JP7491664B2 - Shape measuring device, structure manufacturing system, shape measuring method, and structure manufacturing method - Google Patents

Description

The present invention relates to a shape measuring device, a structure manufacturing system, a shape measuring method , and a structure manufacturing method.

There is a shape measuring device that projects a measurement light toward a test object, captures an image of the measurement light projected onto the test object from a direction different from the projection direction of the measurement light, and measures the shape of the test object. (For example, Patent Document 1) In shape measurement using the measurement light, it is desirable to suppress measurement failures due to insufficient precision, for example.

U.S. Patent No. 8,244,023

According to a first aspect of the present invention, the shape measuring device is a shape measuring device for measuring the shape of the surface of a test object, and includes an irradiation unit that irradiates the surface of the test object with a first measurement light and a second measurement light at different times in different areas along the projection direction, an imaging unit that captures images of the first measurement light and the second measurement light projected onto the test object from a direction different from the projection direction and outputs image data, and a control unit that calculates the shape of the surface of the test object based on the positions of the images of the first measurement light and the second measurement light in the image data.

According to a second aspect of the present invention, a structure manufacturing system includes a forming device that forms a structure based on design information regarding the shape of the structure, a shape measuring device of the first aspect that measures the shape of the structure formed by the forming device, and a control device that compares shape information indicating the shape of the structure measured by the shape measuring device with design information.

According to a third aspect of the present invention, a shape measurement method is a shape measurement method for measuring the shape of a surface of a test object, and includes irradiating a first measurement light and a second measurement light on different areas of the surface of the test object along a projection direction at different times, capturing images of the first measurement light and the second measurement light projected onto the test object from a direction different from the projection direction, outputting image data, and calculating the shape of the surface of the test object based on the positions of the images of the first measurement light and the second measurement light in the image data.

According to a fourth aspect of the present invention, the fixing part fixes the test object while capturing an image of the measurement light projected onto the test object and measuring the shape of the test object, and at least a portion of the surface of the fixing part is covered with an absorbing material that absorbs a portion of the measurement light.

According to a fifth aspect of the present invention, the shape measuring device includes a test object, an irradiation unit that projects measurement light toward a fixing unit that fixes the test object, an imaging unit that captures an image of the measurement light projected onto the test object and the fixing unit and outputs image data, and a discrimination unit that uses information from the image data to distinguish between the test object and the fixing unit.

According to a sixth aspect of the present invention, a method for manufacturing a structure includes forming a structure based on design information related to the shape of the structure, measuring the shape of the formed structure by the shape measurement method of the third aspect, and comparing the shape information indicating the measured shape of the structure with the design information.

1 is a perspective view showing a shape measuring device according to an embodiment; FIG. 2 is a schematic diagram showing a configuration of a shape measuring device. FIG. 2 is a schematic diagram showing the configuration of an irradiation unit and an imaging unit of the shape measuring device. FIG. 2 is an explanatory diagram for explaining a measurement light irradiated onto a test object. 4 is an explanatory diagram for explaining the relationship between an imaging unit and measurement light that reaches the imaging unit; FIG. FIG. 2 is an explanatory diagram for explaining a measurement operation of the shape measuring device. FIG. 4 is a flowchart showing an example of a measurement operation of the shape measuring device. 10 is a flowchart showing an example of a process for creating a shape measuring program for the shape measuring device. 4 is a flowchart showing an example of a measurement operation of the shape measuring device. 4 is a flowchart showing an example of a measurement operation of the shape measuring device. FIG. 2 is an explanatory diagram for explaining a measurement operation of the shape measuring device. FIG. 2 is an explanatory diagram for explaining a measurement operation of the shape measuring device. FIG. 1 is a schematic diagram showing a configuration of a system having a shape measuring device. FIG. 13 is a perspective view showing another example of a shape measuring device. FIG. 1 is a diagram showing a configuration of a structure manufacturing system. 1 is a flowchart showing a structure manufacturing method.

The present invention will be described in detail below with reference to the drawings. Note that the present invention is not limited to the following modes for carrying out the invention (hereinafter referred to as embodiments). Furthermore, the components in the following embodiments include those that a person skilled in the art can easily imagine, those that are substantially the same, and those that are within the so-called equivalent range. Furthermore, the components disclosed in the following embodiments can be combined as appropriate.

In the following explanation, an XYZ Cartesian coordinate system is set, and the positional relationship of each part is explained with reference to this XYZ Cartesian coordinate system. The Z-axis direction is set, for example, to the vertical direction, and the X-axis and Y-axis directions are set, for example, to be parallel to the horizontal direction and perpendicular to each other. In addition, the directions of rotation (tilt) around the X-axis, Y-axis, and Z-axis are respectively set to be the θX, θY, and θZ axis directions.

Figure 1 is a diagram showing the external appearance of a shape measuring device 1 according to this embodiment. Figure 2 is a schematic diagram showing the general configuration of the shape measuring device according to this embodiment. Figure 3 is a schematic diagram showing the configuration of the irradiation section and imaging section of the shape measuring device according to this embodiment. Figure 4 is an explanatory diagram for explaining the measurement light irradiated to the test object. Figure 5 is an explanatory diagram for explaining the relationship between the imaging section and the measurement light that reaches the imaging section.

The shape measuring device 1 measures the shape of the object M to be measured, for example, by using the light section method. The object M is a test object to be measured. The light section method is a method in which a specific pattern of light is projected onto the test object, the pattern projected onto the surface of the test object is captured by an imaging device that captures the pattern from a direction different from the projection direction, the position of the pattern is obtained from the captured image, and the position of the pattern of the test object is measured from the projection direction and the imaging direction based on the obtained position of the pattern. The pattern of light irradiated onto the test object is generally line-shaped, slit-shaped, or spot-shaped. The shape measuring device 1 can measure the shape of the surface of the test object. The shape measuring device 1 can measure the three-dimensional shape of the test object. In addition, if the surface of the test object is uneven, the unevenness of the surface of the test object can be measured. The shape measuring device 1 includes a probe moving device 2, an optical probe 3, a control device 4, a display device 5, an input device 6, and a holding and rotating device 7. The shape measuring device 1 uses an optical probe 3 to capture an image of a test object M held by a holding and rotating device 7 provided on a base B. In this embodiment, the probe moving device 2 and the holding and rotating device 7 form a movement mechanism that moves the probe and the test object M relative to each other.

The probe moving device 2 is for positioning the position of the optical probe 3 in three-dimensional space, the projection direction of the measurement light projected from the optical probe 3 and the direction of the measurement light projected onto the measurement target area of the test object M so that the imaging range (field of view) of the optical probe 3 comes to the measurement target area of the test object M, and for moving the optical probe 3 relative to the test object M so that the imaging range of the optical probe 3 is scanned on the test object M. The probe moving device 2 is capable of moving the optical probe relatively. By moving the optical probe by the probe moving device 2, it is possible to relatively change the irradiation direction of the measurement light irradiated from the optical probe to the test object M. By moving the optical probe by the probe moving device 2, it is possible to change the irradiation position of the measurement light from the optical probe on the test object M. As shown in FIG. 2, the probe moving device 2 includes a driving unit 10 and a position detection unit 11. The driving unit 10 includes an X moving unit 50X, a Y moving unit 50Y, a Z moving unit 50Z, a first rotating unit 53, and a second rotating unit 54.

The X moving unit 50X is provided so as to be movable relative to the base B in the direction of the arrow 62, i.e., in the X-axis direction. The Y moving unit 50Y is provided so as to be movable relative to the X moving unit 50X in the direction of the arrow 63, i.e., in the Y-axis direction. The Y moving unit 50Y is provided with a holder 52 extending in the Z-axis direction. The Z moving unit 50Z is provided so as to be movable relative to the holder 52 in the direction of the arrow 64, i.e., in the Z-axis direction. The X moving unit 50X, Y moving unit 50Y, and Z moving unit 50Z, together with the first rotating unit 53 and second rotating unit 54, constitute a movement mechanism that enables the optical probe 3 to move in the X-axis, Y-axis, and Z-axis directions.

