JP7419030B2 - Holding device, exposure device, and article manufacturing method - Google Patents

Description

The present invention relates to a holding device, an exposure device, and a method of manufacturing an article.

In an exposure apparatus, the chuck on the substrate stage that holds the substrate may be replaced depending on the shape and size of the substrate to be exposed.
At that time, there is a possibility that the chuck may be erroneously transported to a position or direction different from the designed position within the exposure apparatus.
In this case, the chuck may be transported to the wrong position within the exposure apparatus and collide with the components in the exposure apparatus, damaging the chuck or its components, or the substrate may be placed on an incorrectly placed chuck. This may cause the board to fall.
Patent Document 1 discloses a holding device that includes a detection unit that detects whether a held object is placed at a predetermined position.

Japanese Patent Application Publication No. 2004-158742

In the holding device disclosed in Patent Document 1, since a detection section for detecting the arrangement of the held object is separately provided, the configuration becomes complicated and the device becomes large.
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a holding device with a compact and simple configuration that can detect the arrangement of a held object.

The holding device according to the present invention includes a suction holding section that suction-holds the object by creating a negative pressure in the space formed between the surface of the object to be held and the surface of the object to be held; A measurement unit that measures the flow rate and a device that determines whether the measured value of pressure or flow rate by the measurement unit is less than a predetermined threshold value when adsorbing an object that has a predetermined structure formed on the adsorption surface. For an object to be held that is placed in a predetermined direction where the suction holding part and a predetermined structure of the held object do not face each other, the suction holding part makes the space a negative pressure, and the suction holding part When the object to be held is arranged in an orientation different from the predetermined direction in which the object to be held faces the predetermined structure, the space communicates with the outside via the predetermined structure .

According to the present invention, it is possible to provide a holding device with a compact and simple configuration that can detect the arrangement of a held object.

FIG. 2 is a schematic cross-sectional view of the holding device according to the first embodiment. FIG. 2 is a front view of a chuck held by the holding device according to the first embodiment. FIG. 3 is a front view of the chuck placed in the correct position in the holding device according to the first embodiment. FIG. 3 is a front view and a partially enlarged sectional view of a chuck placed in an incorrect position in the holding device according to the first embodiment. 5 is a flowchart when holding a chuck by suction in the holding device according to the first embodiment. FIG. 3 is a schematic cross-sectional view of a holding device according to a second embodiment. FIG. 7 is a front view of a chuck placed in a correct position in a holding device according to a second embodiment. A front view, a partially enlarged front view, and a partially enlarged cross-sectional view of a chuck arranged at a correct position in a holding device according to a third embodiment. FIG. 7 is a partially enlarged cross-sectional view of a chuck placed in an incorrect position in the holding device according to the third embodiment. FIG. 1 is a schematic diagram of an exposure apparatus including a holding device according to the present embodiment.

Below, the holding device according to this embodiment will be explained in detail based on the attached drawings. Note that the drawings shown below are drawn on a different scale from the actual scale in order to facilitate understanding of the present embodiment.

[First embodiment]
In the lithography process, which is a manufacturing process for semiconductor devices, liquid crystal display devices, etc., an exposure device transfers a pattern on an original (reticle or mask) to a photosensitive substrate (a wafer with a resist layer formed on the surface) through a projection optical system. This is a device that transfers images onto (or glass plates, etc.).
In an exposure apparatus, if a substrate is mounted on the chuck and exposure is started with foreign matter attached to the chuck holding the substrate, local defocus may occur, resulting in poor resolution.

In order to solve such problems, exposure apparatuses are provided with a chuck maintenance mechanism to periodically clean the surface of the chuck.
At this time, by transporting the chuck placed on the substrate stage to the chuck maintenance mechanism using a transport arm, robot, etc. and cleaning it, it is possible to remove the foreign matter without reducing the throughput of the equipment as much as possible. .

On the other hand, as the materials and shapes of substrates become more diverse, it becomes necessary to prepare a plurality of chucks having various shapes, and in an exposure apparatus, it becomes necessary to replace the chucks depending on the substrate.
Generally, when replacing a chuck, the chuck is manually placed on the hand of a robot that transports the chuck, or on a table accessed by the robot (for example, a table provided in a chuck maintenance mechanism).
At this time, depending on the shape of the chuck, it is possible that the chuck may be placed incorrectly, that is, the chuck may be incorrectly placed in a position or direction different from the designed position in the chuck maintenance mechanism.

