an illumination device according to a sixth modified example of the present embodiment. FIG. 13 is a cross-sectional view of an illumination device according to a seventh modified example of the present embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A lighting system according to an embodiment of the present invention will be described below with reference to the drawings.
The illumination device 1 of this illumination system illuminates an object to be inspected in a line shape. The line may be several centimeters wide or may be 1 cm or less. In this embodiment, the line width is several centimeters due to the following structure.
As shown in Figures 1 to 4, this lighting device 1 comprises a housing 10 having a longitudinal axis in the X direction, a plurality of reflective members 20 arranged at intervals from one another in the X direction within the housing 10, a plurality of first parallel light units 30 arranged at intervals from one another in the X direction, and a plurality of second parallel light units 40 arranged at intervals from one another in the X direction.

As shown in FIG. 3 etc., each first parallel light unit 30 includes a point light source 31 and a lens section 32 which is a Fresnel lens that converts the light radially emitted from the point light source 31 into parallel light. The point light source 31 is a laser diode, an LED, etc. The point light source 31 may be one end of an optical fiber, and light may be input from a light source device to the other end of the optical fiber. In this embodiment, the lens section 32 has multiple prism lenses arranged concentrically, and each prism lens is formed to convert the light from the point light source 31 into parallel light.

It is preferable that the point light source 31 irradiates the entire lens portion 32 with uniform light, but the point light source 31 may be one in which the light is strongest near the optical axis and the amount of light gradually decreases with distance from the optical axis.

The lens unit 32 may have a single lens or a plurality of lenses as long as it converts the light from the point light source 31 into parallel light. As the lens constituting the lens unit 32, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, or a linear Fresnel lens may be used.
Each first collimated light unit 30 emits collimated light PL1 in the Y direction, which is approximately perpendicular to the X direction. The width of the collimated light PL1 in the X direction is several cm, and in this embodiment, it is about 5 cm. The width of the collimated light PL1 in the Z direction may be several cm, or may be 1 cm or less. In this embodiment, the width of the collimated light PL1 in the Z direction is about 5 cm.

In this embodiment, as shown in FIG. 3, the first parallel light unit 30 is covered by a housing 33. The first parallel light unit 30 also has a block 34 to one end surface of which the substrate 31a of the point light source 31 is fixed, and the block 34 is attached to the housing 33 so as to be movable in the Y direction. A movement restricting member 35 is also provided to fix the block 34 to the housing 33 so as not to move. In this embodiment, the movement restricting member 35 is a screw member that is screwed into the housing 33 and abuts against the block 34.

By loosening the movement restricting member 35 and moving the block 34 in the Y direction, the distance in the Y direction between the point light source 31 and the lens unit 32 can be adjusted. This adjustment allows the parallel light PL1 to be adjusted to slightly diverging light, slightly converging light, or light close to completely parallel light. In this embodiment, slightly diverging light and slightly converging light are also parallel light.

As shown in FIG. 4 etc., each second parallel light unit 40 includes a point light source 41 and a lens section 42 which is a Fresnel lens that converts the light emitted radially from the point light source 41 into parallel light. The point light source 41 is a laser diode, an LED, etc. The point light source 41 may be one end of an optical fiber, and light may be input from a light source device to the other end of the optical fiber. In this embodiment, the lens section 42 has multiple prism lenses arranged concentrically, and each prism lens is formed to convert the light from the point light source 41 into parallel light.

It is preferable that the point light source 41 irradiates the entire lens portion 42 with uniform light, but the point light source 41 may be one in which the light is strongest near the optical axis and the amount of light gradually decreases with distance from the optical axis.

The lens unit 42 may have a single lens or a plurality of lenses as long as it converts the light from the point light source 41 into parallel light. As the lens constituting the lens unit 42, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, or a linear Fresnel lens may be used.
Each second collimated light unit 40 emits collimated light PL2 in a Z direction that is substantially perpendicular to the X and Y directions. The Z direction may be a direction that intersects with the X and Y directions and forms a predetermined angle with the Y direction, such as 45° or 30°.