The first rotating unit 53 rotates the optical probe 3 supported by the holding member (holding unit) 55 described later around a rotation axis (rotation axis) 53a parallel to the X-axis, i.e., in the direction of the arrow 65, to change the posture of the optical probe 3, and in particular, the projection direction of the measurement light projected from the optical probe 3 onto the test object M can be changed. The second rotating unit 54 rotates the optical probe 3 supported by the holding member 55 around an axis parallel to the extension direction of the first holding unit 55A described later, i.e., in the direction of the arrow 66, to change the posture of the optical probe 3, and in particular, the direction of the measurement light projected from the optical probe 3 can be changed. The shape measuring device 1 has a reference sphere 73a or 73b used to correct the relative position between the optical probe 3 and the holding member 55 that holds the optical probe 3.

The drive of the X movement unit 50X, Y movement unit 50Y, Z movement unit 50Z, first rotation unit 53, and second rotation unit 54 is controlled by the control device 4 based on the detection results of the position detection unit 11, which is composed of an encoder device or the like.

The optical probe 3 includes a light source device 8 and an imaging device 9, and is supported by a holding member 55. The holding member 55 extends in a direction perpendicular to the rotation axis 53a, and is formed in a substantially L-shape in which the first holding portion 55A supported by the first rotating portion 53 and the second holding portion 55B provided at the end of the first holding portion 55A farther from the specimen M and extending parallel to the rotation axis 53a are perpendicular to each other, and the optical probe 3 is supported at the end of the second holding portion 55B on the +X side. The position of the rotation axis 53a of the first rotating portion 53 is disposed closer to the specimen M than the optical probe 3. In addition, a counterbalance 55c is provided at the end of the first holding portion 55A closer to the specimen M. Therefore, when no driving force is generated in the first rotating portion 53, the first holding portion 55A is in a position such that the extension direction is along the Z-axis direction as shown in FIG. 1.

As shown in Figs. 1 and 2, the holding and rotating device 7 has a table 71 that holds the specimen M, a rotation drive unit 72 that rotates the table 71 in the θZ axis direction, i.e., in the direction of arrow 68, and a position detection unit 73 that detects the position of the table 71 in the rotation direction. The position detection unit 73 is an encoder device that detects the rotation of the rotation axis of the table 71 or the rotation drive unit 72. The holding and rotating device 7 rotates the table 71 by the rotation drive unit 72 based on the result detected by the position detection unit 73. By rotating the table 71, the holding and rotating device 7 rotates the specimen M in the direction of arrow 68 around the rotation axis center AX.

The light source device (illumination unit) 8 of the optical probe 3 projects measurement light toward the test object M. The light source device of the optical probe 3 irradiates measurement light toward the test object M. The optical device 8 forms a light beam that forms a linear illumination field when the light beam emitted from the light source is projected toward a plane. As a result, a line of light is irradiated toward the test object M placed on the holding and rotating device 7. Scattered light is generated in the part of the surface of the test object M where the line of light is irradiated. The light source device 8 includes a light source 12 that irradiates a line of measurement light to a measurement area of the test object M held by the holding and rotating device 7, and an illumination optical system 13. The light source device 8 is controlled by the control device 4. As shown in FIG. 3, the light source 12 has a first light source (LD1) 12a and a second light source (LD2) 12b. The first light source 12a and the second light source 12b cause the irradiated light to enter the illumination optical system 13, and irradiate the measurement area of the test object M with a line of measurement light. In this embodiment, the first light source 12a and the second light source 12b include, for example, a laser diode. Note that the first light source 12a and the second light source 12b may include a solid-state light source other than a laser diode, such as a light-emitting diode (LED).

The illumination optical system 13 adjusts the spatial light intensity distribution of the light emitted from the light source 12. The illumination optical system 13 includes a plurality of optical elements, including, for example, a cylindrical lens. The illumination optical system 13 of this embodiment has a lens 13a, a lens 13b, a half mirror 13c, and a lens 13d. The lens 13a is disposed between the half mirror 13c and the first light source 12a. The lens 13b is disposed between the half mirror 13c and the second light source 12b. The half mirror 13c transmits the light of the first light source 12a and the light of the second light source 12b. The light emitted from the first light source 12a and passing through the half mirror 13c, and the light emitted from the second light source 12b and passing through the half mirror 13c proceed toward the lens 13d. The lens 13d is disposed between the half mirror 13c and the test object M. The illumination optical system 13 collects the light emitted from the first light source 12a at a position a predetermined distance away from the first light source 12a by passing the light through the lens 13a and the lens 13d. The illumination optical system 13 collects the light emitted from the second light source 12b at a position a predetermined distance away from the second light source 12b by passing the light through the lens 13b and the lens 13d. In this embodiment, the illumination optical system 13 has a different distance from the first light source 12a to the collecting position and a different distance from the second light source 12b to the collecting position. The lens 13a, the half mirror 13c, and the lens 13d constitute a first optical system 14 that irradiates the light L1 from the first light source 12a to the test object M. The first optical system 14 irradiates the light L1 from the first light source 12a to the test object M as the first measurement light. The lens 13b, the half mirror 13c, and the lens 13d constitute a second optical system 15 that irradiates the light L2 from the second light source 12b onto the test object M. The second optical system 15 irradiates the light L2 from the second light source 12a onto the test object M as the second measurement light. In this embodiment, the first optical system 14 and the second optical system 15 use some common components. The first optical system 14 and the second optical system 15 share the half mirror 13c and the lens 13d. However, the components common to the first optical system 14 and the second optical system 15 are not limited to these. Also, it is not necessary that the first optical system 14 and the second optical system 15 do not share any common components.

In this embodiment, a line-shaped measurement light is irradiated from the optical device 8 onto the test object M. The irradiation area of the line-shaped measurement light irradiated onto a plane is long on one side and short on the other side. In this embodiment, in FIG. 2, the irradiation area of the line-shaped measurement light is short on the XY plane and long in the Z-axis direction. The imaging area of the imaging device is set so as to image the long irradiation area of the line-shaped measurement light.

As shown in FIG. 4, the line-shaped light L1 irradiated from the first light source 12a to the measurement region of the test object M and the line-shaped light L2 irradiated from the second light source 12b to the measurement region of the test object M are approximately collimated lights, but are condensed by passing through the lenses 13a and 13b, respectively. In this embodiment, the condensing positions of the first optical system 14 and the second optical system 15 are different in the projection direction of the measurement light. Therefore, the width of the light L1 and the light L2 changes in the traveling direction. In this embodiment, the width of the light changes in the XY plane of FIG. 2. The irradiation region of the measurement light is different in the line-shaped short side direction in the projection direction in which the line-shaped measurement light is projected. In FIG. 4, the width d1 of the line-shaped light L1 in the short side direction is the narrowest. Also, the width d2 of the line-shaped light L2 in the short side direction is the narrowest. The width in the short side direction differs along the projection direction of the line-shaped light L1. In the line-shaped light L1, the width differs along the projection direction from the position where the width is d1. Along the projection direction, the width is wider on the side closer to the optical device 8 than the position where the width is d1. Along the projection direction, the width is wider on the side farther from the optical device 8 than the position where the width is d1. The same is true for the line-shaped light L2. Also, when the measurement light is projected onto the test object M, the width of the measurement light varies along the height direction of the test object. Note that FIG. 4 emphasizes the change in width. In the light-section method, an image of the line-shaped measurement light projected onto the test object M is captured, and the shape of the test object M is calculated from the position of the captured image. Therefore, by shortening the width of the irradiation area in the short direction of the line-shaped light, the width of the captured image is also shortened. Therefore, it is possible to improve the calculation accuracy of the irradiation position of the line-shaped light irradiated onto the test object M calculated from the captured image. Therefore, in this embodiment, the area where the width of the light is shorter than a predetermined width is set as _A1 , centered on d1, where the line-shaped width irradiated from the first light source 12a to the test object M is short. Also, a region in which the width of the light is shorter than a predetermined width is set as region _A2 , centered on the line-like width d2 irradiated from the second light source 12b to the test object M. Region _A1 and region _A2 overlap in part in the projection method of the measurement light L1 and L2. The predetermined width is, for example, 10 μm. Also, the height direction of the test object M is the Z-axis direction in the example of FIG. 1, and is a direction intersecting with a direction perpendicular to the first direction, which is the traveling direction of the light emitted from the light source device 8. Also, the width of the light is the width in the direction of the short side on a plane perpendicular to the traveling direction of the light L1 and the light L2, and is the width in the direction perpendicular to the line. In this way, the light source device 8 irradiates light L1 and light L2 to different regions along the projection direction.