If the chuck is incorrectly placed in the chuck maintenance mechanism, it will be damaged due to collision with other components in the exposure apparatus when a transport means such as a robot returns the chuck from the chuck maintenance mechanism to the substrate stage after cleaning the chuck. There is a possibility that this may occur.
In addition, there is a risk that the substrate may fall from the chuck if the substrate is not attracted at the correct position after being returned to the wrong position on the substrate stage.

Conventional methods for preventing such misplacement include a method in which a measuring device such as a camera is provided to measure the chuck placement, and a method in which a barrier device such as a stopper is provided to prevent the chuck from being placed in any direction other than a specific direction. It has been known.
However, in the former method, it is necessary to newly provide a measuring means, which leads to an increase in the size and cost of the device.
Moreover, in the latter method, when the chuck is incorrectly placed, the chuck collides with the stopper. In this case, since the chuck is generally made of a brittle material such as ceramic, there is a possibility that the chuck will be damaged.

FIG. 10 shows a schematic diagram of an exposure apparatus 900 including the holding device 10 according to this embodiment.
In the following description, the direction parallel to the optical axes of the illumination optical system 902 and the projection optical system 906 (vertical direction in the exposure apparatus 900) is defined as the Z-axis, and two directions orthogonal to each other in a plane perpendicular to the Z-axis are defined as the Z-axis. are the X-axis and Y-axis, respectively.

As shown in FIG. 10, the exposure apparatus 900 includes a light source 901, an illumination optical system 902, a reticle stage 904, and a projection optical system 906. The exposure apparatus 900 also includes a detection system 907, a chuck maintenance mechanism 909 (chuck maintenance section), a control section 910, and a substrate stage 913.

In the exposure apparatus 900, illumination light (exposure light) emitted from a light source 901 is emitted onto a reticle (original plate) 903 via an illumination optical system 902. Thereby, the image of the pattern formed on the illuminated reticle 903 is projected (transferred) onto the photoreceptor on the substrate 908 via the projection optical system 906.
Note that the illumination light emitted from the light source 901 is not limited to light in the near ultraviolet region such as i-line (wavelength 365 nm), but also light in the far ultraviolet region such as KrF light (wavelength 248 nm) and ArF light (wavelength 193 nm). , G-line (wavelength: 436 nm) or other visible light region light may be used.

The reticle stage 904 holds the reticle 903 and moves it in the X-axis direction, and the substrate stage 913 uses a drive mechanism (not shown) such as a linear motor to move the substrate holder 917 and the substrate 908 held by the substrate holder 917. Move in the X-axis direction and Y-axis direction.
Exposure apparatus 900 forms a pattern on a resist applied to substrate 908 while relatively scanning reticle 903 and substrate 908 with reticle stage 904 and substrate stage 913, respectively.
Interferometer 914 and interferometer 911 detect the positions of reticle 903 and substrate 908 by respectively irradiating mirror 905 and mirror 912 with laser light and then receiving reflected light.

The detection system 907 detects an alignment mark (not shown) formed on the substrate 908 and a reference mark (not shown) formed on the substrate stage 913.
The detection system 907 also includes a foreign matter detection section (not shown) that detects foreign matter attached to the surface of the chuck 12.

The substrate holding unit 917 includes the chuck 12 , a top plate 915 with built-in pins 916 that support the substrate 908 when loading and unloading the substrate 908 , and a lifting mechanism (not shown) that lifts and lowers the chuck 12 and the top plate 915 with respect to the pins 916 . and has.

The control unit 910 centrally controls the reticle stage 904, the detection system 907, the chuck maintenance mechanism 909, the interferometer 911, the substrate stage 913, the interferometer 914, and the substrate holding unit 917.
For example, the control unit 910 determines the pattern formation position based on the detection result of the detection system 907 during exposure processing, and controls the reticle stage 904 and substrate stage 913 based on position information obtained from the interferometers 914 and 911. Control position.
Furthermore, the control unit 910 controls the lifting mechanism of the substrate holding unit 917 and the movement of the substrate stage 913 when the substrate 908 is carried in and out.
Note that the control unit 910 may be provided in a casing (not shown) that accommodates the constituent members of the exposure apparatus 900 shown in FIG. 10, or may be provided in a casing separate from the casing.

Further, when a foreign object is detected in the chuck 12, the control unit 910 controls the size of the foreign object based on the particle size of the foreign object detected by the detection system 907 and the tolerance setting regarding the size of the foreign object attached to the chuck 12. Determine adhesion.
When the control unit 910 determines that foreign matter has adhered to the chuck 12, the control unit 910 causes the chuck maintenance mechanism 909, which is a cleaning means for removing the foreign matter attached to the chuck 12, to transport the chuck 12. After that, the chuck 12 is cleaned.