The width of the parallel light PL2 in the X direction is several centimeters, and in this embodiment, it is about 5 cm. The width of the parallel light PL2 in the Y direction may be several centimeters, or may be 1 cm or less. In this embodiment, the width of the parallel light PL2 in the Y direction is about 5 cm.

In this embodiment, as shown in FIG. 4, the second parallel light unit 40 is covered by a housing 43. The second parallel light unit 43 also has a block 44 to one end surface of which the substrate 41a of the point light source 41 is fixed, and the block 44 is attached to the housing 43 so as to be movable in the Z direction. A movement restriction member 45 is also provided to fix the block 44 to the housing 43 so as not to move. In this embodiment, the movement restriction member 45 is a screw member that is screwed into the housing 43 and abuts against the block 44.

The housings 33 and 43 function as parts of the housing 10, and in this embodiment, a plurality of point light sources 31, 41, a plurality of lens portions 32, 42, and a plurality of reflecting members 20 are provided inside the housing 10.
The housing 10 is provided with an opening 10a through which the collimated light PL1 from the first collimated light unit 30, which is reflected by the reflecting member 20, and the collimated light PL2 from the second collimated light unit 40 pass. In this embodiment, a cover 11 made of a light-transmitting material such as plastic or glass is attached to the opening 10a.

By loosening the movement restricting member 45 and moving the block 44 in the Y direction, the distance in the Y direction between the point light source 41 and the lens portion 42 can be adjusted. This adjustment allows the parallel light PL1 to be adjusted to slightly diverging light, slightly converging light, or light close to completely parallel light. In this embodiment, slightly diverging light and slightly converging light are also parallel light.

In this embodiment, each reflecting member 20 is a rectangular flat member such as a metal plate or a glass plate. In one example, a metal such as silver is vapor-deposited on the reflecting surface 20a, which is one surface in the thickness direction of each reflecting member 20, to form a mirror surface. The reflecting surface 20a is the surface of the reflecting member 20 facing the first parallel light unit 30. Each reflecting member 20 is disposed at a position corresponding to the corresponding first parallel light unit 30. Also, as shown in FIG. 2, the optical axis L1 of the corresponding first parallel light unit 30 faces the center of each reflecting member 20 in the X direction or in the vicinity thereof. Each reflecting member 20 reflects light from the corresponding first parallel light unit 30 in the Z direction.

2, the width in the X direction of the parallel light PL1 from the first parallel light unit 30 is larger than the width in the X direction of the corresponding reflecting member 20. Therefore, as shown in FIG. 2, there are portions at both ends of the parallel light PL1 in the X direction that are not reflected by the reflecting member 20. Note that by adjusting the positions of the first parallel light unit 30 and the reflecting member 20 in the X direction, it is possible to create a portion at one end of the parallel light PL1 in the X direction that is not reflected by the reflecting member 20, while completely aligning the other end of the parallel light PL1 in the X direction with the end of the reflecting member 20 in the X direction. However, such position adjustment requires time and cost, so this embodiment in which there are portions at both ends of the parallel light PL1 in the X direction that are not reflected by the reflecting member 20 is preferable.

2, the optical axis L2 of each second collimated light unit 40 is disposed between adjacent reflecting members 20 in the X direction. In this embodiment, the optical axis L2 of each second collimated light unit 40 passes through or near the center in the X direction of the space between the adjacent reflecting members 20 in the X direction.
As shown in FIG. 2, both ends in the X direction of the collimated light PL2 emitted in the Z direction from each second collimated light unit 40 are prevented from traveling in the Z direction by the two corresponding reflecting members 20.

With the above configuration, as shown in FIG. 2, multiple parallel light beams PL1 and multiple parallel light beams PL2 are alternately arranged in the X direction in the illumination area, and the X direction end of the parallel light PL1 and the X direction end of the parallel light PL2 coincide or nearly coincide. This makes it possible to irradiate the irradiation position with light having a width that nearly coincides with the width of the parallel light PL1, PL2. In this embodiment, light having a width that nearly coincides with the opening 10a is irradiated. For example, by aligning the X direction end of the parallel light PL1 and the X direction end of the parallel light PL2, the illuminance becomes uniform or nearly uniform over almost the entire illumination area.