The line-shaped light emitted by the light source device 8 preferably has an NA (Numerical Aperture) of 0.05 or less. In addition, the difference in wavelength between the light emitted by the first light source 12a and the second light source 12b of the light source 12 is preferably 10 nm or less, and it is more preferable that the light has substantially the same wavelength.

The longitudinal direction of this line-shaped measurement light can be changed by the second rotating unit 54 described above. By changing the longitudinal direction of the line-shaped measurement light according to the spreading direction of the surface of the test object M, efficient measurement can be performed.

The illumination optical system 13 may include a diffractive optical element such as a CGH (Computer Generated Hologram), and the spatial light intensity distribution of the illumination light beam L emitted from the light source 12 may be adjusted by the diffractive optical element. In this embodiment, the projection light with the adjusted spatial light intensity distribution may be called pattern light. The illumination light beam L is an example of pattern light. In this specification, the term "pattern direction" refers to the longitudinal direction of this line-shaped measurement light.

The imaging device (imaging section) 9 captures an image of the measurement light projected on the test object M from a direction different from the projection direction of the measurement light, and outputs image data. The imaging device 9 includes an imaging element 20, an imaging optical system 21, a diaphragm 23, and a diaphragm driving section 24. The illumination light beam L irradiated on the test object M from the light source device 8 is reflected and scattered on the surface of the test object M, and at least a part of it is incident on the imaging optical system 21. The imaging optical system 21 forms the image of the linear measurement light projected on the surface of the test object M by the light source device 8 together with the image of the test object M on the imaging element 20 by the imaging optical system 21. The imaging element 20 captures the image formed by the imaging optical system 21. The image processing section generates image data from the light reception signal received by the imaging element 20. When the imaging device 9 generates image data in the image processing section, it can switch the area in which image data is generated by the imaging element 20. As shown in FIG. 3, an area ROI1 and an area ROI2 are set on the imaging element 20. As shown in Figs. 2 and 4, the imaging device 9 can select a mode for generating image data of only the region ROI1 of the imaging element 20 and a mode for generating image data of only the region ROI2. The region ROI1 is a region (first region) into which reflected light is incident when the test object M is placed in the region _A1 . The region ROI2 is a region (second region) into which reflected light is incident when the test object M is placed in the region _A2 . Therefore, in the imaging surface of the imaging element 20, the position at which the measurement light is incident on the imaging surface differs depending on the position at which the measurement light is reflected in the projection direction of the measurement light. Note that, as described later, the region ROI1 and the region ROI2 can be changed as appropriate. The vertical direction in Fig. 5 corresponds to the reflection position of the measurement light in the projection direction of the measurement light. That is, the vertical direction in Fig. 5 corresponds to the height direction of the test object M. In the imaging element 20, when the number of pixels in the height direction is α, the 0th row to the (α/2)+γth row is the region ROI1, and the (α/2)-βth row to the αth row is the region ROI2. The imaging device 9 can adjust the values of γ and β to change the range of the region ROI1 and the range of the region ROI2. As shown in FIG. 5, the region into which the light reflected by the test object M is incident has a short width in the 0th row and a wide width toward the γth row. This point can be made to have a different relationship depending on the arrangement of the light source device 8, the imaging device 9, and the test object M. The diaphragm 23 has an opening whose size can be changed, and the amount of light passing through the imaging optical system 21 can be controlled by changing the size of the opening. The size of the opening of the diaphragm 23 can be adjusted by a diaphragm driving unit. This diaphragm driving unit 24 is controlled by the control device 4.

The imaging optical system 21 has a conjugate relationship between an object surface 21a on a plane including the emission direction of the illumination light beam L as a line light from the light source device 8 and the longitudinal direction of the spot shape of the illumination light beam L, and the light receiving surface 20a (image surface) of the image sensor 20. The plane including the emission direction of the illumination light beam L from the light source device 8 and the longitudinal direction of the spot shape of the illumination light beam L is approximately parallel to the propagation direction of the illumination light beam L. By forming a plane conjugate with the light receiving surface 20a of the image sensor 20 along the propagation direction of the illumination light beam L, a focused image can be obtained regardless of the position of the surface of the test object M.

2 and 3, the illumination optical system 13 and the imaging optical system 21 are arranged to satisfy the Scheimpflug condition. In other words, the object surface 21a on the test object M, the lens principal surface 21b of the imaging optical system 21, and the detection surface 20a of the image sensor 20 are arranged to intersect with one straight line P.

The control device 4 controls each part of the shape measuring device 1, and performs calculation processing based on the image capture results by the optical probe 3 and the position information of the probe moving device 2 and the holding and rotating device 7 to obtain shape information of the test object M. The shape information in this embodiment includes information indicating at least one of the shape, dimensions, unevenness distribution, surface roughness, and position (coordinates) of a point on the surface to be measured, for at least a portion of the test object M to be measured. A display device 5 and an input device 6 are connected to the control device 4.

The control device 4 generates a program for measuring the test object M, and controls the shape measurement operation of the test object M by each unit based on the generated program. The control device 4 determines the measurement range, light control area, etc. based on stored data and input received by the input device 6. The measurement range is the range in which the position of the image of the measurement light is detected from the image of the test object M captured. The light control area is the area in which the brightness of the captured image is detected within the imaging range of the imaging element 20. When detecting the position of the measurement light from image data, the brightest pixel value is detected for each pixel row from among the pixel rows arranged in the width direction of the line-shaped image of the measurement light (in the case of spot light scanning, the direction perpendicular to the scanning direction) in the image data captured by the imaging element 20. At that time, the pixel rows of the image data are not searched thoroughly from one end to the other, but the brightest pixel value is searched for for each pixel row only within the range set as the light control area.

The control device 4 acquires the pixel value of the brightest pixel for each pixel row detected within the dimming region, and outputs a signal for controlling the amount of light emitted by the light source 12, a signal for controlling the diaphragm drive unit 24, or a signal for controlling the exposure time when imaging by the image sensor 20, depending on the magnitude of the acquired pixel value. The exposure time may be controlled by the exposure time when acquiring one piece of image data, or the time when the imaging surface is exposed may be controlled by a mechanical shutter (not shown) built into the image sensor 20. Therefore, the dimming control unit 36 controls the amount of light emitted by the irradiation unit, the amount of light received by the imaging unit, the amount of exposure when acquiring image data by the imaging unit, or the input/output characteristics of the imaging unit (sensitivity or amplification factor for the signal detected by each pixel of the image sensor, etc.), that is, various conditions (dimming conditions) when acquiring image data by the optical probe 3, depending on the magnitude of the acquired pixel value.

The control device 4 measures the shape of the test object based on the position of the image of the measurement light projected by the light source device 8 located within the measurement range of the image data. The measurement unit 37 moves the optical probe 3 and the test object relatively by the probe moving device 2 and the holding and rotating device 7 based on the conditions controlled by the light adjustment control unit 36, and captures the image of the shooting area where the pattern image is projected by the imaging device 9 while moving the position where the image of the measurement light is projected. In addition, the position information of the probe moving device 2 and the holding and rotating device 7 is obtained from the position detection unit 11 at the timing of imaging by the imaging device 9. The control device 4 calculates the position where the pattern of the test object M is projected based on the position information of the probe moving device 2 and the holding and rotating device 7 from the position detection unit 11 obtained at the timing of imaging by the imaging device 9 and the imaging signal related to the image of the pattern image of the measurement range obtained by the imaging device 9, and outputs the shape data of the test object M. For example, this shape measurement device 1 sets the imaging timing of the imaging device 9 at a constant interval, and controls the moving speed of the probe moving device 2 and the holding and rotating device 7 based on the measurement point interval information input from the input device 6.