In addition, when foreign matter that is difficult to remove by cleaning is attached to the chuck 12, when damage is detected on the chuck 12, or when it is necessary to replace the chuck 12 with another one, the chuck maintenance mechanism 909 sends an external From then on, the chuck 12 is replaced.
Then, the chuck 12 that has been cleaned or replaced from the outside is transported from the chuck maintenance mechanism 909 to the substrate stage 913 and connected to the top plate 915.

The holding device 10 according to this embodiment is provided in the chuck maintenance mechanism 909 in order to prevent incorrect placement when replacing the chuck 12.

Next, the holding device 10 according to this embodiment will be explained in detail.
FIG. 1 shows a schematic cross-sectional view of a holding device 10 according to this embodiment. Further, FIG. 2 shows a front view of the suction surface of the chuck 12 (object to be held) held by the holding device 10 according to the present embodiment.

As shown in FIG. 1, the holding device 10 according to the present embodiment includes a main body portion 1 and a suction holding portion 4 for holding the chuck 12.
The holding device 10 according to the present embodiment also includes a detecting section 7 (measuring section) for detecting the suction holding state of the chuck 12 in the suction holding section 4, and a detection section 7 (measuring section) for detecting the suction holding state of the chuck 12 from the detection result of the detection section 7. A determination unit 14 for making a determination is provided.
In the holding device 10 according to the present embodiment, the sealed space 5 formed between the suction holding part 4 and the suction surface of the chuck 12 communicates with the vacuum piping 8 and is connected to the vacuum source 9. .

Then, the pressure in the sealed space 5 is reduced by the vacuum source 9 via the vacuum piping 8 to form a negative pressure state, so that the suction holding section 4 suction-holds the chuck 12 .
In the holding device 10 according to this embodiment, a pressure gauge is used as the detection section 7, and the detection section 7 detects the pressure (physical quantity) inside the vacuum pipe 8.

The holding device 10 according to the present embodiment includes two suction holding parts 4 and two mounting parts 6 having the same shape as the suction holding parts 4 and provided for horizontally holding the chuck 12. .
Then, when the chuck 12 is placed on the main body 1, one of the two suction holding parts 4 and the two placing parts 6 faces (contacts) the sealing detection structure 13 formed on the chuck 12. They are arranged with 90 degree rotational symmetry, that is, at each of the four corners. Please also refer to FIGS. 3 and 4(a) for the arrangement of the suction holding part 4 and the placing part 6.

Note that when arranging the chuck 12 on the main body portion 1, an auxiliary positioning mechanism such as a pin may be separately provided.
Further, in the holding device 10 according to the present embodiment, the suction holding section 4 and the mounting section 6 are made of, for example, resin.

As shown in FIG. 2, the chuck 12 held by suction in the holding device 10 according to the present embodiment has a square shape.
Further, two of the four corners of the surface to be attracted by the chuck 12 are provided with grooves extending in the angular direction, that is, extending at an angle of approximately 45 degrees with respect to the X axis and the Y axis, respectively. A groove 13 is provided as a sealing detection structure.
The sealing detection structure is not limited to the groove 13, but may also be a structure such as a through hole, an uneven shape such as a protrusion, an inclined shape including a tapered height change, etc. Since a plurality of grooves are usually formed for this purpose, it is preferable to use such grooves for seal detection.

FIG. 3 shows a front view of the suction surface of the chuck 12, the suction holding part 4, and the mounting part 6 when the chuck 12 is placed in the correct position in the holding device 10 according to the present embodiment.

As shown in FIG. 3, when the chuck 12 is placed in the correct position in the holding device 10 according to the present embodiment, the two suction holding parts 4 and the two grooves 13 do not face each other, i.e. The two placement parts 6 and the two grooves 13 face each other.
As a result, the sealed space 5 formed between the suction surface of the chuck 12 and the two suction holding parts 4 is sealed, so that the suction holding parts 4 can suction the chuck 12.

FIGS. 4(a) and 4(b) respectively show the suction surface of the chuck 12, the suction holding part 4, and the mounting part 6 when the chuck 12 is placed in an incorrect position in the holding device 10 according to the present embodiment. A front view and an enlarged sectional view are shown.