In addition, by adjusting the positions of the second parallel light unit 40 and the reflecting member 20 in the X direction, it is possible to create a portion at one end of the parallel light PL2 in the X direction where the reflecting member 20 prevents the parallel light PL2 from traveling in the Z direction, while completely aligning the other end of the parallel light PL2 in the X direction with the end of the reflecting member 20 in the X direction. However, because such position adjustment requires time and cost, the present embodiment in which the parallel light PL2 has portions at both ends in the X direction where the reflecting member 20 prevents the parallel light PL2 from traveling in the Z direction is preferred.

Furthermore, it is also possible to make the dimension in the X direction of the collimated light PL2 from the second collimated light unit 40 coincide with the spacing dimension of the reflecting member 20. In this case, by adjusting the positions in the X direction of the second collimated light unit 40 and the reflecting member 20, the travel of the collimated light PL2 in the Z direction at both ends in the X direction is not impeded by the reflecting member 20. Even in this case, it is possible to make the illuminance uniform or approximately uniform over approximately the entire illumination area.
In addition, in this embodiment, the reflective members 20 are arranged at intervals in the X direction, which is advantageous for making the lighting device 1 smaller in size.

In this embodiment, the parallel light PL1 from each first parallel light unit 30 is reflected toward the Z direction by the reflecting member 20. The second parallel light units 40 are arranged at intervals in the X direction and each emits parallel light PL2 in the Z direction. As shown in FIG. 2, the second parallel light units 40 are arranged alternately with the reflecting members 20 in the X direction. Due to such an alternating arrangement, the light from each second parallel light unit 40 passes between the reflecting members 20 and reaches the illumination area. This configuration makes it possible to easily and reliably configure an illumination device 1 that makes the illuminance uniform or approximately uniform over almost the entire illumination area. In this embodiment, the parallel light PL1 irradiated from the first parallel light unit 30 to the illumination area and the parallel light PL2 irradiated from the second parallel light unit 20 to the illumination area are continuous in the X direction, and there is no or only a small overlap between the two parallel lights. Even if there is an overlap between the two parallel lights, the overlap appears regularly. Therefore, when an image of the illuminated area is obtained by the sensor, the area where the two parallel lights overlap can be adjusted using image processing.

Moreover, each reflecting member 20 does not reflect light at the end in the X direction of the collimated light PL1 from the corresponding first collimated light unit 30. This configuration is advantageous for easily and reliably configuring the lighting device 1 that makes the illuminance uniform or approximately uniform over approximately the entire lighting area.
Further, each reflecting member 20 blocks and/or reflects the light at the end of the collimated light PL2 in the X direction from at least one second collimated light unit 40 so as not to travel in the Z direction. In this embodiment, the surface opposite the reflecting surface 20a of each reflecting member 20 is subjected to an anti-reflection treatment such as black anodizing, and mainly blocks the light at the end of the collimated light PL2 in the X direction.

In addition, in this embodiment, each reflecting member 20 that is not disposed at the end of the array of reflecting members 20 blocks and/or reflects the light at the X-direction end of the parallel light PL2 of the two adjacent second parallel light units 40. This configuration is advantageous for more reliably configuring a lighting device 1 that provides uniform or approximately uniform illuminance over approximately the entire lighting area.

In addition, in this embodiment, the multiple second parallel light units 40 are arranged alternately with the multiple first parallel light units 30 in the X direction. This configuration is advantageous for miniaturizing the lighting device 1.

The first parallel light unit 30 has a point light source 31 and a lens section 32 that converts the light from the point light source 31 into parallel light. The second parallel light unit 40 also has a point light source 41 and a lens section 42 that converts the light from the point light source 41 into parallel light. This configuration is advantageous for making the lighting device 1 more compact. In particular, the lens sections 32 and 42 are a single Fresnel lens, which allows the lighting device 1 to be made even more compact.