The control device 4 also controls the operation of each part of the shape measuring device 1, including the probe moving device 2, the optical probe 3, and the holding and rotating device 7. The control device 4 controls the operation of the probe moving device 2, the optical probe 3, and the holding and rotating device 7 based on the created operation control information. The control device 4 also controls the image acquisition operation by the optical probe 3.

The control device 4 has a storage device that stores various programs and data, such as a hard disk and memory. The storage device has a condition table and a shape measurement program. In addition to these programs and data, the storage device also stores various programs and data used to control the operation of the shape measurement device 1. The condition table stores conditions set by the control device 4 and various conditions input in advance. The shape measurement program stores a program that executes the processing of each part of the control device 4. In other words, the control device 4 realizes the operation of each part described above by executing the program stored in the shape measurement program. The shape measurement program includes both a program for measuring the test object M generated by the above-mentioned control device 4 and a program for the control device 4 to generate the program. The shape measurement program may be stored in the storage device in advance, but is not limited to this. It may be read from a storage medium in which the shape measurement program is stored and stored in the storage device, or it may be obtained from the outside by communication.

The control device 4 controls the drive unit 10 of the probe moving device 2 and the rotation drive unit 72 of the holding and rotating device 7 so that the relative positions of the optical probe 3 and the test object M are in a predetermined positional relationship. The control device 4 also controls the dimming of the optical probe 3, etc., to image the projected line pattern on the test object M with an optimal amount of light. The control device 4 acquires position information of the optical probe 3 from the position detection unit 11 of the probe moving device 2, and acquires data (imaged image data) indicating an image of the measurement area from the optical probe 3. The control device 4 then calculates and acquires shape information regarding the three-dimensional shape of the measurement object by correlating the position of the surface of the test object M obtained from the imaged image data according to the position of the optical probe 3 with the position of the optical probe 3, the projection direction of the line light, and the shooting direction of the imaging device.

The display device 5 is configured, for example, by a liquid crystal display device, an organic electroluminescence display device, or the like. The display device 5 displays measurement information related to the measurement of the shape measuring device 1. The measurement information can display, for example, image data captured by the image sensor 20, information indicating the position of the measurement area set in the image capture area of the image sensor 20, information indicating the position of the dimming area, and information indicating the position of the dimming area settable range. The position information of the measurement area, dimming area, and dimming area settable range is displayed superimposed on the image data captured by the image sensor 20. In addition, the display device 5 includes other information such as setting information indicating the settings related to the measurement, progress information indicating the progress of the measurement, and shape information indicating the results of the measurement. The display device 5 of this embodiment is supplied with image data indicating the measurement information from the control device 4, and displays an image indicating the measurement information according to this image data.

The input device 6 is composed of various input devices such as a keyboard, a mouse, a joystick, a trackball, a touchpad, etc. The input device 6 accepts input of various information to the control device 4. The various information includes, for example, command information indicating a command to start measurement to the shape measuring device 1, setting information regarding measurement by the shape measuring device 1, operation information for manually operating at least a part of the shape measuring device 1, etc.

In the shape measuring device 1 of this embodiment, the display device 5 and the input device 6 are connected to the control device 4. The control device 4, the display device 5, and the input device 6 of the shape measuring device 1 may be, for example, a computer connected to the shape measuring device 1, or a host computer provided in the building in which the shape measuring device 1 is installed. The control device 4, the display device 5, and the input device 6 of the shape measuring device 1 may be located away from the shape measuring device 1 and connected to the shape measuring device 1 using a communication means such as the Internet. In addition, the control device 4, the display device 5, and the input device 6 of the shape measuring device 1 may be held in separate locations. For example, the shape measuring device 1 may be supported inside the optical probe 3, for example, separately from a computer equipped with the input device 6 and the display device 5. In this case, the information acquired by the shape measuring device 1 is connected to the computer using a communication means.

Next, an example of the operation of measuring the shape of a test object using the shape measuring device 1 having the above configuration will be described with reference to Figures 6A to 12. Figure 6A is an explanatory diagram for explaining the measurement operation of the shape measuring device of this embodiment. Figure 6B is a partially enlarged view of the test object. Figure 7 is a flowchart showing an example of the measurement operation of the shape measuring device of this embodiment. Figure 8 is a flowchart showing an example of a process for creating a shape measurement program for the shape measuring device of this embodiment. Figure 9 is a flowchart showing an example of the measurement operation of the shape measuring device of this embodiment. Figure 10 is a flowchart showing an example of the measurement operation of the shape measuring device of this embodiment. Figure 11 is an explanatory diagram for explaining the measurement operation of the shape measuring device of this embodiment. Figure 12 is an explanatory diagram for explaining the measurement operation of the shape measuring device of this embodiment.

In the following, as shown in Figs. 6A and 6B, a case will be described in which the shape measuring device 1 measures the shape of the test object Ma in which a repeated shape is formed in the circumferential direction. For the sake of explanation, Fig. 6B shows an enlarged view of a position different from the position where the linear light is irradiated. The shape measuring device 1 irradiates the illumination light beam L onto a tooth, which is one unit of the repeated shape of the test object Ma, and acquires an image of the pattern projected onto the test object Ma to measure the shape of the test object Ma. The shape measuring device 1 of this embodiment can measure the shape of one tooth by acquiring an image of the pattern projected onto the test object Ma while moving the illumination light beam L along the direction of the tooth trace. The shape measuring device 1 can measure the shape of the test object Ma by measuring the shape of the teeth of the test object Ma in order. The test object Ma is a bevel gear in which teeth that are approximately the same shape in design are formed at a predetermined interval in the circumferential direction. Although the shape measuring device 1 of this embodiment uses a bevel gear as the test object Ma, it can measure the shape of objects of various shapes as the test object. Of course, when the test object Ma is a gear, the type of gear is not particularly limited. In addition to bevel gears, the shape measuring device 1 can also measure spur gears, helical gears, double helical gears, worm gears, pinions, hypoid gears, etc., which become test objects Ma. The shape measuring device 1 is not limited to measuring the shape of one tooth or the overall shape of the test object Ma, but can also measure the shape of any one point on the test object Ma. As shown in FIG. 6A, in the shape measuring device 1 of this embodiment, the light source 12 includes a first light source 12a and a second light source 12b, and light from the two light sources is irradiated respectively. FIG. 6A shows a state in which the line-shaped light generated by the light L1 from the first light source 12a and the line-shaped light generated by the light L2 from the second light source 12b overlap on a plane perpendicular to the light traveling direction, but they may be shifted. Furthermore, as described above, the two line-shaped lights only need to have different focal positions in the height direction of the test object Ma, and the angles of the lines in the planar direction of the test object Ma (the plane perpendicular to the height direction) may be different.

As shown in FIG. 6B, the shape measuring device 1 measures an area 150 above a predetermined height of the test object 140 with a line-shaped light generated by light L1 from the first light source 12a, and measures an area 152 below a predetermined height of the test object 140 with a line-shaped light generated by light L2 from the second light source 12b. When the optical device 8 is placed at a predetermined position, the range measured using the first light source 12a is different from the range measured using the second light source 12b. The range measured using the first light source 12a is area A1, and the range measured using the second light source 12b is area A2. Since the areas A1 and A2 are set at different positions in the projection direction of the measurement light, when measuring the test object 140, the areas A1 and A2 measure positions at different heights of the test object 140.

The shape measuring device 1 sets the measurement conditions in a mode for setting the conditions for measuring the shape of the test object Ma during operation, for example, in a teaching mode, and creates a program for the measurement.

Below, an example of the processing operation of the shape measuring device 1 will be described with reference to FIG. 7. For example, when the teaching mode is selected, the control device 4 of the shape measuring device 1 displays the screen 100 shown in FIG. 5 and executes the processing shown in FIG. 7. In addition, other processing, which will be described later, is also realized by executing processing in each part of the control device 4 based on a program stored in the storage unit.