As shown in FIGS. 4(a) and 4(b), when the chuck 12 is placed in the wrong position in the holding device 10 according to this embodiment, at least one of the two suction holding parts 4 , facing at least one of the two grooves 13.
At this time, the sealed space 5 formed between the suction surface of the chuck 12 and the suction holding part 4 communicates with the outside through the groove 13, that is, the outside air is introduced into the sealed space 5 from the outside through the groove 13. flows in (leak), making it impossible to seal the sealed space 5.
Therefore, it is no longer possible to form a negative pressure state in the sealed space 5, and the suction holding section 4 is no longer able to suction the chuck 12.

As can be seen from FIGS. 3 and 4(a), even if the square chuck 12 is rotated from the correct position to any angle of 90 degrees, 180 degrees, or 270 degrees, the two suction holding parts 4 At least one of the grooves 13 faces at least one of the two grooves 13.
Therefore, in the holding device 10 according to the present embodiment, in the square chuck 12, one arrangement is recognized as the correct arrangement among the four arrangements with rotational symmetry of 90 degrees, and the remaining three arrangements are recognized as the incorrect arrangement. can be recognized.

FIG. 5 shows a flowchart when holding the chuck 12 by suction in the holding device 10 according to the present embodiment.

As shown in FIG. 5, when the chuck 12 is placed on the main body 1 of the holding device 10 (step S1), the suction holding section 4 starts suctioning the chuck 12 (step S2).
Then, the detection unit 7 measures the pressure inside the vacuum piping 8 (step S3), and determines whether the pressure inside the vacuum piping 8 is normally negative (is the pressure less than a predetermined threshold)? It is determined whether the chuck 12 is normally attracted by the holding section 4 (step S4).

If it is determined that the suction of the chuck 12 is not normal (for example, if the pressure in the vacuum piping 8 remains close to atmospheric pressure even after a predetermined period of time has passed since the start of depressurization), (step S4) No), a suction error is reported (step S5), and the process returns to step S1.
On the other hand, if it is determined that the suction of the chuck 12 is normal (Yes in step S4), the holding operation is completed and a chuck maintenance operation is performed (step S6).

In this manner, the holding device 10 according to the present embodiment can prevent the chuck maintenance operation from being performed while the chuck 12 is incorrectly placed on the main body 1.
This can prevent the chuck 12 that has undergone the chuck maintenance operation from being transported to the substrate stage 913 and being held on the substrate stage 913 in an incorrect position.

As described above, according to the holding device 10 according to the present embodiment, when suctioning the held member having the sealing detection structure formed on the suction surface, the sealing detection structure and the suction holding part face each other. By doing so, it is possible to detect that the held member is incorrectly placed.
In other words, according to the holding device 10 according to the present embodiment, it is possible to detect that the held member is correctly arranged, that is, that the held member is arranged in a predetermined state (predetermined orientation). .
This can prevent the process from proceeding with the held member erroneously held by the holding device 10, and prevent the held member from being damaged due to collision with the outside, etc. be able to.

Further, according to the holding device 10 according to the present embodiment, the conventionally used suction holding means is also used to detect incorrect placement of the held member, so the above-mentioned A holding device having the following effects can be realized.

Note that in the holding device 10 according to the present embodiment, a pressure gauge is used as the detection unit 7, but the detection unit 7 is not limited to this, and for example, a flow meter or the like may be used as the detection unit 7 to The flow rate from the sealed space 5 formed between the part 4 and the part 4 may be measured.
Further, the sealing detection structure 13 may be a structure incorporated into a member such as a press-fitted part, as long as it does not deviate from the adsorbed surface of the member to be held.

Further, in the holding device 10 according to the present embodiment, a plate member is used as the suction holding section 4, but the present invention is not limited to this.

Further, in the holding device 10 according to the present embodiment, two suction holding parts 4 are used, but the present invention is not limited to this, and if at least one suction holding part 4 is provided, at least one error of the held member can be avoided. placement can be detected.

Further, in the holding device 10 according to the present embodiment, the suction holding part 4 is provided on the surface of the main body part 1, but the present invention is not limited to this. The suction holding part 4 may be provided in the main body part 1 so that the surfaces in contact with each other are the same surface.

Furthermore, in the holding device 10 according to the present embodiment, the chuck 12 has a square shape, and the suction holding part 4, the placing part 6, and the sealing detection structure 13 are arranged 90 degrees rotationally symmetrically. Not limited. In the holding device 10 according to the present embodiment, the suction holding part 4, the mounting part 6, and the sealing detection structure 13 may be respectively arranged so as to correspond to the shape of the member to be held, such as a rectangle or a circle, for example.

Further, in the holding device 10 according to the present embodiment, the member to be held is placed on the main body 1 and the member to be held is held by suction from below, but the present invention is not limited to this. You can also hold it by suction from both sides.