As shown in FIG. 5, a parallel light unit 50 may be provided instead of the second parallel light unit 40. In this case, the parallel light unit 50 functions as the second parallel light unit, and the multiple parallel light units 50 are each arranged at the same position as the second parallel light unit 40 in the X direction. In addition, each parallel light unit 50 has a point light source 51 similar to the point light sources 31 and 41, a lens unit 52 similar to the lens units 32 and 42, a housing 53 similar to the housings 33 and 43, a block 54 similar to the blocks 34 and 44, and a movement restriction member 55 similar to the movement restriction members 35 and 45 in order to irradiate parallel light PL2 in the Y direction.

Each parallel light unit 50 also has a second reflecting member 21. Each second reflecting member 21 is disposed between adjacent reflecting members 20 and has an X-direction dimension equal to the X-direction spacing between adjacent reflecting members 20. Each second reflecting member 21 reflects the parallel light PL2 toward the Z direction by the reflecting surface 21a on the point light source 51 side. Of the parallel light PL2, light at the end in the X direction is not reflected by the reflecting surface 21a, or is blocked and/or reflected by the reflecting member 20. Even when such a parallel light unit 50 is used, it is possible to easily and reliably configure an illumination device 1 that provides uniform or approximately uniform illuminance over approximately the entire illumination area.

As shown in FIG. 6, in addition to the first parallel light unit 30 and the second parallel light unit 40, the parallel light unit 50 may be provided. In this case, the parallel light unit 50 functions as a third parallel light unit, and the second parallel light unit 40 and the parallel light unit 50 are arranged between adjacent first parallel light units 30 in the X direction. In other words, even in this case, the multiple second parallel light units 40 and the multiple parallel light units 50 are arranged alternately with the multiple reflecting members 20 in the X direction.

In the case of the structure of FIG. 6, for example, the second parallel light unit 40 irradiates parallel light PL2 having an X-direction dimension that is approximately 1/2 the X-direction spacing between adjacent first parallel light units 20. Also, the second reflecting member 21 of the parallel light unit 50 has an X-direction dimension that is approximately 1/2 the X-direction spacing between adjacent first parallel light units 20. The parallel light PL2 irradiated from the second parallel light unit 40 to the illumination area and the parallel light irradiated from the parallel light unit 50 to the illumination area are connected in the X direction as in each of the above embodiments, and there is no or only slight overlap between the two parallel lights.

Furthermore, the light at one end of the collimated light PL2 in the X direction is blocked and/or reflected by the reflecting member 20. The light at the other end of the collimated light PL2 in the X direction is blocked and/or reflected by the second reflecting member 21 of the collimated light unit 50.
Even in the case of the configurations shown in Figs. 5 and 6, it is possible to easily and reliably configure the lighting device 1 that provides uniform or approximately uniform illuminance over approximately the entire lighting area.

As shown in FIG. 7, this lighting device 1 may have a focusing lens section 61 that converges the light from the lighting device 1 in the Y direction, and a re-collimating lens section 62 that expands the light from the focusing lens section 61 in the Y direction. The re-collimating lens section 62 can collimate the light from the focusing lens section 61 toward the irradiation position. This can increase the illuminance of the lighting area. Note that the re-collimating lens section 62 may not be provided. In this case, the light from the lighting device 1 is converged toward the lighting area by the focusing lens section 61.

The focusing lens section 61 may have a single lens or multiple lenses. The re-collimating lens section 62 may also have a single lens or multiple lenses. The lens may be a convex lens, a combination of a convex lens and a concave lens, a linear Fresnel lens, or any other well-known lens.

In Figures 3, 7, etc., it is also possible to provide a diffusion lens between the lighting device 1 and the lighting area that diffuses light mainly in the X direction. As the diffusion lens, it is also possible to use various diffusion lenses described in Patent No. 4457100, or other known diffusion lenses that diffuse light mainly in the X direction. In this case, it is possible to increase the amount of light other than the parallel light component in the light in the lighting area. Or, it is possible to improve the uniformity of the light in the lighting area.