When the teaching mode is selected, the control device 4 pre-sets the measurement range, dimming area, and dimming area settable range to the entire range that can be captured by the imaging device 8. Next, image data is transferred from the imaging device 8 to the control device 4, and the image data is displayed in the window 102. At this point in time, the control device 4 judges whether the measurement range has been set (step S12). Here, if a range smaller than the entire range of the range that can be captured by the imaging device 9, that is, a range smaller than the entire range of the acquired image data, is set as the measurement range, the control device 4 judges that the measurement range has been set. The measurement range can be set by surrounding a part of the image data with any shape, such as a circle, a rectangle, or an ellipse, on the window of the display device. Note that the control device 4 sets the measurement range to the range specified by the user, for example, after the measurement range selection point is selected and a button is operated. The control device 4 may also set the measurement range based on information set in the condition table. The control device 4 may also extract an image of a pattern onto which an illumination light beam is projected from an image acquired by the imaging device 9, and set the range in which the image of the pattern is extracted as the measurement range.

If the control device 4 determines that a measurement range has been set (Yes in step S12), it performs a process of setting the measurement range based on the position coordinates of the image data and writes it to the condition table (step S14). The control device 4 sets the measurement range to a range smaller than the range that can be captured by the imaging device 9. If the control device 4 determines that a measurement range has not been set (No in step S12) or has performed the process of setting the measurement range, it determines whether a dimming area has been set by the input device 6 (step S16). If the control device 4 determines that a dimming area has been set (Yes in step S16), it performs a process of setting the dimming area (step S18).

When the control device 4 determines that the dimming area is not set (No in step S16) or when the dimming area setting process is performed, it determines whether to perform a prescan (step S20). Here, prescan is a process of moving the optical probe 3 and the test object relatively based on the set conditions, moving the position where the pattern image is projected, and displaying the position where the line light is irradiated on the display device 5. While moving the test object relatively, image data including the image of the line-shaped pattern acquired by the imaging device 9 at a predetermined frame rate is displayed one after another. At the same time, it is preferable to continue displaying the measurement range and dimming area while superimposing them on the image data. When the control device 4 determines that a prescan is to be performed (Yes in step S20), it executes the prescan process (step S22).

When the control device 4 determines that pre-scanning is not to be performed (No in step S20) or when the pre-scanning process is performed, it determines whether the setting is complete (step S24). When the control device 4 determines that the setting is not complete (No in step S24), it returns to step S12 and executes the above-mentioned process again.

When the control device 4 sets the linear light irradiation conditions based on the results of prescanning, the stored position information of the measurement range and the position information of the dimming range, and the measurement conditions such as the scanning path of the optical probe 3, it generates a shape measurement program (step S28). The control device 4 generates a shape measurement program for measuring the test object Ma including the linear light irradiation conditions, the measurement range, the dimming area, the dimming method, and the measurement coordinate calculation area, and stores it in the memory unit 46. Specifically, the control device 4 determines the linear light irradiation conditions, the measurement path, and the measurement speed based on various conditions, determines the movement path in the XYZ axis directions by the probe moving device 2, the rotation speed in the Zθ direction by the holding and rotating device 7, the image acquisition timing by the optical probe 3, etc., and generates a shape measurement program including information on the determined operation, information on the set dimming conditions, and information on the measurement range for extracting the position of the pattern image from the acquired image.

After generating the shape measurement program, the control device 4 determines whether to execute the measurement (step S30). Here, the measurement is a process of measuring the shape by moving the optical probe 3 and the test object Ma relative to each other based on the set conditions, moving the position where the pattern image is projected, detecting the position where the pattern image is projected within the measurement area, and acquiring the coordinate values (point cloud data) of each part of the test object. If the control device 4 determines that the measurement is to be executed (Yes in step S30), the image capture device 8 is caused to repeatedly capture images at a predetermined frame rate. The control device 4 acquires the maximum pixel value of each pixel row included in the dimming range from the captured image data, and outputs dimming control information to the light source device 8 and the image capture device 9 (step S31). Next, based on the dimming conditions, the image capture device 9 captures an image of the pattern projected on the test object Ma, and sends the image data at that time to the control device 4 (step S32). Next, the control device 4 determines the position of the pattern image from the image data based on the measurement range information, and calculates the three-dimensional coordinate values of the portion of the test object Ma onto which the pattern is projected from the position information of the probe moving device 2 and the position information of the pattern image (step S33).

The control device 4 may treat the processes from step S12 to step S28 in FIG. 7, i.e., processes other than the measurement process up to the creation of the shape measurement program, as teaching processes, and execute them as processes in a mode different from the measurement process. Also, the control device 4 may not perform steps S20 and S22. In other words, the measurement range and dimming area may not be displayed on the display device 5.

Next, the process of generating a shape measurement program, specifically, the method of determining the irradiation conditions for the line-shaped light, will be described with reference to Figures 8 to 10. As shown in Figure 8, the control device 4 detects the area to be measured using two light sources within the measurement area of the test object (test object) (step S30).

In this case, as shown in FIG. 9, the control device 4 reads the pre-scan data of the measurement object, i.e., the test object (step S40). The shape measuring device 1 detects the outer shape of the test object from the data acquired by the pre-scan. Note that if the shape measuring device 1 is provided with information on the shape of the measurement object in advance, such as design data, e.g., CAD data, it can also set the area in which measurement is performed using two light sources based on the shape information.

Next, the control device 4 determines whether the height of the test object is equal to or greater than the threshold value (step S42). If the control device 4 determines that the height of the test object is equal to or greater than the threshold value (Yes in step S42), it sets the measurement conditions for measurement using two light sources (step S44). If the control device 4 determines that the height of the test object is less than the threshold value (No in step S42), it sets the measurement conditions for measurement using one light source (step S46).

The control device 4 determines whether to use two light sources or one light source for measurement based on the shape of the test object. The control device 4 may switch between using two light sources or one light source for measurement depending on the measurement position of the test object, or the position in the rotation direction when the test object is rotated. In the above embodiment, the area to be measured is set using two light sources, but all areas may be measured using two light sources.

Returning to FIG. 8, the control device 4 then sets the ROI area on the imaging element (detector) of the imaging device 9 when measuring using two light sources (step S32). The control device 4 creates a shape measurement program based on the set conditions (step S34).

The processing of steps S32 and S34 will be described with reference to FIG. 10. Specifically, the process of setting the regions ROI1 and ROI2 when two light sources are used will be described. The control device 4 extracts the region to be measured with two light sources from the measurement region of the test object (step S50). The control device 4 sets ROI1 and ROI2 on the detector when measuring using two light sources (step S52). The control device 4 sets ROI1 and ROI2 set for each measurement position so that they are different for each measurement position (step S54). In other words, the control device 4 sets the sizes of ROI1 and ROI2 so that they are different for each measurement position. The control device 4 creates a shape measurement program based on the set conditions (step S56).

When the shape measuring device 1 of this embodiment uses two light sources to perform measurement, the first light source 12a forms light L1 and detects light L1 in the region ROI1 of the image sensor 20, and the second light source 12b forms light L2 and detects light L2 in the region ROI2 of the image sensor 20, alternately. When the shape measuring device 1 of this embodiment uses two light sources to perform measurement, the first light source 12a irradiates light L1 and the second light source 12b irradiates light L2 at different times. In this case, the light source device 8 projects one of the two measurement lights, light L1 and light L2, onto the test object M. In other words, the light source device 8 switches between irradiating light L1 by the first light source 12a and irradiating light L2 by the second light source 12b. Specifically, as shown in FIG. 11, while the first light source 12a forms a line light and detects the line light in the region ROI1 of the image sensor 20, the second light source 12b does not form a line light and the second light source 12b does not detect the line light in the region ROI2 of the image sensor 20, and while the second light source 12b forms a line light and detects the line light in the region ROI2 of the image sensor 20, the first light source 12a does not form a line light and the first light source 12a does not detect the line light in the region ROI1 of the image sensor. Also, the signal detected in the region ROI1 of the image sensor is taken out while the first light source 12a does not form a line light. The signal detected in the region ROI2 of the image sensor is taken out while the second light source 12b does not form a line light. When the measurement is performed using two light sources, the first light source 12a irradiates the light L1 and the second light source 12b irradiates the light L2 at different times, but they may be irradiated simultaneously. For example, only when measuring the overlapping area between region ROI1 of image sensor 20 and region ROI2 of image sensor 20, light L1 from first light source 12a and light L2 from second light source 12b may be irradiated at different times, and when measuring other areas, light L1 from first light source 12a and light L2 from second light source 12b may be irradiated simultaneously.