Further, in the holding device 10 according to the present embodiment, the suction holding part 4 for suction-holding the held member is provided on the main body part 1, but the invention is not limited to this, and the suction holding part 4 is provided on the held member. I don't mind.

Further, in the holding device 10 according to the present embodiment, only one system is provided in which the detection unit 7 and the vacuum piping 8 as a sealing detection mechanism are commonly connected to each of the two suction holding units 4; Not limited.
For example, by providing two systems of detection section 7 and vacuum piping 8 that are separately connected to each of the two suction and holding sections 4, the arrangement of the held member can be determined in more detail.

In addition, although an example of suction and holding when cleaning the chuck 12 has been shown above, the present invention is not limited to this, and the same applies when initial mounting is performed after the chuck 12 is carried in from the outside via the chuck maintenance mechanism 909. It can be implemented. Furthermore, the present invention can be applied not only to the chuck 12 but also to the initial mounting of the reticle 903 and the substrate 908.

Moreover, although an example in which the holding device 10 according to the present embodiment is provided in the chuck maintenance mechanism 909 has been described above, the holding device 10 according to the present embodiment is not limited thereto, and may be provided in the substrate holding unit 917.
In this case, for example, after replacing the chuck 12, it is possible to detect incorrect placement during initial mounting directly on the substrate holding unit 917 without using the chuck maintenance mechanism 909.
Thereby, failure to suction and hold the substrate 908 on the substrate holder 917 can be prevented.

[Second embodiment]
FIG. 6 shows a schematic cross-sectional view of the holding device 20 according to the second embodiment. Moreover, FIGS. 7A and 7B respectively show the suction surfaces of the chucks 22a and 22b, the suction holding part 4, and A front view of the mounting section 6 is shown.
In addition, since the holding device 20 according to this embodiment has the same configuration as the holding device 10 according to the first embodiment, the same members are given the same reference numerals and the explanation will be omitted.

As shown in FIGS. 7(a) and 7(b), the chucks 22a and 22b each have grooves 23a and 23b as a detection structure at one corner of the four corners of the surface to be attracted. It is provided.
As shown in FIG. 6, in the holding device 20 according to the present embodiment, unlike the holding device 10 according to the first embodiment, the suction holding part 4 faces the sealing detection structure 23a or 23b. This state is defined as a state in which the chuck 22a or 22b is correctly placed.

When the chuck 22a or 22b is placed in the correct position in this manner, when suction is performed in the holding device 20 of this embodiment, outside air flows into the sealed space 5 from the sealing detection structure 23a or 23b.
As a result, a pressure loss occurs within the vacuum pipe 8, and the pressure detected by the detection unit 7 increases.

In the holding device 20 according to this embodiment, as shown in FIGS. 7(a) and 7(b), the amount of pressure loss is different depending on the type of chuck, that is, in the chucks 22a and 22b. The sealing detection structures 23a and 23b have different volumes.
That is, in the holding device 20 according to the present embodiment, grooves 23a and 23b are provided as detection structures on the attracted surfaces of the chucks 22a and 22b, respectively.
In order to make the volumes of the grooves 23a and 23b different from each other, at least one of the length, width, and depth of the grooves 23a and 23b may be made different from each other.

When suction is applied to the chuck 22a or 22b in the holding device 20 according to the present embodiment, the pressure inside the vacuum pipe 8 is detected by the detection unit 7.
At this time, since the volumes of the grooves 23a and 23b provided on the suction surfaces of the chucks 22a and 22b are different from each other, the pressure inside the vacuum piping 8 detected when suction is applied to the chucks 22a and 22b, respectively. will be different from each other.

Therefore, in the holding device 20 according to the present embodiment, the pressure when suction is performed by the suction holding part 4 is measured in advance for each member to be held, and the measured value is associated with the member to be held. It is stored in a storage unit (not shown).
When suction is applied to the held member, the held member can be identified by comparing (referring to) the value detected by the detection unit 7 and the value stored in the storage unit. .

As described above, according to the holding device according to the present embodiment, the held members can be identified by providing detection structures having different volumes on the suction surfaces of each of the plurality of held members.
In other words, according to the holding device according to the present embodiment, it is possible to detect that the correct member to be held is placed, that is, that the member to be held is placed in a predetermined state.
Thereby, it is possible to prevent a held member different from a desired held member from being erroneously mounted.

Although the holding device 20 according to the present embodiment is described using two types of chucks 22a and 22b, the present invention is not limited to this, and by providing three or more detection structures with different volumes, three or more types of chucks 22a and 22b can be used. Individual chucks can be identified from more than one chuck.