3, 7, etc., a refractive lens member (FIG. 8) 70 for bending light in the X direction may be provided between the lighting device 1 and the irradiation position. For example, in FIG. 3, the refractive lens member 70 is provided instead of the cover 11. In FIG. 7, for example, the refractive lens member 70 is provided between the re-parallelizing lens unit 62 and the irradiation position. In FIG. 7, if the re-parallelizing lens unit 62 is not provided, the refractive lens member 70 is provided between the focusing lens unit 61 and the irradiation position. The focusing lens unit 61, the re-parallelizing lens unit 62, and the refractive lens member 70 may be attached to the housing 10. In this case, the lighting device 1 includes the focusing lens unit 61, the re-parallelizing lens unit 62, and the refractive lens member 70.

8, the refractive lens member 70 has a plurality of prism lenses arranged in the X direction, and each prism lens extends in the Y direction. As the refractive lens member 70, a known refractive lens that can bend parallel light traveling in the Z direction into the X direction can be used.
Since the light from the illumination device 1 contains many parallel light components, the direction of the light passing through the refractive lens member 70 is constant. This configuration is extremely useful in applications where light is to be applied to an object from a specific direction over a wide area.

The point light sources 31, 41, and 51 may emit visible light, ultraviolet light, or infrared light.

Since the light from the illumination device 1 contains a large amount of parallel light components, when the illumination device 1 is used for exposing photocurable plastics and the like, it is possible to achieve a higher level of improvement in exposure efficiency and exposure uniformity.
Furthermore, when the lighting device 1 is used for inspection, the light from the lighting device 1 reaches the inspection sensor after being reflected by or passing through the object to be inspected. In this case as well, the light from the lighting device 1 contains a large amount of parallel light components, so the amount of light detected by the sensor is large. This is advantageous in terms of speeding up the inspection and improving the inspection accuracy.

As shown in FIG. 7, the lighting system may be provided with a lens 81 for converging light from the object to be inspected in the X direction toward the sensor 82. The lighting area is the surface of the object to be inspected, the surface on which the object to be inspected is present, etc., and the lens 81 has a longitudinal direction in the longitudinal direction of the lighting area. Even when the light from the lighting device 1 passes through the object to be inspected, the lens 81 can be provided between the lighting area and the sensor 82. Since the lighting device 1 has a large amount of parallel light components, the lens 81 makes it possible to effectively converge the light to the sensor 82, which has a smaller dimension in the X direction than the lighting device 1.

In the embodiment of FIG. 5, the reflecting surfaces 20a, 21a may be convex surfaces that slightly expand the parallel light PL1, PL2 in the Y direction, or may be concave surfaces that converge the parallel light PL1, PL2 in the Y direction. Even in this case, the light reflected by the reflecting surfaces 20a, 21a is parallel light when viewed from the Y direction. Such light is also parallel light when viewed in the X direction. Therefore, as in each of the above embodiments, it is possible to make the illuminance uniform or approximately uniform over substantially the entire illumination area. The lens portions 32, 52 of the first parallel light unit 30 and the parallel light unit 50 may slightly expand or converge the light in the Z direction or Y direction.

In addition, as shown in FIG. 9, in each of the above-described embodiments, a plurality of reflecting members 20 may be part of a single plate P.
10, each of the reflecting members 20 may have a triangular prism shape. In this case, the same effect as described above can be obtained, but in order to easily adjust the overlap of the parallel light PL1 and the parallel light PL2 in the illumination area, it is preferable that each of the reflecting members 20 is plate-shaped.

3 etc., the housing 10 may be enlarged in the Y direction and the Z direction, and the point light source 31 and the point light source 41 may be disposed inside the housing 10. It is also possible to omit the mechanism for adjusting the position of the point light source 31 relative to the lens unit 32 and the mechanism for adjusting the position of the point light source 41 relative to the lens unit 42.
Furthermore, there may be cases where a portion with a locally high light amount is formed at the position of the optical axis L1 of the first collimated light unit 30, and a portion with a locally high light amount is formed at the position of the optical axis L2 of the second collimated light unit 40. In this case, since the illumination area has width, if the portion with a high light amount is observed with a sensor or the like while avoiding the portion with a high light amount, the unevenness in the amount of light in the range viewed by the sensor will disappear.