In addition, the shape measuring device 1 of this embodiment overlaps the region ROI1 and the region ROI2 for each adjacent image data, and changes the overlapping region for each measurement position. In this embodiment, the shape measuring device 1 changes the overlapping region while measuring it. That is, the shape measuring device 1 of this embodiment changes the number of rows of the image pickup element in the region ROI1 and the number of rows of the image pickup element in the region ROI2 for each image data. Figure 12 shows the ranges of the region ROI1 and the region ROI2 in each image data. The line segments 172a, 172b, 172c, 172d, 172e, 172f, 172g, and 172h in Figure 12 indicate the range of the region ROI1. The line segments 174a, 174b, 174c, 174d, 174e, 174f, 174g, and 174h indicate the range of the region ROI2. The line segments 172a and 174a are adjacent image data, and the image data corresponding to the line segments 172a and 174a partially overlap, and image data of all rows of the image sensor 20 is acquired. Moreover, the range 176a is the range where the line segments 172a and 174a overlap. The ranges 176b, 176c, 176d, 176e, 176f, 176g, and 176h are the range where the line segments 172b, 172c, 172d, 172e, 172f, 172g, and 172h overlap with the adjacent line segments 174b, 174c, 174d, 174e, 174f, 174g, and 174h. The position where the overlapping area is set changes for each measurement position. Moreover, the area of the overlapping area changes for each measurement position. In this embodiment, the overlapping area between regions ROI1 and ROI2 is changed for each measurement position, but the overlapping area may be changed for each measurement.

As shown in FIG. 12, the control device 4 changes the number of rows of the image sensor in region ROI1 and the number of rows of the image sensor in region ROI2 for each image data, with the adjacent image data having partial overlap between region ROI1 and region ROI2. The control device 4 acquires image data of each region shown in FIG. 12 at the timing shown in FIG. 11, and measures the outer shape of the test object Ma based on the acquired image data.

As described above, the shape measuring device measures the three-dimensional shape of the test object using the measurement light. The light from the light source is formed into the measurement light by the optical system, so the width of the measurement light changes depending on the position in the irradiation direction of the measurement light. Depending on the position in the irradiation direction of the measurement light, the irradiation area of the measurement light may become wide, which may reduce the accuracy of the shape measurement results. In addition, when attempting to measure using a width of the measurement light of a predetermined range, it is necessary to adjust the relative positions of the test object and the optical probe in the projection direction of the measurement light, which may require time for measurement. Therefore, the shape measuring device 1 of this embodiment is designed to irradiate different areas along the projection direction of the measurement light with the first measurement light and the second measurement light.

This allows the shape of the test object to be detected with higher accuracy. Furthermore, since area division is performed using two light sources, measurement can be performed efficiently. Note that, although two light sources are used in this embodiment, this is not limited to this. Light from one light source may be branched into light L1 and light L2. Three or more light sources may be used. In this case, it is possible to provide three irradiation areas for measurement light and three corresponding imaging areas.

Furthermore, by varying the regions ROI1 and ROI2 from which image data is acquired, the shape measuring device 1 can prevent the overlapping regions from becoming constant, and can prevent the shape data of only some regions from becoming greater than that of other regions. This eliminates the need for processing such as removing overlapping data from the measurement results, simplifying the processing. In the above embodiment, the regions ROI1 and ROI2 are overlapped, but the regions may be set so that the regions ROI1 and ROI2 are in contact. The regions ROI1 and ROI2 may also be set apart. The regions ROI1 and ROI2 may also be set on different image sensors. In this case, the regions ROI1 and ROI2 are different regions.

In addition, when acquiring image data of region ROI1, the shape measuring device 1 irradiates the test object with light from the first light source 12a but does not irradiate the test object with light from the second light source 12b, and when acquiring image data of region ROI2, the shape measuring device 1 does not irradiate the test object with light from the first light source 12a but irradiates the test object with light from the second light source 12b, thereby preventing detection of anything other than the pattern of the target to be detected and enabling shape measurement with simpler processing.

In addition, the control device 4 of this embodiment is capable of executing a pre-scan process, allowing the user to visually check the shape of the test object M, the pattern formed by irradiating light from each light source, and the fluctuations in the image of the measurement range and dimming area when the test object M and the illumination light beam L move relative to each other. This allows the measurement range and dimming area to be set to more appropriate ranges and areas.

The shape measuring device 1 can set the measurement range to any region. In the above embodiment, the region where the image of the pattern is formed is selected to set multiple measurement ranges, but a wide range including the entire region where the image of the pattern is formed may be set as one measurement range. In this case, the measurement range may include bright lines, but by setting the dimming region based on the dimming region settable range set based on the measurement range, it is possible to set only a portion of the region as the dimming region. This allows the dimming conditions to be appropriate.

Although the control device 4 sets the dimming conditions when creating the shape measurement program, this is not limited to the above. The control device 4 may set the dimming conditions based on the amount of light in the dimming area of the image during measurement. This allows the dimming conditions to be suitable for the image acquired during measurement.

As in this embodiment, the moving mechanism of the shape measuring device 1 can move the optical probe 3 and the test object M (Ma) relatively in a first direction, a second direction perpendicular to the first direction, and a third direction perpendicular to the plane formed by the first direction and the second direction, and it is preferable that the plane formed by the first direction and the second direction includes a radial direction. This allows the relative position to be moved in any direction. In addition, the shape measuring device 1 is not limited to the shape measuring device 1, and various combinations can be used as a mechanism for moving the relative position between the test object M and the pattern projected onto the test object M. In the shape measuring device 1, either the optical probe 3 or the test object M can be moved in the X-axis, Y-axis, or Z-axis directions, or can be rotated around the X-axis, Y-axis, or Z-axis directions. In addition, the shape measuring device 1 may be a mechanism that does not move relatively.

Although an example has been described in which a line-shaped measurement light is projected by the illumination optical system 13 of the optical probe 3, the present invention is not limited to this. For example, an optical system that projects a dot-shaped spot pattern onto the test object M, and an illumination optical system equipped with a deflection scanning mirror so that this spot pattern can be scanned in one direction on the surface of the test object M may be used. In this case, the longitudinal direction of the line-shaped measurement light corresponds to the scanning direction of the deflection scanning mirror. As a result, the dot-shaped spot pattern is projected while being scanned at least within a linear scanning range, and the linear scanning range becomes a line-shaped measurement light.

Although the shape measuring device 1 of the above embodiment performs processing using one device, multiple devices may be combined. FIG. 13 is a schematic diagram showing the configuration of a system having a shape measuring device. Next, a shape measuring system 300 having a shape measuring device will be described with reference to FIG. 13. The shape measuring system 300 has a shape measuring device 1, multiple shape measuring devices 1a (two in the figure), and a program creating device 302. The shape measuring devices 1, 1a, and the program creating device 302 are connected by a wired or wireless communication line. The shape measuring device 1a has the same configuration as the shape measuring device 1 except that it does not have the measurement range setting unit 33, the dimming area setting unit 34, and the dimming area settable range setting unit 35. The program creating device 302 creates various settings and programs to be created by the control device 4 of the shape measuring device 1 described above. Specifically, the program creating device 302 creates information on the measurement range, the dimming area settable range, and the dimming area, and a shape measuring program including information on the measurement range, the dimming area settable range, and the dimming area. The program creation device 302 outputs the created program and data to the shape measuring device 1, 1a. The shape measuring device 1a acquires area and range information and a shape measurement program from the shape measuring device 1 and the program creation device 302, and performs processing using the acquired data and program. The shape measuring system 300 executes measurement with the shape measuring device 1a using the measurement program and the data and program created by the shape measuring device 1 and the program creation device 302, thereby making effective use of the created data and program. Furthermore, the shape measuring device 1a can perform measurement without providing the measurement range setting unit 33, the dimming area setting unit 34, the dimming area settable range setting unit 35, and other units for setting.