Furthermore, in the holding device 20 according to the present embodiment, if there are variations in the pressure generated by the pressure source, the pressure value detected when holding the chuck by suction will change, so there is a risk that the chuck may be erroneously identified. There is.
Therefore, in order to correct variations in the generated pressure due to the pressure source, it is preferable to further provide means such as a regulator or an air tank.

Furthermore, in the holding device 20 according to the present embodiment, the value detected by the detection unit 7 is not limited to pressure, but may be any other value such as flow rate as long as it changes in response to the occurrence of pressure loss.

[Third embodiment]
FIGS. 8(a) and 8(b) respectively show the suction surface of the chuck 32, the suction holding parts 4a and 4b, and the mounting part 6 when the chuck 32 is placed in the correct position in the holding device according to the third embodiment. A front view and a partially enlarged front view are shown.
Moreover, FIGS. 8(c) and 8(d) respectively show the relationship between the suction surface of the chuck 32 and the suction holding parts 4a and 4b when the chuck 32 is placed in the correct position in the holding device according to the third embodiment. An enlarged cross-sectional view is shown.
The holding device according to this embodiment has the same configuration as the holding device 10 according to the first embodiment and the holding device 20 according to the second embodiment, so the same members are given the same reference numbers. The explanation will be omitted.

As shown in FIG. 8(a), the chuck 32 has grooves 33a (first grooves) and grooves 33b as detection structures at two corners of the four corners of the surface to be attracted. (second groove) is provided.
Specifically, the groove 33a is configured as a groove that extends along the X-axis direction and whose width narrows linearly (more specifically, in a tapered shape), and the groove 33b is configured as a groove that extends along the X-axis direction and narrows linearly (more specifically, in a tapered shape). It consists of a pair of grooves spaced apart from each other by a predetermined distance equal to or longer than the length of the groove.
In the holding device according to the present embodiment, unlike the holding device 10 according to the first embodiment, the suction holding part 4a faces the groove 33a as shown in FIG. 8(a). It is assumed that the chuck 32 is correctly placed.

As shown in FIGS. 8(a) to 8(c), when the chuck 32 is placed in the correct position, when suction is performed in the holding device of this embodiment, the internal space 5a of the suction holding part 4a Outside air flows into the groove 33a.
As a result, a pressure loss occurs within the vacuum pipe 8, and the pressure detected by the detection unit 7 increases.
On the other hand, as shown in FIG. 8(d), since the suction holding part 4b does not face the groove 33b, outside air does not flow into the internal space 5b of the suction holding parts 4a and 4b from the groove 33b, and the suction holding part 4b does not face the groove 33b. The internal space 5b of the portion 4b is sealed.

At this time, when the chuck 32 is displaced in the X-axis direction, the volume through which the groove 33a communicates with the outside changes linearly depending on the position of the chuck 32, so the pressure detected by the detection unit 7 changes linearly. .

FIGS. 9A and 9B are enlarged sectional views of the suction surface of the chuck 32 and the suction holding parts 4a and 4b, respectively, when the chuck 32 is placed in the wrong position in the holding device according to the present embodiment. It shows.

In the holding device according to this embodiment, if the chuck 32 is displaced by a predetermined distance p or more in the X-axis direction from the correct position as shown in FIGS. The situation is as follows.
When the chuck 32 is placed in the wrong position as described above, if suction is performed in the holding device of this embodiment, the internal space 5a of the suction holding part 4a will be removed as shown in FIG. 9(b). In addition, outside air also flows into the internal space 5b of the suction holding part 4b from the groove 33b.
Therefore, the pressure within the vacuum piping 8 increases rapidly compared to when the chuck 32 is placed in the correct position, and exceeds a predetermined threshold value.
At this time, the holding device according to the present embodiment is configured to determine that the suction state of the chuck 32 is not normal, and to issue a suction error alert.

Therefore, in the holding device according to this embodiment, when the chuck 32 is displaced from the correct position in the X-axis direction by a distance less than the predetermined distance p, the volume through which the tapered groove 33a communicates with the outside is linearly Enlarge or reduce.
Along with this, the value of the pressure inside the vacuum pipe 8 detected by the detection unit 7 also changes linearly.