As shown in FIG. 11, the first parallel light unit 30 may reflect the light from the point light source 31 by the reflector 37 to become parallel light PL1. The second parallel light unit 40 may also reflect the light from the point light source 41 by the reflector 37 to become parallel light PL2.

1...Illumination device, 10...Housing, 10a...Opening, 20...Reflective member, 20a...Reflective surface, 21...Second reflecting member, 21a...Reflective surface, 30...First parallel light unit, 31...Point light source, 32...Lens section, 33...Housing, 34...Block, 35...Movement restriction member, 40...First parallel light unit, 41...Point light source, 42...Lens section, 43...Housing, 44...Block, 45...Movement restriction member, 61...Condenser lens section, 62...Re-parallelizing lens section, 70...Refractive lens member, 81...Lens, 82...Sensor

Claims (13)

a plurality of first parallel light units arranged at intervals in an X direction and each emitting parallel light in a Y direction substantially perpendicular to the X direction;
a plurality of reflecting members arranged at intervals in the X direction so as to correspond to the plurality of first parallel light units, the plurality of reflecting members each reflecting the parallel light from the plurality of first parallel light units toward a predetermined direction substantially perpendicular to the X direction;
a plurality of second parallel light units arranged at intervals in the X direction and emitting parallel light in the predetermined direction, wherein the parallel light from each of the plurality of first parallel light units is configured to irradiate the entirety of the corresponding reflecting member in the X direction;
the second parallel light units and the plurality of reflecting members are alternately arranged in the X direction such that the parallel light from the first parallel light units is reflected by the plurality of reflecting members and the parallel light from the second parallel light units is continuous in the X direction in an illumination area long in the X direction illuminated by the illumination device,
The illumination device , wherein each of the reflecting members does not reflect light at least at one end in the X direction out of the collimated light from the corresponding first collimating light unit . The illumination device according to claim 1 , wherein each of the reflecting members does not reflect light at both ends in the X direction out of the collimated light from the corresponding first collimating light unit. The lighting device according to claim 1 or 2, wherein each of the reflecting members blocks or reflects light at the end of the X-direction of the parallel light from at least one of the second parallel light units so that the light does not travel in the specified direction. The lighting device according to claim 1 or 2, wherein at least one of the plurality of reflecting members blocks or reflects light at the ends of the parallel light in the X direction from two adjacent second parallel light units so that the light does not travel in the predetermined direction. The lighting device according to any one of claims 1 to 4, wherein the second parallel light units are arranged alternately with the first parallel light units in the X direction. The lighting device according to any one of claims 1 to 5, wherein each of the first parallel light units has a point light source and a lens section that converts the light from the point light source into the parallel light. The lighting device according to any one of claims 1 to 6, wherein each of the second parallel light units has a point light source and a lens section that converts the light from the point light source into the parallel light. The lighting device according to any one of claims 1 to 6, wherein the plurality of second parallel light units include a point light source, a lens section that converts light from the point light source into parallel light, and a second reflecting member that reflects the parallel light from the lens section toward the predetermined direction. The lighting device according to any one of claims 1 to 8, further comprising third parallel light units arranged at intervals in the X direction and each emitting parallel light in the predetermined direction. The lighting device according to any one of claims 1 to 9, further comprising a refractive lens member that refracts, in the X direction, the parallel light from the first parallel light unit that is reflected in the predetermined direction by the reflecting member and the parallel light from the second parallel light units that travels in the predetermined direction. The lighting device according to any one of claims 1 to 9, further comprising a focusing lens section that focuses the parallel light from the first parallel light unit reflected by the reflecting member toward the predetermined direction and the parallel light from the second parallel light units toward the predetermined direction in a direction perpendicular to the X direction. The lighting device according to claim 11, further comprising a re-collimating lens section that converts the light collected by the collecting lens section into parallel light. A lighting device according to any one of claims 1 to 12,
a lens having a longitudinal direction in the longitudinal direction of the illumination area by the illumination device, the lens concentrating light from the illumination area in the longitudinal direction toward an inspection sensor.

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