In the above embodiment, the shape measuring device 1 measures the shape of the test object Ma having a repeated shape formed in the circumferential direction, and the bottom of the test object Ma is fixed to the table 71 (see FIG. 6A, etc.), but the present invention is not limited to this. FIG. 14 is a perspective view showing another example of the shape measuring device. The shape measuring device 1A shown in FIG. 14 has a main body 111, a sensor unit 120, and a moving unit 130. In the XYZ Cartesian coordinate system in FIG. 14, a plane parallel to the upper surface of the base plate 113 is the XY plane. Also, one direction on the base plate 113 is the X direction, a direction perpendicular to the X direction on the upper surface of the base plate 113 is the Y direction, and a direction perpendicular to the upper surface of the base plate 113 is the Z direction.

The main body 111 includes a stand 112 and a base plate 113 placed on the stand 112. The stand 112 is for adjusting the levelness of the entire shape measuring device 1A. The base plate 113 is made of stone or cast iron, and its upper surface is kept horizontal by the stand 112. A table 114 is placed on the upper surface of the base plate 113. The table 114 is flat and parallel to the XY plane, and can rotate around an axis parallel to the Z direction and can be tilted with respect to the XY plane. Therefore, the table 114 can hold the test object M in any position. Note that the table 114 is not limited to a rotatable and tiltable configuration, and may be fixed to the base plate 113, for example.

The sensor unit 120 projects measurement light toward the test object M placed on the table 114, captures the image projected onto the test object M, and outputs image data. The sensor unit 120 has the same configuration as the optical probe 3 in the above embodiment.

The moving unit 130 moves the sensor unit 120 in a direction approximately perpendicular to the longitudinal direction of the measurement light projected onto the test object M, thereby scanning the measurement light over the surface of the test object M. In the shape measurement device 1A, the sensor unit 120 is moved along a predetermined direction by the moving unit 130. The moving unit 130 has a gate-shaped frame including an X-axis guide 115a, a driving side column 115b, and a driven side column 115c.

A head unit 116 is disposed on the X-axis guide 115a. The head unit 116 is movable in the X-axis direction along the X-axis guide 115a. A Z-axis guide 117 is attached to the head unit 116. The Z-axis guide 117 is movable in the Z-axis direction relative to the head unit 116. The above-mentioned sensor unit 120 is attached to the lower end of the Z-axis guide 117.

A jig 74 that supports the test object M is placed on the base plate 113. The shape measuring device 1A can stably place the test object M of any shape on the table 114 by supporting the test object M using the jig 74. The other configuration of the table 114 is similar to that of the table 71 in the above embodiment. The shape measuring device 1A is similar to the shape measuring device 1 in the above embodiment in terms of the configuration other than the table 114.

The jig 74 can support the test object M from above (+Z direction) or from the side (radial direction relative to the Z axis) depending on the shape of the test object M. The jig 74 is detachably held on, for example, the table 114. The jig 74 has a columnar portion 74a extending from the table 114 to the +Z side and a support portion 74b extending from the tip (end portion on the +Z side) of the columnar portion 74a toward the test object M. One or more jigs 74 are arranged around the test object M. The jig 74 supports the test object M between the support portion 74b and the table 114. When multiple jigs 74 are provided, the test object M may be supported between multiple support portions 74b. Note that the configuration of the jig 74 is not limited to the configuration having the columnar portion 74a and the support portion 74b as shown in FIG. 14, and may be other configurations as long as it is a configuration that can support the test object M from above or from the side.

The surface of the jig 74 is coated with a paint that absorbs light of at least the same wavelength as the wavelength of the measurement light. When the measurement light is irradiated onto the jig 74 together with the test object M, the surface of the jig 74 is coated with the paint so that the measurement light is absorbed to such an extent that the data corresponding to the jig 74 in the obtained image data can be distinguished from the data corresponding to the test object M by the control device 4. Therefore, the brightness value of the image due to the reflection of the measurement light by the jig 74 and the brightness value of the image due to the reflection of the measurement light by the test object M are different. Therefore, in the image data when the test object M and the jig are measured, the test object M and the jig can be distinguished from each other using the brightness value. In this embodiment, the jig 74 absorbs the measurement light, so that the brightness value due to the reflection of the measurement light by the jig 74 is lower than the brightness value due to the reflection of the measurement light by the test object M. Therefore, the lower brightness value can be regarded as the reflection of the measurement light by the jig 74 and can be regarded as the measurement result by the jig 74. The surface of the jig 74 may be coated with the above-mentioned paint so that when the measurement light is irradiated, the measurement light is absorbed to such an extent that it is not detected as measurement light by the imaging element 20 of the imaging device 9.

When the measurement light is irradiated onto the test object M while the test object M is supported from above or the side by the jig 74 to perform shape measurement, the measurement light may be irradiated onto the jig 74. When the measurement light is irradiated onto the jig 74, the image data output from the imaging device 9 includes data corresponding to the test object M and data corresponding to the jig 74. In this embodiment, at least a part of the measurement light is absorbed by the paint covering the surface of the jig 74. In this case, the data corresponding to the jig 74 in the image data has a lower brightness than the data corresponding to the test object M. Therefore, the control device 4 can distinguish the data corresponding to the jig 74 from the data corresponding to the test object M based on the brightness. When calculating the shape of the test object M, the control device 4 performs processing based on the data of the image data that does not include the data corresponding to the jig 74, thereby calculating the shape of the test object M in a state that does not include the jig 74. Note that the information extracted from the image is not limited to brightness, and other information such as luminance may be used. For example, the luminance of the measurement light reflected from the test object M and the luminance of the measurement light reflected from the jig 74 may be determined based on the luminance value. For example, it is possible to identify the position corresponding to the test object M by determining that the test object M has a luminance higher than a predetermined value.

In addition, when the measurement light is irradiated onto the jig 74 in this embodiment, some parts of the surface of the test object M may be shaded by the jig 74. In other words, some parts may be shaded by the jig 74. The shape of these parts can be determined by, for example, changing the direction of the measurement light or changing the position of the jig 74 to perform multiple measurements from different angles, and then using the multiple measurement results to complement the shape.

The jig 74 is not limited to a configuration in which the entire surface is covered with the above-mentioned paint, and may be a configuration in which only a portion of the surface is covered with the above-mentioned paint. For example, the columnar portion 74a of the jig 74 may not be covered with paint, and the support portion 74b may be covered with paint. Also, a portion of the support portion 74b (for example, the tip portion) may be covered with paint.

Next, a structure manufacturing system equipped with the above-mentioned shape measuring device will be described with reference to FIG. 15. FIG. 15 is a block diagram of the structure manufacturing system. The structure manufacturing system 200 of this embodiment is equipped with a shape measuring device 201, a design device 202, a molding device 203, a control device (inspection device) 204, and a repair device 205 as described in the above embodiment. The control device 204 is equipped with a coordinate memory unit 210 and an inspection unit 211.

The design device 202 creates design information regarding the shape of the structure, and transmits the created design information to the molding device 203. The design device 202 also stores the created design information in the coordinate memory unit 210 of the control device 204. The design information includes information indicating the coordinates of each position of the structure.

The forming device 203 creates the above-mentioned structure based on the design information input from the design device 202. The forming performed by the forming device 203 includes, for example, casting, forging, cutting, etc. The shape measuring device 201 measures the coordinates of the created structure (measurement target) and transmits information indicating the measured coordinates (shape information) to the control device 204.

The coordinate memory unit 210 of the control device 204 stores the design information. The inspection unit 211 of the control device 204 reads out the design information from the coordinate memory unit 210. The inspection unit 211 compares the information indicating the coordinates (shape information) received from the shape measurement device 201 with the design information read out from the coordinate memory unit 210. The inspection unit 211 judges whether the structure has been formed according to the design information based on the comparison result. In other words, the inspection unit 211 judges whether the created structure is a good product. If the structure has not been formed according to the design information, the inspection unit 211 judges whether the structure can be repaired. If the structure can be repaired, the inspection unit 211 calculates the defective parts and the repair amount based on the comparison result, and transmits the information indicating the defective parts and the repair amount to the repair device 205.