Therefore, in the holding device according to this embodiment, the linear relationship between the amount of displacement of the chuck 32 in the X-axis direction and the pressure inside the vacuum piping 8 is stored in advance in a storage unit (not shown) based on measured values.
Specifically, in the X-axis direction, the pressure values when one end and the other end of the suction holding part 4a reach one end and the other end of the groove 33a, respectively, are measured as the maximum value and the minimum value. put. Then, it is sufficient to measure at least the value of the pressure when the chuck 32 is placed at a predetermined reference position in the X-axis direction.
Then, when the chuck 32 is held by suction, the amount of displacement of the chuck 32 can be calculated by comparing the value stored in the storage section with the value detected by the detection section 7.

Then, as shown in FIGS. 9(a) and 9(b), when the chuck 32 is displaced by a predetermined distance p or more, one end of the suction holding part 4b moves into one of the grooves 33b in the X-axis direction. Beyond the end, the internal space 5b of the suction holding part 4b communicates with one of the grooves 33b.
At this time, outside air flows into the sealed internal space 5b of the suction holding part 4b through one of the grooves 33b.

Therefore, the value of the pressure inside the vacuum pipe 8 detected by the detection unit 7 rapidly increases toward atmospheric pressure. At this time, the holding device according to the present embodiment determines that the suction state of the chuck 32 is not normal, that is, exceeds a predetermined range, by providing a threshold value for detecting a sudden increase in pressure. Alerts a suction error and stops the subsequent process.

As described above, according to the holding device according to the present embodiment, the amount of displacement of the held member can be calculated by providing the tapered groove on the suction surface of the held member. Moreover, by further providing a pair of grooves corresponding to the above-mentioned tapered grooves, it is also possible to detect that the held member has been displaced beyond an allowable amount.
In other words, according to the holding device according to the present embodiment, it is possible to detect that the held member is correctly placed, that is, that the held member is placed in a predetermined state (predetermined position).
This makes it possible to detect incorrect mounting due to displacement of the held member, and after making corrections based on the calculated amount of displacement, it is possible to mount the held member on the substrate holder 917.

Note that in the holding device according to the present embodiment, the groove 33a whose width changes in a tapered shape along the X-axis direction is provided on the suction surface of the chuck 32; A groove whose depth changes in a tapered manner may be provided.

Furthermore, in the holding device according to the present embodiment, the value detected by the detection unit 7 is not limited to pressure, but may be any other value such as flow rate as long as it changes depending on the occurrence of pressure loss.

Furthermore, in the holding device according to this embodiment, if there are variations in the pressure generated by the pressure source, the pressure value detected when the chuck is held by suction will change, so the amount of displacement of the chuck may be calculated incorrectly. There is a risk of it getting lost.
Therefore, in order to correct variations in the generated pressure due to the pressure source, it is preferable to further provide means such as a regulator or an air tank.

Further, in the first to third embodiments described above, a detection structure for each purpose is provided on the suction surface of the member to be held, and a suction holding part and a detection part are provided in the holding device so as to correspond to each detection structure. It is possible to use them together.

Although preferred embodiments have been described above, the invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist thereof.

Moreover, although the case where the holding device according to this embodiment is provided in the exposure apparatus 900 has been described above, the present invention is not limited to this.
For example, the holding device according to this embodiment may be a pattern forming device that forms a resist (imprint material) pattern on a substrate using an imprint method, or a pattern forming device that forms a pattern on a substrate by irradiating a laser beam or a charged particle beam. It can also be applied to pattern forming apparatuses.

[Embodiment related to article manufacturing method]
Using an exposure apparatus equipped with a holding device according to this embodiment, an article is manufactured by exposing a substrate coated with a photosensitive agent (wafer, glass substrate, etc.) and developing the exposed substrate (photosensitive agent). process and processing the developed substrate in other known processes.
Other well-known processes include fabricating articles such as etching, resist stripping, dicing, bonding, packaging, and the like.
According to the article manufacturing method according to the present embodiment, it is possible to manufacture articles of higher quality than before.

4 Adsorption holding part 5 Sealed space (space)
7 Detection section (measurement section)
10 Holding device 12 Chuck (object to be held)
13 Sealing detection structure (predetermined structure)