The repair device 205 processes the defective part of the structure based on the information indicating the defective part and the information indicating the amount of repair received from the control device 204.

Figure 16 is a flowchart showing the flow of processing by the structure manufacturing system. In the structure manufacturing system 200, the design device 202 first creates design information regarding the shape of the structure (step S101). Next, the molding device 203 creates the structure based on the design information (step S102). Next, the shape measuring device 201 measures the shape of the created structure (step S103). Next, the inspection unit 211 of the control device 204 compares the shape information obtained by the shape measuring device 201 with the design information to inspect whether the structure has been created according to the design information (step S104).

Next, the inspection unit 211 of the control device 204 determines whether the created structure is a non-defective product (step S105). If the inspection unit 211 determines that the created structure is a non-defective product (Yes in step S105), the structure manufacturing system 200 ends the process. If the inspection unit 211 determines that the created structure is not a non-defective product (No in step S105), the inspection unit 211 determines whether the created structure can be repaired (step S106).

When the inspection unit 211 determines that the created structure can be repaired (Yes in step S106), the repair device 205 reprocesses the structure (step S107) and the process returns to step S103. When the inspection unit 211 determines that the created structure cannot be repaired (No in step S106), the structure manufacturing system 200 ends the process. With this, the structure manufacturing system 200 ends the process of the flowchart shown in FIG. 16.

The structure manufacturing system 200 of this embodiment can determine whether the created structure is of good quality or not because the shape measuring device 201 in the above embodiment can measure the coordinates of the structure with high accuracy. Furthermore, if the structure is not of good quality, the structure manufacturing system 200 can reprocess the structure and repair it.

The repair process performed by the repair device 205 in this embodiment may be replaced with a process in which the molding device 203 re-executes the molding process. In that case, if the inspection unit 211 of the control device 204 determines that the structure can be repaired, the molding device 203 re-executes the molding process (forging, cutting, etc.). Specifically, for example, the molding device 203 cuts the parts of the structure that should have been cut but have not been cut. This allows the structure manufacturing system 200 to accurately create the structure.

Although the preferred embodiment of the present invention has been described above with reference to the attached drawings, it goes without saying that the present invention is not limited to the examples. The shapes and combinations of the components shown in the above examples are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention.

For example, in the above embodiment, the shape measuring device 1 is configured such that the holding member 55 holds the optical probe 3 at one end, but this is not limited thereto, and the holding member 55 may be configured to hold the optical probe 3 at both ends. By holding the optical probe 3 at both ends, deformation that occurs in the holding member 55 during rotation can be reduced, and measurement accuracy can be improved.

In the above embodiment, the optical probe 3 emits a line of light as the illumination light beam L, and captures an image of the line-shaped measurement light reflected from the test object, but the type of the optical probe 3 is not limited to this. The illumination light emitted from the optical probe 3 may be of a type that irradiates a predetermined surface all at once. For example, the type described in U.S. Patent No. 6,075,605 may be used. The illumination light emitted from the optical probe may be of a type that irradiates a point-shaped spot light.

The shape measuring device can also be used to suitably measure test objects having a repeating shape in the circumferential direction and an uneven shape extending in a direction different from the circumferential direction, as in the above embodiment. The shape measuring device can set the measurement range, the dimming area settable range, and the dimming area for one of the repeating shapes, and use the set conditions to measure other repeating shapes. Note that the test object is not limited to a shape having a repeating shape in the circumferential direction and an uneven shape extending in a direction different from the circumferential direction, and may have various shapes, for example, a shape that does not have a repeating shape.

Although the preferred embodiments and modifications of the present invention have been described above with reference to the attached drawings, it goes without saying that the present invention is not limited to the examples. The shapes and combinations of the components shown in the above examples are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention. The components of the above embodiments can be combined as appropriate. Some components may not be used. In addition, to the extent permitted by law, all disclosures of publications and U.S. patents relating to the inspection devices, etc. cited in the above embodiments and modifications are incorporated by reference into the present description. All other embodiments and operational techniques, etc. made by those skilled in the art based on the above embodiments are included in the scope of this embodiment.

REFERENCE SIGNS LIST 1, 1A Shape measuring device 2 Probe moving device 3 Optical probe 4 Control device 5 Display device 6 Input device 12 Light source 13 Illumination optical system 20 Image sensor 20a Light receiving surface 21 Imaging optical system 21a Object surface 71, 71A Table 72 Rotation drive unit 73a, 73b Reference sphere 74 Jig 74a Columnar portion 74b Support portion 102 Image 140, 180 Outline 144 Bright lines 150a, 150b Measurement range 302 Programming device AX Center of rotation axis B Base M Test object L Illumination light beam

Claims (13)

A shape measuring apparatus for measuring a shape of a surface of a test object, comprising:
an irradiation unit that irradiates a first measurement light and a second measurement light on different regions along a projection direction of the surface of the object at different times;
an imaging unit that captures images of the first measurement light and the second measurement light projected onto the test object from a direction different from the projection direction and outputs image data;
a control unit that calculates a shape of a surface of the test object based on positions of images of the first measurement light and the second measurement light in the image data,
A shape measuring device in which the control unit changes the range of a first area on the imaging unit that detects the position of an image of the first measurement light and the range of a second area on the imaging unit that detects the position of an image of the second measurement light depending on the measurement position on the test object at which the test object is measured. a first optical system that irradiates the first measurement light onto the test object;
The shape measuring apparatus according to claim 1 , further comprising: a second optical system having at least a part of the first optical system and configured to irradiate the test object with the second measurement light. The shape measuring device according to claim 2, wherein the focal position of the first optical system and the focal position of the second optical system are located at different positions along the projection direction. The shape measuring device according to any one of claims 1 to 3, wherein the control unit acquires shape information of the test object and determines whether or not to measure using both the first measurement light and the second measurement light based on the shape information. The shape measuring device according to any one of claims 1 to 4, wherein the first region and the second region partially overlap. The shape measuring device according to claim 5, wherein the control unit changes the overlapping area between the first area and the second area according to the measurement position while measuring the surface of the test object. The shape measuring device according to any one of claims 1 to 6, wherein the control unit is capable of switching between irradiating the first measurement light and irradiating the second measurement light while measuring the surface of the test object. The shape measuring device according to any one of claims 1 to 7, wherein the first measurement light and the second measurement light are light of the same wavelength. A table on which the test object is placed;
a fixing unit that fixes the test object to the table,
The shape measuring apparatus according to claim 1 , wherein at least a part of a surface of the fixing part is covered with an absorbing material that absorbs a part of the first measurement light and the second measurement light. a discrimination unit that discriminates between an image of the test object and an image of the fixed portion included in the image data,
The shape measuring apparatus according to claim 9 , wherein the control unit calculates a shape of the surface of the test object from the image data that does not include an image of the fixing portion. a forming device that forms the structure based on design information regarding the shape of the structure;
A shape measuring device according to claim 1 , which measures a shape of the structure formed by the forming device;
A structure manufacturing system comprising: a control device that compares shape information indicating the shape of the structure measured by the shape measuring device with the design information. A shape measuring method for measuring a shape of a surface of a test object, comprising the steps of:
Irradiating a first measurement light and a second measurement light on different regions along a projection direction of the surface of the test object at different times;
capturing images of the first measurement light and the second measurement light projected onto the test object from a direction different from the projection direction with an imaging unit, and outputting image data;
calculating a shape of a surface of the object to be measured based on positions of images of the first measurement light and the second measurement light in the image data;
A shape measurement method in which imaging with the imaging unit includes changing a first area on the imaging unit that detects the position of an image of the first measurement light and a second area on the imaging unit that detects the position of an image of the second measurement light according to a measurement position on the test object at which the test object is measured. forming a structure based on design information relating to a shape of the structure;
measuring a shape of the molded structure by a shape measuring method according to claim 12;
and comparing shape information indicating the measured shape of the structure with the design information.

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