Claims (16)

a suction holding unit that suction-holds the object to be held by applying negative pressure to a space formed between the object to be held and the surface to be attracted;
a measurement unit that measures the pressure in the space or the flow rate from the space ;
a determination unit that determines whether a measured value of the pressure or the flow rate by the measurement unit is less than a predetermined threshold value when adsorbing the object to be held having a predetermined structure formed on the adsorption surface; ,
Equipped with
With respect to the object to be held, which is arranged in a predetermined direction where the suction and holding section and the predetermined structure of the object to be held do not face each other, the suction and holding section makes the space a negative pressure;
When the held object is arranged in an orientation different from the predetermined direction in which the suction holding section and the predetermined structure of the held object face each other, the space is connected to the outside through the predetermined structure. A holding device characterized by communicating with each other . The predetermined structure and the suction holding part are arranged so that the space communicates with the outside by facing each other, and includes a storage part that stores the measurement value measured when the object to be held is suctioned. ,
The holding device according to claim 1, wherein the judgment section judges the type of the object to be held by referring to the measured value stored in the storage section. 3. The holding device according to claim 2 , wherein the predetermined structure differs depending on the type of the object to be held. 4. The holding device according to claim 1 , wherein the predetermined structure is a groove or a through hole. A first groove, which is formed on the suction surface and extends in a predetermined direction and whose volume changes linearly, faces the suction holding part, so that the space communicates with the outside. a storage unit that stores the measured value measured when adsorbing the held object,
The holding device according to claim 1, wherein the determination unit determines the position of the held object in the predetermined direction by referring to the measured value stored in the storage unit. 6. The holding device according to claim 5 , wherein the first groove has a tapered width or depth that changes in the predetermined direction. The determining unit is arranged such that a second groove, which is a pair of grooves formed on the suction target surface and spaced apart from each other in the predetermined direction, faces the suction holding unit so that the space communicates with the outside. When the object to be held is adsorbed, it is determined that the position of the object to be held in the predetermined direction exceeds a predetermined range when the measured value becomes a predetermined threshold value or more. The holding device according to claim 5 or 6 . The holding device according to any one of claims 1 to 7 , wherein the object to be held is a chuck. a suction holding unit that suction-holds the object to be held by applying negative pressure to a space formed between the object to be held and the surface to be attracted;
a measurement unit that measures the pressure in the space or the flow rate from the space;
When adsorbing the object to be held, which has a predetermined structure formed on the adsorption surface, it is determined whether the object to be held is arranged in a predetermined state based on the measured value of the pressure or the flow rate by the measurement unit. A judgment department that
a storage unit that stores the measurement value measured when adsorbing the object, which is arranged such that the predetermined structure and the suction holding unit face each other so that the space communicates with the outside;
Equipped with
The holding device is characterized in that the determination unit determines the type of the object to be held by referring to the measured value stored in the storage unit. a suction holding unit that suction-holds the object to be held by applying negative pressure to a space formed between the object to be held and the surface to be attracted;
a measurement unit that measures the pressure in the space or the flow rate from the space;
When adsorbing the object to be held, which has a predetermined structure formed on the adsorption surface, it is determined whether the object to be held is arranged in a predetermined state based on the measured value of the pressure or the flow rate by the measurement unit. A judgment department that
A first groove, which is formed on the suction surface and extends in a predetermined direction and whose volume changes linearly, is arranged so that the space communicates with the outside by facing the suction holding part. a storage unit that stores the measured value measured when adsorbing the held object;
Equipped with
The holding device is characterized in that the determination unit determines the position of the held object in the predetermined direction by referring to the measured value stored in the storage unit. a suction holding unit that suction-holds the chuck by applying negative pressure to a space formed between the chuck and the suction surface;
a measurement unit that measures the pressure in the space or the flow rate from the space;
a determining unit that determines whether the chuck is arranged in a predetermined state based on the measured value of the pressure or the flow rate by the measuring unit when adsorbing the chuck having a predetermined structure formed on the adsorbed surface; ,
A holding device comprising: A chuck that is suction-held by a holding device having a suction-holding part ,
has a predetermined structure,
When the chuck is placed on the holding device in a predetermined direction in which the suction holding part and the predetermined structure do not face each other, a space formed between the suction surface of the chuck and the suction holding part is under negative pressure. the chuck is held by suction on the holding device by
When the chuck is placed on the holding device in an orientation different from the predetermined orientation in which the suction holding part and the predetermined structure face each other, the predetermined structure allows the space to communicate with the outside. Chuck says. The chuck according to claim 12, wherein the predetermined structure is a groove or a through hole. An exposure apparatus that exposes the substrate using exposure light from a light source so as to transfer a pattern formed on the original onto the substrate,
An exposure apparatus comprising the holding device according to any one of claims 1 to 11. 15. The exposure apparatus according to claim 14 , wherein the holding device is provided in a chuck maintenance section. exposing the substrate using the exposure apparatus according to claim 14 or 15 ;
Developing the exposed substrate;
processing the developed substrate to obtain an article;
A method for manufacturing an article characterized by having the following.

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